Electrode rod, quadrupole rod assembly, mass spectrometry driving method, and mass spectrometer

Abstract

The application relates to the technical field of mass spectrometers, and discloses an electrode rod, a quadrupole rod assembly, a mass spectrometer driving method and a mass spectrometer. The electrode rod comprises an insulating heat-conducting rod body, an electrode layer and a circuit layer, the circuit layer comprises an active radio frequency driving circuit with a driving chip, the insulating heat-conducting rod body comprises a first side face for being directed towards the inner side of the quadrupole rod assembly and a second side face for being directed towards the outer side of the quadrupole rod assembly; the electrode layer is arranged on the first side face, and the cross-sectional shape of the outer surface of the electrode layer is a convex curved surface; the circuit layer is arranged on the second side face; and the active radio frequency driving circuit is electrically connected to the electrode layer. The driving chip on the second side face will generate a high-voltage digital square wave voltage applied to the electrode layer, so as to form an electric field channel in the quadrupole rod assembly. This eliminates the existing external cable connected to the electrode rod in the vacuum cavity, thereby significantly reducing the stray capacitance of the quadrupole rod assembly of the mass spectrometer, and simultaneously reducing or eliminating the reactive power loss.

Description

Technical Field

[0001] This invention relates to the field of mass spectrometry, specifically to an electrode rod, a quadrupole assembly having the electrode rod, a mass spectrometry driving method, and a mass spectrometer. Background Technology

[0002] Quadrupole mass spectrometers are among the most widely used mass spectrometry instruments. Existing quadrupole assemblies consist of four parallel, symmetrical metal electrode rods. DC and RF voltages generated by a DC voltage source and an RF signal source outside the vacuum chamber are transmitted via cables to the electrode rods inside the vacuum chamber. This applies a combined DC and RF voltage to the four electrode rods to create an electric field. Opposite electrode rods are connected and subjected to the same voltage, while adjacent electrode rods have voltages of equal magnitude but opposite polarity. Thus, when an ion beam passes through, under a specific combination of RF and DC voltages, only ions with a specific mass-to-charge ratio can stably pass through the electric field and reach the detector, while other ions are filtered out due to excessive amplitude, thereby achieving mass selection of ions.

[0003] However, existing quadrupole mass spectrometers have several drawbacks, such as parasitic capacitance and giant power supply defects. External cables introduce parasitic capacitances as high as 100-150 pF / m, and the RF power supply must drive enormous reactive power (hundreds of watts), severely limiting portability and the possibility of evolution to higher frequencies. Furthermore, existing quadrupole assemblies have certain assembly tolerances, which can induce 3D edge fields at the quadrupole's inlet and outlet regions, thus significantly affecting ion transport efficiency. Summary of the Invention

[0004] In view of at least some of the problems existing in the prior art, the purpose of the present invention is to significantly reduce the parasitic capacitance of the quadrupole assembly of the mass spectrometer and reduce or eliminate reactive power loss.

[0005] To achieve the above objectives, in a first aspect, the present invention provides an electrode rod for forming a quadrupole assembly of a mass spectrometer. The electrode rod includes an insulating and thermally conductive rod body, an electrode layer, and a circuit layer. The insulating and thermally conductive rod body includes a first side facing inward toward the quadrupole assembly and a second side facing outward toward the quadrupole assembly. The electrode layer is disposed on the first side, and the cross-sectional shape of the outer surface of the electrode layer is an outwardly convex curved surface. The circuit layer is disposed on the second side, and the circuit layer includes an active radio frequency driving circuit with a driving chip, the active radio frequency driving circuit being electrically connected to the electrode layer.

[0006] In this electrode rod, since the active radio frequency drive circuit with a drive chip is arranged on the second side of the insulating and heat-conducting rod facing the outside of the quadrupole assembly and electrically connected to the electrode layer on the first side, the drive chip on the second side will generate a high voltage digital square wave voltage applied to the electrode layer, thereby forming an electric field channel in the quadrupole assembly. This eliminates the existing external cable connected to the electrode rod in the vacuum cavity, thereby significantly reducing the parasitic capacitance of the quadrupole assembly of the mass spectrometer, while reducing or eliminating reactive power loss.

[0007] In some implementations, the circuit layer is encapsulated using an inorganic nanolaminate.

[0008] In some embodiments, the inorganic nanolaminated film comprises alternating hafnium dioxide and aluminum oxide layers deposited by atomic layer deposition.

[0009] In some embodiments, the cross-sectional shape of the first side surface is the same as that of the convex curved surface, such that the electrode layer is a plating layer on the first side surface.

[0010] In some embodiments, the convex surface is a hyperboloid or a partially cylindrical surface.

[0011] In some embodiments, when the convex surface is a partially cylindrical surface, the radius of the partially cylindrical surface is configured such that the ratio of the radius to the radius of the inscribed circle of the electric field of the quadrupole assembly is between 1.12 and 1.15, and the driving chip is configured to output a high-frequency digital square wave that causes the ions to run in the higher-order stable region of the electric field.

[0012] In some embodiments, the insulating heat-conducting rod body comprises aluminum nitride ceramic material.

[0013] In some embodiments, the insulating heat-conducting rod body comprises an aluminum nitride-boron nitride composite ceramic material.

[0014] In some embodiments, an active transition metal layer is disposed on the second side, wherein the circuit layer is disposed on the active transition metal layer.

[0015] In some embodiments, a two-dimensional dielectric material buffer layer is disposed on the second side, and the circuit layer and the active radio frequency driving circuit are disposed on the two-dimensional dielectric material buffer layer.

[0016] In some embodiments, the two-dimensional dielectric material buffer layer comprises hexagonal boron nitride material.

[0017] In some embodiments, the driver chip is in the form of a bare wafer and is disposed on the two-dimensional dielectric material buffer layer through a nano-silver sintering layer or a wire bonding layer.

[0018] In some embodiments, the driver chip includes a gallium nitride high electron mobility transistor or a silicon carbide metal oxide semiconductor field-effect transistor.

[0019] In some implementations, the circuit layer includes a metallized circuit layer.

[0020] In some embodiments, the effective field length of the electrode rod is 100-120 mm, and the field radius is 3.0-4.0 mm.

[0021] In some embodiments, the electrode layer is divided into multiple independent electrode segments along the axial direction of the electrode rod, and there is an insulating gap between adjacent electrode segments; multiple independent circuit layers are arranged on the second side; wherein each active radio frequency drive circuit is electrically connected to the corresponding electrode segment.

[0022] In some embodiments, the first electrode segment is configured to output a pure radio frequency digital square wave with an equal duty cycle of 50:50 as a pre-filter electrode, and the last electrode segment is configured to output a pure radio frequency digital square wave with an equal duty cycle of 50:50 as a post-filter electrode. Other electrode segments can independently output waveforms with non-equal duty cycles or preset frequencies to form one or more different functional areas on the electrode rod.

[0023] In some implementations, the functional area includes at least one of a kinetic energy cooling area, a high-resolution isolation area, and an axial repulsion area.

[0024] In some embodiments, the insulation gap is 0.5-1.0 mm.

