A particle cleaning device for COF product final test loop

Abstract

This invention discloses a particle cleaning device for the final testing stage of COF products, relating to the field of microelectronic packaging and testing technology. It includes a testing machine, with a fixed top plate mounted on top. The machine also has a roller, a first constant-force wheel, and a second constant-force wheel, with a yellow rubber tension wheel between them. An ion gun is also mounted on the machine, driven by the same set of air pumps. A blow-suction composite module and an optical recognition module are also detachably mounted on the machine. The machine is further equipped with an intelligent control terminal for adjusting the ion gun and the blow-suction composite module. During use, the dynamically adjustable servo nozzle of the ion gun works in conjunction with the precise blowing nozzle of the blow-suction composite module to fully cover the blind spots of the ion gun, effectively reducing the cleaning blind spots caused by particle shedding and contamination of the product.

Description

Technical Field

[0001] This invention relates to the field of microelectronic packaging and testing technology, and specifically to a particle cleaning device for the final testing stage of COF products. Background Technology

[0002] COF (ChipOnFilm) is an advanced electronic packaging technology that directly encapsulates driver ICs onto a flexible printed circuit (FPC). It uses an ultra-thin flexible polyimide (PI) film as a carrier, typically only 25–50 μm thick, which can be repeatedly bent. Through anisotropic conductive film (ACF) thermoforming process, the bumps of the driver chip are electrically interconnected with the fine lines on the film to form an ultra-thin, flexible driver module.

[0003] COF (Chip-on-Foil) is primarily used for packaging display panel driver chips. These chips can be used in mobile phone full-screen displays, OLED flexible screens, tablets, and automotive displays. They are characterized by their ultra-thinness, high wiring density, flexibility, and narrow bezels. During the production process, the product undergoes final testing (FT) to check its electrical performance, conductivity, and stability. During testing, the product's tape surface, especially the green paint test pad area, is extremely sensitive to contamination by tiny particles, which can easily lead to poor contact, test abnormalities, and probe damage.

[0004] Due to the limited layout of the ion guns on existing FT machines, and the fact that during the deployment test of COF products, particles on the yellow rubber wheel and particles blown off by the ion gun can easily fall onto the green paint surface, and because the ion gun layout is fixed, the airflow cannot effectively cover the particles attached to the green paint test pad area on the tension wheel tape, which can easily create a contamination blind spot. Furthermore, the machine only identifies the tape positioning marks before testing and does not have the ability to detect and pre-treat particles on the green paint surface in real time, so it can only passively accept contamination and cannot remove it in advance. Summary of the Invention

[0005] In view of the problems existing in the prior art, the present invention is proposed.

[0006] Therefore, the purpose of this invention is to provide a particle cleaning device for the final testing stage of COF products. The problem it aims to solve is that during the FT testing of COF products, the existing method of using an ion air gun for dust removal has a large blind spot for pollution. The airflow cannot effectively cover the particles attached to the green paint test pad area on the tension wheel tape. At the same time, the machine lacks the ability to detect and pre-treat particles on the green paint surface in real time, and can only passively accept pollution, which is prone to causing test abnormalities.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a particle cleaning device for the final testing stage of COF products, comprising a testing machine, a machine platform top plate fixedly installed above the testing machine, a scroll for unfolding COF products on the testing machine, a first fixed-force wheel and a second fixed-force wheel for tape movement respectively on the testing machine, and a yellow rubber tension wheel for adjusting tension between the first fixed-force wheel and the second fixed-force wheel, an ion gun for cleaning particles on the first fixed-force wheel and the second fixed-force wheel respectively on the testing machine, the ion gun being driven by the same set of air pumps, a blow-suction composite module for removing particles on the second fixed-force wheel detachably installed on the testing machine, an optical recognition module corresponding to the second fixed-force wheel detachably installed on the testing machine, and an intelligent control terminal for controlling the ion gun and the blow-suction composite module; The ion gun is fixedly installed on the testing machine platform, and the ion gun is provided with an air gun inlet connector that is connected to the air path in the ion gun. The air gun inlet connector is fixedly installed with a gas delivery hose connected to the air pump, and the gas delivery hose is provided with a gas pipe tee for diverting the flow. One end of the gas pipe tee is connected to the output port of the air pump. The blowing and suction composite module includes a first magnetic base magnetically mounted on the top plate of the machine. The first magnetic base has an air inlet and an air outlet. The first magnetic base is connected to an air pipe tee through the air inlet. The first magnetic base is also equipped with a universal bamboo tube connected to the air outlet. The end of the universal bamboo tube away from the first magnetic base is bent toward the second fixed force wheel. A flat nozzle is fixedly installed at the end of the universal bamboo tube away from the first magnetic base, and the flat nozzle is located above the second fixed force wheel.

