Galvanometer design method and device, electronic equipment and storage medium

Abstract

This application provides a galvanometer design method, apparatus, electronic device, and storage medium. The method includes: acquiring the design parameters of the galvanometer; determining the rotational inertia of the fast axis and the slow axis based on the inertia parameter sets of the fast axis rotating component and the slow axis rotating component, respectively; determining the torsional stiffness of the fast axis and the slow axis based on the hinge parameter sets of the fast axis flexible hinge and the slow axis flexible hinge, respectively, using pre-set general flexible beam models of the fast axis and the slow axis; establishing a theoretical kinematic model of the galvanometer based on the rotational inertia of the fast axis, the torsional stiffness of the fast axis, the rotational inertia of the slow axis, and the torsional stiffness of the slow axis, and predicting the estimated natural frequencies of the fast axis and the slow axis using the theoretical kinematic model; comparing the estimated natural frequencies of the fast axis and the slow axis with preset target frequency conditions, and optimizing the design parameters based on the comparison results.

Description

Technical Field

[0001] This application relates to the field of galvanometer design technology, and in particular to a galvanometer design method, apparatus, electronic device and storage medium. Background Technology

[0002] A galvanometer is an optical device used to achieve high-speed, precise deflection control of a laser beam. The dynamic performance of the galvanometer directly affects the beam's positioning accuracy, scanning speed, and stability. The natural frequencies of the galvanometer's fast and slow axes are key design parameters that determine its operating bandwidth and dynamic response.

[0003] In related technologies, the mechanical structure design of galvanometers, especially the design of flexible hinges (used to achieve minute elastic deflection of the lens) and rotating components, relies on simulation software based on finite element analysis. The design process typically involves: establishing a parametric 3D model, performing modal and dynamic simulations using finite element software, and repeatedly adjusting the model's dimensional parameters based on the simulation results to approximate the target performance indicators.

[0004] However, the limitations of the above simulation methods are that finite element simulation consumes a lot of computational resources and takes a long time to solve each time, resulting in a long design iteration cycle. Moreover, when designers adjust the structural parameters of the galvanometer, the lack of a direct and clear quantitative relationship between the structural parameters and the galvanometer performance (such as natural frequency) makes the design process highly empirical and trial-and-error, making it difficult to achieve efficient, predictable, and accurate design. Summary of the Invention

[0005] In view of this, this application provides a galvanometer design method, device, storage medium and electronic device, which realizes rapid prediction of the natural frequency of the galvanometer and adjustment of structural parameters, thereby improving the design efficiency and performance reliability of the galvanometer.

[0006] In a first aspect, embodiments of this application provide a galvanometer design method, the method comprising: obtaining design parameters of the galvanometer, the design parameters including: a set of inertia parameters for a fast-axis rotating component and a slow-axis rotating component, and a set of hinge parameters for a fast-axis flexible hinge and a slow-axis flexible hinge; determining the rotational inertia of the fast axis and the slow axis based on the set of inertia parameters of the fast-axis rotating component and the set of inertia parameters of the slow-axis rotating component, respectively; determining the torsional stiffness of the fast axis and the slow axis based on the set of hinge parameters of the fast-axis flexible hinge and the set of hinge parameters of the slow-axis flexible hinge, respectively, using a pre-set general flexible beam model for the fast axis and a general flexible quantity model for the slow axis; establishing a theoretical kinematic model of the galvanometer based on the rotational inertia of the fast axis, the torsional stiffness of the fast axis, the rotational inertia of the slow axis, and the torsional stiffness of the slow axis, and predicting the estimated natural frequency of the fast axis and the estimated natural frequency of the slow axis through the theoretical kinematic model; comparing the estimated natural frequency of the fast axis and the estimated natural frequency of the slow axis with preset target frequency conditions, respectively, and optimizing the design parameters based on the comparison results.

[0007] Secondly, embodiments of this application provide a galvanometer design device, comprising: an acquisition module for acquiring design parameters of the galvanometer, the design parameters including: a set of inertia parameters for a fast-axis rotating component and a slow-axis rotating component, and a set of hinge parameters for a fast-axis flexible hinge and a slow-axis flexible hinge; and an analysis module for determining the rotational inertia of the fast-axis and the slow-axis based on the set of inertia parameters of the fast-axis rotating component and the set of inertia parameters of the slow-axis rotating component, respectively; the analysis module is further configured to determine the rotational inertia of the fast-axis and the slow-axis based on the set of hinge parameters of the fast-axis flexible hinge and the set of hinge parameters of the slow-axis flexible hinge. The analysis module determines the torsional stiffness of the fast axis and the slow axis using a pre-set universal flexible beam model for the fast axis and a universal flexible beam model for the slow axis. The analysis module is further used to establish a theoretical kinematic model of the galvanometer based on the fast axis moment of inertia, fast axis torsional stiffness, slow axis moment of inertia, and slow axis torsional stiffness, and to predict the estimated natural frequencies of the fast and slow axes using the theoretical kinematic model. The feedback module compares the estimated natural frequencies of the fast and slow axes with preset target frequency conditions, and optimizes the design parameters based on the comparison results.

[0008] Thirdly, embodiments of this application provide an electronic device including a processor and a memory, the memory storing a program or instructions that can run on the processor, the program or instructions implementing the steps of the method as described in the first aspect when executed by the processor.

[0009] Fourthly, embodiments of this application provide a readable storage medium on which a program or instructions are stored, which, when executed by a processor, implement the steps of the method as described in the first aspect.

[0010] Fifthly, embodiments of this application provide a chip including a processor and a communication interface, the communication interface being coupled to the processor, the processor being used to run programs or instructions to implement the method as described in the first aspect.

[0011] In a sixth aspect, embodiments of this application provide a computer program product stored in a storage medium, which is executed by at least one processor to implement the method as described in the first aspect.

[0012] This application provides a fully parameterized galvanometer design method. It obtains the inertia parameters of the fast-axis and slow-axis rotating components of the galvanometer, as well as the hinge parameters of the fast-axis and slow-axis flexible hinges. The rotational inertia of each axis is calculated based on rigid body mechanics formulas, and the torsional stiffness of each axis is calculated based on a general flexible beam model. Based on this, the estimated natural frequencies of the fast-axis and slow-axis rotating components are predicted. By comparing the estimated natural frequencies with preset target frequency conditions, the relevant design parameters of the fast-axis and / or slow-axis rotating components can be adjusted and optimized. The galvanometer design method provided in this application reduces reliance on finite element simulation and trial-and-error experience, helping to achieve the design goals of galvanometer dynamic performance more efficiently and accurately in the early stages of galvanometer design.

[0013] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0014] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 A flowchart illustrating a galvanometer design method according to an embodiment of this application is shown; Figure 2 This illustration shows a schematic diagram of the state of a galvanometer used for scanning detection in a galvanometer design method according to an embodiment of this application; Figure 3 This illustration shows a schematic diagram of the structure of a galvanometer in a galvanometer design method according to an embodiment of this application; Figure 4 This paper shows a schematic diagram of the structure for removing a lens in a galvanometer design method according to an embodiment of this application. Figure 5 This paper shows a schematic diagram of the fast-axis rotation assembly of a galvanometer in a galvanometer design method according to an embodiment of this application. Figure 6This paper shows a schematic diagram of the slow-axis rotation assembly of a galvanometer in a galvanometer design method according to an embodiment of this application. Figure 7 A schematic diagram of the flexible hinge structure of a galvanometer in a galvanometer design method according to an embodiment of this application is shown. Figure 8 A structural block diagram of a galvanometer design device according to an embodiment of this application is shown; Figure 9 A structural block diagram of an electronic device according to an embodiment of this application is shown. Detailed Implementation

[0015] The technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0016] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0017] The galvanometer design method provided in this application will be described in detail below with reference to the accompanying drawings and through specific embodiments and application scenarios. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0018] As semiconductor manufacturing processes advance to the nanometer scale, the sensitivity requirements for wafer defect detection are becoming increasingly stringent. In such detection devices, a laser is typically used to illuminate the wafer surface, identifying defects by capturing the difference in reflected or scattered light between defective and normal areas. The reliability of the wafer defect detection results depends on whether the laser beam can stably and accurately illuminate the predetermined location.