[0025] In some embodiments, the multiple circuit layers are encapsulated by an inorganic nanolaminated film, and the insulating gaps are covered with an inorganic nanolaminated film.

[0026] In some embodiments, a high-voltage DC bus is arranged on the second side, and a plurality of the active radio frequency drive circuits are connected in parallel to the high-voltage DC bus.

[0027] In some embodiments, the electrode rod includes an optical distribution network for low-voltage logic power supply and control signal transmission, the optical distribution network being configured to distribute optical pulses from the backbone fiber to an optical receiving module corresponding to each of the electrode segments.

[0028] In some embodiments, the optical distribution network includes cascaded optical splitters or planar optical waveguides arranged on the second side.

[0029] In some implementations, the circuit layer includes a local high-frequency decoupling capacitor network surrounding the driver chip, and the circuit layer integrates a miniature capacitor voltage divider.

[0030] In some embodiments, the second side is provided with multiple independent resistance heating circuits and a distributed temperature sensor array, wherein the multiple independent resistance heating circuits can be controlled by an external control unit. The external control unit is configured to generate a differential feedforward signal in advance based on the frequency and duty cycle parameters of the driving square wave to be used by the driving chip and the predicted heterogeneous transient heat dissipation distribution, and to synchronously and inversely adjust the power of the multiple resistance heating circuits based on the differential feedforward signal to maintain the electrode rod as a whole in an absolutely isothermal environment under vacuum insulation.

[0031] In some implementations, the absolute isotherm range is 100°C ± 0.1°C.

[0032] In some implementations, when multiple independent resistance heating circuits are controlled by an external control unit, the control unit is configured to adaptively switch physical boundary conditions based on the thermal conductivity and heat capacity of the insulating heat-conducting rod material to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal.

[0033] In a second aspect, the present invention provides a quadrupole assembly for forming a mass spectrometer, the quadrupole assembly comprising four or more electrode rods as described in any of the first aspects, wherein the four electrode rods are arranged parallel to each other, each electrode layer faces the inner side of the quadrupole assembly, and each circuit layer faces the outer side of the quadrupole assembly to form an electric field channel.

[0034] In this quadrupole assembly, as described in the first aspect above, the active radio frequency drive circuit with a drive chip is arranged on the second side of the insulating and thermally conductive rod facing the outside of the quadrupole assembly and electrically connected to the electrode layer on the first side. In this way, the drive chip on the second side will generate a high voltage digital square wave voltage applied to the electrode layer, thereby forming an electric field channel in the quadrupole assembly. This eliminates the existing external cable connected to the electrode rod in the vacuum cavity, thereby significantly reducing the parasitic capacitance of the quadrupole assembly of the mass spectrometer, while reducing or eliminating reactive power loss.

[0035] In some embodiments, an insulating base is provided at the end of the quadrupole assembly, wherein the insulating base is provided with an ion source lens, and the ends of the ion source lens, the insulating base, and the insulating heat-conducting rods of the four electrode rods are integrally formed.

[0036] Thirdly, the present invention provides a mass spectrometry driving method, the mass spectrometry driving method comprising: generating a high voltage digital square wave voltage applied to the electrode layer on the first side facing inward of the electrode rod on an active radio frequency driving circuit having a driving chip on the second side facing outward of each electrode rod of a quadrupole assembly to form an electric field channel; keeping the square wave voltage amplitude constant, and by changing the square wave frequency or adjusting the duty cycle, making the ions run in the stable region to screen ions with different mass-to-charge ratios.

[0037] In this mass spectrometry driving method, an active radio frequency driving circuit with a driving chip on the outer second side of each electrode rod of the quadrupole assembly generates a high-voltage digital square wave voltage applied to the electrode layer on the inner first side of the electrode rod through the circuit layer on the second side. Thus, the driving chip on the second side generates a high-voltage digital square wave voltage applied to the electrode layer, thereby forming an electric field channel in the quadrupole assembly. This eliminates the need for existing external cables connected to the electrode rods in the vacuum cavity, thereby significantly reducing the parasitic capacitance of the quadrupole assembly of the mass spectrometer and reducing or eliminating reactive power loss.

[0038] In some implementations, the square wave frequency of the active radio frequency driving circuit is dynamically switched based on different target precursor ions, so that low-mass ions are driven at high frequency and high-mass ions are driven at low frequency.

[0039] In some embodiments, a plurality of active radio frequency driving circuits on the second side generate high-voltage digital square wave voltages that are applied to a plurality of independent electrode segments formed by axially separating the electrode layer.

[0040] In some implementations, each electrode rod supplies power to multiple active radio frequency drive circuits via a high-voltage DC bus.

[0041] In some implementations, external optical pulses of the same origin are routed to each electrode segment via an optical distribution network on the electrode rod for low-voltage logic power supply and control signal transmission, so as to achieve electromagnetic isolation and trigger the corresponding driver chip.

[0042] In some implementations, when it is necessary to accelerate or repel ions axially or trap them in a potential well, a non-uniform duty cycle light trigger signal with a set gradual difference is applied to adjacent electrode segments. The time-averaged voltage shift caused by the generated asymmetric square wave is used to form a pseudo-DC electric field axial gradient.

[0043] In some implementations, the transient DC baseline drift caused by the asymmetric duty cycle command is predicted in real time by the control unit, and a reverse digital predistortion parameter is injected into the time domain of the generated optical trigger signal for compensation, so that the DC baseline returns to zero, thereby ensuring that the electric field conforms to the predetermined symmetry.

[0044] In some implementations, the control unit extracts the square wave frequency and duty cycle parameters to be used and predicts the heterogeneous transient heat dissipation distribution to generate a differential feedforward signal in advance. Based on the differential feedforward signal, the power of multiple independent resistance heating circuits on the second side is synchronously zoned and adjusted in reverse to maintain the electrode rod as a whole in an absolute isothermal environment under vacuum insulation.

[0045] In some implementations, the control unit is configured to adaptively switch physical boundary conditions based on the thermal conductivity and thermal capacity of the insulating thermally conductive rod material of the electrode rod, in order to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal.

[0046] Fourthly, the present invention provides a mass spectrometer, the mass spectrometer comprising any of the quadrupole components described in the second aspect above; or, the mass spectrometer is capable of implementing any of the mass spectrometry driving methods described in the third aspect above.

[0047] Other features and aspects of the invention will become apparent from the following detailed description and accompanying drawings. Attached Figure Description

[0048] Figure 1 This is a schematic diagram of the cross-section of an electrode rod at one location according to an embodiment of the present invention.

[0049] Figure 2 This is a top view of the first side of an electrode rod provided according to an embodiment of the present invention, showing an example electrode layer.

[0050] Figure 3 This is a side view of an electrode rod according to an embodiment of the present invention.

[0051] Figure 4 This is a top view of the second side of an electrode rod provided according to an embodiment of the present invention.

[0052] Figure 5 This is an end view structural schematic diagram of a quadrupole assembly provided according to an embodiment of the present invention.

[0053] Figure 6 This is a schematic diagram of a high-voltage DC power supply, low-voltage logic power supply and control signal transmission in a mass spectrometer according to an embodiment of the present invention.

