Metasurface optical device

Abstract

This invention discloses a super-optical device, comprising a light-emitting element having a light-emitting surface, a multifocal super-lens located above the light-emitting surface, and a light-receiving element located on the side of the multifocal super-lens opposite to the light-emitting element. The multifocal super-lens is separated from the light-emitting surface by a distance (d) in a direction perpendicular to the light-emitting surface. The multifocal super-lens has multiple focal regions falling on the light-emitting surface, wherein the diameter (φ), distance (d), and light-receiving angle (θ) of the focal regions on the light-emitting surface and the light-receiving angle (θ) of the light-receiving element conform to the following relationship: φ≤(2×d×tan(θ)). Therefore, the focal regions can continuously cover the light-emitting surface, thereby increasing the effective light-emitting area of ​​the light-emitting element and improving the coupling efficiency of the super-optical device.

Description

Technical Field

[0001] This invention relates to optical devices, and more particularly to optical devices having meta-optical elements. Background Technology

[0002] Optical devices used for lighting or display include a light source and a light-receiving element. To increase the display brightness and uniformity of the optical device, a wide light source, such as a light-emitting diode (LED), is usually selected. However, when the light source has a larger light divergence angle, it is more difficult to couple the light beam emitted by the light source to the light-receiving element, resulting in poor coupling efficiency of the optical device or easy crosstalk between beams. Summary of the Invention

[0003] According to some embodiments of the present invention, a meta-optical device includes a light-emitting element having a light-emitting surface, a multifocal meta-lens located above the light-emitting surface, and a light-receiving element located on the side of the multifocal meta-lens opposite to the light-emitting element. The multifocal meta-lens is separated from the light-emitting surface by a distance (d) in a direction perpendicular to the light-emitting surface, and the multifocal meta-lens has multiple focal regions falling on the light-emitting surface. The diameter (φ), distance (d) of each focal region on the light-emitting surface, and the light-receiving angle (θ) of the light-receiving element conform to the following relationship: φ ≤ (2 × d × tan(θ)).

[0004] In some embodiments, the multifocal meta-lens includes multiple nanostructures located on the top surface of the lens substrate or below the bottom surface of the lens substrate, and the phase value distribution of the nanostructures and the collimation focal point distribution of the focal region on the light-emitting surface have a Fourier transform or inverse Fourier transform relationship.

[0005] In some embodiments, the multifocal meta-lens includes a plurality of nanostructures located on the top surface of the lens substrate or below the bottom surface of the lens substrate, wherein the arrangement period of the nanostructures is less than 0.7 times the emission wavelength of the light-emitting element, and the dimensions of the nanostructures on the lens substrate in a direction parallel to the arrangement period are between 0.1 times and 0.95 times the arrangement period.

[0006] In some implementations, the collimation focus of each entity within the focal region is located outside the focus of the others.

[0007] In some embodiments, the focal region includes a first focal region having a first diameter and a second focal region having a second diameter, wherein the first diameter is smaller than the second diameter and the focal depth of the first focal region is greater than the focal depth of the second focal region.

[0008] In some embodiments, the light-emitting surface includes a non-light-emitting region, and the focal region surrounds the non-light-emitting region along the edge of the non-light-emitting region.

[0009] In some embodiments, the super-optical device further includes a light guide layer located between the multifocal super-lens and the light-emitting element, wherein the light guide layer directly contacts the light-emitting surface of the light-emitting element and the multifocal super-lens.

[0010] In some embodiments, the meta-optical device further includes a light guide layer located between the multifocal meta lens and the light-emitting element, a frame located around the multifocal meta lens, and a dielectric layer separating the multifocal meta lens and the light guide layer, wherein the frame connects the multifocal meta lens to the light guide layer.

[0011] In some embodiments, the meta-optical device further includes a steering mirror located above the multifocal meta-lens, wherein the direction of the extension line between the center point of the multifocal meta-lens and the steering mirror is different from the direction of the extension line between the light-collecting element and the center point of the steering mirror.

[0012] According to some embodiments of the present invention, a super-optical device includes an array of light-emitting elements, a plurality of multifocal super-lenses located above the array of light-emitting elements, a super-lens located above the multifocal super-lenses, and at least one light-receiving element located on one side of the super-lens opposite to the multifocal super-lenses. The array of light-emitting elements includes a plurality of light-emitting elements arranged adjacent to each other, wherein each light-emitting element has a light-emitting surface. The multifocal super-lenses are spaced apart from the light-emitting elements by a distance (d), and each multifocal super-lens has a plurality of focal regions falling on the light-emitting surface of one of the light-emitting elements. The diameter (φ), distance (d), and light-receiving angle (θ) of each focal region conform to the following relationship: φ ≤ (2 × d × tan(θ)).

