Reticle receiving method and receiving system for a spatial image measuring system

Abstract

This invention provides a method and system for receiving photomasks in a spatial image measurement system. The method includes acquiring the identification information of the photomask transport box containing the photomask to be received; querying the identification information to obtain the type of the preceding processing machine before the photomask enters the spatial image measurement system; obtaining the receiving parameters of the photomask to be received based on the preceding processing machine type and a preset parameter mapping table; the parameter mapping table characterizes the mapping relationship between different preceding processing machine types and the receiving parameters; and controlling the robotic arm of the spatial image measurement system to adjust the pose of the photomask to be received before transporting it, based on the receiving parameters. This invention can improve the equipment compatibility between different preceding processing machines and the spatial image measurement system, as well as the efficiency of automatic photomask transfer.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a photomask receiving method and receiving system for a spatial image measurement system. Background Technology

[0002] In the manufacturing process of semiconductor photomasks, an Aerial Image Measurement System (AIMS) is used to perform final spatial image measurements before the photomask is shipped. Before entering the AIMS, the photomask undergoes multiple pre-processing steps. After completing their respective processes, different pre-processing machines use their robotic arms to unload the photomask and place it in a photomask transport box. The placement angle and orientation of the robotic arms differ between different pre-processing machines during photomask unloading, resulting in different output photomask poses.

[0003] In actual production, photomasks in various poses are sequentially fed into the AIMS for measurement. However, existing AIMS systems only have a single preset receiving parameter, which cannot adapt to photomasks in different poses transmitted from different preceding processing machines. When the photomask pose does not match the AIMS's preset receiving parameter, the photomask transfer box must be manually opened to manually flip and adjust the angle of the photomask. This results in low efficiency, high labor costs, a high risk of human error, and an inability to adapt to changes in the production line. Therefore, improvements are needed. Summary of the Invention

[0004] This invention provides a photomask receiving method and receiving system for a spatial image measurement system, in order to solve the technical problem of low efficiency in existing spatial image measurement systems when receiving photomasks transmitted from different preceding processing machines.

[0005] This invention proposes a photomask receiving method for a spatial image measurement system, comprising: Obtain the identification information of the photomask transport box where the photomask to be received is located; The type of the pre-processing machine before the photomask to be received enters the spatial image measurement system is obtained by querying the identification information. The receiving parameters of the photomask to be received are obtained according to the type of the preceding processing machine and the preset parameter mapping table; the parameter mapping table represents the mapping relationship between different types of preceding processing machine and receiving parameters. Based on the received parameters, the robotic arm of the spatial image measurement system is controlled to adjust the pose of the photomask to be received before it is moved.

[0006] In one embodiment of the present invention, the step of querying based on the identification information to obtain the type of the pre-processing machine before the photomask to be received enters the spatial image measurement system includes: Based on the identification information, a query is performed to obtain all processing machines before the photomask to be received enters the spatial image measurement system, and the total number of processing machines is determined: When the total number of processing machines is only one, the type of that processing machine is identified as the previous processing machine type. Otherwise, the type of the last processing machine will be confirmed as the type of the preceding processing machine.

[0007] In one embodiment of the present invention, obtaining the receiving parameters of the photomask to be received according to the type of the preceding processing machine and a preset parameter mapping table includes: Determine whether the type of the preceding processing machine exists in a preset parameter mapping table: When the type of the preceding processing machine exists in a preset parameter mapping table, the receiving parameters corresponding to the type of the preceding processing machine are obtained from the parameter mapping table and confirmed as the receiving parameters of the photomask to be received. Otherwise, based on the pose change of the photomask to be received between the last processing machine and the spatial image measurement system, the receiving parameters corresponding to the preceding processing machine type are created, and the mapping relationship between the preceding processing machine type and its corresponding receiving parameters is added to the parameter mapping table.

[0008] In one embodiment of the present invention, the step of creating receiving parameters corresponding to the type of the preceding processing machine based on the pose change of the photomask to be received between the last processing machine and the spatial image measurement system, and adding the mapping relationship between the type of the preceding processing machine and its corresponding receiving parameters to the parameter mapping table includes: Obtain the output pose of the photomask to be received on the final processing machine; Based on the output pose and the expected target pose of the photomask to be received on the spatial image measurement system, the receiving parameters corresponding to the type of the preceding processing machine are determined; Create a mapping relationship between the preceding processing machine type and its corresponding receiving parameters, and add the mapping relationship to the parameter mapping table.