[0008] As a preferred embodiment of the particle cleaning device for the final testing stage of COF products according to the present invention, the first magnetic base is further provided with a manual valve corresponding to the air outlet, and the manual valve is used to manually control the connection and disconnection between the air outlet and the universal bamboo tube.

[0009] As a preferred embodiment of the particle cleaning device for the final testing stage of COF products according to the present invention, wherein: a MEMS flow sensing unit is provided in the first magnetic base between the air inlet and the air outlet, and the first magnetic base is also provided with a MEMS flow sensor and an embedded control unit electrically connected to the intelligent control terminal.

[0010] As a preferred embodiment of the particle cleaning device for the final testing stage of COF products according to the present invention, the air inlet is provided with an 8mm air pipe connector, the air outlet is provided with a 1 / 4 internal thread that mates with the universal bamboo joint pipe thread, the universal bamboo joint pipe is 300mm long, the flat nozzle is 68mm wide and has 20 sets of air holes along its width direction, and the flat nozzle is set perpendicular to the Tape movement direction on the second fixed force wheel.

[0011] As a preferred embodiment of the particle cleaning device for the final testing stage of COF products according to the present invention, wherein: the ion air gun has servo nozzles arranged on one side facing the first or second fixed wheel, and the ion air gun is equipped with a miniature servo motor for driving the servo nozzles to limit deflection, and the ion air gun is also provided with an air gun terminal for controlling the servo motor, and the air gun terminal is electrically connected to the intelligent control terminal.

[0012] As a preferred embodiment of the particle cleaning device for the final testing stage of COF products according to the present invention, the optical recognition module includes a second magnetic base that magnetically engages with the top plate of the machine, and an optical camera is vertically arranged below the second magnetic base, corresponding to the second fixed force wheel. The optical camera is detached and mounted on the top plate of the machine platform via a second magnetic base and is located above the second fixed force wheel. The second magnetic base is also equipped with an image processing unit electrically connected to the intelligent control terminal, and the image processing unit in the second magnetic base adopts machine vision algorithm recognition technology.

[0013] As a preferred embodiment of the particle cleaning device for the final testing stage of COF products according to the present invention, the second fixed force wheel is further equipped with an auxiliary light source corresponding to the optical camera, and the auxiliary light source is arranged to avoid the transmission shaft in the second fixed force wheel. The second fixed force wheel is provided with an image recognition area corresponding to the auxiliary light source, and the field of view and focus range of the optical camera completely cover the image recognition area on the second fixed force wheel.

[0014] As a preferred embodiment of the particle cleaning device for the final testing stage of COF products according to the present invention, the Tape on the testing machine is sequentially conveyed to the second fixed force wheel via a reel, a first fixed force wheel, and a yellow rubber tension wheel.

[0015] In summary, the present invention has at least one of the following beneficial effects: 1. This invention utilizes the synergistic effect of the dynamically adjustable servo nozzle of the ion air gun and the precise blowing and suction of the flat nozzle of the composite module to fully cover the blind spots of the ion air gun, effectively reducing the cleaning blind spots caused by particle shedding and contamination of products.