[0013] According to the above embodiments, the super-optical device of the present invention includes a multi-focal super-lens located between a light-emitting element and a light-receiving element. The multi-focal super-lens has multiple focal regions falling on the light-emitting surface of the light-emitting element, and these focal regions have appropriate sizes. Therefore, the proportion of light flux emitted by the light-emitting element that is received by the light-receiving element can be increased, thereby improving the coupling efficiency of the super-optical device. Attached Figure Description

[0014] The various aspects of the invention can be best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that, according to standard industrial methods, the various features are not drawn to scale. In practice, the dimensions of the various features may be arbitrarily increased or decreased for clarity of discussion.

[0015] Figure 1 A side view schematic diagram of a super-intelligent optical device is shown for some embodiments of the present invention;

[0016] Figure 2A beam path diagram of a super-optical device is illustrated for some embodiments of the present invention;

[0017] Figure 3 This is a beam path diagram for an optical device that does not have a multifocal superlens.

[0018] Figure 4 A side view schematic diagram of a super-intelligent optical device is shown for some embodiments of the present invention;

[0019] Figures 5A to 5C , Figures 6A to 6C , Figures 7A to 7C and Figures 8A to 8C The following diagrams illustrate the distribution of focal regions, collimation focal points, and nanostructure phase values ​​for some embodiments of the present invention.

[0020] Figure 9A A cross-sectional schematic diagram of a multifocal metalens is shown for some embodiments of the present invention;

[0021] Figures 9B to 9G A partial cross-sectional schematic diagram of a multifocal superlens is shown for some embodiments of the present invention;

[0022] Figures 10 to 13 A side view schematic diagram of an ultra-high-resolution optical device is shown for some embodiments of the present invention.

[0023] Symbol Explanation

[0024] 100, 300, 400, 500, 600, 700: Superior Optical Devices

[0025] 110, 110a, 110b, 110c: Light-emitting elements

[0026] 112: Exposed surface

[0027] 112a: Central axis region

[0028] 112b: Off-axis region of the focal point

[0029] 120, 120a, 120b, 120c: Multifocal superlenses

[0030] 122: Focus Area

[0031] 130, 130a, 130b, 130c: Light receiving element

[0032] 132: Light-receiving surface

[0033] 140: Lens substrate

[0034] 142: Nanostructures

[0035] 150: Light guide layer

[0036] 155: Framework

[0037] 160: Dielectric layer

[0038] 170, 170a, 170b: Superlens

[0039] 180: Sunshade ring

[0040] 190: Steering Reflector

[0041] 200: Optical devices

[0042] 212, 312, 412, 512: Light-emitting surface

[0043] 222,322,422,422a,422b,522: Focal region

[0044] 224, 324, 424, 524: Collimation focal points

[0045] 514: Non-luminous area

[0046] A: Aperture

[0047] d, d1, d2, d3, d4: Distance

[0048] D: Size

[0049] H: Height

[0050] L: Maximum aperture

[0051] P: Permutation period

[0052] R: radius

[0053] W, W1, W2: Announcement aperture

[0054] X, Y, Z: Axes

[0055] θ: Angle of light collection

[0056] φ: diameter Detailed Implementation

[0057] To achieve the different features of the mentioned subject matter, the following disclosure provides many different embodiments or examples. Specific examples of components, configurations, etc., are described below to simplify the invention. Of course, these are merely examples and not limiting. For example, in the following description, forming a first feature on or over a second feature can include embodiments where the first and second features are formed in direct contact, and can also include embodiments where an additional feature is formed between the first and second features such that the first and second features do not need to be in direct contact. Additionally, reference numerals and / or letters may be repeated in various examples. This repetition is for simplicity and clarity and does not in itself imply a relationship between the various embodiments and / or configurations discussed.

[0058] Furthermore, this document may use spatial relative terms such as "below," "under," "lower," "above," "upper," etc., to facilitate the description of the relationship between one element or feature and another element or feature as shown in the figure. In addition to the orientations shown in the figure, spatial relative terms are intended to include different orientations of the device in use or operation. The device may be oriented in other ways (rotated 90 degrees or in other directions), and the spatial relative descriptive symbols used herein may be interpreted accordingly.

[0059] The present invention provides a super-optical device comprising a multifocal super-lens located between a light-emitting element and a light-receiving element. The multifocal super-lens has multiple focal regions falling on a single light-emitting surface of the light-emitting element, and the diameters of these focal regions, the distance between the multifocal super-lens and the light-emitting surface, and the light-receiving angle of the light-receiving element conform to a specific relationship. Therefore, the proportion of light flux emitted by the light-emitting element that is received by the light-receiving element can be increased, thereby improving the coupling efficiency of the super-optical device.

[0060] According to some embodiments of the present invention, Figure 1 A side view of the super-optical device 100 on the XZ plane is shown. The super-optical device 100 includes a light-emitting element 110 having a light-emitting surface 112, a multifocal super-optical lens 120 located above the light-emitting surface 112, and a light-receiving element 130 located on the side of the multifocal super-optical lens 120 opposite to the light-emitting element 110. In other words, the multifocal super-optical lens 120 is located between the light-emitting element 110 and the light-receiving element 130, such that the light beam emitted from the light-emitting surface 112 passes through the multifocal super-optical lens 120 and is received by the light-incident surface 132 of the light-receiving element 130.

