Mask frame, mask plate assembly and processing method for replacing mask plate by mask plate assembly

Abstract

This application provides a mask frame, a mask assembly, and a method for replacing the mask in the mask assembly. The mask frame includes a main frame, which is rectangular, with inwardly extending protrusions on its four inner sides. A receiving groove is formed between the lower surface of the protrusion and the bottom surface of the main frame. Each inner side of the main frame has a frame edge member, the long axis of which is aligned with the extension direction of the corresponding side of the main frame. The frame edge member has a pressure-bearing end and a mask connecting end in a direction orthogonal to its long axis. The pressure-bearing end extends into the receiving groove of the corresponding side of the main frame, and the mask connecting end extends into the inner side of the main frame for connecting the mask. A pad is provided between the pressure-bearing end and the corresponding protrusion of the frame edge member, and the pressure-bearing end, protrusion, and pad are detachably connected by screws. This application can increase the height of the frame edge member relative to the main frame by thinning or removing the pad, thereby extending the service life of the mask frame.

Description

Technical Field

[0001] This application relates to the field of semiconductor display panel manufacturing, and more particularly to a mask frame and mask assembly. Background Technology

[0002] Metal photomasks are crucial tools in the fabrication of AMOLED display panels. They are primarily used to limit the deposition area of ​​film materials during organic material evaporation and encapsulation. A metal photomask mainly consists of two parts: a mask frame and a mask mesh. The mask mesh is typically welded to the mask frame.

[0003] In existing technologies, when a mask needs to be replaced due to damage or other reasons, the common procedure is to first tear off the original mask, then grind away the remaining mask structure and welded components, and finally attach a new mask to the mask frame. Previously, after several grinding operations, the thickness allowance of the mask frame no longer met the process standards, requiring the manufacture of a new mask frame, while the old one had to be scrapped. Clearly, this existing method results in wasted fixtures and increased production costs.

[0004] Given the aforementioned problems in the existing technology, there is an urgent need to provide a new solution. Summary of the Invention

[0005] To address the aforementioned technical problems in the prior art, the first aspect of this application provides a mask frame, intended to extend the service life of the mask frame and reduce the difficulty and cost of mask frame remanufacturing. Specifically, the mask frame provided by this application includes a main frame, which is rectangular, and has inwardly extending protrusions on the inner sides of the four sides of the main frame. A receiving groove is provided between the lower surface of the protrusions and the bottom surface of the main frame. In addition, a frame edge member is provided on the inner side of each side of the main frame. The long axis of the frame edge member is consistent with the extension direction of the corresponding side of the main frame. The frame edge member has a pressure end and a mask connection end in the direction orthogonal to its long axis. The pressure end extends into the receiving groove of the corresponding side of the main frame, and the mask connection end extends into the inner side of the main frame for connecting the mask plate. Furthermore, a pad is provided between the pressure end of the frame member and the protrusion of the corresponding main frame, and the pressure end, the protrusion and the pad are detachably connected by screw connectors.

[0006] In the aforementioned solution, the mask connecting end of the frame edge component is used to connect the mask plate. When the mask mesh needs to be replaced due to damage or other reasons, the original mask plate can be removed in the traditional way. Then, the remaining mask mesh structure and welding structure on the mask connecting end are ground off, and a new mask mesh is then stretched and welded onto the mask frame. The difference from previously disclosed technologies is that when the thickness allowance of the mask frame after several grindings no longer meets the process standards, the thickness of the shim plate can be reduced or removed to allow the frame edge component to be lifted as a whole after tightening the screw connectors, thus restoring the mask frame thickness to meet the process standards. This solution can significantly increase the service life of the mask frame and reduce the difficulty and cost of reusing the mask frame. Furthermore, if the thickness allowance of the mask frame still does not meet the process standards after removing the shim plate, only the frame edge component needs to be replaced, without scrapping the entire mask frame. Moreover, the replaced frame edge component can still be used to make the aforementioned shim plate, realizing the reuse of frame edge component waste and further reducing the production and usage costs of the mask frame.

