Semiconductor industry wastewater treatment apparatus

Abstract

The application discloses a kind of semiconductor industrial wastewater treatment equipment, and is connected with wastewater input pipeline, including evaporation device, filtering device and organic separation membrane system, the evaporation device is connected with wastewater input pipeline, the filtering device is connected with evaporation device by pipeline circulation;The organic separation membrane system is connected with evaporation device by pipeline circulation;The outlet of the organic separation membrane system is provided with terminal collection device;It also includes concentrated liquid collection device, and the concentrated liquid collection device collects the evaporator concentrated liquid of evaporation device and the filter concentrated liquid of filtering device produced.The application is treated to semiconductor industrial wastewater by the combination of evaporation device, filtering device and organic separation membrane system, the whole treatment process does not need to add any chemical agent, can maintain macroscopic dynamic balance to whole wastewater treatment equipment, can improve processing efficiency while improving processing effect.

Description

Technical Field

[0001] This invention relates to the field of wastewater treatment technology, and more specifically to a semiconductor industry wastewater treatment device. Background Technology

[0002] In existing technologies, wastewater is typically treated using a separate treatment method. Organic wastewater treatment currently mostly employs biochemical processes, degrading organic matter in the water through anaerobic and aerobic reactions. These methods require high operational capabilities and involve large equipment and tank footprints. Electroplating wastewater treatment currently mostly uses methods such as chemical reduction, precipitation, adsorption, micro-electrolysis, evaporation, and ion exchange. These wastewater treatment methods require the use of large doses of sodium hydroxide and flocculants, generating large amounts of harmful heavy metal sludge during the process. Chinese patent CN1590322A discloses a membrane separation method for zero-discharge electroplating wastewater treatment, employing a first-stage nanofiltration membrane filtration, a second-stage brackish water reverse osmosis membrane filtration, and a third-stage seawater reverse osmosis membrane filtration. This process is cumbersome, has high energy consumption, and a low water reuse rate of only about 70%. Currently, most grinding wastewater treatment methods combine chemical flocculation, sedimentation, ultrafiltration, and reverse osmosis. Chinese patent CN / 101007697 discloses a method for dewatering inorganic sludge formed from colored glass shell grinding water. It first uses polyacrylamide to flocculate and concentrate the sludge, and then the sludge is filtered by a bag filter press. However, chemical agents need to be added during the treatment process, which causes secondary pollution to the permeate and results in high operating costs.

[0003] Therefore, designing a semiconductor industry wastewater treatment equipment and method that combines an evaporation device, a filtration device, and an organic separation membrane system to treat semiconductor industry wastewater, without adding any chemical agents, can improve treatment effect and efficiency, and realize wastewater resource utilization, which obviously has practical significance. Summary of the Invention

[0004] The purpose of this invention is to provide a semiconductor industry wastewater treatment device that improves filtration accuracy and efficiency by combining an evaporation device, a filtration device, and an organic separation membrane system.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: a semiconductor industrial wastewater treatment device, connected to a wastewater input pipeline, including an evaporation device, a filtration device, and an organic separation membrane system. The evaporation device is connected to the wastewater input pipeline, and the filtration device and the evaporation device are connected in a circulation manner through a pipeline to collect the filtered liquid produced by the filtration device for circulation filtration. The organic separation membrane system and the evaporation device are connected by a pipeline for circulation to collect the organic separation membrane concentrate produced by the organic separation membrane system for further concentration; the proportion of the organic separation membrane system returned to the evaporation device for further concentration is 60% to 90%. A terminal collection device is installed at the outlet of the organic separation membrane system to collect the water treated by the organic separation membrane system. It also includes a concentrate collection device, which is connected to the evaporation device to collect the evaporator concentrate produced by the evaporation device, and a concentrate collection device is connected to a filtration device to collect the filtration device concentrate produced by the filtration device. Based on the daily wastewater input and the concentration of pollutants in the wastewater, the amount of pollutants adsorbed by the filtration device each day is set to a fixed value, and this fixed value is not less than the pollutant content in the daily wastewater. When the wastewater filtration volume in the filtration device reaches the above-mentioned fixed value, the unfiltered wastewater from the evaporator and the filtered clear liquid produced by the filtration device are both returned to the evaporator, so that the entire semiconductor industry wastewater treatment equipment reaches dynamic balance, and the concentration of the organic separation membrane concentrate is maintained at a low pollutant concentration state in a cycle.