[0016] 2. This invention uses an optical recognition module to monitor particulate matter on the Tape green paint surface in real time and links it with a smart control terminal to upgrade from passive dust removal to active sensing, accurately identifying particulate matter with a particle size ≥5μm.

[0017] 3. In this invention, the blow-suction composite module and the optical recognition module are magnetically attached to the top plate of the machine via the first magnetic base and the second magnetic base, respectively, which makes disassembly and assembly convenient and the position adjustable. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram of the Tape movement direction according to the present invention; Figure 3 This is a structural diagram showing the assembly of the ion gun and the blow-suction composite module of the present invention. Figure 4 This is a structural diagram of the ion gun of the present invention; Figure 5 This is a structural diagram of the blow-suction composite module of the present invention; Figure 6 This is a structural diagram of the MEMS flow sensing unit of the present invention; Figure 7 This is a structural diagram showing the installation of the second constant force wheel and the optical recognition module according to the present invention. Figure 8 This is a structural diagram showing the installation of the second constant force wheel and the auxiliary light source according to the present invention.

[0020] Explanation of reference numerals in the attached figures: 1. Testing machine; 2. Machine top plate; 3. Reel; 4. First constant force wheel; 5. Second constant force wheel; 51. Auxiliary light source; 6. Yellow glue tension wheel; 7. Ion air gun; 71. Air gun inlet connector; 711. Air supply hose; 7111. Air pipe tee; 72. Servo nozzle; 73. Air gun terminal; 8. Blowing and suction composite module; 81. First magnetic base; 811. Air inlet; 812. Air outlet; 8121. Manual valve; 82. Universal bamboo joint tube; 83. Flat nozzle; 84. MEMS flow sensing unit; 9. Optical recognition module; 91. Second magnetic base; 92. Optical camera; 10. Intelligent control terminal. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] This invention discloses a particle cleaning device for the final testing stage of COF products.

