Optical self-calibration method for an ultraviolet photoelectron spectrometer

Abstract

The application provides an optical self-calibration method of an ultraviolet photoelectron spectrum analyzer, and relates to the technical field of precision calibration, and comprises the following steps: continuously adjusting an ultraviolet light source to multiple wavelength points in a target spectral range; at each wavelength point of the multiple wavelength points, measuring a photon number sequence of a main light path, a photon number sequence of a reference light path and a photoelectron number sequence emitted by a sample; calculating a calibration value of the reference light path based on the photon number sequence of the reference light path, and calculating an actual photon number sequence of the main light path based on the photoelectron number sequence emitted by the sample; calculating a spectral ratio calibration value of the main light path according to the actual photon number sequence of the main light path and the photon number sequence of the reference light path; and judging whether the optical module of the ultraviolet photoelectron spectrum analyzer is successfully self-calibrated according to the calibration value of the reference light path and the spectral ratio calibration value. The application avoids the cumbersome step of moving the device to a calibration room for calibration in the traditional method.

Description

Technical Field

[0001] This invention relates to the field of precision calibration technology, and specifically to an optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer. Background Technology

[0002] The photodetector in the optical module of an ultraviolet photoelectron spectroscopy analyzer has been widely used in many fields such as environmental monitoring, material surface analysis, and biomedical imaging. As a key optical measurement tool, it is widely used to measure the light intensity in the ultraviolet band and to detect the optical properties of different substances.

[0003] Currently, traditional calibration methods typically require removing the photodetector from its actual operating environment and transferring it to a specialized calibration device. However, the experimental environment used for calibration often differs significantly from the actual working environment. During calibration, factors such as the wavelength, intensity, and angle of the light source may deviate considerably between the calibration device and actual operating conditions. Since the response characteristics of photodetectors are often affected by various environmental factors, such as temperature, humidity, and fluctuations in the light source, these differences can lead to errors between the calibration results and the actual application results. Furthermore, traditional calibration methods also face the problem of non-repeatable calibration results. Because the calibration process cannot fully simulate changes in actual operating conditions, the calibrated detector may encounter uncontrollable factors in the actual environment, such as fluctuations in the light source and external contamination. These factors can further exacerbate calibration errors, leading to instability in the detector's performance. Therefore, due to the difference between the calibration environment and the actual working environment, the detector's performance can still be affected by environmental factors, impacting the accuracy of the measurement results. Summary of the Invention

[0004] This invention provides an optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer, aiming to solve the problems existing in the background art. To solve the above-mentioned technical problems, this invention is implemented as follows: In a first aspect, embodiments of the present invention provide an optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer, wherein the optical module of the ultraviolet photoelectron spectroscopy analyzer is provided with a transmitted main optical path and a reflected reference optical path; the method includes: The ultraviolet light source is continuously adjusted to multiple wavelengths within the target spectral range; At each of the plurality of wavelength points, the photon number sequence of the main optical path, the photon number sequence of the reference optical path, and the photoelectron number sequence emitted from the sample are measured; Based on the photon number sequence of the reference optical path, the calibration value of the reference optical path is calculated, and based on the photoelectron number sequence emitted from the sample, the actual photon number sequence of the main optical path is calculated. The calibration value of the reference optical path characterizes the consistency of the photon number measured by different measuring instruments in the reference optical path. Based on the actual photon number sequence of the main optical path and the photon number sequence of the reference optical path, the splitting ratio calibration value of the main optical path is calculated. The splitting ratio calibration value characterizes the accuracy of the photon number ratio measured by the measuring instruments in the main optical path and the reference optical path. Based on the calibration value of the reference optical path and the calibration value of the spectrophotometer, it is determined whether the optical module of the ultraviolet photoelectron spectroscopy analyzer has successfully self-calibrated.

[0005] Optionally, at each of the plurality of wavelength points, measuring the photon number sequence of the main optical path, the photon number sequence of the reference optical path, and the photoelectron number sequence emitted from the sample includes: At each of the multiple wavelength points, at preset time intervals, the photocurrent of the main optical path is measured through the detector to be calibrated to obtain the photocurrent sequence of the main optical path; At each of the multiple wavelength points, at each preset time interval, the number of photons in the reference optical path is measured using a photomultiplier tube and a standard detector placed in the reference optical path to obtain the photon number sequence of the reference optical path; At each of the multiple wavelength points, at each preset time interval, the number of photoelectrons emitted by the sample at the corresponding time is measured by a channel electron multiplier set in the main optical path, and the sequence of the number of photoelectrons emitted by the sample is obtained.

[0006] Optionally, at each of the plurality of wavelength points, at each preset time interval, the number of photons in the reference optical path is measured using a photomultiplier tube and a standard detector disposed in the reference optical path to obtain a photon number sequence of the reference optical path, including: At each of the multiple wavelength points, at each preset time interval, the number of photons in the reference optical path is measured through the photomultiplier tube at the corresponding time to obtain the first sub-sequence of the reference optical path; At each of the multiple wavelength points, at each preset time interval, the photocurrent of the reference optical path is measured by the standard detector at the corresponding time to obtain the second sub-sequence of the reference optical path; The photon number sequence of the reference optical path is determined based on the first sub-sequence and the second sub-sequence.

[0007] Optionally, determining the photon number sequence of the reference optical path based on the first sub-sequence and the second sub-sequence includes: Based on the value at each wavelength point, determine the corresponding spectral responsivity curve; Based on the spectral responsivity curve, each photocurrent in the second subsequence is converted into the corresponding number of photons; The photon number sequence of the reference optical path is determined based on the first sub-sequence and the converted second sub-sequence.

[0008] Optionally, based on the value at each wavelength point, a corresponding spectral responsivity curve is determined, including: Determine the photoelectron yield spectrum of the gold sample and the gain of the channel electron multiplier; Based on the value of each wavelength point, the gain of the channel electron multiplier, and the photoelectron yield spectrum of the gold sample, each photoelectron number in the photoelectron number sequence is converted into the corresponding number of photons irradiating the sample surface, thus obtaining the number of photons sequence. The spectral responsivity curve of the detector to be calibrated in the main optical path is determined based on the photocurrent sequence of the main optical path and the calculated photon number sequence.

