Carrier transport device and transport apparatus

Abstract

This invention provides a carrier transport device and carrier transport equipment. According to one embodiment of the invention, the carrier transport device includes: a device body arranged along a transport path of the carrier; and an air injection unit disposed on the device body, which injects air to suspend the carrier for transport.

Description

Technical Field

[0001] This invention relates to carrier transport devices and transport equipment. Background Technology

[0002] As the integration of semiconductor components increases and high-performance products are developed, the logistics technology of semiconductor manufacturing processes is also pursuing more efficient technologies.

[0003] This semiconductor manufacturing logistics process is managed based on site conditions through bottleneck resolution, equipment failure mitigation, and preventative maintenance (PM). According to this process, an OHT (Overhead Hoist Transport) system is used within the semiconductor manufacturing plant (FAB) to execute various material transfers.

[0004] In other words, semiconductor manufacturing involves many different processes, and the OHT (Out-of-Touch) transport system automates the material movement between these processes. In an OHT transport system, OHT trolleys move along tracks mounted on the ceiling, transporting carriers such as front-opening unified pods (FOUPs) or reticle pods.

[0005] In addition, conveyor systems are used to transport goods to locations separated from the tracked transport lines.

[0006] However, the conveyor system generates particles during operation, and there are limitations in the maintenance and management of its various components.

[0007] Prior technology documents

[0008] Patent documents

[0009] Patent Document 1: Japanese Patent Publication No. 2006-032528 Summary of the Invention

[0010] Technical issues

[0011] The present invention was created to solve the problems described above, and its purpose is to provide a carrier transport device and transport equipment that does not generate particles during operation and is easy to maintain and manage.

[0012] Solution

[0013] To achieve the objectives described above, a carrier transport device according to an embodiment of the present invention includes: a device body arranged along a transport path of the carrier; and an air injection unit disposed on the device body and injecting air to suspend the carrier for transport.

[0014] The air injection unit may include: a plurality of first air injection components disposed at the lower part of the device body, which inject air upward onto the lower surface of the carrier, thereby suspending the carrier; and a plurality of second air injection components disposed at both sides of the device body, wherein at least some of the plurality of second air injection components inject air onto the carrier in the transport direction along the transport path of the carrier, thereby transporting the carrier between the two sides of the device body.

[0015] Among the plurality of second air injection components, some of the second air injection components arranged on one side of the device body can inject air onto the upper surface of one side of the carrier in the direction of the other side of the device body, and the remaining second air injection components arranged on the other side of the device body inject air onto the upper surface of the other side of the carrier in the direction of the one side of the device body.

[0016] The transport path of the carrier is divided into an acceleration zone, a constant speed zone, and a deceleration zone, and the plurality of second air injection components may include: a plurality of acceleration nozzles arranged in the acceleration zone to accelerate the carrier; a plurality of constant speed nozzles arranged in the constant speed zone to transport the carrier at a constant speed; and a plurality of deceleration nozzles arranged in the deceleration zone to decelerate the carrier.

[0017] The air jet direction of the plurality of acceleration nozzles can be configured to be inclined toward the transport direction of the carrier based on a virtual horizontal line perpendicular to the transport path of the carrier, and the air jet flow rate of the plurality of acceleration nozzles gradually increases in the transport direction of the carrier.

[0018] The air jet direction of the plurality of uniform speed nozzles can be configured to be inclined toward the transport direction of the carrier based on a virtual horizontal line perpendicular to the transport path of the carrier, and the air jet flow rate of the plurality of uniform speed nozzles is the same as that of each other.

[0019] The air jet direction of the plurality of deceleration nozzles can be configured to be inclined in the opposite direction to the transport direction of the carrier, with a reference to a virtual horizontal line perpendicular to the transport path of the carrier, and the air jet flow rate of the plurality of deceleration nozzles gradually decreases in the transport direction of the carrier.