[0006] Preferably, a raw water collection device is provided between the wastewater input pipe and the evaporation device. The raw water collection device includes a first collection tank, a water meter, and a first control unit. The water meter is used to count the amount of water entering the system. The first collection tank is equipped with a first low liquid level, a first medium liquid level, and a first high liquid level. When the wastewater in the first collection tank is at the first medium liquid level, the first control unit controls the evaporation device to start; when the wastewater in the first collection tank is at the first low liquid level, the first control unit controls the evaporation device to stop operating; when the wastewater in the first collection tank is at the first high liquid level, the first control unit controls the wastewater input pipe to stop supplying wastewater to the first collection tank.

[0007] Preferably, an overflow port is provided above the first high liquid level point. When the wastewater in the first collection tank reaches the overflow port, the wastewater flows out of the first collection tank from the overflow port to control the amount of wastewater in the first collection tank.

[0008] Preferably, a first drain valve is provided at the bottom of one side of the first collection tank to drain the wastewater in the first collection tank.

[0009] Preferably, the evaporation device includes a low-temperature evaporator and a distilled water collection device. One end of the low-temperature evaporator is connected to the distilled water collection device, and the other end is connected to the concentrate collection device to deliver the evaporator concentrate to the concentrate collection device. The distilled water collection device is circulated with the filtration device through a pipeline to collect the filtered liquid produced by the filtration device for circulated filtration. The distilled water collection device is circulated with the organic separation membrane system through a pipeline to collect the organic separation membrane concentrate produced by the organic separation membrane system for circulated concentration.

[0010] The low-temperature evaporator mentioned above is mainly responsible for removing high-boiling-point organic matter.

[0011] Preferably, the evaporation temperature of the low-temperature evaporator is 30℃~45℃.

[0012] Preferably, the distilled water collection device includes a second collection tank, a water meter, and a second control unit, wherein the water meter is used to count the amount of water entering the water tank. The second collection tank is equipped with a second low liquid level, a second medium liquid level, and a second high liquid level. When the wastewater in the second collection tank is at the second medium liquid level, the second control unit controls the filtration device and the organic separation membrane system to start. When the wastewater in the second collection tank is at the second low liquid level, the second control unit controls the filtration device and the organic separation membrane system to stop operating. When the wastewater in the second collection tank is at the second high liquid level, the second control unit controls the low-temperature evaporator to stop supplying wastewater to the second collection tank.

[0013] Preferably, an overflow port is provided above the second high liquid point. When the wastewater in the second collection tank reaches the overflow port, the wastewater flows out of the second collection tank from the overflow port to control the amount of wastewater in the second collection tank.

[0014] Preferably, a second drain valve is provided at the bottom of one side of the second collection tank to drain the wastewater in the second collection tank.

[0015] Preferably, a manual ball valve for the COD filter inlet and a check valve for the COD filter inlet are installed on the pipe between the outlet of the distilled water collection device and the inlet of the filtration device. A manual ball valve is installed on the pipe between the outlet of the distilled water collection device and the outlet of the organic separation membrane system.

[0016] Preferably, the filtration device includes a COD filter and a steam generator. The steam generator supplies steam to the COD filter to clean it. The COD filter is circulated to a distilled water collection device via a pipeline. The COD filter is also connected to a concentrate collection device to supply the concentrate from the filtration device to the concentrate collection device.

[0017] The COD filter mentioned above is mainly responsible for removing low-boiling-point organic matter.

[0018] Preferably, the COD filter includes a filter tank, a standby tank, and a first security filter, and the filter tank and standby tank are automatically switched according to a time setting to achieve continuous circulation filtration. Specifically, when the filter tank enters the cleaning stage, the standby tank is automatically switched to perform the filtration operation, so as to realize the continuous circulation filtration of wastewater in the distilled water collection device by the COD filter.

[0019] Preferably, the first security filter is disposed at the front end of the filter tank for the protection of the material.

[0020] Preferably, the steam generator is automatically started during the filter tank cleaning stage to clean the filter tank.

[0021] Preferably, both the filter tank and the backup tank are equipped with filter material, which comprises an organic polymer copolymer mainly composed of high-molecular organic materials, including styrene and divinylbenzene, and the filter material has a specific surface area of ​​450~600 m². 2 / g.

[0022] Preferably, the number of filter tanks can be set to multiple tanks connected in series to improve the efficiency of the filtration device.

[0023] Preferably, the organic separation membrane system includes a second security filter and an organic separation membrane.

[0024] Preferably, one end of the organic separation membrane is connected to a terminal collection device to deliver organic separation membrane permeate to the terminal collection device, and the other end is connected to a distilled water collection device to deliver organic separation membrane concentrate to the distilled water collection device for recycling and concentration.

