Synthetic jet and heat dissipation device based on dual-vibrator decoupling and flexible sealing structure

Abstract

The present application relates to the technical field of micro-electro-mechanical system, and particularly relates to a synthetic jet and heat dissipation device based on double-vibrator decoupling and flexible sealing structure, which adopts a MEMS layer stack packaging architecture, forms an acoustic resonant cavity through four structure layers, and specifically sets an asymmetric double-piezoelectric vibrator driving module in the vertical direction, wherein the upper vibrator is fixed at both ends, and the lower vibrator is anchored at the center, so as to maximize the cavity volume compression amount, and uses rigid-flexible coupling sealing structure to achieve zero-leakage sealing and mechanical decoupling, and then based on the fluid impedance asymmetric principle, constructs a physically isolated air inlet flow channel and air outlet flow channel to cut off the heat short-circuit cycle, and finally realizes heat dissipation through the suction and injection of two reciprocating strokes. Through performance simulation verification, the present application significantly improves the energy conversion efficiency and convective heat transfer limit of the synthetic jet, and can also be applied to the fields of micro-fluidic pumping, micro-speaker module and the like.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical systems (MEMS) technology, and specifically to a synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure. Background Technology

[0002] With the rapid development of 5G communication, artificial intelligence, and high-performance computing technologies, the heat flux density of chips in mobile terminals and edge computing devices is increasing exponentially. Traditional rotary blade fans, limited by the physical size of mechanical bearings, struggle to maintain efficient operation in millimeter-thin spaces and suffer from high noise and short lifespan. The development of microelectromechanical systems (MEMS) technology has made synthetic jets or piezoelectric micro-blowers based on the inverse piezoelectric effect the mainstream solution for heat dissipation in confined spaces. This technology utilizes a zero-net-mass flux jet generated by a vibrating cavity to achieve high-shear cooling of heat sources without an external air source.

[0003] Although existing dual-piezoelectric resonator jet synthesis technology has achieved certain engineering applications, the following core bottlenecks still exist in its microstructure and physical mechanism, severely restricting further improvement in its heat dissipation efficiency. The driving efficiency bottleneck caused by symmetrical boundaries: Existing dual-piezoelectric resonator driving structures typically employ symmetrical mechanical boundary conditions. For example, both the upper and lower resonators are designed as circular diaphragms with "peripheral fixed support" or beam structures with "end-fixed support." While this highly symmetrical design facilitates manufacturing, within the acoustic resonant cavity, the modes of the upper and lower resonators often struggle to achieve spatial complementarity. When pursuing a high compression ratio, the symmetrical diaphragm exhibits large central displacement but zero edge displacement, or the overall sweep volume is limited. This single mode limits the throughput of the working fluid per unit time, making it difficult to establish extremely high sound pressure levels within a small cavity. The "dynamic-static interference" and leakage paradox at the microelectromechanical system (MEMS) scale: To achieve the most efficient impact jet, the jet must be ejected perpendicular to the chip surface. This requires the resonator closest to the heat source (the lower resonator) to be centrally open and connected to a stationary nozzle. If a piezoelectric vibrator (brittle ceramic) is rigidly fixed directly to the central nozzle, the enormous shear stress generated by high-frequency vibration (>20kHz) will quickly lead to fatigue fracture at the connection root or electrode detachment. The persistent problem of "thermal short circuit" in massless jets stems from the fact that synthetic jets are essentially reciprocating flows. Within the confined space of electronic packaging, the heat sink's intake and exhaust ports are often in the same thermodynamic environment. Traditional configurations lack refined flow field topology design, making it extremely easy for the high-temperature exhaust gas generated after cooling the chip to be re-entrained into the cavity during the intake stroke.

[0004] Existing synthetic jet technology has not yet formed a closed-loop solution in the three dimensions of asymmetric high-efficiency drive, dynamic and static zero-leakage sealing, and cold and hot flow field isolation. Summary of the Invention

[0005] The purpose of this invention is to provide a synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure. It aims to solve the three core physical contradictions faced by synthetic jet heat sinks in the pursuit of high energy efficiency and miniaturization at the microelectromechanical system scale: limited compression ratio of single driving mode, contradiction between airtightness and stress release at dynamic and static connection, and heat retention and re-entrainment of heat working fluid in confined space.