[0009] Optionally, calculating the calibration value of the reference optical path based on the photon number sequence of the reference optical path includes: In the first subsequence, the number of photons at each wavelength point is subtracted from the dark photon count pre-measured by the photomultiplier tube to obtain the number of photons measured by the photomultiplier tube at each wavelength point; The actual number of photons at each wavelength point is calculated based on the number of photons measured by the photomultiplier tube and the conversion efficiency of the sodium salicylate glass. In the calculated second subsequence, the number of photons at each wavelength point is subtracted from the dark photon count pre-measured by the standard detector to obtain the number of photons measured by the standard detector at each wavelength point; The calibration value of the reference optical path is calculated based on the ratio of the number of photons measured by the photomultiplier tube to the number of photons measured by the standard detector.

[0010] Optionally, the splitting ratio calibration value of the main optical path is calculated based on the actual photon number sequence of the main optical path and the photon number sequence of the reference optical path, including: Based on the calculated second sub-sequence and the actual photon number sequence of the main optical path, the standard splitting ratio at each wavelength point is calculated. Based on the first sub-sequence of the reference optical path and the actual photon number sequence of the main optical path, the actual splitting ratio at each wavelength point is calculated. The spectral ratio calibration value of the main optical path is calculated based on the ratio of the actual spectral ratio to the standard spectral ratio.

[0011] Optionally, before continuously adjusting the ultraviolet light source to multiple wavelength points within the target spectral range, the method further includes: The optical module of the ultraviolet photoelectron spectroscopy analyzer is evacuated. With the optical module of the ultraviolet photoelectron spectroscopy analyzer evacuated to a preset threshold, the vacuum chamber is shielded from light, and the dark current count and dark noise count of the main optical path are measured using the detector to be calibrated and the channel electron multiplier of the main optical path. In addition, the dark noise count and dark current count of the reference optical path are measured using the photomultiplier tube and the standard detector of the reference optical path. Turn on the deuterium lamp, and after the deuterium lamp has been preheated to a stable working state, determine that the optical module self-calibration environment of the ultraviolet photoelectron spectroscopy analyzer is ready. During the preheating of the deuterium lamp, the electronic shutter remains closed.

[0012] Optionally, based on the calibration value of the reference optical path and the calibration value of the spectrophotometer, it is determined whether the optical module of the ultraviolet photoelectron spectroscopy analyzer has successfully self-calibrated, including: Based on the calibration value of the reference optical path, determine whether the measuring instrument of the reference optical path is accurate; and based on the spectral ratio calibration value, determine whether the measuring instrument of the main optical path is accurate. If the measuring instruments in the reference optical path and the main optical path are both accurate, the self-calibration of the optical module of the ultraviolet photoelectron spectroscopy analyzer is confirmed to be successful.

[0013] In a second aspect, embodiments of this disclosure provide an electronic device, including: a processor, a memory, and a computer program stored in the memory and capable of running on the processor, wherein when the computer program is executed by the processor, it implements the steps of an optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer.

[0014] The technical solutions provided by the embodiments of the present invention bring at least the following beneficial effects: This invention employs a self-calibration method, directly applying the calibration process to the actual working environment. Utilizing the transmitted main optical path and the reflected reference optical path, it ensures consistency between the calibration and actual measurement conditions, effectively reducing errors caused by environmental differences. At multiple wavelength points, the photon number sequences of the main and reference optical paths are measured separately, and their respective calibration values ​​are calculated. Based on the calibration values ​​of the reference optical path, the spectral responsivity of the detector to be calibrated in the main optical path, and the calculation of the splitting ratio calibration values, real-time evaluation of the measuring instruments in the main and reference optical paths is achieved. This eliminates the need for complex manual intervention or external calibration equipment, enabling calibration at any time during actual work, avoiding the cumbersome steps of moving the equipment to a calibration chamber in traditional methods. This allows the optical module of the ultraviolet photoelectron spectroscopy analyzer to continuously maintain optimal measurement conditions during use, ensuring the accuracy of experimental results and enabling timely detection and correction of calibration deviations. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below.

[0016] Figure 1 This is a schematic diagram illustrating the steps of an optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer according to an embodiment of the present invention; Figure 2 This is a schematic diagram of an optical self-calibration system for an ultraviolet photoelectron spectroscopy analyzer provided in one embodiment of the present invention; Figure 3 This is a partial schematic diagram of the main optical path of the optical module of the ultraviolet photoelectron spectroscopy analyzer before and after calibration in one embodiment of the present invention; Figure 4 This is a partial schematic diagram of the reference optical path of the optical module of the ultraviolet photoelectron spectroscopy analyzer before and after calibration in one embodiment of the present invention; Figure 5 This is a complete flowchart of the optical self-calibration method of an ultraviolet photoelectron spectroscopy analyzer in one embodiment of the present invention.

[0017] Labels in the diagram: 1—Vacuum UV deuterium lamp; 2—Ring mirror; 3—Filter; 4—Vacuum UV monochromator; 5—Collimating mirror; 6—Photomultiplier tube; 7—Beam splitter; 8—Electronic shutter; 9—Sodium salicylate glass; 10—Standard detector; 11—Condenser; 12—Four-dimensional sample handling stage; 13—Detector to be calibrated; 14—Telescopic one-dimensional rod; 15—Vacuum chamber; 16—Channel electron multiplier; 17—Analysis chamber. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] In traditional calibration methods, the photodetector of the optical module in an ultraviolet photoelectron spectroscopy analyzer typically requires removing it from its actual operating environment and transferring it to a specialized calibration device. However, the experimental environment used for calibration often differs significantly from the actual operating environment. During calibration, factors such as the wavelength, intensity, and angle of the light source may deviate considerably between the calibration device and actual operating conditions. Therefore, due to the difference between the calibration and actual operating environments, the detector's performance can still be affected by environmental factors, impacting the accuracy of the measurement results.

[0020] To address the aforementioned problems, the core idea of ​​this invention lies in: by setting up a main optical path for transmission and a reference optical path for reflection, and combining this with the adjustment of the ultraviolet light source, the photon number sequences of the main and reference optical paths are measured at multiple wavelength points within the target spectral range. By analyzing the photon number sequences of these two optical paths, the corresponding calibration values ​​are calculated, thereby enabling real-time evaluation of the accuracy of different measuring instruments. This self-calibration method effectively eliminates the discrepancy between calibration and actual application, improves measurement accuracy and reliability, avoids calibration deviations caused by environmental factors in traditional methods, and thus enhances the overall measurement accuracy and stability of the optical module of the ultraviolet photoelectron spectroscopy analyzer.