[0023] Example, refer to Figure 1-8This invention provides a particle cleaning device for the final testing stage of COF products, comprising a testing platform 1, a platform top plate 2 fixedly mounted on top of the testing platform 1, a roll 3 for unrolling COF products on the testing platform 1, a first fixed-force wheel 4 and a second fixed-force wheel 5 for tape movement on the testing platform 1, and a yellow rubber tension wheel 6 for adjusting tension between the first fixed-force wheel 4 and the second fixed-force wheel 5. The testing platform 1 also includes an ion gun 7 for cleaning particles from the first fixed-force wheel 4 and the second fixed-force wheel 5, and the ion gun 7 is driven by the same set of air pumps. The testing machine 1 is also equipped with a blow-suction composite module 8 for removing particles from the second constant force wheel 5. An optical recognition module 9 corresponding to the second constant force wheel 5 is also installed on the testing machine 1. The testing machine 1 is further equipped with a smart control terminal 10 for controlling the ion gun 7 and the blow-suction composite module 8. The ion gun 7 is fixedly installed on the testing machine 1, and has an air inlet connector 71 connected to the air path in the ion gun 7. An air supply hose 711 connected to an air pump is fixedly installed on the air inlet connector 71, and an air tee 711 for diverting air flow is provided on the air supply hose 711. One end of the air tee 7111 is connected to the output port of the air pump. The blow-suction composite module 8 is magnetically mounted on the top plate of the machine. The first magnetic base 81 on the device has an air inlet 811 and an air outlet 812. The first magnetic base 81 is connected to an air tee 7111 via the air inlet 811. A universal bamboo-joint tube 82 connected to the air outlet 812 is also installed on the first magnetic base 81. The end of the universal bamboo-joint tube 82 away from the first magnetic base 81 is bent towards the second force wheel 5. A flat nozzle 83 is fixedly installed at the end of the universal bamboo-joint tube 82 away from the first magnetic base 81, and the flat nozzle 83 is located above the second force wheel 5. This device is applied in the field of microelectronic packaging and testing technology, specifically referring to the final testing (FT) stage of COF flip-chip thin film products. It addresses the issue of small particulate matter easily adhering to the green paint surface of the tape, especially in the test pad area, during the testing process. The design of the test platform 1, which serves as the core carrier for FT testing, also includes optical fluorescence detection elements for optical testing and pneumatic pressure measuring elements for pressure testing. These are mature technologies in the field. The top plate 2 is a metal plate treated with magnetic anti-wear properties, which, combined with strong magnetic adsorption, provides an upper mounting reference. The roller 3, driven by a motor, rotates the central shaft to smoothly unfold the flexible COF product, preventing bending damage. The first and second constant force rollers 4 and 5, along with the yellow glue tension roller 6, achieve stable tape delivery and tension adjustment. The yellow glue tension roller 6 has yellow glue on it. The ion gun 7 is a basic dust removal component, covering the regular area.The blowing and suction composite module 8 focuses on the blind spots of the yellow adhesive tension wheel, working in conjunction with the existing ion gun 7 to cover the areas of each constant force wheel, reducing blind spots where particles fall and contaminate the product. The optical recognition module 9 enables real-time monitoring of particulate matter, overcoming the shortcomings of existing machines that only recognize tape positioning marks and lack pre-treatment capabilities. The intelligent control terminal 10 serves as the control center, achieving closed-loop control of active sensing and precise cleaning. In this solution, a laptop equipped with TapeAlignmentMark technology is used, which can achieve intelligent control of the device through the coordinated cooperation of related hardware and software. The ion gun 7 is a standard dust removal component of the existing FT machine, fixed at a specific position on the test machine 1, providing basic ion air dust removal function. Air connector 71 connects the air path, air hose 711 transmits clean compressed air, and air tee 7111 splits the airflow from the air pump, simultaneously supplying air to the ion gun 7 and the blow-suction composite module 8, ensuring the synchronization and stability of the airflow supply. The first magnetic base 81 uses a magnetic installation method, facilitating quick assembly and disassembly and fine-tuning of its position, adapting to the cleaning needs of different tape sizes. Air inlet 811 connects to the split airflow, and air outlet 812 outputs directional airflow. The universal bamboo-joint tube 82 can be bent arbitrarily, precisely targeting the blind spots of the yellow rubber tension wheel, namely the inner side of the second constant force wheel 5 and the surface of the rubber wheel, areas prone to dust accumulation. The flat nozzle 83 outputs a wide and uniform airflow, achieving precise removal of particles from the yellow rubber tension wheel area and reducing the contamination blind spots.

[0024] The first magnetic base 81 is also provided with a manual valve 8121 corresponding to the air outlet 812. The manual valve 8121 is used to manually control the opening and closing between the air outlet 812 and the universal bamboo tube 82. The manual valve 8121 is a manual control component, which can be manually opened or closed when the device is being debugged, maintained or not automatically cleaned.

[0025] A MEMS flow sensing unit 84 is provided in the first magnetic base 81 and located between the air inlet 811 and the air outlet 812. The first magnetic base 81 is also provided with a MEMS flow sensor and an embedded control unit electrically connected to the intelligent control terminal 10. The MEMS flow sensing unit 84 works with the MEMS flow sensor to monitor the airflow in the air path of the blow-suction composite module 8 in real time and feeds back the data to the embedded control unit. The embedded control unit, as the local control core, receives the instructions from the intelligent control terminal 10 and combines the flow data to accurately adjust the airflow size, so as to realize the intelligent adaptation of cleaning intensity, ensuring the cleaning effect while avoiding damage to the tape by excessive airflow.