[0061] Specifically, the light-emitting surface 112 of the light-emitting element 110 can emit multiple light beams in multiple directions, and the multifocal superlens 120 has the function of converging the light divergence angle of these light beams. Therefore, it can collimate the light beams and reduce the travel range of the light beams, so that the light-receiving element 130 receives a higher proportion of luminous flux. In some embodiments, the light-emitting element 110 can have a large light divergence angle, making the light-emitting element 110 itself a wide light source. For example, the light-emitting element 110 can be a single light-emitting diode (LED) chip, a micro LED chip, a surface light source composed of a light-emitting chip and a light guide plate, or a combination thereof.

[0062] To describe in more detail the function of the collimating beam of the multifocal superlens 120, Figure 2 According to some embodiments of the present invention, a beam path diagram of the super-optical device 100 in the XZ plane is illustrated, while Figure 3 The diagram illustrates the beam path of an optical device 200 without a multifocal superlens 120 in the XZ plane. In the optical device 200, the beam emitted from the central axis region 112a of the emitting surface 112 can be completely received by the receiving element 130, while only a portion of the beam emitted from the off-axis region 112b outside the central axis region 112a is received by the receiving element 130. In other words, for the optical device 200, the effective emitting area of ​​the emitting element 110 is equivalent to the area of ​​the central axis region 112a on the emitting surface 112, while the beam emitted from the off-axis region 112b cannot be effectively coupled to the receiving element 130.

[0063] In the meta-optical device 100, the multifocal metalens 120 has multiple focal regions 122 falling on the light-emitting surface 112 of a single light-emitting element 110. When a light beam is emitted from the light-emitting surface 112 within the focal region 122, the beam can be refracted by the multifocal metalens 120 to reduce the beam divergence angle, allowing the light emitted from the focal region 122 to be completely received by the light-receiving element 130. When a light beam is emitted from the light-emitting surface 112 outside the focal region 122 (or the off-axis focal region), the convergence of the beam may be insufficient for the light-receiving element 130 to completely receive it. In other words, for the meta-optical device 100, the focal regions 122 can all be considered as effective light-receiving regions, and the effective light-emitting area of ​​a single light-emitting element 110 is equivalent to the total area of ​​the multiple focal regions 122 covering the light-emitting surface 112. Therefore, the super-optical device 100 has a larger effective light-emitting area than the optical device 200, which can couple the light source more effectively, making the super-optical device 100 suitable for optical devices such as optomechanical systems, augmented reality (AR) wearable devices, and virtual reality (VR) wearable devices.

[0064] Reference Figure 1 The focal region 122 of the multifocal superlens 120 has an appropriate size on the light-emitting surface 112, thus significantly increasing the effective light-emitting area of ​​the light-emitting element 110. Specifically, the focal region 122 on the light-emitting surface 112 can be a circular region with a diameter φ. In the direction perpendicular to the light-emitting surface 112 (e.g., Figure 1 Along the Z-axis (in the image), the multifocal superlens 120 and the light-emitting surface 112 are spaced apart by a distance d. When the light-receiving element 130 has a light-receiving angle θ, the diameter φ of the focal region 122 is less than or equal to the product of twice the distance d and the tangent of the light-receiving angle θ, so that multiple focal regions 122 can continuously cover the light-emitting surface 112, thereby increasing the effective light-emitting area of ​​the light-emitting element 110. In other words, the diameter φ of the focal region 122, the distance d between the multifocal superlens 120 and the light-emitting surface 112, and the light-receiving angle θ of the light-receiving element 130 satisfy the following relationship: φ ≤ (2 × d × tan(θ)), so that the area of ​​the focal region 122 covering the light-emitting surface 112 is between 30% and 100%, thus significantly improving the light transmission efficiency of the super-optical device 100. If φ>(2×d×tan(θ)), the focal region 122 may become multiple separate regions, increasing the off-axis region between the focal regions 122, thus reducing the effective light-emitting area of ​​the light-emitting element 110.

[0065] In some embodiments, the light-receiving element 130 may be an optical fiber or silicon photonic element with a large light-receiving angle θ, thereby increasing the area of ​​the focal region 122 on the light-emitting surface 112. For example, the light-receiving element 130 may be an optical fiber or silicon photonic element with a numerical aperture (NA), wherein the light-receiving angle θ and the numerical aperture NA satisfy the following relationship: θ = sin -1 (NA). Therefore, when the light-receiving element 130 has a high numerical aperture, the focal region 122 can have a large diameter that can easily and completely cover the light-emitting surface 112, thereby increasing the effective light-emitting area of ​​the light-emitting element 110.

