Laser processing apparatus and laser processing method

Abstract

This application relates to a laser processing equipment and a laser processing method. The laser processing equipment is used for micro- and nano-scale processing of circuit boards. The laser processing equipment includes a laser and a support device. The support device supports the circuit board, and the laser is used for micro- and nano-scale processing of the circuit board. The support device includes: a base having a base surface; a support mechanism slidably connected to the base surface along a first direction; and a first detection mechanism including a first reading unit and a first grating unit. The first grating unit extends along the first direction, and one of the first reading unit and the first grating unit is fixedly connected to the base, while the other is fixedly connected to the support mechanism. The first reading unit is used to sense the first grating unit to obtain multi-dimensional displacement information, including the sliding displacement of the support mechanism in the first direction and in a sliding direction perpendicular to the first direction. This improves the processing accuracy of the laser processing equipment.

Description

Technical Field

[0001] This application relates to the field of laser technology, and in particular to a laser processing equipment and a laser processing method. Background Technology

[0002] Ultrafast laser processing equipment refers to the use of ultrashort pulse laser beams with pulse widths less than or equal to picoseconds to process materials. Due to the characteristics of picosecond lasers, such as ultra-high peak power, ultra-short pulse width, and short action time, the thermal diffusion distance inside the material is short during processing, and it has non-thermal melting processing characteristics. Therefore, ultrafast laser processing equipment has unique advantages in micro and nano processing, which includes various applications such as laser drilling, laser grooving, laser engraving, laser roughening, and laser repair.

[0003] Ultrafast laser processing equipment consists of an ultrafast laser, an optical path device, a carrier device, a conveyor device, and other auxiliary devices. The ultrafast laser provides an ultrafast laser beam, which is shaped and transmitted through the optical path device, ultimately forming a focused spot on workpieces such as printed circuit boards (PCBs) for micro- and nano-scale processing. The PCBs can be printed circuit boards (PCBs), IC packaging substrates, or other circuit boards used for chip interconnection. The carrier device provides the function of carrying and moving the PCBs, while the conveyor device transports the PCBs to be processed to the carrier device and removes the processed PCBs from the carrier device and the entire ultrafast laser processing equipment.

[0004] Ultrafast laser processing equipment utilizes ultrafast lasers and optical path devices to provide high-precision and high-energy focused beams for circuit board processing, thereby improving the processing accuracy to some extent. However, traditional ultrafast laser processing equipment still suffers from relatively low processing accuracy. Summary of the Invention

[0005] One of the technical problems addressed in this application is how to improve the processing accuracy of laser processing equipment.

[0006] A laser processing apparatus for performing micro-nano processing on circuit boards, the laser processing apparatus comprising a laser and a support device, the support device being used to support the circuit board, and the laser being used to perform micro-nano processing on the circuit board, wherein the support device comprises:

[0007] The base has a base surface;

[0008] The supporting mechanism is slidably connected to the base surface along the first direction; and

[0009] The first detection mechanism includes a first reading unit and a first grating unit. The first grating unit extends along the first direction. One of the first reading unit and the first grating unit is fixedly connected to the base and the other is fixedly connected to the support mechanism. The first reading unit is used to sense the first grating unit to obtain multidimensional displacement information. The multidimensional displacement information includes the sliding displacement of the support mechanism in the first direction and the sliding direction perpendicular to the first direction. The movement of the support mechanism in the first direction and the sliding direction is controlled by the multidimensional displacement information.

[0010] In one embodiment, the first reading unit includes a reading head for sensing the first grating unit to obtain multidimensional displacement information.

[0011] In one embodiment, the first grating unit includes a plurality of stripe components, which are spaced apart along the first direction. The first reading unit is used to sense the stripe components. When the plane where the stripe component is located is parallel to the base surface, the sliding direction is a second direction parallel to the base surface. When the plane where the stripe component is located is perpendicular to the base surface, the sliding direction is a third direction perpendicular to the base surface.

[0012] In one embodiment, the first reading unit includes a reading head for acquiring the actual displacement of the bearing mechanism in a first direction and a sliding direction;

[0013] Based on the actual displacement, the movement of the bearing mechanism is controlled so that the difference between the actual displacement and the preset displacement is within a first preset error range.

[0014] In one embodiment, the first grating unit further includes a fixed base, a support base, and a grating ruler. The fixed base is disposed on the base surface, the support base is disposed on the fixed base, the grating ruler is disposed on the support base, and the stripe assembly is disposed on the grating ruler. The fixed base is made of marble; or, the support base is made of steel.

[0015] In one embodiment, the first reading unit includes a mounting base, a reading head, and a connecting base. The mounting base is detachably connected to the support mechanism. The reading head is used to sense the first grating unit and is detachably connected to the connecting base. The connecting base is connected to the mounting base. The connecting base, the mounting base, and the support mechanism at the position where the mounting base is fixed are made of the same material.

[0016] In one embodiment, the mounting base is provided with a first elongated hole extending perpendicular to the first direction, and the first reading unit further includes a first fastener, which passes through the first elongated hole and is connected to the bearing mechanism. When the installation position of the first fastener in the first elongated hole is changed, the distance between the reading head and the stripe assembly can be changed.

[0017] In one embodiment, the mounting base is provided with a second elongated hole extending perpendicular to the first direction, and the first reading unit further includes a second fastener, which passes through the second elongated hole and is connected to the reading component. When the installation position of the second fastener in the second elongated hole is changed, the coverage area of ​​the orthographic projection of the reading head on the first grating unit can be changed.

[0018] In one embodiment, the first reading unit includes at least two reading heads, one of which is used to acquire the actual displacement of the bearing mechanism in the first direction and the sliding direction, and the other at least one of the reading heads is used to acquire the actual rotational displacement of the bearing mechanism about a rotating shaft extending along the first direction.

[0019] Based on the actual displacement and the actual rotational displacement, the movement of the bearing mechanism is controlled so that the difference between the actual displacement and the preset displacement is within a first preset error range, and the difference between the actual rotational displacement and the preset rotational displacement is within a second preset error range.