[0009] In one embodiment of the present invention, the receiving parameters include at least a rotation angle and a detection surface orientation, wherein the rotation angle includes 0°, 90°, 180° and 270°, and the detection surface orientation includes a front orientation and a back orientation.

[0010] In one embodiment of the present invention, after adjusting the pose of the photomask to be received according to the receiving parameters and then transporting it, the method further includes: Obtain the actual pose of the photomask to be received after transportation, and compare the actual pose with the expected target pose of the photomask to be received on the spatial image measurement system: When the actual pose is the same as the target pose, the transfer of the photomask to be received is completed; Otherwise, based on the actual pose and the target pose, the pose of the photomask to be received on the spatial image measurement system is adjusted until the actual pose of the photomask to be received is the same as the target pose, and the receiving parameters in the parameter mapping table are updated based on the actual pose and the target pose.

[0011] In one embodiment of the present invention, updating the received parameters in the parameter mapping table based on the actual pose and the target pose includes: Based on the actual pose and the target pose, the deviation parameter between the actual pose and the target pose corresponding to the type of the preceding processing machine is obtained; In the parameter mapping table, the receiving parameters of the preceding processing machine type are adjusted based on the deviation parameters to obtain the updated receiving parameters.

[0012] In one embodiment of the present invention, after the actual pose is the same as the target pose and the transport of the photomask to be received is completed, the method further includes: The robotic arm of the spatial image measurement system is controlled to reset to the initial waiting position.

[0013] The present invention also proposes a photomask receiving system for a spatial image measurement system, comprising: The identifier acquisition module is used to acquire the identifier information of the photomask delivery box where the photomask to be received is located; The query module is used to query based on the identification information to obtain the type of the pre-processing machine before the photomask to be received enters the spatial image measurement system; The parameter matching module is used to obtain the receiving parameters of the photomask to be received according to the type of the preceding processing machine and a preset parameter mapping table; the parameter mapping table represents the mapping relationship between different types of preceding processing machine and receiving parameters. The control module is used to control the robotic arm of the spatial image measurement system to adjust the pose of the photomask to be received before transporting it, based on the received parameters.

[0014] In one embodiment of the present invention, the photomask receiving system further includes: The pose detection module is used to obtain the actual pose of the photomask to be received after transportation through the optical imaging module of the spatial image measurement system, and compare the actual pose with the expected target pose of the photomask to be received on the spatial image measurement system. The parameter update module is used to update the received parameters in the parameter mapping table according to the actual pose and the target pose when the actual pose is inconsistent with the target pose. The control module is also used to control the robotic arm to adjust the pose of the photomask to be received on the spatial image measurement system according to the actual pose and the target pose when the actual pose is inconsistent with the target pose, until the actual pose of the photomask to be received is the same as the target pose.

[0015] The beneficial effects of this invention are as follows: This invention proposes a photomask receiving method and system for a spatial image measurement system. First, by acquiring the identification information of the photomask transfer box containing the photomask to be received, the system queries the process data management system in the production line using this identification information. This retrieves a complete production process path record of the photomask inside the transfer box, from which the type of the preceding processing machine the photomask passed before entering the current spatial image measurement system is extracted. Second, based on the preceding processing machine type and a preset parameter mapping table, the receiving parameters of the photomask to be received are obtained. Then, based on the matched receiving parameters, a robotic arm is controlled to complete the pose adjustment and transport of the photomask. This invention transforms the traditionally manual photomask pose adaptation process into a fully automated control flow, realizing the fully automated transfer of the photomask from different preceding processing machines to the spatial image measurement system. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0017] In the attached diagram: Figure 1 This is a schematic diagram illustrating the steps of a photomask receiving method for a spatial image measurement system according to an embodiment of the present invention.

[0018] Figure 2 This is a structural block diagram of a photomask receiver for a spatial image measurement system provided in an embodiment of the present invention. Detailed Implementation

[0019] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0020] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. The drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0021] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the invention. However, it will be apparent to those skilled in the art that embodiments of the invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the invention.

[0022] Please see Figures 1 to 2 This invention relates to the field of semiconductor manufacturing, specifically to a photomask receiving scenario for a spatial image measurement system. By acquiring the source information of the photomask, it adaptively matches the receiving parameters corresponding to the type of preceding processing machine, thereby achieving fully automated transfer of the photomask between different preceding processing machines and the spatial image measurement system. Compared with existing technologies, this invention effectively avoids efficiency losses and contamination risks caused by manual intervention, and improves equipment compatibility and the level of production line intelligence. A more detailed description is provided below through specific embodiments.

