Micro-motion driven foot and motion platform, POB light machine

Abstract

This invention discloses a micro-motion drive foot, a motion platform, and a POB (Programmable Optical Module), relating to the field of drive equipment technology. The drive foot comprises an active part and a driven part that are movably arranged relative to each other along a first direction. A linear guide part is provided between the active part and the driven part. The linear guide part is configured to guide the active part and the driven part to slide relative to each other along the first direction. The micro-motion piezoelectric motor includes a motor body and a power output end capable of linear reciprocating motion relative to the motor body. The motor body is fixedly connected to one of the active part and the driven part in a manner that allows the motion direction of the power output end to be parallel to the first direction. The power output end has a connecting part. This invention can effectively improve the stroke and load of the drive foot and is better suited for adjusting large-size reflectors.

Description

Technical Field

[0001] This invention relates to the field of drive equipment technology, specifically to a micro-motion drive foot, a motion platform, and a POB optical engine. Background Technology

[0002] The Projection Object Box (POB) is a key mechanical and optical component in an optical lithography system, located between the mask and the projection lens. Its main functions include precise positioning, leveling, and protection of the mask pattern, as well as control of the illumination beam transmission path. The POB's main structure employs a dual-mirror reflection system, with one mirror mounted on a six-degree-of-freedom platform (such as a Stewart platform). This platform requires a motion stroke on the order of hundreds of micrometers, with motion accuracy controlled at the order of hundreds of nanometers. With technological advancements, in pursuit of higher resolution and better imaging quality, the size of the POB mirror has gradually increased. However, existing solutions that use motion reduction mechanisms at the drive element and power output end suffer from losses in both stroke and load, making it difficult to support the micro-adjustment of large-sized mirrors without changing the driving force. Summary of the Invention

[0003] The purpose of this invention is to provide a micro-motion driven foot, a motion platform, and a POB optical engine to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a micro-motion driven foot, comprising: An active part and a driven part are arranged to move relative to each other along a first direction; a linear guide part is provided between the active part and the driven part; the linear guide part is configured to guide the active part and the driven part to slide relative to each other along the first direction; A micro-motion piezoelectric motor includes a motor body and a power output end capable of linear reciprocating motion relative to the motor body. The motor body is fixedly connected to one of the driving part and the driven part in such a way that the motion direction of the power output end is parallel to a first direction. The power output end has a connecting part, which is connected to the other of the driving part and the driven part in such a way that linear motion can be transmitted in a 1:1 ratio along the first direction.

[0005] As a further aspect of the present invention, in the first direction, the end of the active part away from the driven part is provided with a mounting base one for connecting an external movable component; the end of the driven part away from the active part is provided with a mounting base two for connecting an external fixed component. The connecting portion protrudes from the outside of the motor body. The micro-motion piezoelectric motor, the driving portion, and the driven portion are configured such that when the connecting portion and the motor body are close to each other, the micro-motion piezoelectric motor drives the driving portion and the driven portion to move away from each other, and when the connecting portion and the motor body are far apart, the micro-motion piezoelectric motor drives the driving portion and the driven portion to move closer to each other.

[0006] As a further embodiment of the present invention, the connecting part and the driving part are fixed at one end away from the mounting base; the motor body and the driven part are fixed at one end away from the mounting base.

[0007] As a further aspect of the present invention, a second direction perpendicular to the first direction is provided, in which the projection portions of the active part and the driven part overlap.

[0008] As a further aspect of the present invention, a third direction is provided that is perpendicular to both the first direction and the second direction, and the projection portions of the active part and the driven part coincide in the third direction.

[0009] As a further aspect of the present invention, the active part includes a C-shaped plate with at least a top opening in the first direction; the driven part includes a sliding plate that can be inserted into the C-shaped plate in the first direction.

[0010] As a further embodiment of the present invention, the linear guide portion includes two slide rails respectively mounted on the inner walls of the active portion and the driven portion opposite to each other in the second direction; both slide rails are provided with raceways along the first direction; the two raceways are arranged opposite to each other in a direction perpendicular to the first direction and the second direction; a plurality of rollers are provided between the two raceways; the raceways are capable of providing rolling contact surfaces for the rollers.

[0011] As a further aspect of the present invention, the length of the two slide rails is greater than the travel distance of the driving foot.

