FAB event visualization processing method and fab event visualization processing system
By constructing electronic maps and dynamically mapping event data within semiconductor manufacturing plants, the problem of lack of spatial dimension correlation in event data management is solved, enabling precise event location and intuitive display, and supporting rapid querying and decision-making.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- HUAHONG INTEGRATED CIRCUIT (CHENGDU) CO LTD
- Filing Date
- 2026-03-30
- Publication Date
- 2026-06-12
AI Technical Summary
The existing event data management in semiconductor manufacturing plants (FABs) lacks spatial correlation, making it impossible to intuitively identify areas with frequent events and quickly retrieve historical information.
An electronic map is constructed by acquiring digital layout data of the FAB area, dynamically mapping event data to corresponding coordinate locations, and performing multi-dimensional differentiated rendering based on event type, frequency of occurrence, and processing status, supporting interactive operation and real-time updates.
It enables precise positioning and spatial dimension association of events within the FAB layout, providing an intuitive understanding of event distribution and processing, and offering decision support.
Smart Images
Figure CN122196091A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a FAB event visualization processing method and a FAB event visualization processing system. Background Technology
[0002] Currently, semiconductor manufacturing plants (FABs) commonly use traditional tabular records or simple statistical charts to manage issue data. While these methods can reflect the quantity and temporal distribution of events, they lack the ability to display the spatial dimension of event locations and provide interactive analysis capabilities.
[0003] In addition, existing systems often struggle to integrate event data with the actual layout of the FAB, making it difficult for managers to intuitively identify areas with frequent events and to quickly retrieve historical event information for specific locations within the FAB. Summary of the Invention
[0004] The purpose of this invention is to provide a FAB event visualization processing method and a FAB event visualization processing system to solve the problem of lack of spatial dimension correlation in existing event data management.
[0005] To address the aforementioned technical problems, this invention provides a method for visualizing FAB events, comprising: acquiring digital layout data of the FAB region, and constructing an electronic map of the FAB region based on the digital layout data;
[0006] The event data of the FAB area is acquired, and the event data is dynamically mapped to the corresponding coordinates on the electronic map according to the location of the event, thereby generating an event visualization identifier;
[0007] The event visualization identifier is rendered in a multi-dimensional and differentiated manner based on the event type, occurrence frequency, and processing status of the event data.
[0008] Optionally, the FAB event visualization processing method further includes:
[0009] In response to the user's interactive operation on the event visualization icon, an event details window pops up.
[0010] Optionally, a structured processing interface can be provided when the event details window pops up;
[0011] When a user inputs a handling instruction through the processing interface, the processing status of the event data is updated, and the event visualization identifier in the electronic map is refreshed and rendered in real time.
[0012] Optionally, the event details window includes several event records corresponding to the visual identifier of the event at the current coordinate position; the event records include at least one of event type information, occurrence time information, processing status information, and responsible object information.
[0013] Optionally, the event log includes event image information;
[0014] In response to user interaction with the event image information, the event image is displayed.
[0015] Optionally, the multi-dimensional differentiated rendering includes:
[0016] The event visualization identifiers are divided into equal parts according to the number of event types, and different divided areas are rendered with colors or textures corresponding to the event types.
[0017] The number of occurrences is rendered in numerical form.
[0018] Optionally, the event data includes multiple query categories, and the FAB event visualization processing method further includes:
[0019] In response to the user's category query operation, the category record information corresponding to the multiple event data will pop up according to the query category selected by the user.
[0020] Optionally, the steps for obtaining the event data include:
[0021] Extract raw data from the event database within a preset time period;
[0022] The event data is obtained after the raw data is cleaned, classified, filtered, and integrated.
[0023] To address the aforementioned technical problems, the present invention also provides a FAB event visualization processing system, which is used to implement the FAB event visualization processing method described above; the FAB event visualization processing system includes: a coordinate mapping module, a data acquisition and integration module, and a visualization display module;
[0024] The coordinate mapping module is used to acquire digital layout data of the FAB area and construct an electronic map of the FAB area based on the digital layout data.