[0020] Alternatively, another reading head is used to obtain the actual rotational displacement of the bearing mechanism about a rotation axis that is perpendicular to the first direction and parallel to the base plane;

[0021] Based on the actual displacement and the actual rotational displacement, the movement of the bearing mechanism is controlled so that the difference between the actual displacement and the preset displacement is within a first preset error range, and the difference between the actual rotational displacement and the preset rotational displacement is within a second preset error range.

[0022] In one embodiment, the support mechanism includes a slider and a support platform. The slider is slidably connected to the base surface along the first direction. The first reading unit or the first grating unit is fixedly connected to the slider. The support platform slides relative to the slider along a second direction that is perpendicular to the first direction and parallel to the base surface. The laser processing equipment further includes a second detection mechanism, which includes a second reading unit and a second grating unit. One of the second reading unit and the second grating unit is fixedly connected to the slider, and the other is fixedly connected to the support platform. The second reading unit is used to sense the second grating unit to obtain multidimensional displacement information, which includes the sliding displacement of the support mechanism in the second direction and perpendicular to the second direction.

[0023] In one embodiment, the first grating unit includes a plurality of stripe components, which are spaced apart along the first direction, and the first reading unit is used to sense the stripe components; the second grating unit includes a plurality of stripe components, which are spaced apart along the second direction, and the second reading unit is used to sense the stripe components; the plane on which the stripe components on the first grating unit are located is perpendicular or parallel to the base plane; the plane on which the stripe components on the second grating unit are located is perpendicular or parallel to the base plane.

[0024] In one embodiment, the second reading unit includes at least two reading heads, and the multidimensional displacement information also includes the rotational displacement generated by the bearing mechanism rotating about a pivot extending along the first direction or the second direction.

[0025] A laser processing method includes the following steps:

[0026] The workpiece is supported on the support mechanism;

[0027] Multidimensional displacement information is obtained through a first detection mechanism. The multidimensional displacement information includes the sliding displacement of the bearing mechanism in a first direction and perpendicular to the first direction. The movement of the bearing mechanism in the first direction and perpendicular to the first direction is controlled by the multidimensional displacement information.

[0028] The workpiece on the supporting mechanism is micro- and nano-sized using a laser.

[0029] In one embodiment, prior to the step of micro-nano-processing the workpiece on the support mechanism using a laser, there is a further step: acquiring multidimensional displacement information through a second detection mechanism, the multidimensional displacement information including the sliding displacement of the support mechanism in a second direction and perpendicular to the second direction, and using the multidimensional displacement information to control the movement of the support mechanism in the second direction and perpendicular to the second direction, the second direction being perpendicular to the first direction.

[0030] One technical effect of an embodiment of this application is that, given that the first reading unit is used to sense the first grating unit to obtain multidimensional displacement information, including the sliding displacement of the bearing mechanism in the first direction and the sliding direction perpendicular to the first direction, the movement of the bearing mechanism in the first direction and the sliding direction can be controlled by the multidimensional displacement information. This can improve the movement accuracy of the bearing mechanism in both the first direction and the sliding direction, ensure that the laser generated by the laser is accurately focused on the circuit board at a specified position for processing, and ultimately improve the processing accuracy of the laser processing equipment. Attached Figure Description

[0031] Figure 1 This is a three-dimensional structural diagram of a support device in a laser processing equipment according to one embodiment.

[0032] Figure 2 for Figure 1 An enlarged structural diagram of point A in the load-bearing device shown.

[0033] Figure 3 for Figure 1 An enlarged structural diagram of point B in the load-bearing device shown.

[0034] Figure 4 for Figure 1 A partial three-dimensional structural diagram of the first grating unit in the carrier device shown.

[0035] Figure 5 for Figure 1 A schematic diagram of the planar structure of the grating ruler in the supporting device shown.

[0036] Figure 6 for Figure 1 A partial three-dimensional structural diagram of the grating ruler in the support device when it is installed vertically.

[0037] Figure 7 A three-dimensional structural schematic diagram of the support device provided for another embodiment.

[0038] Figure 8 for Figure 7 An enlarged structural diagram of point C in the supporting device shown.

[0039] Figure 9 for Figure 7 A magnified structural diagram of point D in the supporting device shown.

[0040] Figure 10 for Figure 7 A partial three-dimensional structural diagram of the grating ruler in the load-bearing device when it is horizontally installed.

[0041] Figure 11 for Figure 1 A three-dimensional structural diagram of the reading component in the carrier device shown.

[0042] Figure 12 for Figure 11 The diagram shows the exploded structure of the reading component.

[0043] Figure 13 This is a flowchart illustrating the process flow of a laser processing method provided in one embodiment.

[0044] Reference numerals: bearing device 10, base 100, base surface 110, bearing mechanism 200, sliding member 210, bearing platform 220, first detection mechanism 300, first reading unit 310, reading assembly 311, reading head 3111, connecting seat 3112, limiting member 3113, mounting seat 312, first elongated hole 3121, second elongated hole 3122, first grating unit 320, grating ruler 321, first stripe segment 3221, second stripe segment 3222, fixing seat 324, sink 3240, bottom wall surface 3241, side wall surface 3242, support seat 325, first surface 3251, second surface 3252, positioning member 326, second detection mechanism 400, second reading unit 410, second grating unit 420. Detailed Implementation

[0045] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0046] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0047] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0048] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0049] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0050] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0051] See Figure 1 and Figure 2 This application provides a laser processing device for micro / nano processing of circuit boards in one embodiment. The laser processing device includes a laser and a support device 10. The support device supports the circuit board, and the laser performs micro / nano processing on the circuit board. The support device 10 includes a base 100, a support mechanism 200, and a first detection mechanism 300. The base 100 has a base surface 110, and the support mechanism 200 is slidably connected to the base surface 110 of the base 100. The support mechanism 200 supports the circuit board and can move the circuit board to a designated position. The first detection mechanism 300 includes a first reading unit 310 and a first grating unit 320. The first grating unit 320 extends along a first direction, that is, the length direction of the first grating unit 320 is the first direction. One of the first reading unit 310 and the first grating unit 320 is fixedly connected to the base 100, and the other is fixedly connected to the support mechanism 200. The first reading unit 310 can be fixedly connected to the sliding member 210 of the support mechanism 200, and the first grating unit 320 is fixedly connected to the base 100. When the support mechanism 200 slides relative to the base 100, the first reading unit 310 can move relative to the first grating unit 320.

