A spectrometer and method based on a heterostructure and periodic metasurface array
By introducing periodic metasurface arrays and heterostructures into a miniature spectrometer, the photoelectric response is enhanced by utilizing the local surface plasmon effect. Combined with an optimized spectral reconstruction algorithm, the problems of spectral resolution and reconstruction accuracy of the miniature spectrometer are solved, achieving efficient spectral information reconstruction and enhanced reliability.
CN122269869APending Publication Date: 2026-06-23SOUTH CHINA NORMAL UNIV
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SOUTH CHINA NORMAL UNIV
- Filing Date
- 2026-02-02
- Publication Date
- 2026-06-23
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Figure CN122269869A_ABST
Abstract
The application belongs to the technical field of semiconductor devices, and particularly relates to a spectrometer and method based on a heterostructure and a periodic super surface array. The spectrometer comprises a Si substrate, a SiO2 substrate, a gate, a BN substrate, a source, a drain, a WSe2 and MoTe2 van der Waals heterojunction, and a periodic super surface array. The periodic super surface array is arranged in the WSe2 and MoTe2 van der Waals heterojunction region to adjust photoelectric response output. Nonlinear responsivity curves are obtained under different bias voltages and gate voltages. Unknown spectra can be reconstructed by combining a reconstruction algorithm, and the spectrometer function can be realized.
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