Ultraviolet irradiation device

Abstract

This invention provides an ultraviolet (UV) irradiation apparatus capable of irradiating a desired location of a photosensitive adhesive layer with UV light during the continuous fabrication of a long strip of laminated film. The UV irradiation apparatus comprises: a delivery unit for delivering a laminated film having a substrate and a photosensitive adhesive layer disposed on the substrate; a marking unit for marking the laminated film delivered by the delivery unit; an irradiation unit for identifying the markings attached to the laminated film and irradiating a given area of ​​the photosensitive adhesive layer with UV light according to the location of the identified markings; and a winding unit for winding the UV-irradiated laminated film.

Description

Technical Field

[0001] This invention relates to an ultraviolet irradiation device. Background Technology

[0002] When cutting or processing plate-shaped workpieces, such as semiconductor wafers, to make them thinner, adhesive tapes, often called cutting tapes or grinding tapes, are usually attached to the workpieces to improve their ease of handling. For example, UV-curable adhesive tapes (also known as UV tapes) are used, which have an adhesive layer that cures under ultraviolet light.

[0003] For example, a dicing / chip bonding film has been proposed, having an adhesive layer (2) on a support substrate (1) and a chip bonding adhesive layer (3) on the adhesive layer (2). The peelability of the interface between the adhesive layer (2) and the chip bonding adhesive layer (3) differs between the interface (A) corresponding to the workpiece bonding portion (3a) on the chip bonding adhesive layer (3) and the interface (B) corresponding to part or all of the other portions (3b), with the peelability of interface (A) being greater than that of interface (B) (see Patent Document 1). In one example of the technology proposed, the adhesive layer (2) is formed of a radiation-curing adhesive, and the adhesive layer (2a) corresponding to the workpiece bonding portion (3a) is irradiated with radiation (see paragraphs 0020 and 0035 of Patent Document 1). As a result, the interface between the adhesive layer (2a) and the adhesive layer (3a) has the property of being easily peeled off during pickup (see paragraph 0035 of Patent Document 1).

[0004] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2004-134689 Summary of the Invention

[0005] The problem that the invention aims to solve When continuously manufacturing long, laminated films such as diced / chip bonding films, it is required to be able to irradiate the desired location with ultraviolet light when irradiating a portion of the photosensitive adhesive layer with ultraviolet light.

[0006] The purpose of this invention is to provide an ultraviolet irradiation device that can irradiate ultraviolet light onto a desired location of a photosensitive adhesive layer during the continuous manufacturing of long strip laminated films.

[0007] Technical solutions for solving the problem In order to solve the above-mentioned problems, the inventors conducted in-depth research and found that the above-mentioned problems could be solved, thus completing the present invention with the following main points.

[0008] That is, the present invention includes the following.

[0009] [1] An ultraviolet irradiation device, comprising: A delivery unit that delivers a laminated film having a substrate and a photosensitive adhesive layer disposed on the substrate; A marking unit that marks the laminated film delivered by the delivery unit; An irradiation unit that identifies the mark attached to the laminated film and irradiates a given area of ​​the photosensitive adhesive layer with ultraviolet light according to the position of the identified mark; and A winding unit that winds up the laminated film that has been irradiated with the ultraviolet light.

[0010] [2] According to the ultraviolet irradiation device of [1], there is also an accumulation unit between the marking unit and the irradiation unit in the transport direction of the laminated film, the accumulation unit causing the laminated film to accumulate.

[0011] [3] According to the ultraviolet irradiation device of [1] or [2], there is a holding and conveying unit between the irradiation unit and the winding unit in the conveying direction of the laminated film, the holding and conveying unit holding the laminated film while conveying the laminated film.

[0012] [4] The ultraviolet irradiation apparatus according to any one of [1] to [3], wherein the irradiation unit comprises: an ultraviolet irradiation light source that emits the ultraviolet light; and an opening member having an opening for irradiating the ultraviolet light from the ultraviolet irradiation light source onto the given area of ​​the photosensitive adhesive layer.

[0013] [5] According to the ultraviolet irradiation device described in [4], wherein, The irradiation unit also has a mark recognition component for recognizing the mark. A notch is provided at the edge of the opening portion of the opening member. The mark recognition component identifies the mark through the notch.

[0014] [6] The ultraviolet irradiation device according to [4] or [5], wherein, The irradiation unit further includes a second opening member with an opening for irradiating a given area of ​​the photosensitive adhesive layer with ultraviolet light from the ultraviolet irradiation light source. The opening member and the second opening member are arranged such that the opening portion of the opening member overlaps with the opening portion of the second opening member.

[0015] [7] The ultraviolet irradiation apparatus according to any one of [4] to [6], wherein the irradiation unit further comprises a light-shielding member capable of blocking the ultraviolet rays from irradiating the given area of ​​the photosensitive adhesive layer through the opening of the opening member.

[0016] [8] According to the ultraviolet irradiation device of [7], the light-shielding member has a plate-shaped member, and by rotating the plate-shaped member about the thickness direction of the plate-shaped member as a rotation axis, the ultraviolet light can be irradiated and shaded to the given area of ​​the photosensitive adhesive layer.

[0017] [9] The ultraviolet irradiation device according to [1], wherein the ultraviolet irradiation device further comprises: A first tension adjusting unit adjusts the tension of the laminated film between the delivery unit and the marking unit in the conveying direction of the laminated film; and The second tension adjustment unit adjusts the tension of the film between the irradiation unit and the winding unit in the conveying direction of the laminated film.

[0018]

[10] The ultraviolet irradiation device according to any one of [1] to [9], wherein the laminated film is a cut film.

[0019]

[11] The ultraviolet irradiation apparatus according to any one of [1] to [9], wherein the laminated film is a dicing / chip bonding film, the dicing / chip bonding film having in sequence the substrate, the photosensitive adhesive layer, a plurality of chip bonding layers disposed separately on the photosensitive adhesive layer, and a release film.

[0020]

[12] According to the ultraviolet irradiation device of

[11] , the marking unit has an identification member for identifying the chip bonding layer, and the marking unit marks the laminated film according to the position of the chip bonding layer identified by the identification member.

[0021] Invention Effects According to the present invention, an ultraviolet irradiation device is provided that can irradiate a desired location of a photosensitive adhesive layer with ultraviolet light during the continuous fabrication of a long strip of laminated film. Attached Figure Description

[0022] Figure 1 This is a schematic side view of an example of an ultraviolet irradiation device.

[0023] Figure 2 yes Figure 1 A schematic top view of the ultraviolet irradiation device.

[0024] Figure 3 This is a schematic cross-sectional view of an example of a laminated membrane.

[0025] Figure 4 This is a top view of an example of an open component.

[0026] Figure 5 This is a top view of an example of a second opening component.

[0027] Figure 6 This is a top view of an example of a shielding component.

[0028] Figure 7 This is a schematic side view of another example of an ultraviolet irradiation device.

[0029] Figure 8 yes Figure 7 A schematic top view of the ultraviolet irradiation device.