[0023] Please see Figure 1 The present invention proposes a photomask receiving method for a spatial image measurement system, which may include the following steps.

[0024] Step S10: Obtain the identification information of the photomask transfer box where the photomask to be received is located.

[0025] Specifically, when a batch of photomasks arrives at the loading port of the Aerial Image Measurement System (AIMS), the unique identification information of the photomask transport pod (SMIF pod) is first obtained by reading the electronic tag attached to the pod. This identification information corresponds one-to-one with the photomasks to be received stored in the pod, and the equipment's automated program can uniquely determine the identity of the photomask to be processed using this identification information.

[0026] In this embodiment, the electronic tag on the photomask transport box can be in the form of a radio frequency identification tag or a barcode. Information is automatically collected by the corresponding reader without manual intervention. This identification information will serve as a key index for subsequent queries of the photomask's historical process path.

[0027] Step S20: Query the identification information to obtain the type of the preprocessing machine before the photomask to be received enters the spatial image measurement system.

[0028] Specifically, after obtaining the identification information of the photomask transport box, a query request is sent to the Manufacturing Execution System (MES) via a data interface. This request carries the aforementioned identification information. The MES retrieves the complete production process path record of the photomask based on the identification information, and extracts the processing machine information that the photomask passed through before entering the current spatial image measurement system.

[0029] Considering that the photomask may undergo multiple preceding processes, in this embodiment, the last processing machine before the current process is defined as its preceding processing machine type. The preceding processing machine type covers equipment from different manufacturers and with different functions, including but not limited to defect detection equipment and defect repair equipment.

[0030] In one embodiment of the present invention, step S20 may include the following steps.

[0031] Step S210: Query according to the identification information to obtain all the processing machines before the photomask to be received enters the spatial image measurement system, and determine the total number of processing machines.

[0032] Specifically, a query request carrying the identification information of the photomask transfer box is sent to the process data management system. The process data management system retrieves and returns all the processing machine information that the photomask to be received has gone through before entering the spatial image measurement system, including the specific type of each processing machine and the order of processing time.

[0033] Step S220: When the total number of processing machines is only one, the type of the processing machine is confirmed as the type of the preceding processing machine.

[0034] Specifically, the quantity of all returned processing machine information is determined. If the photomask to be received passes through only one processing machine before entering the spatial image measurement system, meaning the quantity of all processing machines is unique, then the type of that processing machine is directly identified as the type of the preceding processing machine, serving as the basis for subsequent parameter matching.

[0035] Step S230: Otherwise, confirm the type of the last processing machine as the type of the preceding processing machine.

[0036] Specifically, if the photomask to be received passes through multiple processing stations before entering the spatial image measurement system, i.e., the total number of processing stations is greater than one, the processing station closest to the current time is identified according to the processing time sequence, and the type of the last processing station is confirmed as the type of the preceding processing station, so as to most accurately reflect the actual physical attitude of the photomask when it enters the spatial image measurement system.

[0037] Step S30: Obtain the receiving parameters of the photomask to be received according to the type of the preceding processing machine and the preset parameter mapping table; the parameter mapping table represents the mapping relationship between different types of preceding processing machines and the receiving parameters.

[0038] Specifically, after receiving the preceding processing machine type returned by the process data management system, the system searches for the corresponding receiving parameters in a preset parameter mapping table. This parameter mapping table is pre-stored in the spatial image measurement system's local database, establishing a mapping relationship between different preceding processing machine types and the spatial image measurement system's receiving parameters. The receiving parameters include at least the photomask rotation angle and photomask detection surface orientation that the spatial image measurement system's robotic arm needs to perform when picking up the photomask.

[0039] Because different preprocessing machines are limited by their own mechanical structure and process requirements when outputting photomasks, the placement angle and orientation of the chrome surface (i.e. the detection surface with the pattern) of the photomask are different. Therefore, it is necessary to determine the corresponding receiving parameters according to the specific type of the preprocessing machine so that the robotic arm of the spatial image measurement system can complete the picking and handling in a way that adapts to the current actual posture of the photomask.