[0007] Furthermore, the pressure-bearing end of the frame member is provided with a protrusion, and the lower surface of the protrusion at the corresponding position is provided with a groove adapted to accommodate the protrusion, and the protrusion is at least partially accommodated in the groove.

[0008] In the aforementioned solution, by providing a protrusion at the pressure end of the frame edge member and engaging with a groove on the lower surface of the protrusion, the frame edge member is restrained to prevent the reaction force of the mask plate on the frame edge member from causing shear damage to the screw connector. At the same time, it reduces the local deformation of the frame edge member that is asynchronous with the deformation of the main frame due to the reaction force of the mask plate, thereby reducing the deformation of the mask plate caused by such local deformation and avoiding the resulting increase in the amount of mask plate sagging.

[0009] Furthermore, the protrusion extends from one end to the other along the long axis of the frame member.

[0010] In the aforementioned scheme, the protrusion restrains the frame edge component, covering the entire area of ​​the frame edge component along its long axis. This can completely prevent local deformations of the frame edge component that are asynchronous with the deformation of the main frame due to the reaction force of the mask plate. This further reduces the deformation of the mask plate caused by the deformation of the frame edge component and avoids the resulting increase in the amount of mask plate sagging.

[0011] Furthermore, each of the frame edge members is provided with pads of various thicknesses for replacement.

[0012] In the aforementioned scheme, when the thickness of the mask frame after several grinding processes no longer meets the process standards, the purpose of "thinning" the pad can be easily achieved by replacing it with a thinner pad. When a new frame component is replaced because the thickness of the mask frame still does not meet the process standards after removing the pad, the pad with the initial thickness specification is replaced again, thus reserving space for "thinning" the pad again.

[0013] Furthermore, the pad is configured as a stacked multilayer thin plate.

[0014] In the aforementioned scheme, when the thickness of the mask frame after several polishing processes no longer meets the process standards, the purpose of "thinning" the pad can be easily achieved by reducing the number of layers of thin plates. When a new frame component is replaced because the thickness of the mask frame still does not meet the process standards after removing the pad, the initial number of thin plates is re-stacked, thus reserving space for further "thinning" of the pad.

[0015] Furthermore, the mask connecting end has a mask bonding surface, which is disposed within the upper end surface of the frame edge member, and the height of the mask bonding surface is not lower than the first surface of the main frame.

[0016] Furthermore, the mask bonding surface is higher than the first surface of the main frame.

[0017] In the aforementioned scheme, by setting the height of the first surface of the main frame to be the same as or lower than the height of the mask bonding surface, during the process of stretching / fixing the mask plate, the gripper of the stretching machine and the mask plate can be provided with moving space, so that the mask plate can be smoothly attached to the mask bonding surface without being obstructed by the first surface of the main frame.

[0018] Furthermore, each of the frame edge members is provided with a plurality of screw connectors, which are spaced apart along the long axis of the frame edge member.

[0019] When fixing the photomask during wire mesh installation, the edges of the photomask need to be fixed at different positions along the long axis of the frame member. After fixing the photomask, it will exert a reaction force on different positions along the long axis of the frame member. This solution connects the frame member to the pad and the protruding part of the main frame by setting multiple screw connectors at intervals along the long axis of the frame member. This reduces the deformation of local positions of the frame member that are not fixed to the protruding part by screw connectors, thereby reducing the deformation of the photomask caused by the deformation of the frame member and avoiding the resulting increase in photomask sagging.

[0020] Furthermore, a recessed groove is provided on the first surface of each of the four sides of the main frame, and the screw connector is installed at the bottom of the recessed groove.

[0021] The aforementioned solution enables controllability of operation during the disassembly and assembly of screw connectors, avoiding contact with the first surface of the main frame and reducing the risk of scratching the first surface.

[0022] A second aspect of this application provides a mask assembly, the mask assembly comprising: The mask frame as described in the first aspect of the technical solution or any alternative thereof; and The mask plate has its four edges fixedly joined to the mask connection end of the frame member by welding.