[0030] Figure 9 This is a schematic cross-sectional view of another example of a laminated membrane.

[0031] Figure 10 It is used for explanation Figure 9 A diagram of a multilayered membrane.

[0032] Figure 11 This is a schematic side view of another example of an ultraviolet irradiation device. Detailed Implementation

[0033] (Ultraviolet irradiation device and ultraviolet irradiation method) The ultraviolet irradiation device of the present invention includes a delivery unit, a marking unit, an irradiation unit, and a winding unit.

[0034] The ultraviolet irradiation device may also include an accumulation unit, a holding and conveying unit, a first tension adjustment unit, a second tension adjustment unit, and a removal unit.

[0035] The ultraviolet irradiation method of the present invention includes a feeding step, a marking step, an irradiation step, and a winding step.

[0036] The ultraviolet irradiation method can also include accumulation process, holding and conveying process, first tension adjustment process, second tension adjustment process, removal process, etc.

[0037] <Delivery Unit and Delivery Process> The delivery unit is the unit that delivers the laminated film.

[0038] The delivery process is the process of delivering the laminated film.

[0039] The laminated film has a substrate and a photosensitive adhesive layer.

[0040] A photosensitive adhesive layer is applied to the substrate.

[0041] Laminated films are, for example, cut films.

[0042] Laminated films are, for example, dicing / chip bonding films.

[0043] In the case where the laminated film is a dicing / chip bonding film, the laminated film also has multiple chip bonding layers and a release film.

[0044] Multiple chip bonding layers are disposed separately on a photosensitive adhesive layer. These multiple chip bonding layers are arranged, for example, along the length direction (transport direction) in a laminated film.

[0045] Details about laminated films will be described later.

[0046] The laminated film is marked, the mark is identified, and ultraviolet light is irradiated onto the photosensitive adhesive layer according to the position of the mark, thereby enabling ultraviolet light to be irradiated onto the desired position of the photosensitive adhesive layer.

[0047] The feeding unit may include, for example, a feeding roller for feeding out laminated films, and a drive device (e.g., a motor) for rotating the feeding roller.

[0048] In the feeding process, for example, the laminated film is fed out from the feeding roller.

[0049] There are no particular restrictions on the diameter of the feed roller, but it is preferably 70mm to 80mm.

[0050] The feed roller is, for example, an air shaft. The air shaft has a roller body and protrusions (claws) disposed on the outer peripheral surface of the roller body. When air is forced into the air shaft, the protrusions protrude from the outer peripheral surface. The protruding protrusions press against the inner surface of the film roller core. Thus, the film roller is fixed in place.

[0051] The delivery unit may have a membrane depletion detection component that detects when the entire length of the laminated film has been delivered from the delivery roller and when there is no laminated film on the delivery roller. There are no particular limitations on the membrane depletion detection component; for example, a sensor (e.g., an optical sensor) may be used.

[0052] The feeding unit may have a rotation suppression member to suppress the rotation of the feeding roller. Examples of rotation suppression members include magnetic powder brakes, electromagnetic brakes, and disc brakes.

[0053] The feeding unit may have a tension adjusting member for adjusting the tension of the laminated film fed from the feeding roller. For example, a tension adjusting roller capable of moving in a direction orthogonal to the rotation axis can be considered as a tension adjusting member.

[0054] <Marking Unit and Marking Process> The marking unit is the unit that marks the laminated film delivered by the delivery unit.

[0055] The marking process is the process of marking the laminated film that is sent out in the delivery process.

[0056] The marking can be attached to the substrate of the laminate, the photosensitive adhesive layer of the laminate, or the release film of the laminate.

[0057] The marking unit, for example, has an inkjet head. The marking unit, for example, ejects ink from the inkjet head to coat the laminated film with ink. Thus, the laminated film is marked.

[0058] The marking process includes, for example, the step of coating the laminated film with ink by ejecting ink from an inkjet head. This marks the laminated film.

[0059] There is no particular limitation on the number of inkjet heads that a marking unit may have. For example, a marking unit may have multiple inkjet heads, each of which ejects ink to coat the laminated film.

[0060] The marking unit, for example, marks the laminated film at a given interval.

[0061] When the laminate is a dicing / chip bonding film, the marking unit may have an identification member that identifies the chip bonding layer. In this case, the marking unit marks the laminate according to the location of the chip bonding layer identified by the identification member.

[0062] When the laminate is a dicing / die bonding laminate, the marking process can include an identification process for recognizing the die bonding layer. In this case, the marking process marks the laminate based on the location of the die bonding layer identified in the identification process.

[0063] Identify the location of components, such as the ends of the chip bonding layer.

[0064] As a recognition component, a camera can be cited as an example.

[0065] The marking unit may have a drying component that dries the markings attached to the laminated film.

[0066] The marking process can include a drying process to dry the markings attached to the laminated film.

[0067] As a drying component, a blower can be cited as an example.

[0068] As a drying process, blowing air can be cited as an example.

[0069] There are no particular restrictions on the temperature of the air in the blower; for example, 20°C to 40°C can be used.

[0070] By blowing air onto the markings attached to the laminated film to dry the markings, it is possible to prevent the irradiation unit from being exposed to the solvent contained in the markings, which could lead to the deterioration of the ultraviolet irradiation light source.

[0071] <Irradiation Unit and Irradiation Process> An irradiation unit is a unit that identifies a mark attached to a laminate and irradiates a given area of ​​a photosensitive adhesive layer with ultraviolet light according to the location of the identified mark.

[0072] The irradiation process is the process of identifying the markings attached to the laminate and irradiating a given area of ​​the photosensitive adhesive layer with ultraviolet light according to the location of the identified markings.

[0073] As a given region, a circular region can be cited as an example.

[0074] In the case where the given area is circular, its diameter can be, for example, 200mm to 350mm.

[0075] When the laminated film is a dicing film or a dicing / chip bonding film, the given region is a region that is related to the size of the wafer and is slightly larger than the size of the wafer. In this regard, the given region, for example, can be a circle with a diameter of 205 mm to 220 mm for an 8-inch wafer, and a circle with a diameter of 305 mm to 320 mm for a 12-inch wafer.

[0076] The irradiation unit may include, for example, an ultraviolet (UV) light source. Examples of UV light sources include high-pressure mercury lamps, low-pressure mercury lamps, and halogen lamps.

[0077] The illumination unit may be, for example, a mark recognition component having an identification mark. A camera may be an example of such a mark recognition component.

[0078] Irradiation processes, such as mark recognition processing with identification markers.

[0079] The irradiation unit, for example, irradiates a given area of ​​the photosensitive adhesive layer with ultraviolet light based on the location of the mark identified by the mark recognition component.

[0080] In the irradiation process, for example, a given area of ​​the photosensitive adhesive layer is irradiated with ultraviolet light based on the location of a mark identified through a mark recognition process.

[0081] The irradiation unit, for example, has an opening member. The opening member functions as a shielding member. An opening is provided in the opening member for irradiating a given area of ​​the photosensitive adhesive layer with ultraviolet light from the ultraviolet irradiation light source. The shape of the opening of the opening member is, for example, circular. A notch may also be provided in the opening.

