High-precision repeat positioning adjustment device

Abstract

This application provides a high-precision repeatable positioning adjustment device, including a base, an adjustment component, a motion avoidance component, a positioning component, and a locking component. The adjustment component includes a fine-tuning mechanism and a linkage slide rod. The fine-tuning mechanism drives the linkage slide rod to move. The motion avoidance component is movable relative to the adjustment component. The positioning component is disposed between the adjustment component and the motion avoidance component, and includes mutually cooperating spherical positioning elements. The locking component locks the linkage slide rod. This configuration allows for fine adjustment of the linkage slide rod's position during initial installation or debugging, with the locking component fixing the adjustment result and using this position as a stable reference for subsequent use. When maintenance is required, the motion avoidance component can move relative to the adjustment component to provide space for maintenance operations.

Description

Technical Field

[0001] This application relates to the field of detection and adjustment equipment technology, and in particular to a high-precision repeatable positioning adjustment device. Background Technology

[0002] In semiconductor equipment and other precision testing equipment, some functional components need to be disassembled or moved during equipment maintenance to allow space for maintenance operations. For precision mechanisms installed inside the equipment, their working positions often require fine adjustment to meet operational requirements. Therefore, during initial installation, fine-tuning structures are often used to precisely adjust the positions of components. To facilitate maintenance, some equipment incorporates movable or obstacle-avoiding structures, allowing relevant components to be moved away during maintenance and then returned to their original working positions after maintenance.

[0003] However, in existing technologies, when components are reset after maintenance, the reset position often fails to match the original position, thus requiring readjustment. Frequent re-adjustments not only increase equipment maintenance time but also place higher demands on maintenance personnel. Furthermore, during repeated disassembly or reset, insufficient stability of the positioning structure can lead to accumulated positional deviations, affecting the operational stability of the equipment.

[0004] It should be noted that the above content is not necessarily prior art, nor is it intended to limit the scope of patent protection of this application. Summary of the Invention

[0005] This application provides a high-precision repeatability adjustment device to solve the problem that when existing components are reset after maintenance, the reset position is often difficult to keep consistent with the original position.

[0006] As one aspect of the embodiments of this application, this application provides a high-precision repeatability adjustment device, including: Base; An adjustment assembly, comprising a fine-tuning mechanism and a linkage slide bar, wherein the fine-tuning mechanism is used to drive the linkage slide bar to move; The motion avoidance component is movable relative to the adjustment component; A positioning component is disposed between the adjustment component and the motion avoidance component, and the positioning component includes mutually cooperating spherical positioning elements; A locking assembly is used to lock the linkage slide rod.

[0007] Optionally, the fine-tuning mechanism is configured as a micrometer; The micrometer is connected to the linkage slide rod to drive the linkage slide rod to move along the adjustment direction.

[0008] Optionally, the linkage slide bar is provided with a positioning insert.

[0009] Optionally, the positioning insert is configured to be made of alloy steel.

[0010] Optionally, the spherical positioning component includes a first spherical positioning component disposed on the adjustment component and a second spherical positioning component disposed on the motion avoidance component.

[0011] Optionally, both the first spherical positioning member and the second spherical positioning member are configured to be made of alloy steel.

[0012] Optionally, it also includes a magnetic suction component disposed between the adjustment component and the motion avoidance component.

[0013] Optionally, the magnetic suction assembly includes a magnet disposed on the adjustment assembly and a suction bracket disposed on the motion avoidance assembly.

[0014] Optionally, the locking assembly includes a fixed block and an eccentric handle disposed on the fixed block, the eccentric handle being used to drive the fixed block to clamp the linkage slide rod.

[0015] Optionally, the adjustment component is provided with a position sensor for detecting the position state of the motion avoidance component when it is reset.

[0016] The embodiments of this application employing the above-described technical solution may have the following advantages: This application provides a high-precision repeatable positioning adjustment device, including a base, an adjustment component, a motion avoidance component, a positioning component, and a locking component. The adjustment component includes a fine-tuning mechanism and a linkage slide rod. The fine-tuning mechanism drives the linkage slide rod to move. The motion avoidance component is movable relative to the adjustment component. The positioning component is disposed between the adjustment component and the motion avoidance component, and includes mutually cooperating spherical positioning elements. The locking component locks the linkage slide rod. This configuration allows for fine adjustment of the linkage slide rod's position during initial installation or debugging, with the locking component fixing the adjustment result as a stable reference for subsequent use. When maintenance is required, the motion avoidance component can move relative to the adjustment component to provide space for maintenance operations. After maintenance, the positioning relationship formed by the spherical positioning elements allows the motion avoidance component to return to its predetermined working position, reducing the need for repositioning after reset, lowering maintenance complexity, and shortening maintenance time. Attached Figure Description

[0017] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0018] Figure 1 A three-dimensional assembly structure diagram of the high-precision repeatability adjustment device provided in the embodiments of this application; Figure 2 An exploded perspective view of the high-precision repeatable positioning adjustment device provided in the embodiments of this application.