[0019] In the detection device, a galvanometer controls the laser beam direction. By rapidly and minutely oscillating its mirror surface, it adjusts the laser beam direction in real time to ensure that the light spot always falls precisely on the tiny area to be detected. If the dynamic performance of the galvanometer itself is not good enough, the beam will deviate, resulting in a deteriorated detection signal and positioning errors.

[0020] Currently, the key mechanical components of galvanometers (mainly the flexible hinges and rotating parts that provide elastic support) are designed primarily through computer simulation. Designers first create a three-dimensional model, then use finite element software to simulate the vibration of the galvanometer to check if its natural frequency and other indicators meet the requirements. Based on the results, they repeatedly modify the structural dimensions of the galvanometer until the requirements are met.

[0021] However, simulation calculations are inefficient, prolonging the design cycle. When designers adjust the structural parameters of the galvanometer, the lack of a direct and clear quantitative relationship between the structural parameters and the galvanometer performance (such as the natural frequency) makes the design process highly empirical and trial-and-error-based, making it difficult to achieve efficient, predictable, and accurate design. All of these problems limit the development speed and final performance improvement of high-performance galvanometers, especially those used in high-precision applications such as semiconductor wafer inspection.

[0022] Based on this, this application provides a galvanometer design method, device, storage medium, and electronic device, which realizes rapid prediction of the natural frequency of the galvanometer and adjustment of structural parameters, thereby improving the design efficiency and performance reliability of the galvanometer.

[0023] like Figure 1 As shown, this application provides a galvanometer design method to improve galvanometer design efficiency and performance reliability.

[0024] like Figure 2 As shown, galvanometer 100 refers to a moving component used in precision optical inspection devices such as laser scanning. The galvanometer is connected via a fast axis (e.g., Figure 3 The Y-axis in the high-frequency scanning axis, and the slow axis (such as...) Figure 3 The X-axis in the laser beam is rotated in a low-frequency scanning direction to achieve high-speed, high-precision two-dimensional deflection control of the laser beam.

[0025] The performance of a galvanometer, especially its scanning frequency, accuracy, and stability, depends on the design of its mechanical structure. Specifically, the moments of inertia of the fast and slow axes determine their angular acceleration and dynamic response speed under a given driving torque; while the moments of inertia and torsional stiffness together determine the natural frequencies of each axis of the galvanometer. If the natural frequencies are too low, the galvanometer response will be sluggish, making high-speed scanning difficult; if the natural frequencies of each axis are not properly matched, it can easily lead to distortion of the laser scanning trajectory. Therefore, accurately predicting and optimizing the natural frequencies of the fast and slow axes during the design phase is crucial to ensuring high-precision and high-stability laser control of the galvanometer.

[0026] like Figure 1 As shown, the galvanometer design method provided in this application includes: Step 101: Obtain the design parameters of the galvanometer.

[0027] The design parameters include: the inertia parameter sets for the fast-axis and slow-axis rotating components, and the hinge parameter sets for the fast-axis and slow-axis flexible hinges. These two sets of parameters provide a foundation for subsequently establishing a theoretical kinematic model.

[0028] Design parameters can be obtained through the design input interface, parametric model interface, or by importing existing design files.

[0029] like Figures 3 to 6 As shown, the galvanometer 100 has a single-lens nested structure, including a fast-axis rotation assembly 1 and a slow-axis rotation assembly 2. The fast-axis rotation assembly refers to a collection of structural components fixed to the lens 101 and driving the lens to perform high-frequency scanning around the fast axis Y. In addition to the lens 101, the fast-axis rotation assembly 1 also includes an annular reinforcing rib 12 or a rectangular reinforcing rib 13 and a rectangular connector 14 fixed to the back of the lens 101. The slow-axis rotation assembly 2 refers to a collection of structural components that support the fast-axis rotation assembly 1 and drive the fast-axis rotation assembly 1 to jointly scan around the slow axis X. Specifically, in addition to the fast-axis rotation assembly 1, the slow-axis rotation assembly 2 may also include a slow-axis annular frame 21 that forms the slow-axis support ring surface.

[0030] like Figure 3 and 4 As shown, the galvanometer 100 also includes a fast-axis fixing plate 4 and a slow-axis fixing plate 3. The fast-axis fixing plate 4 is connected to the slow-axis rotating assembly 2 and is used to fix the static rigid mounting structure at one end of the fast-axis flexible hinge. The fast-axis fixing plate 3 does not participate in the rotation of the fast-axis rotating assembly 1. The slow-axis fixing plate 3 is connected to the external base and is used to fix the static rigid mounting structure at one end of the slow-axis flexible hinge. The slow-axis fixing plate 3 also integrates a drive coil and serves as the mounting reference for the entire galvanometer.

[0031] A fast-axis flexible hinge refers to an elastic component that connects the fast-axis rotating assembly and the slow-axis rotating assembly, providing rotational freedom for the fast-axis and determining its torsional stiffness. A slow-axis flexible hinge refers to an elastic component that connects the slow-axis rotating assembly and the slow-axis fixed plate, providing rotational freedom for the slow-axis.

[0032] The inertia parameter set is a collection of geometric and physical parameters used to calculate the rotational inertia of the fast-axis and slow-axis rotating components about their respective axes. For the fast-axis rotating component, its inertia parameters may include: the mass and radius of the lens; the mass, inner and outer radii of the annular reinforcing ribs; and the mass, length, and width of the rectangular connectors and rectangular reinforcing ribs. Since the slow-axis rotating component supports the fast-axis rotating component, its inertia parameter set includes all the inertia parameters of the fast-axis rotating component, as well as the mass, radius, and angular displacement of the slow-axis structure itself (such as the local arc / rectangular body of the slow-axis annular frame).

[0033] The hinge parameter set is a collection of material and shape parameters required to calculate the torsional stiffness of fast-axis and slow-axis flexible hinges using a pre-established general flexible beam model. For fast-axis flexible hinges (e.g., simple straight beam structures), the hinge parameter set includes shape parameters describing their geometry, such as the length, width, and thickness of the straight beam, and material parameters describing their mechanical properties, such as the elastic modulus and shear modulus. For slow-axis flexible hinges (e.g., composite structures composed of straight beam segments and arc-shaped segments), the hinge parameter set also includes shape and material parameters. Since the shape parameters of slow-axis flexible hinges are more complex, they can include the dimensions of the straight beam and arc-shaped segments, such as the length, thickness (including the start and end thicknesses at variable cross-sections), radius, and width of each segment. The material parameters of slow-axis flexible hinges also include the elastic modulus and shear modulus.

[0034] By obtaining the design parameters of the galvanometer, complete input parameters are provided for calculating the rotational inertia and torsional stiffness of the galvanometer based on theoretical formulas (rather than finite element simulation) in subsequent steps.

[0035] In some embodiments, step 101 above: obtaining the design parameters of the galvanometer, may include steps 1011 to 1013: Step 1011: Decompose the fast axis rotation assembly into multiple first geometric bodies according to the geometric contour.