[0066] In some embodiments, the light-emitting element 110, the multifocal metalens 120, and the light-receiving element 130 may have similar or gradually widening cross-sectional area dimensions in the arrangement direction of the light-emitting element 110 to the light-receiving element 130, thereby improving the light-receiving efficiency of the light-receiving element 130. For example, the light-emitting surface 112 of the light-emitting element 110 has a maximum aperture L in the X-axis direction, the multifocal metalens 120 has an incident aperture W in the X-axis direction, and the light-receiving surface 132 of the light-receiving element 130 has a radius R in the X-axis direction, wherein the maximum aperture L is less than or equal to the incident aperture W, and the incident aperture W is less than or equal to twice the radius R, thus maximizing the efficiency of the light beam from the light-emitting element 110 being received by the light-receiving element 130.

[0067] In some embodiments, the multifocal metalens 120 may include multiple nanostructures, wherein the phase value of the nanostructures affects the beam travel path and can provide an effect of converging the divergence angle. For example, Figure 4 A side view schematic diagram of a super-optical device 300 in the XZ plane is illustrated according to some embodiments of the present invention. The super-optical device 300 is similar to... Figure 1 The meta-optical device 100 in the super-optical device 300 includes a multifocal meta-lens 120 comprising a lens substrate 140 and a plurality of nanostructures 142 located on the lens substrate 140. The combination of phase values ​​of the plurality of nanostructures 142 results in the multifocal meta-lens 120 having a plurality of focal regions 122 falling on the light-emitting surface 112, thereby changing the beam path from the light-emitting surface 112 and converging the light divergence angle.

[0068] According to some embodiments of the present invention, Figure 5A A diagram showing the distribution of the focal region 222 of the multifocal metalens on the light-emitting surface 212 is drawn. Figure 5B The diagram shows the distribution of the collimated focal point 224 of the focal region 222 on the light-emitting surface 212, while Figure 5C A phase value distribution diagram of a nanostructured multifocal metalens with a focal region 222 is plotted, in which... Figures 5A to 5CSuper-optical devices captured from the XY plane. Figure 5A Multiple focal regions 222 are located within the range of the light-emitting surface 212, wherein the focal regions 222 are connected by region edges and do not overlap. Figure 5A The focal area 222 uses the center point of the individual area as... Figure 5B The collimation focal point 224 in the lens, wherein the collimation focal point 224 of each focal region 222 is located outside the other focal regions 222. When a multifocal superlens has such Figure 5B The collimation focal point 224 shown and its corresponding Figure 5A When the focal depth of the focal region 222 is reached, the phase value combination of the nanostructure of the multifocal metalens can form, as shown in the figure. Figure 5C The phase value distribution diagram in the image.

[0069] When the purpose of manufacturing a multifocal metalens is to have, for example... Figure 5A When the focal area 222 is shown, you can refer to... Figure 5B The distribution map of collimating focal points 224 and the corresponding focal depth shown are used to form a nanostructure assembly on the multifocal metalens, wherein the nanostructure assembly provides, for example, Figure 5C The phase value distribution diagram is shown. Conversely, when the nanostructure combination on the multifocal metalens has such... Figure 5C When the phase value distribution diagram shown is displayed, the multifocal metalens will have Figure 5B The collimation focal point 224 and the corresponding focal depth shown are thus formed. Figure 5A The focal area shown is 222. In summary, Figure 5B The distribution diagram of collimation focal point 224 shown is... Figure 5C The phase value distribution diagrams of the nanostructures shown have a corresponding relationship.

[0070] In some implementations, the phase distribution of the nanostructure and the collimated focal point distribution of the focal region on the light-emitting surface can have a Fourier transform or inverse Fourier transform relationship. For example, when the purpose of manufacturing a multifocal metalens is to have such... Figure 5A When the focal region 222 is shown, it can be used for... Figure 5B The distribution map of the collimation focal point 224 shown is obtained by performing one or more Fourier transforms. Figure 5C The plotted image shows the phase value distribution of the nanostructure. Conversely, when the nanostructure of a multifocal metalens can provide such... Figure 5C When the phase value distribution diagram shown is displayed, it can be used to... Figure 5C The phase value distribution plot shown is obtained by performing one or more inverse Fourier transforms. Figure 5BThe diagram shows the distribution of the collimation focal point 224.

[0071] According to other embodiments of the present invention, Figure 6A A diagram showing the distribution of the focal region 322 of the multifocal superlens on the light-emitting surface 312 is drawn. Figure 6B The diagram shows the distribution of the collimated focal point 324 of the focal region 322 on the light-emitting surface 312. Figure 6C A phase value distribution diagram of a nanostructured metalens with a focal region of 322 is plotted. Figure 6A Multiple focal regions 322 collectively cover the light-emitting surface 312, with a portion of the focal region 322 located at the edge of the light-emitting surface 312 extending outside the light-emitting surface 312. The focal regions 322 have a partial overlap, so that the light-emitting surface 312 is completely covered by the focal regions 322. Figure 6A The focal area 322 uses the center point of the individual area as... Figure 6B The collimation focal point 324 in the focal region 322 is located outside the other focal regions 322. Figure 6C Phase value distribution of nanostructures and Figure 6B The distribution of the collimation focusing point 324 on the light-emitting surface 312 has a Fourier transform or inverse Fourier transform relationship.