[0023] The third aspect of this application provides a processing method for replacing the mask in the mask assembly described in the second aspect above, the steps of which include: S10: Remove the original mask from the mask frame; S20: Disassemble the mask frame and separate the pad and frame components; S30: Thinning treatment of the pad; S40: Grind away any excess structure remaining on the mask connection end of the frame edge component to remove it; S50: The pad and frame components processed in steps S30 and S40 are reassembled onto the main frame to form a mask frame. S60: The mask frame obtained in step S50 is further processed to create a mask bonding surface on the mask connection end of the frame edge component.

[0024] In summary, the mask frame, mask assembly, and mask assembly replacement method described in the aforementioned technical solution can at least extend the service life of the mask frame and reduce the production, repair, and usage costs of the mask assembly.

[0025] Furthermore, other additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the mask assembly provided in this application; Figure 2 This is a partial structural schematic diagram of the mask assembly provided in this application. The diagram mainly illustrates the assembly state in which the protruding part of the main frame, the pad, and the pressure end of the frame edge member are detachably connected by screw connectors. Figure 3 This is a partial structural schematic diagram of the mask assembly provided in this application. The diagram mainly illustrates the assembly state of the protrusion provided at the pressure end of the frame member and the groove provided on the lower surface of the protrusion of the main frame. Figure 4 This is a structural schematic diagram of the main frame provided in this application; Figure 5 This is a structural schematic diagram of the frame edge component provided in this application; Figure 6 This is a schematic diagram of a pad provided in this application, which mainly illustrates the stacking state of the multiple thin plates included in the pad; Figure 7 This is a flowchart illustrating a method for replacing a mask in a mask assembly, as provided in this application.

[0027] The image is labeled as follows: 1: Main frame; 101: Bottom surface of the main frame; 11: Protrusion; 111: Lower surface of the protrusion; 12: Groove; 13: First surface; 14: Assembly hole; 15: Countersunk groove; 2: Frame edge component; 21: Pressure-bearing end; 22: Mask connection end; 220: Upper end face of mask connection end; 23: Protrusion; 3: Pad; 4: Screw connectors; 5: Mask plate. Detailed Implementation

[0028] This application will now be described more fully below with reference to the accompanying drawings. However, this application can be implemented in many different ways, and the terms "embodiments" and "implementations" as used herein are exemplary descriptions and are non-limiting examples of the fixtures or devices disclosed herein. Therefore, the scope of protection of this application should not be construed as limited to the embodiments described herein. For one purpose, these embodiments are provided herein to make this application more detailed and complete, and to fully convey the scope of this application to those skilled in the art.

[0029] It should be noted that in this document, when terms with directional indications such as "above," "upper side," "lower," and "lower side" are used, these terms are only used to explain the relative positional relationship between components or structures in a specific orientation (such as the fixture placement orientation shown in the attached figure). If the specific orientation changes, the directional indication will also change accordingly. However, when a component is said to be "above" another component or to have a structure, or when a component is said to be "on" another component, the term "above" does not necessarily have directional indication. It may only be used to indicate that there is a connection between the two components (direct connection, or the presence of an intermediary component), or to indicate that the structure is part of the component.

[0030] When terms such as “first” and “second” are used, although these terms can be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another and do not indicate order, importance, or quantity limitation. Therefore, without departing from the teachings of this disclosure, the first element discussed below may be referred to as the second element.

[0031] Furthermore, the technical solutions of the various embodiments of this application can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application. The combination of technical solutions should be based on the premise of not exceeding the scope of disclosure in this application.

[0032] Furthermore, unless otherwise specified, the same reference numerals throughout this document denote the same objects.

[0033] In view of the aforementioned technical status quo in the prior art, the inventors of this application have conducted in-depth research and do not wish to be bound by any theory. This application provides a mask frame, a mask plate assembly including the mask frame, and a processing method for replacing the mask plate in the mask plate assembly. The aim is to improve the aforementioned performance of the previous mask frames and mask plate assemblies by improving the structure of the mask frame and its mask plate assembly, as well as improving the processing method for replacing the mask plate in the mask plate assembly.

