Delivery device and laser processing apparatus

Abstract

The application is suitable for the technical field of semiconductor processing, and provides a conveying device and a laser processing equipment. The conveying device comprises a base, a first guide, a first driving unit and a second guide. The first guide and the first driving unit are arranged on the base. The first guide is provided with a first recess extending along a first direction. The second guide is arranged on an output end of the first driving unit. The first driving unit is used for driving the second guide to lift. The first guide and the second guide are arranged in a spaced manner. The length direction of the first guide and the length direction of the second guide are parallel to the first direction. The second guide is provided with a second recess extending along the first direction. The second recess is located on the side of the second guide close to the first guide. The first recess is located on the side of the first guide close to the second guide. The embodiment of the application can reduce the steps of positioning the product and improve the marking efficiency of the product.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to a conveying device and laser processing equipment. Background Technology

[0002] Copper frame packaging marking is a critical step in the chip manufacturing process, directly impacting product identification, traceability, and market distribution. In today's rapidly evolving semiconductor industry, extremely stringent requirements are placed on the accuracy, efficiency, and equipment compatibility of packaging marking.

[0003] Currently, most methods involve using a suction cup to pick up the copper frame, then using a robotic arm to place the copper frame at the marking position. After positioning the copper frame at the marking position, a laser beam is used to mark the copper frame.

[0004] However, the above-mentioned method of conveying the copper frame requires multiple positioning operations before the copper frame can be marked, which affects the marking efficiency of the copper frame. Utility Model Content

[0005] This application provides a conveying device and a laser processing equipment, which can improve the marking efficiency of products.

[0006] In a first aspect, embodiments of this application provide a conveying device, the conveying device comprising:

[0007] Base;

[0008] A first guide member is disposed on the base, and a first recess extending in a first direction is provided on the top of the first guide member.

[0009] A first driving unit is disposed on the base;

[0010] The second guide member is disposed at the output end of the first drive unit, and the first drive unit is used to drive the second guide member to rise and fall; the first guide member and the second guide member are spaced apart along the second direction, and the length direction of the first guide member and the length direction of the second guide member are both parallel to the first direction; the top of the second guide member is provided with a second recess extending along the first direction, and the second recess is located on the side of the second guide member closer to the first guide member, and the first recess is located on the side of the first guide member closer to the second guide member;

[0011] The vertical direction, the first direction, and the second direction are perpendicular to each other.

[0012] In some possible embodiments of the first aspect, the conveying device further includes:

[0013] The second drive unit is disposed on the base, and the first drive unit is disposed at the output end of the second drive unit. The second drive unit is used to drive the first drive unit to move along the second direction.

[0014] In some possible embodiments of the first aspect, the conveying device further includes:

[0015] A plurality of first slide rails are provided on the base at intervals along the first direction, and the length direction of the first slide rails is parallel to the second direction.

[0016] A support base is slidably mounted on the first slide rail. The support base is connected to the output end of the second drive unit, and the first drive unit is disposed on the support base.

[0017] In some possible embodiments of the first aspect, the conveying device further includes:

[0018] Multiple second slide rails are provided at intervals along the first direction on the support base. The length direction of the second slide rail is parallel to the vertical direction. The second guide member is slidably disposed on the second slide rail.

[0019] In some possible implementations of the first aspect, the positions of the first slide rail and the second slide rail are both symmetrical about the vertical plane where the output end of the first drive unit is located.

[0020] In some possible embodiments of the first aspect, the conveying device further includes:

[0021] A dust extraction unit is disposed on top of the second guide member, and the dust extraction port of the dust extraction unit faces the first guide member.

[0022] In some possible embodiments of the first aspect, the conveying device further includes:

[0023] An air blowing unit is disposed on the top of the first guide member, and the air blowing port of the air blowing unit faces the dust extraction unit.

[0024] In some possible embodiments of the first aspect, the conveying device further includes:

[0025] Multiple support columns are spaced apart on the base along the first direction, and the first guide member is disposed on the top of the support columns.

[0026] In some possible embodiments of the first aspect, the base is provided with a clearance hole, the length direction of the clearance hole is parallel to the first direction, and the clearance hole is located between the orthographic projection of the first guide member on the base and the orthographic projection of the second guide member on the base.

[0027] Secondly, embodiments of this application provide a laser processing device, which includes a conveying device as described in any of the above technical solutions.