[0020] The carrier transport device of the present invention further includes: a position sensing sensor, at least one of which is arranged on the transport path of the carrier to sense the position of the carrier; and a plurality of flow regulating valves to regulate the air jet flow rates of the plurality of accelerating nozzles, the plurality of constant speed nozzles and the plurality of decelerating nozzles, wherein the plurality of flow regulating valves can adjust the air jet flow rates according to the position of the carrier sensed by the position sensing sensor.

[0021] The main body of the device may include: a main body base, including a bottom on which a plurality of first air jet components are disposed and two side walls for accommodating the carrier and guiding the transport of the carrier; and a main body side portion, disposed on the upper part of the two side walls of the main body base, and provided with a plurality of second air jet components.

[0022] The main body side portion can be configured to reciprocate in the lateral direction of the main body base.

[0023] According to another aspect of the invention, a carrier transport device can be provided, comprising: a transport trolley that moves along a track provided on a ceiling and transports a carrier; and a carrier transport apparatus that transports the carrier to a target location spaced apart from a transportable location via the transport trolley, wherein the carrier transport apparatus comprises: an apparatus body formed along a transport path of the carrier connected from the track to the target location; and an air jetting unit disposed in the apparatus body and jetting air to suspend the carrier for transport.

[0024] According to another aspect of the invention, a carrier transport device can be provided, comprising: a track disposed on a ceiling; an OHT trolley that moves along the track and transports a carrier of a substrate or photomask; and a carrier transport apparatus that transports the carrier to a storage container spaced apart from a transportable position via the OHT trolley, wherein the carrier transport apparatus comprises: a device body formed along a transport path of the carrier from the track to the storage container; a plurality of first air jet members disposed at the lower part of the device body and spraying air upward onto the lower surface of the carrier, thereby suspending the carrier; and a plurality of second air jet members disposed at both sides of the device body, and at least some of the plurality of second air jet members spraying air onto the carrier in a transport direction along the transport path of the carrier, thereby transporting... The carrier is transported between the two sides of the device body, wherein among a plurality of second air injection members, some of the second air injection members arranged on one side of the device body inject air onto the upper surface of one side of the carrier in the direction of the other side of the device body, and the remaining second air injection members arranged on the other side of the device body inject air onto the upper surface of the other side of the carrier in the direction of the one side of the device body, and the transport path of the carrier is divided into an acceleration zone, a constant speed zone, and a deceleration zone, wherein the plurality of second air injection members include: a plurality of acceleration nozzles arranged in the acceleration zone and accelerating the carrier; a plurality of constant speed nozzles arranged in the constant speed zone and transporting the carrier at a constant speed; and a plurality of deceleration nozzles arranged in the deceleration zone and decelerating the carrier.

[0025] Invention Effects

[0026] According to an embodiment of the present invention, a carrier transport device and transport equipment are configured with an air jetting unit that suspends the carrier for transport by jetting air, thereby generating almost no particles and vibrations during operation, and being easy to maintain and manage compared to conventional conveyor devices with drive belts. Attached Figure Description

[0027] Figure 1 This is a diagram showing a conveyor device arranged between a track and a storage container according to the prior art.

[0028] Figure 2 It is shown Figure 1 A diagram of a conveyor system.

[0029] Figure 3 This is a perspective view showing a carrier transport device according to an embodiment of the present invention.

[0030] Figure 4It is shown Figure 3 Rear view of the carrier transport device.

[0031] Figure 5 It is shown Figure 3 Another perspective view of the carrier transport device.

[0032] Figure 6 It is shown Figure 3 The diagram shows the acceleration zone of the carrier transport device.

[0033] Figure 7 It is shown Figure 3 The diagram shows the uniform speed range of the carrier transport device.

[0034] Figure 8 It is shown Figure 3 The diagram shows the deceleration zone of the carrier transport device.

[0035] Figure 9 It is shown Figure 4 The diagram shows the movement of the main body side of the carrier transport device.

[0036] Explanation of reference numerals in the attached figures

[0037] 1: Track 2: Transport trolley

[0038] 3: Storage container; 10: Conveyor device

[0039] 100: Carrier transport device; 110: Main body of the device.