[0082] An opening component may be provided, for example, between an ultraviolet light source and a laminated film.

[0083] The marker recognition component preferably identifies the marker through a notch in the opening. This enables marker recognition with high positional accuracy.

[0084] The irradiation unit, for example, has a second opening member. The second opening member functions as a shielding member. An opening is provided in the second opening member for irradiating a given area of ​​the photosensitive adhesive layer with ultraviolet light from the ultraviolet irradiation light source. The shape of the opening of the second opening member is, for example, circular.

[0085] When the irradiation unit has an opening member and a second opening member, the opening member and the second opening member are arranged such that the opening portion of the opening member overlaps with the opening portion of the second opening member.

[0086] Alternatively, a second opening may be provided adjacent to the first opening in the second opening member. The second opening member may be circular, for example, with an opening size of, for example, a diameter of 3 mm to 10 mm. The marking identification member preferably identifies the marking through the second opening.

[0087] The marker recognition component identifies markers through a notch and a second opening, thereby enabling marker recognition with higher positional accuracy.

[0088] The irradiation unit, for example, has a light-shielding member capable of blocking ultraviolet light from irradiating a given area of ​​the photosensitive adhesive layer through an opening in the opening member. The light-shielding member, for example, is a plate-shaped member. By rotating the plate-shaped member about its thickness direction as an axis of rotation, both irradiation and light blocking of ultraviolet light onto the given area of ​​the photosensitive adhesive layer are possible. Rotating the plate-shaped member allows for faster movement than sliding it, thus accelerating the switching between irradiation (ultraviolet light transmission) and blocking.

[0089] The irradiation unit may have a cooling component. Cooling can be water-cooled or air-cooled by a fan. The cooling component cools the high-temperature parts of the irradiation unit.

[0090] For example, an ultraviolet irradiation dose of 1500 J / m² can be used to irradiate a given area of ​​the photosensitive adhesive layer. 2 ~4000J / m 2 .

[0091] <Winding unit and winding process> A winding unit is a unit that winds up a laminated film that has been irradiated with ultraviolet light.

[0092] The winding process is the process of winding up a laminated film that has been irradiated with ultraviolet light.

[0093] The winding unit, for example, has a winding roller.

[0094] The winding process is performed, for example, by winding the laminated film onto a winding roller.

[0095] There are no particular restrictions on the diameter of the take-up roller, but it is preferably 70mm to 80mm.

[0096] The take-up roller is, for example, an air shaft.

[0097] The take-up unit may have a rotation suppression member that suppresses the rotation of the take-up roller. Examples of rotation suppression members include magnetic powder brakes, electromagnetic brakes, and disc brakes.

[0098] The take-up roller can be rotated by a speed control motor that can change the rotation speed.

[0099] The take-up roller may be equipped with a magnetic powder clutch, which is used to control the tension of the laminated film being taken up.

[0100] <Accumulation Units and Accumulation Processes> An accumulation unit is a unit that accumulates the laminated film. In the ultraviolet irradiation device, an accumulation unit is located between the marking unit in the conveying direction of the laminated film and the irradiation unit.

[0101] The accumulation process is the process of accumulating the laminated film. The accumulation process is performed between the marking process and the irradiation process.

[0102] An accumulator is a unit that is called an accumulator.

[0103] By incorporating an accumulation unit into the ultraviolet irradiation device, the transport of the laminated film located in the irradiation unit can be stopped during the irradiation of a given area of ​​the photosensitive adhesive layer with ultraviolet light. Thus, the photosensitive adhesive layer can be irradiated with ultraviolet light at the desired irradiation dose.

[0104] By incorporating an accumulation step into the ultraviolet irradiation process, the delivery of the laminated film to the irradiation process can be stopped during the irradiation of a given area of ​​the photosensitive adhesive layer with ultraviolet light. Thus, the photosensitive adhesive layer can be irradiated with ultraviolet light at the desired irradiation dose.

[0105] The accumulation unit, for example, has two guide rollers and a movable roller disposed between the two guide rollers in the conveying direction of the laminated film. The laminated film is accumulated by moving the movable roller. For example, the two guide rollers are in contact with the laminated film on the upper side of their outer peripheral surfaces and on the movable roller side, while the lower half of the movable roller's outer peripheral surface is in contact with the laminated film. At this time, the movable roller moves downwards, thereby accumulating the laminated film in the accumulation unit.

[0106] There are no particular restrictions on the diameter of the guide roller and the movable roller, but for example, it is 50mm to 150mm, preferably 90mm to 110mm.

[0107] <Controlling the conveying unit and the controlling the conveying process> The holding and conveying unit is a unit that holds and conveys the laminated film simultaneously. In the ultraviolet irradiation device, the holding and conveying unit is located between the irradiation unit and the winding unit in the conveying direction of the laminated film.

[0108] The holding and conveying process is a process in which the laminated film is held and conveyed simultaneously. The holding and conveying process takes place between the irradiation process and the winding process.

[0109] The holding and conveying unit is the so-called feeding clamping mechanism.

[0110] The holding and conveying unit may have fixed clamps and movable clamps. The fixed clamps cannot move. The movable clamps can move along the conveying direction.

[0111] The material of the clamping part in the fixed clamping member and the movable clamping member that contacts the laminated film is, for example, silicone rubber.

[0112] Compared to conveying by rollers, conveying by a holding conveyor unit offers superior conveying accuracy.

[0113] Therefore, by equipping the ultraviolet irradiation device with a holding and conveying unit, it is possible to irradiate the desired area with high positional accuracy when irradiating a given area of ​​the photosensitive adhesive layer with ultraviolet light.

[0114] Furthermore, by incorporating a holding and conveying process into the ultraviolet irradiation method, it is possible to irradiate the desired area with high positional accuracy when irradiating a given area of ​​the photosensitive adhesive layer with ultraviolet light.

[0115] <First tension adjustment unit and first tension adjustment process> The first tension adjustment unit is a unit for adjusting the tension of the laminated film. The ultraviolet irradiation device has a first tension adjustment unit between the delivery unit and the marking unit in the conveying direction of the laminated film.

[0116] The first tension adjustment process is the process of adjusting the tension of the laminated film. The first tension adjustment process is performed between the feeding process and the marking process.

[0117] The tension of the laminated film is adjusted, for example, by a tension regulator (dancer). The tension regulator has, for example, two guide rollers and a movable roller positioned between the two guide rollers in the conveying direction of the laminated film. The movable roller applies pressure to the laminated film, thereby adjusting its tension. For example, the two guide rollers are in contact with the laminated film on their upper outer circumferential surfaces and the movable roller side, while the lower half of the movable roller's outer circumferential surface is in contact with the laminated film. At this time, the movable roller applies downward pressure to the laminated film, thereby adjusting its tension. The pressure applied to the laminated film by the movable roller can be achieved, for example, by adjusting the weight of the movable roller itself. Other pressure methods include, for example, pressure applied by air pressure using a movable roller connected to a cylinder, or pressure applied by the reaction force of a spring using a movable roller connected to a spring. It should be noted that the feed speed of the feed unit can also be changed in accordance with the movement of the movable roller (e.g., in the vertical direction), thereby causing the movable roller to move toward the neutral position for correction.