[0021] Figure 1 This is a schematic diagram illustrating the steps of an optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer according to an embodiment of the present invention. Please refer to [link / reference]. Figure 1 The optical module of the ultraviolet photoelectron spectroscopy analyzer is equipped with a main optical path for transmission and a reference optical path for reflection.

[0022] The main optical path of the transmission optical path refers to the optical path through which ultraviolet light passes after passing through the sample. In the main optical path, the measured optical signal comes from the transmitted light. The ultraviolet light is irradiated onto the surface of the focusing mirror by a beam splitter, and then transmitted through the focusing mirror to the photodetector in the analysis chamber 17.

[0023] The reference optical path in the reflected optical path differs from the transmitted optical path. The reflected optical path is the path of light reflected back after ultraviolet light strikes the beam splitter. The reflected light does not pass through the interior of analysis chamber 17 but is directly reflected to the photodetector. In the reference optical path, the measured optical signal comes from the reflected light. The reflected reference optical path includes sodium salicylate glass (used for wavelength shift to 300 nm), photomultiplier tube 6, and a standard detector. Data from the reference optical path (such as the photon number sequence) is used to correct measurement drift in the main optical path, ensuring the long-term stability of the entire system.

[0024] The optical system in this embodiment is divided into several parts according to functional modules. The light source section uses a vacuum ultraviolet deuterium lamp 1 to provide the incident light basis for the optical system. The pre-optical system consists of a ring mirror 2 and a filter 3. The ring mirror collects and collimates the ultraviolet light output from the deuterium lamp, while the filter performs preliminary filtering of the incident light, removing stray light and interference from non-target wavelengths. The vacuum ultraviolet monochromator 4 is a beam splitter that splits the beam processed by the pre-optical system, and can continuously adjust the wavelength of the output light to cover the target spectral range. The post-optical system includes a collimating mirror 5, a beam splitter 7, an electronic shutter 8, and a condenser lens 11. The collimating mirror shapes the diverging beam emitted from the monochromator into parallel light, and the beam splitter divides the beam into transmitted and reflected light at a fixed ratio. After the flux is controlled by the electronic shutter, the transmitted light is focused by the condenser lens onto the four-dimensional sample stage 12 or the detector to be calibrated 13; the reflected light is guided to the reference optical path.

[0025] It should be noted that the various detectors in this invention, including the photomultiplier tube 6, the standard detector 10, and the detector to be calibrated 13, are not part of the optical system. They are independent measurement terminals used to collect optical signals or photoelectronic signals on the optical path for subsequent calibration calculations.

[0026] Figure 2 This is a schematic diagram of an optical self-calibration system for an ultraviolet photoelectron spectroscopy analyzer according to an embodiment of the present invention. Please refer to [link / reference]. Figure 2 The self-calibration system operates within the vacuum chamber 15. The vacuum ultraviolet deuterium lamp 1 outputs a continuous ultraviolet spectrum, which, after preliminary filtering by the ring mirror 2 and filter 3, is split to the target wavelength by the vacuum ultraviolet monochromator 4. A collimating mirror 5 guides the beam splitter 7, which splits the beam at a fixed ratio. The transmitted light enters the main optical path, and the reflected light enters the reference optical path. The reflected beam passes through sodium salicylate glass 9, which shifts the ultraviolet wavelength to 300 nm. Low photon number signals are detected by a photomultiplier tube 6, or high photon number signals are detected by a standard detector 10.

[0027] The transmitted beam, with its flux controlled by an electronic shutter 8, is focused by a condenser lens 11 onto either the four-dimensional sample stage 12 or the detector 13 to be calibrated. In calibration mode, the telescopic one-dimensional rod 14 first pushes the detector 13 to the center of the light spot for in-situ synchronous measurement, then retracts, and the four-dimensional sample stage 12 is pushed back to the center of the light spot, where the channel electron multiplier 16 receives photoelectrons. The four-dimensional sample stage 12 is driven by a high-precision stepper motor, combined with a backlash-free spring and an optical encoder to ensure repeatability.

[0028] Figure 3 This is a partial schematic diagram of the main optical path of the ultraviolet photoelectron spectroscopy analyzer optical module before and after calibration in one embodiment of the present invention. Please refer to [link / reference]. Figure 3 Before calibration, the four-dimensional sample stage 12 is located at the center of the main optical path, and the sample to be tested is placed at the focal point of the condenser lens 11 for routine photoelectron spectroscopy testing. After calibration, a high-precision stepper motor drives the four-dimensional sample stage 12 to move horizontally, and the telescopic one-dimensional rod 14 precisely pushes the detector to be calibrated 13 into the original sample position.

[0029] Step S11: Continuously adjust the ultraviolet light source to multiple wavelength points within the target spectral range.

[0030] The deuterium lamp light source is spectrally dispersed using a vacuum ultraviolet monochromator. For example, the vacuum ultraviolet monochromator has a resolution of 0.1 nm, enabling precise separation of the target wavelength. The control terminal presets the target spectral range (which can be set to 115~400 nm) and drives the monochromator to gradually adjust the wavelength at discrete intervals, ensuring that the output light is pure monochromatic ultraviolet light.

[0031] Wavelength adjustment is performed in constant steps, starting from the initial wavelength point (e.g., 115nm) and sequentially increasing to the final wavelength point (e.g., 400nm). At each wavelength point, the wavelength is held for a fixed duration to ensure sufficient stabilization of the optical signal and avoid measurement errors caused by abrupt changes.

[0032] Users input wavelength sequence commands via the control terminal. The control terminal's built-in algorithm monitors the monochromator's status in real time and simultaneously closes the electronic shutter during wavelength switching (to prevent premature exposure of the detector). Once the wavelength stabilizes, the shutter reopens to initiate data acquisition.

[0033] In one alternative implementation, before continuously adjusting the ultraviolet light source to multiple wavelength points within the target spectral range, the method further includes: Step S21: Perform a vacuuming operation on the optical module of the ultraviolet photoelectron spectroscopy analyzer.

[0034] The vacuum system employs a mechanical pump in series with a molecular pump, and the vacuum chamber is equipped with a vacuum gauge to monitor the pressure value in real time. The vacuum system is started and continuously operated until the pressure is ≤ a preset pressure threshold (preferably 10). -4 (Pa), vacuum maintenance time ≥ preset maintenance time (preferably 30 minutes) to ensure that the residual gas in the chamber does not affect the stability of the optical path.

