Optical six-dimensional force-moment sensor

Abstract

This application relates to an optical six-dimensional force-torque sensor, comprising: an elastic body including a measuring element, a fixing element, and an elastic connector, wherein the measuring element is connected to the fixing element via the elastic connector; a detection plate connected to the fixing element; a horizontal displacement detection assembly including a light-emitting plate, a light source, and PSD elements; the light-emitting plate is connected to the measuring element; the light source is disposed on the side of the light-emitting plate away from the detection plate, and the light-emitting plate has a light-emitting hole for accommodating light passing through; four PSD elements are mounted on the detection plate in a circular arrangement around the center point of the detection plate, and the PSD elements are used to receive light emitted from the light-emitting hole; and a vertical displacement detection assembly including an infrared reflective element; four infrared reflective elements are mounted on the detection plate in a circular arrangement around the center point of the detection plate. This invention can effectively control costs, reduce the use of PCB boards, and simplify the sensor structure.

Description

Technical Field

[0001] This application relates to the field of mechanical sensor technology, and in particular to an optical six-dimensional force-torque sensor. Background Technology

[0002] A six-dimensional force-torque sensor is a key component capable of simultaneously detecting forces (Fx, Fy, Fz) in three orthogonal directions and torques (Mx, My, Mz) in three directions. It is an essential part for achieving precise control of robots. With the rapid development of industrial automation and intelligent robotics, especially in complex applications such as precision assembly, polishing, and medical surgery, the demand for such sensors continues to rise, and performance and cost requirements are also increasing.

[0003] Currently, most mainstream six-dimensional force sensors employ the strain gauge measurement principle based on metallic elastomers. This technology decouples force and torque components by attaching multiple strain gauge bridges to the surface of a precision-machined elastomer structure and measuring the resistance change caused by its deformation under stress. However, this traditional approach suffers from the following problems: its performance is highly dependent on extremely complex strain gauge attachment processes, which are difficult and result in high sensor costs.

[0004] Therefore, there is a need to provide an optical six-dimensional force-torque sensor with simpler manufacturing process and structure, and easier cost control. Summary of the Invention

[0005] Therefore, it is necessary to provide an optical six-dimensional force-torque sensor, the specific technical solution of which is as follows.

[0006] An optical six-dimensional force-torque sensor, comprising: An elastomer includes a measuring element, a fixing element, and an elastic connector, wherein the measuring element is connected to the fixing element via the elastic connector; The detection plate is connected to the fixing component; A horizontal displacement detection assembly includes a light-emitting plate, a light source, and PSD elements; the light-emitting plate is connected to a measuring component; the light source is located on the side of the light-emitting plate away from the detection plate, and the light-emitting plate is provided with a light-emitting hole to allow light to pass through; four PSD elements are mounted on the detection plate in a circular arrangement around the center point of the detection plate, and the PSD elements are used to receive the light emitted from the light-emitting holes. A vertical displacement detection assembly includes an infrared reflective element; four infrared reflective elements are mounted on the detection plate in a circular arrangement around the center point of the detection plate.

[0007] Furthermore, the four PSD elements are configured as a first pair of PSD elements and a second pair of PSD elements; the first pair of PSD elements is parallel to the X-axis of the sensor, and the second pair of PSD elements is parallel to the Y-axis of the sensor. The four infrared reflective elements are configured as a first pair of infrared reflective elements and a second pair of infrared reflective elements; the line connecting the first pair of infrared reflective elements and the line connecting the second pair of infrared reflective elements intersects at the center point of the detection plate.

[0008] Furthermore, the four PSD elements are arranged symmetrically around the center point of the detection plate; the four infrared reflective elements are also arranged symmetrically around the center point of the detection plate.

[0009] Furthermore, the horizontal displacement detection assembly also includes a light source plate; the light-emitting plate has a groove on the side away from the detection plate, the light source plate is connected to the light-emitting plate and closes the groove to form a closed space, and the light-emitting hole is connected to the closed space; the light source is mounted on the light source plate and placed in the groove.