[0040] 110a: Lower part; 110b: Both sides

[0041] 110b1: One side; 110b2: The other side

[0042] 111: Main body base; 111a: Bottom

[0043] 111b: Two side walls; 112: Main body side

[0044] 120: Air injection unit; 121: First air injection component

[0045] 122: Second air injection component; 122a: Acceleration nozzle

[0046] 122b: Constant speed nozzle; 122c: Deceleration nozzle

[0047] C: Carrier Ca: One side

[0048] Cb: The other side R: Transportation path

[0049] R1: Acceleration zone; R2: Constant speed zone

[0050] R3: Deceleration range V: Virtual horizontal line Detailed Implementation

[0051] Hereinafter, preferred embodiments will be described in detail with reference to the accompanying drawings, enabling those skilled in the art to readily implement the invention. However, in describing preferred embodiments in detail, detailed descriptions of related well-known functions or configurations are omitted where it is determined that such specific descriptions might unnecessarily obscure the essence of the invention. Furthermore, throughout the drawings, the same reference numerals are used for parts that perform similar functions and roles. Additionally, in this specification, the terms "upper," "upper part," "upper surface," "lower," "lower part," "lower surface," "side surface," etc., are based on the drawings and may vary depending on the orientation of the arrangement of the constituent elements.

[0052] Furthermore, throughout the specification, when a part is "connected" to another part, this includes not only "direct connection" but also "indirect connection" where other constituent elements are located between them. Moreover, unless otherwise stated to the contrary, "including" a constituent element means that other constituent elements may also be included, rather than excluding other constituent elements.

[0053] Figure 1 This is a diagram showing the arrangement of a conveyor system according to the prior art between the track and the storage container, and Figure 2 It is shown Figure 1 A diagram of a conveyor system.

[0054] Referring to the accompanying drawings, the conveyor device 10 according to the prior art can be arranged between the track 1 and the storage container 3.

[0055] Specifically, the storage container (STK, Stocker) 3 of the storage carrier C can be arranged separately from the transport line of the OHT transport system, which has the track 1 that moves as the transport trolley 2.

[0056] In the case where the transport line with track 1 installed on the ceiling of the semiconductor manufacturing plant (FAB) is not arranged adjacent to the storage container 3, a conveyor device 10 is provided in order to transport the carrier C being transported by the transport trolley 2 to the storage container 3.

[0057] However, the conveyor device 10 has various problems during operation.

[0058] Specifically, the conveyor device 10 consists of a drive motor 11, a drive roller (not shown) connected to the drive motor 11, and an idle roller 13 connected to the drive roller via a transmission belt 12.

[0059] When this conveyor device 10 is operated to transport the carrier C, the drive rollers, transmission belt 12, and idle rollers 13 are physically operated by receiving the rotational force of the drive motor 11, while rubbing against each other.

[0060] The resulting particle and vibration, as well as the induction of static electricity, reduce the semiconductor production yield.

[0061] Furthermore, since the transmission belt 12, which is in direct contact with and rubs against the carrier C, is highly likely to break due to gradual damage, it should be replaced regularly. Therefore, maintenance costs will be incurred for spare parts and working hours will increase.

[0062] Figure 3 This is a perspective view showing a carrier transport device according to an embodiment of the present invention. Figure 4 It is shown Figure 3 Rear view of the carrier transport device, and Figure 5 It is shown Figure 3 Another perspective view of the carrier transport device.

[0063] also, Figure 6 It is shown Figure 3 A diagram showing the acceleration zone of the carrier transport device. Figure 7 It is shown Figure 3 A diagram of the uniform speed range of the carrier transport device, and Figure 8 It is shown Figure 3 The diagram shows the deceleration zone of the carrier transport device.

[0064] According to an embodiment of the present invention, a carrier transport device includes a track ( Figure 1 1) Transport trolley ( Figure 1 2) and carrier transport device 100.

[0065] The track 1 is a structure installed on the ceiling, and the transport trolley 2 can be suspended from the track 1 to move along the track 1.

[0066] Furthermore, the transport trolley 2 is configured to move along a track 1 set on the ceiling and transport the carrier C. As an example of such a transport trolley 2, an OHT trolley can be used.