[0118] There are no particular restrictions on the diameter of the guide roller and the movable roller, but for example, it is 50mm to 150mm, preferably 90mm to 110mm.

[0119] <Second tension adjustment unit and second tension adjustment process> The second tension adjustment unit is a unit for adjusting the tension of the laminated film. The ultraviolet irradiation device has a second tension adjustment unit between the irradiation unit and the winding unit in the conveying direction of the laminated film.

[0120] The second tension conditioning process is the process of adjusting the tension of the laminated film. This second tension conditioning process is performed between the irradiation process and the winding process.

[0121] The tension of the laminated film is adjusted, for example, by a tension regulator (dancer). The tension regulator has, for example, two guide rollers and a movable roller positioned between the two guide rollers in the conveying direction of the laminated film. The movable roller applies pressure to the laminated film, thereby adjusting its tension. For example, the two guide rollers are in contact with the laminated film on their upper outer circumferential surfaces and the movable roller side, while the lower half of the movable roller's outer circumferential surface is in contact with the laminated film. At this time, the movable roller applies downward pressure to the laminated film, thereby adjusting its tension. The pressure applied to the laminated film by the movable roller can be achieved, for example, by adjusting the weight of the movable roller itself. Other pressure methods include, for example, pressure applied by air pressure using a movable roller connected to a cylinder, or pressure applied by the reaction force of a spring using a movable roller connected to a spring. It should be noted that the winding speed of the winding unit can also be changed in accordance with the movement of the movable roller (e.g., in the vertical direction), thereby causing the movable roller to move toward the neutral position for correction.

[0122] There are no particular restrictions on the diameter of the guide roller and the movable roller, but for example, it is 50mm to 150mm, preferably 90mm to 110mm.

[0123] <Removal Unit and Removal Process> The removal unit is a unit that removes unwanted parts from the laminate before the ultraviolet-irradiated laminate is wound up by the winding unit.

[0124] The removal process is a process of removing unwanted parts from the laminated film before the ultraviolet-irradiated laminated film is wound up in the winding process.

[0125] The removal unit may have, for example, a separating roller and a take-up roller.

[0126] The removal process is carried out, for example, by using a separating roller to separate the unwanted parts from the laminated film and using a take-up roller to take them up.

[0127] Unwanted areas include, for example, the ends of the laminated film in the width direction.

[0128] The separating roller and the take-up roller can be rotated by speed control motors that can change their rotation speed.

[0129] The separating roller and the take-up roller may be equipped with a magnetic powder clutch, which is used to control the tension of the unwanted film being taken.

[0130] There are no particular restrictions on the diameter of the separating roller, but it is preferably 25mm to 50mm.

[0131] There are no particular restrictions on the diameter of the take-up roller, but it is preferably 70mm to 80mm.

[0132] The take-up roller is, for example, an air shaft.

[0133] <Other Units and Other Processes> Other examples of such units include splicing units and end position adjustment units.

[0134] Other processes include, for example, splicing and end position adjustment.

[0135] <<Assembly Units and Assembly Process>> A splicing unit is a unit that joins two laminated films together. For example, a support platform that supports two laminated films can be considered a splicing unit.

[0136] The splicing process is the process of joining two laminated films together. For example, the splicing process is performed by placing two laminated films on a support table and then joining them together on the support table. The splicing of two laminated films can be done mechanically or manually.

[0137] To prevent the laminated film from slipping, a rubber sheet can also be placed on the surface of the support platform.

[0138] For example, the ultraviolet irradiation device has a splicing unit between the delivery unit and the first tension adjustment unit in the conveying direction of the laminated film.

[0139] For example, in the ultraviolet irradiation method, the splicing process is carried out between the feeding process and the first tension adjustment process.

[0140] For example, when all the rolls of laminated film (first laminated film) fed from the delivery roller have been delivered and the laminated film needs to be replaced, other rolls of laminated film (second laminated film) are mounted on the delivery roller and delivered. Then, the ends of the first laminated film and the beginnings of the second laminated film are joined together on the support platform. Thus, the laminated film can be replenished without stopping the ultraviolet irradiation device.

[0141] <<End position adjustment unit and end position adjustment process>> The end position adjustment unit is a unit for adjusting the position of the ends of the laminated film. The end position adjustment unit may include, for example, an end position detection member. Examples of end position detection members include ultrasonic sensors and optical sensors with a projector and a receiver. It should be noted that the end of the laminated film is the end in the width direction of the laminated film.

[0142] The end position adjustment process is the process of adjusting the position of the ends of the laminated film.

[0143] The end position adjustment process is performed, for example, between the first tension adjustment process and the marking process.

[0144] The end position adjustment process is performed, for example, between the second tension adjustment process and the winding process.

[0145] For example, the ends of the laminated film are detected by an end position detection component, and the position of the ends of the laminated film is adjusted. The adjustment of the position of the ends of the laminated film is performed, for example, by moving the feed roller or the take-up roller along the direction of rotation.

[0146] <Laminated Film> The laminated film supplied to the ultraviolet irradiation device is described.

[0147] like Figure 3 As shown, one example of the laminated film 1000 is a laminated film having a substrate 1022 and a photosensitive adhesive layer 1021 laminated together. For example, a cut film can be cited as such a laminated film.

[0148] like Figure 9 and Figure 10As shown, another example of the laminated film 1000 is a laminated film having a release film 1011, a plurality of chip bonding layers 1012 disposed separately on the release film 1011, a photosensitive adhesive layer 1021, and a substrate 1022 in sequence. This laminated film is a dicing / chip bonding film.

[0149] Substrate 1022 serves as the strong matrix for the laminated film. Examples of its materials include, for instance, low-density polyethylene, linear polyethylene, medium-density polyethylene, high-density polyethylene, ultra-low-density polyethylene, random copolymer polypropylene, block copolymer polypropylene, homopolymer polypropylene, polybutene, polymethylpentene and other polyolefins, ethylene-vinyl acetate copolymers, ionomer resins, ethylene-(meth)acrylic acid copolymers, ethylene-(meth)acrylic acid (random, alternating) copolymers, ethylene-butene copolymers, ethylene-hexene copolymers, polyurethane, polyethylene terephthalate, polyethylene naphthalate and other polyesters, polycarbonate, polyimide, polyetheretherketone, polyimide, polyetherimide, polyamide, fully aromatic polyamide, polyphenylene sulfide, aromatic polyamide, glass, glass cloth, fluoropolymers, polyvinyl chloride, polyvinylidene chloride, cellulose resins, silicone resins, and metals (foil).