[0052] The first reading unit 310 is used to sense the signal from the first grating unit 320 to obtain multidimensional displacement information. This multidimensional displacement information includes the sliding displacement of the support mechanism 200 in the first direction and the sliding direction perpendicular to the first direction. The movement of the support mechanism 200 in the first direction and the sliding direction is controlled using this multidimensional displacement information; therefore, the first grating unit 320 can be understood as a multidimensional grating unit. This improves the movement accuracy of the support mechanism 200, enabling the laser generated by the laser to be accurately focused on the circuit board at a designated position for processing, thereby improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0053] With a spatial rectangular coordinate system as a reference, the first direction can be understood as the X-axis direction in the spatial rectangular coordinate system, the second direction can be understood as the Y-axis direction in the spatial rectangular coordinate system, and the third direction can be understood as the Z-axis direction in the spatial rectangular coordinate system.

[0054] In some embodiments, the base surface 110 serves to support the bearing mechanism 200, and the base surface 110 can be a horizontally arranged surface. A guide rail is provided on the base surface 110, and the guide rail extends along a first direction. A groove on the bearing mechanism 200 can slide with the guide rail, thereby realizing a sliding connection between the bearing mechanism 200 and the base 100. Since the guide rail extends along the first direction, the bearing mechanism 200 can slide relative to the base 100 along the first direction.

[0055] See Figure 1 and Figure 2 In some embodiments, the support mechanism 200 may include a slider 210 and a support platform 220. A groove on the slider 210 slides into a guide rail on the base surface 110, thereby allowing the slider 210 to slide along a first direction and connect to the base 100. A guide rail may also be provided on the slider 210, extending along a second direction. The circuit board is supported on the support platform 220, and the groove on the support platform 220 can slide into the guide rail on the slider 210, thus achieving a sliding connection between the support platform 220 and the slider 210. Since the guide rail on the slider 210 extends along the second direction, the support platform 220 can slide relative to the slider 210 along the second direction. Therefore, by allowing the slider 210 to slide relative to the base 100 along the first direction, and the support platform 220 to slide relative to the slider 210 along the second direction, the support platform 220 can slide relative to the base 100 along both the first and second directions, thus giving the support platform 220 two degrees of freedom of movement. In other embodiments, when the support platform 220 is fixedly connected to the slider 210, the support platform 220 cannot slide relative to the slider 210. Therefore, the support platform 220 and the slider 210 slide synchronously relative to the base 100 in the first direction. At this time, the support platform 220 has one degree of freedom of movement.

[0056] See Figure 4 and Figure 5The first grating unit 320 includes a grating ruler 321, first stripe segments 3211, and second stripe segments 3222. There are multiple first stripe segments 3211 and multiple second stripe segments 3222. The grating ruler 321 can be fixedly connected to the base 100 and extends along a first direction, serving as a carrier for the first stripe segments 3211 and 3222. Multiple first stripe segments 3211 are evenly spaced along the length of the grating ruler 321, with equal spacing between any two adjacent segments. Similarly, multiple second stripe segments 3222 are evenly spaced along the length of the grating ruler 321, with equal spacing between any two adjacent segments. One end of the first stripe segment 3211 extends to one side of the grating ruler 321 in the width direction, and one end of the second stripe segment 3222 extends to the other side of the grating ruler 321 in the width direction. The first stripe segment 3211 and the second stripe segment 3222 are arranged at an angle, and the sum of the dimensions of the first stripe segment 3211 and the second stripe segment 3222 in the width direction of the grating ruler 321 is equal to the width of the grating ruler 321. For example, if the dimension of the first stripe segment 3211 in the width direction of the grating ruler 321 is H1, the dimension of the second stripe segment 3222 in the width direction of the grating ruler 321 is H2, and the width of the grating ruler 321 is H, then H1 + H2 = H. The first reading unit 310 is used to sense the first fringe segment 3211 and the second fringe segment 3222. Based on the principle of light interference, during the movement of the first reading unit 310 relative to the first grating unit 320, the light emitted by the first reading unit 310 will sequentially pass through the first fringe segment 3211 and the second fringe segment 3222 on the grating ruler 321 and induce interference fringes. These interference fringes can be converted into electrical signals, which can provide feedback on the movement errors of the slider 210 and the support mechanism 200. In other embodiments, the first reading unit 310 can be fixedly connected to the base 100, and the first grating unit 320 can be fixedly connected to the slider 210 of the support mechanism 200. The sum of the dimensions of the first fringe segment 3211 and the second fringe segment 3222 in the width direction of the grating ruler 321 is greater than the width of the grating ruler 321. The first fringe segment 3211 and the second fringe segment 3222 can be straight lines or curves.