[0072] According to other embodiments of the present invention, Figure 7A A diagram showing the distribution of the focal region 422 of the multifocal metalens on the light-emitting surface 412 is drawn. Figure 7B The diagram shows the distribution of the collimated focal point 424 of the focal region 422 on the light-emitting surface 412. Figure 7C A phase value distribution diagram of a nanostructured metalens with a focal region of 422 is plotted. Figure 7A The distribution of the focal region 422 is similar to Figure 6A The distribution of the focal region 322 in the light-emitting surface 412 is such that the focal depth at the center of the light-emitting surface 412 is greater than the focal depth at the edge of the light-emitting surface 412, which makes the diameter of the focal region 422b at the center of the light-emitting surface 412 smaller than the diameter of the focal region 422a at the edge of the light-emitting surface 412. Figure 7A The focal area 422 uses the center point of the individual area as... Figure 7B The collimation focal point 424 in the focal region 422 is located outside the other focal regions 422. Figure 7C Phase value distribution of nanostructures and Figure 7B The distribution of the collimating focusing point 424 on the light-emitting surface 412 has a Fourier transform or inverse Fourier transform relationship. Although Figure 7B The distribution of the collimation focal point 424 in the image is approximately the same as... Figure 6B The distribution of the collimation focal point 324 in the image, but Figure 7A The focal depth corresponding to the focal region 422 in the image is different from that in the image. Figure 6A The focal depth corresponding to the focal region 322 in the image is therefore Figure 6B and Figure 6C The conversion formulas between them can be different. Figure 7B and Figure 7C The conversion formula between them.

[0073] According to other embodiments of the present invention, Figure 8A A diagram showing the distribution of the focal region 522 of the multifocal superlens on the light-emitting surface 512 is drawn. Figure 8B The diagram shows the distribution of the collimated focal point 524 of the focal region 522 on the light-emitting surface 512, while Figure 8C A phase value distribution diagram of the nanostructure of a multifocal superlens with a focal region 522 is shown. The light-emitting surface 512 includes a non-light-emitting region 514, which may be an electrode made of an opaque material. Figure 8A Multiple focal regions 522 surround the non-light-emitting region 514 along the edge of the non-light-emitting region 514, and there is a partial overlap between the focal regions 522, so that the light-emitting region of the light-emitting surface 512 can still be completely covered by the focal regions 522. Figure 8A The focal region 522 in the middle has Figure 8B The collimation focal point 524 in the focal region 522 is located outside the other focal regions 522. Figure 8C Phase value distribution of nanostructures and Figure 8B The distribution of the collimation focusing point 524 on the light-emitting surface 512 has a Fourier transform or inverse Fourier transform relationship.

[0074] In some embodiments, the nanostructures on the multifocal metalens can have corresponding sizes or patterns according to the characteristics of the light-emitting or light-receiving elements, such that the combination of phase values ​​of the nanostructures can create multiple focal regions of the multifocal metalens. According to some embodiments of the present invention, Figure 9AA cross-sectional schematic diagram of a multifocal metalens 120 in the XZ plane is shown, wherein the multifocal metalens 120 includes a lens substrate 140 and a plurality of nanostructures 142 on the top surface of the lens substrate 140. When the light-emitting element provides an emission wavelength λ, the plurality of nanostructures 142 are separated from each other, and the alignment period P of the nanostructures 142 can be less than 0.7 times the emission wavelength λ. The nanostructures 142 have a dimension D on the lens substrate 140 and in a direction parallel to the alignment period P, wherein the dimension D can be between 0.1 times the alignment period P and 0.95 times the alignment period P. For example, when the nanostructures 142 have a cylindrical shape, the dimension D of the nanostructures 142 can be the diameter of the cylindrical cross-section on the lens substrate 140. The nanostructures 142 can have equal dimensions in a direction perpendicular to the top surface of the lens substrate 140, or have dimensions such as... Figure 9A The dimensions are shown as a gradient. Furthermore, when the lens substrate 140 has a refractive index n, the height H of the nanostructure 142 in the direction perpendicular to the top surface of the lens substrate 140 can be greater than the quotient of the emission wavelength λ divided by (refractive index n minus 1) (i.e., In some embodiments where the lens substrate 140 is closer to the light-emitting element, the refractive index of the nanostructure 142 can be greater than that of the lens substrate 140, making it easier for the multifocal metalens 120 to collimate the light beam from the light-emitting element.