[0150] Furthermore, polymers such as cross-linked resins can be used as materials for the substrate 1022. The plastic film can be used without stretching, or a plastic film subjected to uniaxial or biaxial stretching treatment can be used as needed. By using a resin sheet that has been given heat-shrinkable properties through stretching treatment or the like, the bonding area between the photosensitive adhesive layer 1021 and the chip bonding layer is reduced by heat-shrinking the substrate after cutting, thereby facilitating the recycling of chip-shaped workpieces.

[0151] Regarding the surface of the substrate 1022, in order to improve the adhesion and retention with adjacent layers, conventional surface treatments can be performed, such as chemical or physical treatments such as chromic acid treatment, ozone exposure, flame exposure, high voltage electric shock exposure, ionization radiation treatment, etc., or coating treatments using a primer (such as the adhesive substance described later).

[0152] The substrate 1022 can be appropriately selected from the same or different substrates, and can use a mixture of multiple substrates as needed. Furthermore, to impart antistatic properties to the substrate 1022, a vapor-deposited layer containing a conductive material with a thickness of approximately 30 Å to 500 Å, including metals, alloys, and their oxides, can be formed on the substrate. The substrate 1022 can be a single layer or a multilayer of two or more materials. It should be noted that the substrate 1022 preferably allows ultraviolet light to pass through.

[0153] There are no particular restrictions on the thickness of the substrate 1022, which can be appropriately determined, but it is generally above 5μm and below 200μm.

[0154] There are no particular limitations on the adhesive used to form the photosensitive adhesive layer 1021, as long as it is photosensitive to ultraviolet light. For example, the photosensitive adhesive layer 1021 can be easily reduced in adhesion by increasing its degree of cross-linking under ultraviolet light irradiation. Therefore, by curing the photosensitive adhesive layer 1021 correspondingly to the workpiece bonding portion, a photosensitive adhesive layer 1021 with significantly reduced adhesion can be easily formed. Since the chip bonding layer is bonded to the cured, reduced-adhesion photosensitive adhesive layer 1021, the interface between the photosensitive adhesive layer 1021 and the chip bonding layer has the property of being easily peeled off upon pickup. On the other hand, the portion not irradiated with ultraviolet light has sufficient adhesion.

[0155] The thickness of the photosensitive adhesive layer 1021 is not particularly limited, but from the perspective of preventing defects on the chip cutting surface and ensuring the chip bonding layer is fixed, it is preferably 1 μm or more and 50 μm or less, more preferably 2 μm or more and 30 μm or less, and particularly preferably 5 μm or more and 25 μm or less.

[0156] When a workpiece (semiconductor wafer, etc.) pressed onto the chip bonding layer is cut into a chip shape, the chip bonding layer 1012 is closely fitted to the workpiece and supported. When the chip-shaped workpiece (semiconductor chip, etc.) is installed as a cut piece, the chip bonding layer 1012 functions as an adhesive layer to fix the chip-shaped workpiece to the semiconductor element (substrate, chip, etc.).

[0157] The chip bonding layer 1012 can be formed by processing the chip bonding film into a given shape (e.g., circular). The chip bonding film can be formed using a conventional chip adhesive. As a chip adhesive, it is preferable to use a chip adhesive that can be made into a sheet form. As a specific chip adhesive, for example, a chip adhesive containing a thermoplastic resin or a thermosetting resin is preferably used. The chip adhesive can be used alone or in combination of two or more. In addition, the chip bonding film is preferably able to be bonded to workpieces such as semiconductor wafers and dicing rings at a temperature below 70°C. It is further preferable that it can be bonded at room temperature.

[0158] Examples of thermoplastic resins (thermoplastic chip adhesives) used as chip adhesives include saturated polyester resins, thermoplastic polyurethane resins, amide resins (nylon resins), and imide resins. Examples of thermosetting resins (thermosetting chip adhesives) include epoxy resins, unsaturated polyester resins, thermosetting acrylic resins, and phenolic resins. Thermosetting resins obtained through desolvation, sheet forming, and B-stage modification are preferred. It should be noted that mixtures of these thermosetting and thermoplastic resins can also be used in the B-stage modified state. Furthermore, in this invention, silicone-based, rubber-based, urethane-based, imide-based, and acrylic resins with high glass transition temperatures can also be used as chip adhesives.

[0159] The thickness of the chip bonding layer 1012 is not particularly limited, but for example, it is 5 μm or more and 100 μm or less, preferably 10 μm or more and 50 μm or less.

[0160] The release film 1011 functions as a protective material to protect the die bonding layer 1012 until it is usable. The release film 1011 acts as a support substrate during the manufacturing process of the dicing / die bonding film. The release film 1011 is typically peeled off when a workpiece is bonded to the die bonding layer of the dicing / die bonding film.

[0161] Examples of release films 1011 include plastic films obtained by coating the surface of a release agent such as polyethylene, polypropylene, fluorinated release agent, or long-chain alkyl acrylate release agent.

[0162] The thickness of the release film 1011 is not particularly limited, but for example, it is 5 μm or more and 100 μm or less, preferably 10 μm or more and 50 μm or less.

[0163] <Implementation Method of Ultraviolet Irradiation Device> The embodiments of the ultraviolet irradiation device are described using the accompanying drawings.

[0164] In addition, while describing the implementation of the ultraviolet irradiation device, the ultraviolet irradiation method will also be described.

[0165] Figure 1 The ultraviolet irradiation device 1 shown includes a delivery unit 2, a marking unit 3, an irradiation unit 4, a winding unit 5, an accumulation unit 6, a holding and conveying unit 7, a first tension adjustment unit 8, and a second tension adjustment unit 9. Furthermore, the ultraviolet irradiation device 1 includes end position adjustment members 101 and 102 and a support platform 103.

[0166] exist Figure 1In the ultraviolet irradiation device 1 shown, the laminated film is conveyed in the direction of the arrow (solid line). It should be noted that the tip of the arrow is designated as the downstream side, and the root of the arrow is designated as the upstream side.

[0167] Figure 1 It is a side view.

[0168] It should be noted that, in Figure 1 The details of the structure of the laminated membrane are omitted.

[0169] Figure 2 yes Figure 1 A top view of the ultraviolet irradiation device 1. It should be noted that... Figure 2 The delivery unit 2, winding unit 5, first tension adjustment unit 8, second tension adjustment unit 9, end position adjustment components 101 and 102, and support platform 103 are omitted. Additionally, in... Figure 2 In the middle, the following was omitted. Figure 1 The ultraviolet irradiation light source 41 and the plate-shaped member 45 in the irradiation unit 4 shown.

[0170] To be provided Figure 1 The laminated film of the ultraviolet irradiation device 1 shown is illustrated in the figure. Figure 3 . Figure 3 This is a cross-sectional view of the laminated film 1000. The laminated film 1000 has a substrate 1022 and a photosensitive adhesive layer 1021.

[0171] The delivery unit 2 has a delivery roller 21. The delivery roller 21 is rotatable. The delivery roller 21 is rotated, for example, by a drive device (e.g., a motor, not shown). When the laminated film is irradiated with ultraviolet light, the rolled laminated film 1000 wound on a cylindrical core is mounted on the delivery roller 21. Specifically, the delivery roller 21, which serves as an air shaft, is inserted into the cylindrical core on which the laminated film 1000 is wound, and protrusions are caused by the induction of air. The protruding protrusions press against the inner surface of the core, thereby fixing the rolled laminated film 1000.