[0036] Geometric profile decomposition refers to breaking down the fast-axis rotating component into multiple standard geometric bodies with regular shapes that facilitate the calculation of rotational inertia, based on its actual shape. In other words, the first geometric body can be a standard geometric body.

[0037] For example, such as Figure 5 (a) and Figure 5 As shown in (b), the fast-axis rotating assembly 1 can be decomposed according to its geometric contour into: a disk 11 representing the lens itself, an annular body 12 representing the annular reinforcing rib on the back of the lens, a rectangular body 13 representing the reinforcing rib, and a rectangular body 14 representing the connector. This decomposition method can transform the complex actual structure of the fast-axis rotating assembly 1 into an independent unit that is easy to calculate the moment of inertia.

[0038] It should be understood that the above decomposition method is merely an example and is not intended to limit the embodiments of this application. In practical applications, the fast-axis rotating component can be decomposed into more numbers or other types of basic geometric shapes, depending on its specific structure, as long as they can reflect the mass distribution of the fast-axis rotating component.

[0039] Step 1012: Decompose the slow axis rotation assembly into multiple second geometric bodies according to the geometric contour.

[0040] Similar to the decomposition of the fast-axis rotating component based on its geometric contour, but since the slow-axis rotating component supports the fast-axis rotating component, the "decomposition" here refers to two parts: First, the supporting structure of the slow-axis rotating component itself (such as the slow-axis annular frame) is decomposed; second, the fast-axis rotating component (which itself has been decomposed into multiple first geometric bodies) is treated as a whole and does not need to be decomposed again. Therefore, the multiple second geometric bodies obtained from the decomposition include two parts: the first part is all the first geometric bodies obtained from the decomposition of the fast-axis rotating component; the second part is the geometric bodies obtained from the decomposition of the slow-axis rotating component's own structure, such as the arc 211 and rectangular body 212 that constitute the slow-axis annular frame 21.

[0041] All first and second geometric shapes are selected from predefined basic geometric shapes, which include at least one of the following: disk, toroidal, rectangular, and arc. These basic geometric shapes are a predefined set of standard "building blocks." Decomposing the actual complex mechanical structure into combinations of these standard geometric shapes is to transform the irregular, continuous mass distribution into a finite set of discrete geometric units with geometric definitions, in order to subsequently obtain the set parameters and mass parameters of each geometric shape.

[0042] Step 1013: Obtain the geometric parameters and mass parameters of multiple first and second geometric bodies to obtain the inertia parameter set.

[0043] After completing the geometric decomposition, the geometric and mass parameters of each geometric body need to be extracted for calculating the moment of inertia of the fast-axis and slow-axis rotating components. Geometric parameters refer to the variables of the geometric body's shape and size. For example, for a disk, the radius of the disk needs to be obtained; for a ring, the inner and outer radii of the ring need to be obtained; for a rectangle, the length and width of the rectangle need to be obtained; and for an arc, the radius and angle of the arc need to be obtained. Mass parameters mainly refer to the mass of the geometric body. These parameters can be calculated by associating material properties (density) with geometric volume. Receiving and collecting these two types of parameters from all the first and second geometric bodies constitutes the set of inertia parameters for the galvanometer design method of this application embodiment.

[0044] Step 102: Determine the rotational inertia of the fast axis and the slow axis based on the inertia parameter sets of the fast axis rotating component and the slow axis rotating component, respectively.

[0045] Moment of inertia is a physical quantity that measures the magnitude of an object's inertia when rotating about a specific axis. The moments of inertia of the fast-axis and slow-axis rotating components of a galvanometer will affect the galvanometer's natural frequency and dynamic response. This application achieves an efficient and accurate parametric solution for the moment of inertia by calculating the moment of inertia of individual geometric bodies, instead of the complex integral or finite element simulation of the overall structure of the fast-axis and slow-axis rotating components.

[0046] In some embodiments, step 102: determining the rotational inertia of the fast axis and the rotational inertia of the slow axis based on the inertia parameter set of the fast axis rotating component and the inertia parameter set of the slow axis rotating component, respectively, may include steps 1021 and 1022: Step 1021: Based on the geometric parameters and mass parameters of the first geometric body, calculate the first moment of inertia of the first geometric body about the fast axis, sum the multiple first moments of inertia, and obtain the moment of inertia of the fast axis.

[0047] For each first geometric body, the first moment of inertia of these first geometric bodies can be determined by calling the corresponding formula for calculating the moment of inertia. The formula for calculating the moment of inertia is the standard formula for rigid body dynamics, which calculates the first moment of inertia of the first geometric body rotating about the fast axis.

[0048] For example, for a disc-shaped lens, the moment of inertia of the disc-shaped lens rotating relative to the fast axis is calculated using the following formula: ; in, Let be the moment of inertia of the disc-shaped mirror. Let be the radius of the disc-shaped lens. This refers to the mass of the disc-shaped lens.

[0049] For example, the moment of inertia of the ring body rotating relative to the fast axis is calculated using the following formula for the stiffeners or connectors of the ring body: ; in, Let be the moment of inertia of the toroidal body. The inner radius of the toroidal body is . The outer radius of the toroidal body is... Let be the mass of the toroidal body.

[0050] For example, for a rectangular stiffener or connector, the moment of inertia of the rectangular body rotating relative to the fast axis is calculated using the following formula: ; in, Let be the moment of inertia of the rectangular solid. The length of the rectangle The width of the rectangle Let be the mass of the rectangle.

[0051] Finally, the first moments of inertia of all the first geometric bodies are algebraically summed to obtain the fast-axis moment of inertia of the fast-axis rotating assembly. .

[0052] ; in, This refers to calculating the moment of inertia of a fast-axis rotating component (a complex-shaped component) about the Y-axis (i.e., the fast axis). Specifically, it involves calculating the square of the distance y² from each tiny area element of the fast-axis rotating component to the Y-axis, and then summing the areas. This process is extremely complex and difficult to apply directly to the structural design of galvanometers. The specific calculation method adopted in this application embodiment to solve this problem is to decompose the complex fast-axis rotating component into several basic first geometric bodies with regular shapes and simple rotational inertia formulas. The rotational inertia of each body is calculated separately and then added together to obtain the overall rotational inertia of the fast-axis rotating component.

[0053] Step 1022: Based on the second geometric parameters and mass parameters, calculate the second moment of inertia of the second geometric body about the slow axis, sum the multiple second moments of inertia, and obtain the moment of inertia of the slow axis.

[0054] As mentioned earlier, the multiple second geometries obtained from the decomposition of the slow-axis rotating component consist of two parts: the first part is all the first geometries obtained from the decomposition of the fast-axis rotating component; the second part is the geometries obtained from the decomposition of the slow-axis rotating component's own structure, such as the arc and rectangular bodies that constitute the slow-axis annular frame. The decomposition of the fast-axis rotating component and the calculation of the obtained geometries will not be elaborated here.

[0055] For example, for such Figure 6 The moment of inertia of the arc-shaped body 211 shown is calculated relative to the slow axis using the following formula: ; in, Let be the moment of inertia of the curved body. The radius of the arc-shaped body The angle corresponding to the arc shape. Let be the mass of the arc-shaped body.

[0056] For example, for a rectangular body within a slow-axis annular frame, the moment of inertia of the rectangular body relative to the slow axis is calculated using the following formula: ; in, Let be the moment of inertia of the rectangular solid. The length of the rectangle The width of the rectangle Let be the mass of the rectangle.