[0067] In addition, the carrier transport device 100 is configured to transport the carrier C to a target location that is spaced apart from the transportable location via the transport trolley 2.

[0068] The transportable position of the transport trolley 2 is a position close to the track 1, and is a position where the transport trolley 2 can transport the carrier C while moving along the track 1.

[0069] As an example, a storage container for the storage carrier C may be present at the target location. Figure 1(3) When the storage device 3 and the track 1 are separated by a certain distance, the storage device 3 is not located at a position where the carrier C can be transported by the transport trolley 2 set on the track 1.

[0070] Therefore, the carrier transport device 100 performs the function of receiving the carrier C from the transport trolley 2 set on the track 1 and transporting it to the storage container 3. That is, the carrier transport device 100 of the present invention can replace the conveyor device of the prior art ( Figure 1 10) Arrangement.

[0071] At this point, as an example, the carrier C can be a photomask box for storing the photomask for transporting the photomask, or more specifically, a front-opening transport box for storing the substrate for transporting the substrate.

[0072] Specifically, the carrier transport device 100 may include a device body 110 and an air injection unit 120.

[0073] The main body 110 of the device can be formed along the transport path R of the carrier C.

[0074] Here, the transport path R of the carrier C is a path connecting track 1 to a target location that is some distance away from track 1. As an example, it is the path connecting track 1 to the storage container 3.

[0075] Thus, the main body 110 of the device is formed along the transport path R of the carrier C, and any structure that can securely mount the air injection unit 120 is acceptable, and obviously, its specific structure is not limited by the present invention.

[0076] In addition, an air injection unit 120 is provided on the main body 110 of the device and injects air to suspend the carrier C for transport.

[0077] Compared to the conveyor device 10 with the drive belt 12, the carrier transport device 100 of the present invention, which includes such an air jet unit 120, produces almost no particles and vibrations during operation and is easy to maintain and manage.

[0078] Specifically, the air injection unit 120 may include a plurality of first air injection components 121 and a plurality of second air injection components 122.

[0079] Multiple first air injection components 121 are disposed in the lower part 110a of the device body 110.

[0080] At this time, a plurality of first air injection components 121 can be embedded in the lower part 110a of the device body 110, and as shown in the figure, only the air injection port is exposed on the upper surface of the lower part 110a of the device body 110.

[0081] These multiple first air injection components 121 inject air upwards onto the lower surface of the carrier C, causing the carrier C to suspend.

[0082] That is, the air injected upward by the multiple first air injection components 121 can push the carrier C descending from the transport trolley 2 toward the device body 110 and suspend the carrier C.

[0083] With multiple first air injection components 121 arranged at intervals in the lower part 110a of the device body 110, air is uniformly injected onto the entire lower surface of the carrier C, allowing the carrier C to be stably and balancedly suspended.

[0084] Multiple second air injection components 122 are disposed on both sides 110b of the main body 110 of the device.

[0085] At least some of these multiple second air injection components 122 can inject air onto the carrier C in the transport direction according to the transport path R of the carrier C, thereby reaching the carrier C between the two sides 110b of the transport device body 110.

[0086] That is, the air injected by the multiple second air injection components 122 in the transport direction of the carrier C pushes the carrier C in the direction of transporting the carrier C suspended by the multiple first air injection components 121, so as to provide transport force to the carrier C.

[0087] With multiple second air injection components 122 arranged at intervals along each of the two sides 110b of the device body 110, air is continuously injected into the carrier C, which is being transported and whose position is changing, thereby continuously providing transport force to the carrier C.

[0088] Specifically, multiple second air injection components 122 can inject air onto the upper surface of the carrier C.

[0089] The carrier C is suspended above the lower part 110a of the device body 110 by a plurality of first air injection components 121. At this time, a plurality of second air injection components 122 can inject air onto the upper surface of the carrier C, thereby limiting the suspension height of the carrier C.

[0090] That is, while performing the function of transporting the carrier C along the transport path R of the carrier C, the multiple second air injection components 122 also perform the function of restricting the suspension of the carrier C to a certain extent so that the carrier C does not suspend excessively and detach.