[0054] Explanation of reference numerals in the attached figures 1-Electrode rod, 2-Insulated and heat-conducting rod body, 3-Electrode layer, 4-Circuit layer, 5-Driver chip, 6-Active radio frequency drive circuit, 7-Inorganic nano-laminated film, 8-Two-dimensional dielectric material buffer layer, 9-Nano silver sintered layer, 10-Electrode segment, 11-Insulation gap, 12-High voltage DC bus, 13-Quadrupole assembly, 14-Electric field channel, 15-Insulating base, 16-Electrical connection part, 21-First side surface, 22-Second side surface, 31-Convex curved surface. Detailed Implementation

[0055] Before explaining any embodiment of the invention in detail, it should be understood that the application of the invention is not limited to the details of the construction and arrangement of the components described in the following description or shown in the drawings. The invention can have other embodiments and can be practiced or implemented in various ways. Furthermore, it should be understood that the wording and terminology used herein are for descriptive purposes and should not be considered limiting.

[0056] In the following detailed description of embodiments, reference is made to the accompanying drawings, which form part of this description. The drawings illustrate specific embodiments in which the invention is implemented by way of example. The illustrated embodiments are not intended to be exhaustive of all embodiments according to the invention. It is understood that other embodiments may be utilized, and structural or logical changes may be made without departing from the scope of the invention. With respect to the drawings, directional terms such as "down," "up," "left," "right," etc., are used with reference to the orientation of the described drawings. Since components of embodiments of the invention can be implemented in various orientations, these directional terms are for illustrative purposes and not for limiting purposes. Therefore, the following specific embodiments are not intended to be limiting, and the scope of the invention is defined by the appended claims.

[0057] It should be noted that the electrode rod provided in the first aspect of this invention is used to assemble a quadrupole assembly of a mass spectrometer. That is, the electrode rod, as an accessory to the quadrupole assembly of a mass spectrometer, can be manufactured, used, sold, offered for sale, imported, etc., independently. (Reference) Figure 1 An example of an electrode rod is shown, the electrode rod 1 being used to form a quadrupole assembly of a mass spectrometer, and the electrode rod 1 including an insulating and thermally conductive rod body 2, an electrode layer 3, and a circuit layer 4. The circuit layer 4 includes an active radio frequency drive circuit 6 with a driver chip 5. The insulating and thermally conductive rod body 2 includes a first side surface 21 facing inward to the quadrupole assembly and a second side surface 22 facing outward to the quadrupole assembly. The electrode layer 3 is disposed on the first side surface 21, and the cross-sectional shape of the outer surface of the electrode layer 3 is an outwardly convex curved surface 31. The circuit layer 4 is disposed on the second side surface 22. The active radio frequency drive circuit 6 is disposed on the second side surface 22 and electrically connected to the electrode layer 3.

[0058] In this electrode rod 1, since the active radio frequency drive circuit 6 with drive chip 5 is arranged on the second side 22 of the insulating heat-conducting rod body 2 facing the outside of the quadrupole assembly and is electrically connected to the electrode layer 3 on the first side, the drive chip 5 on the second side 22 will generate a high voltage digital square wave voltage applied to the electrode layer 3, thereby forming an electric field channel in the quadrupole assembly. This eliminates the existing external cable connected to the electrode rod in the vacuum cavity, thereby significantly reducing the parasitic capacitance of the quadrupole assembly of the mass spectrometer, while reducing or eliminating reactive power loss.

[0059] In this electrode rod 1, the active radio frequency drive circuit 6 can be electrically connected to the electrode layer 3 in various ways, for example, see Figure 1 The active radio frequency drive circuit 6 can be electrically connected to the electrode layer 3 through the electrical connection part 16 at the edge of the insulating heat-conducting rod. The electrical connection part 16 may include, but is not limited to, an electrical connection piece or a plating layer.

[0060] In addition, the insulating heat-conducting rod 2 can simultaneously serve as a mechanical support for the electrode layer 3, a circuit board for the active radio frequency drive circuit 6 and the circuit layer 4, and a heat sink channel for the active radio frequency drive circuit 6.

[0061] Furthermore, in some embodiments of the electrode rod 1, the circuit layer 4 and the active radio frequency drive circuit 6 are encapsulated by an inorganic nanolaminate 7. In this way, the inorganic nanolaminate 7 can be used to eliminate organic gas release at high temperatures and prevent the active radio frequency drive circuit 6 with the drive chip 5 from inducing secondary electron emission and Paschen breakdown at the high-voltage square wave edge in the vacuum environment of the mass spectrometer, particularly preventing vacuum breakdown in the Paschen minimum region.

[0062] In this electrode rod 1, the materials forming the inorganic nanolaminated film 7 include, but are not limited to, alumina, zirconium oxide, silicon dioxide, zeolite, etc. For example, in some embodiments, the inorganic nanolaminated film 7 includes hafnium dioxide (HfO2) and aluminum oxide (Al2O3) layers arranged alternately by atomic layer deposition (ALD), thereby enhancing the resistance to thermal fatigue and suppressing field emission.

[0063] Furthermore, in some embodiments of the electrode rod 1, the electrode layer 3 can be a separate component with the desired convex curved surface 31, which can be attached to the first side surface 21 of the insulating heat-conducting rod body 2. Alternatively, in other embodiments, see [link to other embodiments]. Figure 1 The cross-sectional shape of the first side surface 21 is the same as that of the convex curved surface 31, so that the electrode layer 3 is a plating layer on the first side surface 21. In this way, by means of plating, the electrode layer 3 with the required convex curved surface 31 can be formed more easily on the first side surface 21.

[0064] Furthermore, in the electrode rod 1, the convex surface 31 can be a hyperboloid or a partial cylindrical surface. This partial cylindrical surface can be half a cylindrical surface or a cylindrical surface with other angles, such as a cylindrical surface in the range of 150°-170°. Of course, this angle is not limited to 150°-170° and can also be other degrees.

[0065] Furthermore, in the electrode rod 1, when the convex curved surface 31 is a partially cylindrical surface, the radius of the partially cylindrical surface is configured such that the ratio of the radius of the inscribed circle of the electric field of the quadrupole assembly is between 1.12 and 1.15, and the driving chip 5 is configured to output a high-frequency digital square wave that causes the ions to run in the higher-order stable region of the electric field (e.g., the third stable region) to actively compensate for the higher-order multipole field distortion caused by the geometric approximation of the partially cylindrical surface, thereby achieving ultra-high resolution.

[0066] Furthermore, in this electrode rod 1, the insulating heat-conducting rod body 2 can be made of any selected material, as long as it can simultaneously serve as the mechanical support for the electrode layer 3, the circuit board for the active RF drive circuit 6 and the circuit layer 4, and the heat sink channel for the active RF drive circuit 6. For example, in some embodiments, the insulating heat-conducting rod body 2 comprises aluminum nitride ceramic material, where aluminum nitride (AlN) possesses both extremely high thermal conductivity (170-230 W / m·K) and excellent dielectric strength, thus integrating the support, circuit board, and heat sink into one unit. Alternatively, in some embodiments, the insulating heat-conducting rod body 2 comprises aluminum nitride-boron nitride composite ceramic material (AlN-BN composite material), for example, the insulating heat-conducting rod body is made of aluminum nitride-boron nitride composite ceramic material containing a hexagonal boron nitride (h-BN) second phase. Thus, by introducing boron nitride (e.g., h-BN second phase), some thermal conductivity can be sacrificed (e.g., reduced to about 90-100 W / m·K) in exchange for excellent macroscopic conventional mechanical machinability and thermal shock resistance of the material.