[0012] As a further aspect of the present invention, a first limiting part is provided between the active part and the driven part in the first direction, and the first limiting part is configured to limit the maximum stroke when the active part and the driven part move relative to each other.

[0013] As a further embodiment of the present invention, the first limiting part includes a sensing element and a target object arranged opposite to each other in a first direction; the sensing element is disposed at one end of the driven part near the motor body; the target object is disposed at one end of the active part near the mounting base; the sensing element detects the distance between itself and the target object to reflect the displacement of the active part relative to the driven part, and when the relative movement distance between the active part and the driven part exceeds the detection range of the sensing element, the micro-motion piezoelectric motor stops its axial contraction action.

[0014] As a further embodiment of the present invention, a first hinge mechanism is provided between the active part and the mounting base one, which enables the active part to swing relative to the mounting base one about at least a first axis and a second axis, wherein the first axis is perpendicular to the second axis, and the first axis and the second axis are perpendicular to the first direction. A second hinge mechanism is provided between the driven part and the second mounting base, which enables the driven part to swing about at least a third axis and a fourth axis relative to the second mounting base. The third axis is perpendicular to the fourth axis, and the third axis and the fourth axis are perpendicular to the first direction.

[0015] To achieve the above and other related objectives, the present invention also provides a motion platform, comprising: Fasteners; The movable component is suspended below the fixed component by six driving legs; the movable component and the fixed component are arranged coaxially, and the six driving legs are arranged in pairs, with the three pairs of driving legs arranged in a circular array about the axis of the movable component.

[0016] To achieve the above and other related objectives, the present invention also provides a POB optical engine, comprising: The aforementioned motion platform; and A reflector is mounted on the movable component.

[0017] Compared with the prior art, the beneficial effects of the present invention are: The driving foot provided by this invention directly drives the active and driven parts to slide relative to each other along the first direction X via a micro-piezoelectric motor. This allows the driving force and stroke of the micro-piezoelectric motor to act on the active and driven parts in a 1:1 ratio, effectively increasing the stroke and load of the driving foot and making it more suitable for adjusting large-size reflectors. Furthermore, the micro-piezoelectric motor, as the driving element, possesses high driving precision and is suitable for fine-tuning of reflectors. Therefore, while ensuring high driving precision, this invention can also effectively increase the adjustment range of large-size reflectors. Additionally, the linear guide improves the straightness of the movement of the active and driven parts, reducing displacement deviation, thus meeting the multiple adjustment requirements of large-size reflectors, including high precision, long stroke, and high load. Attached Figure Description

[0018] Figure 1 A partial side view of the POB optical engine provided for an embodiment of the present invention; Figure 2 A front view of the driving foot provided for an embodiment of the present invention; Figure 3 for Figure 2 Sectional view of AA; Figure 4 , Figure 5 A schematic diagram showing the positional relationship between the active part, the driven part, and the micro-motion piezoelectric motor provided for an embodiment of the present invention; Figure 6 A perspective view of the linear guide portion provided for an embodiment of the present invention; Figure 7 , Figure 8 A schematic diagram of the slide rail installation state provided for an embodiment of the present invention; Figure 9 A perspective view of a second embodiment of the linear guide provided for an embodiment of the present invention; Figure 10 A perspective view of the driving foot provided for an embodiment of the present invention.