[0035] Step S22: After evacuating the optical module of the ultraviolet photoelectron spectroscopy analyzer to a preset threshold, the vacuum chamber is shielded from light. The dark current count and dark noise count of the main optical path are measured using the detector to be calibrated and the channel electron multiplier in the main optical path. The dark current count of the reference optical path is measured using the photomultiplier tube and the standard detector in the reference optical path.

[0036] In order to quantify the detector's background noise under completely dark conditions and provide a dark current reference for subsequent photon number calculations, all external light sources are turned off, the electromagnetic shield is activated, and the internal illuminance of the chamber is ensured to be ≤ a preset illuminance threshold (preferably 0.1 lux).

[0037] The dark current sequence is acquired by the detector to be calibrated in the main optical path: Synchronously, dark noise counting sequences are acquired via channel electron multipliers: .

[0038] The reference optical path collects dark photon counts via a photomultiplier tube. and output dark current through a standard detector .

[0039] Calculate the average dark current / dark count for each detector, and use it as the reference term for subsequent photon number conversion. ).

[0040] Step S23: Turn on the deuterium lamp, and after the deuterium lamp has been preheated to a stable working state, determine that the optical self-calibration environment of the ultraviolet photoelectron spectroscopy analyzer is ready. During the preheating of the deuterium lamp, the electronic shutter remains closed.

[0041] Turn on the deuterium lamp light source, with a preheating time preferably of 20 minutes to ensure that the plasma inside the lamp reaches thermal equilibrium. The electronic shutter remains closed during the deuterium lamp preheating period to prevent unsteady light from illuminating the detector. If the control terminal displays the "Ready" status flag, proceed to step S11.

[0042] Step S12: At each of the plurality of wavelength points, measure the photon number sequence of the main optical path, the photon number sequence of the reference optical path, and the photoelectron number sequence emitted from the sample.

[0043] Figure 4 This is a partial schematic diagram of the reference optical path of the ultraviolet photoelectron spectroscopy analyzer optical module before and after calibration in one embodiment of the present invention. Please refer to [link / reference]. Figure 4 By simultaneously measuring the photocurrent sequence, photon number sequence, and photoelectron number sequence emitted from the sample in the main optical path and reference optical path, raw data is provided for subsequent calibration calculations, while avoiding interference from light source fluctuations caused by time-division measurement. Figure 2 As shown, the detector to be calibrated 13 is deployed in its original position in the main optical path to ensure that the calibration environment is consistent with the actual working conditions. A standard detector and a photomultiplier tube are deployed in the reference optical path. The standard detector is located in front of the sodium salicylate glass and can be retracted when not in use, allowing the ultraviolet light to pass through the sodium salicylate glass and change wavelength, so that the photomultiplier tube can detect only a single wavelength of ultraviolet light. Figure 5 This is a complete flowchart illustrating the optical self-calibration method of an ultraviolet photoelectron spectroscopy analyzer according to one embodiment of the present invention. Please refer to [link / reference]. Figure 5 In one optional implementation, step S12 specifically includes steps S121 to S124: Step S121: At each wavelength point of the plurality of wavelength points, at preset time intervals, the photocurrent of the main optical path is measured through the detector to be calibrated to obtain the photocurrent sequence of the main optical path.

[0044] The transmitted light signal of the main optical path is acquired by the detector to be calibrated 13. The photodetector to be calibrated is located at the original measurement position on the four-dimensional sample operating stage (positioned by a telescopic one-dimensional rod), and the light flux is controlled by an electronic shutter. At the target wavelength λ, the photocurrent of the detector to be calibrated 13 is measured by an electrometer at preset time intervals to obtain the photocurrent sequence of the main optical path. ,in, , The value of the photocurrent collected at the nth time moment is used to calculate the number of photons in the detector 13 to be calibrated. Among them, the first term of the photocurrent sequence in the main optical path This is the reference value for dark current (the result of the preceding dark current measurement).

[0045] Step S122: At each of the multiple wavelength points, at each preset time interval, the number of photons in the reference optical path is measured using a photomultiplier tube and a standard detector placed in the reference optical path to obtain the photon number sequence of the reference optical path.

[0046] To perform synchronous measurement of the photon count in the reference optical path across the entire wavelength range, the photomultiplier tube and the standard detector are switched. The beam splitter is a beam splitter that reflects monochromatic light to the reference optical path according to a known ratio. Sodium salicylate glass transfers ultraviolet light to 300nm. The photomultiplier tube is located behind the sodium salicylate glass and only detects the ultraviolet light converted to 300nm. The standard detector is located in front of the sodium salicylate glass and detects ultraviolet light in the 115-400nm range.

[0047] In an optional implementation, step S122 specifically includes steps S1221 to S1224: Step S1221: At each of the multiple wavelength points, at each preset time interval, the number of photons in the reference optical path at the corresponding time is measured through the photomultiplier tube to obtain the first sub-sequence of the reference optical path.

[0048] Considering that photomultiplier tubes detect weak light signals using single-photon counting technology, the reflected light from the reference optical path is transferred to 300nm via sodium salicylate glass, where it is then used by the photomultiplier tube to generate photon counting pulses. At each wavelength point, the number of photons is recorded at preset time intervals. The first subsequence is obtained. .

[0049] Step S1222: At each of the plurality of wavelength points, at each preset time interval, the photocurrent of the reference optical path at the corresponding time is measured by the standard detector to obtain the second sub-sequence of the reference optical path.

[0050] At each of the multiple wavelength points, a standard detector acquires the optical signal of the reference optical path, and an electrometer measures the photocurrent. The second subsequence is obtained. .

[0051] This invention directly utilizes the high linearity characteristics of standard detectors, skipping the wavelength transfer step.

[0052] Step S1223: Determine the photon number sequence of the reference optical path based on the first sub-sequence and the second sub-sequence.

[0053] By fusing the raw photon count from the photomultiplier tube with the calculated photon count from the standard detector, a high-precision reference optical path photon count sequence is generated across the entire spectral range, providing a unified benchmark for calibration calculations. In other words, by combining the high sensitivity of the photomultiplier tube at low photon counts with the high linearity of the standard detector at high photon counts, optimal measurement across the entire target spectral range is achieved.

[0054] In an optional implementation, step S1223 specifically includes steps S12231 to S12233: Step S12231: Determine the corresponding spectral response curve based on the value of each wavelength point.