[0006] To achieve the above objectives, the present invention provides a synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure, comprising four structural layers bonded from top to bottom, namely, an upper oscillator layer, a cavity frame layer, a rigid-flexible coupling interface layer, and a lower oscillator and nozzle assembly layer, wherein the interior of the four structural layers constitutes an acoustic resonant cavity.

[0007] The upper oscillator layer is provided with a first piezoelectric oscillator, which adopts a beam structure with fixed supports at both ends and a suspended middle part to form the top wall of the acoustic resonant cavity.

[0008] The cavity frame layer constitutes the sidewall of the acoustic resonant cavity, with a height ranging from 100 to 500 μm.

[0009] The lower vibrator and nozzle assembly layer includes a rigid jet nozzle and a second piezoelectric vibrator. The second piezoelectric vibrator forms the bottom wall of the acoustic resonant cavity, is centrally anchored, and is fixedly connected to the rigid jet nozzle. The outer peripheral edge of the second piezoelectric vibrator is a free end or an elastically suspended end.

[0010] The rigid-flexible coupling interface layer is made of an elastic material with a low Young's modulus and is disposed between the central anchoring end of the second piezoelectric vibrator and the outer wall of the rigid jet nozzle.

[0011] The first piezoelectric vibrator and the second piezoelectric vibrator are arranged vertically opposite each other to form an asymmetric spatial displacement field;

[0012] Under the action of the driving signal, the maximum displacement of the first piezoelectric vibrator is located at its geometric center, and the maximum displacement of the second piezoelectric vibrator is located at its outer peripheral edge; the two are configured to vibrate in concert, thereby maximizing the volume compression of the acoustic resonant cavity per unit time.

[0013] The rigid-flexible coupling interface layer is a continuous medium interface layer, whose inner surface is bonded or tightly attached to the rigid jet nozzle, and whose outer surface is connected to the second piezoelectric vibrator, and is responsible for blocking the lateral leakage of high-pressure working fluid along the central anchoring gap.

[0014] The synthetic jet and heat dissipation device based on the dual-oscillator decoupling and flexible sealing structure also includes physically isolated inlet and outlet channels, both designed based on the principle of fluid impedance asymmetry.

[0015] The air intake channel is located in the low-temperature zone around the device and has low suction flow resistance.

[0016] The exhaust flow channel guide device is positioned laterally in the far field and is responsible for guiding the hot wall jet after impacting the heat source to diffuse outward, preventing the thermal working medium from being re-entrained.

[0017] The height of the rigid jet nozzle is set to a value that creates the optimal impact distance between the jet outlet and the heat source surface, and the jet outlet cross-section faces the heat source being cooled.

[0018] This invention provides a synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure. It employs a MEMS stacked packaging architecture, using four structural layers to form an acoustic resonant cavity. Specifically, an asymmetric dual-piezoelectric oscillator drive module is vertically positioned, with the upper oscillator fixed at both ends and the lower oscillator anchored at the center, thereby maximizing cavity volume compression. A rigid-flexible coupling sealing structure achieves zero-leakage sealing and mechanical decoupling. Furthermore, based on the principle of fluid impedance asymmetry, physically isolated inlet and outlet channels are constructed to cut off the thermal short-circuit cycle. Finally, heat dissipation is achieved through two reciprocating strokes: intake and ejection. Performance simulations verify that this invention significantly improves the energy conversion efficiency and convective heat transfer limit of the synthetic jet, and can also be extended to applications such as microfluidic pumping and micro-speaker modules. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the overall structure of a synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure according to the present invention.

[0021] Figure 2 This is an exploded view of the layered structure of the present invention.

[0022] Figure 3 This is a schematic diagram of the overall cross-sectional structure of the device according to an embodiment of the present invention along the central axis.

[0023] Figure 4 This is a cross-sectional schematic diagram of the core driving component after the peripheral flow channel has been removed from the device of this embodiment of the invention.

[0024] Figure 5 This is a schematic diagram of the working state of the core driving component in the intake stroke of an embodiment of the present invention.

[0025] Figure 6This is a schematic diagram of the working state of the core driving component in the injection stroke according to an embodiment of the present invention.

[0026] Figure 7 This is a schematic diagram of the entire flow field path of the complete device in the intake stroke according to an embodiment of the present invention.