[0025] Preferably, the organic separation membrane comprises a fully aromatic, highly crosslinked polyamide, and the flux of the organic separation membrane is 20 LMH.

[0026] In the above text, the organic separation membrane has a flow rejection rate of 90-99%.

[0027] Preferably, the second security filter is disposed at the front end of the organic separation membrane, and the second security filter is used to protect the organic separation membrane.

[0028] Preferably, the organic separation membrane system has a built-in concentrate circulation pipeline, which controls the proportion of concentrate internal circulation to achieve high-flow-rate flushing of the organic separation membrane and reduce the risk of membrane system clogging.

[0029] Preferably, the proportion of concentrated water circulating in the concentrated water circulation pipeline is controlled at 60%.

[0030] Preferably, the terminal collection device includes a third collection tank, a recycled water pump, a water meter, and a third control unit, wherein the water meter is used to count the amount of water entering the system. Preferably, the third collection tank is provided with a third low liquid level, a third medium liquid level, and a third high liquid level. When the wastewater in the third collection tank is at the third medium liquid level, the third control unit controls the reuse water pump to start; when the wastewater in the third collection tank is at the third high liquid level, the third control unit controls the organic separation membrane system to stop operating; when the wastewater in the third collection tank is at the third low liquid level, the third control unit controls the reuse water pump to stop operating.

[0031] Preferably, an overflow port is provided above the third high liquid level point. When the wastewater in the third collection tank reaches the overflow port, the wastewater flows out of the third collection tank from the overflow port to control the amount of wastewater in the third collection tank.

[0032] Preferably, a third drain valve is provided at the bottom of one side of the third collection tank to drain the wastewater in the third collection tank.

[0033] Preferably, a sampling device is provided between the terminal collection device and the organic separation membrane system; the sampling device is used to sample the wastewater flowing from the organic separation membrane system into the terminal collection device.

[0034] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art: 1. This invention pioneers a novel treatment method for semiconductor industry wastewater, breaking away from traditional processes. Existing semiconductor wastewater treatment technologies are mainly based on biochemical treatment processes. This invention adopts a combination of evaporation, filtration, and organic separation membranes to form a completely new semiconductor wastewater treatment process. This invention is a fully physical process, which does not require the addition of any chemicals, making it a truly environmentally friendly treatment method. 2. By circulating between the evaporator and the filter, and between the evaporator and the organic separation membrane system, the present invention can maintain a macroscopic dynamic balance in the entire wastewater treatment equipment and can circulate the wastewater while keeping the pollutant concentration at a low level. 3. The process of this invention is simple, fully automated, and user-friendly. Compared with existing biochemical processes, it greatly reduces the input of labor costs. It can achieve standardized production and modular implementation, reduce production costs and user investment, eliminate the need for repeated construction, and can be relocated at any time along with the production line. Attached Figure Description

[0035] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, some of the drawings in the following description are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0036] Figure 1 This is a process flow diagram of one embodiment.

[0037] Figure 2 This is a schematic diagram of the overall structure in one embodiment.

[0038] Figure 3 This is a schematic diagram of the raw water collection device and the evaporation device in one embodiment.

[0039] Figure 4 This is a schematic diagram of the structure of a filtering device in one embodiment.

[0040] Figure 5 This is a schematic diagram of the organic separation membrane system and terminal collection device in one embodiment.

[0041] The components include: 1. Wastewater inlet pipe; 2. Evaporation device; 3. Filtration device; 4. Organic separation membrane system; 5. Terminal collection device; 6. Concentrate collection device; and 7. Raw water collection device. 21. Low-temperature evaporator; 22. Distilled water collection device; 23. Second collection tank; 24. Second low liquid level point; 25. Second medium liquid level point; 26. Second high liquid level point; 27. Second low-pressure drain valve; 28. Manual ball valve for COD filter inlet; 29. ​​Check valve for COD filter inlet; 30. Manual ball valve; 31. COD filter; 32. Steam generator; 33. Filter tank; 34. Spare tank; 41. Organic separation membrane; 51. Third collection tank; 52. Third low liquid level point; 53. Third medium liquid level point; 54. Third high liquid level point; 55. Third low drain valve; 71. First collection tank; 72. First low liquid level point; 73. First medium liquid level point; 74. First high liquid level point; 75. First low vent valve. Detailed Implementation