[0057] ; Finally, calculate the moment of inertia of all fast axes. and and By performing algebraic summation, the slow-axis rotational inertia of the slow-axis rotating component can be obtained. .

[0058] It should be noted that the above calculation process illustrates a disk, a toroidal body, and a rectangular body, merely as examples to clearly explain the principle. In actual galvanometer structures, the slow-axis rotating component and the fast-axis rotating component it supports may be decomposed into a greater number of basic geometric shapes (e.g., multiple toroidal bodies, multiple rectangular bodies). In this case, the calculation principle remains unchanged: slow-axis moment of inertia. It equals the sum of the moments of inertia of all the decomposed second geometric bodies about the slow axis.

[0059] In some embodiments, step 101: obtaining the design parameters of the galvanometer, further includes step 1014: Step 1014: Obtain shape parameters for indicating the geometric profiles of the fast-axis flexible hinge and the slow-axis flexible hinge, and material parameters for indicating the mechanical properties of the fast-axis flexible hinge and the slow-axis flexible hinge, to obtain a set of hinge parameters for the fast-axis flexible hinge.

[0060] A flexible hinge is an elastic support component that uses the elastic deformation of the material itself to provide single-degree-of-freedom rotational motion. Fast-axis flexible hinges and slow-axis flexible hinges are the same in function and principle, but their specific geometric dimensions (shape parameters) may differ because they bear different loads, require different rotation angles and frequencies.

[0061] Shape parameters mainly refer to the cross-sectional shape and size of the region in a flexible hinge where concentrated elastic deformation occurs. This region is the key part that determines the performance of the flexible hinge. Shape parameters include: contour parameters indicating the profile of the curved segment of the flexible hinge, thickness parameters indicating the thickness of the flexible hinge, width parameters indicating the width of the side of the flexible hinge, and length parameters indicating the overall length of the flexible hinge and the length of each segment.

[0062] Material parameters characterize the elastic mechanical properties of the materials constituting a flexible hinge. These parameters include the elastic modulus E and the shear modulus G. The elastic modulus represents the stress required to produce a unit strain when a material is subjected to tensile or compressive stress; its value affects the amount of deformation of the flexible hinge under stress. The shear modulus represents the material's resistance to shear deformation.

[0063] In one possible embodiment, this application example is illustrated as a flexible hinge serving as a fast axis. The fast axis flexible hinge may include an arc-shaped beam and a straight beam segment. In this embodiment, the shape parameters of the fast axis flexible hinge (such as...) Figure 7 (As shown) may include: the major axis radius *a*, minor axis radius *b*, thickness *t* at the thinnest point of the flexible hinge, side width *w*, total length *L*, and length of the straight beam segment. These parameters determine the flexibility (i.e., the reciprocal of the stiffness) of the fast-axis flexible hinge, thus playing a decisive role in the motion accuracy and load-bearing capacity of the galvanometer.

[0064] Among them, the contour parameters used to indicate the profile of the curved segment of the flexible hinge, namely the major axis radius a and minor axis radius b of the elliptical arc in the region where the curved beam is located; the thickness parameters used to indicate the thinnest dimension of the flexible hinge, namely the thickness t at the thinnest point; the width parameters used to indicate the width of the cross-section of the flexible hinge, namely the side width w; and the length parameters used to indicate the dimensions of the flexible hinge as a whole and its segments, namely the total length L and the length of the straight beam segment. .

[0065] For example, such as Figure 7 As shown, the curved beams of the fast-axis flexible hinge are located at both ends of the flexible hinge, with a straight beam segment in between the two curved beams. The curved beams include the elliptical arcs mentioned in the shape parameters above. The horizontal length of the straight beam segment is... .in, c represents the horizontal distance from the left end of the elliptical arc of the flexible hinge to the end point of the left elliptical arc (i.e., the starting point of the straight beam segment), which is also the projected length of the elliptical arc on the major axis.

[0066] In another possible embodiment, the embodiments of this application are illustrated by way of example as a flexible hinge acting as a slow axis. For example... Figure 3 As shown, the slow-axis flexible hinge 5 can be decomposed into two linear variable cross-section straight beams 51 and a middle circular arc beam 52.

[0067] The geometric parameters of the slow-axis flexible hinge can be obtained from the parameter set (a, b, t, ...). L) is characterized. Wherein, is... The length of a variable cross-section straight beam with a flexible hinge. Let t be the thickness at the beam end, t be the thickness at the thinnest point of the circular arc beam, and a and b be the radii of the major and minor axes of the elliptical arc of the circular arc beam, respectively. Let θ be the parameter angle of the circular arc beam, and L be the total length of the slow-axis flexible hinge.

[0068] Among them, the contour parameters used to indicate the profile of the curved segment of the flexible hinge are the major axis radius *a* and the minor axis radius *b* of the circular arc beam; the thickness parameters used to indicate the thinnest dimension of the flexible hinge are the thinnest thickness *t* of the circular arc beam and the thickness at the end of the variable cross-section beam. ; the width parameter used to indicate the cross-sectional width of the flexible hinge, i.e., the side width w; and the length parameter used to indicate the overall dimensions of the flexible hinge and the dimensions of each segment, i.e., the length of the variable cross-section straight beam segment. Total length L and arc angle parameters .

[0069] Step 103: Based on the hinge parameter sets of the fast-axis flexible hinge and the slow-axis flexible hinge, respectively, determine the torsional stiffness of the fast-axis and the torsional stiffness of the slow-axis using the pre-set general flexible beam model of the fast-axis and the general quantity model of the slow-axis.

[0070] Torsional stiffness is used to indicate the ability of a flexible hinge to resist torsional deformation. The torsional stiffness of the flexible hinge affects the natural frequency of the galvanometer. The galvanometer design method provided in this application no longer uses the traditional finite element simulation method, but uses a general flexible beam model to perform planned calculations of the torsional stiffness of the flexible hinge on the fast and slow axes, thereby achieving a highly efficient parametric solution.

[0071] The general flexible beam model is a parametric theoretical calculation model. It is not a simple black box, but rather an analytical mathematical relationship between the shape parameters of a flexible hinge and its stress deformation (flexibility) established in advance based on the theory of elasticity.

[0072] In some embodiments, step 103: Based on the hinge parameter set of the fast-axis flexible hinge and the hinge parameter set of the slow-axis flexible hinge, the torsional stiffness of the fast-axis and the torsional stiffness of the slow-axis are determined by a pre-set general flexible beam model of the fast-axis and a general quantity model of the slow-axis, respectively, including steps 1031 to 1034: Step 1031: Input the shape and material parameters of the fast axis rotating component and the slow axis rotating component into the fast axis general flexible beam model and the slow axis general quantity model, respectively, to obtain the flexibility matrices of the fast axis flexible hinge and the slow axis flexible hinge.

[0073] For fast-axis flexible hinges, the complete set of hinge parameters (i.e., shape parameters a, b, t, w, L, ...) is used. The material parameters (E and G) are used as inputs and substituted into the fast-axis general flexible beam model.

[0074] The fast-axis general flexible beam model has a pre-set set of parameterized equations derived from the theory of elasticity. The general flexible beam model can handle a variety of structures, including simple straight beams and composite beams including straight beam segments and curved beams.

[0075] The curve equation describing the geometric profile of the centerline of the fast-axis flexible hinge is as follows:

[0076] in, This represents the horizontal coordinate along the length of the flexible hinge. The origin (0) is set at the leftmost point of the flexible hinge. The projected length of the elliptical arc , Let be the parameter angle of the arc segment, and c can be used as an intermediate variable.