[0067] Furthermore, the AlN-BN composite material contains uniformly distributed h-BN particles with excellent mechanical compliance and solid lubrication properties, and the thermomechanical stress at the interface has been largely absorbed by the insulating thermally conductive rod 2 itself. In this case, the placement of a thermal stress buffer layer on the insulating thermally conductive rod 2 is optional, further simplifying the packaging manufacturing process. Of course, a thermal stress buffer layer can be placed on the insulating thermally conductive rod 2 if needed.

[0068] Furthermore, in embodiments where the insulating heat-conducting rod body 2 comprises an aluminum nitride-boron nitride composite ceramic material, to further improve the adhesion of the circuit layer 4, particularly the adhesion of the circuit layer 4 formed by processes such as direct copper plating (DPC), an active transition metal layer is disposed on the second side surface 22 as a bonding seed layer, wherein the circuit layer 4 is disposed on the active transition metal layer. In this way, the complex grain boundaries at the bonding site are anchored by the active transition metal layer with strong bonding ability, ensuring the adhesion of the large-area circuit layer 4 under high-frequency thermal cycling. Of course, it is understood that the active transition metal layer includes, but is not limited to, titanium (Ti) or chromium (Cr).

[0069] Furthermore, in some embodiments of electrode rod 1, the circuit layer 4 and the active radio frequency drive circuit 6 can be directly arranged on the second side 22. Alternatively, in other embodiments, reference... Figure 1 A two-dimensional dielectric material buffer layer 8 is arranged on the second side 22, and the circuit layer 4 and the active radio frequency driving circuit 6 are arranged on the two-dimensional dielectric material buffer layer 8. In this way, the two-dimensional dielectric material buffer layer 8 acts as a thermal stress buffer layer, avoiding interface delamination between the circuit layer 4 and the active radio frequency driving circuit 6 and the insulating heat-conducting rod 2 due to the mismatch of the coefficients of thermal expansion (CTE) of different components under frequent temperature changes, thereby significantly improving the bonding between the circuit layer 4 and the active radio frequency driving circuit 6 and the insulating heat-conducting rod 2.

[0070] In some embodiments of the electrode rod 1, the two-dimensional dielectric material buffer layer 8 comprises hexagonal boron nitride. Hexagonal boron nitride can significantly improve the bonding between the circuit layer 4 and the active radio frequency drive circuit 6 and the insulating thermally conductive rod body 2. Of course, the two-dimensional dielectric material buffer layer 8 is not limited to hexagonal boron nitride; for example, in other embodiments, the two-dimensional dielectric material buffer layer 8 may include calcium fluoride (CaF2), rare earth fluorides (such as LaF3, YbF3), etc.

[0071] Furthermore, in some embodiments of the electrode rod 1, reference is made to... Figure 1 The driver chip 5 is in the form of a bare wafer and is arranged on a two-dimensional dielectric material buffer layer 8 through a mechanically compliant nano-silver sintered layer 9 or a wire bonding layer. In this way, it can effectively cope with the challenges of thermal fatigue and high voltage breakdown, and strongly suppress field emission and vacuum arc.

[0072] Furthermore, in some embodiments of the electrode rod 1, the driving chip 5 can be a wide bandgap semiconductor switching device, including but not limited to gallium nitride (GaN) high electron mobility transistor (HEMT) or silicon carbide (SiC) metal oxide semiconductor field-effect transistor (MOSFET).

[0073] Furthermore, in some embodiments of the electrode rod 1, the circuit layer 4 has various types and can be arranged on the second side 22 in various ways. For example, in some embodiments, the circuit layer 4 can be connected to the second side 22 via a substrate with a set thickness. Alternatively, in other embodiments, the circuit layer 4 includes a metallized circuit layer, that is, a metallized circuit is formed on the second side 22 or on the two-dimensional dielectric material buffer layer 8. The metallized circuit can be formed by methods including but not limited to direct copper plating (DPC), active metal soldering (AMB), or laser direct forming (LDS) processes.

[0074] Furthermore, the electrode rod 1 can have any desired effective field length and field radius. For example, in some embodiments, the effective field length of the electrode rod 1 is 100-120 mm, and the field radius is 3.0-4.0 mm. Of course, the electrode rod 1 can have other values ​​for the effective field length and field radius, and the present invention is not limited thereto.

[0075] Furthermore, in some embodiments of the electrode rod 1, the electrode layer extends continuously along the axial direction of the electrode rod 1 without being interrupted. Alternatively, in other embodiments, reference is made to... Figure 2 , Figure 3 and Figure 4 The electrode layer 3 is divided into multiple independent electrode segments 10 along the axial direction of the electrode rod 1, with an insulating gap 11 between adjacent electrode segments 10. Multiple independent circuit layers 4 are arranged on the second side 22, and each active RF drive circuit 6 is electrically connected to its corresponding electrode segment 10. By eliminating existing transmission cables and physically segmenting the electrode layer 3 of the electrode rod, the local equivalent load capacitance of each active RF drive circuit 6 is limited to an extremely low intrinsic space capacitance range (e.g., single-segment load capacitance less than 5 pF), greatly reducing parasitic capacitance. This significantly reduces the dynamic charging and discharging losses of the drive chip 5 (e.g., GaN), allowing the square wave edge to approach the ideal state and supporting ultra-high frequency operation far exceeding 5 MHz. Furthermore, the multiple independent electrode segments not only withstand the extreme transient anti-phase absolute potential difference generated when adjacent segments execute heterogeneous square waves in the Paschen minimum region of the vacuum environment to prevent arc breakdown, but also block thermal crosstalk between the drive chips 5 on the back, such as GaN bare wafers. In some embodiments, the electrode rod 1 with an effective field length of 100 mm to 120 mm can be configured to have 9 to 15 electrode segments.

[0076] In this electrode rod 1, the electrode layer 3 is divided into multiple independent electrode segments 10 along the axial direction of the electrode rod 1. Each electrode segment 10 can be configured according to actual needs to achieve different functions. For example, the first, last, and middle electrode segments are given a spatially specific control strategy. For example, in some embodiments, the first electrode segment is configured to output a pure radio frequency digital square wave with a uniform duty cycle of 50:50 as a pre-filter, and the last electrode segment is configured to output a pure radio frequency digital square wave with a uniform duty cycle of 50:50 as a post-filter. This can suppress edge field effects with zero hardware cost. At the same time, other electrode segments can independently output the same or different non-uniform duty cycles, or output waveforms with the same or different preset frequencies, to form one or more different functional regions on the electrode rod, thereby realizing multidimensional tandem mass spectrometry operation with extremely high spatial density.