[0025] The data acquisition and integration module is used to acquire event data in the FAB area and dynamically map the event data to the corresponding coordinates on the electronic map according to the location of the event, generating an event visualization identifier.
[0026] The visualization module is used to perform multi-dimensional differentiated rendering of the event visualization identifier based on the event type, occurrence frequency, and processing status of the event data.
[0027] Optionally, the FAB event visualization processing system further includes: an interactive query module and a details display module;
[0028] The interactive query module provides multiple query categories. In response to the user's category query operation, it pops up category record information corresponding to multiple event data according to the query category selected by the user.
[0029] The details display module responds to the user's interactive operation on the event visualization identifier by popping up an event details window.
[0030] In summary, the FAB event visualization processing method and system provided by this invention include: acquiring digital layout data of the FAB region and constructing an electronic map of the FAB region based on the digital layout data; acquiring event data of the FAB region and dynamically mapping the occurrence location of the event data to the corresponding coordinate position of the electronic map to generate an event visualization identifier; and performing multi-dimensional differentiated rendering of the event visualization identifier based on the event type, occurrence frequency, and processing status of the event data.
[0031] This configuration, by mapping event data to corresponding coordinates on an electronic map, enables precise location of events within the FAB layout, establishing a spatial dimensional association between events and the FAB. Furthermore, the event visualization labels are rendered and displayed based on event type, frequency of occurrence, and processing status, facilitating an intuitive understanding of event distribution and processing, aiding in monitoring and querying, and providing decision support for event prevention. Attached Figure Description
[0032] Those skilled in the art will understand that the accompanying drawings are provided to better understand the invention and do not constitute any limitation on the scope of the invention.
[0033] Figure 1 This is a flowchart of the FAB event visualization processing method according to an embodiment of the present invention.
[0034] Figure 2 This is a schematic diagram of the event visualization identifier in an embodiment of the present invention, rendered using multi-dimensional differentiated rendering.
[0035] Figure 3 This is a schematic diagram of the content displayed by the visualization module in an embodiment of the present invention.
[0036] In the attached diagram: 1-Electronic map; 2-Query area; 3-Record display area; 4-Event image display area. Detailed Implementation
[0037] To make the objectives, advantages, and features of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the embodiments of this invention. Furthermore, the structures shown in the drawings are often part of the actual structures. In particular, different figures may emphasize different aspects and may sometimes use different scales.
[0038] As used in this invention, the singular forms “a,” “an,” “one,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature; “one end” and “the other end,” and “proximal end” and “distal end” generally refer to two corresponding parts, which include not only endpoints. Furthermore, the terms "installed," "connected," and "attached," as used in this invention, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or upper directions pointing towards the top of the corresponding figure, and downward or lower directions pointing towards the bottom of the corresponding figure.
[0039] The purpose of this invention is to provide a FAB event visualization processing method and system to solve the problem of the lack of spatial dimensional correlation in existing event data management. The following description refers to the accompanying drawings.
[0040] Please refer to Figure 1 and Figure 2This invention provides a method for visualizing FAB events, which includes the following steps:
[0041] Step S1: Obtain the digital layout data of the FAB area, and construct the electronic map of the FAB area based on the digital layout data. Figure 1 ;
[0042] Step S2: Obtain event data from the FAB area and dynamically map the event data to the electronic location based on the location where the event occurred. Figure 1 The corresponding coordinates are used to generate a visual identifier for the event;
[0043] Step S3: Perform multi-dimensional differentiated rendering of the event visualization identifier based on the event type, occurrence frequency, and processing status of the event data.
[0044] In step S1, the digital layout data of the FAB area may include, for example, CAD drawings, floor plans, floor layouts, equipment partition diagrams, etc. of the FAB. Through coordinate mapping and analysis, a two-dimensional or three-dimensional electronic map can be constructed. Figure 1 The electronic location Figure 1 It can visually display the FAB's factory structure and key locations, providing an intuitive reference for subsequent event positioning.