[0077] The equation describing the beam thickness variation of the fast-axis flexible hinge: ; in, This represents the thickness of the flexible hinge at the horizontal coordinate x and the flexible hinge in the vertical direction.

[0078] Calculate the compliance matrix The specific formulas for each component are as follows: (e.g.) , , , , These formulas are the shape parameters a, b, t, w, L and the material parameters E, G, as well as the internal calculation parameters derived from the shape parameters (such as s=b / t). A function of (N1, N2, ...).

[0079] These equations are calculated based on the input shape parameters. Through corresponding integral operations, the fast-axis compliance matrices characterizing the fast-axis flexible hinge and its deformation response under force / torque are finally output. .

[0080]

[0081] Each variable has its own specific calculation formula, for example: ; ;

[0082] ; in: ; ;

[0083]

[0084] Where ρ is the shear shape factor. ; .

[0085] The geometric parameters of the fast-axis flexible hinge are input into the slow-axis universal flexible beam model. The output of the slow-axis universal flexible beam model is a compliance matrix characterizing the fast-axis flexible hinge. .

[0086] For a slow-axis flexible hinge, the complete set of hinge parameters (a, b, t, ...) for the slow-axis flexible hinge will be... The material parameters E and G are used as inputs and substituted into the slow-axis general flexible beam model.

[0087] The equation for the curve of the geometric profile of the centerline of the slow-axis flexible hinge is: ; The equation describing the beam thickness variation of a slow-axis flexible hinge:

[0088] The specific steps for constructing the parameterized equations, calculating the flexibility matrix, and extracting the stiffness are the same as those for the implementation of the fast-axis flexible hinge described above, and will not be repeated here.

[0089] The geometric parameters of the slow-axis flexible hinge are input into the slow-axis general flexible beam model. The output of the general flexible beam model is a compliance matrix characterizing the slow-axis flexible hinge. .

[0090] Step 1032: Perform inverse operations on the flexibility matrices of the fast-axis flexible hinge and the slow-axis flexible hinge respectively to obtain the stiffness matrices of the fast-axis flexible hinge and the slow-axis flexible hinge.

[0091] Obtain the compliance matrix of the fast-axis flexible hinge. Then, regarding the flexibility matrix Perform matrix inversion operation: ; This yields the stiffness matrix of the fast-axis flexible hinge. Similarly, the stiffness matrix of the slow-axis flexible hinge is obtained. .

[0092] Step 1033: Extract the stiffness component indicating torsion around the fast axis from the stiffness matrix of the fast axis flexible hinge, and use it as the torsional stiffness of the fast axis.

[0093] Stiffness matrix of fast-axis flexible hinge This contains stiffness information of the fast-axis flexible hinge under various possible forces and moments, corresponding to different displacements and rotation angles. Among these, the matrix components directly related to the rotation of the fast axis describe the proportional relationship between the torsional moment about its fast axis and the torsional angle produced by the fast axis. From the stiffness matrix of the fast-axis flexible hinge... The matrix components were located and extracted, and defined as the fast-axis torsional stiffness. .

[0094] Step 1034: Extract the stiffness component indicating torsion about the slow axis from the stiffness matrix of the slow axis flexible hinge, and use it as the slow axis torsional stiffness.

[0095] Similar to step 1033, from the stiffness matrix of the slow-axis flexible hinge Mid-position and extraction of slow-axis torsional stiffness .

[0096] In some embodiments, the general flexible beam model is constructed in the following manner: Step 301: Based on the shape parameters of the flexible hinge, establish a general parametric equation for the geometric profile of the flexible hinge.

[0097] The generalized parametric equations for the fast axis, which are established from the shape parameters regarding the geometric profile of the flexible hinge, include: The curve equation describing the geometric profile of the flexible hinge, which indicates the x-coordinate and angular parameters of the centerline of the flexible hinge along its length. Relationship:

[0098] An equation describing the change in beam thickness of a flexible hinge, used to describe the thickness h(x) of the flexible hinge at different positions x along the centerline:

[0099] The above equations have been described in detail in step 1031, as have the parameterized equations for the general quantity model of the slow-axis flexible hinge, which have been introduced above and will not be repeated here.

[0100] Step 302: Based on the generalized parametric equation, and combined with the elastic modulus and shear modulus of the flexible hinge, a generalized compliance matrix expression characterizing the force-displacement relationship of the flexible hinge is obtained.

[0101] Based on the geometric equations and the theory of elasticity, the mechanical response model of the flexible hinge is derived. Specifically, taking the establishment of the compliance matrix expression of the fast axis as an example, the geometric equations, material parameters (elastic modulus E, shear modulus G), and cross-sectional properties (width w) established in step 301 are used as inputs. Through integral mathematics, the generalized forces (including axial forces) borne at the endpoints are solved. Shear force and torque When this occurs, the generalized displacement (including axial displacement) is generated. Lateral displacement and corner The expression.

[0102] The derived result is expressed as a generalized compliance matrix expression. This compliance matrix expression establishes the endpoint displacement vectors and axial displacements of the flexible hinge. Lateral displacement and corner With the endpoint force vector (including axial force) Shear force and torque A linear relationship between ( ).

[0103] The specific form of the flexibility matrix C is:

[0104] in, Corresponding to , Corresponding to , Corresponding to Specifically, step 1031 has already been described in detail, so it will not be repeated here.

[0105] Step 303: Based on the general flexibility matrix expression, form a general flexible beam model.

[0106] The derived flexibility matrix expression and its dependent parametric geometric equations and intermediate variable calculation formulas are encapsulated and implemented programmatically, ultimately forming a fast-axis general flexible beam model and / or a slow-axis general beam equation.

[0107] Thus, the general flexible beam model becomes an executable computational module: its inputs are the shape and material parameters of a flexible hinge with arbitrary axes, and its output is the compliance matrix C of the corresponding flexible hinge with these input parameters. By inverting this compliance matrix C, the stiffness matrix K can be obtained, and the required torsional stiffness components can be extracted. Therefore, the general flexible beam model is a reusable, parameter-driven computational tool that provides accurate and efficient computational means for galvanometer design.

[0108] In some embodiments, when the flexible hinge is a straight beam of uniform thickness, the radius of the arc and the half-height difference of the flexible hinge are both zero.

[0109] When the flexible hinge is a straight beam structure with uniform thickness, its geometric profile can be simplified by a general flexible beam model.

[0110] Specifically, the geometric parameters describing the arc transition of the flexible hinge—the arc radius *a* and the half-height difference *b*—both take the value of zero. This is because there is no arc profile in a straight beam with a uniform cross-section, hence its radius of curvature is zero. Simultaneously, since the thickness of the straight beam structure is constant along its length, there is no thickness variation from the fixed end to the center, therefore the half-height difference is also zero.

[0111] Substituting a=0 and b=0 into the generalized parametric equations, the generalized flexible beam model automatically degenerates into mechanical formulas describing a straight beam with a uniform cross-section, thus allowing the calculation of the torsional stiffness of such simple flexible hinge configurations. This demonstrates the flexibility of the generalized flexible beam model and its high applicability to different flexible hinge configurations.

[0112] Step 104: Based on the fast axis rotational inertia, fast axis torsional stiffness, slow axis rotational inertia and slow axis torsional stiffness, establish a theoretical kinematic model of the galvanometer, and predict the predicted natural frequencies of the fast axis and slow axis through the theoretical kinematic model.