[0077] Furthermore, in this electrode rod 1, the functional area includes at least one of a kinetic energy cooling area, a high-resolution isolation area, and an axial repulsion area. For example, other electrode segments can independently output waveforms with the same non-uniform duty cycle or the same preset frequency to form a kinetic energy cooling area, a high-resolution isolation area, or an axial repulsion area; or, other electrode segments can independently output waveforms with different non-uniform duty cycles or different preset frequencies to form a kinetic energy cooling area, a high-resolution isolation area, and an axial repulsion area.

[0078] Furthermore, in this electrode rod 1, the insulation gap 11 is 0.5-1.0 mm. This gap value can better withstand the extreme transient anti-phase absolute potential difference generated when adjacent segments execute heterogeneous square waves in the Paschen minimum region of a vacuum environment to prevent arc breakdown, while simultaneously blocking thermal crosstalk between the back drive chips 5, such as GaN bare wafers. Of course, the insulation gap 11 can also have other values, and the present invention is not limited to this.

[0079] Furthermore, in some embodiments of the electrode rod 1, reference is made to... Figure 3 Multiple circuit layers 4 and multiple active RF drive circuits 6 are encapsulated by an inorganic nanolaminated film 7, and the insulating gap 11 is covered with the inorganic nanolaminated film 7. In this way, the insulating gap 11, together with the inorganic nanolaminated film 7, not only further withstands the extreme transient anti-phase absolute potential difference generated when adjacent segments execute heterogeneous square waves in the Paschen minimum region of the vacuum environment to prevent arc breakdown, but also further blocks thermal crosstalk between the drive chips 5 on the back, such as GaN bare wafers.

[0080] Furthermore, in some embodiments of the electrode rod 1, reference is made to... Figure 4 and Figure 6A high-voltage DC bus 12 is arranged on the second side 22, and multiple active RF drive circuits 6 are connected in parallel to the high-voltage DC bus 12. Thus, because the high-voltage DC bus 12 is arranged on the second side 22, multiple external power supplies can be further eliminated, allowing all drive chips 5 (e.g., GaN drivers) to share a single high-precision DC line outside the vacuum cavity connected by the insulating base at the end of the quadrupole assembly (e.g., ...). Figure 6 (High-precision high-voltage DC power supply in the process). For example, in a quadrupole assembly, one end of the high-voltage DC bus 12 of each of the four poles is connected in parallel to a single external high-precision DC line at an insulating base.

[0081] Furthermore, in some embodiments of the electrode rod 1, see [link to documentation]. Figure 6 Electrode rod 1 includes an optical distribution network for low-voltage logic power supply and control signal transmission. The optical distribution network is configured to distribute optical pulses from the trunk fiber to the corresponding optical receiving module of each electrode segment 10. This allows for absolute electromagnetic isolation and picosecond-level phase alignment of multiple electrode segments by introducing Power over Fiber (PoF) and an internal vacuum optical distribution network, avoiding potential overload of the vacuum flange fiber caused by multiple electrode segments. For example, based on the optical distribution network, the mass spectrometer can use PoF technology to transmit weak logic signals and control clocks, while the optical waveguide enables absolute electromagnetic isolation between high and low voltages. Simultaneously, after the main fiber enters the vacuum, it is routed via a daisy-chain / star topology using an optical splitter. Utilizing the law of constant speed of light, single optical pulses arrive simultaneously at all nodes, such as optical receiving modules, with picosecond-level precision, achieving perfect synchronization of square wave flipping. For example, refer to... Figure 6 An external central field-programmable gate array (FPGA) emits co-source optical pulses, which are routed to each electrode segment with low loss via a vacuum optical distribution network to synchronously drive each electrode segment, thereby achieving 100% electromagnetic isolation and picosecond-level phase synchronization of high-voltage digital square waves in a vacuum filled with high-voltage radio frequency noise.

[0082] Of course, the optical distribution network in this electrode rod can be of various types, but no matter what type is used, as long as the above-mentioned function can be achieved, it is acceptable. For example, in some embodiments, the optical distribution network includes cascaded optical splitters or planar optical waveguides arranged on the second side to distribute the optical pulses of a single or a small number of trunk optical fibers to the optical receiving modules of each electrode segment, thereby achieving 100% electromagnetic isolation and picosecond-level phase synchronization of high-voltage digital square waves in a vacuum filled with high-voltage radio frequency noise.

[0083] Furthermore, in some embodiments, circuit layer 4, such as a metallized circuit layer, includes a local high-frequency decoupling capacitor network around each driver chip 5, and circuit layer 4 integrates a miniature capacitor voltage divider. In this way, the local high-frequency decoupling capacitor network can effectively eliminate conducted electromagnetic interference and signal crosstalk caused by heterogeneous RF operations on the high-voltage DC bus. This allows for the use of the high-voltage DC bus combined with the extremely low on-resistance of the driver chip to control the small voltage drop, ensuring the physical consistency of the square wave amplitude output from each electrode segment. Simultaneously, integrating a miniature capacitor voltage divider on circuit layer 4, such as a metallized circuit layer, allows for real-time sampling and feedback, and closed-loop fine-tuning of the local bias voltage, maintaining the absolute central symmetry of the electric field of the quadrupole assembly.

[0084] Furthermore, in some embodiments, the second side 22 is provided with multiple independent resistance heating circuits (not shown) and a distributed temperature sensor array (not shown), wherein the multiple independent resistance heating circuits can be controlled by an external control unit. The external control unit is configured to generate a differential feedforward signal in advance based on the frequency and duty cycle parameters of the driving square wave to be used by the driving chip 5, as well as the predicted heterogeneous transient heat dissipation distribution, and synchronously and inversely adjust the power of the multiple resistance heating circuits according to the differential feedforward signal to maintain the electrode rod as a whole in an absolute isothermal environment under vacuum adiabatic conditions, thereby eliminating the field radius distortion caused by local thermal expansion gradients at the source. In addition, in some embodiments, the range of absolute isothermal is 100℃ ± 0.1℃. Of course, alternatively, the absolute isothermal can have other values.

[0085] Furthermore, in some implementations, considering that the insulating heat-conducting rod 2 may be made of different materials, when multiple independent resistance heating circuits are controlled by an external control unit, the control unit is configured to adaptively switch physical boundary conditions based on the thermal conductivity and heat capacity of the material of the insulating heat-conducting rod 2 to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal. For example, the thermal conductivity of pure AlN is as high as 170-200 W / m·K, while the thermal conductivity of AlN-BN composite material is halved, resulting in completely different local thermal time constants and heat flux diffusion rates. The partial differential heat conduction model built into the control unit or physical information neural network (PINNs) can adaptively switch physical boundary conditions based on the intrinsic thermal conductivity and heat capacity parameters of the material selected for the insulating heat-conducting rod 2 (e.g., pure AlN or AlN-BN composite ceramic) to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal.

[0086] Secondly, the present invention provides a quadrupole assembly for use in assembling a mass spectrometer. That is, the quadrupole assembly can be manufactured, used, sold, offered for sale, or imported separately as an accessory to a mass spectrometer. (Reference) Figure 5The quadrupole assembly 13 includes four electrode rods 1 according to any of the first aspects above, wherein the four electrode rods 1 are arranged in parallel to each other, each electrode layer 3 faces the inside of the quadrupole assembly, and each circuit layer 4 faces the outside of the quadrupole assembly to form an electric field channel 14.