[0045] In step S2, the event data comes from the FAB's Issue Database, which includes historical events and real-time events. In practice, the type of event data can be set according to requirements. For example, if it is necessary to analyze the occurrence of events over a historical period, data from that historical period can be extracted from the event database. Or, if it is necessary to monitor the current event situation in real time, data reported from the field in real time can be extracted from the event database.
[0046] Optionally, the steps for obtaining the event data include:
[0047] Extract raw data from the event database within a preset time period;
[0048] The original data is cleaned (removing duplicate and invalid data), classified and filtered (filtered by event type, region, etc.), and integrated (merging scattered data fields into structured event data) to obtain the event data.
[0049] The event data includes the location of the event, and the information structure of this location can be set according to the FAB's factory layout. For example, in one example, the location includes area and coordinate information. In another example corresponding to a multi-story factory, the location may also include floor information.
[0050] Then, based on the location of the event data, a coordinate matching algorithm is used to map the event location to an electronic map. Figure 1 The coordinates of the event are used to bind the event to a specific coordinate location, ensuring that each event can be visualized and identified in the electronic map. Figure 1 Find it at the corresponding coordinates.
[0051] Then, step S3 performs multi-dimensional differentiated rendering of the event visualization identifiers based on the event type, frequency of occurrence, and processing status. Different event types can be rendered with different shapes, patterns, or colors for easy distinction. For example... Figure 2 In the example shown, the event types include three categories: fire, liquid leak, and gas leak, represented by red, blue, and orange, respectively. Different handling states can be distinguished by methods such as static or dynamic flashing.
[0052] Optionally, in step S3, the multi-dimensional differential rendering includes:
[0053] The event visualization identifiers are divided into equal parts according to the number of event types, and different divided areas are rendered with colors or textures corresponding to the event types.
[0054] The number of occurrences is rendered in numerical form.
[0055] In some embodiments, electronically Figure 1 Multiple events may exist or occur at the same coordinate location. These events may be of the same event type or different event types. If all events at the same coordinate location are of the same type, meaning there is only one event type, then the event visualization will appear as a whole, i.e., divided into equal parts. For example... Figure 2 In the example shown, it appears as a complete circle. If there are more than two event types at the same coordinate position, then the event visualization label is divided equally according to the number of event types. For example... Figure 2 In the example shown, the coordinates indicated by point A contain both fire and liquid leakage events. In this case, the event visualization is divided into two equal parts, filled with red (representing fire) and blue (representing liquid leakage), respectively. When multiple event types exist at the same coordinate location, the visualization is divided into multiple sector areas, each filled with the color corresponding to the event type, with the total number of occurrences displayed in the center. This rendering method allows users to clearly understand the distribution, type, and frequency of events at a glance.
[0056] The number of events can be rendered directly as a numerical overlay, such as... Figure 2 In the example shown, the coordinates indicated by point A have experienced 3 events, so the event visualization label directly displays the number "3".
[0057] Regarding the event processing status, in one example, unprocessed events are indicated by a blinking animation; events being processed are indicated by a pulsating effect; and processed events are indicated by a static display.
[0058] Based on the above steps, by mapping event data to electronic geolocation Figure 1 The corresponding coordinates are used to accurately locate events within the FAB layout, establishing a spatial dimensional association between events and FABs. Furthermore, the event visualization markers are rendered and displayed based on event type, frequency of occurrence, and processing status, facilitating a clear understanding of event distribution and processing, aiding in monitoring and querying, and providing decision support for event prevention.
[0059] Optionally, the FAB event visualization processing method further includes:
[0060] Step S4: In response to the user's interactive operation on the event visualization icon, an event details window pops up.
[0061] When the user clicks on the electronic map Figure 1 When an event is visualized on the electronic map, the event details are displayed, and an event details window pops up. In one example, this event details window is displayed as a modal in the electronic map. Figure 1 Above, avoid obstructing the electronic ground. Figure 1 The key area.
[0062] Optionally, the event details window includes several event records corresponding to the visual identifier of the event at the current coordinate position; the event records include at least one of event type information, occurrence time information, processing status information, and responsible object information.