[0113] Natural frequency is a key parameter for measuring the free vibration characteristics of a galvanometer, affecting its maximum scanning speed, response bandwidth, and motion stability. Specifically, the fast-axis natural frequency determines the limiting rate of high-frequency reciprocating scanning of the laser beam along the fast axis, ensuring the high-speed movement of the galvanometer. The slow-axis natural frequency, on the other hand, affects the smoothness and response speed of the beam rotation along the slow axis, thus relating to the accuracy of the laser trajectory.

[0114] In some embodiments, step 104 includes steps 1041 to 1044: Step 1041: Based on the fast axis rotational inertia, fast axis torsional stiffness, slow axis rotational inertia and slow axis torsional stiffness, establish the Lagrangian equation of motion for the torsional vibration of the galvanometer, and use it as the theoretical kinematic model of the galvanometer.

[0115] The galvanometer is equivalent to a multi-degree-of-freedom torsional vibration system with a torsion spring and a damper. Based on the fast axis rotational inertia, fast axis torsional stiffness, slow axis rotational inertia and slow axis torsional stiffness, a Lagrange equation of motion describing the dynamic behavior of the system is established as the theoretical kinematic model of the galvanometer.

[0116] The Lagrange equations of motion can be expressed as: ; like Figure 3 As shown, , , These correspond to the angular displacements from point A of the galvanometer, point B of the slow-axis rotating assembly, and point C of the fast-axis rotating assembly, respectively. , , The moments of inertia corresponding to points A, B, and C, respectively. , , The damping coefficients corresponding to points A, B, and C, respectively. , , The torsional stiffnesses corresponding to points A, B, and C are respectively. It is an electromagnetic driving torque.

[0117] Step 1042: Based on the theoretical kinematic model, obtain the formula for calculating the natural frequency.

[0118] By performing free vibration analysis on the Lagrange equations system, the characteristic frequencies of the galvanometer are solved, and the natural frequencies of each vibration mode are calculated using the formulas:

[0119] Step 1043: Substitute the moment of inertia and torsional stiffness of the fast shaft into the natural frequency calculation formula to calculate the estimated natural frequency of the fast shaft. This step is based on the fast-axis rotational inertia calculated in step 102. J 1. The torsional stiffness of the fast shaft calculated in step 103 The estimated natural frequency of the fast axis is determined by the natural frequency calculation formula.

[0120] The predicted natural frequency of the fast-axis rotating assembly is obtained by the following formula:

[0121] in, f 1 represents the predicted natural frequency of the fast axis, which is the free vibration frequency of the fast axis rotary component without external excitation. It determines the maximum scanning bandwidth and dynamic response speed that the fast axis rotary component can achieve.

[0122] Step 1044: Substitute the slow axis moment of inertia and slow axis torsional stiffness into the natural frequency calculation formula to calculate the estimated natural frequency of the slow axis.

[0123] This step is based on the slow-axis rotational inertia calculated in step 102. J 2. Slow-axis torsional stiffness calculated in step 103 The estimated natural frequency of the slow axis is determined by the natural frequency calculation formula.

[0124] Based on the same calculation process, the estimated natural frequency of the slow-axis rotating component is given by the following formula:

[0125] in, f 2 represents the predicted natural frequency of the slow axis. The predicted natural frequency of the slow axis characterizes the inherent vibration characteristics of the slow axis rotating component, which is related to the motion stability and accuracy of the galvanometer when performing large-range or low-frequency scanning.

[0126] Step 105: Compare the predicted natural frequencies of the fast axis and the slow axis with the preset target frequency conditions, and optimize the design parameters based on the comparison results.

[0127] The preset target frequency conditions are performance standards pre-defined based on the final application requirements of the galvanometer (such as the specific bandwidth, positioning accuracy, and dynamic response requirements of the laser scanning device). The target frequency conditions include the numerical range requirements for the estimated natural frequency of the fast axis or the estimated natural frequency of the slow axis, which are used to ensure the high-speed scanning capability and scanning stability of the galvanometer, respectively.

[0128] In some embodiments, step 105 includes steps 1051 and 1052: Step 1051: If the predicted natural frequency of the fast axis and / or the predicted natural frequency of the slow axis do not meet the corresponding target frequency conditions, then adjust at least one parameter in the set of inertia parameters or the set of hinge parameters.

[0129] When the comparison results indicate that the performance of the fast-axis rotating component or the slow-axis rotating component is not satisfactory, it is necessary to adjust at least one parameter in the inertia parameter set or the hinge parameter set.

[0130] For example, to increase the estimated natural frequency of an axis, this can be achieved by reducing the moment of inertia of the rotating component of that axis and / or increasing the torsional stiffness of the flexible hinge of that axis. Accordingly, the set of inertia parameters (e.g., reducing the mass or size of the lens or stiffener) and / or the set of hinge parameters (e.g., increasing the hinge thickness or width, or adjusting its material parameters) needs to be adjusted. To decrease the estimated natural frequency of an axis, the parameters are adjusted in the opposite direction.

[0131] Step 1052: Based on the adjusted design parameters, redetermine the predicted natural frequency of the fast axis and / or the predicted natural frequency of the slow axis, and compare them with the target frequency conditions until both the predicted natural frequency of the fast axis and the predicted natural frequency of the slow axis meet the corresponding target frequency conditions.

[0132] After parameter adjustment, the predicted natural frequencies of the fast axis and / or slow axis need to be recalculated and compared with the target frequency conditions again. For example, if the inertia parameter is adjusted, step 102 needs to be re-executed; if the hinge parameter is adjusted, step 103 needs to be re-executed, and finally step 104 needs to be executed again to calculate the predicted natural frequencies of the fast axis and slow axis based on the new parameter set.

[0133] Subsequently, the newly calculated predicted natural frequencies are compared again with the target frequency conditions. This iteration continues until both the calculated fast-axis and slow-axis predicted natural frequencies simultaneously satisfy their respective target frequency conditions. At this point, the current set of design parameters constitutes a feasible design scheme that meets the dynamic performance requirements.

[0134] Thus, this application provides a fully parameterized galvanometer design method. It obtains the inertia parameters of the fast-axis and slow-axis rotating components of the galvanometer, as well as the hinge parameters of the fast-axis and slow-axis flexible hinges. Subsequently, it calculates the rotational inertia of each axis based on rigid body mechanics formulas and the torsional stiffness of each axis based on a general flexible beam model. Based on this, it predicts the estimated natural frequencies of the fast-axis and slow-axis rotating components. By comparing the estimated natural frequencies with preset target frequency conditions, the relevant design parameters of the fast-axis and / or slow-axis rotating components can be adjusted and optimized. The galvanometer design method provided in this application reduces reliance on finite element simulation and trial-and-error experience, helping to achieve the design goals of galvanometer dynamic performance more efficiently and accurately in the early stages of galvanometer design.

[0135] Furthermore, as a specific implementation of the above-described galvanometer design method, this application embodiment provides a galvanometer design device 800. For example... Figure 8 As shown, the galvanometer design device 800 includes: an acquisition module 801, an analysis module 802, and a feedback module 803.

[0136] The acquisition module 801 is used to acquire the design parameters of the galvanometer. The design parameters include: the inertia parameter set of the fast axis rotating component and the slow axis rotating component, and the hinge parameter set of the fast axis flexible hinge and the slow axis flexible hinge. Analysis module 802 is used to determine the rotational inertia of the fast axis and the rotational inertia of the slow axis based on the inertia parameter set of the fast axis rotating component and the inertia parameter set of the slow axis rotating component, respectively. The analysis module 802 is also used to determine the torsional stiffness of the fast axis and the torsional stiffness of the slow axis based on the hinge parameter set of the fast axis flexible hinge and the hinge parameter set of the slow axis flexible hinge, respectively, through a pre-set general flexible beam model. The analysis module 802 is also used to establish a theoretical kinematic model of the galvanometer based on the fast axis rotational inertia, fast axis torsional stiffness, slow axis rotational inertia and slow axis torsional stiffness, and to predict the predicted natural frequencies of the fast axis and slow axis through the theoretical kinematic model. The feedback module 803 is used to compare the predicted natural frequency of the fast axis and the predicted natural frequency of the slow axis with the preset target frequency conditions, and optimize the design parameters based on the comparison results.