[0087] In this quadrupole assembly 13, the electrode rods, as described in the first aspect above, have an active radio frequency drive circuit 6 with a drive chip 5 arranged on a second side 22 of the insulating and thermally conductive rod body 2 facing outwards from the quadrupole assembly and electrically connected to the electrode layer 3 on the first side. Thus, the drive chip 5 on the second side 22 generates a high-voltage digital square wave voltage applied to the electrode layer 3, thereby forming an electric field channel in the quadrupole assembly. This eliminates the need for existing external cables connected to the electrode rods within the vacuum cavity, significantly reducing the parasitic capacitance of the mass spectrometer's quadrupole assembly while simultaneously reducing or eliminating reactive power losses.

[0088] In some embodiments of this quadrupole assembly 13, see [reference needed]. Figure 5 The center lines of the opposing electrode rods are arranged perpendicular to each other.

[0089] Furthermore, in some embodiments of the quadrupole assembly 13, an insulating base 15 is provided at the end of the quadrupole assembly, wherein an ion source lens is provided on the insulating base 15, and the ends of the ion source lens, the insulating base 15, and the insulating heat-conducting rods 2 of the four electrode rods 1 are integrally formed to absolutely solidify the 3D edge field physical boundary conditions at the entrance of the quadrupole assembly, eliminate mechanical assembly tolerances, and significantly improve ion transport efficiency. For example, in some embodiments, it can be integrally formed as a single piece using 3D printing technology (e.g., photopolymerization process of glass ceramic resin). Alternatively, in some embodiments, it can be integrally formed by high-precision CNC subtractive manufacturing. For example, when AlN-BN composite ceramic is used, the ion source lens, the insulating base, and the insulating heat-conducting rods 2 can be integrally formed as a single piece using metal cutting tools through high-precision CNC subtractive manufacturing, because the layered cleavage characteristics of h-BN make it possible to mill the complex microscopic 3D contours of hard and brittle ceramics without causing microcrack propagation.

[0090] Furthermore, the ends of the ion source lens, the insulating base 15, and the insulating heat-conducting rods 2 of the four electrode rods 1 are integrally formed, and combined with the forced 50:50 duty cycle output of the first and last electrode sections, the 3D and two-dimensional edge field effects of the quadrupole assembly can be perfectly eliminated.

[0091] In addition, in some embodiments, the insulating base 15 can serve as the connection point for the external single high-precision DC line and the high-voltage DC bus of each of the four electrode rods, and can also serve as the connection point for the backbone optical fiber.

[0092] In addition, the insulating base can act as a thermal bridge, transferring the accumulated "waste heat" of the quadrupole assembly to the metal vacuum chamber (the system's final heat sink). To further enhance thermal conductivity, alternatively, a half-Heusler (HH) alloy thin-film micropump can be used at the contact interfaces of each component for solid-state cooling, significantly improving heat dissipation and ensuring the quadrupole assembly operates at its optimal temperature.

[0093] Thirdly, the present invention provides a mass spectrometry driving method, which includes: generating a high-voltage digital square wave voltage applied to the electrode layer on the first side facing inward of each electrode rod of a quadrupole assembly through an active radio frequency driving circuit with a driving chip on the second side facing outward of each electrode rod, thereby forming an electric field channel; keeping the square wave voltage amplitude constant, and by changing the square wave frequency or adjusting the duty cycle, enabling ions to run in the stable region, thereby screening ions with different mass-to-charge ratios.

[0094] In this mass spectrometry driving method, a high-voltage digital square wave voltage is generated on the electrode layer on the first side facing inward of each electrode rod of the quadrupole assembly by an active radio frequency driving circuit with a driving chip on the second side facing outward of each electrode rod. In this way, the driving chip on the second side will generate a high-voltage digital square wave voltage applied to the electrode layer, thereby forming an electric field channel in the quadrupole assembly. This eliminates the existing external cables connected to the electrode rods in the vacuum cavity, thereby significantly reducing the parasitic capacitance of the quadrupole assembly of the mass spectrometer, while reducing or eliminating reactive power loss.

[0095] Furthermore, in this mass spectrometry-driven method, under multiple reaction monitoring (MRM) mode, the square wave frequency of the active radio frequency drive circuit can be dynamically switched based on different target precursor ions, so that low-mass ions are driven at high frequency and high-mass ions are driven at low frequency.

[0096] Furthermore, in some embodiments of this mass spectrometry driving method, multiple active radio frequency driving circuits on the second side generate high-voltage digital square wave voltages applied to multiple independent electrode segments formed by axially separating the electrode layer. This eliminates existing transmission cables and physically segments the electrode layer 3 of the electrode rod, limiting the local equivalent load capacitance of each active radio frequency driving circuit 6 to an extremely low intrinsic space capacitance range (e.g., single-segment load capacitance less than 5 pF), significantly reducing parasitic capacitance. This, in turn, greatly reduces the dynamic charge-discharge losses of the driving chip 5 (e.g., GaN), allowing the square wave edge to approach the ideal state and supporting ultra-high frequency operation far exceeding 5 MHz. Moreover, the multiple independent electrode segments not only withstand the extreme transient anti-phase absolute potential difference generated when adjacent segments execute heterogeneous square waves in the Paschen minimum region of the vacuum environment to prevent arc breakdown, but also block thermal crosstalk between the driving chips 5 on the back side, such as GaN bare wafers. In some embodiments, the electrode rod 1 with an effective field length of 100 mm to 120 mm can be configured to have 9 to 15 electrode segments.

[0097] In this mass spectrometry driving method, by dividing the electrode layer 3 into multiple independent electrode segments 10 along the axial direction of the electrode rod 1, each electrode segment 10 can be configured according to actual needs to achieve different functions. For example, the first, last, and middle electrode segments are given spatially specific control strategies. For example, in some embodiments, the first electrode segment is configured to output a pure radio frequency digital square wave with a uniform duty cycle of 50:50 as a pre-filter, and the last electrode segment is configured to output a pure radio frequency digital square wave with a uniform duty cycle of 50:50 as a post-filter. This can suppress edge field effects with zero hardware cost. At the same time, other electrode segments can independently output the same or different non-uniform duty cycles, or output waveforms with the same or different preset frequencies, to form one or more different functional regions on the electrode rod, thereby realizing multidimensional tandem mass spectrometry operation with extremely high spatial density.

[0098] Furthermore, in this mass spectrometry driving method, each electrode rod supplies power to multiple active radio frequency driving circuits via a high-voltage DC bus on its respective second side. Thus, since the high-voltage DC bus 12 is arranged on the second side 22, multiple external power supplies can be further eliminated, allowing all driving chips 5 (e.g., GaN drivers) to share a single external high-precision DC line connected via an insulating base at the end of the quadrupole assembly. For example, in the quadrupole assembly, one end of the high-voltage DC bus 12 of each of the four electrode rods is connected in parallel to the single external high-precision DC line at the insulating base.