[0026] The air inlet 811 is equipped with an 8mm air pipe connector, and the air outlet 812 is equipped with a 1 / 4 internal thread that mates with the thread of the universal bamboo tube 82. The universal bamboo tube 82 is 300mm long, and the flat nozzle 83 is 68mm wide with 20 sets of air holes along its width. The flat nozzle 83 is perpendicular to the movement direction of the Tape on the second fixed wheel 5. The universal bamboo tube 82 can be disassembled and assembled through the threaded connection. It is used to transport gas and the nozzle angle and direction can be flexibly adjusted to achieve precise positioning. The flat nozzle 83 can blow gas directionally to the green paint surface to remove particles, or extract particles in the suction mode. Specific operating parameters: blowing flow rate: 22L / min, nozzle distance from Tape: 10cm, blowing time: 2.5 seconds; [If the incoming material is mainly contaminated with extremely fine particles (<10μm), the blowing time can be slightly adjusted to increase to 3 seconds to remove them using continuous airflow].

[0027] The ion air gun 7 has servo nozzles 72 arranged on one side facing the first fixed force wheel 4 or the second fixed force wheel 5. The ion air gun 7 is equipped with a micro servo motor for driving the servo nozzles 72 to limit their deflection. The ion air gun 7 is also equipped with an air gun terminal 73 for controlling the servo motor. The air gun terminal 73 is electrically connected to the intelligent control terminal 10. The servo nozzles 72 are an improved component of the ion air gun 7. The micro servo motor drives their limit deflection. The air gun terminal 73 receives commands from the intelligent control terminal 10 to control the start, stop and deflection angle of the servo motor. This allows the ion air gun 7 to dynamically adjust the airflow direction to adapt to the dust removal needs of different areas, further reducing the risk of particulate matter pollution in conventional areas. Together with the blowing and suction composite module 8, it achieves full-area cleaning.

[0028] The optical recognition module 9 includes a second magnetic base 91 that magnetically engages with the top plate 2 of the machine. Below the second magnetic base 91, an optical camera 92 is vertically positioned, corresponding to the second fixed-force wheel 5. The optical camera 92 is detachably mounted on the top plate 2 via the second magnetic base 91 and is located above the second fixed-force wheel 5. The second magnetic base 91 also houses an image processing unit electrically connected to the intelligent control terminal 10. This image processing unit employs machine vision algorithm recognition technology. The magnetic mounting of the second magnetic base 91 facilitates disassembly, assembly, and focus calibration. The optical camera 92 captures real-time images of the Tape green paint surface in the area of ​​the second fixed-force wheel 5. The image processing unit, based on machine vision algorithms, accurately identifies particles with a diameter ≥5μm and outputs position and size signals to the intelligent control terminal 10, achieving an upgrade from passive dust removal to active sensing and providing data support for precise cleaning.

[0029] The second fixed-force wheel 5 is also equipped with an auxiliary light source 51 corresponding to the optical camera 92. The auxiliary light source 51 is arranged to avoid the drive shaft in the second fixed-force wheel 5. The second fixed-force wheel 5 has an image recognition area corresponding to the auxiliary light source 51. The field of view and focus range of the optical camera 92 completely cover the image recognition area on the second fixed-force wheel 5. The auxiliary light source 51 provides uniform illumination for the optical camera 92, and the illumination intensity is adjustable from 2000 to 5000 lux for the brightness of the coaxial light source. It eliminates reflections and shadows on the green paint surface of the tape. The arrangement to avoid the drive shaft ensures accurate illumination even when the second fixed-force wheel 5 is rotating. The image recognition area accurately corresponds to the test pad area. The field of view and focus range of the optical camera 92 provide full coverage, ensuring no blind spots and achieving accurate and complete monitoring of particulate matter. The optical camera 92 is located about 10 cm above the second fixed-force wheel 5. This position can clearly cover the entire target monitoring area (including the green paint surface and the test pad). Its physical structure does not interfere with the original ESD protection of the equipment.