[0137] Thus, this application provides a fully parameterized galvanometer design device by acquiring the inertia parameters of the fast-axis and slow-axis rotating components of the galvanometer, as well as the hinge parameters of the fast-axis and slow-axis flexible hinges. The rotational inertia of each axis is calculated based on rigid body mechanics formulas, and the torsional stiffness of each axis is calculated based on a general flexible beam model. Based on this, the estimated natural frequencies of the fast-axis and slow-axis rotating components are predicted. By comparing the estimated natural frequencies with preset target frequency conditions, the relevant design parameters of the fast-axis and / or slow-axis rotating components can be adjusted and optimized. The galvanometer design method provided in this application reduces reliance on finite element simulation and trial-and-error experience, helping to achieve the design goals of galvanometer dynamic performance more efficiently and accurately in the early stages of galvanometer design.

[0138] In some embodiments, the acquisition module 801 is further configured to decompose the fast axis rotating component into a plurality of first geometric bodies according to the geometric contour, and decompose the slow axis rotating component into a plurality of second geometric bodies according to the geometric contour; acquire the geometric parameters and mass parameters of the plurality of first and second geometric bodies to obtain a set of inertia parameters; wherein the first and second geometric bodies are geometric bodies selected from predefined basic geometric body types, and the predefined basic geometric body types include at least one of the following: disk, ring, rectangle and arc.

[0139] In some embodiments, the analysis module 802 is further configured to calculate the first moment of inertia of the first geometric body about the fast axis based on the geometric parameters and mass parameters of the first geometric body, and sum the multiple first moments of inertia to obtain the moment of inertia of the fast axis; the analysis module 802 is further configured to calculate the second moment of inertia of the second geometric body about the slow axis based on the geometric parameters and mass parameters of the second geometric body, and sum the multiple second moments of inertia to obtain the moment of inertia of the slow axis.

[0140] In some embodiments, the acquisition module 801 is further configured to acquire shape parameters for indicating the geometric contours of the fast-axis flexible hinge and the slow-axis flexible hinge, and material parameters for indicating the mechanical properties of the fast-axis flexible hinge and the slow-axis flexible hinge, to obtain a set of hinge parameters for the fast-axis flexible hinge; wherein the shape parameters include: the radius a of the end arc contour of the flexible hinge, the half-height difference b of the flexible hinge, the thickness t of the thinnest part of the flexible hinge, the side width w of the flexible hinge, and the total length L of the flexible hinge; and the material parameters include: the elastic modulus E and the shear modulus G of the flexible hinge.

[0141] In some embodiments, the analysis module 802 is further configured to input shape parameters and material parameters into a general flexible beam model to obtain the compliance matrices of the fast-axis flexible hinge and the slow-axis flexible hinge, respectively; the analysis module 802 is further configured to perform inversion operations on the compliance matrices of the fast-axis flexible hinge and the slow-axis flexible hinge, respectively, to obtain the stiffness matrices of the fast-axis flexible hinge and the slow-axis flexible hinge; the analysis module 802 is further configured to extract the stiffness component indicating torsion about the fast axis from the stiffness matrix of the fast-axis flexible hinge, as the fast-axis torsional stiffness; the analysis module 802 is further configured to extract the stiffness component indicating torsion about the slow axis from the stiffness matrix of the slow-axis flexible hinge, as the slow-axis torsional stiffness.

[0142] In some embodiments, the galvanometer design device 800 further includes a model building module 804, which is used to establish a general parametric equation for the geometric profile of the flexible hinge based on multiple shape parameters; the model building module 804 is also used to derive a general compliance matrix expression characterizing the force-displacement relationship of the flexible hinge based on the general parametric equation and in combination with the elastic modulus and shear modulus of the flexible hinge; the model building module 804 is also used to form a general flexible beam model based on the general compliance matrix expression.

[0143] In some embodiments, the analysis module 802 is further configured to establish a Lagrange equation of motion for the torsional vibration of the galvanometer based on the fast axis moment of inertia, fast axis torsional stiffness, slow axis moment of inertia and slow axis torsional stiffness, and use it as a theoretical kinematic model of the galvanometer. The analysis module 802 is also used to obtain the formula for calculating the natural frequency based on the theoretical kinematic model; Analysis module 802 is further configured to substitute the moment of inertia and torsional stiffness of the fast shaft into the natural frequency calculation formula to calculate the estimated natural frequency of the fast shaft; analysis module 802 is further configured to substitute the moment of inertia and torsional stiffness of the slow shaft into the natural frequency calculation formula to calculate the estimated natural frequency of the slow shaft; wherein, the natural frequency calculation formula is: ,in To estimate the natural frequency, This represents the torsional stiffness of the corresponding shaft. This represents the moment of inertia of the corresponding axis.

[0144] In some embodiments, the feedback module 803 is further configured to adjust at least one parameter in the set of inertia parameters or the set of hinge parameters if the estimated natural frequency of the fast axis and / or the estimated natural frequency of the slow axis do not meet the corresponding target frequency conditions; the feedback module 803 is further configured to redetermine the estimated natural frequency of the fast axis and / or the estimated natural frequency of the slow axis based on the adjusted design parameters, and compare them with the target frequency conditions until both the estimated natural frequency of the fast axis and the estimated natural frequency of the slow axis meet the corresponding target frequency conditions.

[0145] The galvanometer design device in the application embodiments can be an electronic device or a component in an electronic device, such as an integrated circuit or a chip. The electronic device can be a terminal or other devices besides a terminal. For example, the electronic device can be a mobile phone, tablet computer, laptop computer, handheld computer, in-vehicle electronic device, mobile internet device (MID), augmented reality (AR) / virtual reality (VR) device, robot, wearable device, ultra-mobile personal computer (UMPC), netbook or personal digital assistant (PDA), etc. It can also be a server, network attached storage (NAS), personal computer (PC), television (TV), ATM or self-service machine, etc. The embodiments of this application do not specifically limit it.

[0146] The galvanometer device provided in this application embodiment can realize all the processes implemented in the galvanometer design method embodiment, and will not be described again here to avoid repetition.

[0147] This application also provides an electronic device, such as... Figure 9 As shown, the electronic device 900 includes a processor 901 and a memory 902. The memory 902 stores a program or instructions that can run on the processor 901. When the program or instructions are executed by the processor 901, they implement the various steps of the above-described galvanometer design method embodiment and achieve the same technical effect. To avoid repetition, they will not be described again here.

[0148] The memory 902 can be used to store software programs and various data. The memory 902 may primarily include a first storage area for storing programs or instructions and a second storage area for storing data. The first storage area may store the operating system, application programs or instructions required for at least one function (such as sound playback, image playback, etc.). Furthermore, the memory 902 may include volatile memory or non-volatile memory, or both. The non-volatile memory may be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. Volatile memory can be random access memory (RAM), static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDRSDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM), and direct memory bus RAM (DRRAM). The memory 902 in this embodiment includes, but is not limited to, these and any other suitable types of memory.