[0028] The conveying device and laser processing equipment provided in this application embodiment can place the opposite sides of a product on a first recessed platform and a second recessed platform respectively, and then push the product to slide along a first direction on a first guide member and a second guide member to realize the conveying of the product; the first driving unit is used to drive the second guide member to lift and lower, so as to adjust the relative height of the first recessed platform and the second recessed platform, thereby accommodating products with different heights on opposite sides; the side walls of the first recessed platform and the side walls of the second recessed platform can limit the position of the product in a second direction, thus reducing the number of positioning steps for the product placed on the first recessed platform and the second recessed platform, or even eliminating the need to position the product before laser marking the product placed on the first recessed platform and the second recessed platform; thereby reducing the product positioning steps and improving the product marking efficiency. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the structure of an embodiment of the conveying device of this application;

[0031] Figure 2 for Figure 1 A magnified view of a portion of point A in the middle.

[0032] Explanation of icon numbers:

[0033] 1. Base; 11. Clearance hole; 2. First guide; 21. First recess; 3. Second guide; 31. Second recess; 4. First drive unit; 5. Second drive unit; 6. First slide rail; 7. Support base; 8. Second slide rail; 9. Dust extraction unit; 10. Air blowing unit; 20. Support column; 30. Second lead screw.

[0034] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0035] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0036] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0037] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0038] It should be understood that the term "and / or" as used in this application specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0040] This application provides a conveying device and a laser processing equipment to solve the technical problem of low marking efficiency on products.

[0041] In the embodiments of this application, such as Figure 1 and Figure 2As shown, the conveying device includes a base 1, a first guide member 2, a first drive unit 4, and a second guide member 3. Both the first guide member 2 and the first drive unit 4 are disposed on the base 1. The top of the first guide member 2 has a first recess 21 extending along a first direction. The second guide member 3 is disposed at the output end of the first drive unit 4, which drives the second guide member 3 to move up and down. The first guide member 2 and the second guide member 3 are spaced apart along a second direction, and the length directions of both the first guide member 2 and the second guide member 3 are parallel to the first direction. The top of the second guide member 3 has a second recess 31 extending along the first direction, located on the side of the second guide member 3 closest to the first guide member 2. The first recess 21 is located on the side of the first guide member 2 closest to the second guide member 3. The vertical direction, the first direction, and the second direction are perpendicular to each other.

[0042] When conveying the product, the opposite sides of the product are first placed on the first recess 21 and the second recess 31, respectively. Then, a cylinder mounted on the base 1 drives a push rod to push the product along the first guide 2 and the second guide 3 in a first direction. Alternatively, the product can be manually pushed along the first guide 2 and the second guide 3 in the first direction. The product may be a copper frame used for chip packaging.

[0043] When the product is pushed along the first direction into the laser beam scanning area of ​​the laser emitting unit, the pushing of the product is stopped. Due to the friction between the product and the first recess 21 and the second recess 31, the product will remain stationary. Furthermore, since the sidewalls of the first recess 21 and the second recess 31 can limit the position of the product in the second direction, when the product is pushed into the laser beam scanning area, it is not necessary to position the product, and the laser emitting unit can be controlled to emit a laser beam toward the product for marking.

[0044] In this embodiment, the first guide member 2 and the second guide member 3 are spaced apart along a second direction, and the length directions of the first guide member 2 and the second guide member 3 are both parallel to the first direction. The top of the first guide member 2 is provided with a first recess 21 extending along the first direction, and the top of the second guide member 3 is provided with a second recess 31 extending along the first direction. The second recess 31 is located on the side of the second guide member 3 closest to the first guide member 2, and the first recess 21 is located on the side of the first guide member 2 closest to the second guide member 3. This allows the opposite sides of the product to be placed on the first recess 21 and the second recess 31 respectively, and then the product is pushed along the first guide member 2 and the second guide member 3. The component 3 slides along the first direction to transport the product; the first drive unit 4 is used to drive the second guide component 3 to rise and fall, so as to adjust the relative height of the first recess 21 and the second recess 31, thereby accommodating products with different heights on opposite sides; the side walls of the first recess 21 and the second recess 31 can limit the position of the product in the second direction, thus reducing the number of positioning steps for the product placed on the first recess 21 and the second recess 31, or even eliminating the need to position the product before laser marking the product placed on the first recess 21 and the second recess 31; thereby reducing the product positioning steps and improving the product marking efficiency.