[0055] Based on the standard gold sample yield spectrum, extract the yield spectrum corresponding to the current target wavelength point. Y ( λ Specifically, the control terminal accesses the pre-stored gold sample yield spectrum database, uses the current wavelength as an index, and obtains the yield spectrum value through cubic spline interpolation to get the corresponding spectral response curve.

[0056] Based on the NIST traceable certificate for the standard detector, the spectral responsivity corresponding to the current target wavelength is extracted. Specifically, the control terminal accesses the pre-stored NIST calibration database, uses the current wavelength as an index, and obtains the responsivity value through cubic spline interpolation to obtain the corresponding spectral response curve.

[0057] In one optional implementation, determining the corresponding spectral response curve based on the value at each wavelength point includes: The photoelectron yield spectrum of the gold sample and the gain of the channel electron multiplier were determined.

[0058] The photoelectron yield spectrum of the gold sample describes the number of photoelectrons excited by a unit incident photon irradiating the surface of the gold sample at a specific ultraviolet wavelength. This spectrum is pre-stored in the system database as a wavelength-yield correspondence table. During operation, the control terminal retrieves the corresponding yield value from the database based on the current test wavelength. If the wavelength is not an integer, an interpolation algorithm automatically matches the closest calibration value.

[0059] The gain of a channel electron multiplier represents the amplification factor of the output electrical signal when a single photoelectron is input. Before calibration, the stability of the gain is verified by dark noise testing to ensure that it does not drift due to environmental changes.

[0060] Based on the value of each wavelength point, the gain of the channel electron multiplier, and the photoelectron yield spectrum of the gold sample, each photoelectron number in the photoelectron number sequence is converted into the corresponding number of photons irradiating the sample surface, thus obtaining the calculated photon number sequence.

[0061] The actual number of photons irradiating the surface of a gold sample is equal to the measured number of photoelectrons divided by (channel electron multiplier gain × gold sample yield spectrum). For example, if the yield spectrum of a gold sample at a certain wavelength is "1 photoelectron is excited for every 100 photons", and the channel electron multiplier gain is 1000, then when 1000 photoelectrons are measured, the corresponding number of incident photons is 100,000. The number of photoelectrons at each time point is calculated in this way to generate a sequence of calculated photon counts, i.e., a sequence of theoretical photon counts irradiating the surface of the gold sample.

[0062] The spectral responsivity curve of the detector to be calibrated in the main optical path is determined based on the photocurrent sequence of the main optical path and the calculated photon number sequence.

[0063] The calculated number of photons is multiplied by the energy of a single photon (determined by the current target wavelength) to convert it into the optical power value of the detector to be calibrated illuminating the main optical path. The responsivity at the corresponding target wavelength is obtained by dividing the measured photocurrent of the detector to be calibrated by this optical power value. For example, if the measured photocurrent is 1 microamp and the theoretical optical power is 0.5 microwatts, then the responsivity is 2 amps / watt.

[0064] The statistical average of the responsivity at all time points for the same wavelength is taken as the final responsivity value for that wavelength. By traversing all wavelength points within the target spectral range, the responsivity values ​​at each wavelength point are connected to form a continuous curve, thus obtaining the spectral responsivity curve of the detector to be calibrated.

[0065] Step S12232: Based on the spectral responsivity curve, convert each photocurrent in the second sub-sequence into the corresponding number of photons.

[0066] Based on each wavelength point and its corresponding spectral response curve Each photocurrent in the second subsequence is converted into the corresponding number of photons. :

[0067] In the formula, For the current wavelength point, It is Planck's constant; It is the speed of light.

[0068] Step S12233: Determine the photon number sequence of the reference optical path based on the first sub-sequence and the converted second sub-sequence.

[0069] The first subsequence and the converted second subsequence are arranged in chronological order to obtain the photon number sequence of the reference optical path.

[0070] Step S123: At each of the multiple wavelength points, at each preset time interval, the number of photoelectrons emitted by the sample at the corresponding time is measured by a channel electron multiplier set in the main optical path, so as to obtain the sequence of the number of photoelectrons emitted by the sample.

[0071] In the main optical path, the standard gold sample (i.e., the sample itself) is positioned at its original measurement location on the four-dimensional sample stage (positioned by the four-dimensional sample stage). A channel electron multiplier is mounted 42 mm from the four-dimensional sample stage, at a 30° angle to the sample normal. The sequence of photoelectrons emitted from the sample is measured using the channel electron multiplier.

[0072] The electron multiplier (16) and the detector to be calibrated acquire data at the same time point to eliminate the influence of optical path fluctuations. The final sequence of photoelectron counts emitted from the sample is then obtained. As a reference photon number The basis for the calculation.

[0073] Step S13: Calculate the calibration value of the reference optical path based on the photon number sequence of the reference optical path, and calculate the actual photon number sequence of the main optical path based on the photoelectron number sequence emitted from the sample. The calibration value of the reference optical path characterizes the consistency of the photon numbers measured by different measuring instruments in the reference optical path.

[0074] After acquiring photon data from both the reference and main optical paths, the accuracy of the ultraviolet photoelectron spectroscopy analyzer's optical module is evaluated by quantifying the consistency of photon counts across overlapping wavelengths using different measuring instruments. Specifically, the calibration values ​​for the reference optical path are calculated separately. Spectral response calibration value and the spectral ratio calibration value Among them, the calibration value of the reference optical path Characterizes the degree of agreement between the photon count measured by the photomultiplier tube and the standard detector in the reference optical path. Spectral responsivity calibration value. Characterizes the consistency between the photon count measurement capabilities of the detector to be calibrated and the channel electron multiplier in the main optical path. Spectrophotometer ratio calibration value R d It characterizes the degree of consistency between the ratio of the detector to be calibrated and the photomultiplier tube in the main optical path and the calculated value of the photon and the ratio of the standard detector.

[0075] In an optional implementation, step S13 specifically includes steps S131 to S134: Step S131: In the first sub-sequence, the number of photons at each wavelength point is subtracted from the dark photon count pre-measured by the photomultiplier tube to obtain the number of photons measured by the photomultiplier tube at each wavelength point.

[0076] Extract each wavelength point from the first subsequence corresponding to each wavelength point in the reference optical path. Original photon count And deduct the pre-measured dark photon count. The number of photons measured by the photomultiplier tube at each wavelength point was obtained. This is to eliminate the influence of dark current and thermal noise from the photomultiplier tube, ensuring that the data reflects the true optical signal.