[0172] The marking unit 3 has inkjet heads 31 and 32. The marking unit 3 ejects ink from the inkjet heads 31 and 32 respectively to coat the laminate 1000 with ink. Thus, marking is applied to the laminate 1000. It should be noted that there may be only one inkjet head.

[0173] The irradiation unit 4 identifies a mark attached to the laminate 1000 and irradiates a given area of ​​the photosensitive adhesive layer 1021 with ultraviolet light according to the position of the identified mark. The irradiation unit 4 has an ultraviolet light source 41, an opening member 42, a mark identification member 43, a second opening member 44, and a plate-shaped member 45. Figure 4 This is a top view of the opening member 42. (Example) Figure 4As shown, an opening 42A is provided in the opening member 42 for irradiating a given area of ​​the photosensitive adhesive layer 1021 with ultraviolet light from the ultraviolet irradiation light source 41. A notch 42B is provided in the opening 42A of the opening member 42. It should be noted that... Figure 2 In the middle, the gap hidden deep in the marker identification component 43 is represented by a dashed line. Figure 5 This is a top view of the second opening member 44. (Example) Figure 5 As shown, the second opening member 44 is provided with an opening 44A for irradiating a given area of ​​the photosensitive adhesive layer 1021 with ultraviolet light from the ultraviolet irradiation light source 41. A second opening 44B is provided near the opening 44A in the second opening member 44. The opening member 42 and the second opening member 44 are arranged such that the opening 42A of the opening member 42 overlaps with the opening 44A of the second opening member 44. The mark recognition member 43 identifies the mark through the notch 42B and the second opening 44B. Figure 6 This is a top view of the plate-like member 45. To illustrate the switching between illumination and shading, in... Figure 6 The opening 42A of the opening member 42 is represented by a dashed line. For example... Figure 6 As shown, the plate-shaped member 45 is cross-shaped. A rotation axis 45A is located at the center of the plate-shaped member 45. By rotating the plate-shaped member 45 about its thickness direction as the rotation axis, illumination and shielding can be switched.

[0174] The take-up unit 5 has a take-up roller 51. The take-up roller 51 is rotatable. The take-up roller 51 is rotated, for example, by a drive device (e.g., a motor, not shown).

[0175] The accumulation unit 6 has two guide rollers 61 and 62, and a movable roller 63 disposed between the two guide rollers 61 and 62 in the conveying direction of the laminated film 1000. The laminated film 1000 is accumulated by moving the movable roller 63.

[0176] The holding and conveying unit 7 has a fixed clamping member 71 and a movable clamping member 72. The fixed clamping member 71 cannot move. The movable clamping member 72 can move along the conveying direction.

[0177] The first tension adjustment unit 8 has two guide rollers 81 and 82, and a movable roller 83 disposed between the two guide rollers 81 and 82 in the conveying direction of the laminated film 1000. The movable roller 83 applies pressure to the laminated film 1000, thereby adjusting the tension of the laminated film 1000.

[0178] The second tension adjustment unit 9 has two guide rollers 91 and 92, and a movable roller 93 disposed between the two guide rollers 91 and 92 in the conveying direction of the laminated film 1000. The movable roller 93 applies pressure to the laminated film 1000, thereby adjusting the tension of the laminated film 1000.

[0179] There are no particular restrictions on the material of the feed roller 21, take-up roller 51, guide rollers 61, 62, 81, 82, 91, 92, and movable rollers 63, 83, 93, but stainless steel (SUS) is an example.

[0180] These rollers are typically cylindrical in shape, and the length of the roller (the length in the width direction of the laminate 1000) is usually longer than the width of the laminate 1000.

[0181] The support platform 103 is used when splicing two laminated films 1000.

[0182] The end position adjustment components 101 and 102 are used to adjust the position of the ends of the laminated film 1000. The end position adjustment components 101 and 102 are ultrasonic sensors.

[0183] The following uses Figure 1 as well as Figure 2 The ultraviolet irradiation method of the ultraviolet irradiation device 1 shown will be described.

[0184] The laminated film 1000 is fed out from the feed roller 21. A cross-sectional view of the fed laminated film 1000 is shown below. Figure 3 .

[0185] The laminated film 1000, fed from the delivery roller 21, is conveyed to the marking unit 3 while its tension is adjusted by the first tension adjusting unit 8. The first tension adjusting unit 8 adjusts the tension of the laminated film 1000 using two guide rollers 81 and 82 and a movable roller 83. Specifically, the movable roller 83 applies pressure to the laminated film 1000, thereby adjusting the tension of the laminated film 1000.

[0186] The marking unit 3 ejects ink from the inkjet heads 31 and 32 to coat the laminate 1000 with ink, thereby marking the laminate 1000.

[0187] The marked laminated film 1000 moves downstream in the transport direction, passes through the accumulation unit 6, and reaches the irradiation unit 4. In the irradiation unit 4, the ultraviolet irradiation light source 41 is always lit, but the irradiation and shielding of the laminated film 1000 by the light-shielding member can be switched.

[0188] When the marked laminated film 1000 arrives at the irradiation unit 4, the mark recognition member 43 recognizes the mark. Then, the accumulation unit 6 accumulates the laminated film 1000, stopping the transport of the laminated film 1000 located in the irradiation unit 4. Specifically, the movable roller 63 moves downward, thereby accumulating the laminated film 1000. On the other hand, the laminated film 1000 is clamped by the fixing clamp 71 of the holding transport unit 7. Thus, the transport of the laminated film 1000 located in the irradiation unit 4 stops. Before the transport of the laminated film 1000 stops, a portion of the plate-shaped member 45 is positioned in the path of ultraviolet light, thereby blocking the path of ultraviolet light. Then, the plate-shaped member 45 rotates, opening the path of ultraviolet light, and ultraviolet light is irradiated onto the laminated film 1000 from the ultraviolet irradiation source 41. When the necessary amount of ultraviolet light is irradiated, the plate-shaped member 45 rotates, and a portion of the plate-shaped member 45 is positioned in the path of ultraviolet light, thereby blocking the path of ultraviolet light. Thus, the irradiation of a given area of ​​the photosensitive adhesive layer 1021 of the laminate 1000 with ultraviolet light ends.

[0189] When the irradiation of a given area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 with ultraviolet light ends, the accumulation of the laminated film 1000 by the accumulation unit 6 ends, and the fixed clamping member 71 of the holding and conveying unit 7 no longer clamps the laminated film 1000. Then, the movable clamping member 72 of the holding and conveying unit 7 clamps the laminated film 1000, and the movable clamping member 72 moves downstream in the conveying direction. As a result, the laminated film 1000 located in the irradiation unit 4, which had stopped moving, starts moving again.