[0019] The attached figures are labeled as follows: 10-Active part, 11-Mounting base one, 12-Transition part one, 13-Flexible hinge one, 14-Flexible hinge two, 15-First cantilever, 16-C-shaped plate, 20-Driven part, 21-Mounting base two, 22-Transition part two, 23-Flexible hinge three, 24-Flexible hinge four, 25-Second cantilever, 26-Slide plate, 30-Micro-motion piezoelectric motor, 31-Motor body, 32-Connecting part, 40-Linear guide part, 41-Slide rail, 42-Race track, 43-Roller, 44-Guide rail, 45-Slide groove, 46-Slider, 51-Sensing element, 52-Target object under test, 60-Moving part, 70-Fixed part, 100-Motion platform. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] like Figure 1As shown, the driving feet provided by this invention can be applied to a motion platform 100, especially a six-degree-of-freedom platform, such as the Stewart platform of the POB optical engine. The motion platform 100 includes a fixed component 70 and a movable component 60. The movable component 60 is suspended below the fixed component 70 by multiple driving feet. The movable component 60 and the fixed component 70 are arranged coaxially. The six driving feet are arranged in pairs, with three pairs of driving feet arranged in a circular array about the axis of the movable component 60. The POB optical engine also includes a reflector, which is mounted on the movable component 60. The reflector is not shown in the figure. The working principle of the POB optical engine is as follows: the illumination beam passes through the mask, then through the projection lens and the reflector system in the POB, ultimately projecting the mask pattern precisely onto the silicon wafer surface. The reflector, through the six-degree-of-freedom platform, achieves precise positioning, leveling, and protection of the mask pattern within the field of view of the projection lens, while simultaneously controlling the transmission path of the illumination beam. In some solutions, the driving foot employs a symmetrical motion reduction mechanism. While this can improve driving accuracy, the reduction mechanism also reduces the stroke and load of the driving element, thus limiting the stroke and load of the driving foot and severely restricting the motion stroke of the six-degree-of-freedom platform. Therefore, this invention provides a driving foot that uses a micro-piezoelectric motor to directly drive the extension or retraction of the driving foot. The driving direction of the micro-piezoelectric motor is parallel to the extension or retraction direction of the driving foot, allowing the extension or retraction of the micro-piezoelectric motor to directly act on the extension or retraction of the driving foot. This results in lossless stroke and load of the driving foot, effectively improving its driving stroke and load.

[0022] The technical solution of the present invention will be described in detail below with reference to specific embodiments: Please see Figure 2 The present invention provides a technical solution: a micro-motion driven foot, comprising: an active part 10 and a driven part 20 that are relatively movably arranged along a first direction X; a linear guide part 40 is provided between the active part 10 and the driven part 20; the linear guide part 40 is configured to guide the active part 10 and the driven part 20 to slide relative to each other along the first direction X; a micro-motion piezoelectric motor 30, comprising a motor body 31 and a power output end capable of linear reciprocating motion relative to the motor body 31, the motor body 31 being fixedly connected to one of the active part 10 and the driven part 20 in such a way that the motion direction of the power output end is parallel to the first direction X, the power output end having a connecting part 32, the connecting part 32 being connected to the other of the active part 10 and the driven part 20 in such a way that linear motion can be transmitted along the first direction X in a 1:1 ratio.

[0023] The driving foot provided by this invention directly drives the active part 10 and the driven part 20 to slide relative to each other along the first direction X via a micro-piezoelectric motor 30. This allows the driving force and stroke of the micro-piezoelectric motor 30 to act on the active part 10 and the driven part 20 in a 1:1 ratio, effectively increasing the stroke and load of the driving foot and making it more suitable for adjusting large-size reflectors. Furthermore, the micro-piezoelectric motor 30, used as the driving element, possesses high driving precision and is suitable for fine-tuning of reflectors. Therefore, while ensuring high driving precision, this invention can also effectively increase the adjustment range of large-size reflectors. Additionally, the linear guide part 40 improves the straightness of the movement of the active part 10 and the driven part 20, reducing displacement deviation, thus meeting the multiple adjustment requirements of large-size reflectors, including high precision, long stroke, and high load.

[0024] Please see Figure 2 and Figure 10 As shown, in an optional embodiment of the present invention, in the first direction X, the end of the active part 10 away from the driven part 20 is provided with a mounting base 11 for connecting an external movable member 60; the end of the driven part 20 away from the active part 10 is provided with a mounting base 21 for connecting an external fixed member 70; the connecting part 32 protrudes from the outside of the motor body 31, and the micro-piezoelectric motor 30, the active part 10 and the driven part 20 are configured such that when the connecting part 32 and the motor body 31 approach each other, the micro-piezoelectric motor 30 drives the active part. The active part 10 and the driven part 20 move in a manner that causes the mounting base 11 and the mounting base 21 to move away from each other. When the connecting part 32 and the motor body 31 move away from each other, the micro-motion piezoelectric motor 30 drives the active part 10 and the driven part 20 to move in a manner that causes the mounting base 11 and the mounting base 21 to move closer to each other. The connecting part 32 is fixed to the end of the active part 10 away from the mounting base 11, and the extension direction of the connecting part 32 pointing to the active part 10 is perpendicular to the first direction X. The motor body 31 is fixed to the end of the driven part 20 away from the mounting base 21. It should be understood that the connecting part 32 is made of metal plate and is used to fix the connection between the active part 10 and the motor power output end. The motor body 31 is fixed to the driven part 20. This invention, through the spatial arrangement of the micro-piezoelectric motor 30, enables the drive foot to retract when the micro-piezoelectric motor 30 extends axially, and the drive foot to extend when the micro-piezoelectric motor 30 retracts axially. Under heavy-load support conditions, when the power output end of the micro-piezoelectric motor 30 retracts to achieve the extension of the drive foot, most of the micro-piezoelectric motor 30 body is retracted, with the main body of the power output end located inside the motor. The structure is compact, has high rigidity, and the power output end is not prone to lateral bending or uneven loading, which can effectively reduce the wear of the micro-piezoelectric motor and improve its service life.