[0027] Figure 8 This is a schematic diagram of the entire flow field path of the complete device in the jet stroke according to an embodiment of the present invention.

[0028] Figure 9 This is a flow field velocity cloud map of the core driving component in an embodiment of the present invention at the peak of the injection stroke. Detailed Implementation

[0029] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0030] Please see Figure 1 and Figure 2 The present invention provides a synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure, comprising four structural layers bonded from top to bottom, namely an upper oscillator layer, a cavity frame layer, a rigid-flexible coupling interface layer, and a lower oscillator and nozzle assembly layer, wherein the interior of the four structural layers constitutes an acoustic resonant cavity.

[0031] The upper oscillator layer is provided with a first piezoelectric oscillator, which adopts a beam structure with fixed supports at both ends and a suspended middle part to form the top wall of the acoustic resonant cavity.

[0032] The cavity frame layer constitutes the sidewall of the acoustic resonant cavity, with a height ranging from 100 to 500 μm.

[0033] The lower vibrator and nozzle assembly layer includes a rigid jet nozzle and a second piezoelectric vibrator. The second piezoelectric vibrator forms the bottom wall of the acoustic resonant cavity, is centrally anchored, and is fixedly connected to the rigid jet nozzle. The outer peripheral edge of the second piezoelectric vibrator is a free end or an elastically suspended end.

[0034] The rigid-flexible coupling interface layer is made of an elastic material with a low Young's modulus and is disposed between the central anchoring end of the second piezoelectric vibrator and the outer wall of the rigid jet nozzle.

[0035] The first piezoelectric vibrator and the second piezoelectric vibrator are arranged vertically opposite each other to form an asymmetric spatial displacement field;

[0036] Under the action of the driving signal, the maximum displacement of the first piezoelectric vibrator is located at its geometric center, and the maximum displacement of the second piezoelectric vibrator is located at its outer peripheral edge; the two are configured to vibrate in concert, thereby maximizing the volume compression of the acoustic resonant cavity per unit time.

[0037] The rigid-flexible coupling interface layer is a continuous medium interface layer. Its inner surface is bonded or tightly bonded to the rigid jet nozzle, and its outer surface is connected to the second piezoelectric vibrator, which is responsible for blocking the lateral leakage of high-pressure working fluid along the central anchoring gap.

[0038] The synthetic jet and heat dissipation device based on the dual-oscillator decoupling and flexible sealing structure also includes physically isolated inlet and outlet channels, both designed based on the principle of fluid impedance asymmetry.

[0039] The air intake channel is located in the low-temperature zone around the device and has low suction flow resistance.

[0040] The exhaust flow channel guide device is positioned laterally in the far field and is responsible for guiding the hot wall jet after impacting the heat source to diffuse outward, preventing the thermal working medium from being re-entrained.

[0041] The height of the rigid jet nozzle is set to a value that creates the optimal impact distance between the jet outlet and the heat source surface, with the jet outlet cross-section facing the heat source being cooled.

[0042] The following specific embodiments further illustrate the synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure described in this invention:

[0043] like Figure 3 As shown, the device in this embodiment is a stacked packaging architecture, manufactured using microelectromechanical systems (MEMS) wafer-level bonding technology. The main structure consists of four functional layers bonded sequentially from top to bottom. The first structural layer is the upper oscillator layer, containing the first piezoelectric oscillator 1. This oscillator adopts a beam structure with both ends fixed to the chip frame along its length, while the middle is suspended. The first piezoelectric oscillator 1 is formed by bonding an elastic metal substrate to a piezoelectric ceramic sheet (such as PZT-4, 50-100μm thick). Its mechanical boundary characteristics are high stiffness, configured to provide the compressive potential energy of the core. The second structural layer is the cavity frame layer, containing the cavity sidewalls. This layer is typically etched from silicon (Si) or photosensitive glass, used to define the height of the acoustic resonant cavity 3 (typically 100-500μm) and provide the mounting reference for the upper and lower oscillators. The third structural layer is a rigid-flexible coupling interface layer, located inside the acoustic resonant cavity. The fourth structural layer is the lower oscillator and nozzle assembly layer, which includes a rigid jet nozzle and a second piezoelectric oscillator. The rigid jet nozzle is stationary and is formed on a silicon substrate by deep reactive ion etching. It has a high aspect ratio vertical flow channel with its outlet facing the heat source. The second piezoelectric oscillator adopts a center-anchored structure. This structure is similar to an inverted cantilever beam or an umbrella-shaped diaphragm.