[0063] Please refer to Figure 2 In one example, an event details window can pop up on the electronic map. Figure 1 It is displayed in a table format on the upper right side. Figure 2 In the example, when a user clicks on the event visualization marker at point A, the pop-up event details window contains three event records, including one fire event and two liquid leakage events. Each event record includes the event type, occurrence time, handling status (handled, unhandled, under handling), and responsible party (such as responsible department, responsible section, and responsible person).
[0064] Furthermore, the event log includes event image information;
[0065] In response to user interaction with the event image information, the event image is displayed. The event log may include image information at the time the event occurred. It should be understood that the image information here includes pictures or videos; when a user clicks on the event image information, they can zoom in to view the image or play the related video.
[0066] Optionally, when the event details window pops up, a structured processing interface is provided; in one example, the processing interface includes interactive units such as task assignment, progress update, and closed-loop confirmation, which allow users to interactively input processing instructions.
[0067] Furthermore, upon receiving a processing instruction input by the user through the processing interface, the processing status of the event data is updated, and the electronic data is refreshed and rendered in real time. Figure 1 The event is visualized as an identifier. After the user inputs a handling command through this processing interface, the system updates the processing status of the event data and refreshes the electronic map in real time. Figure 1 Visualized event markers on the screen.
[0068] Optionally, the event data includes multiple query categories, and the FAB event visualization processing method further includes:
[0069] Step S5: In response to the user's category query operation, pop up category record information corresponding to multiple event data according to the query category selected by the user.
[0070] In addition to obtaining event details for a specific coordinate location by clicking the event visualization icon to pop up the event details window according to step S4, the processing method in this embodiment also supports querying category record information of events at multiple different coordinate locations through category query. It should be understood that steps S4 and S5 are not sequential; they can be executed selectively, rather than simultaneously.
[0071] Please refer to Figure 2 In one example, the event data includes multiple query categories such as event type, time range, processing status, responsible area, and responsible party. When a user selects a query category through various interactive methods such as input, drop-down menus, or buttons, a pop-up window displays category records for the corresponding event data. For example, selecting the "Leakage" type lists all leakage events, which can be viewed electronically. Figure 1 The relevant coordinates are highlighted.
[0072] Based on the FAB event visualization processing method described above, this embodiment of the invention also provides a FAB event visualization processing system, which includes: a coordinate mapping module, a data acquisition and integration module, and a visualization display module;
[0073] The coordinate mapping module is used to acquire digital layout data of the FAB area and construct an electronic map of the FAB area based on the digital layout data. Figure 1 ;
[0074] The data acquisition and integration module is used to acquire event data in the FAB area and dynamically map the event data to the electronic map based on the location of the event. Figure 1 The corresponding coordinates are used to generate a visual identifier for the event;
[0075] The visualization module is used to perform multi-dimensional differentiated rendering of the event visualization identifier based on the event type, occurrence frequency, and processing status of the event data.
[0076] Please refer to Figure 2 It demonstrates an example of how the visualization module performs multi-dimensional differentiated rendering of multiple event visualization icons. Each event visualization icon is rendered as a circle, and its position represents its location on the electronic map. Figure 1 The coordinates in the diagram.
[0077] Furthermore, the FAB event visualization processing system also includes: an interactive query module and a details display module;
[0078] The interactive query module provides multiple query categories. In response to the user's category query operation, it pops up category record information corresponding to multiple event data according to the query category selected by the user.
[0079] The details display module responds to the user's interactive operation on the event visualization identifier by popping up an event details window.
[0080] Optional, please refer to Figure 3 The content displayed in the visualization module includes electronic geotagged information. Figure 1 The interactive query module includes a query area 2 and an event data record display area 3. Query area 2 displays interactive units for the query categories of the interactive query module, such as input boxes, drop-down menus, or buttons. In one embodiment, the event details window popped up by the details display module and the category record information popped up by the interactive query module can both be located in the record display area 3. Furthermore, the content displayed by the visualization module also includes an event image display area 4, which is used to display event images.
[0081] Optionally, the visualization module uses the WCF framework and C# programming language to implement a graphical interface, supporting operations such as zooming and clicking. Both the interactive query module and the details display module can optionally be implemented using the C# programming language.