[0025] Please see Figures 2-5As shown, in an optional embodiment of the present invention, a second direction Y perpendicular to the first direction X is provided, and the projected portions of the active part 10 and the driven part 20 coincide in the second direction Y. It should be understood that, in order to cause the driving foot to retract when the micro-piezoelectric motor 30 extends axially, and the driving foot to extend when the micro-piezoelectric motor 30 retracts axially, the connecting portion 32 of the micro-piezoelectric motor 30 should be connected to the active part 10; as... Figure 4 As shown, when the projections of the active part 10 and the driven part 20 in the second direction Y have overlapping portions, and the end of the projected portion of the driven part 20 near the mounting base 11 is located between the micro-piezoelectric motor 30 and the mounting base 11, the motor body 31 and the connecting part 32 of the micro-piezoelectric motor 30 can directly extend horizontally from the second direction Y to connect with the driven part 20 and the active part 10. This facilitates the installation of the micro-piezoelectric motor 30 and also reduces the length of the drive foot, shortening the POB optical-mechanical imaging distance; Figure 5 As shown, when the projections of the active part 10 and the driven part 20 in the second direction Y do not overlap, at least one end of the motor body 31 and the connecting part 32 of the micro-motion piezoelectric motor 30 needs to be connected to the driven part 20 or the active part 10 through a special-shaped plate, which not only increases the length of the driving foot and the assembly difficulty, but also reduces the stability of the driving foot during movement.

[0026] Please see Figure 2 and Figure 3 As shown, in an optional embodiment of the present invention, a second direction Y perpendicular to the first direction X is provided, and the projection portions of the active part 10 and the driven part 20 overlap in the third direction Z. The linear guide part 40 is provided at the overlapping portion of the projections of the active part 10 and the driven part 20 in the third direction Z. The active part 10, in conjunction with the driven part 20, can enclose the linear guide part 40 on its inner side, reducing the impact of dust, oil, etc.

[0027] Please see Figure 2 , Figure 3 and Figure 10 As shown, in an optional embodiment of the present invention, the active part 10 includes a C-shaped plate 16 with at least a top opening in the first direction X; the driven part 20 includes a sliding plate 26 that can be inserted into the C-shaped plate in the first direction X. It should be understood that in this embodiment, the sliding plate 26 and the C-shaped plate 16 adopt a nested structure, which allows the driving foot to maintain stable linearity of movement even under heavy load, while also providing better coverage for the linear guide part 40.

[0028] Please see Figure 3 , Figures 6-8As shown, in an optional embodiment of the present invention, the linear guide 40 includes two slide rails 41 respectively mounted on the inner walls of the active part 10 and the driven part 20 opposite each other in the second direction Y; each slide rail 41 is provided with a raceway 42 along the first direction X; the two raceways 42 are arranged opposite each other in a direction perpendicular to the first direction X and the second direction Y; a plurality of rollers 43 are provided between the two raceways 42; the raceways 42 can provide a rolling contact surface for the rollers 43. It should be understood that the two slide rails 41 and the plurality of rollers 43 can be combined to form a cross roller guide. The length of the two slide rails 41 is much greater than the movement stroke of the driving foot. When the active part 10 and the driven part 20 slide a short distance through the longer slide rails 41, the linear offset is extremely small, the movement trajectory is straight, and it is not easy to deviate. This can effectively suppress swaying and shaking, and improve the movement accuracy of the driving foot.