[0044] like Figure 4 As shown, the upper piezoelectric oscillator, with its fixed ends, and the lower piezoelectric oscillator form an asymmetric mechanical boundary in space. The maximum displacement point of the upper oscillator is located at the geometric center, while the maximum displacement point of the lower oscillator is located at the outer periphery. This design eliminates the displacement dead zone at the cavity edge of traditional symmetrical diaphragms, allowing the fluid throughout the cavity to be effectively compressed.

[0045] In this embodiment, the entire device is situated above the cooled heat source 8. An enclosed acoustic resonant cavity 11 is defined internally. A first piezoelectric vibrator 3, with piezoelectric ceramic 1 attached to it, is located at the top of the cavity. It employs a beam-like structure with both ends fixed to the shell frame, and the middle is suspended. A second piezoelectric vibrator 4, with piezoelectric materials 2a and 2b attached to it, is located at the bottom of the cavity. It employs a cantilever structure with a central anchor, and its periphery is rigidly and flexibly coupled to the fixed ends 7a and 7b of the nozzle jet outlet via flexible sealing members 5a and 5b. Around the periphery of the device, hot and cold flow channels are isolated by hot and cold flow channel isolation devices 12 and 13, clearly showing the inlet flow channels 9 and 10 and the exhaust flow channels 14 and 15. The inlet flow channels 9 and 10 are located at the edge of the device, and the exhaust flow channels 14 and 15 are located in the peripheral area of ​​the central nozzle, isolated according to the fluid properties of the synthesized jet. Figure 4 The diagram further shows a cross-sectional view of the core drive component after the outer shell has been removed, highlighting the internal structure of the core working device.

[0046] Figure 5 The diagram illustrates the operation of the core drive component during the intake stroke. Under the control of the drive voltage, the middle of the first piezoelectric vibrator 3 bends upward (away from the heat source), while the outer edge of the second piezoelectric vibrator 4 bends downward (opposite phase motion). This asymmetrical coordinated motion causes the volume of the acoustic resonant cavity 11 to increase instantaneously, generating a negative pressure inside the cavity. At this time, the rigid-flexible coupling seals 5a and 5b are subjected to tensile stress, but thanks to the high elastic elongation of the material, they remain connected and do not detach, ensuring that external fluid can only enter from the jet outlets 16 and 17, as shown by the arrows in the diagram. The external working fluid is drawn into the cavity under the action of the pressure difference. Figure 6 This demonstrates the operating state of the core drive components during the injection stroke. When the drive voltage reverses, the first piezoelectric vibrator 3 collapses violently downwards like a piston, while the outer edge of the second piezoelectric vibrator 4 curves upwards like an umbrella (movement towards each other). Their displacement fields are spatially complementary, creating strong compression of the fluid in the cavity. At this time, the rigid-flexible coupling seals 5a and 5b undergo shear elastic deformation. The compressed high-energy working fluid has nowhere to escape and can only converge 100% at the jet outlets 16 and 17. Figure 6As shown by the vertically downward arrow, the gas accelerates to form a high-speed synthetic jet (speeds up to 30-50 m / s), directly bombarding the thermal boundary layer on the surface of the heat source below. Simultaneously, the two oscillators are not directly connected; the flexible seal provides vibration isolation and damping, achieving structural decoupling of the two mechanical oscillators. Traditional dual-oscillator structures typically employ symmetrically positioned, peripherally fixed diaphragms. During vibration, both the upper and lower diaphragms undergo parabolic deformation, with zero edge displacement. This single-mode design makes it difficult to effectively compress the fluid at the cavity edges, resulting in a large dead volume and limiting the overall compression ratio. For example... Figure 6 As shown, when the two move towards each other, the upper oscillator fills the central space, and the lower oscillator fills the edge space. This complementary spatial modes of the center and edge eliminate the dead volume in traditional designs, maximizing the rate of volume change of the acoustic resonant cavity 3 per unit time. According to the gas law, a higher volume compressibility directly translates into a higher peak pressure within the cavity. During the intense compression stroke, the rigid-flexible coupling seals 5a and 5b play a crucial role. They fill the microscopic gaps, constructing a quasi-sealed pressure vessel. Since the lateral leakage path is completely blocked, according to the law of conservation of energy, all the pressure potential energy generated by the work done by the two oscillators can only be released through the jet outlet. This forces the working fluid to accelerate rapidly at the nozzle throat, converting high potential energy into extremely high kinetic jet velocity, thus achieving a higher quality and faster direct jet.