[0045] In one embodiment, such as Figure 1 and Figure 2 As shown, the conveying device also includes a second drive unit 5, which is disposed on the base 1, and a first drive unit 4 is disposed at the output end of the second drive unit 5. The second drive unit 5 is used to drive the first drive unit 4 to move along the second direction.

[0046] The second drive unit 5 drives the first drive unit 4 to move along the second direction, thereby indirectly driving the second guide member 3 to move along the second direction, thereby adjusting the distance between the first recess 21 and the second recess 31 in the second direction, so that products of different widths can be placed on the first recess 21 and the second recess 31, improving the compatibility of the conveying device.

[0047] In one embodiment, such as Figure 1 and Figure 2 As shown, the conveying device also includes a support base 7 and a plurality of first slide rails 6. The first slide rails 6 are spaced apart on the base 1 along a first direction, and the length direction of the first slide rails 6 is parallel to a second direction. The support base 7 is slidably mounted on the first slide rails 6. The support base 7 is connected to the output end of the second drive unit 5, and the first drive unit 4 is mounted on the support base 7.

[0048] The second drive unit 5 drives the support base 7 to slide along the first slide rail 6 in the second direction. The support base 7 then drives the first drive unit 4 to move along the second direction, and the first drive unit 4 then drives the second guide member 3 to move along the second direction, thereby adjusting the distance between the first recess 21 and the second recess 31 in the second direction. Sliding the support base 7 onto the first slide rail 6 improves the stability of the support base 7 moving along the second direction, thus improving the stability of the second guide member 3 moving along the second direction.

[0049] In one embodiment, such as Figure 1 As shown, the conveying device also includes multiple second slide rails 8, which are spaced apart on the support base 7 along the first direction. The length direction of the second slide rails 8 is parallel to the vertical direction, and the second guide member 3 is slidably mounted on the second slide rails 8. When the first drive unit 4 drives the second guide member 3 to rise and fall, the second guide member 3 can slide on the second slide rails 8, thereby improving the stability of the second guide member 3 in the vertical direction.

[0050] In one embodiment, such as Figure 1 As shown, the positions of the first slide rail 6 and the second slide rail 8 are symmetrical about the vertical plane containing the output end of the first drive unit 4. This allows for a more uniform force distribution on each of the first slide rails 6 and the second slide rails 8, thereby making the second guide member 3 more stable when moving along the first or second direction.

[0051] In one embodiment, such as Figure 1 and Figure 2 As shown, the conveying device also includes a dust extraction unit 9, which is disposed on top of the second guide member 3, with its dust extraction port facing the first guide member 2. When the laser emitting unit emits a laser beam towards the product placed on the first recess 21 and the second recess 31 for marking, the generated dust will be absorbed by the dust extraction unit 9. This avoids environmental pollution and also reduces the impact on laser marking.

[0052] In one embodiment, such as Figure 1 As shown, the conveying device also includes an air blowing unit 10, which is disposed on the top of the first guide member 2, with the air blowing port of the air blowing unit 10 facing the dust extraction unit 9. The air blowing unit 10 is used to blow air toward the dust extraction unit 9 to blow the dust generated by laser marking toward the dust extraction unit 9, thereby improving the dust extraction effect of the dust extraction unit 9.

[0053] In one embodiment, such as Figure 1 and Figure 2 As shown, the conveying device also includes a plurality of support columns 20, which are spaced apart on the base 1 along a first direction, and a first guide member 2 is disposed on the top of the support columns 20. The support columns 20 are used to support the first guide member 2, thereby saving the amount of material used to support the first guide member 2 and reducing the weight of the conveying device.

[0054] In one embodiment, such as Figure 1 and Figure 2 As shown, the base 1 is provided with a clearance hole 11. The length direction of the clearance hole 11 is parallel to the first direction. The clearance hole 11 is located between the orthographic projection of the first guide member 2 on the base 1 and the orthographic projection of the second guide member 3 on the base 1.