[0040] For example, when the photomask comes from a KLA-type defect inspection machine, its output orientation is with the barcode facing left and the chrome side facing down. The corresponding receiving parameters should allow the robotic arm to rotate and flip at a specific angle. When the photomask comes from a MeritRepair-type defect repair machine, its output orientation is with the barcode facing up and the chrome side facing up, and the corresponding receiving parameters will be different. If a matching receiving parameter is found, it will be used as the basis for the robotic arm operation. If the parameter mapping table does not yet record the corresponding parameters for this preceding processing machine type, the mapping relationship can be established and stored in the parameter mapping table through initial calibration or one-time configuration by the operator.

[0041] The receiving parameters include at least the rotation angle and the orientation of the detection surface. The rotation angle includes 0°, 90°, 180° and 270°, and the orientation of the detection surface includes the front orientation and the back orientation.

[0042] Specifically, the rotation angle is used to indicate the circumferential rotation operation that the robotic arm of the spatial image measurement system needs to perform when picking up the photomask. Since the photomask is square in shape, its value range includes four discrete positions: 0°, 90°, 180° and 270°, which correspond to four standard orientations of the photomask in the plane of the substrate stage.

[0043] The detection face orientation is used to indicate the orientation of the robotic arm when picking up the photomask, including two states: front orientation and back orientation. Front orientation means that the chrome side (i.e., the graphic side) of the photomask is placed downwards, and back orientation means that the chrome side of the photomask is placed upwards.

[0044] By combining the rotation angle and the orientation of the detection surface as described above, the robotic arm of the spatial image measurement system can adapt to any physical posture of the photomask output by different pre-processing machines, ensuring that the robotic arm can accurately pick up the photomask and transport it to the expected target posture on the substrate.

[0045] In one embodiment of the present invention, step S30 may include the following steps.

[0046] Step S310: Determine whether the type of the preceding processing machine exists in the preset parameter mapping table.

[0047] Specifically, an existence check is performed in the preset parameter mapping table to identify whether the receiving parameters corresponding to the preceding processing machine have been pre-entered. If they exist, the corresponding receiving parameters are directly retrieved; otherwise, the process switches to the receiving parameter creation process for that preceding processing machine type. This avoids situations where the robotic arm of the spatial image measurement system cannot be controlled due to missing receiving parameters for that preceding processing machine type.

[0048] Step S320: When the type of the preceding processing machine exists in the preset parameter mapping table, obtain the receiving parameters corresponding to the type of the preceding processing machine from the parameter mapping table and confirm them as the receiving parameters of the photomask to be received.

[0049] Specifically, if the preceding processing machine type is successfully matched in the parameter mapping table, the receiving parameters pre-bound and stored with that preceding processing machine type are directly read from the mapping table. These receiving parameters include the rotation angle and detection surface orientation required by the robotic arm of the spatial image measurement system. Then, these receiving parameters are used as the final execution parameters for this operation, without the need for additional calculations or manual configuration.

[0050] Step S330: Otherwise, based on the pose change of the photomask to be received between the last processing machine and the spatial image measurement system, create the receiving parameters corresponding to the previous processing machine type, and add the mapping relationship between the previous processing machine type and its corresponding receiving parameters to the parameter mapping table.

[0051] Specifically, if the preceding processing machine type cannot be matched in the parameter mapping table, it indicates that the preceding processing machine is a new machine being connected to the production line for the first time, or a machine that has not been previously calibrated in the spatial image measurement system. In this case, the actual pose of the photomask at the output of the last processing machine is obtained through manual assistance or semi-automatic methods, while the expected target pose of the photomask when carried by the spatial image measurement system is obtained. Based on the pose difference between the two, the rotation angle and detection surface orientation required for the robotic arm to adapt to grasping and handling are calculated, thereby creating the receiving parameters corresponding to the preceding processing machine type.

[0052] In one embodiment of the present invention, step S330 may include the following steps.

[0053] Step S331: Obtain the output pose of the photomask to be received on the last processing machine.

[0054] Step S332: Determine the receiving parameters corresponding to the type of preceding processing machine based on the output pose and the expected target pose of the photomask to be received on the spatial image measurement system.

[0055] Step S333: Create a mapping relationship between the type of the preceding processing machine and its corresponding receiving parameters, and add the mapping relationship to the parameter mapping table.