[0034] An embodiment of the first aspect of this application provides a mask frame, as shown in the attached drawing. Figure 1 This mask frame includes a main frame 1, which is rectangular, as shown in the attached figure. Figure 2 As shown, the main frame 1 has inwardly extending protrusions 11 on the inner sides of its four sides (attached). Figure 2 In the middle, the left side of the main frame 1 is the outer side and the right side is the inner side, and there is a receiving groove between the lower surface 111 of the protrusion and the bottom surface 101 of the main frame.

[0035] As attached Figure 2 As shown, a frame edge member 2 is provided on the inner side of each side of the main frame 1. The long axis of the frame edge member 2 is consistent with the extension direction of the corresponding side of the main frame 1. The frame edge member 2 has a pressure end 21 and a mask connection end 22 in a direction orthogonal to its long axis. The pressure end 21 extends into the receiving groove of the corresponding side of the main frame 1, and the mask connection end 22 extends into the inner side of the main frame 1. The mask connection end 22 is used to connect and fix the mask plate.

[0036] As attached Figure 2As shown, a pad 3 is provided between the pressure end 21 of the frame member 2 and the corresponding protrusion 11. It should be understood that the pad 3 is also located in the receiving groove, and the pressure end 21, the protrusion 11 and the pad 3 are detachably connected by a screw connector 4.

[0037] In the aforementioned embodiment, the thickness of the backing plate 3 can be reduced or removed, and then the frame edge component 2 can be raised relative to the main frame 1 by tightening the screw connector 4. Based on this design, the raised portion of the frame edge component 2 can be used to compensate for the thickness that needs to be removed by grinding when replacing the mask plate, thereby ensuring that the thickness of the mask frame always meets the process standards. Compared with other previous processing methods, this design does not require the entire mask frame to be scrapped when the thickness of the mask frame no longer meets the process standards, nor does it require increasing the thickness of the mask frame by welding metal sheets to meet the process standards. The production, use, and maintenance costs of the mask frame are significantly reduced compared to the past, and its service life is also significantly extended.

[0038] like Figure 1 As shown, in the mask assembly, the mask 5 needs to be stretched and tightened by the tensioning machine to achieve a certain flatness before being welded and fixed to the mask connection end 22 of the frame edge member 2. Therefore, the mask 5 will generate a reverse tension (i.e., reaction force) on the frame edge member 2. Affected by this reverse tension, a shearing action will be generated between the pressure end 21 of the frame edge member 2, the pad 3, and the protruding part 11 of the main frame 1, which can easily cause damage to the screw connector 4. In other positions other than the screw connector 4, since it is not restricted by the screw connector 4, the frame edge member 2 is prone to local deformation that is not synchronized with the deformation of the main frame 1 due to the reaction force of the mask 5.

[0039] To address this issue, this application provides a solution, specifically referring to the appendix. Figure 3 As shown, a protrusion 23 is provided on the pressure end 21 of the frame member 2, and a groove 12 adapted to accommodate the protrusion 23 is provided on the lower surface 111 of the protrusion at the corresponding position.

[0040] As attached Figure 3 In the assembled state shown, the protrusion 23 is at least partially accommodated within the groove 12.

[0041] For example, see attached Figure 3 As shown, in the initial state of the mask frame, only a portion of the protrusion 23 extends into the groove 12. At this time, the groove 12 still has some depth for the protrusion 23 to go deeper. As the thickness of the pad 3 decreases, the amount of the protrusion 23 accommodated in the groove 12 gradually increases until the pad 3 is completely removed, at which point the protrusion 23 is completely accommodated in the groove 12 (not shown in the figure).

[0042] In this embodiment, after the protrusion 23 cooperates with the groove 12, it can effectively prevent shearing damage to the screw connector 4, and at the same time reduce the local deformation of the frame edge component 2 that is not synchronized with the deformation of the main frame 1, thereby reducing the deformation and sagging of the mask plate 5 caused by such local deformation.