[0010] Furthermore, the inner wall of the enclosed space is provided with a black light-absorbing layer.

[0011] Furthermore, the light-emitting plate is provided with four grooves, and four enclosed spaces are formed between the light source plate and the light-emitting plate; each enclosed space is provided with a light source; the four PSD elements are respectively used to receive the light from the four light sources in a one-to-one correspondence.

[0012] Furthermore, the fixing member is ring-shaped, and the measuring member is placed inside the fixing member; one end of the elastic connector is connected to the fixing member, and the other end is connected to the measuring member, so that a hollow part is formed between the fixing member and the measuring member.

[0013] Furthermore, the fixing member includes a first end and a second end; the measuring member is connected to the first end of the fixing member through an elastic connector, and the detection plate is connected to the second end of the fixing member, so that a movable space is formed between the fixing member and the detection plate.

[0014] Furthermore, a top cover plate is connected to the side of the measuring element away from the detection plate; a gap is formed between the top cover plate and the measuring element.

[0015] Furthermore, the gap is filled with an elastic sealing element.

[0016] Beneficial effects: The optical six-dimensional force-torque sensor provided by this invention uses PSD elements and a light source to detect horizontal displacement, and combines an infrared reflective element to detect vertical height changes, thereby realizing the detection of six-dimensional force-torque; it avoids the complex strain gauge bonding process in traditional solutions, thus effectively controlling costs; by mounting each PSD element and the infrared reflective element on the same detection board, the use of PCB boards is reduced, and the structure of the sensor is simplified. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of the sensor; Figure 2 This is a cross-sectional view of the sensor; Figure 3 This is a schematic diagram showing the arrangement of PSD components and infrared reflective components on the detection board; Figure 4 A schematic diagram showing the sensor with the top cover hidden. Figure 5 This is a schematic diagram of the light-emitting plate.

[0019] Explanation of reference numerals in the attached diagram: 1. Elastomer; 2. Detection plate; 3. Top cover plate; 4. Base plate; 11. Measuring components; 12. Fixing components; 13. Flexible connecting components; 31. Gap; 51. Light-emitting plate; 52. Light source; 53. PSD component #2; 54. PSD component #4; 55. PSD component #6; 56. PSD component #8; 57. Light source board; 511. Light exit hole; 512. Groove; 513. Annular groove; 61. Infrared reflective element #1; 62. Infrared reflective element #3; 63. Infrared reflective element #5; 64. Infrared reflective element #7. Detailed Implementation

[0020] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0021] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0023] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0024] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0025] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0026] Example Reference Figure 1-5 As shown, this embodiment provides an optical six-dimensional force-torque sensor, including an elastic body 1, a detection plate 2, a horizontal displacement detection component, and a vertical displacement detection component. (Refer to...) Figure 2 and Figure 4 As shown, the elastic body 1 includes a measuring element 11, a fixing element 12, and an elastic connector 13. The measuring element 11 is connected to the fixing element 12 via the elastic connector 13. During the measurement process, the force or torque to be measured is applied to the measuring element 11, causing a relative displacement between the measuring element 11 and the fixing element 12. The magnitude and direction of the force or torque are calculated by measuring the relative displacement.

[0027] Specifically, the detection plate 2 is connected to the fixing member 12, so that the detection plate 2 and the measuring member 11 are arranged in the vertical direction, that is, when the measuring member 11 moves in response to the external force, a relative displacement is formed between the measuring member 11 and the measuring plate.

[0028] Specifically, the horizontal displacement detection assembly includes a light-emitting plate 51, a light source 52, and PSD elements. The light-emitting plate 51 is connected to the measuring element 11, causing the light-emitting plate 51 to move with the measuring element 11. The light source 52 is located on the side of the light-emitting plate 51 away from the detection plate 2, and the light-emitting plate 51 has a light-emitting hole 511 for accommodating light rays. Four PSD elements are mounted on the detection plate 2, arranged circumferentially around its center, and these PSD elements are used to receive light rays emitted from the light-emitting holes 511. Specifically, the light-emitting plate 51 can be detachably connected to the measuring element 11 using screws.