[0057] If the stripes on the grating ruler of the first detection mechanism extend along a straight line perpendicular to the first direction, and multiple stripes are spaced apart along the first direction and are parallel to each other, when the first reading unit moves relative to the grating ruler, the first reading unit can only sense the grating ruler and obtain the sliding displacement of the slider and the supporting mechanism along the first direction. That is, the first reading unit can only sense and obtain the one-dimensional displacement information represented by the sliding displacement, and compensate for the difference between the sliding displacement and the preset position displacement, so that the difference between the sliding displacement and the preset position is within the preset error range. In other words, the laser processing equipment can only perform one-dimensional error compensation. This will affect the motion control accuracy of the supporting mechanism, making it difficult for the laser generated by the laser to be accurately focused on the circuit board at the specified position for processing, thereby affecting the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0058] Regarding the support device 10 in the above embodiments, given the special configuration of the first stripe segment 3211 and the second stripe segment 3222, when the first reading unit 310 moves relative to the grating ruler 321, the first reading unit 310 can not only sense and acquire the sliding displacement of the slider 210 and the support mechanism 200 in the first direction, but also sense and acquire the sliding displacement of the slider 210 and the support mechanism 200 in the sliding direction. That is, the first detection mechanism 300 can acquire the multidimensional displacement information represented by the two sliding displacements. For example, the first reading unit 310 simultaneously acquires two actual displacements of the bearing mechanism 200 in the first direction and the sliding direction, and compensates for the difference between the two actual displacements and the preset displacement, so that the difference between the two actual displacements and the preset displacement is within the first preset error range. That is, the laser processing equipment can perform multi-dimensional error compensation. In this way, the laser processing equipment can accurately control the two movements of the bearing mechanism 200 in the first direction and the sliding direction, thereby improving the motion control accuracy of the bearing mechanism 200, ensuring that the laser generated by the laser is accurately focused on the circuit board at the specified position for processing, and ultimately improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0059] See Figure 4 and Figure 5 In some embodiments, the spacing between two adjacent first stripe segments 3211 can be equal to the spacing between two adjacent second stripe segments 3222. This reduces the manufacturing difficulty and cost of the first grating unit 320 and also ensures the motion control accuracy of the carrier device 10. In other embodiments, the spacing between two adjacent first stripe segments 3211 and the spacing between two adjacent second stripe segments 3222 may not be equal.

[0060] See Figure 1 and Figure 7In some embodiments, the surface of the grating ruler 321 used to set the first stripe segment 3211 and the second stripe segment 3222 is parallel or perpendicular to the base surface 110. Clearly, the surface of the grating ruler 321 used to set the first stripe segment 3211 and the second stripe segment 3222 is one surface in the thickness direction of the grating ruler 321. (See also...) Figure 1 and Figure 6 When the surface of the grating ruler 321 used to set the first stripe segment 3211 and the second stripe segment 3222 is perpendicular to the base surface 110, it can be understood that the grating ruler 321 is vertically mounted. Obviously, when the grating ruler 321 is vertically mounted, the plane containing the stripe assembly 322 is perpendicular to the base surface 110. When the first reading unit 310 moves relative to the grating ruler 321, the first reading unit 310 can sense and acquire the sliding displacement of the bearing mechanism 200 in the first direction and the sliding direction. At this time, the sliding direction is a third direction perpendicular to the base surface 1110. (See reference...) Figure 7 and Figure 10 When the surface of the grating ruler 321 used to set the first stripe segment 3211 and the second stripe segment 3222 is parallel to the base surface 110, it can be understood that the grating ruler 321 is horizontally mounted. Obviously, when the grating ruler 321 is horizontally mounted, the plane where the stripe assembly 322 is located is parallel to the base surface 110. When the first reading unit 310 moves relative to the grating ruler 321, the first reading unit 310 can sense and acquire the sliding displacement of the bearing mechanism 200 in the first direction and the sliding direction. At this time, the sliding direction is the second direction parallel to the base surface 1110. Therefore, depending on different processing needs, the vertical or horizontal mounting mode of the grating ruler 321 can be selected.

[0061] See Figure 4 , Figure 6 and Figure 10In some embodiments, the first grating unit 320 further includes a fixing base 324 and a support base 325. The fixing base 324 is disposed on the base surface 110 and has a recessed groove 3240. The bottom wall surface 3241 and the side wall surface 3242 of the recessed groove 3240 intersect perpendicularly. The bottom wall surface 3241 is parallel to the base surface 110, and the side wall surface 3242 is perpendicular to the base surface 110. The support base 325 can be generally flat and has a first surface 3251 and a second surface 3252 located in the thickness direction of the support base 325. Obviously, the first surface 3251 and the second surface 3252 are spaced apart in the thickness direction of the support base 325 and face opposite directions. The grating ruler 321 is disposed on the first surface 3251, that is, the other surface in the thickness direction of the grating ruler 321 can be directly attached to the first surface 3251. For example, the grating ruler 321 can be glued to the first surface 3251 of the support base 325. The second surface 3252 of the support base 325 can be fixed to the bottom wall surface 3241 or the side wall surface 3242, thus realizing a fixed connection between the support base 325 and the fixed base 324. For example, the support base 325 and the fixed base 324 can be fixedly connected by a detachable connection method such as bolts. When the support base 325 is fixed to the side wall surface 3242 of the fixed base 324, the surface of the grating ruler 321 used to set the stripe assembly is perpendicular to the base surface 110, thus realizing the vertical installation of the grating ruler 321; when the support base 325 is fixed to the bottom wall surface 3241 of the fixed base 324, the surface of the grating ruler 321 used to set the stripe assembly is parallel to the base surface 110, thus realizing the horizontal installation of the grating ruler 321. Since the support base 325 and the fixed base 324 can be fixedly connected by detachable connection methods such as bolt connection, the installation of the support base 325 on the bottom wall surface 3241 and the side wall surface 3242 can be switched, thereby realizing the switching between vertical and horizontal installation of the grating ruler 321.

[0062] It is understandable that when the grating ruler 321 is installed vertically, the side of the support base 325 in the width direction of the grating ruler 321 can abut against the bottom wall surface 3241. That is, the bottom wall surface 3241 provides excellent positioning for the support base 325, thereby improving the installation accuracy and efficiency of the support base 325. When the grating ruler 321 is installed horizontally, the side of the support base 325 in the width direction of the grating ruler 321 can abut against the side wall surface 3242. That is, the side wall surface 3242 provides excellent positioning for the support base 325, thereby improving the installation accuracy and efficiency of the support base 325.

[0063] In some embodiments, the mounting base 324 may be made of a material with a low coefficient of thermal expansion, such as marble. Marble allows for high machining precision, thus meeting the installation requirements of the support base 325. Given that the support base 325 has a long, narrow structure, it may be made of steel to improve its structural strength and machining precision.

[0064] See Figure 4 In some embodiments, the first grating unit 320 further includes a positioning member 326. The positioning member 326 can be a plate-like structure and is fixedly connected to the support base 325. For example, the positioning member 326 is fixedly connected to the side of the support base 325. The positioning member 326 and the support base 325 can be fixedly connected by a detachable connection method such as bolts. The positioning member 326 protrudes from the first surface 3251 of the support base 325. During the process of installing the grating ruler 321 on the first surface 3251, the side of the grating ruler 321 extending along the first direction can abut against the protruding part of the positioning member 326 relative to the first surface 3251. This enables the positioning member 326 to position the grating ruler 321, thereby improving the assembly accuracy and assembly efficiency of the grating ruler 321. There can be multiple positioning members 326, such as three, which are spaced apart on the support base 325 along the first direction.