[0029] Please see Figure 9 As shown, in an optional embodiment of the present invention, the linear guide portion 40 includes two guide rails 44 respectively mounted on the inner walls of the active portion 10 and the driven portion 20 opposite each other in the second direction Y; both guide rails 44 are provided with a groove 45 along the first direction X; the two grooves 45 are arranged opposite each other in a direction perpendicular to the first direction X and the second direction Y; a slider 46 is provided between the two guide rails 44 that can slide and engage with the groove 45; the groove 45 is T-shaped and the slider 46 is I-shaped.

[0030] Please see Figure 2 and Figure 10 In an optional embodiment of the present invention, a first limiting part is provided between the active part 10 and the driven part 20 in the first direction X. The first limiting part is configured to limit the maximum stroke of the active part 10 and the driven part 20 when they move relative to each other. It should be understood that when the relative stroke of the active part 10 relative to the driven part 20 exceeds a preset value, the first limiting part can stop the micro-motion piezoelectric motor 30 from operating.

[0031] Please see Figure 2 and Figure 10In an optional embodiment of the present invention, the first limiting part includes a sensing element 51 and a target object 52 arranged opposite to each other in the first direction X; the sensing element 51 is disposed at the end of the driven part 20 near the motor body 31; the target object 52 is disposed at the end of the active part 10 near the mounting base 11; the sensing element 51 detects the displacement of the active part 10 relative to the driven part 20 by detecting the distance between itself and the target object 52; when the relative movement distance between the active part 10 and the driven part 20 exceeds the detection range of the sensing element 51, the micro-motion piezoelectric motor 30 stops its axial contraction action. The sensing element 51 can be a capacitive sensor, and the target object 52 can be a metal plate; the sensing element 51 is used to detect its distance from the target object 52, which is the movement distance of the active part 10 relative to the driven part 20; when the movement distance of the target object 52 exceeds the detection range of the sensing element 51, the micro-motion piezoelectric motor 30 stops operating.

[0032] Please see Figure 2 and Figure 10 In an optional embodiment of the present invention, a first hinge mechanism is provided between the active part 10 and the mounting base 11, which enables the active part 10 to swing relative to the mounting base 11 about at least a first axis and a second axis, wherein the first axis is perpendicular to the second axis and the first axis and the second axis are perpendicular to the first direction X; a second hinge mechanism is provided between the driven part 20 and the mounting base 21, which enables the driven part 20 to swing relative to the mounting base 21 about at least a third axis and a fourth axis, wherein the third axis is perpendicular to the fourth axis and the third axis and the fourth axis are perpendicular to the first direction X. In this embodiment, a first hinge mechanism is provided between the active part 10 and the mounting base 11, allowing the active part to swing around the first and second mutually perpendicular axes. At the same time, a second hinge mechanism is provided between the driven part 20 and the mounting base 21, allowing the driven part 20 to swing around the third and fourth mutually perpendicular axes. This orthogonal hinge mechanism provided at both ends can passively and adaptively adapt to the changes in the angles at both ends of the drive foot, releasing excess rotational degrees of freedom and ensuring that the drive foot only transmits linear drive displacement and drive force along the first direction X, without transmitting bending moment and torque. This eliminates the interference internal stress caused by angle changes during the movement of the six-degree-of-freedom platform, ensuring the long-term motion accuracy, reliability and lifespan of the drive foot.

[0033] Please see Figure 2 and Figure 10In an optional embodiment of the present invention, the first hinge mechanism includes: a rigid transition portion 12, a plate-shaped flexible hinge 13 disposed between the active portion 10 and the transition portion 12, and a plate-shaped flexible hinge 24 disposed between the transition portion 12 and the mounting base 11; in response to the non-deformation state of the flexible hinge 13 and the flexible hinge 24, the plate surface of the flexible hinge 13 is perpendicular to the first axis, and the plate surface of the flexible hinge 24 is perpendicular to the second axis; the second hinge mechanism includes: a rigid transition portion 22, a plate-shaped flexible hinge 33 disposed between the driven portion 20 and the transition portion 22, and a plate-shaped flexible hinge 44 disposed between the transition portion 22 and the mounting base 21; in response to the non-deformation state of the flexible hinge 33 and the flexible hinge 44, the plate surface of the flexible hinge 323 is perpendicular to the third axis, and the plate surface of the flexible hinge 44 is perpendicular to the fourth axis. The physical properties of the plate-shaped flexible hinge determine that it has low bending stiffness and is easy to flexibly swing in the direction normal to the plate surface, while maintaining high stiffness in the plate extension plane. Each flexible hinge only produces low stiffness compliance for the rotational degree of freedom to be released, while maintaining high stiffness in the main driving direction of the driving foot, i.e., the first direction X. This does not interfere with the angle self-adaptation during the motion of the six-degree-of-freedom platform, and can stably transmit the linear displacement and driving force of the driving foot along the first direction X, and resist the undesirable deformation caused by external loads. Thus, while achieving the hinge function of no gaps, no friction, and no lubrication, it ensures the load-bearing capacity of the driving foot and the accuracy of motion transmission.