[0029] When the light from the light source 52 is emitted outward through the light emission hole 511, the light shines on the PSD element. When the light emission plate 51 moves with the measuring element 11, the position of the light emitted from the light emission hole 511 changes accordingly. Therefore, when the measuring element 11 is displaced by an external force, the horizontal displacement can be calculated based on the change in the state of the light illuminating the PSD element through the light emission hole 511 before and after the displacement.

[0030] Specifically, the vertical displacement detection assembly includes an infrared reflective element; four infrared reflective elements are mounted on the detection plate 2, arranged circumferentially around the center point of the detection plate 2. The infrared reflective elements are used to measure the vertical distance between the light-emitting plate 51 and the detection plate 2. Specifically, a reflector can be set at the bottom of the light-emitting plate 51, or a mirror surface can be directly polished at the bottom of the light-emitting plate 51 to reflect the light emitted by the infrared reflective elements.

[0031] When the measuring element 11 is displaced by an external force, the light emitted by the infrared reflecting element is reflected by the bottom of the light-emitting plate 51 to calculate the vertical distance between the detection plate 2 and the light-emitting plate 51. In this embodiment, the horizontal displacement is detected by the horizontal displacement detection component, and the vertical displacement is detected by the vertical displacement detection component. The magnitude and direction of the force are detected based on the changes in the horizontal and vertical displacements combined with the stiffness coefficient of the elastic body 1.

[0032] The optical six-dimensional force-torque sensor provided in this embodiment uses a PSD element and a light source 52 to detect horizontal displacement, and combines an infrared reflective element to detect vertical height changes, thereby realizing the detection of six-dimensional force-torque. It avoids the complex strain gauge bonding process in traditional solutions, thus effectively controlling costs. By mounting each PSD element and the infrared reflective element on the same detection board 2, the use of PCB board is reduced, and the structure of the sensor is simplified.

[0033] Specifically, the PSD element and the infrared reflective element are located on the same side of the detection plate 2 and on the same plane, ensuring the accuracy of the measurement of horizontal displacement and vertical distance changes.

[0034] Reference Figure 3 As shown, in this embodiment, the four PSD elements are PSD element 2#53, PSD element 4#54, PSD element 6#55, and PSD element 8#56.

[0035] PSD elements 53 (2#) and 55 (6#) are configured as the first pair of PSD elements, arranged along the Y-direction, meaning they are positioned on opposite sides of the X-axis. Specifically, PSD elements 53 and 55 are parallel to the X-axis of the sensor and are used to measure the horizontal displacement of the fixing element 12 and the measuring element 11 in the X-direction. PSD elements 54 (4#) and 56 (8#) are configured as the second pair of PSD elements, also arranged along the X-direction, positioned on opposite sides of the Y-axis. Specifically, PSD elements 54 and 56 are parallel to the Y-axis of the sensor and are used to measure the horizontal displacement of the fixing element 12 and the measuring element 11 in the Y-direction. It should be noted that the measuring element 11, the light-emitting plate 51, and the detection plate 2 are not only arranged vertically, but their center lines are also collinear.

[0036] Specifically, the four PSD elements are arranged symmetrically around the center point of the detection plate 2, with an interval of 90°; the four infrared reflective elements are also arranged symmetrically around the center point of the detection plate 2, with an interval of 90°. This ensures that the measurement results of the four PSD elements and the four infrared reflective elements accurately reflect the force and torque they bear.

[0037] Continue to refer to Figure 3 As shown, the four infrared reflective elements are infrared reflective element 61 (1#), infrared reflective element 62 (3#), infrared reflective element 63 (5#), and infrared reflective element 64 (7#).

[0038] Infrared reflective elements 61 (#1) and 63 (#5) are configured as the first pair of infrared reflective elements, arranged along the Y-direction, i.e., on both sides of the X-axis, to measure the change in the vertical distance between the fixing member 12 and the measuring member 11 at infrared reflective elements 61 and 63. Infrared reflective elements 62 (#3) and 64 (#7) are configured as the second pair of infrared reflective elements, arranged along the X-direction, i.e., on both sides of the Y-axis, to measure the change in the vertical distance between the fixing member 12 and the measuring member 11 at infrared reflective elements 61 and 63. The line connecting the first pair of infrared reflective elements and the line connecting the second pair intersect at the center point of the detection plate 2.