[0091] More specifically, such as Figure 4As shown, among the plurality of second air injection members 122, some of the second air injection members 122 arranged on one side portion 110b1 of the device body 110 can inject air onto the upper surface of one side portion Ca of the carrier C in the direction of the other side portion 110b2 of the device body 110, and the remaining second air injection members 122 arranged on the other side portion 110b2 of the device body 110 can inject air onto the upper surface of the other side portion Cb of the carrier C in the direction of one side portion 110b1 of the device body 110.

[0092] Thus, the suspension height of the carrier C is limited, while it can be centered between the two sides 110b of the main body 110 of the device.

[0093] That is, among the multiple second air injection components 122, some of the second air injection components 122 arranged on one side 110b1 of the device body 110 inject air onto the upper surface of one side Ca of the carrier C in the direction of the other side 110b2 of the device body 110, thereby restricting the suspension of the carrier C to a certain extent while preventing the carrier C from being pushed to one side 110b1 of the device body 110 and colliding with one side 110b1 of the device body 110.

[0094] Furthermore, among the plurality of second air injection components 122, the remaining second air injection components 122 arranged on the other side 110b2 of the device body 110 inject air into the upper surface of the other side Cb of the carrier C in the direction of one side 110b1 of the device body 110, thereby limiting the suspension of the carrier C to a certain extent while preventing the carrier C from being pushed to the other side 110b2 of the device body 110 and colliding with the other side 110b2 of the device body 110.

[0095] In addition, such as Figure 5 As shown, the transport path R of the carrier C can be divided into an acceleration zone R1, a constant speed zone R2, and a deceleration zone R3.

[0096] The acceleration interval R1 is the interval in which the carrier C is accelerated. This acceleration interval R1 is the interval in which the speed of the carrier C increases along the transport path R of the carrier C.

[0097] Furthermore, the uniform speed interval R2 is the interval in which the carrier C moves at a uniform speed. This uniform speed interval R2 is the interval in which the carrier C moves at the same speed along the transport path R of the carrier C.

[0098] In addition, the deceleration interval R3 is the interval in which the carrier C is decelerated. This deceleration interval R3 is the interval in which the speed of the carrier C decreases along the transport path R of the carrier C.

[0099] In addition, the plurality of second air injection components 122 may include a plurality of acceleration nozzles 122a, a plurality of constant speed nozzles 122b and a plurality of deceleration nozzles 122c.

[0100] Multiple acceleration nozzles 122a are arranged in the acceleration zone R1 in the transport path R of the carrier C to accelerate the carrier C.

[0101] In addition, multiple uniform speed nozzles 122b are arranged in the uniform speed interval R2 in the transport path R of the carrier C to ensure that the carrier C is transported at a uniform speed.

[0102] In addition, multiple deceleration nozzles 122c are arranged in the deceleration zone R3 in the transport path R of the carrier C to decelerate the carrier C.

[0103] Specifically, such as Figure 5 As shown, the air jet direction of the multiple acceleration nozzles 122a can be configured to be inclined toward the transport direction of the carrier C with reference to a virtual horizontal line V perpendicular to the transport path R of the carrier C.

[0104] At this time, as Figure 6 As shown, the air jet flow rate of the multiple acceleration nozzles 122a can be gradually increased in the transport direction of the carrier C.

[0105] As the air jet direction and air jet flow rate of the multiple accelerating nozzles 122a are configured as described above, the carrier C receives an acceleration force in the transport direction of the carrier C, and the speed of the carrier C can gradually increase during transport in the acceleration interval R1.

[0106] In addition, such as Figure 5 As shown, the air jet direction of the multiple uniform speed nozzles 122b can be formed as a reference to the transport direction of the carrier C, with the virtual horizontal line V perpendicular to the transport path R of the carrier C as the reference.

[0107] At this time, as Figure 7 As shown, the air jet flow rates of the multiple uniform velocity nozzles 122b can be the same as each other.