[0075] According to some embodiments of the present invention, Figures 9B to 9G A schematic diagram of a partial cross-section of a multifocal superlens in the XY plane is shown. Figures 9B to 9G The figures illustrate individual nanostructures 142 on the lens substrate 140, with each nanostructure 142 exhibiting a different cross-sectional shape. Depending on the phase value distribution required by the multifocal metalens, the nanostructures on the multifocal metalens can have solid, hollow, or segmented geometric cross-sections, for example... Figure 9B The hollow segmented circular cross section shown, the square cross section shown in Figure 9C, and so on. Figure 9D The cross-shaped cross section shown Figure 9E The multi-circular cross section shown Figure 9F The hollow segmented square cross section shown or Figure 9G The multi-square cross-section shown can be used to depict multiple nanostructures on a single multifocal superlens, which can have different cross-sectional shapes or sizes.

[0076] Reference Figure 4The multifocal superlens 120 of the super-optical device 300 includes a lens substrate 140 and a plurality of nanostructures 142 on the top surface of the lens substrate 140, wherein the lens substrate 140 is closer to the light-emitting element 110, and the nanostructures 142 protrude in a direction away from the light-emitting element 110. The super-optical device 300 may also include a light guide layer 150 located between the multifocal superlens 120 and the light-emitting element 110, for guiding the light beam emitted by the light-emitting element 110 to the multifocal superlens 120. For example, the light guide layer 150 may be made of glass, oxide, light-conducting material, or other light-transmitting material. The light guide layer 150 can be used to adjust the distance between the multifocal superlens 120 and the light-emitting element 110, so that the focal region 122 of the multifocal superlens 120 falling on the light-emitting surface 112 has an appropriate size. In some embodiments, the light guide layer 150 can be directly formed on the light-emitting element 110, and the multifocal superlens 120 can be directly formed on the light guide layer 150, so that the light guide layer 150 directly contacts the light-emitting surface 112 of the light-emitting element 110 and the lens substrate 140 of the multifocal superlens 120. In such embodiments, the thickness of the light guide layer 150 in the direction perpendicular to the light-emitting surface 112 can be used as the separation distance between the multifocal superlens 120 and the light-emitting element 110 (e.g., Figure 1 The distance d in the middle.

[0077] According to other embodiments of the present invention, Figure 10 A side view of the super-optical device 400 in the XZ plane is shown. The super-optical device 400 is similar to... Figure 4 The super-optical device 300 is described above. However, the multi-focal super-lens 120 of the super-optical device 400 includes a lens substrate 140 and a plurality of nanostructures 142 under the bottom surface of the lens substrate 140. The nanostructures 142 are closer to the light-emitting element 110 and protrude in the direction of approaching the light-emitting element 110. The super-optical device 400 may also include a light guide layer 150 located between the multi-focal super-lens 120 and the light-emitting element 110 and a frame 155 surrounding the multi-focal super-lens 120. The multi-focal super-lens 120 is aligned and attached to the light guide layer 150 through the frame 155. Therefore, the frame 155 connects the lens substrate 140 to the light guide layer 150, and the frame 155 is used to separate the nanostructures 142 from the light guide layer 150. In some embodiments, the meta-optical device 400 may further include a dielectric layer 160 located between the multifocal meta-lens 120 and the light guide layer 150 and surrounded by a frame 155, wherein the dielectric layer 160 fills the gaps between the nanostructures 142 and separates the nanostructures 142 from the light guide layer 150. For example, the dielectric layer 160 may be a vacuum or composed of gas or liquid.

[0078] According to some embodiments of the present invention, Figure 11 A side view of the super-optical device 500 on the XZ plane is shown. The super-optical device 500 is similar to... Figure 4 The super-optical device 300 is described above, but the super-optical device 500 includes different numbers of light-emitting elements 110 and additional lenses. Specifically, the super-optical device 500 includes a light-emitting element 110a, a multi-focal super-optical lens 120a above the light-emitting element 110a, a light-emitting element 110b, a multi-focal super-optical lens 120b above the light-emitting element 110b, a light-emitting element 110c, and a multi-focal super-optical lens 120c above the light-emitting element 110c. The light-emitting elements 110a, 110b, and 110c are arranged adjacent to each other along the X-axis to form a light-emitting element array, wherein the multi-focal super-optical lenses 120a to 120c may have nanostructure combinations corresponding to different light-emitting elements 110a to 110c, respectively, to improve the individual effective light-emitting area of ​​the light-emitting elements 110a to 110c. In the direction perpendicular to the light-emitting surface of the light-emitting elements 110a to 110c (e.g., ... Figure 11 Along the Z-axis direction, multifocal metalenses 120a to 120c are spaced apart from the light-emitting surfaces of light-emitting elements 110a to 110c by a distance d. The metaoptical device 500 also includes a light-receiving element 130 above the multifocal metalenses 120a to 120c and a metalens 170 located between the multifocal metalenses 120a to 120c and the light-receiving element 130. After the light beams emitted by the light-emitting elements 110a to 110c pass through their respective multifocal metalenses 120a to 120c, these beams collectively pass through the metalens 170 and reach the light-receiving element 130. The metalens 170 can further adjust the beam direction or phase, so that the beams from multiple light-emitting elements 110a to 110c are all focused onto the same light-receiving element 130. In some embodiments where the light-emitting surfaces of light-emitting elements 110a to 110c are located on the same horizontal plane (i.e., the XY plane), the superlens 170 may be a single-focus superlens.