[0047] Figure 7 , Figure 8 This embodiment explains the system-level thermal flow field topology and circulation management. To prevent thermal failure in small spaces, it details the design of the peripheral flow channels and their control over the flow field. For example... Figure 7As shown, the device integrates air intake channels 9 and 10 on its periphery. These channels are located on the periphery of the device, far from the central heat source area, and have a large hydraulic diameter and streamlined diffuser, resulting in extremely low flow resistance. Traditional synthetic jets typically use a single orifice that handles both intake and exhaust, causing hot gas to linger near the orifice and potentially leading to thermal short circuits. Utilizing fluid dynamics principles, the standard intake-exhaust cycle of the synthetic jet is spatially decomposed into two independent flow field topologies. This achieves far-field cold flow entrainment and near-field impact and wall flow dissipation. The device of this invention provides a flow field control mechanism at different phases within a complete synthetic jet excitation cycle. By utilizing the asymmetry of fluid impedance in the peripheral channels, the device transforms the reciprocating oscillating flow of the synthetic jet into a direct-flow jet with unidirectional heat dissipation capabilities. In traditional synthetic jets, fluid is drawn back from the nozzle. In this configuration, the peripheral inlet channels 9 and 10 are designed with extremely low suction flow resistance coefficients, while the central nozzles 16 and 17 and the exhaust channels 14 and 15 have higher reverse flow resistance. According to the principle of minimum resistance, the external ambient fluid preferentially enters through the peripheral inlet channels 9 and 10. Since the inlet is located in the far field, far from the central heat source, the intake working fluid is primarily ambient cold air. This process achieves energy charging of the synthetic jet and avoids the intake of a high-temperature stagnant layer from the heat source surface, solving the problem of thermal re-entrainment in traditional synthetic jets. Figure 7 This corresponds to the first half of the synthetic jet cycle, i.e., the cavity volume expansion stage. The first piezoelectric oscillator 3 bends upward and the second piezoelectric oscillator 4 bends downward (moving in opposite directions), causing the instantaneous volume of the acoustic resonant cavity 11 to increase dramatically, generating negative pressure inside the cavity. Figure 8 This corresponds to the latter half of the synthetic jet cycle, namely the cavity volume compression stage. The two oscillators move towards each other, with the upper part pressing down and the lower part lifting, causing the cavity to compress rapidly. The high-pressure working fluid, constrained by the rigid-flexible coupling sealing structures 5a and 5b, is forced to converge entirely at the jet outlets 16 and 17. At the nozzle outlet, the fluid boundary layer separates and swirls, forming a series of high-frequency, high-momentum synthetic jet vortex rings. The high-speed jet vertically impacts the surface of the heat source 8, generating an extremely thin boundary layer in the stagnation region, significantly enhancing the Nusselt number and achieving highly efficient forced convection heat transfer. The impacted fluid transforms into a wall jet that diffuses along the surface of the heat source, now carrying a large amount of heat load. Because the central nozzle area is continuously occupied by the jet, and the inlet ducts 9 and 10 are outside the high-pressure zone, these hot exhaust gases are forcibly guided to the exhaust ducts 14 and 15 by the bottom guide structure and discharged laterally to the far end.