[0034] Please see Figure 2 and Figure 10 In an optional embodiment of the present invention, in the first direction X, flexible hinge 13 is distributed in a first length interval, and flexible hinge 14 is distributed in a second length interval, with the first and second length intervals at least partially overlapping; in the first direction X, flexible hinge 23 is distributed in a third length interval, and flexible hinge 24 is distributed in a fourth length interval, with the third and fourth length intervals at least partially overlapping. This embodiment, by ensuring that the length intervals of the paired flexible hinges at least partially overlap in the first direction X, achieves maximum proximity and even overlap of the spatial positions of the two orthogonal swing axes in the first direction X. This ensures that regardless of the direction in which the driving foot swings, its swing center remains approximately fixed, eliminating the coupling motion introduced by axis misalignment. This allows the first and second hinge mechanisms to achieve true two-degree-of-freedom pure rotational compliance, further guaranteeing the accuracy of motion transmission by the driving foot and the control precision of the six-degree-of-freedom platform.

[0035] Please see Figure 2 and Figure 10In an optional embodiment of the present invention, it further includes: a second limiting part for limiting the swing stroke of the active part 10 relative to the mounting base 11; and a third limiting part for limiting the swing stroke of the driven part 20 relative to the mounting base 21. This embodiment actively constrains the maximum swing angle of the active part 10 and the driven part 20 through the limiting parts, preventing the drive foot from entering an excessively swinging state during operation or impact. This ensures that the working range of the hinge mechanism is always controlled within the range where the support stiffness meets the requirements, preserving the necessary flexibility of the hinge mechanism to adapt to angle changes while preventing stiffness degradation due to excessive swing, thus ensuring the stable load-bearing capacity of the six-degree-of-freedom platform during large-stroke, high-precision motion.

[0036] Please see Figure 2 and Figure 10 In an optional embodiment of the present invention, the second limiting part includes a plurality of first cantilever arms 15 respectively disposed on both sides of the first flexible hinge 13 and the second flexible hinge 14; the third limiting part includes a plurality of second cantilever arms 25 respectively disposed on both sides of the third flexible hinge 23 and the fourth flexible hinge 24. The first cantilever arms 15 and the second cantilever arms 25 can be integrally formed with the active part 10 and the driven part 20 by wire cutting process.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0038] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A micro-motion driven foot, characterized in that: include: An active part (10) and a driven part (20) are arranged relative to each other along a first direction (X); a linear guide part (40) is provided between the active part (10) and the driven part (20); the linear guide part (40) is configured to guide the active part (10) and the driven part (20) to slide relative to each other along the first direction (X); The micro-motion piezoelectric motor (30) includes a motor body (31) and a power output end capable of linear reciprocating motion relative to the motor body (31). The motor body (31) is fixedly connected to one of the active part (10) and the driven part (20) in such a way that the motion direction of the power output end is parallel to the first direction (X). The power output end has a connecting part (32), which is connected to the other of the active part (10) and the driven part (20) in such a way that linear motion can be transmitted in a 1:1 ratio along the first direction (X).