[0019] Explanation of reference numerals in the attached figures: 1-Adjustment component; 11-Fine-tuning mechanism; 12-Linkage slide bar; 13-Positioning insert; 2-Motion avoidance component; 3-Positioning component; 4-Locking component; 5-Magnetic component; 51-Magnet; 52-Suction holder. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other. The application will now be described in detail with reference to the accompanying drawings and embodiments.

[0021] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0022] In this application, the term "numerical interval" (i.e., numerical range) refers to a range of values. Unless otherwise specified, the distribution of selectable values ​​within this numerical interval is considered continuous, and includes the two endpoints (i.e., the minimum and maximum values) of the interval, as well as every value between these endpoints. Unless otherwise specified, when a numerical interval refers only to integers within that interval, it includes the two endpoints of the range and every integer between them, effectively listing every integer. When multiple numerical ranges are provided to describe features or characteristics, these ranges can be merged. In other words, unless otherwise specified, the numerical ranges disclosed in this application should be understood to include any and all subranges included therein. The "numerical value" in this numerical interval can be any quantitative value, such as a number, percentage, or proportion. The term "numerical interval" can broadly include percentage intervals, proportion intervals, ratio intervals, and other quantitative intervals.

[0023] Exemplary embodiments according to this application will now be described in more detail with reference to the accompanying drawings. It should be understood that these exemplary embodiments may be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein.

[0024] Please refer to the following: Figure 1 and Figure 2 This application discloses a high-precision repeatable positioning adjustment device, including a base, an adjustment component 1 disposed on the base, a motion avoidance component 2 movable relative to the adjustment component 1, a positioning component 3 disposed between the adjustment component 1 and the motion avoidance component 2, and a locking component 4 for locking the linkage slide rod 12. By providing a movable motion avoidance component 2 in the device, relevant components can be moved to an avoidance position during equipment maintenance, thereby providing space for maintenance operations; after maintenance, the positioning component 3 returns the motion avoidance component 2 to its original working position, thereby reducing the need for precision adjustment after maintenance, reducing maintenance complexity, and shortening maintenance time.

[0025] Specifically, the adjustment component 1 is mounted on the base and includes a fine-tuning mechanism 11 and a linkage slide rod 12. The fine-tuning mechanism 11 drives the linkage slide rod 12 to move. The fine-tuning mechanism 11 precisely adjusts the position of the linkage slide rod 12, allowing for accurate setting of the positions of relevant actuators during initial installation or commissioning of the equipment. After adjustment, the position of the linkage slide rod 12 can be used as a reference position for subsequent repositioning. This structure allows the equipment to achieve the required accuracy during initial commissioning, eliminating the need for frequent re-adjustments during subsequent maintenance, thus reducing maintenance workload.

[0026] Furthermore, in this embodiment, the fine-tuning mechanism 11 is configured as a micrometer. The micrometer has high displacement adjustment accuracy; rotating the micrometer causes the linkage slide 12 to undergo a small displacement along the adjustment direction, thus achieving fine position adjustment. After setting the initial position using the micrometer, the linkage slide 12 can be stably maintained at the target position. It should be noted that, without changing the basic principle of fine position adjustment through the fine-tuning mechanism 11 driving the linkage slide 12, the fine-tuning mechanism 11 can also adopt other forms of precision adjustment structures, such as a lead screw adjustment mechanism, a micrometer head structure, or an adjustment screw structure with a precision threaded pair, to adapt to different precision or structural space requirements.

[0027] Specifically, the motion avoidance component 2 is mounted on the base and can move relative to the adjustment component 1. During equipment maintenance, the motion avoidance component 2 can be moved to an avoidance position, providing sufficient operating space for maintenance personnel. After maintenance, the motion avoidance component 2 can be moved back to the working position. This configuration allows for the acquisition of operating space without disassembling a large number of structural components during maintenance, thereby reducing disassembly and assembly steps and improving maintenance efficiency. Furthermore, the motion avoidance component 2 can be configured to slide with the base, for example, using a slide rail guide structure or a linear guide structure to ensure stability during movement. It should be noted that, provided it can move relative to the adjustment component 1, this moving structure can also adopt a roller guide structure, a slider guide structure, or a guide groove structure, etc., to adapt to different equipment structural layouts.