[0030] The tape on the testing machine 1 is sequentially conveyed to the second fixed force wheel 5 via the reel 3, the first fixed force wheel 4, and the yellow glue tension wheel 6. This conveying path is the standard procedure for COF product FT testing. After the tape is unrolled from the reel 3, it is guided by the first fixed force wheel 4 and tensioned by the yellow glue tension wheel 6, and is smoothly conveyed to the testing station corresponding to the second fixed force wheel 5. The optical recognition module 9 and the blow-suction composite module 8 are both arranged above the second fixed force wheel 5 to complete particulate matter monitoring and cleaning before the tape enters the testing station.

[0031] During the particle cleaning process in the final testing stage of COF products using this device, the COF product tape is sequentially conveyed on the testing machine 1 via the roller 3, the first fixed force wheel 4, and the yellow glue tension wheel 6 to the top of the second fixed force wheel 5. The optical camera 92 of the optical recognition module 9 is suspended above the second fixed force wheel 5 via the second magnetic base 91, and under the illumination of the auxiliary light source 51, it collects images of the green paint surface of the tape in the area of ​​the second fixed force wheel 5 in real time. The image processing unit identifies particles with a diameter ≥5μm through machine vision algorithms and transmits the signal to the intelligent control terminal 10, realizing the upgrade from passive dust removal to active sensing, and providing data support for precise cleaning. The intelligent control terminal 10 synchronously controls the ion gun 7 and the blowing-suction composite module 8 to start. The air gun terminal 73 of the ion gun 7 controls the micro servo motor to drive the servo motor nozzle 72 to limit the deflection, dynamically adjusting the direction of the ion air discharged through the air delivery hose 711 and the air gun inlet connector 71, and through the servo motor nozzle 72, to perform large-scale dust removal on the regular areas of the first constant force wheel 4 and the second constant force wheel 5. The blowing-suction composite module 8 is precisely controlled by the intelligent control terminal 10 through the embedded control unit combined with the feedback data from the MEMS flow sensor in the MEMS flow sensing unit 84, and the air delivery hose 711... 1. The airflow from the pump is delivered through the air pipe tee 7111 to the air inlet 811 in the first magnetic seat 81 that is magnetically attracted to the top plate 2 of the machine. The air outlet 812 and the universal bamboo tube 82 deliver the airflow to the flat nozzle 83. The flat nozzle 83 outputs a wide and uniform airflow perpendicular to the Tape movement direction, which blows away particles in blind areas such as the inner side of the second fixed force wheel 5 and the surface of the rubber wheel. During this process, the opening and closing of the air outlet 812 and the flow rate can be manually controlled by the manual valve 8121. Through the synergistic effect of the two, the coverage of each fixed force wheel area is achieved, and the cleaning blind areas of particles falling off and contaminating the product are reduced. After cleaning is completed, the intelligent control terminal 10 controls the optical recognition module 9, ion gun 7 and blowing and suction composite module 8 to shut down, and the tape continues to enter the test station along the conveying path to complete the subsequent electrical performance test.

[0032] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A particle cleaning device for the final testing stage of COF products, characterized in that: The test machine includes a test stand (1), on which a top plate (2) is fixedly installed. The test stand (1) is also equipped with a roll (3) for unrolling COF products. The test stand (1) is equipped with a first fixed-force wheel (4) and a second fixed-force wheel (5) for tape movement. A yellow rubber tension wheel (6) for adjusting tension is also provided between the first fixed-force wheel (4) and the second fixed-force wheel (5). The test stand (1) is also equipped with a cleaning mechanism for the first fixed-force wheel (4), the second fixed-force wheel (5), and the third fixed-force wheel (5). The two constant force wheels (5) indicate the ion gun (7) of the particles, and the ion gun (7) is driven by the same set of air pumps. The test machine (1) is also equipped with a blow-suction composite module (8) for removing particles from the second constant force wheel (5). The test machine (1) is also equipped with an optical recognition module (9) corresponding to the second constant force wheel (5). The test machine (1) is also equipped with an intelligent control terminal (10) for controlling the ion gun (7) and the blow-suction composite module (8). The ion gun (7) is fixedly installed on the test machine (1), and the ion gun (7) is provided with an air gun inlet connector (71) that is connected to the air path in the ion gun (7). The air gun inlet connector (71) is fixedly installed with a gas delivery hose (711) connected to the air pump. The gas delivery hose (711) is provided with a gas pipe tee (7111) for diverting the flow. One end of the gas pipe tee (7111) is connected to the output port of the air pump. The blowing and suction composite module (8) includes a first magnetic base (81) magnetically mounted on the top plate (2) of the machine platform. The first magnetic base (81) is provided with an air inlet (811) and an air outlet (812). The first magnetic base (81) is connected to the air pipe tee (7111) through the air inlet (811). The first magnetic base (81) is also equipped with a universal bamboo tube (82) connected to the air outlet (812). The end of the universal bamboo tube (82) away from the first magnetic base (81) is bent toward the second fixed force wheel (5). The end of the universal bamboo tube (82) away from the first magnetic base (81) is fixedly equipped with a flat nozzle (83), and the flat nozzle (83) is located above the second fixed force wheel (5).