[0042] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] Example 1 like Figures 1-5 As shown, a semiconductor industrial wastewater treatment device, connected to a wastewater input pipe 1, includes an evaporation device 2, a filtration device 3, and an organic separation membrane system 4. The evaporation device 2 is connected to the wastewater input pipe 1. The filtration device 3 and the evaporation device 2 are connected by a pipeline to collect the filtered liquid produced by the filtration device 3 for circulating filtration. The amount of filtered liquid returned by the filtration device 3 to the evaporation device 2 for circulating filtration is determined according to the filtration capacity of the filtration device 3, so that the amount of pollutants adsorbed by the filtration device 3 each day is a fixed value. The organic separation membrane system 4 and the evaporation device 2 are connected by a pipeline for circulation to collect the organic separation membrane concentrate produced by the organic separation membrane system 4 for circulation concentration; the proportion of organic separation membrane system 4 returning to the evaporation device 2 for circulation concentration is 60%~90%. The organic separation membrane system 4 is equipped with a terminal collection device 5 at its outlet to collect the treated water. It also includes a concentrate collection device 6, which is connected to the evaporation device 2 to collect the evaporator concentrate produced by the evaporation device 2, and the concentrate collection device 6 is connected to the filtration device 3 to collect the filtration device concentrate produced by the filtration device 3.

[0044] In the above text, the filtrate returned to the evaporator 2 by the filter device 3 for circulating filtration depends on the filtration capacity of the filter device 3. This means that when the filter device 3 is in filtration mode, the filtrate produced after filtration by the filter device 3 is returned to the evaporator 2; when the wastewater filtration capacity in the filter device 3 reaches the set value or the filtration limit of the filter device 3, the unfiltered wastewater from the evaporator and the filtrate produced after filtration by the filter device 3 are both returned to the evaporator 2.

[0045] In the above text, the wastewater filtration capacity setting in the filter device 3 is a fixed value set manually.

[0046] In the above text, the amount of wastewater input into the evaporator 2 per day through the wastewater input pipe 1 is a fixed value set by the user.

[0047] Preferably, a raw water collection device 7 is provided between the wastewater input pipe 1 and the evaporation device 2. The raw water collection device 7 includes a first collection tank 71, a water meter and a first control unit. The water meter is used to count the amount of water entering the pipe. The first collection tank 71 is provided with a first low liquid level 72, a first medium liquid level 73 and a first high liquid level 74. When the wastewater in the first collection tank 71 is at the first medium liquid level 73, the first control unit controls the evaporation device 2 to start; when the wastewater in the first collection tank 71 is at the first low liquid level 72, the first control unit controls the evaporation device 2 to stop operating; when the wastewater in the first collection tank 71 is at the first high liquid level 74, the first control unit controls the wastewater input pipe 1 to stop conveying wastewater into the first collection tank 71.

[0048] Preferably, an overflow port is provided above the first high liquid level point 74. When the wastewater in the first collection tank 71 reaches the overflow port, the wastewater flows out of the first collection tank 71 from the overflow port to control the amount of wastewater in the first collection tank 71.

[0049] Preferably, a first drain valve 75 is provided at the bottom of one side of the first collection tank 71 to drain the wastewater in the first collection tank 71.

[0050] Preferably, the evaporation device 2 includes a low-temperature evaporator 21 and a distilled water collection device 22. One end of the low-temperature evaporator 21 is connected to the distilled water collection device 22, and the other end is connected to the concentrate collection device 6 to deliver the evaporator concentrate to the concentrate collection device 6. The distilled water collection device 22 is circulatedly connected to the filtration device 3 through a pipeline to collect the filtered liquid produced by the filtration device 3 for circulated filtration. The distilled water collection device 22 is circulatedly connected to the organic separation membrane system 4 through a pipeline to collect the organic separation membrane concentrate produced by the organic separation membrane system 4 for circulated concentration.

[0051] In the above text, the low-temperature evaporator 21 is mainly responsible for removing high-boiling-point organic matter.

[0052] Preferably, the evaporation temperature of the low-temperature evaporator 21 is 30℃~45℃.

[0053] Preferably, the distilled water collection device 22 includes a second collection tank 23, a water meter, and a second control unit, wherein the water meter is used to count the amount of water entering the tank. The second collection tank 23 is equipped with a second low liquid level 24, a second medium liquid level 25, and a second high liquid level 26. When the wastewater in the second collection tank 23 is at the second medium liquid level 25, the second control unit controls the filter device 3 and the organic separation membrane system 4 to start. When the wastewater in the second collection tank 23 is at the second low liquid level 24, the second control unit controls the filter device 3 and the organic separation membrane system 4 to stop operating. When the wastewater in the second collection tank 23 is at the second high liquid level 26, the second control unit controls the evaporation device 2 to stop supplying wastewater to the second collection tank 23.