[0099] Furthermore, in this mass spectrometry driving method, external homologous optical pulses are routed to each electrode segment via an optical distribution network on the electrode rod for low-voltage logic power supply and control signal transmission, achieving electromagnetic isolation and triggering the corresponding driver chip. Thus, by introducing power-on-fiber (PoF) and an optical distribution network within the vacuum, absolute electromagnetic isolation and picosecond-level phase alignment of multiple electrode segments can be achieved. For example, based on the optical distribution network, the mass spectrometer can use PoF technology to deliver weak logic signals and control clocks, while the optical waveguide enables absolute electromagnetic isolation between high and low voltages. Simultaneously, after the main optical fiber enters the vacuum, it is routed via a daisy-chain / star topology using an optical splitter. Utilizing the law of the constant speed of light, single optical pulses arrive simultaneously at all nodes, such as the optical receiving module, with picosecond-level precision, achieving perfect synchronization of square wave flipping. For example, refer to... Figure 6 An external central field-programmable gate array (FPGA) emits optical pulses of the same origin, which are routed to each electrode segment with low loss via a vacuum optical distribution network to synchronously drive each electrode segment, achieving absolute electromagnetic isolation and triggering GaN switching devices. At the same time, the voltage amplitude is adjusted in real time through a closed-loop feedback via an integrated capacitor voltage divider to eliminate amplitude mismatch.

[0100] Furthermore, in this mass spectrometry-driven method, when ions need to be accelerated and repelled axially or trapped in a potential well, a non-uniform duty cycle optical trigger signal with a predetermined gradual difference is applied to adjacent electrode segments. The time-averaged voltage shift caused by the generated asymmetric square wave is used to form a pseudo-DC electric field axial gradient. For example, a "pseudo-DC axial gradient" generated by duty cycle modulation can replace the physical power grid, thereby realizing the construction of a multidimensional field.

[0101] Furthermore, in this mass spectrometry-driven method, the transient DC baseline drift caused by the asymmetric duty cycle command is predicted in real time by the control unit, and a reverse digital predistortion parameter is injected into the time domain of the generated optical trigger signal for compensation, so that the DC baseline is brought to zero and the electric field conforms to the predetermined symmetry. For example, reference Figure 6 The Physical Information Neural Network (PINNs) algorithm can be used to perform digital predistortion compensation in the time domain for transient baseline drift caused by waveform asymmetry.

[0102] Furthermore, in this mass spectrometry-driven method, the control unit extracts the square wave frequency and duty cycle parameters to be used and predicts the heterogeneous transient heat dissipation distribution to generate a differential feedforward signal in advance. Based on this differential feedforward signal, the power of multiple independent resistance heating circuits on the second side is synchronously and inversely adjusted in zones to maintain the electrode rod as a whole in an absolutely isothermal environment under vacuum adiabatic conditions, thereby eliminating the field radius distortion caused by local thermal expansion gradients at its source. In some embodiments, the absolute isothermal range is 100℃ ± 0.1℃. Alternatively, the absolute isothermal can have other values.

[0103] Furthermore, in this mass spectrometry-driven method, the control unit is configured to adaptively switch physical boundary conditions based on the thermal conductivity and heat capacity of the insulating thermally conductive rod material of the electrode rod, in order to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal. For example, the thermal conductivity of pure AlN is as high as 170-200 W / m·K, while the thermal conductivity of AlN-BN composite material is halved, resulting in completely different local thermal time constants and heat flux diffusion rates. The partial differential heat conduction model built into the control unit or physical information neural network (PINNs) can adaptively switch physical boundary conditions based on the intrinsic thermal conductivity and heat capacity parameters of the material selected for the insulating thermally conductive rod 2 (e.g., pure AlN or AlN-BN composite ceramic), in order to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal.

[0104] Fourthly, the present invention provides a mass spectrometer comprising a quadrupole assembly according to any of the second aspects above; or, the mass spectrometer is capable of implementing a mass spectrometry driving method according to any of the third aspects above.

[0105] While the invention has been described in detail with reference to some preferred embodiments, variations and modifications exist within the scope and spirit of one or more independent aspects of the invention described. Furthermore, those skilled in the art will understand that the above embodiments are exemplary and not restrictive. Different technical features appearing in different embodiments can be combined to achieve beneficial effects. Those skilled in the art, based on a study of the drawings, specification, and claims, should be able to understand and implement other variations of the disclosed embodiments. The appearance of certain technical features in different dependent claims does not mean that these technical features cannot be combined to achieve beneficial effects.

Claims

1. An electrode rod (1) for forming a quadrupole assembly of a mass spectrometer, characterized in that, The electrode rod (1) includes: Insulating heat-conducting rod (2), the insulating heat-conducting rod (2) includes a first side (21) facing the inside of the quadrupole assembly and a second side (22) facing the outside of the quadrupole assembly. An electrode layer (3) is disposed on the first side surface (21), and the cross-sectional shape of the outer surface of the electrode layer (3) is an outwardly convex curved surface (31); and The circuit layer (4) is arranged on the second side (22) and includes an active radio frequency driving circuit (6) with a driving chip (5), wherein the active radio frequency driving circuit (6) is electrically connected to the electrode layer (3).

2. The electrode rod according to claim 1, characterized in that, The circuit layer (4) is encapsulated by an inorganic nanolaminated film (7).

3. The electrode rod according to claim 2, characterized in that, The inorganic nanolaminated film (7) comprises alternating hafnium dioxide and aluminum oxide layers deposited by atomic layer deposition.

4. The electrode rod according to claim 1, characterized in that, The cross-sectional shape of the first side surface (21) is the same as that of the convex curved surface (31), such that the electrode layer (3) is a plating layer on the first side surface (21).

5. The electrode rod according to claim 1, characterized in that, The convex surface (31) is a hyperboloid or a partially cylindrical surface.

6. The electrode rod according to claim 5, characterized in that, When the convex surface (31) is a partially cylindrical surface, the radius of the partially cylindrical surface is configured such that the ratio of the radius of the inscribed circle of the electric field of the quadrupole assembly is between 1.12 and 1.15, and the driving chip (5) is configured to output a high-frequency digital square wave that causes the ions to run in the higher-order stable region of the electric field.

7. The electrode rod according to claim 1, characterized in that, The insulating heat-conducting rod (2) comprises aluminum nitride ceramic material.

8. The electrode rod according to claim 1, characterized in that, The insulating heat-conducting rod (2) comprises an aluminum nitride-boron nitride composite ceramic material.

9. The electrode rod according to claim 8, characterized in that, An active transition metal layer is arranged on the second side (22), wherein the circuit layer (4) is arranged on the active transition metal layer.

10. The electrode rod according to claim 1, characterized in that, A two-dimensional dielectric material buffer layer (8) is arranged on the second side (22), and the circuit layer (4) and the active radio frequency driving circuit (6) are arranged on the two-dimensional dielectric material buffer layer (8).

11. The electrode rod according to claim 10, characterized in that, The two-dimensional dielectric material buffer layer (8) includes hexagonal boron nitride material.

12. The electrode rod according to claim 10, characterized in that, The driving chip (5) is in the form of a bare wafer and is arranged on the two-dimensional dielectric material buffer layer (8) through a nano-silver sintering layer (9) or a wire bonding layer.

13. The electrode rod according to claim 1, characterized in that, The driving chip (5) includes a gallium nitride high electron mobility transistor or a silicon carbide metal oxide semiconductor field-effect transistor.