[0065] See Figure 2 , Figure 11 and Figure 12 In some embodiments, the first reading unit 310 includes a reading component 311 and a mounting base 312, which are detachably connected. The mounting base 312 is detachably connected to a slider 210 on the support mechanism 200. The reading component 311 is used to sense the first stripe segment 3211 and the second stripe segment 3222. This improves the ease of installation and maintenance of the first reading unit 310.

[0066] See Figure 2In some embodiments, the mounting base 312 is provided with a first elongated hole 3121, which may be a slotted hole or the like, and extends perpendicular to a first direction. The first reading unit 310 also includes a first fastener, which may be a bolt or the like, and the first fastener passes through the first elongated hole 3121 and is fixedly connected to the sliding member 210 of the supporting mechanism 200. The number of first elongated holes 3121 and the number of first fasteners are equal and correspond one-to-one. When the installation position of the first fastener in the first elongated hole 3121 is changed, the installation position of the mounting base 312 on the supporting mechanism 200 can be changed, thereby changing the spacing between the reading component 311 and the stripe component. Therefore, by providing the first elongated hole 3121 and the first fastener, the spacing between the reading component 311 and the stripe component can be adjusted, thereby improving the detection accuracy of the first detection mechanism 300. For example, when the grating ruler 321 is installed vertically, the first elongated hole 3121 can extend along the second direction; see reference Figure 8 For example, when the grating ruler 321 is installed horizontally, the first elongated hole 3121 can extend along a third direction. In other embodiments, the first elongated hole 3121 can also be provided on the slider 210 of the support mechanism 200.

[0067] See Figure 2 In some embodiments, the mounting base 312 is provided with a second elongated hole 3122, which may be an oblong hole or the like, and the second elongated hole 3122 extends perpendicular to the first direction. The second reading unit 410 also includes a second fastener, which can be a bolt, etc. The second fastener passes through the second elongated hole 3122 and is fixedly connected to the reading component 311. The number of second elongated holes 3122 and the number of second fasteners are equal and correspond one-to-one. When the installation position of the second fastener in the second elongated hole 3122 is changed, the installation position of the reading component 311 on the mounting base 312 can be changed, thereby changing the coverage area of ​​the orthographic projection of the reading component 311 on the first grating unit 320. This improves the alignment accuracy between the reading component 311 and the first stripe segment 3211 and the second stripe segment 3222, ensuring that the first stripe segment 3211 and the second stripe segment 3222 are within the scanning range of the reading component 311, and also ensuring that the movement of the reading component 311 does not exceed the range of the first stripe segment 3211 and the second stripe segment 3222, thereby improving the detection accuracy of the first detection mechanism 300. (See reference...) Figure 2 For example, when the grating ruler 321 is installed vertically, the second elongated hole 3122 can extend along a third direction; see reference Figure 8 For example, when the grating ruler 321 is mounted horizontally, the second elongated hole 3122 can extend along the second direction. In other embodiments, the second elongated hole 3122 can also be provided on the reading component 311.

[0068] See Figure 11 and Figure 12 In some embodiments, the reading component 311 includes a reading head 3111 and a connecting seat 3112. The reading head 3111 is used to sense the signal of the stripe component 322. The connecting seat 3112 is detachably connected to the mounting base 312, and the reading head 3111 is detachably connected to the connecting seat 3112. For example, the detachable connection between the reading head 3111 and the connecting seat 3112 is achieved by bolt connection or snap connection. This also improves the convenience of installation and maintenance of the first reading unit 310. It can be understood that when the grating ruler 321 is installed vertically, the stripe component 322 is located between the second fixing surface 3242 of the fixing base 324 and the reading head 3111 along the second direction, so that the reading head 3211 is oriented towards the stripe component 322, which facilitates the reading head 3211 to sense the signal of the stripe component 322 to obtain multidimensional displacement information. When the grating ruler 321 is installed horizontally, the stripe assembly 322 is located along a third direction between the first fixing surface 3241 of the fixing base 324 and the reading head 3111, so that the reading head 3211 is oriented towards the stripe assembly 322. This also facilitates the reading head 3211 in sensing the signal of the stripe assembly 322 to obtain multidimensional displacement information. See reference. Figure 11 and Figure 12 In some embodiments, the reading assembly 311 further includes a limiting member 3113, which can be a columnar structure. The limiting member 3113 can be fixedly connected to the connecting seat 3112 and pass through the reading head 3111. By setting the limiting post, the limiting post will limit and guide the reading head 3111, improve the assembly efficiency and assembly accuracy of the reading head 3111, and ultimately improve the assembly efficiency and assembly accuracy of the entire reading assembly 311.

[0069] In some embodiments, the connecting seat 3112, the mounting seat 312, and the bearing mechanism 200 at the position where the mounting seat 312 is fixed are made of the same material; for example, the connecting seat 3112, the mounting seat 312, and the slider 210 can be made of the same material. Even if temperature changes cause slight deformation of the three components, when the temperature returns to a reasonable range, the deformation of the same material can be recovered in time, improving the assembly accuracy between the connecting seat 3112, the mounting seat 312, and the slider 210, thereby improving the detection accuracy of the first detection mechanism 300, and ultimately improving the motion control accuracy of the bearing device 10 on the bearing mechanism 200.

[0070] In some embodiments, the first reading unit 310 includes a reading head 3111, which is used to sense the first grating unit 320 to obtain multidimensional displacement information. By setting a single reading head 3111, multidimensional displacement information can be obtained, thereby simplifying the structure of the first reading unit 310. For example, the single reading head 3111 can obtain two actual displacements of the bearing mechanism 200 in the first direction and the sliding direction.