[0149] Processor 901 may include one or more processing units; optionally, processor 901 integrates an application processor and a modem processor, wherein the application processor mainly handles operations involving the operating system, user interface, and applications, and the modem processor mainly handles wireless communication signals, such as a baseband processor. It is understood that the aforementioned modem processor may also not be integrated into processor 901.

[0150] This application also provides a readable storage medium storing a program or instructions. When the program or instructions are executed by a processor, they implement the various processes of the above-described galvanometer design method embodiments and achieve the same technical effects. To avoid repetition, they will not be described again here.

[0151] This application also provides a chip, which includes a processor and a communication interface. The communication interface and the processor are coupled. The processor is used to run programs or instructions to implement the various processes of the above-described galvanometer design method embodiments and achieve the same technical effect. To avoid repetition, it will not be described again here.

[0152] It should be understood that the chip mentioned in the embodiments of this application may also be referred to as a system-on-a-chip, system chip, chip system, or system-on-a-chip, etc.

[0153] This application also provides a computer program product, which is stored in a storage medium and executed by at least one processor to implement the various processes of the above-described galvanometer design method embodiments, and can achieve the same technical effect. To avoid repetition, it will not be described again here.

[0154] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0155] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A galvanometer design method, characterized in that, include: Obtain the design parameters of the galvanometer, which include: the set of inertia parameters of the fast-axis rotating component and the slow-axis rotating component, and the set of hinge parameters of the fast-axis flexible hinge and the slow-axis flexible hinge; Based on the inertia parameter set of the fast axis rotation component and the inertia parameter set of the slow axis rotation component, the rotational inertia of the fast axis and the slow axis rotation component are determined respectively. Based on the hinge parameter set of the fast-axis flexible hinge and the hinge parameter set of the slow-axis flexible hinge, the torsional stiffness of the fast axis and the torsional stiffness of the slow axis are determined by the pre-set general flexible beam model of the fast axis and the general flexible beam model of the slow axis, respectively. Based on the fast axis moment of inertia, fast axis torsional stiffness, slow axis moment of inertia and slow axis torsional stiffness, a theoretical kinematic model of the galvanometer is established, and the predicted natural frequencies of the fast axis and slow axis are predicted using the theoretical kinematic model. The estimated natural frequency of the fast axis and the estimated natural frequency of the slow axis are compared with preset target frequency conditions, and the design parameters are optimized based on the comparison results.

2. The galvanometer design method according to claim 1, characterized in that, The acquisition of galvanometer design parameters includes: the inertia parameter set of the fast-axis rotating component and the slow-axis rotating component, and the hinge parameter set of the fast-axis flexible hinge and the slow-axis flexible hinge, including: The fast-axis rotating assembly is decomposed into multiple first geometric bodies according to its geometric contour; The slow-axis rotation component is decomposed into multiple second geometric bodies according to its geometric contour; Obtain the geometric parameters and mass parameters of the plurality of first geometric bodies and second geometric bodies to obtain the inertia parameter set; Wherein, the first geometry and the second geometry are geometries selected from predefined basic geometry types, which include at least one of the following: disk, ring, rectangle, and arc.

3. The galvanometer design method according to claim 2, characterized in that, The determination of the rotational inertia of the fast axis and the slow axis based on the inertia parameter sets of the fast axis rotation component and the slow axis rotation component, respectively, specifically includes: Based on the geometric and mass parameters of the first geometric body, the first moment of inertia of the first geometric body about the fast axis is calculated, and the summation of multiple first moments of inertia is obtained to obtain the moment of inertia of the fast axis. Based on the geometric and mass parameters of the second geometric body, the second moment of inertia of the second geometric body about the slow axis is calculated, and the summation of multiple second moments of inertia is obtained to obtain the moment of inertia of the slow axis.

4. The galvanometer design method according to claim 2, characterized in that, The plurality of second geometries obtained by decomposing the slow-axis rotation component include the first geometries obtained by decomposing the fast-axis rotation component.

5. The galvanometer design method according to any one of claims 1 to 4, characterized in that, The acquisition of the galvanometer design parameters includes: the inertia parameter set of the fast-axis rotating component and the slow-axis rotating component, the hinge parameter set of the fast-axis flexible hinge and the slow-axis flexible hinge, and also includes: Obtain shape parameters for indicating the geometric contours of the fast-axis flexible hinge and the slow-axis flexible hinge, and material parameters for indicating the mechanical properties of the fast-axis flexible hinge and the slow-axis flexible hinge, to obtain the hinge parameter set for the fast-axis flexible hinge and the slow-axis flexible hinge.

6. The galvanometer design method according to claim 5, characterized in that, The hinge parameter set based on the fast-axis flexible hinge and the hinge parameter set based on the slow-axis flexible hinge are respectively implemented using a pre-set fast-axis universal flexible beam model and a slow-axis universal flexible beam model, including: The shape parameters and material parameters of the fast-axis flexible hinge and the slow-axis flexible hinge are respectively input into the fast-axis general flexible beam model and the slow-axis general flexible beam model to obtain the flexibility matrices of the fast-axis flexible hinge and the slow-axis flexible hinge respectively. The stiffness matrices of the fast-axis flexible hinge and the slow-axis flexible hinge are obtained by inverting the flexibility matrices of the fast-axis flexible hinge and the slow-axis flexible hinge, respectively. The stiffness component indicating torsion about the fast axis is extracted from the stiffness matrix of the fast axis flexible hinge and used as the torsional stiffness of the fast axis. The stiffness component indicating torsion about the slow axis is extracted from the stiffness matrix of the slow-axis flexible hinge and used as the torsional stiffness of the slow axis.

7. The galvanometer design method according to claim 5, characterized in that, The general flexible beam model is constructed in the following way: Based on the shape parameters of the flexible hinge, a general parametric equation for the geometric profile of the flexible hinge is established. Based on the generalized parametric equation, and combined with the elastic modulus and shear modulus of the flexible hinge, a generalized compliance matrix expression characterizing the force-displacement relationship of the flexible hinge is obtained. Based on the general flexibility matrix expression, the general flexible beam model is formed.

8. A galvanometer design device, characterized in that, include: The acquisition module is used to acquire the design parameters of the galvanometer, which include: the inertia parameter set of the fast-axis rotating component and the slow-axis rotating component, and the hinge parameter set of the fast-axis flexible hinge and the slow-axis flexible hinge. The analysis module is used to determine the rotational inertia of the fast axis and the rotational inertia of the slow axis based on the inertia parameter set of the fast axis rotating component and the inertia parameter set of the slow axis rotating component, respectively. The analysis module is also used to determine the torsional stiffness of the fast axis and the torsional stiffness of the slow axis based on the hinge parameter set of the fast axis flexible hinge and the hinge parameter set of the slow axis flexible hinge, respectively, through the preset fast boat general flexible beam model and the slow axis general flexible beam model. The analysis module is also used to establish a theoretical kinematic model of the galvanometer based on the fast axis rotational inertia, fast axis torsional stiffness, slow axis rotational inertia and slow axis torsional stiffness, and to predict the estimated natural frequency of the fast axis and the estimated natural frequency of the slow axis through the theoretical kinematic model. The feedback module is used to compare the estimated natural frequency of the fast axis and the estimated natural frequency of the slow axis with preset target frequency conditions, and optimize the design parameters based on the comparison results.

9. An electronic device, characterized in that, It includes a processor and a memory, the memory storing a program or instructions that run on the processor, the program or instructions being executed by the processor to implement the steps of the galvanometer design method as described in any one of claims 1 to 7.

10. A readable storage medium having a program or instructions stored thereon, characterized in that, When the program or instructions are executed by the processor, they implement the steps of the galvanometer design method as described in any one of claims 1 to 7.

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