[0108] With the air jet direction and air jet flow rate of the multiple uniform speed nozzles 122b configured as described above, the carrier C receives a uniform speed force in the transport direction of the carrier C, and the speed of the carrier C can remain uniform during the transport process in the uniform speed range R2.

[0109] In addition, such as Figure 5 As shown, the air jet direction of the multiple deceleration nozzles 122c can be configured to be inclined in the opposite direction to the transport direction of the carrier C, with reference to a virtual horizontal line V perpendicular to the transport path R of the carrier C.

[0110] At this time, as Figure 8As shown, the air jet flow rate of the multiple deceleration nozzles 122c can be gradually reduced in the transport direction of the carrier C.

[0111] As the air jet direction and air jet flow rate of the multiple deceleration nozzles 122c are configured as described above, the carrier C receives a deceleration force in the transport direction of the carrier C. During the transport process in the deceleration interval R3, the speed of the carrier C gradually decreases, so that the carrier C can eventually stop.

[0112] Additionally, although not shown in the accompanying drawings, the present invention may also include a position sensing sensor and a flow regulating valve.

[0113] The position sensing sensors are arranged in at least one manner along the transport path R of the carrier C to sense the position of the carrier C.

[0114] In addition, multiple flow control valves regulate the air jet flow of multiple accelerating nozzles 122a, multiple constant speed nozzles 122b, and multiple decelerating nozzles 122c.

[0115] In this invention, multiple flow control valves can adjust the air jet flow rate based on the position of the carrier C sensed by a position sensing sensor like this.

[0116] That is, multiple flow regulating valves connected to multiple acceleration nozzles 122a, multiple constant speed nozzles 122b and multiple deceleration nozzles 122c can use the real-time position of the carrier C sensed by the position sensing sensor as data to adjust the air jet flow of multiple acceleration nozzles 122a, multiple constant speed nozzles 122b and multiple deceleration nozzles 122c in real time.

[0117] Specifically, the real-time position of the carrier C in the acceleration zone R1, sensed by the position sensing sensor, is used as data. Multiple flow control valves in the acceleration zone R1 can adjust the air injection flow rate, thereby accelerating the carrier C.

[0118] In addition, the real-time position of the carrier C in the uniform speed range R2, sensed by the position sensing sensor, is used as data. Multiple flow control valves in the uniform speed range R2 can adjust the air jet flow rate, so that the carrier C moves at a uniform speed.

[0119] In addition, the real-time position of the carrier C in the deceleration zone R3, sensed by the position sensing sensor, is used as data. Multiple flow control valves in the deceleration zone R3 can adjust the air injection flow rate, thereby decelerating the carrier C.

[0120] In addition, such as Figure 9 As shown, the main body 110 of the device of the present invention may include a main body base 111 and a main body side portion 112.

[0121] Here, the main base 111 may include a bottom 111a and two side walls 111b.

[0122] Multiple first air injection components 121 may be provided at the bottom 111a.

[0123] In addition, the two side walls 111b can be arranged perpendicular to the upper sides of the bottom 111a to accommodate the carrier C inside and guide the transport of the carrier C.

[0124] Furthermore, the main body side portion 112 is arranged on each of the upper portions of the two side walls 111b of the main body base 111, and may be provided with a plurality of second air injection components 122.

[0125] Specifically, the main body side portion 112 can be configured to reciprocate in the lateral direction of the main body base 111.

[0126] When the carrier C enters the interior of the main substrate 111 and exits the interior of the main substrate 111, as... Figure 9 As shown, as the two main body sides 112 move to the sides and thus move away from each other, sufficient vertical movement space for the carrier C is ensured, preventing the carrier C and the main body sides 112 from colliding and damaging each other.

[0127] At this point, the specific structure formed by the reciprocating movement of the main body side 112 can be as long as the main body side 112 moves smoothly and easily in the lateral direction, and is not limited by the present invention.

[0128] Although embodiments of the invention have been described above with reference to the accompanying drawings, those skilled in the art will understand that the invention can be implemented in other specific forms without altering its technical concept or essential features. Therefore, it should be understood that the embodiments set forth above are exemplary in all respects and not restrictive.