[0077] Step S132: Calculate the actual number of photons at each wavelength point based on the photon count measured by the photomultiplier tube and the conversion efficiency of the sodium salicylate glass.

[0078] After obtaining the reference photon count for photomultiplier tube (PMT) measurement, a correction calculation is performed using the wavelength conversion characteristics of sodium salicylate glass. For the current target wavelength, the pre-stored spectral conversion efficiency of sodium salicylate glass, obtained through pre-calibration experiments, is used to characterize the efficiency with which sodium salicylate glass converts incident ultraviolet light into 300 nm wavelength light. This conversion efficiency is then used to correct the photon count measured by the PMT. Since the PMT has the highest collection efficiency at 300 nm, its measured value needs to be converted back to the actual number of photons from the original ultraviolet light irradiating the sodium salicylate glass surface using the conversion efficiency.

[0079] After completing the correction calculation, the actual number of ultraviolet photons irradiated by the reference optical path onto the sodium salicylate glass surface at the current target wavelength is obtained.

[0080] Step S133: In the calculated second sub-sequence, the number of photons at each wavelength point is subtracted from the dark photon count pre-measured by the standard detector to obtain the number of photons measured by the standard detector at each wavelength point.

[0081] In the converted second subsequence, each wavelength point is extracted. photocurrent value The corresponding number of photons And deduct the pre-measured dark photon count. This yields the actual number of photons at each wavelength point. This eliminates dark current interference during the standard detector acquisition process.

[0082] Step S134: Calculate the calibration value of the reference optical path based on the ratio of the number of photons measured by the photomultiplier tube to the number of photons measured by the standard detector.

[0083] By iterating through all wavelengths, summing the actual photon counts measured by the photomultiplier tube and the actual photon counts measured by the standard detector, taking the entire wavelength as an example, the sum of photon counts measured by the photomultiplier tube (S1) and the sum of photon counts measured by the standard detector (S2) are obtained according to the following formula:

[0084]

[0085] In the formula, Sodium salicylate glass at the wavelength point λ The conversion efficiency (the efficiency of converting incident ultraviolet light into 300 nm light) is calculated. S1 overall characterization is the summation of the number of photons before the sodium salicylate glass transfer in step S132, point by point along the wavelength.

[0086] The calibration value of the reference optical path is obtained according to the following formula. To facilitate numerical comparison within a range, the obtained values ​​are... The final calibration value of the reference optical path for subsequent comparisons:

[0087] when The higher the consistency between the photomultiplier tube and the detector to be calibrated across the entire wavelength range, the more accurate the state of the reference optical path measuring instrument is considered to be.

[0088] In an optional implementation, step S13 further includes steps S135 to S138: Step S135: In the converted photocurrent sequence, calculate the number of photons at each wavelength point and subtract the dark photon count pre-measured by the detector to be calibrated to obtain the actual number of photons measured by the detector to be calibrated at each wavelength point.

[0089] Extract each wavelength point from the photocurrent sequence of the main optical path. photocurrent value and deduct dark current Corresponding number of dark photons This yields the actual number of photons measured by the detector to be calibrated at each wavelength point. .

[0090] Step S136: In the converted photoelectron count sequence, calculate the number of photons at each wavelength point and subtract the dark photon count pre-measured by the channel electron multiplier to obtain the actual number of photons irradiated on the gold sample at each wavelength point.

[0091] Extract each wavelength point from the photoelectron number sequence of the main optical path light. optoelectronics And remove dark noise Corresponding number of dark photons The actual number of photons irradiated on the gold sample at each wavelength point was obtained. .

[0092] Step S137: Based on the actual number of photons irradiated on the gold sample at each wavelength point, the spectral responsivity S3 of the detector to be calibrated is obtained by solving the following formula:

[0093] Step S138: Calculate the spectral responsivity calibration value of the main optical path based on the ratio of the spectral responsivity of the detector to be calibrated to the standard spectral responsivity of the standard detector at all wavelengths.

[0094] The calibration value of the spectral responsivity of the detector to be calibrated in the main optical path is obtained according to the following formula. For ease of comparison within the interval, the obtained values ​​are... The final spectral responsivity calibration values ​​for subsequent comparisons:

[0095] when The higher the consistency between the spectral responsivity of the detector to be calibrated and the standard detector in measuring capability, the more accurate the instrument status of the main optical path is considered to be.

[0096] Step S14: Calculate the splitting ratio calibration value of the main optical path based on the actual photon number sequence of the main optical path and the photon number sequence of the reference optical path. The splitting ratio calibration value characterizes the accuracy of the photon number ratio measured by the measuring instruments in the main optical path and the reference optical path.

[0097] In an optional implementation, step S14 specifically includes steps S141 to S143: Based on the ratio of the dispersive ratios calculated using the reference optical path and the main optical path standards, as well as the ratio calculated from the detector to be calibrated, it is determined whether the measuring instruments for these two optical paths meet the predetermined accuracy requirements, thereby ensuring the accuracy of the optical module of the ultraviolet photoelectron spectroscopy analyzer. In other words, the measuring instruments for the optical paths are evaluated using the obtained dispersive ratio calibration values ​​to confirm whether they are within acceptable error ranges. If the measuring instruments are accurate, data analysis can be further performed; otherwise, adjustments or recalibration are required.

[0098] In an optional implementation, step S14 specifically includes steps S141 to S143: Step S141: Calculate the standard spectral ratio at each wavelength point based on the calculated second sub-sequence and the calculated photon number sequence.

[0099] Based on the photon number sequence measured and calculated by the standard detector in the reference optical path, and the theoretical photon number sequence irradiated to the sample surface calculated by back-calculating the number of photoelectrons in the gold sample, for each specific wavelength point within the target spectral range, the photon value calculated by the standard detector and the theoretical photon value irradiated to the sample surface at that wavelength point are obtained. The ratio between the photon value calculated by the standard detector and the theoretical photon value irradiated to the sample surface is calculated, representing the theoretically expected photon number ratio between the main optical path (actual light irradiating the sample) and the reference optical path (reflected light) at that wavelength point, i.e., the standard spectrophotometric ratio. The standard spectrophotometric ratio S4 is obtained according to the following formula:

[0100] Step S142: Calculate the actual splitting ratio at each wavelength point based on the first sub-sequence of the reference optical path and the actual photon number sequence of the main optical path.