[0054] Preferably, an overflow port is provided above the second high liquid level point 26. When the wastewater in the second collection tank 23 reaches the overflow port, the wastewater flows out of the second collection tank 23 from the overflow port to control the amount of wastewater in the second collection tank 23.

[0055] Preferably, a second drain valve 27 is provided at the bottom of one side of the second collection tank 23 to drain the wastewater in the second collection tank 23.

[0056] Preferably, a COD filter inlet manual ball valve 28 and a COD filter inlet check valve 29 are installed on the pipe between the outlet of the distilled water collection device 22 and the inlet of the filter device 3. A manual ball valve 30 is installed on the pipe between the outlet of the distilled water collection device 22 and the outlet of the organic separation membrane system 4.

[0057] Preferably, the filtration device 3 includes a COD filter 31 and a steam generator 32. The steam generator 32 supplies steam to the COD filter 31 to clean it. The COD filter 31 is circulated to the distilled water collection device 22 via a pipeline. The COD filter 31 is connected to the concentrate collection device 6 to supply the concentrated liquid from the filtration device to the concentrate collection device 6.

[0058] As described above, the COD filter 31 is mainly responsible for removing low-boiling-point organic matter.

[0059] Preferably, the COD filter 31 includes a filter tank 33, a backup tank 34, and a first security filter. The filter tank 33 and the backup tank 34 are automatically switched according to a time setting to achieve continuous cyclic filtration. Specifically, when the filter tank 33 enters the cleaning stage, the backup tank 34 is automatically switched to perform the filtration operation, so that the COD filter 31 continuously circulates and filters the wastewater in the distilled water collection device 22.

[0060] Preferably, the first security filter is disposed at the front end of the filter tank 33 to protect the filter material.

[0061] Preferably, the steam generator 32 is automatically started during the cleaning stage of the filter tank 33 to clean the filter tank 33.

[0062] Preferably, both the filter tank 33 and the spare tank 34 are equipped with filter material, which comprises an organic polymer copolymer mainly composed of high-molecular organic materials, including styrene and divinylbenzene, and the filter material has a specific surface area of ​​450~600 m². 2 / g.

[0063] Preferably, the number of filter tanks 33 can be set to multiple units connected in series to improve the efficiency of the filter device 3.

[0064] Preferably, the organic separation membrane system 4 includes a second security filter and an organic separation membrane 41.

[0065] Preferably, one end of the organic separation membrane 41 is connected to the terminal collection device 5 to deliver the organic separation membrane 41 product water to the terminal collection device 5, and the other end is connected to the distilled water collection device 22 to deliver the organic separation membrane concentrate to the distilled water collection device 22 for recycling and concentration.

[0066] Preferably, the organic separation membrane 41 comprises a fully aromatic, highly crosslinked polyamide, and the flux of the organic separation membrane 41 is 20 LMH.

[0067] In the above text, the organic separation membrane 41 has a flow rejection rate of 90-99%.

[0068] Preferably, the second security filter is disposed at the front end of the organic separation membrane 41, and the second security filter is used to protect the organic separation membrane 41.

[0069] Preferably, the organic separation membrane system 4 has a built-in concentrate circulation pipeline, and the purpose of reducing the risk of membrane system clogging is to achieve high-flow flushing of the organic separation membrane 41 by controlling the proportion of concentrate internal circulation.

[0070] Preferably, the proportion of concentrated water circulating in the concentrated water circulation pipeline is controlled at 60%.

[0071] Preferably, the terminal collection device 5 includes a third collection tank 51, a recycled water pump, a water meter, and a third control unit, wherein the water meter is used to count the amount of water entering the tank. Preferably, the third collection tank 51 is provided with a third low liquid level 52, a third medium liquid level 53, and a third high liquid level 54. When the wastewater in the third collection tank 51 is at the third medium liquid level 53, the third control unit controls the reuse water pump to start; when the wastewater in the third collection tank 51 is at the third high liquid level 54, the third control unit controls the organic separation membrane system 4 to stop operating; when the wastewater in the third collection tank 51 is at the third low liquid level 52, the third control unit controls the reuse water pump to stop operating.

[0072] Preferably, an overflow port is provided above the third high liquid level point 54. When the wastewater in the third collection tank 51 reaches the overflow port, the wastewater flows out of the third collection tank 51 from the overflow port to control the amount of wastewater in the third collection tank 51.