Claims

1. A carrier transport device, comprising: The main body of the device is arranged along the transport path of the carrier; as well as An air injection unit is provided on the main body of the device and injects air to suspend the carrier for transport.

2. The carrier transport device according to claim 1, wherein, The air injection unit includes: A plurality of first air injection components are disposed at the lower part of the main body of the device, and inject air upwards onto the lower surface of the carrier, thereby suspending the carrier; and A plurality of second air injection components are disposed on both sides of the device body, and at least some of the plurality of second air injection components inject air onto the carrier in the transport direction along the transport path of the carrier, thereby transporting the carrier between the two sides of the device body.

3. The carrier transport device according to claim 2, wherein, Among the plurality of second air injection components Some of the second air injection components arranged on one side of the device body inject air onto the upper surface of one side of the carrier in a direction relative to the other side of the device body. The remaining second air jetting member, arranged on the other side of the device body, jets air onto the upper surface of the other side of the carrier in the direction of the one side of the device body.

4. The carrier transport device according to claim 2, wherein, The transport path of the carrier is divided into an acceleration zone, a constant speed zone, and a deceleration zone. The plurality of second air injection components include: Multiple acceleration nozzles are arranged in the acceleration zone to accelerate the carrier; Multiple uniform-speed nozzles are arranged within the uniform-speed range, causing the carrier to be transported at a uniform speed; and Multiple deceleration nozzles are arranged in the deceleration zone to decelerate the carrier.

5. The carrier transport device according to claim 4, wherein, The air jet direction of the plurality of acceleration nozzles is configured to be inclined toward the transport direction of the carrier, with a virtual horizontal line perpendicular to the transport path of the carrier as a reference. The air jet flow rate in the plurality of acceleration nozzles gradually increases in the transport direction of the carrier.

6. The carrier transport device according to claim 4, wherein, The air jet direction of the plurality of uniform velocity nozzles is formed to be inclined toward the transport direction of the carrier, with a virtual horizontal line perpendicular to the transport path of the carrier as a reference. The air jet flow rates in the multiple uniform-speed nozzles are the same.

7. The carrier transport device according to claim 4, wherein, The air injection direction of the plurality of deceleration nozzles is configured to be inclined in the opposite direction to the transport direction of the carrier, with a reference to a virtual horizontal line perpendicular to the transport path of the carrier. The air jet flow rate in the plurality of deceleration nozzles gradually decreases in the transport direction of the carrier.

8. The carrier transport device according to claim 4, further comprising: A position sensing sensor, at least one of which is arranged along the transport path of the carrier, to sense the position of the carrier; as well as Multiple flow control valves regulate the air injection flow rates of the multiple accelerating nozzles, the multiple constant-speed nozzles, and the multiple decelerating nozzles. The plurality of flow control valves adjust the air jet flow rate according to the position of the carrier sensed by the position sensing sensor.

9. The carrier transport device according to claim 2, wherein, The main body of the device includes: The main body base includes a bottom on which a plurality of the first air jet components are disposed, and two side walls that accommodate the carrier and guide its transport; and The main body side is arranged on the upper part of the two side walls of the main body base and is provided with a plurality of second air injection components.

10. The carrier transport device according to claim 9, wherein, The main body side is configured to reciprocate in the lateral direction of the main body base.

11. A carrier transport device, comprising: The transport trolley moves along tracks set on the ceiling and transports the carrier; as well as A carrier transport device transports the carrier to a target location spaced apart from the transportable location via the transport trolley. The carrier transport device includes: The main body of the device is formed along a transport path of the carrier connecting the track to the target location; and An air injection unit is provided on the main body of the device, and injects air to suspend the carrier for transport.

12. The carrier transport equipment according to claim 11, wherein, The air injection unit includes: A plurality of first air injection components are disposed at the lower part of the main body of the device, and inject air upwards onto the lower surface of the carrier, thereby suspending the carrier; and A plurality of second air injection components are disposed on both sides of the device body, and at least some of the plurality of second air injection components inject air onto the carrier in the transport direction along the transport path of the carrier, thereby transporting the carrier between the two sides of the device body.