14. The electrode rod according to claim 1, characterized in that, The circuit layer (4) includes a metallized circuit layer.

15. The electrode rod according to claim 1, characterized in that, The effective field length of the electrode rod is 100-120 mm, and the field radius is 3.0-4.0 mm.

16. The electrode rod according to any one of claims 1-15, characterized in that, The electrode layer (3) is divided into multiple independent electrode segments (10) along the axial direction of the electrode rod (1), and there is an insulating gap (11) between adjacent electrode segments (10). Multiple independent circuit layers (4) are arranged on the second side (22); Each of the active radio frequency driving circuits (6) is electrically connected to the corresponding electrode segment (10).

17. The electrode rod according to claim 16, characterized in that, The first electrode segment is configured to output a pure radio frequency digital square wave with an equal duty cycle of 50:50 as a pre-filter electrode, and the last electrode segment is configured to output a pure radio frequency digital square wave with an equal duty cycle of 50:50 as a post-filter electrode. Other electrode segments can independently output waveforms with non-equal duty cycles or preset frequencies to form one or more different functional areas on the electrode rod.

18. The electrode rod according to claim 17, characterized in that, The functional area includes at least one of the following: kinetic energy cooling area, high-resolution isolation area, and axial repulsion area.

19. The electrode rod according to claim 16, characterized in that, The insulation gap (11) is 0.5-1.0 mm.

20. The electrode rod according to claim 16, characterized in that, The multiple circuit layers (4) are encapsulated by an inorganic nanolaminated film (7), and the insulating gap (11) is covered with an inorganic nanolaminated film (7).

21. The electrode rod according to claim 16, characterized in that, A high-voltage DC bus (12) is arranged on the second side (22), and multiple active radio frequency drive circuits (6) are connected in parallel to the high-voltage DC bus (12).

22. The electrode rod according to claim 21, characterized in that, The circuit layer (4) includes a local high-frequency decoupling capacitor network surrounding the driver chip (5), and the circuit layer (4) integrates a miniature capacitor voltage divider.

23. The electrode rod according to claim 16, characterized in that, The electrode rod includes an optical distribution network for low-voltage logic power supply and control signal transmission, the optical distribution network being configured to distribute optical pulses from the trunk fiber to the optical receiving module corresponding to each of the electrode segments (10).

24. The electrode rod according to claim 23, characterized in that, The optical distribution network includes cascaded optical splitters, or planar optical waveguides arranged on the second side.

25. The electrode rod according to claim 16, characterized in that, The second side (22) is provided with multiple independent resistance heating circuits and a distributed temperature sensor array. The multiple independent resistance heating circuits can be controlled by an external control unit. The external control unit is configured to generate a differential feedforward signal in advance based on the frequency and duty cycle parameters of the driving square wave to be used by the driving chip (5) and the predicted heterogeneous transient heat dissipation distribution. Based on the differential feedforward signal, the power of the multiple resistance heating circuits is adjusted synchronously and in reverse to maintain the electrode rod as a whole in an absolute isothermal environment under vacuum insulation.

26. The electrode rod according to claim 25, characterized in that, The range of the absolute isotherm is 100℃ ± 0.1℃.

27. The electrode rod according to claim 25, characterized in that, When multiple independent resistance heating circuits are controlled by an external control unit, the control unit is configured to adaptively switch physical boundary conditions based on the thermal conductivity and thermal capacity of the material of the insulating heat-conducting rod (2) to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal.

28. A quadrupole assembly for forming a mass spectrometer, characterized in that, The quadrupole assembly (13) includes four electrode rods (1) according to any one of claims 1-27, wherein the four electrode rods (1) are arranged in parallel to each other, each electrode layer (3) faces the inside of the quadrupole assembly, and each circuit layer (4) faces the outside of the quadrupole assembly to form an electric field channel (14).

29. The quadrupole assembly according to claim 28, characterized in that, An insulating base (15) is provided at the end of the quadrupole assembly, wherein an ion source lens is provided on the insulating base (15), and the ends of the ion source lens, the insulating base (15) and the insulating heat-conducting rods (2) of the four electrode rods (1) are integrally formed.

30. A mass spectrometry-driven method, characterized in that, The mass spectrometry-driven method includes: An active radio frequency driving circuit with a driving chip is used on the second side of each electrode rod of the quadrupole assembly facing outward to generate a high voltage digital square wave voltage applied to the electrode layer on the first side of the electrode rod facing inward to form an electric field channel. By keeping the square wave voltage amplitude constant and changing the square wave frequency or adjusting the duty cycle, ions can be made to run in the stable region to screen ions with different mass-to-charge ratios.

31. The mass spectrometry-driven method according to claim 30, characterized in that, Based on different target precursor ions, the square wave frequency of the active radio frequency driving circuit is dynamically switched, so that low-quality ions are driven at high frequency and high-quality ions are driven at low frequency.

32. The mass spectrometry-driven method according to claim 30, characterized in that, The active radio frequency driving circuits on the second side generate high-voltage digital square wave voltages that are applied to multiple independent electrode segments formed by separating the electrode layer along the axial direction.

33. The mass spectrometry-driven method according to claim 32, characterized in that, Each electrode rod supplies power to multiple active radio frequency drive circuits via a high-voltage DC bus on its respective second side.

34. The mass spectrometry-driven method according to claim 32, characterized in that, External optical pulses of the same origin are routed to each electrode segment via the optical distribution network of the electrode rod, which is used for low-voltage logic power supply and control signal transmission, so as to achieve electromagnetic isolation and trigger the corresponding driver chip.

35. The mass spectrometry-driven method according to claim 32, characterized in that, When it is necessary to accelerate and repel ions axially or trap them in a potential well, a non-uniform duty cycle light trigger signal with a set gradual difference is applied to adjacent electrode segments. The time-averaged voltage shift caused by the generated asymmetric square wave is used to form a pseudo-DC electric field axial gradient.

36. The mass spectrometry-driven method according to claim 32, characterized in that, The control unit predicts the transient DC baseline drift caused by the asymmetric duty cycle command in real time, and injects a reverse digital predistortion parameter in the time domain of the generated optical trigger signal for compensation, so that the DC baseline returns to zero and the electric field conforms to the predetermined symmetry.

37. The mass spectrometry-driven method according to claim 32, characterized in that, The control unit extracts the square wave frequency and duty cycle parameters to be used and predicts the heterogeneous transient heat dissipation distribution to generate a differential feedforward signal in advance. Based on the differential feedforward signal, the power of multiple independent resistance heating circuits on the second side is adjusted synchronously and in reverse to maintain the electrode rod as a whole in an absolute isothermal environment under vacuum insulation.

38. The mass spectrometry-driven method according to claim 37, characterized in that, The control unit is configured to adaptively switch physical boundary conditions based on the thermal conductivity and thermal capacity of the insulating thermally conductive rod material of the electrode rod, so as to dynamically adjust the lead time and compensation power amplitude of the differential feedforward signal.

39. A mass spectrometer, characterized in that, The mass spectrometer includes the quadrupole assembly according to claim 28 or 29; or... The mass spectrometer is capable of implementing the mass spectrometry driving method according to any one of claims 30-38.

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