[0082] In summary, the FAB event visualization processing method and system provided by this invention include: acquiring digital layout data of the FAB region and constructing an electronic map of the FAB region based on the digital layout data; acquiring event data of the FAB region and dynamically mapping the occurrence location of the event data to the corresponding coordinate position of the electronic map to generate an event visualization identifier; and performing multi-dimensional differentiated rendering of the event visualization identifier based on the event type, occurrence frequency, and processing status of the event data.
[0083] This configuration, by mapping event data to corresponding coordinates on an electronic map, enables precise location of events within the FAB layout, establishing a spatial dimensional association between events and the FAB. Furthermore, the event visualization labels are rendered and displayed based on event type, frequency of occurrence, and processing status, facilitating an intuitive understanding of event distribution and processing, aiding in monitoring and querying, and providing decision support for event prevention.
[0084] It should be noted that the above embodiments can be combined with each other. The above description is only a description of preferred embodiments of the present invention and is not intended to limit the scope of the present invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present invention.
Claims
1. A method for visualizing and processing FAB events, characterized in that, include: Obtain digital layout data of the FAB region, and construct an electronic map of the FAB region based on the digital layout data; The event data of the FAB area is acquired, and the event data is dynamically mapped to the corresponding coordinates on the electronic map according to the location of the event, thereby generating an event visualization identifier; The event visualization identifier is rendered in a multi-dimensional and differentiated manner based on the event type, occurrence frequency, and processing status of the event data.
2. The FAB event visualization processing method according to claim 1, characterized in that, The FAB event visualization processing method also includes: In response to the user's interactive operation on the event visualization icon, an event details window pops up.
3. The FAB event visualization processing method according to claim 2, characterized in that, When the event details window pops up, a structured processing interface is provided; When a user inputs a handling instruction through the processing interface, the processing status of the event data is updated, and the event visualization identifier in the electronic map is refreshed and rendered in real time.
4. The FAB event visualization processing method according to claim 2, characterized in that, The event details window includes several event records corresponding to the visual identifier of the event at the current coordinate position; the event records include at least one of the following: event type information, occurrence time information, processing status information, and responsible party information.
5. The FAB event visualization processing method according to claim 4, characterized in that, The event log includes event image information; In response to user interaction with the event image information, the event image is displayed.
6. The FAB event visualization processing method according to claim 1, characterized in that, The multi-dimensional differentiated rendering includes: The event visualization identifiers are divided into equal parts according to the number of event types, and different divided areas are rendered with colors or textures corresponding to the event types. The number of occurrences is rendered in numerical form.
7. The FAB event visualization processing method according to claim 1, characterized in that, The event data includes multiple query categories, and the FAB event visualization processing method further includes: In response to the user's category query operation, the category record information corresponding to the multiple event data will pop up according to the query category selected by the user.
8. The FAB event visualization processing method according to claim 1, characterized in that, The steps for obtaining the event data include: Extract raw data from the event database within a preset time period; The event data is obtained after the raw data is cleaned, classified, filtered, and integrated.
9. A FAB event visualization processing system, characterized in that, Used to implement the FAB event visualization processing method according to any one of claims 1 to 8; The FAB event visualization processing system includes: a coordinate mapping module, a data acquisition and integration module, and a visualization display module; The coordinate mapping module is used to acquire digital layout data of the FAB area and construct an electronic map of the FAB area based on the digital layout data. The data acquisition and integration module is used to acquire event data in the FAB area and dynamically map the event data to the corresponding coordinates on the electronic map according to the location of the event, generating an event visualization identifier. The visualization module is used to perform multi-dimensional differentiated rendering of the event visualization identifier based on the event type, occurrence frequency, and processing status of the event data.
10. The FAB event visualization processing system according to claim 9, characterized in that, The FAB event visualization processing system also includes: an interactive query module and a details display module; The interactive query module provides multiple query categories. In response to the user's category query operation, it pops up category record information corresponding to multiple event data according to the query category selected by the user. The details display module responds to the user's interactive operation on the event visualization identifier by popping up an event details window.