[0056] Specifically, the mapping relationship between the preceding processing machine type and the newly created receiving parameters is added and stored in the parameter mapping table, completing the dynamic expansion of the parameter mapping table. This ensures that when encountering a photomask of the same preceding processing machine type in the future, the matching parameters can be directly read from the mapping table without having to create it again.

[0057] Step S40: Based on the received parameters, control the robotic arm of the spatial image measurement system to adjust the pose of the photomask to be received before moving it.

[0058] Specifically, after receiving the instructions of the receiving parameters, the robotic arm of the spatial image measurement system first performs corresponding rotation calibration on the end effector of the robotic arm according to the rotation angle in the receiving parameters, and at the same time determines whether the robotic arm picks up the photomask in a frontal or back posture according to the orientation of the detection surface in the receiving parameters.

[0059] After completing the above posture adjustment, the robotic arm extends into the photomask transfer box, smoothly picks up the photomask in a manner that adapts to the current actual posture of the photomask, and transports it to the predetermined position on the substrate stage of the spatial image measurement system.

[0060] Because the robotic arm has already adapted its posture to the output characteristics of the preceding machine before performing the handling, no manual flipping or rotation is required during the picking and handling of the photomask, achieving a fully automated photomask loading process. After handling is completed, the robotic arm can automatically reset to its initial standby state to ensure that subsequent work instructions can be received and executed normally, unaffected by this action.

[0061] In one embodiment of the present invention, after step S40, which controls the robotic arm of the spatial image measurement system to adjust the pose of the photomask to be received according to the received parameters and then transports it, the following steps are also included.

[0062] Step S510: Obtain the actual pose of the photomask to be received after transportation, and compare the actual pose with the expected target pose of the photomask to be received on the spatial image measurement system.

[0063] Specifically, after the robotic arm completes the transport, the optical imaging module of the spatial image measurement system acquires the current actual pose of the photomask to be received, and compares the actual pose with the target pose preset by the system to verify the accuracy of the matching of the received parameters and the execution effect of the robotic arm.

[0064] Step S520: When the actual pose is the same as the target pose, the transfer of the photomask to be received is completed.

[0065] Specifically, if the comparison results show that the actual pose is completely consistent with the target pose, it means that the handling operation has achieved the expected results, the handling process has been successfully completed, and the spatial image measurement system continues to perform subsequent measurement operations.

[0066] In one embodiment of the present invention, after the actual pose is the same as the target pose and the transport of the photomask to be received is completed in step S520, the following steps may also be included.

[0067] Step S521: Reset the robotic arm of the spatial image measurement system to the initial waiting position.

[0068] Specifically, after confirming the successful completion of the handling process, a reset command is sent to the robotic arm to control it to return to the pre-set initial waiting position, so as to ensure that the robotic arm does not interfere with the normal operation of subsequent measurement processes and to provide a consistent starting state for the next photomask receiving operation.

[0069] Step S530: Otherwise, based on the actual pose and the target pose, control the robotic arm to adjust the pose of the photomask to be received on the spatial image measurement system until the actual pose of the photomask to be received is the same as the target pose, and update the receiving parameters in the parameter mapping table based on the actual pose and the target pose.

[0070] Specifically, if the comparison results show that the actual pose of the photomask to be received differs from the target pose, it indicates that there is a deviation in the receiving parameters of this matching.

[0071] Based on the deviation between the actual pose and the target pose, the robotic arm needs to perform a secondary pose adjustment on the photomask to be received until the actual pose matches the target pose. Simultaneously, the receiving parameters corresponding to the preceding processing machine type in the parameter mapping table are corrected and updated based on this deviation, ensuring that subsequent photomasks of the same preceding processing machine type can obtain more accurate receiving parameters and preventing the same deviation from recurring.

[0072] In one embodiment of the present invention, step S530 may include the following steps.

[0073] Step S531: Based on the actual pose and the target pose, obtain the deviation parameter between the actual pose and the target pose corresponding to the type of the preceding processing machine.

[0074] Step S532: In the parameter mapping table, based on the deviation parameter, adjust the receiving parameters of the preceding processing machine type to obtain the updated receiving parameters.

[0075] Through the aforementioned feedback correction mechanism, the parameter mapping table can be continuously optimized and improved during use, gradually enhancing the accuracy of parameter matching.

[0076] Please see Figure 2 The present invention proposes a photomask receiving system 100 for a spatial image measurement system, which may include an identifier acquisition module 110, a query module 120, a parameter matching module 130 and a control module 140.

