Mobile environmental parameter monitoring system and method based on semiconductor chip factory

By dividing the semiconductor factory into monitoring areas and using PDA devices to communicate with monitoring points, the orderly measurement and result aggregation of environmental parameters of the monitoring cart was realized, which solved the problem of inconsistent measurements caused by manual operation of the monitoring cart and improved the efficiency of environmental monitoring and data integration capabilities.

CN122258984APending Publication Date: 2026-06-23SHENZHEN HUAXIMI TECH CO LTD
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Patent Information

Application Number
CN202610535487.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-04-21
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

In semiconductor factories, the selection of monitoring points for monitoring carts relies on manual experience and lacks regional division and linkage, resulting in inconsistent measurement parameters and uncoordinated progress, making it difficult to meet the standardization and efficient collaboration requirements of environmental monitoring throughout the entire factory area.

Method used

The monitoring cart's coverage area is determined by the area division module. The PDA device is used to communicate with the area monitoring points, and measurement tasks and cycles are configured to achieve orderly measurement and result aggregation of environmental parameters, forming the environmental parameter monitoring results for the entire plant area.

Benefits of technology

It enabled the linkage between the monitoring cart and the factory area, standardized measurement standards, coordinated the measurement progress of multiple areas, improved the efficiency of monitoring and data aggregation, and met the actual needs of environmental monitoring of the entire semiconductor factory.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of semiconductor factory environment monitoring, and discloses a mobile environment parameter monitoring system and method based on a semiconductor chip factory, which comprises the following steps: first, dividing a monitoring coverage area into a plurality of preset areas connected by a mobile monitoring path; when a monitoring trolley enters a first preset area along the path, a PDA device on the trolley communicates with corresponding area monitoring points to obtain a measurement task; after a measurement period and a measurement frequency are configured, the environment parameters are measured to obtain results; then, the environment of the remaining preset areas is measured in sequence along the path; finally, the measurement results of the areas are summarized, and the monitoring results of the environment parameters of the whole factory area are output. The application realizes linkage between the monitoring trolley and the division of the factory area, standardizes the measurement standard, coordinates the measurement progress of multiple areas, improves the monitoring and data summarization efficiency, and meets the actual needs of the environment monitoring of the whole factory area of the semiconductor factory.
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