13. The carrier transport equipment according to claim 12, wherein, Among the plurality of second air injection components Some of the second air injection components arranged on one side of the device body inject air onto the upper surface of one side of the carrier in a direction relative to the other side of the device body. The remaining second air jetting member, arranged on the other side of the device body, jets air onto the upper surface of the other side of the carrier in the direction of the one side of the device body.

14. The carrier transport equipment according to claim 12, wherein, The transport path of the carrier is divided into an acceleration zone, a constant speed zone, and a deceleration zone. The plurality of second air injection components include: Multiple acceleration nozzles are arranged in the acceleration zone to accelerate the carrier; Multiple uniform-speed nozzles are arranged within the uniform-speed range, causing the carrier to be transported at a uniform speed; and Multiple deceleration nozzles are arranged in the deceleration zone to decelerate the carrier.

15. The carrier transport equipment according to claim 14, wherein, The air jet direction of the plurality of acceleration nozzles is configured to be inclined toward the transport direction of the carrier, with a virtual horizontal line perpendicular to the transport path of the carrier as a reference. The air jet flow rate in the plurality of acceleration nozzles gradually increases in the transport direction of the carrier.

16. The carrier transport device according to claim 14, wherein the air jet direction of the plurality of uniform velocity nozzles is inclined toward the transport direction of the carrier, with a reference to a virtual horizontal line formed perpendicular to the transport path of the carrier. The air jet flow rates in the multiple uniform-speed nozzles are the same.

17. The carrier transport equipment according to claim 14, wherein, The air injection direction of the plurality of deceleration nozzles is configured to be inclined in the opposite direction to the transport direction of the carrier, with a reference to a virtual horizontal line perpendicular to the transport path of the carrier. The air jet flow rate in the plurality of deceleration nozzles gradually decreases in the transport direction of the carrier.

18. The carrier transport equipment according to claim 14, further comprising: A position sensing sensor, at least one of which is arranged along the transport path of the carrier, to sense the position of the carrier; as well as Multiple flow control valves regulate the air injection flow rates of the multiple accelerating nozzles, the multiple constant-speed nozzles, and the multiple decelerating nozzles. The plurality of flow control valves adjust the air jet flow rate according to the position of the carrier sensed by the position sensing sensor.

19. The carrier transport equipment according to claim 12, wherein, The main body of the device includes: The main body base includes a bottom on which a plurality of the first air jet components are disposed, and two side walls that accommodate the carrier and guide its transport; and The main body side, located on the upper part of the two side walls of the main body base, is provided with a plurality of second air injection components. The main body side portion is configured to reciprocate in the lateral direction of the main body base.

20. A carrier transport device, comprising: Tracks, installed on the ceiling; The overhead crane trolley moves along the track and transports the carrier of the substrate or photomask. as well as A carrier transport device transports the carrier to a storage container spaced apart from the transportable position via the overhead crane trolley. The carrier transport device includes: The main body of the device is formed along the transport path of the carrier that connects to the storage container from the track; A plurality of first air injection components are disposed at the lower part of the main body of the device, and inject air upwards onto the lower surface of the carrier, thereby suspending the carrier; and A plurality of second air injection components are disposed on both sides of the device body, and at least some of the plurality of second air injection components inject air onto the carrier in the transport direction along the transport path of the carrier, thereby transporting the carrier between the two sides of the device body. Among the plurality of second air injection components, Some of the second air injection components arranged on one side of the device body inject air onto the upper surface of one side of the carrier in a direction relative to the other side of the device body. The remaining second air injection member, arranged on the other side of the device body, injects air onto the upper surface of the other side of the carrier in the direction of the one side of the device body. The transport path of the carrier is divided into an acceleration zone, a constant speed zone, and a deceleration zone. The plurality of second air injection components include: Multiple acceleration nozzles are arranged in the acceleration zone to accelerate the carrier; Multiple uniform-speed nozzles are arranged within the uniform-speed range, causing the carrier to be transported at a uniform speed; and Multiple deceleration nozzles are arranged in the deceleration zone to decelerate the carrier.

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