[0077] The identification acquisition module 110 is used to acquire the identification information of the photomask transfer box where the photomask to be received is located.

[0078] The query module 120 is used to query based on the identification information to obtain the type of the pre-processing machine before the photomask to be received enters the spatial image measurement system.

[0079] The parameter matching module 130 is used to obtain the receiving parameters of the photomask to be received based on the type of the preceding processing machine and the preset parameter mapping table; the parameter mapping table represents the mapping relationship between different types of preceding processing machine and the receiving parameters.

[0080] The control module 140 is used to control the robotic arm of the spatial image measurement system to adjust the pose of the photomask to be received before moving it, based on the received parameters.

[0081] Therefore, this embodiment, through the coordinated operation of the identification acquisition module 110, query module 120, parameter matching module 130, and control module 140, can automatically acquire photomask identity information, query the type of preceding processing machine, match the corresponding receiving parameters, and control the robotic arm to complete the photomask pose adjustment and transportation. This transforms the traditionally manual photomask pose adaptation process into a fully automated closed-loop control flow, realizing the fully automated transfer of the photomask from different preceding processing machines to the spatial image measurement system.

[0082] Please see Figure 2 In one embodiment of the present invention, the photomask receiving system 100 may further include a pose detection module 150 and a parameter update module 160.

[0083] The pose detection module 150 is used to acquire the actual pose of the photomask to be received after transportation through the optical imaging module of the spatial image measurement system, and compare the actual pose with the expected target pose of the photomask to be received on the spatial image measurement system.

[0084] The parameter update module 160 is used to update the received parameters in the parameter mapping table according to the actual pose and the target pose when the actual pose is inconsistent with the target pose.

[0085] The control module 140 is also used to control the robotic arm to adjust the pose of the photomask to be received on the spatial image measurement system according to the actual pose and the target pose when the actual pose and the target pose are inconsistent, until the actual pose of the photomask to be received is the same as the target pose.

[0086] Therefore, the pose detection module 150 automatically verifies the actual pose of the photomask after transport and compares it with the target pose. When a deviation is detected, the control module 140 performs a secondary pose adjustment of the photomask to ensure measurement accuracy. Simultaneously, the parameter update module 160 corrects and updates the received parameters in the parameter mapping table based on the deviation between the actual pose and the target pose. Correcting and updating the received parameters corresponding to the previous processing machine type in the parameter mapping table ensures that subsequent photomasks of the same previous processing machine type can obtain more accurate received parameters, preventing the same deviation from recurring.

[0087] In summary, this invention proposes a photomask receiving method and system for a spatial image measurement system. First, by acquiring the identification information of the photomask transport box containing the photomask to be received, the system queries the process data management system in the production line using this identification information. This yields a complete production process path record of the photomask within the transport box, from which the type of the preceding processing machine the photomask passed before entering the current spatial image measurement system is extracted. Second, based on the preceding processing machine type and a preset parameter mapping table, the receiving parameters of the photomask to be received are obtained. Then, based on the matched receiving parameters, a robotic arm is controlled to complete the pose adjustment and transport of the photomask. This invention transforms the traditionally manual photomask pose adaptation process into a fully automated control flow, realizing the fully automated transfer of the photomask from different preceding processing machines to the spatial image measurement system.

[0088] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A photomask receiving method for a spatial image measurement system, characterized in that, include: Obtain the identification information of the photomask transport box where the photomask to be received is located; The type of the pre-processing machine before the photomask to be received enters the spatial image measurement system is obtained by querying the identification information. The receiving parameters of the photomask to be received are obtained according to the type of the preceding processing machine and the preset parameter mapping table; the parameter mapping table represents the mapping relationship between different types of preceding processing machine and receiving parameters. Based on the received parameters, the robotic arm of the spatial image measurement system is controlled to adjust the pose of the photomask to be received before it is moved.

2. The photomask receiving method of the spatial image measurement system according to claim 1, characterized in that, The step of querying based on the identification information to obtain the type of the pre-processing machine before the photomask to be received enters the spatial image measurement system includes: Based on the identification information, a query is performed to obtain all processing machines before the photomask to be received enters the spatial image measurement system, and the total number of processing machines is determined: When the total number of processing machines is only one, the type of that processing machine is identified as the previous processing machine type. Otherwise, the type of the last processing machine will be confirmed as the type of the preceding processing machine.