[0190] Whenever the marked laminate 1000 arrives at the irradiation unit 4, the transport of the laminate 1000 stops, ultraviolet irradiation is applied to a given area of ​​the photosensitive adhesive layer 1021 of the laminate 1000, and the transport of the laminate 1000 located in the irradiation unit 4 starts again, and this process is repeated as a series of steps.

[0191] The laminated film 1000, which begins to move again, is conveyed to the winding unit 5 while its tension is adjusted by the second tension adjusting unit 9. The second tension adjusting unit 9 uses two guide rollers 91 and 92 and a movable roller 93 to adjust the tension of the laminated film 1000. Specifically, the movable roller 93 applies pressure to the laminated film 1000, thereby adjusting the tension of the laminated film 1000.

[0192] The laminated film 1000 wound by the winding roller 51 of the winding unit 5 becomes a roll.

[0193] Other embodiments of the ultraviolet irradiation device are described using the accompanying drawings.

[0194] In addition, while describing the implementation of the ultraviolet irradiation device, the ultraviolet irradiation method will also be described.

[0195] Figure 7 The ultraviolet irradiation device 1 shown includes a delivery unit 2, a marking unit 3, an irradiation unit 4, a winding unit 5, an accumulation unit 6, a holding and conveying unit 7, a first tension adjustment unit 8, and a second tension adjustment unit 9. Furthermore, the ultraviolet irradiation device 1 includes end position adjustment members 101 and 102 and a support platform 103.

[0196] exist Figure 7 In the ultraviolet irradiation device 1 shown, the laminated film is conveyed in the direction of the arrow (solid line). It should be noted that the tip of the arrow is designated as the downstream side, and the root of the arrow is designated as the upstream side.

[0197] Figure 7 It is a side view.

[0198] It should be noted that, in Figure 7 The details of the structure of the laminated membrane are omitted.

[0199] Figure 8 yes Figure 7 A top view of the ultraviolet irradiation device 1. It should be noted that... Figure 8 The delivery unit 2, winding unit 5, first tension adjustment unit 8, second tension adjustment unit 9, end position adjustment components 101 and 102, and support platform 103 are omitted. Additionally, in... Figure 8 In the middle, the following was omitted. Figure 7 The ultraviolet irradiation light source 41 and the plate-shaped member 45 in the irradiation unit 4 shown.

[0200] To be provided Figure 7 The laminated film of the ultraviolet irradiation device 1 shown is illustrated in the figure. Figure 9 as well as Figure 10 . Figure 9 This is a cross-sectional view of the laminated membrane 1000. Figure 10 yes Figure 9 The image shows a top view of the laminated film 1000. However, for ease of understanding, in... Figure 10 The photosensitive adhesive layer 1021 and the substrate 1022 are not shown in the diagram. It should be noted that in... Figure 9 Only one chip bonding layer 1012 is described in the document, but... Figure 10 The document describes three chip bonding layers 1012.

[0201] Figure 9 The laminated film 1000 shown is a laminated film having, in sequence, a release film 1011, a plurality of chip bonding layers 1012 disposed separately on the release film 1011, a photosensitive adhesive layer 1021, and a substrate 1022. This laminated film is a dicing / chip bonding film.

[0202] exist Figure 7The structure of the ultraviolet irradiation device 1 shown, including the delivery unit 2, irradiation unit 4, winding unit 5, storage unit 6, holding and conveying unit 7, first tension adjustment unit 8, second tension adjustment unit 9, end position adjustment components 101 and 102, and support platform 103, is similar to... Figure 1 The ultraviolet irradiation device 1 shown is the same.

[0203] On the other hand, Figure 7 In the ultraviolet irradiation device 1 shown, the marking unit 3, in addition to the inkjet heads 31 and 32, also has a recognition member 33 for identifying the position of the end of the chip bonding layer. The inkjet heads 31 and 32 mark the laminated film 1000 according to the position of the chip bonding layer 1012 identified by the recognition member 33.

[0204] The following uses Figure 7 as well as Figure 8 The ultraviolet irradiation method of the ultraviolet irradiation device 1 shown will be described.

[0205] The laminated film 1000 is fed out from the feed roller 21. A cross-sectional view of the fed laminated film 1000 is shown below. Figure 9 .

[0206] The laminated film 1000, fed from the delivery roller 21, is conveyed to the marking unit 3 while its tension is adjusted by the first tension adjusting unit 8. The first tension adjusting unit 8 adjusts the tension of the laminated film 1000 using two guide rollers 81 and 82 and a movable roller 83. Specifically, the movable roller 83 applies pressure to the laminated film 1000, thereby adjusting the tension of the laminated film 1000.

[0207] The identification member 33 of the marking unit 3 identifies the position of the end of the chip bonding layer 1012. The inkjet heads 31 and 32 mark the laminated film 1000 according to the position of the chip bonding layer 1012 identified by the identification member 33. The inkjet head 31 marks the upstream end of the chip bonding layer 1012 in the transport direction or slightly upstream of the upstream end (e.g., at a position 0 mm to 3 mm from the upstream end), and the inkjet head 32 marks the downstream end of the chip bonding layer 1012 in the transport direction or slightly downstream of the downstream end (e.g., at a position 0 mm to 3 mm from the downstream end).

[0208] The marked laminated film 1000 moves downstream in the transport direction, passes through the accumulation unit 6, and reaches the irradiation unit 4. In the irradiation unit 4, the ultraviolet irradiation light source 41 is always lit, but the irradiation and shielding of the laminated film 1000 by the light-shielding member can be switched.

[0209] When the marked laminated film 1000 arrives at the irradiation unit 4, the mark recognition member 43 recognizes the mark. In one example, the mark given by the inkjet head 31 is recognized. Then, the accumulation unit 6 accumulates the laminated film 1000, thereby stopping the transport of the laminated film 1000 located in the irradiation unit 4. Specifically, the movable roller 63 moves downward, thereby accumulating the laminated film 1000. On the other hand, the laminated film 1000 is held by the fixed clamping member 71 of the holding transport unit 7. Thus, the transport of the laminated film 1000 located in the irradiation unit 4 stops. Before the transport of the laminated film 1000 stops, a portion of the plate member 45 is positioned in the path of ultraviolet light, thereby blocking the path of ultraviolet light. Then, the plate member 45 rotates, the path of ultraviolet light is opened, and ultraviolet light is irradiated from the ultraviolet irradiation source 41 onto the laminated film 1000. When the necessary amount of ultraviolet light is irradiated, the plate member 45 rotates, and a portion of the plate member 45 is positioned in the path of ultraviolet light, thereby blocking the path of ultraviolet light. Thus, ultraviolet irradiation of a given area of ​​the photosensitive adhesive layer 1021 of the laminate 1000 ends. This given area is the area covering the chip bonding layer 1012.

[0210] When the ultraviolet irradiation of a given area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 ends, the accumulation of the laminated film 1000 by the accumulation unit 6 ends, and the fixed clamping member 71 of the holding and conveying unit 7 no longer clamps the laminated film 1000. Then, the movable clamping member 72 of the holding and conveying unit 7 clamps the laminated film 1000, and the movable clamping member 72 moves downstream in the conveying direction. As a result, the laminated film 1000, which had stopped moving, located in the irradiation unit 4, starts moving again.