[0073] Preferably, a third drain valve 55 is provided at the bottom of one side of the third collection tank 51 to drain the wastewater in the third collection tank 51.

[0074] Preferably, a sampling device is provided between the terminal collection device 5 and the organic separation membrane system 4; the sampling device is used to sample the wastewater flowing from the organic separation membrane system 4 into the terminal collection device 5.

[0075] Example 2 This embodiment is based on the first embodiment described above, and the similarities with the first embodiment will not be repeated.

[0076] like Figure 1 As shown, this embodiment relates to a method for treating semiconductor industrial wastewater, using the semiconductor industrial wastewater treatment equipment described above, and includes the following steps: S1. Wastewater enters the evaporator through the wastewater input pipe. After being treated by the evaporator, it produces evaporator-treated wastewater and evaporator concentrate. The evaporator concentrate flows into the concentrate collection device, and the evaporator-treated wastewater flows into the filtration device and the organic separation membrane system. If it flows into the filtration device, the process jumps to step S2. If it flows into the organic separation membrane system, the process jumps to step S3. S2. The filtration device treats the wastewater after the evaporator in step S1. After the treatment is completed, the filtration device concentrate and the filtration clear liquid are produced. The filtration clear liquid flows back to the evaporator for circulation filtration, and the filtration device concentrate flows into the concentrate collection device. Based on the daily wastewater input and the concentration of pollutants in the wastewater, the amount of pollutants adsorbed by the filtration device each day is set to a fixed value, and this fixed value is not less than the pollutant content in the daily wastewater. When the wastewater filtration volume in the filtration device reaches the above-mentioned fixed value, the unfiltered wastewater from the evaporator and the filtered clear liquid produced by the filtration device are both returned to the evaporator, so that the entire semiconductor industry wastewater treatment equipment can achieve dynamic balance. S3. The organic separation membrane system treats the wastewater after the evaporator in step S1. After the treatment is completed, organic separation membrane concentrate and treated water are produced. The organic separation membrane concentrate flows back to the evaporator for recycling and concentration, and the treated water flows into the terminal collection device. S4. The terminal collection device collects the treated water from step S3 and reuses it.

[0077] Example 3 This embodiment is based on the above embodiment one or two, and the similarities with the above embodiment one or two will not be repeated.

[0078] This embodiment takes the example of inputting 1 ton of wastewater with a pollutant concentration of 100 mg / L into the evaporator daily through the wastewater inlet pipe, where the amount of pollutants in the wastewater is 100 g. The organic separation membrane system recirculates 85% of the wastewater back to the evaporator for concentration, and the organic separation membrane has a rejection rate of 95%.

[0079] When the organic separation membrane system performs its first filtration: 85% of the organic separation membrane concentrate is returned to the evaporation unit, i.e., 0.85t, and the other 15% is treated water that flows into the terminal collection unit, i.e., 0.15t. The pollutant concentration in the treated water is 5mg / L, and the pollutant concentration in the concentrate returned to the front end is 95mg / L.

[0080] When the organic separation membrane system performs a second filtration: The wastewater inlet pipeline feeds 1 t of wastewater with a pollutant concentration of 100 mg / L into the evaporator every day. Adding the 0.85 t of organic separation membrane concentrate with a pollutant concentration of 95 mg / L returned from the first filtration, the total influent is 1.85 t with a pollutant concentration of 105.86 mg / L. 85% of the organic separation membrane concentrate is returned to the evaporation unit, i.e., 1.5725t, and the remaining 15% is treated water that flows into the terminal collection unit, i.e., 0.2775t. The pollutant concentration in the treated water is 5.293mg / L, and the pollutant concentration in the concentrate returned to the front end is 100.567mg / L.

[0081] And so on, when the organic separation membrane system performs the Nth filtration: Most of the pollutants in the wastewater are enriched in the cycle, and only a small portion is discharged to the terminal collection device with the treated water; this means that the concentration of pollutants in the wastewater flowing back to the distillation unit will increase indefinitely, that is, the concentration of pollutants in the wastewater in the distilled water collection device will increase indefinitely.

[0082] To avoid this situation, this embodiment adds a filter device that is circulated with the evaporation device, and sets the amount of pollutants adsorbed by the filter device to a fixed value per day.