[0043] In a further embodiment, the protrusion 23 extends along the long axis of the frame member 2 and from one end of the long axis of the frame member 2 to the other end. It should be understood that the groove 12 on the lower surface 111 of the protrusion has a length adapted to the protrusion 23.

[0044] The protrusion 23 covering the length of the frame member 2 can restrain the frame member 2 in the entire area along the long axis of the frame member 2, so that the deformation of the frame member 2 is synchronized with the deformation of the main frame 1.

[0045] In an optional embodiment, each frame edge component 2 is equipped with pads 3 of various thicknesses for replacement. When the thickness allowance of the mask frame after several grindings no longer meets the process standards, the pads 3 at the corresponding positions are replaced with pads 3 of thinner thickness than the original. After reassembling the mask frame, the height of the frame edge component 2 relative to the main frame 1 can be raised, thereby compensating for the overall thickness loss of the mask frame caused by the mask mesh structure and welding structure remaining on the mask connection end 22 after grinding and removing the mask plate. When replacing a new frame edge component 2, the pads 3 can be replaced with thicker ones to reserve operating space for further "thinning" of the pads 3.

[0046] The thickness difference between different specifications of pads 3 can be determined based on empirical or measured values ​​of the grinding depth of the frame edge component 2 when replacing the mask. When replacing the mask, the predetermined depth is ground according to the thickness difference between different specifications of pads 3.

[0047] The pad 3 can be made from non-reusable frame components 3, thus enabling the reuse of discarded frame components. It should be understood that the material selection for the pad 3 is not limited to this, but can be any material. Therefore, new materials can also be used for manufacturing if cost is not a consideration.

[0048] In alternative embodiments, such as Figure 6 As shown, the pad 3 can also be an assembly composed of multiple layers of thin plates stacked together. When the thickness allowance of the mask frame after several grindings no longer meets the process standards, a certain number of thin plates can be removed to reduce the thickness of the pad 3. Conversely, when replacing the new frame component 2, a certain number of thin plates can be added to restore the original overall thickness of the pad 3, reserving operational space for further "thinning" of the pad 3.

[0049] In the production of the thin sheet, any raw material plate can be selected, and the selected raw material plate is processed through cutting and other steps to form the thin sheet. Preferably, the waste material generated after processing the mask plate can be used to process the thin sheet, so as to control the production cost.

[0050] In an optional embodiment, the pad 3 in the mask frame can also be removed and thinned by machining methods such as grinding.

[0051] In an optional embodiment, refer to the appendix. Figure 5 As shown, the mask connecting end 22 has a mask mating surface, which is disposed within the upper end surface 220 of the frame edge member, and the height of the mask mating surface is not lower than the first surface 13 of the main frame 1 (i.e., the attached surface). Figure 2 (The top surface of the main frame).

[0052] For example, in one embodiment, the upper end face 220 of the frame edge member is directly used as the mask bonding surface, that is, the mask plate is directly welded and fixed to the upper end face 220 of the frame edge member.

[0053] For example, in another embodiment, a groove for connecting a mask plate is provided in the upper end surface 220 of the frame member, and the mask mating surface is the bottom surface of the groove.

[0054] Designers noted that during the process of tensioning the mesh and welding the mask plate, it is necessary to move the mask plate from a state of suspension on the mask frame to a state of contact with the mask mating surface on the frame edge component 2. During this process, it is necessary to ensure that the mask plate and the grippers of the tensioning equipment can move down smoothly without obstruction.

[0055] Therefore, in the above embodiments of this application, the mask bonding surface is designed to be no lower than the first surface 13 of the main frame 1. In this way, the mask plate can be smoothly moved down and attached to the mask bonding surface without being obstructed by the first surface 13 of the main frame 1.

[0056] In a typical embodiment, the mask bonding surface is higher than the first surface 13 of the main frame 1. This design also provides space for the downward movement of the grippers of the screen tensioning machine.