[0071] When the grating ruler 321 is installed vertically, the sliding direction is a third direction perpendicular to the base surface 1110. That is, the reading head 3111 acquires two actual displacements of the bearing mechanism 200 in the first direction and the third direction, and compensates for the difference between the two actual displacements and the preset displacements, so that the difference between the two actual displacements and the preset displacements is within the first preset error range. That is, the laser processing equipment can perform multi-dimensional error compensation. In this way, the laser processing equipment can accurately control the two movements of the bearing mechanism 200 in the first direction and the third direction, thereby improving the motion control accuracy of the bearing mechanism 200, and ultimately improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0072] When the grating ruler 321 is installed horizontally, the sliding direction is the second direction parallel to the base surface 1110. That is, the reading head 3111 acquires the two actual displacements of the bearing mechanism 200 in the first and second directions, and compensates for the difference between the two actual displacements and the preset displacements, so that the difference between the two actual displacements and the preset displacements is within the first preset error range. That is, the laser processing equipment can perform multi-dimensional error compensation. In this way, the laser processing equipment can accurately control the two movements of the bearing mechanism 200 in the first and second directions, which also improves the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0073] In some embodiments, the first reading unit 310 includes at least two reading heads 3111. When the grating ruler 321 is installed vertically, one reading head 3111 is used to acquire the actual displacement of the bearing mechanism 200 in the first direction and the third direction, and to compensate for the difference between the two actual displacements and the preset displacement, so that the difference between the two actual displacements and the preset displacement is within the first preset error range. The other at least one reading head 3111 is used to acquire the actual rotational displacement generated by the bearing mechanism 200 about the rotating shaft extending along the second direction, and to compensate for the difference between the two actual rotational displacements and the preset rotational displacement, so that the difference between the actual rotational displacement and the preset rotational displacement is within the second preset error range. The actual rotational displacement can be understood as the pitch angle. Therefore, the multidimensional displacement information includes not only the sliding displacement in the first and third directions, but also the rotational displacement generated by the rotating shaft extending around the second direction. This allows the laser processing equipment to precisely control the sliding of the bearing mechanism 200 along the first and third directions, as well as the rotation generated by the rotating shaft extending around the second direction. This improves the motion control accuracy of the bearing mechanism 200 and ultimately enhances the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0074] When the grating ruler 321 is horizontally mounted, one reading head 3111 is used to acquire the actual displacement of the bearing mechanism 200 in the first and second directions, and to compensate for the difference between the two actual displacements and preset displacements, so that the difference between the two actual displacements and the preset displacements is within a first preset error range. At least one additional reading head 3111 is used to acquire the actual rotational displacement of the bearing mechanism 200 around a rotating shaft extending along the first direction, and to compensate for the difference between the two actual rotational displacements and preset rotational displacements, so that the difference between the actual rotational displacement and the preset rotational displacement is within a second preset error range. This actual rotational displacement can be understood as the yaw angle. Therefore, the multidimensional displacement information includes not only the sliding displacement in the first and second directions, but also the rotational displacement generated around the rotating shaft extending along the first direction. This allows the laser processing equipment to precisely control the sliding of the bearing mechanism 200 along the first and second directions, as well as the rotation generated around the rotating shaft extending along the first direction, thereby improving the motion control accuracy of the bearing mechanism 200 and ultimately improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0075] See Figure 1 and Figure 7In some embodiments, when the support platform 220 and the slider 210 are slidably arranged, the support device 10 may further include a second detection mechanism 400. The second detection mechanism 400 includes a second reading unit 410 and a second grating unit 420. One of the second reading unit 410 and the second grating unit 420 is fixedly connected to the slider 210 and the other is fixedly connected to the support platform 220. For example, the second grating unit 420 is fixedly connected to the slider 210 and the second reading unit 410 is fixedly connected to the support platform 220. The length direction of the second grating unit 420 is a second direction. The second grating unit 420 has the same structure as the first grating unit 320, and the second grating unit 420 can also be understood as a multi-dimensional grating unit. The second reading unit 410 is used to sense the first stripe segment 3211 and the second stripe segment 3222 on the second grating unit 420. Therefore, the second grating unit 420 may also include a grating ruler 321, a first stripe segment 3211, a second stripe segment 3222, a fixing base 324, a support base 325, and a positioning element 326. The structure and connection relationship of the grating ruler 321, the first stripe segment 3221, the second stripe segment 3222, the fixing base 324, the support base 325, and the positioning element 326 in the second grating unit 420 can refer to the design of the first grating unit 320, and will not be repeated here. The grating ruler 321 on the second grating unit 420 is used to set the surface of the first stripe segment and the second stripe segment 3222, which are parallel or perpendicular to the base surface 110. Therefore, the grating ruler 321 of the second grating unit 420 can also be installed vertically or horizontally.

[0076] It is understood that when both the first grating unit 320 and the second grating unit 420 exist simultaneously, the plane of the stripe component 322 on the first grating unit 320 is perpendicular or parallel to the base surface 110; the plane of the stripe component 322 on the second grating unit 420 is also perpendicular or parallel to the base surface 110. There are multiple combinations. For example, when the plane of the stripe component 322 on the first grating unit 320 is perpendicular to the base surface 110, i.e., the grating ruler 321 of the first grating unit 320 is installed vertically, the grating ruler 321 of the second grating unit 420 can be installed vertically or horizontally. Similarly, when the plane of the stripe component 322 on the first grating unit 320 is parallel to the base surface 110, i.e., the grating ruler 321 of the first grating unit 320 is installed horizontally, the grating ruler 321 of the second grating unit 420 can be installed vertically or horizontally. In some embodiments, the second reading unit 410 includes a reading head 3111, similar to the first detection mechanism 300. When the second reading unit 410 moves relative to the second grating unit 420 in the second direction, in the case of the grating ruler 321 being installed vertically, the second reading unit 410 can sense and acquire the sliding displacement of the support platform 220 in the second and third directions, so that the laser processing equipment can accurately control the two movements of the support mechanism 200 in the second and third directions, thereby improving the motion control accuracy of the support mechanism 200. In the case of the grating ruler 321 being installed horizontally, the second reading unit 410 can sense and acquire the sliding displacement of the support platform 220 in the second and first directions, so that the laser processing equipment can accurately control the two movements of the support mechanism 200 in the second and first directions, thereby improving the motion control accuracy of the support mechanism 200.