[0101] Based on the original photon count sequence measured by the photomultiplier tube in the reference optical path, and the photon count sequence actually measured and calculated by the detector to be calibrated in the main optical path, for each specific wavelength point within the target spectral range, the photon count measured by the photomultiplier tube and the photon count calculated by the detector to be calibrated in the main optical path at that wavelength point are obtained respectively. The ratio between the photon count measured by the photomultiplier tube and the photon count calculated by the detector to be calibrated in the main optical path is calculated, representing the ratio between the photon count in the main optical path and the photon count in the reference optical path actually measured by the current measuring instrument at that wavelength point, i.e., the actual splitting ratio. The actual splitting ratio S5 is obtained according to the following formula:

[0102] Step S143: Calculate the spectral ratio calibration value of the main optical path based on the ratio of the actual spectral ratio to the standard spectral ratio.

[0103] For each wavelength, the ratio of the actual splitting ratio to the standard splitting ratio is calculated. This yields a calibrated splitting ratio value representing the entire target spectral range or a specific band of interest. This quantifies the degree of agreement between the actual measured ratio of photons in the main / reference optical path and the theoretically expected ratio:

[0104] Considering that ultraviolet light is reflected to the reference optical path and then transferred to 300nm by various wavelengths through sodium salicylate glass, the wavelength transfer efficiency of sodium salicylate mentioned above exists in this process. .when When the consistency between the measurement capabilities of the detectors to be calibrated in the main optical path and the reference optical path and the standard detector is high, the instrument status is considered to be more accurate.

[0105] Step S15: Based on the calibration value of the reference optical path and the calibration value of the spectrophotometer, determine whether the optics of the ultraviolet photoelectron spectroscopy analyzer has been successfully self-calibrated.

[0106] Based on the calibration values ​​of the reference optical path calculated earlier and the spectral ratio calibration value A comprehensive evaluation is conducted to determine whether the self-calibration of the entire optical module was successful.

[0107] In an optional implementation, step S15 specifically includes steps S151 to S152: Step S151: Determine whether the measuring instrument of the reference optical path is accurate based on the calibration value of the reference optical path, and determine whether the measuring instrument of the main optical path is accurate based on the spectral ratio calibration value.

[0108] Check the calibration value of the reference optical path. As mentioned earlier, the calibration value of the reference optical path reflects the consistency of the photon counts measured by the two measuring instruments (photomultiplier tube and standard detector) within the reference optical path. If the calibration value of the reference optical path is very close to a specific ideal value, it indicates that the two measuring instruments within the reference optical path are working well and their measurement results are consistent, meaning the measuring instruments in the reference optical path are considered accurate. Conversely, if the calibration value of the reference optical path deviates significantly from the ideal value, it indicates inconsistencies in the measurement results between the instruments within the reference optical path, suggesting a problem.

[0109] Similarly, checking the splitting ratio calibration value of the main optical path reflects the proportional relationship between the measured values ​​of the main optical path detector and the reference optical path detector, and whether it conforms to the theoretically expected or known optical path splitting characteristics. If the splitting ratio calibration value of the main optical path is very close to a specific ideal value, it indicates that the measurement ratio of the detector to be calibrated in the main optical path relative to the reference optical path detector is accurate, and the measuring instrument status of the main optical path can be considered accurate. Conversely, if the splitting ratio calibration value of the main optical path deviates significantly from the ideal value, it indicates that the proportional relationship between the measured values ​​of the main optical path detector and the reference optical path detector does not conform to expectations, and there may be a problem with the main optical path detector or a change in the overall optical path splitting characteristics.

[0110] Step S152: If the measuring instruments in the reference optical path and the main optical path are both accurate, the optical self-calibration of the ultraviolet photoelectron spectroscopy analyzer is confirmed to be successful.

[0111] If both judgment results in step S151 are met simultaneously, the measuring instrument in the reference optical path is judged to be accurate, and the measuring instrument in the main optical path is judged to be accurate. Therefore, the optical self-calibration of the ultraviolet photoelectron spectroscopy analyzer is finally determined to be successful. In other words, the key optical path measuring instruments in the entire optical module are in good condition, and the measurement results are reliable.

[0112] If either of the above two conditions is not met (i.e., any calibration value deviates too much from the ideal value), the self-calibration is considered unsuccessful. Turn off the vacuum UV deuterium lamp, re-evacuate the vacuum, and strengthen the light-shielding treatment. Simultaneously, restart the temperature control system. Continue the self-calibration process as described above until the optical self-calibration of the UV photoelectron spectroscopy analyzer is successful.

[0113] This invention also provides an electronic device, including a processor, a memory, and a computer program stored in the memory and capable of running on the processor. When the computer program is executed by the processor, it implements the various processes described above in the embodiment of the optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer and achieves the same technical effect. To avoid repetition, it will not be described again here.

[0114] Those skilled in the art will understand that embodiments of the present invention can be provided as methods, apparatus, electronic devices, and media. Therefore, embodiments of the present invention can take the form of entirely hardware embodiments, entirely software embodiments, or embodiments combining software and hardware aspects. Furthermore, embodiments of the present invention can take the form of a computer program product embodied on one or more computer-readable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0115] Embodiments of the present invention are described with reference to flowchart illustrations and / or block diagrams of methods and apparatus according to embodiments of the present invention. It should be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal device, generate instructions for implementing the flowchart illustrations and / or block diagrams. Figure 1 One or more processes and / or boxes Figure 1 The computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing terminal device to operate in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1The functions specified in one or more boxes. These computer program instructions may also be loaded onto a computer or other programmable data processing terminal equipment to cause a series of operational steps to be performed on the computer or other programmable terminal equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable terminal equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0116] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0117] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element. The above provides a detailed description of an optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer provided by the present invention. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention; at the same time, for those skilled in the art, based on the ideas of the present invention, there will be changes in specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. An optical self-calibration method for an ultraviolet photoelectron spectroscopy analyzer, characterized in that, The optical module of the ultraviolet photoelectron spectroscopy analyzer is equipped with a main optical path for transmission and a reference optical path for reflection; the method includes: The ultraviolet light source is continuously adjusted to multiple wavelengths within the target spectral range; At each of the plurality of wavelength points, the photon number sequence of the main optical path, the photon number sequence of the reference optical path, and the photoelectron number sequence emitted from the sample are measured; Based on the photon number sequence of the reference optical path, the calibration value of the reference optical path is calculated, and based on the photoelectron number sequence emitted from the sample, the actual photon number sequence of the main optical path is calculated. The calibration value of the reference optical path characterizes the consistency of the photon number measured by different measuring instruments in the reference optical path. Based on the actual photon number sequence of the main optical path and the photon number sequence of the reference optical path, the splitting ratio calibration value of the main optical path is calculated. The splitting ratio calibration value characterizes the accuracy of the photon number ratio measured by the measuring instruments in the main optical path and the reference optical path. Based on the calibration value of the reference optical path and the calibration value of the spectrophotometer, it is determined whether the optical module of the ultraviolet photoelectron spectroscopy analyzer has successfully self-calibrated.