[0057] Furthermore, the advantage of the present application's embodiment over existing mask frames lies in the controllability of the height difference between the mask bonding surface and the first surface 13 of the main frame 1. Specifically, by thinning or even removing the pad 3, the frame edge member 2 can be raised relative to the main frame 1, thereby increasing the height difference between the mask bonding surface and the first surface 13 of the main frame 1. Conversely, increasing the pad 3 or increasing its thickness can reduce the height difference between the mask bonding surface and the first surface 13 of the main frame 1.

[0058] In an optional embodiment, a plurality of screw connectors 4 are provided on any one of the frame edge members 2 of the mask frame, and these screw connectors 4 are spaced apart along the long axis of the frame edge member 2.

[0059] Reference Appendix Figure 4 As shown, each side of the main frame 1 has a corresponding mounting hole 14. The aforementioned screw connectors 4 are installed in the corresponding mounting holes 14. The lower end of the screw connector 4 passes through the corresponding passage on the pad 3 and connects to the pressure end 21 of the frame edge member 2 on the lower side of the pad 3.

[0060] For example, see attached Figure 4 As shown, seven mounting holes 14 are provided on each side of the main frame 1, that is, seven screw connectors 4 are provided on each frame edge component 2. It should be understood that the number of screw connectors 4 can be increased or decreased according to the length of the frame edge component 2. At the same time, the local deformation of the frame edge component 2 should be taken into account, and the spacing between adjacent screw connectors 4 should not be set too large.

[0061] The aforementioned design of setting multiple screw connectors 4 can, on the one hand, lock the pressure end 21 of the frame edge member 2, the pad 3, and the protrusion 11 of the main frame 1 at different positions along the long axis of the frame edge member 2, thus avoiding different heights at different positions along the long axis of the frame edge member 2; on the other hand, after the mask plate is fixed, the mask plate will generate reaction forces at different positions along the long axis of the frame edge member 2. By setting multiple screw connectors 4 as described above, it is possible to reduce the local deformation of the frame edge member 2 that is not fixed to the protrusion by the screw connectors 4 and is not synchronized with the deformation of the main frame 1.

[0062] Furthermore, in embodiments where the protrusion 23 is also provided, the aforementioned design of providing multiple screw connectors 4 can reduce the burden on the protrusion 23 in resisting the reaction force of the mask plate, making the overall structure of the mask frame more reliable.

[0063] In an alternative implementation, refer to the appendix. Figure 4 As shown, the first surface 13 on all four sides of the main frame 1 is provided with a recess 15, and the screw connector 4 is installed at the bottom of the recess.

[0064] During the disassembly and assembly of the screw connector 4, when the groove 15 is present, it is relatively easy to prevent the screw connector 4 from contacting the first surface 13 of the main frame 1, reducing the risk of scratching the first surface 13 and making the risk of disassembly and assembly of the screw connector 4 controllable.

[0065] An embodiment of a second aspect of this application provides a mask assembly, as shown in the attached drawing. Figure 1As shown, the mask assembly includes the mask frame provided in the aforementioned first aspect embodiment, and also includes a mask 5, the four edges of which are fixedly joined to the mask connection end 22 of the frame edge member 2 by welding.

[0066] Among them, the mask 5 can be selected, but is not limited to, a fine metal mask (FMM) or an open metal mask (coarse metal mask, CMM or common fine metal mask, CFM, etc.).

[0067] An embodiment of the third aspect of this application provides a method for replacing the mask in the mask assembly of the aforementioned second aspect embodiment, with reference to the appendix. Figure 7 As shown, the processing steps include: S10: Remove the original mask from the mask frame; S20: Disassemble the mask frame and separate the pad 3 and frame component 2; S30: Thin the removed pad 3; S40: Grind the excess structure remaining on the mask connection end 22 of the frame edge component 2 to remove these excess structures; S50: The pad 3 and frame component 2 processed by steps S30 and S40 are reassembled onto the main frame 1 to form a mask frame. S60: The mask frame obtained in step S50 is further processed, and a mask bonding surface is processed on the mask connection end 22 of the frame edge member 2.