[0028] Specifically, the positioning component 3 is disposed between the adjustment component 1 and the motion avoidance component 2. The positioning component 3 includes mutually cooperating spherical positioning elements. Further, the spherical positioning elements include a first spherical positioning element disposed on the adjustment component 1 and a second spherical positioning element disposed on the motion avoidance component 2. When the motion avoidance component 2 moves back to its working position, the two spherical positioning elements contact each other and form a positioning relationship. Because spherical contact can automatically correct minor assembly deviations during the contact process, the contact position stably falls within the predetermined area, thus facilitating a stable and repeatable positioning effect. By adopting a spherical positioning structure, a relatively consistent positioning position can be maintained even after multiple movements and resets of the motion avoidance component 2, thereby reducing the need for readjustment after reset.

[0029] Furthermore, the spherical positioning component is made of high-hardness alloy steel and is installed as an insert on the adjusting assembly 1 and the motion avoidance assembly 2. Alloy steel has high hardness and wear resistance, which reduces wear on the contact surface during repeated contact positioning processes, thereby maintaining positioning stability. By using a material with high hardness, contact deformation can be reduced during long-term use, ensuring stable positioning accuracy.

[0030] Furthermore, a positioning insert 13 can be provided on the linkage slide rod 12. The positioning insert 13 can also be made of alloy steel and installed on the linkage slide rod 12 by embedding. By providing the positioning insert 13, a stable contact relationship can be formed between the linkage slide rod 12 and the positioning component 3, thereby further improving the reliability of repeated positioning. It should be noted that, in addition to alloy steel, the positioning insert 13 can also be made of heat-treated tool steel, stainless steel, or hard alloy material. As long as it can provide high wear resistance and structural strength, it can be used as an alternative.

[0031] Specifically, the locking assembly 4 is used to lock the linkage slide bar 12. After the position adjustment is completed, the locking assembly 4 fixes the linkage slide bar 12 in the current adjustment position, so that the linkage slide bar 12 remains stable during subsequent use. With this setting, after the equipment completes the initial adjustment, the adjustment result can be kept stable, so that no precision adjustment is required again during multiple resets.

[0032] Furthermore, the locking assembly 4 may include a fixed locking block and an eccentric handle mounted on the fixed locking block. By rotating the eccentric handle, the fixed locking block can clamp the linkage slide rod 12, thereby achieving rapid locking. The eccentric structure can generate a large clamping force during rotation, ensuring the linkage slide rod 12 is stably fixed. It is also easy to operate, allowing maintenance personnel to quickly complete the locking operation after adjustment. It should be noted that, provided the linkage slide rod 12 is locked, the locking assembly 4 may also adopt a pressure plate locking structure, a bolt tightening structure, or a wedge locking structure, etc.

[0033] Furthermore, the high-precision repeatable positioning adjustment device in this application embodiment also includes a magnetic suction component 5. The magnetic suction component 5 is disposed between the adjustment component 1 and the motion avoidance component 2. The magnetic suction component 5 includes a magnet 51 and a suction frame 52 corresponding to the magnet 51. As shown in the figure, the magnet 51 is disposed on the adjustment component 1, and the suction frame 52 is disposed on the motion avoidance component 2. When the motion avoidance component 2 moves to the working position, the magnet 51 and the suction frame 52 generate an adsorption effect, thereby providing a stable adsorption force between the two components and keeping the positioning component 3 in stable contact. By setting the magnetic suction, a continuous pressing effect can be provided to the positioning component 3 after reset, thereby reducing the positioning deviation caused by vibration or small gaps.

[0034] Furthermore, a position sensor can be installed on the adjustment component 1 to detect the position signal of the motion avoidance component 2 when it resets. By collecting the detection signal from the position sensor, the reset state can be monitored, allowing for timely judgment when an abnormality occurs in the positioning state. By introducing a position sensor, the positioning state can be monitored during equipment operation, thereby improving overall operational reliability.