[0039] Specifically, the measurement process for the six-dimensional force-torque Fx, Fy, Fz, Mx, My, and Mz is as follows: When calculating Fx, the sensitive elements are PSD element 53 (2#) and PSD element 55 (6#). The displacement value Δx in the X direction is obtained through PSD element 53 and PSD element 55. Combined with the horizontal stiffness coefficient kx of elastic body 1 in the X direction, the magnitude of Fx is calculated using the formula: Fx = kx * Δx. The direction of Fx is determined based on the direction of displacement, i.e., the sign of the relative displacement between the two elements.

[0040] When calculating Fy, the sensitive elements are PSD element 54 (4#) and PSD element 56 (8#). The displacement value Δy in the Y direction is obtained through PSD element 54 and PSD element 56. Combined with the horizontal stiffness coefficient ky of elastic body 1 in the Y direction, the magnitude of Fy is calculated using the formula: Fy = ky * Δy. The direction of Fy is determined based on the direction of displacement, i.e., the sign of the relative displacement between the two elements.

[0041] When calculating Fz, the sensitive elements are infrared reflective element 61 (1#), infrared reflective element 62 (3#), infrared reflective element 63 (5#), and infrared reflective element 64 (7#). The vertical displacement values ​​measured in the vertical direction of each of the four infrared reflective elements are obtained, and the average displacement Δz is taken. Combined with the axial stiffness coefficient Δz of elastic body 1 in the Z direction, the magnitude of Fz is calculated using the formula: Fz = kz * Δz. The direction of Fz is determined by the sign of the average displacement Δz.

[0042] When calculating the force Mx, the sensitive elements are infrared reflector 61 (1#) and infrared reflector 63 (5#). Mx is the torque around the X-axis. The vertical displacement is measured by infrared reflector 61 and infrared reflector 63 respectively, and the displacement difference Δz_x between the two elements is calculated. The magnitude of Mx is then calculated by combining the torsional stiffness coefficient kxθ of the elastic body 1 around the X-axis and the preset lever arm Lx. The calculation formula is: M = kxθ * Δz_x * Lx. The direction of Mx is determined by the sign of the displacement difference.

[0043] When calculating My, the sensitive elements are infrared reflective element 62 (#3) and infrared reflective element 64 (#7), where My is the torque about the Y-axis. The vertical displacement is measured using infrared reflective elements 62 and 64 respectively, and the displacement difference Δz_y between the two elements is calculated. This difference is then combined with the torsional stiffness coefficient kyθ of the elastic body 1 about the Y-axis and the preset lever arm Ly to calculate the magnitude of My. The formula is: M = kyθ * Δz_y * Ly. The direction of My is determined by the sign of the displacement difference.

[0044] When calculating Mz, the sensitive elements are PSD element 53 (2#), PSD element 54 (4#), PSD element 55 (6#), and PSD element 56 (8#). Mz is the torque about the Z-axis. Horizontal displacement values ​​are obtained through PSD elements 53 (2#), 54 (4#), 55 (6#), and 56 (8#), and the horizontal displacement distribution values ​​(Δx, Δy) of the four elements are calculated. Δx represents the displacement in the X direction before and after force application, and Δy represents the displacement in the Y direction before and after force application. This horizontal displacement distribution value (Δx, Δy) reflects the torsional deformation of elastic body 1 about the Z-axis. The magnitude of Mz is calculated by combining the torsional stiffness coefficient kzθ of elastic body 1 about the Z-axis and the preset lever arm Lz. The calculation formula is: M = kzθ * (Δx, Δy) * Lz. The direction of Mz is determined based on the offset trend of the horizontal displacement distribution.