2. The method according to claim 1, characterized in that, At each of the plurality of wavelength points, the photon number sequence of the main optical path, the photon number sequence of the reference optical path, and the photoelectron number sequence emitted from the sample are measured, including: At each of the multiple wavelength points, at preset time intervals, the photocurrent of the main optical path is measured through the detector to be calibrated to obtain the photocurrent sequence of the main optical path; At each of the multiple wavelength points, at each preset time interval, the number of photons in the reference optical path is measured using a photomultiplier tube and a standard detector placed in the reference optical path to obtain the photon number sequence of the reference optical path; At each of the multiple wavelength points, at each preset time interval, the number of photoelectrons emitted by the sample at the corresponding time is measured by a channel electron multiplier set in the main optical path, and the sequence of the number of photoelectrons emitted by the sample is obtained.

3. The method according to claim 2, characterized in that, At each of the plurality of wavelength points, at each preset time interval, the number of photons in the reference optical path is measured using a photomultiplier tube and a standard detector installed in the reference optical path to obtain a photon number sequence of the reference optical path, including: At each of the multiple wavelength points, at each preset time interval, the number of photons in the reference optical path is measured through the photomultiplier tube at the corresponding time to obtain the first sub-sequence of the reference optical path; At each of the multiple wavelength points, at each preset time interval, the photocurrent of the reference optical path is measured by the standard detector at the corresponding time to obtain the second sub-sequence of the reference optical path; The photon number sequence of the reference optical path is determined based on the first sub-sequence and the second sub-sequence.

4. The method according to claim 3, characterized in that, Determining the photon number sequence of the reference optical path based on the first sub-sequence and the second sub-sequence includes: Based on the value at each wavelength point, determine the corresponding spectral responsivity curve; Based on the spectral responsivity curve, each photocurrent in the second subsequence is converted into the corresponding number of photons; The photon number sequence of the reference optical path is determined based on the first sub-sequence and the converted second sub-sequence.

5. The method according to claim 4, characterized in that, Based on the value at each wavelength point, determine the corresponding spectral responsivity curve, including: Determine the photoelectron yield spectrum of the gold sample and the gain of the channel electron multiplier; Based on the value of each wavelength point, the gain of the channel electron multiplier, and the photoelectron yield spectrum of the gold sample, each photoelectron number in the photoelectron number sequence is converted into the corresponding number of photons irradiating the sample surface, thus obtaining the number of photons sequence. The spectral responsivity curve of the detector to be calibrated in the main optical path is determined based on the photocurrent sequence of the main optical path and the calculated photon number sequence.

6. The method according to claim 4, characterized in that, Based on the photon number sequence of the reference optical path, the calibration value of the reference optical path is calculated, including: In the first subsequence, the number of photons at each wavelength point is subtracted from the dark photon count pre-measured by the photomultiplier tube to obtain the number of photons measured by the photomultiplier tube at each wavelength point; The actual number of photons at each wavelength point is calculated based on the number of photons measured by the photomultiplier tube and the conversion efficiency of the sodium salicylate glass. In the calculated second subsequence, the number of photons at each wavelength point is subtracted from the dark photon count pre-measured by the standard detector to obtain the number of photons measured by the standard detector at each wavelength point; The calibration value of the reference optical path is calculated based on the ratio of the number of photons measured by the photomultiplier tube to the number of photons measured by the standard detector.

7. The method according to claim 5, characterized in that, Based on the actual photon number sequence of the main optical path and the photon number sequence of the reference optical path, the splitting ratio calibration value of the main optical path is calculated, including: Based on the calculated second sub-sequence and the calculated photon number sequence, the standard spectral ratio at each wavelength point is calculated. Based on the first sub-sequence of the reference optical path and the actual photon number sequence of the main optical path, the actual splitting ratio at each wavelength point is calculated. The spectral ratio calibration value of the main optical path is calculated based on the ratio of the actual spectral ratio to the standard spectral ratio.

8. The method according to claim 3, characterized in that, Before continuously adjusting the ultraviolet light source to multiple wavelength points within the target spectral range, the method further includes: The optical module of the ultraviolet photoelectron spectroscopy analyzer is evacuated. With the optical module of the ultraviolet photoelectron spectroscopy analyzer evacuated to a preset threshold, the vacuum chamber is shielded from light, and the dark current count and dark noise count of the main optical path are measured using the detector to be calibrated and the channel electron multiplier of the main optical path. In addition, the dark noise count and dark current count of the reference optical path are measured using the photomultiplier tube and the standard detector of the reference optical path. Turn on the deuterium lamp and, after the deuterium lamp has been preheated to a stable working state, determine that the optical self-calibration environment of the ultraviolet photoelectron spectroscopy analyzer is ready. During the preheating of the deuterium lamp, the electronic shutter remains closed.

9. The method according to claim 1, characterized in that, Based on the calibration values ​​of the reference optical path and the spectrophotometer ratio calibration values, determine whether the optical module of the ultraviolet photoelectron spectroscopy analyzer has successfully self-calibrated, including: Based on the calibration value of the reference optical path, determine whether the measuring instrument of the reference optical path is accurate; and based on the spectral ratio calibration value, determine whether the measuring instrument of the main optical path is accurate. If the measuring instruments in the reference optical path and the main optical path are both accurate, the self-calibration of the optical module of the ultraviolet photoelectron spectroscopy analyzer is confirmed to be successful.

10. An electronic device, characterized in that, include: A processor, a memory, and a computer program stored in the memory and capable of running on the processor, wherein the computer program, when executed by the processor, implements the steps of the method as claimed in any one of claims 1-9.

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