3. The photomask receiving method of the spatial image measurement system according to claim 2, characterized in that, The step of obtaining the receiving parameters of the photomask to be received based on the type of the preceding processing machine and a preset parameter mapping table includes: Determine whether the type of the preceding processing machine exists in a preset parameter mapping table: When the type of the preceding processing machine exists in a preset parameter mapping table, the receiving parameters corresponding to the type of the preceding processing machine are obtained from the parameter mapping table and confirmed as the receiving parameters of the photomask to be received. Otherwise, based on the pose change of the photomask to be received between the last processing machine and the spatial image measurement system, the receiving parameters corresponding to the preceding processing machine type are created, and the mapping relationship between the preceding processing machine type and its corresponding receiving parameters is added to the parameter mapping table.

4. The photomask receiving method of the spatial image measurement system according to claim 3, characterized in that, Based on the pose change of the photomask to be received between the last processing machine and the spatial image measurement system, receiving parameters corresponding to the preceding processing machine type are created, and the mapping relationship between the preceding processing machine type and its corresponding receiving parameters is added to the parameter mapping table, including: Obtain the output pose of the photomask to be received on the final processing machine; Based on the output pose and the expected target pose of the photomask to be received on the spatial image measurement system, the receiving parameters corresponding to the type of the preceding processing machine are determined; Create a mapping relationship between the preceding processing machine type and its corresponding receiving parameters, and add the mapping relationship to the parameter mapping table.

5. The photomask receiving method of the spatial image measurement system according to claim 1, characterized in that, The receiving parameters include at least a rotation angle and a detection surface orientation. The rotation angle includes 0°, 90°, 180°, and 270°, and the detection surface orientation includes a front orientation and a back orientation.

6. The photomask receiving method of the spatial image measurement system according to claim 1, characterized in that, After adjusting the pose of the photomask to be received by the robotic arm of the spatial image measurement system according to the received parameters before transporting it, the method further includes: Obtain the actual pose of the photomask to be received after transportation, and compare the actual pose with the expected target pose of the photomask to be received on the spatial image measurement system: When the actual pose is the same as the target pose, the transfer of the photomask to be received is completed; Otherwise, based on the actual pose and the target pose, the robotic arm is controlled to adjust the pose of the photomask to be received on the spatial image measurement system until the actual pose of the photomask to be received is the same as the target pose, and the receiving parameters in the parameter mapping table are updated based on the actual pose and the target pose.

7. The photomask receiving method of the spatial image measurement system according to claim 6, characterized in that, The step of updating the received parameters in the parameter mapping table based on the actual pose and the target pose includes: Based on the actual pose and the target pose, the deviation parameter between the actual pose and the target pose corresponding to the type of the preceding processing machine is obtained; In the parameter mapping table, the receiving parameters of the preceding processing machine type are adjusted based on the deviation parameters to obtain the updated receiving parameters.

8. The photomask receiving method of the spatial image measurement system according to claim 6, characterized in that, When the actual pose is the same as the target pose, after completing the transfer of the photomask to be received, the method further includes: The robotic arm of the spatial image measurement system is controlled to reset to the initial waiting position.

9. A photomask receiving system for a spatial image measurement system, characterized in that, include: The identifier acquisition module is used to acquire the identifier information of the photomask delivery box where the photomask to be received is located; The query module is used to query based on the identification information to obtain the type of the pre-processing machine before the photomask to be received enters the spatial image measurement system; The parameter matching module is used to obtain the receiving parameters of the photomask to be received according to the type of the preceding processing machine and a preset parameter mapping table; the parameter mapping table represents the mapping relationship between different types of preceding processing machine and receiving parameters. The control module is used to control the robotic arm of the spatial image measurement system to adjust the pose of the photomask to be received before transporting it, based on the received parameters.

10. The photomask receiving system of the spatial image measurement system according to claim 9, characterized in that, Also includes: The pose detection module is used to obtain the actual pose of the photomask to be received after transportation through the optical imaging module of the spatial image measurement system, and compare the actual pose with the expected target pose of the photomask to be received on the spatial image measurement system. The parameter update module is used to update the received parameters in the parameter mapping table according to the actual pose and the target pose when the actual pose is inconsistent with the target pose. The control module is also used to control the robotic arm to adjust the pose of the photomask to be received on the spatial image measurement system according to the actual pose and the target pose when the actual pose is inconsistent with the target pose, until the actual pose of the photomask to be received is the same as the target pose.

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