[0045] Specifically, the horizontal displacement detection assembly also includes a light source plate 57. A groove 512 is provided on the side of the light-emitting plate 51 away from the detection plate 2. The light source plate 57 is connected to the light-emitting plate 51 and seals the groove 512 to form a closed space. The light-emitting hole 511 communicates with the closed space. The light source 52 is mounted on the light source plate 57 and placed within the groove 512. The light source 52 is powered by the light source plate 57. The light source 52 is placed within the groove 512, and the closed space blocks the light, preventing interference from external light. This allows the light source 52 to illuminate the PSD element through the light-emitting hole 511, ensuring the measurement accuracy of the PSD element.

[0046] Specifically, the inner wall of the enclosed space is provided with a black light-absorbing layer. This layer absorbs the light diffused from the light source 52 in all directions, preventing light reflection within the enclosed space from interfering with the light passing through the light exit hole 511, thereby further improving the measurement accuracy of the PSD element. Furthermore, the inner wall of the light exit hole 511 is also provided with a black light-absorbing layer to prevent light reflection on the inner wall of the light exit hole 511, ensuring that the light illuminating the PSD element is direct light from the light source 52, further improving the measurement accuracy of the PSD element.

[0047] Specifically, the light-absorbing layer can be formed by using a black material on the light-emitting plate 51, or it can be formed by anodizing. Alternatively, it can be formed by plating a black coating.

[0048] Specifically, refer to Figure 5As shown, the light-emitting plate 51 has four grooves 512, forming four enclosed spaces between the light source plate 57 and the light-emitting plate 51; each enclosed space contains a light source 52; the four PSD elements are used to receive the light from the four light sources 52 in a corresponding manner. Each enclosed space has a light-emitting hole 511 communicating with it, so that each light source 52 emits light through the corresponding light-emitting hole 511 to the corresponding PSD element, avoiding mutual interference between the light sources 52.

[0049] Specifically, the light-emitting plate 51 is provided with an annular groove 513 on the side away from the detection plate 2, and the four grooves 512 are all located in the annular groove 513. The light source plate 57 is annular and is located in the annular groove 513. The annular groove 513 is used to position the light source plate 57.

[0050] It should be noted that in this embodiment, each light source 52 can be an LED lamp.

[0051] Specifically, the fixing member 12 is ring-shaped, and the measuring member 11 is placed inside the fixing member 12; one end of the elastic connecting member 13 is connected to the fixing member 12, and the other end is connected to the measuring member 11, forming a hollow portion between the fixing member 12 and the measuring member 11. The elastic connecting member 13 is beam-shaped, and when the measuring member 11 of the sensor is subjected to external force, the elastic connecting member 13 deforms accordingly, causing relative displacement between the measuring member 11 and the fixing member 12.

[0052] Specifically, the fixing member 12 includes a first end and a second end; the measuring member 11 is connected to the first end of the fixing member 12 via an elastic connector 13, and the detection plate 2 is connected to the second end of the fixing member 12, forming a movable space between the fixing member 12 and the detection plate 2. This movable space is used to accommodate the horizontal displacement detection component and the vertical displacement detection component, allowing the light-emitting plate 51 and the detection plate 2 to be relatively separated, forming a gap of a certain thickness, which facilitates relative movement between the light-emitting plate 51 and the detection plate 2, thereby presenting relative changes in horizontal displacement and vertical distance.

[0053] Specifically, continue to refer to Figure 1 and Figure 2 As shown, a top cover plate 3 is connected to the side of the measuring element 11 away from the detection plate 2; a gap 31 is formed between the top cover plate 3 and the measuring element 11. The top cover plate 3 protects the internal structure of the sensor, and the reserved gap 31 accommodates relative displacement between the top cover plate 3 and the fixing member 12. The top cover plate 3 bears external forces and transmits the external forces to the measuring element 11. Specifically, the top cover plate 3 can be detachably connected to the measuring element 11 by screws.

[0054] Correspondingly, the second end of the fixing member 12 is connected to the base plate 4. The sensor is mounted on a preset mounting surface via the base plate 4, which further protects the sensor. Specifically, the base plate 4 can be detachably connected to the fixing member 12 via screws.