2. The particle cleaning device for the final testing stage of COF products according to claim 1, characterized in that, The first magnetic base (81) is also provided with a manual valve (8121) corresponding to the air outlet (812), and the manual valve (8121) is used to manually control the opening and closing between the air outlet (812) and the universal bamboo tube (82).

3. The particle cleaning device for the final testing stage of COF products according to claim 2, characterized in that, The first magnetic base (81) is provided with a MEMS flow sensing unit (84) located between the air inlet (811) and the air outlet (812). The first magnetic base (81) is also provided with a MEMS flow sensor and an embedded control unit electrically connected to the intelligent control terminal (10).

4. The particle cleaning device for the final testing stage of COF products according to claim 1, characterized in that, The air inlet (811) is provided with an 8mm air pipe connector, the air outlet (812) is provided with a 1 / 4 internal thread that is threaded to the universal bamboo tube (82), the universal bamboo tube (82) is 300mm long, the flat nozzle (83) is 68mm wide and has 20 sets of air holes along its width direction, and the flat nozzle (83) is set perpendicular to the Tape movement direction on the second fixed force wheel (5).

5. The particle cleaning device for the final testing stage of COF products according to claim 1, characterized in that, The ion gun (7) has servo nozzles (72) arranged on one side facing the first fixed wheel (4) or the second fixed wheel (5), and the ion gun (7) is equipped with a micro servo motor for driving the servo nozzles (72) to limit the deflection. The ion gun (7) is also equipped with a gun terminal (73) for controlling the servo motor, and the gun terminal (73) is electrically connected to the intelligent control terminal (10).

6. The particle cleaning device for the final testing stage of COF products according to claim 1, characterized in that, The optical recognition module (9) includes a second magnetic base (91) that magnetically engages with the top plate (2) of the machine, and an optical camera (92) is vertically arranged below the second magnetic base (91) and distributed corresponding to the second fixed force wheel (5). The optical camera (92) is detached and installed on the top plate (2) of the machine platform via the second magnetic base (91) and located above the second fixed force wheel (5). The second magnetic base (91) is also provided with an image processing unit electrically connected to the intelligent control terminal (10), and the image processing unit in the second magnetic base (91) adopts machine vision algorithm recognition technology.

7. The particle cleaning device for the final testing stage of COF products according to claim 6, characterized in that, The second fixed force wheel (5) is also equipped with an auxiliary light source (51) corresponding to the optical camera (92), and the auxiliary light source (51) is arranged to avoid the transmission shaft in the second fixed force wheel (5). The second fixed force wheel (5) is provided with an image recognition area corresponding to the auxiliary light source (51), and the field of view and focus range of the optical camera (92) completely cover the image recognition area on the second fixed force wheel (5).

8. The particle cleaning device for the final testing stage of COF products according to claim 7, characterized in that, The tape on the test machine (1) is sequentially conveyed to the second constant force wheel (5) via the reel (3), the first constant force wheel (4), and the yellow rubber tension wheel (6).

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