2. The micro-motion driven foot according to claim 1, characterized in that: In the first direction (X), the active part (10) is provided with a mounting base one (11) for connecting an external movable part (60) at one end away from the driven part (20); the driven part (20) is provided with a mounting base two (21) for connecting an external fixed part (70) at one end away from the active part (10). The connecting part (32) protrudes outside the motor body (31). The micro-motion piezoelectric motor (30), the driving part (10), and the driven part (20) are configured such that when the connecting part (32) and the motor body (31) are close to each other, the micro-motion piezoelectric motor (30) drives the driving part (10) and the driven part (20) to move away from each other, and when the connecting part (32) and the motor body (31) are far apart, the micro-motion piezoelectric motor (30) drives the driving part (10) and the driven part (20) to move away from each other, and when the connecting part (32) and the motor body (31) are far apart, the micro-motion piezoelectric motor (30) drives the driving part (10) and the driven part (20) to move away from each other, and the driven part (21) moves closer to each other.

3. A micro-motion driven foot according to claim 2, characterized in that: The connecting part (32) is fixed to the end of the active part (10) away from the mounting base one (11), and the motor body (31) is fixed to the end of the driven part (20) away from the mounting base two (21).

4. A micro-motion driven foot according to claim 1, characterized in that: A second direction (Y) is provided that is perpendicular to the first direction (X), and the projection portions of the active part (10) and the driven part (20) overlap in the second direction (Y).

5. A micro-motion driven foot according to claim 4, characterized in that: A third direction (Z) is provided that is perpendicular to both the first direction (X) and the second direction (Y), and the projection portions of the active part (10) and the driven part (20) overlap on the third direction (Z).

6. A micro-motion driven foot according to claim 5, characterized in that: The active part (10) includes a C-shaped plate (16) with at least a top opening in the first direction (X); the driven part (20) includes a sliding plate (26) that can be inserted into the C-shaped plate (16) in the first direction (X).

7. A micro-motion driven foot according to claim 4, characterized in that: The linear guide (40) includes two slide rails (41) respectively mounted on the inner walls of the active part (10) and the driven part (20) opposite each other in the second direction (Y); both slide rails (41) are provided with raceways (42) along the first direction (X); the two raceways (42) are arranged opposite each other in a direction perpendicular to the first direction (X) and the second direction (Y); a plurality of rollers (43) are provided between the two raceways (42); the raceways (42) can provide rolling contact surfaces for the rollers (43).

8. A micro-motion driven foot according to claim 7, characterized in that: The length of the two slide rails (41) is greater than the travel of the driving foot.

9. A micro-motion driven foot according to claim 1, characterized in that: A first limiting part is provided between the active part (10) and the driven part (20) in the first direction (X), and the first limiting part is configured to limit the maximum stroke when the active part (10) and the driven part (20) move relative to each other.

10. A micro-motion driven foot according to claim 9, characterized in that: The first limiting part includes a sensing element (51) and a target object (52) arranged opposite to each other in the first direction (X); the sensing element (51) is located at the end of the driven part (20) near the motor body (31); the target object (52) is located at the end of the active part (10) near the mounting base (11); the sensing element (51) detects the distance between itself and the target object (52) to reflect the displacement of the active part (10) relative to the driven part (20). When the relative movement distance between the active part (10) and the driven part (20) exceeds the detection range of the sensing element (51), the micro-motion piezoelectric motor (30) stops its axial contraction action.

11. A micro-motion driven foot according to claim 2, characterized in that: A first hinge mechanism is provided between the active part (10) and the mounting base (11) to enable the active part (10) to swing about at least a first axis and a second axis relative to the mounting base (11), wherein the first axis is perpendicular to the second axis and the first axis and the second axis are perpendicular to the first direction (X); A second hinge mechanism is provided between the driven part (20) and the mounting base (21) to enable the driven part (20) to swing about at least a third axis and a fourth axis relative to the mounting base (21), wherein the third axis is perpendicular to the fourth axis and the third axis and the fourth axis are perpendicular to the first direction (X).

12. A micro-motion driven foot according to claim 1, characterized in that: The micro-motion piezoelectric motor (30) is either a inchworm motor or a piezoelectric screw.

13. A motion platform, characterized in that, include: Fastener (70); The movable part (60) is suspended below the fixed part (70) by the driving feet as described in any one of the six claims 1-12; the movable part (60) and the fixed part (70) are arranged coaxially, the six driving feet are arranged in pairs, and the three groups of driving feet are arranged in a circular array about the axis of the movable part (60).

14. A POB optical engine, characterized in that, include: The motion platform (100) as described in claim 13, and A reflector is mounted on the movable part (60).

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