[0055] Specifically, the gap 31 is filled with an elastic sealing element, which seals the gap 31 and provides further protection for the inside of the sensor.

[0056] It should be noted that the elastic sealing element can be made of silicone or other elastic materials. The thickness of the gap 31 is much greater than the maximum vertical distance variation of the measuring element 11, to avoid interference with the measurement results.

[0057] Specifically, the optical six-dimensional force-torque sensor also includes a calculation module, which is connected to the detection plate 2 and is used to calculate the corresponding force-torque based on the horizontal displacement detected by the horizontal displacement detection component and the vertical displacement detected by the vertical displacement detection component.

[0058] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0059] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An optical six-dimensional force-torque sensor, characterized in that, include: An elastomer includes a measuring element, a fixing element, and an elastic connector, wherein the measuring element is connected to the fixing element via the elastic connector; The detection plate is connected to the fixing component; A horizontal displacement detection assembly includes a light-emitting plate, a light source, and PSD elements; the light-emitting plate is connected to a measuring component; the light source is located on the side of the light-emitting plate away from the detection plate, and the light-emitting plate is provided with a light-emitting hole to allow light to pass through; four PSD elements are mounted on the detection plate in a circular arrangement around the center point of the detection plate, and the PSD elements are used to receive the light emitted from the light-emitting holes. A vertical displacement detection assembly includes an infrared reflective element; four infrared reflective elements are mounted on the detection plate in a circular arrangement around the center point of the detection plate.

2. The optical six-dimensional force-torque sensor according to claim 1, characterized in that, The four PSD elements are configured as a first pair of PSD elements and a second pair of PSD elements; the first pair of PSD elements are parallel to the X-axis of the sensor, and the second pair of PSD elements are parallel to the Y-axis of the sensor. The four infrared reflective elements are configured as a first pair of infrared reflective elements and a second pair of infrared reflective elements; the line connecting the first pair of infrared reflective elements and the line connecting the second pair of infrared reflective elements intersects at the center point of the detection plate.

3. The optical six-dimensional force-torque sensor according to claim 1, characterized in that, The four PSD elements are arranged symmetrically around the center point of the detection plate; the four infrared reflective elements are arranged symmetrically around the center point of the detection plate.

4. The optical six-dimensional force-torque sensor according to claim 1, characterized in that, The horizontal displacement detection assembly also includes a light source plate; the light-emitting plate has a groove on the side away from the detection plate, the light source plate is connected to the light-emitting plate and closes the groove to form a closed space, and the light-emitting hole is connected to the closed space; the light source is installed on the light source plate and placed in the groove.

5. An optical six-dimensional force-torque sensor according to claim 4, characterized in that, The inner wall of the enclosed space is covered with a black light-absorbing layer.

6. An optical six-dimensional force-torque sensor according to claim 4, characterized in that, The light-emitting plate has four grooves, and four enclosed spaces are formed between the light source plate and the light-emitting plate; each enclosed space contains a light source; the four PSD elements are used to receive the light from the four light sources in a one-to-one correspondence.

7. An optical six-dimensional force-torque sensor according to claim 1, characterized in that, The fixing member is ring-shaped, and the measuring member is placed inside the fixing member; one end of the elastic connector is connected to the fixing member, and the other end is connected to the measuring member, so that a hollow part is formed between the fixing member and the measuring member.

8. An optical six-dimensional force-torque sensor according to claim 1, characterized in that, The fixing component includes a first end and a second end; the measuring component is connected to the first end of the fixing component through an elastic connector, and the detection plate is connected to the second end of the fixing component, so that a movable space is formed between the fixing component and the detection plate.

9. An optical six-dimensional force-torque sensor according to claim 8, characterized in that, The measuring element is connected to an upper cover plate on the side away from the detection plate; a gap is formed between the upper cover plate and the measuring element.

10. An optical six-dimensional force-torque sensor according to claim 9, characterized in that, The gap is filled with an elastic sealing element.

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