[0068] The redundant structures in step S60 include, but are not limited to, the mask mesh structure and welding structure remaining on the frame edge member 2 after the mask plate is removed.

[0069] In an optional embodiment, the order in which steps S30 and S40 are implemented is not important. That is, step S30 can be implemented before step S40, step S30 can be implemented after step S40, or steps S30 and S40 can be implemented simultaneously.

[0070] In an optional embodiment, the reprocessing in step S60 includes fine grinding of the upper end face 220 of the frame edge members around the mask frame so that the upper end face 220 of the frame edge members around the mask frame is in the same plane, and at the same time, the upper end face 220 of the frame edge members is processed to a suitable height.

[0071] In an optional embodiment, the reprocessing in step S60 further includes machining grooves for connecting the mask plate on the upper end face 220 of the frame edge members around the mask frame.

[0072] In an optional embodiment, the method of thinning the pad 3 in step S30 is to replace the original pad 3 with a pad 3 that is thinner than the original one.

[0073] In an optional embodiment, the method of thinning the pad 3 in step S30 is to remove one or more layers of the multilayer thin plates that make up the pad 3 to form a new pad 3 with reduced thickness.

[0074] In an optional embodiment, in step S30, the pad 3 removed from the mask frame is thinned by mechanical processing such as grinding to form a new thinned pad 3.

[0075] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the embodiments of this application should be included within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A mask frame, characterized in that, It includes a main frame, which is rectangular and has inwardly extending protrusions on its four inner sides. There is a receiving groove between the lower surface of the protrusions and the bottom surface of the main frame. Each side of the main frame is provided with a frame edge component. The long axis of the frame edge component is consistent with the extension direction of the corresponding side of the main frame. The frame edge component has a pressure end and a mask connection end in a direction orthogonal to its long axis. The pressure end extends into the receiving groove of the corresponding side of the main frame, and the mask connection end extends into the inside of the main frame for connecting the mask plate. A pad is provided between the pressure end of the frame member and the corresponding protrusion, and the pressure end, the protrusion and the pad are detachably connected by screws.

2. The mask frame according to claim 1, characterized in that, The frame member has a protrusion at the pressure end, and the lower surface of the protrusion at the corresponding position has a groove adapted to accommodate the protrusion, with the protrusion at least partially accommodated in the groove.

3. The mask frame according to claim 2, characterized in that, The protrusion extends from one end to the other along the long axis of the frame member.

4. The mask frame according to claim 1, characterized in that, Each of the aforementioned frame edge members is provided with pads of various thicknesses for replacement.

5. The mask frame according to claim 1, characterized in that, The pad is configured as a multi-layered thin plate stacked on top of each other.

6. The mask frame according to claim 1, characterized in that, The mask connecting end has a mask bonding surface, which is located inside the upper end surface of the frame edge member, and the height of the mask bonding surface is not lower than the first surface of the main frame.

7. The mask frame according to claim 6, characterized in that, The mask bonding surface is higher than the first surface of the main frame.

8. The mask frame according to claim 1, characterized in that, Each of the frame edge members is provided with a plurality of screw connectors, and the plurality of screw connectors are spaced apart along the long axis of the frame edge member; The first surface of each of the four sides of the main frame is provided with a recessed groove, and the screw connector is installed at the bottom of the recessed groove.

9. A mask assembly, characterized in that, include: The mask frame according to any one of claims 1-8; as well as The mask plate has its four edges fixedly joined to the mask connection end of the frame member by welding.

10. A method for replacing the mask in a mask assembly as described in claim 9, comprising the following steps: S10: Remove the original mask from the mask frame; S20: Disassemble the mask frame and separate the pad and frame components; S30: Thinning treatment of the pad; S40: Grind away any excess structure remaining on the mask connection end of the frame edge component to remove it. S50: The pad and frame components processed in steps S30 and S40 are reassembled onto the main frame to form a mask frame. S60: The mask frame obtained in step S50 is further processed to create a mask bonding surface on the mask connection end of the frame edge component.

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