[0079] According to some embodiments of the present invention, Figure 12 A side view of the super-optical device 600 in the XZ plane is shown. The super-optical device 600 is similar to... Figure 11The super-optical device 500 is described above, but the super-optical device 600 includes different numbers of light-receiving elements 130 and super-lenses 170. Specifically, the super-optical device 600 includes light-emitting elements 110a to 110c arranged along the X-axis and multi-focal super-lenses 120a to 120c corresponding to each light-emitting element, to increase the individual effective light-emitting area of ​​each light-emitting element 110a to 110c. After the light beams passing through the multi-focal super-lenses 120a to 120c are oriented twice by super-lenses 170a and 170b, these light beams can be received by the light-receiving elements 130a to 130c respectively. In other words, super-lenses 170a and 170b can establish a one-to-one correspondence between the light-emitting elements 110a to 110c and the light-receiving elements 130a to 130c.

[0080] In some embodiments, the meta-optical device 600 may further include a light-shielding ring 180 between meta-lens 170a and meta-lens 170b, wherein the light beam passing through meta-lens 170a first passes through an opening in the light-shielding ring 180 and then through meta-lens 170b. The light-shielding ring 180 can reduce crosstalk between different light beams emitted by light-emitting elements 110a to 110c, thus improving the accuracy of the light beams from light-emitting elements 110a to 110c being received by light-receiving elements 130a to 130c respectively. Figure 12For example, the light beams passing through multifocal metalenses 120a and 120c, after being oriented by metalens 170a, will be output as beams with an angle relative to the Z-axis. When these angled beams reach the light-blocking ring 180, the light-blocking ring 180 can block the portion of the beam with an excessively large angle of inclination. Therefore, the light beams passing through multifocal metalenses 120a and 170a will only be focused onto the light-receiving element 130a by metalens 170b, and the light beams passing through multifocal metalenses 120c and 170a will only be focused onto the light-receiving element 130c by metalens 170b. In the Z-axis direction, the distance d1 between the meta-lens 170a and the multifocal meta-lens (e.g., multifocal meta-lens 120a to multifocal meta-lens 120c) and the distance d2 between the meta-lens 170a and the light-blocking ring 180 can be equal to the focal length of the meta-lens 170a. Furthermore, the distance d3 between the meta-lens 170a and the light-blocking ring 180 and the distance d4 between the meta-lens 170b and the light-collecting elements (e.g., light-collecting elements 130a to light-collecting elements 130c) can be equal to the focal length of the meta-lens 170b, thereby improving the coupling efficiency of the meta-optical device 600. Additionally, the aperture A of the light-blocking ring 180 can be smaller than the incident aperture W1 of the meta-lens 170a and the incident aperture W2 of the meta-lens 170b, thereby preventing beam crosstalk. For example, the aperture A of the light-blocking ring 180 can conform to the following relationship: A = 2 × sin (the emission angle of the multifocal superlens) × (the focal length of the superlens 170a), or the aperture A of the light-blocking ring 180 can conform to the following relationship: A = 2 × sin (the light-receiving angle of the light-receiving element) × (the focal length of the superlens 170b).

[0081] According to some embodiments of the present invention, Figure 13 A side view of the super-optical device 700 on the XZ plane is shown. The super-optical device 700 is similar to... Figure 11 The super-optical device 500 is described above, but the super-optical device 700 includes additional lenses to enhance the flexibility of assembling optical elements. Specifically, the super-optical device 700 includes a plurality of light-emitting elements 110 arranged along the X-axis and a multi-focal super-optical lens 120 corresponding to each light-emitting element 110, to increase the individual effective light-emitting area of ​​each light-emitting element 110. The light beams emitted by the plurality of light-emitting elements 110 collectively pass through a super-optical lens 170 above the multi-focal super-optical lens 120, and these light beams change their direction of travel by passing through a deflecting mirror 190 above the super-optical lens 170. Therefore, even if the direction of the extension line between the center point of the multi-focal super-optical lens 120 and the deflecting mirror 190 (e.g., ...) changes, the light beams will still be able to travel in different directions. Figure 13 The Z-axis direction shown is different from the direction of the extended line between the center point of the light-receiving element 130 and the center point of the steering mirror 190 (e.g., Figure 13(As shown in the X-axis direction), the light beam passing through the multifocal superlens 120 can still be effectively received by the light-receiving element 130.