[0035] Furthermore, the base can be made of marble, which has good stability and a low coefficient of thermal expansion, and is often used as a stabilizing reference structure in precision equipment. By using a marble base, the impact of temperature changes or structural vibrations on the overall stability of the device can be reduced, thereby helping to maintain the relative positional stability between the adjusting component 1 and the positioning component 3.

[0036] In summary, the high-precision repeatable positioning adjustment device provided in this application embodiment achieves initial fine position adjustment by setting adjustment component 1 and fixes the adjustment result by using locking component 4. Simultaneously, structural avoidance during maintenance is achieved by motion avoidance component 2, and a stable positioning relationship is formed by the positioning component 3 composed of spherical positioning parts during reset. This allows the equipment to quickly return to its original working position after maintenance, reducing repetitive adjustment operations and improving maintenance efficiency. Furthermore, stable clamping force is provided by magnetic suction component 5, and status monitoring is performed by position sensor, further enhancing positioning stability and operational reliability. Without departing from the scope of the claims of this solution, the aforementioned fine-tuning mechanism 11, guiding mechanism, locking method, positioning material, and position sensor can all be equivalently replaced according to actual application requirements to adapt to different equipment structures and operating environments.

[0037] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0038] For ease of description, directional terms such as "front, back, up, down, left, right," "horizontal, vertical, horizontal," and "top, bottom" generally indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are used solely for the purpose of facilitating the description of this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the referred mechanism or element must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of this application. The directional terms "inner" and "outer" refer to the inner or outer contours relative to the components themselves. For example, if a device in the drawings is inverted, a device described as "above" or "on top of" other devices or structures will subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0039] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0040] Unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0041] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0042] It should also be noted that the terms "one embodiment," "another embodiment," and "embodiment" used in this specification refer to specific features, structures, or characteristics described in connection with that embodiment, which are included in at least one embodiment described in the general description of this application. The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure, or characteristic is described in connection with any embodiment, the intention is to suggest that implementing such a feature, structure, or characteristic in conjunction with other embodiments also falls within the scope of this application.

[0043] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0044] It should also be noted that the above are merely preferred embodiments of this application and do not limit the scope of patent protection of this application. Any equivalent structural or procedural changes made using the content of this application’s specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A high-precision repeatable positioning adjustment device, characterized in that, include: Base; Adjustment component (1), the adjustment component (1) includes a fine adjustment mechanism (11) and a linkage slide bar (12), the fine adjustment mechanism (11) is used to drive the linkage slide bar (12) to move; The motion avoidance component (2) is movable relative to the adjustment component (1); Positioning component (3), the positioning component (3) is disposed between the adjustment component (1) and the motion avoidance component (2), the positioning component (3) includes mutually cooperating spherical positioning elements; Locking assembly (4) is used to lock the linkage slide bar (12).

2. The high-precision repeatable positioning adjustment device according to claim 1, characterized in that, The fine-tuning mechanism (11) is configured as a micrometer; The micrometer is connected to the linkage slide (12) to drive the linkage slide (12) to move along the adjustment direction.

3. The high-precision repeatable positioning adjustment device according to claim 1, characterized in that, The linkage slide rod (12) is provided with a positioning insert (13).

4. The high-precision repeatable positioning adjustment device according to claim 3, characterized in that, The positioning insert (13) is made of alloy steel.

5. The high-precision repeatable positioning adjustment device according to claim 1, characterized in that, The spherical positioning component includes a first spherical positioning component disposed on the adjustment component (1) and a second spherical positioning component disposed on the motion avoidance component (2).

6. The high-precision repeatable positioning adjustment device according to claim 5, characterized in that, Both the first spherical positioning component and the second spherical positioning component are made of alloy steel.

7. The high-precision repeatable positioning adjustment device according to claim 1, characterized in that, It also includes a magnetic suction component (5), which is disposed between the adjustment component (1) and the motion avoidance component (2).

8. The high-precision repeatable positioning adjustment device according to claim 7, characterized in that, The magnetic suction assembly (5) includes a magnet (51) disposed on the adjustment assembly (1) and a suction bracket (52) disposed on the motion avoidance assembly (2).

9. The high-precision repeatable positioning adjustment device according to claim 1, characterized in that, The locking assembly (4) includes a fixed block and an eccentric handle disposed on the fixed block. The eccentric handle is used to drive the fixed block to clamp the linkage slide rod (12).

10. The high-precision repeatability positioning adjustment device according to claim 1, characterized in that, The adjustment component (1) is equipped with a position sensor for detecting the position state of the motion avoidance component (2) when it is reset.

Images