[0077] See Figure 3 and Figure 9 In some embodiments, the second reading unit 410 includes at least two reading heads 3111. Similar to the first detection mechanism 300, when the grating ruler 321 is vertically mounted, one reading head 3111 is used to acquire the actual displacement of the support mechanism 200 in the second and third directions, and the other at least one reading head 3111 is used to acquire the actual rotational displacement of the support mechanism 200 about the axis extending along the first direction. Therefore, the multidimensional displacement information includes not only the sliding displacement in the second and third directions, but also the rotational displacement about the axis extending along the first direction, enabling the laser processing equipment to precisely control the sliding of the support mechanism 200 in the second and third directions, as well as the rotation about the axis extending along the first direction, thereby improving the motion control accuracy of the support mechanism 200 and ultimately improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0078] When the grating ruler 321 is horizontally mounted, one reading head 3111 is used to acquire the actual displacement of the support mechanism 200 in the second and first directions, and at least one other reading head 3111 is used to acquire the actual rotational displacement of the support mechanism 200 about a rotating shaft extending along the second direction. Therefore, the multidimensional displacement information includes not only the sliding displacement in the second and first directions, but also the rotational displacement about a rotating shaft extending along the second direction. This allows the laser processing equipment to precisely control the sliding of the support mechanism 200 along the second and first directions, as well as the rotation about a rotating shaft extending along the second direction, thereby improving the motion control accuracy of the support mechanism 200 and ultimately improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0079] See Figure 3 and Figure 9 Similar to the first detection mechanism 300, the second reading unit 410 may also include a reading head 3111, a mounting base 312, a connecting base 3112, a limiting member 3113, a first fastener, and a second fastener. The connection relationship between the reading head 3111, mounting base 312, connecting base 3112, limiting member 3113, first fastener, and second fastener can refer to the design pattern of the first reading unit 310. The mounting base 312 on the second reading unit 410 may also have a first elongated hole 3121 and a second elongated hole 3122, with the first elongated hole 3121 extending perpendicular to a second direction. By setting the first elongated hole 3121 and the first fastener, the spacing between the reading component 311 and the stripe component can be adjusted, thereby improving the detection accuracy of the second detection mechanism 400. (See also...) Figure 3 For example, when the grating ruler 321 is installed vertically, the first elongated hole 3121 can extend along the first direction; see reference Figure 9 For example, when the grating ruler 321 is installed horizontally, the first elongated hole 3121 can extend along a third direction. The second elongated hole 3122 extends perpendicular to the second direction. By setting the second elongated hole 3122 and the second fastener, the alignment accuracy between the reading assembly 311 and the first stripe segment 3211 and the second stripe segment 3222 can be improved, thereby improving the detection accuracy of the second detection mechanism 400. (See also...) Figure 3 For example, when the grating ruler 321 is installed vertically, the second elongated hole 3122 can extend along a third direction; see reference Figure 9 For example, when the grating ruler 321 is installed horizontally, the second elongated hole 3122 can extend along the first direction.

[0080] See Figure 13 This application also provides a laser processing method, which mainly includes the following steps:

[0081] S510, which supports the workpiece on the support mechanism. The workpiece can be a circuit board.

[0082] S520, multi-dimensional displacement information is obtained through the first detection mechanism 300. The multi-dimensional displacement information includes the sliding displacement of the bearing mechanism 200 in the first direction and perpendicular to the first direction. The movement of the bearing mechanism 200 in the first direction and perpendicular to the first direction is controlled by the multi-dimensional displacement information.

[0083] The S530 uses a laser to perform micro-nano processing on the workpiece on the support mechanism 200.

[0084] For example, given that the first detection mechanism 300 can acquire multidimensional displacement information represented by the two actual displacements of the bearing mechanism 200 sliding in the first direction and perpendicular to the first direction, the first detection mechanism 300 compensates for the difference between the two actual displacements and the preset displacement, so that the difference between the two actual displacements and the preset displacement is within the preset error range. That is, the laser processing equipment can perform multidimensional error compensation, thereby enabling the laser processing equipment to accurately control the two movements of the bearing mechanism 200 in the first direction and perpendicular to the first direction, thereby improving the motion control accuracy of the bearing mechanism 200, ensuring that the laser generated by the laser is accurately focused on the circuit board at the specified position for processing, and ultimately improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0085] In some embodiments, before the step of micro-nano processing of the workpiece on the support mechanism 200 by laser, i.e. step S530, there is a step: acquiring multidimensional displacement information by the second detection mechanism 400, the multidimensional displacement information including the sliding displacement of the support mechanism in the second direction and perpendicular to the second direction, and controlling the movement of the support mechanism in the second direction and perpendicular to the second direction by using the multidimensional displacement information, the second direction being perpendicular to the first direction.

[0086] For example, similar to the first detection mechanism 300, the second detection mechanism 400 can acquire multi-dimensional displacement information represented by the two actual displacements of the bearing mechanism 200 sliding in the second direction and perpendicular to the second direction. This allows the first detection mechanism 300 to compensate for the difference between the two actual displacements and the preset displacements, ensuring that the difference between the two actual displacements and the preset displacements is within a preset error range. In other words, the laser processing equipment can perform multi-dimensional error compensation. This enables the laser processing equipment to precisely control the two movements of the bearing mechanism 200 in the second direction and perpendicular to the second direction, thereby improving the motion control accuracy of the bearing mechanism 200. This ensures that the laser generated by the laser is accurately focused on the circuit board at a specified position for processing, ultimately improving the processing accuracy of the laser and the entire laser processing equipment on the circuit board.