[0082] According to the above embodiments, the super-optical device of the present invention includes a multifocal super-lens and light-emitting elements and light-receiving elements located on opposite sides of the multifocal super-lens. The multifocal super-lens has multiple focal regions falling on the light-emitting surface of the light-emitting element, and the diameter (φ) of these focal regions is less than or equal to twice the product of the distance (d) between the multifocal super-lens and the light-emitting element and the tangent of the light-receiving angle (θ) of the light-emitting element. Therefore, the focal regions can continuously cover the light-emitting surface, increasing the effective light-emitting area of ​​the light-emitting element, thereby improving the coupling efficiency of the super-optical device. The multifocal super-lens may include multiple nanostructures with different phase values; therefore, the position and size of the focal regions on the light-emitting surface can be changed by adjusting the phase value distribution of the nanostructure combination.

[0083] The foregoing outlines features of some embodiments to enable those skilled in the art to better understand the ideas of the invention. Those skilled in the art should understand that they can readily use the invention as a basis for designing or modifying other processes and structures to achieve the same objectives and / or the same advantages as the embodiments described herein. Those skilled in the art should also understand that such equivalent constructions do not depart from the spirit and scope of the invention, and that various changes, substitutions, and modifications can be made without departing from the spirit and scope of the invention.

Claims

1. A super-intelligent optical device, characterized in that, include: The light-emitting element has a light-emitting surface; A multifocal superlens is located above the light-emitting surface of the light-emitting element, wherein the multifocal superlens is separated from the light-emitting surface by a distance (d) in a direction perpendicular to the light-emitting surface, and the multifocal superlens has multiple focal areas falling on the light-emitting surface. and A light-receiving element is located on one side of the multifocal superlens opposite to the light-emitting element, wherein the diameter (φ), the distance (d), and the light-receiving angle (θ) of each of the plurality of focal regions on the light-emitting surface conform to the following relationship: φ≤(2×d×tan(θ)).

2. The meta-optical device as claimed in claim 1, wherein the multifocal meta-lens comprises a plurality of nanostructures located on the top surface of the lens substrate or below the bottom surface of the lens substrate, and the phase value distribution of the plurality of nanostructures and the collimation focal point distribution of the plurality of focal regions on the light-emitting surface have a Fourier transform or inverse Fourier transform relationship.

3. The meta-optical device of claim 1, wherein the multifocal meta-lens comprises a plurality of nanostructures located on the top surface of the lens substrate or below the bottom surface of the lens substrate, the arrangement period of the plurality of nanostructures being less than 0.7 times the emission wavelength of the light-emitting element, and the dimensions of the plurality of nanostructures on the lens substrate in a direction parallel to the arrangement period being between 0.1 times the arrangement period and 0.95 times the arrangement period.

4. The super-optical device of claim 1, wherein the collimation focal point of each of the plurality of focal regions is located outside the others of the plurality of focal regions.

5. The super-optical device of claim 1, wherein the plurality of focal regions includes a first focal region having a first diameter and a second focal region having a second diameter, the first diameter being smaller than the second diameter, and the focal depth of the first focal region being greater than the focal depth of the second focal region.

6. The super-optical device of claim 1, wherein the light-emitting surface includes a non-light-emitting region, and the plurality of focal regions surround the non-light-emitting region along the edge of the non-light-emitting region.

7. The super-optical device of claim 1, further comprising: A light guide layer is located between the multifocal superlens and the light-emitting element, wherein the light guide layer directly contacts the light-emitting surface of the light-emitting element and the multifocal superlens.

8. The super-optical device of claim 1, further comprising: A light guide layer is located between the multifocal superlens and the light-emitting element; A frame is located around the multifocal superlens, wherein the frame connects the multifocal superlens to the light guide layer; and The dielectric layer separates the multifocal superlens from the light guide layer.

9. The super-optical device of claim 1, further comprising: A steering mirror is located above the multifocal superlens, wherein the direction of the extension line between the center point of the multifocal superlens and the steering mirror is different from the direction of the extension line between the light-collecting element and the center point of the steering mirror.

10. A super-intelligent optical device, characterized in that, include: An array of light-emitting elements includes a plurality of light-emitting elements arranged adjacent to each other, wherein each of the plurality of light-emitting elements has a light-emitting surface; Multiple multifocal meta lenses are located above the light-emitting element array, wherein the multiple multifocal meta lenses are separated from the multiple light-emitting elements by a distance (d), and each of the multiple multifocal meta lenses has multiple focal regions falling on the light-emitting surface of one of the multiple light-emitting elements; A super-focus lens is located above the plurality of multifocal super-focus lenses; and At least one light-receiving element is located on one side of the metalens relative to the plurality of multifocal metalenses, wherein the diameter (φ), the distance (d), and the light-receiving angle (θ) of each of the plurality of focal regions satisfy the following relationship: φ≤(2×d×tan(θ)).

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