[0055] In this embodiment, a first driver can be provided on the side of the base 1 opposite to the second guide member 3, a second driver can be provided at the output end of the first driver, and a push rod can be provided at the output end of the second driver. The first driver can drive the second driver to move along a first direction, and the second driver can drive the push rod to be lifted from the back of the base 1 to the front of the base 1 through the clearance hole 11, so that the height of the lifted push rod is higher than the height of the first recess 21 or the second recess 31. When the height of the push rod is higher than the height of the first recess 21 or the second recess 31, the first driver can indirectly drive the push rod to push the product to slide along the first guide member 2 and the second guide member 3 in the first direction. Specifically, both the first driver and the second driver can be cylinders.

[0056] Therefore, in this embodiment, the clearance hole 11 can be used for the push rod to pass through, as an optional solution to push the product to move in the first direction.

[0057] In one embodiment, the conveying device further includes a first lead screw, which is disposed at the output end of the first drive unit 4, and the second guide member 3 is threadedly connected to the first lead screw. The first drive unit 4 is used to drive the first lead screw to rotate, so as to drive the second guide member 3 to rise and fall through the first lead screw.

[0058] In one embodiment, such as Figure 1 As shown, the conveying device also includes a second lead screw 30, which is disposed at the output end of the second drive unit 5. The support base 7 is threadedly connected to the second lead screw 30. The second drive unit 5 is used to drive the second lead screw 30 to rotate, so as to drive the support base 7 to slide in a second direction through the second lead screw 30.

[0059] Furthermore, this application also provides a laser processing device, which includes a conveying device. The specific structure of the conveying device is as described in the above embodiments. Since the laser processing device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments.

[0060] The above description is merely a preferred embodiment of this application and does not limit the patent scope of this application. Any equivalent structural transformations made based on the inventive concept of this application and the contents of the specification and drawings of this application, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this application.

Claims

1. A conveying device, characterized in that, The conveying device includes: Base; A first guide member is disposed on the base, and a first recess extending in a first direction is provided on the top of the first guide member. A first driving unit is disposed on the base; The second guide member is disposed at the output end of the first drive unit, and the first drive unit is used to drive the second guide member to rise and fall; the first guide member and the second guide member are spaced apart along the second direction, and the length direction of the first guide member and the length direction of the second guide member are both parallel to the first direction; the top of the second guide member is provided with a second recess extending along the first direction, and the second recess is located on the side of the second guide member closer to the first guide member, and the first recess is located on the side of the first guide member closer to the second guide member; The vertical direction, the first direction, and the second direction are perpendicular to each other.

2. The conveying device as described in claim 1, characterized in that, The conveying device further includes: The second drive unit is disposed on the base, and the first drive unit is disposed at the output end of the second drive unit. The second drive unit is used to drive the first drive unit to move along the second direction.

3. The conveying device as described in claim 2, characterized in that, The conveying device further includes: A plurality of first slide rails are provided on the base at intervals along the first direction, and the length direction of the first slide rails is parallel to the second direction. A support base is slidably mounted on the first slide rail. The support base is connected to the output end of the second drive unit, and the first drive unit is disposed on the support base.

4. The conveying device as described in claim 3, characterized in that, The conveying device further includes: Multiple second slide rails are provided at intervals along the first direction on the support base. The length direction of the second slide rail is parallel to the vertical direction. The second guide member is slidably disposed on the second slide rail.

5. The conveying device as described in claim 4, characterized in that, The positions of the first slide rail and the second slide rail are both symmetrical about the vertical plane containing the output end of the first drive unit.

6. The conveying device as claimed in claim 1, characterized in that, The conveying device further includes: A dust extraction unit is disposed on top of the second guide member, and the dust extraction port of the dust extraction unit faces the first guide member.

7. The conveying device as described in claim 6, characterized in that, The conveying device further includes: An air blowing unit is disposed on the top of the first guide member, and the air blowing port of the air blowing unit faces the dust extraction unit.

8. The conveying device as claimed in claim 1, characterized in that, The conveying device further includes: Multiple support columns are spaced apart on the base along the first direction, and the first guide member is disposed on the top of the support columns.

9. The conveying device as claimed in claim 1, characterized in that, The base is provided with a clearance hole, the length direction of which is parallel to the first direction, and the clearance hole is located between the orthographic projection of the first guide member on the base and the orthographic projection of the second guide member on the base.

10. A laser processing device, characterized in that, The laser processing equipment includes the conveying device as described in any one of claims 1 to 9.

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