[0087] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0088] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A laser processing device for micro / nano processing of circuit boards, characterized in that, The laser processing equipment includes a laser and a support device. The support device is used to support a circuit board, and the laser is used to perform micro-nano processing on the circuit board. The support device includes: The base has a base surface; The supporting mechanism is slidably connected to the base surface along the first direction; and The first detection mechanism includes a first reading unit and a first grating unit. The first grating unit extends along the first direction. One of the first reading unit and the first grating unit is fixedly connected to the base and the other is fixedly connected to the support mechanism. The first reading unit is used to sense the first grating unit to obtain multidimensional displacement information. The multidimensional displacement information includes the sliding displacement of the support mechanism in the first direction and the sliding direction perpendicular to the first direction. The movement of the support mechanism in the first direction and the sliding direction is controlled by the multidimensional displacement information.

2. The laser processing equipment according to claim 1, characterized in that, The first reading unit includes a reading head, which is used to sense the first grating unit to obtain multidimensional displacement information.

3. The laser processing equipment according to claim 2, characterized in that, The first grating unit includes a plurality of stripe components, which are spaced apart along the first direction. The first reading unit is used to sense the stripe components. When the plane where the stripe component is located is parallel to the base surface, the sliding direction is a second direction parallel to the base surface. When the plane where the stripe component is located is perpendicular to the base surface, the sliding direction is a third direction perpendicular to the base surface.

4. The laser processing equipment according to claim 2, characterized in that, The first reading unit includes a reading head, which is used to acquire the actual displacement of the bearing mechanism in the first direction and the sliding direction; Based on the actual displacement, the movement of the bearing mechanism is controlled so that the difference between the actual displacement and the preset displacement is within a first preset error range.

5. The laser processing equipment according to claim 3, characterized in that, The first grating unit further includes a fixed base, a support base, and a grating ruler. The fixed base is disposed on the base surface, the support base is disposed on the fixed base, the grating ruler is disposed on the support base, and the stripe assembly is disposed on the grating ruler. The fixed base is made of marble; or, the support base is made of steel.

6. The laser processing equipment according to claim 3, characterized in that, The first reading unit includes a mounting base, a reading head, and a connecting base. The mounting base is detachably connected to the support mechanism. The reading head is used to sense the first grating unit and is detachably connected to the connecting base. The connecting base is connected to the mounting base. The connecting base, the mounting base, and the support mechanism at the position where the mounting base is fixed are made of the same material.

7. The laser processing equipment according to claim 6, characterized in that, The mounting base is provided with a first elongated hole extending perpendicular to the first direction. The first reading unit also includes a first fastener, which passes through the first elongated hole and is connected to the bearing mechanism. When the installation position of the first fastener in the first elongated hole is changed, the distance between the reading head and the stripe assembly can be changed.

8. The laser processing equipment according to claim 6, characterized in that, The mounting base is provided with a second elongated hole extending perpendicular to the first direction. The first reading unit also includes a second fastener, which passes through the second elongated hole and is connected to the reading component. When the installation position of the second fastener in the second elongated hole is changed, the coverage area of ​​the orthographic projection of the reading head on the first grating unit can be changed.

9. The laser processing equipment according to claim 1, characterized in that, The first reading unit includes at least two reading heads. One reading head is used to obtain the actual displacement of the bearing mechanism in the first direction and the sliding direction. The other at least one reading head is used to obtain the actual rotational displacement of the bearing mechanism about the rotating shaft extending along the first direction. Based on the actual displacement and the actual rotational displacement, the movement of the bearing mechanism is controlled so that the difference between the actual displacement and the preset displacement is within a first preset error range, and the difference between the actual rotational displacement and the preset rotational displacement is within a second preset error range. Alternatively, at least one of the reading heads is used to obtain the actual rotational displacement of the bearing mechanism about a rotation axis that is perpendicular to the first direction and parallel to the base plane; Based on the actual displacement and the actual rotational displacement, the movement of the bearing mechanism is controlled so that the difference between the actual displacement and the preset displacement is within a first preset error range, and the difference between the actual rotational displacement and the preset rotational displacement is within a second preset error range.

10. The laser processing equipment according to claim 1, characterized in that, The supporting mechanism includes a slider and a support platform. The slider is slidably connected to the base surface along the first direction. The first reading unit or the first grating unit is fixedly connected to the slider. The support platform slides relative to the slider along a second direction that is perpendicular to the first direction and parallel to the base surface. The laser processing equipment further includes a second detection mechanism, which includes a second reading unit and a second grating unit. One of the second reading unit and the second grating unit is fixedly connected to the slider and the other is fixedly connected to the support platform. The second reading unit is used to sense the second grating unit to obtain multidimensional displacement information. The multidimensional displacement information includes the sliding displacement of the supporting mechanism in the second direction and perpendicular to the second direction.

11. The laser processing equipment according to claim 10, characterized in that, The first grating unit includes a plurality of stripe components, which are spaced apart along the first direction, and the first reading unit is used to sense the stripe components; the second grating unit includes a plurality of stripe components, which are spaced apart along the second direction, and the second reading unit is used to sense the stripe components; the plane on which the stripe components on the first grating unit are located is perpendicular or parallel to the base plane; the plane on which the stripe components on the second grating unit are located is perpendicular or parallel to the base plane.

12. The laser processing equipment according to claim 10, characterized in that, The second reading unit includes at least two reading heads, and the multidimensional displacement information also includes the rotational displacement generated by the bearing mechanism rotating about a shaft extending along the first direction or the second direction.

13. A laser processing method, characterized in that, Includes the following steps: The workpiece is supported on the support mechanism; Multidimensional displacement information is obtained through a first detection mechanism. The multidimensional displacement information includes the sliding displacement of the bearing mechanism in a first direction and perpendicular to the first direction. The movement of the bearing mechanism in the first direction and perpendicular to the first direction is controlled by the multidimensional displacement information. The workpiece on the supporting mechanism is micro- and nano-sized using a laser.

14. The laser processing method according to claim 13, characterized in that, Before the step of performing micro-nano processing on the workpiece on the support mechanism using a laser, there is another step: acquiring multi-dimensional displacement information through a second detection mechanism, the multi-dimensional displacement information including the sliding displacement of the support mechanism in a second direction and perpendicular to the second direction, and controlling the movement of the support mechanism in the second direction and perpendicular to the second direction through the multi-dimensional displacement information, the second direction being perpendicular to the first direction.

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