[0048] To verify the performance advantages of the synthetic jet and heat dissipation device based on the dual-oscillator decoupling and flexible sealing structure proposed in this invention under actual working conditions, this embodiment establishes a fluid-structure interaction numerical model using multiphysics simulation software and compares it with traditional structures. Figure 4The structure shown is constructed. The upper oscillator is set as a beam with fixed supports at both ends, and the lower oscillator is set as a cantilever anchored at the center. All piezoelectric oscillators are made of hard piezoelectric ceramics with piezoelectric constants. Mechanical quality factor Drive voltage The driving frequency is locked at its respective first-order resonant frequency. Between. For example Figure 9 The velocity contour plot shown indicates that the peak jet velocity at the nozzle exit reaches a maximum of over 100 m / s. Such high jet velocities are typically only seen in high-compression-ratio volumetric pumps. This conversely demonstrates that the spatial modal complementarity between the upper and lower oscillators significantly eliminates dead volume, establishing an instantaneous high sound pressure sufficient to generate a high-speed jet within the microcavity. Simulation results show that the fluid velocity vector near this region strictly adheres to the wall tangent, and no lateral jets or irregular turbulence perpendicular to the nozzle outer wall were observed. According to fluid dynamics principles, this high-momentum, low-dissipation jet possesses extremely strong penetrating power, effectively penetrating the stationary thermal stagnation layer on the heat source surface, thereby achieving efficient stagnation point impact cooling. Although this simulation only shows the velocity field, the high flow velocity directly corresponds to a high Nusselt number, indicating excellent heat dissipation performance.

[0049] Furthermore, the fixed-end form of the first piezoelectric vibrator 3 of the present invention can be evolved into a four-corner fixed-end or multi-beam support, and the shape of the outer flow channel is not limited to a rectangular flow channel, but can also be an Archimedean spiral or other streamlined topology.

[0050] Viscoelastic materials that meet the low stiffness requirement and have airtightness can be used for flexible sealing components.

[0051] This device is not only suitable for chip heat dissipation, but also for microfluidic pumping systems or miniature speaker modules.

[0052] The above description discloses only one or more preferred embodiments of the present invention, and should not be construed as limiting the scope of the present invention. Those skilled in the art can understand that all or part of the processes of the above embodiments can be implemented, and equivalent changes made in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure, characterized in that, It includes four structural layers bonded from top to bottom: upper oscillator layer, cavity frame layer, rigid-flexible coupling interface layer, and lower oscillator and nozzle assembly layer. The interior of the four structural layers forms an acoustic resonant cavity. The upper oscillator layer is provided with a first piezoelectric oscillator, which adopts a beam structure with fixed supports at both ends and a suspended middle part to form the top wall of the acoustic resonant cavity. The cavity frame layer constitutes the sidewall of the acoustic resonant cavity, with a height ranging from 100 to 500 μm. The lower vibrator and nozzle assembly layer includes a rigid jet nozzle and a second piezoelectric vibrator. The second piezoelectric vibrator forms the bottom wall of the acoustic resonant cavity, is centrally anchored, and is fixedly connected to the rigid jet nozzle. The outer peripheral edge of the second piezoelectric vibrator is a free end or an elastically suspended end. The rigid-flexible coupling interface layer is made of an elastic material with a low Young's modulus and is disposed between the central anchoring end of the second piezoelectric vibrator and the outer wall of the rigid jet nozzle.

2. The synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure as described in claim 1, characterized in that, The first piezoelectric vibrator and the second piezoelectric vibrator are arranged vertically opposite each other to form an asymmetric spatial displacement field; Under the action of the driving signal, the maximum displacement of the first piezoelectric vibrator is located at its geometric center, and the maximum displacement of the second piezoelectric vibrator is located at its outer peripheral edge; the two are configured to vibrate in concert, thereby maximizing the volume compression of the acoustic resonant cavity per unit time.

3. The synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure as described in claim 2, characterized in that, The rigid-flexible coupling interface layer is a continuous medium interface layer. Its inner surface is bonded or tightly bonded to the rigid jet nozzle, and its outer surface is connected to the second piezoelectric vibrator, which is responsible for blocking the lateral leakage of high-pressure working fluid along the central anchoring gap.

4. The synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure as described in claim 1, characterized in that, The synthetic jet and heat dissipation device based on the dual-oscillator decoupling and flexible sealing structure also includes physically isolated inlet and outlet channels, both designed based on the principle of fluid impedance asymmetry. The air intake channel is located in the low-temperature zone around the device and has low suction flow resistance. The exhaust flow channel guide device is positioned laterally in the far field and is responsible for guiding the hot wall jet after impacting the heat source to diffuse outward, preventing the thermal working medium from being re-entrained.

5. The synthetic jet and heat dissipation device based on a dual-oscillator decoupling and flexible sealing structure as described in claim 1, characterized in that, The height of the rigid jet nozzle is set to a value that creates the optimal impact distance between the jet outlet and the heat source surface, with the jet outlet cross-section facing the heat source being cooled.

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