[0083] In this embodiment, taking the daily adsorption capacity of the filtration device as 100g as an example, when the filtration device is in filtration mode, the filtered liquid produced by the filtration device is returned to the evaporation device; when the wastewater filtration capacity in the filtration device reaches 100g, the untreated wastewater flowing into the filtration device after evaporation and the filtered liquid produced by the filtration device are both returned to the evaporation device; the amount of pollutants filtered by the filtration device, whether in the wastewater entering through the wastewater input pipe or in the returned wastewater, does not affect the amount of pollutants adsorbed. In other words, even if the wastewater that enters for the first time keeps circulating in the evaporation device and the organic separation membrane system and never enters the filtration device for filtration, it does not affect the dynamic balance of the entire wastewater treatment equipment.

[0084] The final dynamic equilibrium state of the wastewater treatment equipment involved in this application is as follows: The wastewater inlet pipe still receives 1 ton of water daily, with a pollutant concentration of 100 mg / L, meaning 100 g of pollutants enter the system daily. The filtration device adsorbs 100 g of pollutants daily. The treated wastewater flowing into the terminal collection device from the organic separation membrane system reaches a production volume of 1 ton after N cycles, with the concentrate concentration maintained at a low pollutant concentration during the cycle.

[0085] The wastewater treatment process used in this comparative example is flocculation sedimentation, Fenton oxidation, anaerobic reaction, aerobic reaction and sedimentation tank. The main treatment principle is the oxidation and biodegradation of organic matter.

[0086] Organic cleaning wastewater with a COD concentration of 5000 mg / L was introduced into Example 1 and Comparative Example 1 for wastewater treatment, and the treated wastewater was tested. The test results are shown in Tables 1-3 below.

[0087] Table 1

[0088] Table 2

[0089] Table 3

[0090] As can be clearly seen from Tables 1 to 3 above, the wastewater treatment method used in Example 1 has a higher treatment efficiency than that used in Comparative Example 1, significantly reduces the COD concentration in the effluent, achieves a COD removal efficiency of over 99% in organic cleaning wastewater, has a high removal rate of organic matter in organic cleaning wastewater, has a better wastewater treatment effect, and the wastewater treatment equipment occupies a smaller area.

[0091] The difference between this comparative example and Example 1 is that the evaporation device, filtration device, and organic separation membrane system used in Example 1 are connected sequentially through pipelines. The organic separation membrane system is circulated with the evaporation device. The wastewater treated by the evaporation device is filtered by the filtration device and then enters the organic separation membrane system for further treatment. The wastewater treated by the organic separation membrane system enters the terminal collection device, and the concentrated organic separation membrane solution is returned to the evaporation device.

[0092] The same wastewater was introduced into Example 1 and Comparative Example 2 respectively for wastewater treatment, and the filtration device was tested. The test results are shown in Table 4 below.

[0093] Table 4

[0094] Comparative Example 3 The difference between this comparative example and Example 1 is that the concentrate circulation pipeline in the organic separation membrane system of Example 1 is replaced with a non-circulation management system for one-time concentration, that is, the organic separation membrane concentrate produced by the organic separation membrane system is all returned to the evaporation device.

[0095] The same wastewater was introduced into Example 1 and Comparative Example 3 respectively for wastewater treatment, and the organic separation membrane system was tested. The test results are shown in Table 5 below.

[0096] Table 5

[0097] As can be clearly seen from the table above, compared with the wastewater treatment method used in Comparative Example 3, Example 1 requires cleaning the organic separation membrane system less frequently, has a longer service life for the organic separation membrane, requires less frequent replacement, and requires lower operating pressure, thus improving the service life of the organic separation membrane.

[0098] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A semiconductor industry wastewater treatment device, characterized in that, The system is connected to a wastewater input pipeline and includes an evaporation device, a filtration device, and an organic separation membrane system. The evaporation device is connected to the wastewater input pipeline, and the filtration device and the evaporation device are connected in a circulation loop through a pipeline to collect the filtered liquid produced by the filtration device for circulation filtration. The organic separation membrane system and the evaporation device are connected by a pipeline for circulation to collect the organic separation membrane concentrate produced by the organic separation membrane system for further concentration; the proportion of the organic separation membrane system returned to the evaporation device for further concentration is 60% to 90%. A terminal collection device is installed at the outlet of the organic separation membrane system to collect the water treated by the organic separation membrane system. It also includes a concentrate collection device, which is connected to the evaporation device to collect the evaporator concentrate produced by the evaporation device, and a concentrate collection device is connected to a filtration device to collect the filtration device concentrate produced by the filtration device. Based on the daily wastewater input and the concentration of pollutants in the wastewater, the amount of pollutants adsorbed by the filtration device each day is set to a fixed value, and this fixed value is not less than the pollutant content in the daily wastewater. When the wastewater filtration volume in the filtration device reaches the above-mentioned fixed value, the unfiltered wastewater from the evaporator and the filtered clear liquid produced by the filtration device are both returned to the evaporator, so that the entire semiconductor industry wastewater treatment equipment reaches dynamic balance, and the concentration of the organic separation membrane concentrate is maintained at a low pollutant concentration state in a cycle.