[0211] Whenever the marked laminate 1000 arrives at the irradiation unit 4, the transport of the laminate 1000 stops, ultraviolet irradiation is applied to a given area of ​​the photosensitive adhesive layer 1021 of the laminate 1000, and the transport of the laminate 1000 located in the irradiation unit 4 starts again, and this process is repeated as a series of steps.

[0212] The laminated film 1000, which begins to move again, is conveyed to the winding unit 5 while its tension is adjusted by the second tension adjusting unit 9. The second tension adjusting unit 9 uses two guide rollers 91 and 92 and a movable roller 93 to adjust the tension of the laminated film 1000. Specifically, the movable roller 93 applies pressure to the laminated film 1000, thereby adjusting the tension of the laminated film 1000.

[0213] The laminated film 1000 wound by the winding roller 51 of the winding unit 5 becomes a roll.

[0214] Other embodiments of the ultraviolet irradiation device are described using the accompanying drawings.

[0215] Figure 11The ultraviolet irradiation device 1 shown includes a delivery unit 2, a marking unit 3, an irradiation unit 4, a winding unit 5, an accumulation unit 6, a holding and conveying unit 7, a first tension adjustment unit 8, and a second tension adjustment unit 9. Furthermore, the ultraviolet irradiation device 1 includes a removal unit 110, end position adjustment members 101 and 102, and a support platform 103.

[0216] exist Figure 11 In the ultraviolet irradiation device 1 shown, the laminated film is conveyed in the direction of the arrow (solid line). It should be noted that the tip of the arrow is designated as the downstream side, and the root of the arrow is designated as the upstream side.

[0217] Figure 11 It is a side view.

[0218] It should be noted that, in Figure 11 The details of the structure of the laminated membrane are omitted.

[0219] exist Figure 11 The structure of the ultraviolet irradiation device 1 shown includes the delivery unit 2, the marking unit 3, the irradiation unit 4, the winding unit 5, the storage unit 6, the holding and conveying unit 7, the first tension adjusting unit 8, the second tension adjusting unit 9, the end position adjusting components 101 and 102, and the support platform 103. Figure 7 The ultraviolet irradiation device 1 shown is the same.

[0220] on the other hand, Figure 11 The ultraviolet irradiation device 1 shown has a removal unit 110.

[0221] The removal unit 110 removes unwanted portions from the laminated film 1000 before it is wound up by the winding unit 5. The removal unit 110 includes a separating roller 111 and a winding roller 112. The unwanted portions are separated from the laminated film 1000 by the separating roller 111, and the separated unwanted portions are wound up by the winding roller 112.

[0222] Symbol Explanation 1: Ultraviolet irradiation device 2: Sending Unit 21: Feeding roller 3: Marking the unit 31: Inkjet head 32: Inkjet head 33: Identify Components 4: Irradiation unit 41: Ultraviolet light source 42: Opening member 42A: Opening 42B: Gap 43: Marker identification component 44: Second opening component 44A: Opening 44B: Second opening 45: Plate-shaped members 5: Winding unit 51: Take-up roller 6: Accumulation Unit 61: Guide roller 62: Guide roller 63: Movable roller 7: Control and conveying unit 71: Fixing clamp 72: Movable clamping component 8: First tension adjustment unit 81: Guide roller 82: Guide roller 83: Movable roller 9: Second tension adjustment unit 91: Guide roller 92: Guide roller 93: Movable roller 101: End position adjustment component 102: End position adjustment component 103: Support platform 110: Remove Unit 111: Separating Roller 112: Take-up roller 1000: Laminated film 1011: Release membrane 1012: Chip bonding layer 1022: Substrate 1021: Photosensitive adhesive layer.

Claims

1. An ultraviolet irradiation device, comprising: A delivery unit that delivers a laminated film having a substrate and a photosensitive adhesive layer disposed on the substrate; A marking unit that marks the laminated film delivered by the delivery unit; An irradiation unit identifies the mark attached to the laminated film and irradiates a given area of ​​the photosensitive adhesive layer with ultraviolet light according to the position of the identified mark; as well as A winding unit that winds up the laminated film that has been irradiated with the ultraviolet light.

2. The ultraviolet irradiation device according to claim 1, wherein, An accumulation unit is also provided between the marking unit and the irradiation unit in the transport direction of the laminated film, the accumulation unit causing the laminated film to accumulate.

3. The ultraviolet irradiation device according to claim 1, wherein, A holding and conveying unit is also provided between the irradiation unit and the winding unit in the conveying direction of the laminated film, the holding and conveying unit holding the laminated film while conveying the laminated film.

4. The ultraviolet irradiation device according to claim 1, wherein, The irradiation unit includes: an ultraviolet irradiation light source that emits the ultraviolet light; and an opening member having an opening for irradiating the given area of ​​the photosensitive adhesive layer with the ultraviolet light from the ultraviolet irradiation light source.

5. The ultraviolet irradiation device according to claim 4, wherein, The irradiation unit also has a mark recognition component for recognizing the mark. A notch is provided at the edge of the opening portion of the opening member. The mark recognition component identifies the mark through the notch.

6. The ultraviolet irradiation device according to claim 4, wherein, The irradiation unit further includes a second opening member, which has an opening for irradiating the given area of ​​the photosensitive adhesive layer with ultraviolet light from the ultraviolet irradiation light source. The opening member and the second opening member are arranged such that the opening portion of the opening member overlaps with the opening portion of the second opening member.

7. The ultraviolet irradiation device according to claim 4, wherein, The irradiation unit also has a light-shielding member that can block the ultraviolet rays from irradiating the given area of ​​the photosensitive adhesive layer through the opening of the opening member.

8. The ultraviolet irradiation device according to claim 7, wherein, The light-shielding member has a plate-shaped member, which can be rotated about the thickness direction of the plate-shaped member as a rotation axis, thereby enabling the ultraviolet light to irradiate and block the given area of ​​the photosensitive adhesive layer.

9. The ultraviolet irradiation device according to claim 1, wherein, The ultraviolet irradiation device also has: A first tension adjustment unit adjusts the tension of the laminated film between the delivery unit and the marking unit in the conveying direction of the laminated film. as well as The second tension adjustment unit adjusts the tension of the film between the irradiation unit and the winding unit in the conveying direction of the laminated film.

10. The ultraviolet irradiation device according to claim 1, wherein, The laminated film is a cut film.

11. The ultraviolet irradiation device according to claim 1, wherein, The laminated film is a dicing / chip bonding film, which sequentially comprises the substrate, the photosensitive adhesive layer, a plurality of chip bonding layers disposed separately on the photosensitive adhesive layer, and a release film.

12. The ultraviolet irradiation device according to claim 11, wherein, The marking unit has an identification component for identifying the chip bonding layer, and the marking unit marks the laminated film according to the position of the chip bonding layer identified by the identification component.

Images