2. The semiconductor industry wastewater treatment equipment according to claim 1, characterized in that, A raw water collection device is provided between the wastewater input pipeline and the evaporation device. The raw water collection device includes a first collection tank, a water meter and a first control unit. The water meter is used to count the amount of water entering the system. The first collection tank is equipped with a first low liquid level, a first medium liquid level, and a first high liquid level. When the wastewater in the first collection tank is at the first medium liquid level, the first control unit controls the evaporation device to start; when the wastewater in the first collection tank is at the first low liquid level, the first control unit controls the evaporation device to stop operating; when the wastewater in the first collection tank is at the first high liquid level, the first control unit controls the wastewater input pipe to stop supplying wastewater to the first collection tank.

3. The semiconductor industry wastewater treatment equipment according to claim 1, characterized in that, The evaporation device includes a low-temperature evaporator and a distilled water collection device. One end of the low-temperature evaporator is connected to the distilled water collection device, and the other end is connected to the concentrate collection device to deliver the evaporator concentrate to the concentrate collection device. The distilled water collection device is circulated with the filtration device through a pipeline to collect the filtered liquid produced by the filtration device for circulated filtration. The distilled water collection device is circulated with the organic separation membrane system through a pipeline to collect the organic separation membrane concentrate produced by the organic separation membrane system for circulated concentration.

4. The semiconductor industry wastewater treatment equipment according to claim 3, characterized in that, The evaporation temperature of the low-temperature evaporator is 30℃~45℃.

5. The semiconductor industry wastewater treatment equipment according to claim 3, characterized in that, The distilled water collection device includes a second collection tank, a water meter, and a second control unit. The water meter is used to count the amount of water entering the water. The second collection tank is equipped with a second low liquid level, a second medium liquid level, and a second high liquid level. When the wastewater in the second collection tank is at the second medium liquid level, the second control unit controls the filtration device and the organic separation membrane system to start. When the wastewater in the second collection tank is at the second low liquid level, the second control unit controls the filtration device and the organic separation membrane system to stop operating. When the wastewater in the second collection tank is at the second high liquid level, the second control unit controls the low-temperature evaporator to stop supplying wastewater to the second collection tank.

6. The semiconductor industry wastewater treatment equipment according to claim 1, characterized in that, The filtration device includes a COD filter and a steam generator. The steam generator supplies steam to the COD filter to clean it. The COD filter is connected to a distilled water collection device via a pipeline for circulation. The COD filter is also connected to a concentrate collection device to supply the concentrate from the filtration device to the concentrate collection device.

7. A semiconductor industry wastewater treatment device according to claim 6, characterized in that, The COD filter includes a filter tank, a backup tank, and a first security filter. The filter tank and the backup tank are automatically switched according to a time setting to achieve continuous cyclic filtration. The filter material in the filter tank comprises an organic polymer copolymer mainly composed of high-molecular organic materials, including styrene and divinylbenzene.

8. The semiconductor industry wastewater treatment equipment according to claim 1, characterized in that, The organic separation membrane system includes a second security filter and an organic separation membrane; the organic separation membrane includes a fully aromatic, highly crosslinked polyamide, and the flux of the organic separation membrane is 20 LMH.

9. A semiconductor industry wastewater treatment device according to claim 8, characterized in that, The second security filter is disposed at the front end of the organic separation membrane and is used to protect the organic separation membrane.

10. A semiconductor industry wastewater treatment device according to claim 1, characterized in that, The organic separation membrane system has a built-in concentrate circulation pipeline. By controlling the proportion of concentrate circulating internally, a high-flow-rate flushing of the organic separation membrane can be achieved, reducing the risk of membrane system clogging.

11. A semiconductor industry wastewater treatment device according to claim 1, characterized in that, The terminal collection device includes a third collection tank, a recycled water pump, a water meter, and a third control unit. The water meter is used to count the amount of water entering the system. The third collection tank is equipped with a third low liquid level, a third medium liquid level, and a third high liquid level. When the wastewater in the third collection tank is at the third medium liquid level, the third control unit controls the reuse water pump to start; when the wastewater in the third collection tank is at the third high liquid level, the third control unit controls the organic separation membrane system to stop operating; when the wastewater in the third collection tank is at the third low liquid level, the third control unit controls the reuse water pump to stop operating.

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