Wastewater sedimentation equipment and process for integrated circuit chip manufacturing

Abstract

This invention discloses a wastewater sedimentation device and process for integrated circuit chip manufacturing, relating to the field of electromechanical equipment processing technology. The invention includes a processing mechanism, a filtration mechanism on one side for filtering the treated wastewater, and a sedimentation mechanism on the side of the filtration mechanism away from the processing mechanism for settling the filtered wastewater. The invention features a scraper structure for dynamically scraping and cleaning the surface of a conical filter plate, which can promptly remove attached impurities and particles, reduce clogging of the conical filter plate, ensure filtration permeability and water flow efficiency, and extend the service life of the conical filter plate. Simultaneously, through the coordinated operation of the collection tank and the first auger, the scraped impurities can be quickly collected and transported, reducing the risk of impurities falling back or re-adhering to the surface of the conical filter plate.

Description

Technical Field

[0001] This invention relates to the field of wastewater sedimentation technology in integrated circuit chip manufacturing, specifically to a wastewater sedimentation device and process for integrated circuit chip manufacturing. Background Technology

[0002] An integrated circuit chip is a miniaturized circuit that integrates a large number of tiny electronic components and interconnects onto a small semiconductor wafer using semiconductor technology. It is widely used in fields such as computers, communications, artificial intelligence, and automotive electronics.

[0003] Currently, integrated circuit chip manufacturing generates a large amount of process wastewater during multiple processes such as cleaning, etching, and deposition. This wastewater must undergo thorough filtration or sedimentation purification to meet standards before it can be discharged or recycled. In practical applications, most sedimentation devices for wastewater treatment in integrated circuit chip manufacturing require manual cleaning or simple brushing of the filter plates in the sedimentation zone. Impurities that are removed easily fall back or re-adhere to the surface of the filter plates, affecting the service life of the filter plates and the wastewater treatment effect. Secondly, most sedimentation devices use fixed filter plates for pre-filtration of wastewater. Fine particles or process residues mixed in the wastewater easily adhere to and accumulate on the surface and inside the pores of the filter plates. Under long-term operation, the filter plates are prone to clogging or poor water permeability, requiring frequent shutdowns for manual disassembly, cleaning, and replacement, reducing wastewater treatment efficiency. Therefore, to address the above problems, the inventors propose a wastewater sedimentation device and process for integrated circuit chip manufacturing to solve these issues. Summary of the Invention

[0004] To address the issues of impurities easily re-adhering to the filter plate during cleaning and the need for machine shutdown and replacement of the filter plate, the present invention aims to provide a wastewater sedimentation device and process for integrated circuit chip manufacturing.

[0005] To solve the above technical problems, the present invention adopts the following technical solution: a wastewater sedimentation device for integrated circuit chip manufacturing, including a treatment mechanism, a filtration mechanism for filtering the treated wastewater on the side of the treatment mechanism, and a sedimentation mechanism for settling the filtered wastewater on the side of the filtration mechanism away from the treatment mechanism. The filtration mechanism includes a filter box, inside which a filter frame is rotatably mounted; The sedimentation mechanism includes a sedimentation tank, which is fixedly connected to the filter box on the side near the treatment mechanism. Several conical filter plates are fixedly installed inside the sedimentation tank. A rotating tube is rotatably installed inside the sedimentation tank. Several scrapers and two scraping frames are fixedly installed on the outer surface of the rotating tube. The scrapers and scraping frames are in contact with the conical filter plates and the inner wall of the sedimentation tank, respectively. The scrapers have collection grooves, and the collection grooves are connected to the rotating tube.

[0006] Preferably, the processing mechanism includes a processing box, and the side of the filter box away from the sedimentation box is fixedly connected to the processing box. Several mounting plates are fixedly installed on the upper surface of the processing box, and a mixer is fixedly installed on the upper surface of the mounting plates. The bottom end of the mixer is inserted into the inside of the processing box.

[0007] Preferably, a feeding device is fixedly installed on the upper surface of the mounting plate, and the unloading pipe of the feeding device passes through the mounting plate and is inserted into the processing box. A detection device is fixedly installed on the side of the feeding device, and the detection rod of the detection device passes through the mounting plate and is inserted into the processing box.

[0008] Preferably, a No. 1 motor is fixedly installed on the side of the filter box, and one end of the output shaft of the No. 1 motor is fixedly connected to the filter frame.

[0009] Preferably, two brush plates are slidably installed inside the filter box near the sedimentation tank, and the bristles of the brush plates are in active contact with the filter plates of the filter frame. Two drive screws are rotatably installed inside one side of the filter box, and the drive screws are threaded with brush plates.

[0010] Preferably, a drive rod is rotatably installed inside one side of the filter box, and a second bevel gear is fixedly installed at both ends of the drive rod. A first bevel gear is fixedly installed at the end of each of the two drive screws near the drive rod, and the first bevel gear and the second bevel gear mesh with each other. A second motor is fixedly installed on the upper surface of the filter box, and the bottom end of the output shaft of the second motor is fixedly connected to the drive rod.

[0011] Preferably, a collection box is slidably installed inside the bottom of the filter box, and two rotating bars are rotatably installed on the side of the filter box, with the sides of the rotating bars in active contact with the collection box.

[0012] Preferably, a No. 1 auger is rotatably installed inside the top of the sedimentation tank, and the bottom end of the No. 1 auger is rotatably located at the bottom of the rotating tube. Gear rings are fixedly installed at the top of both the rotating tube and the No. 1 auger, and the gear rings are rotatably located at the top of the sedimentation tank. A vertical rod is rotatably installed on one side inside the top of the sedimentation tank. Two transmission gears are fixedly installed on the outer surface of the vertical rod, and the transmission gears mesh with the gear rings. A No. 3 motor is fixedly installed on the upper surface of the sedimentation tank, and the bottom end of the output shaft of the No. 3 motor is fixedly connected to the vertical rod.

[0013] Preferably, a No. 2 auger is rotatably installed inside the bottom of the sedimentation tank, and a No. 4 motor is fixedly installed on the bottom side of the sedimentation tank, with one end of the output shaft of the No. 4 motor fixedly connected to the No. 2 auger.

[0014] A treatment process for wastewater sedimentation equipment used in integrated circuit chip manufacturing, comprising the following steps: Step 1: Wastewater is first discharged into the treatment tank. At the same time, the detection equipment and feeding equipment are turned on. The detection equipment monitors the wastewater quality in real time and controls the feeding equipment to add the reagents in a quantitative manner based on the detection data. Meanwhile, the mixer runs to make the wastewater and reagents mix and react quickly to complete the initial purification of the wastewater. Step 2: The wastewater after chemical treatment flows into the filter box and undergoes solid-liquid filtration through the filter plates on the filter frame; when it is necessary to switch the filtration station, motor 1 drives the filter frame to rotate, so as to realize the rapid rotation of the filter plates and ensure the continuous operation of filtration. Step 3: The filtered wastewater enters the sedimentation tank, where fine impurities are intercepted by the conical filter plate. The impurities settle and accumulate at the bottom of the sedimentation tank due to gravity, thus achieving the separation of wastewater and impurities into layers. Step 4: The equipment intermittently starts motor No. 4, which drives auger No. 2 to rotate. The sludge and impurities accumulated at the bottom of the sedimentation tank are discharged to the outside through a screw conveyor, completing the entire wastewater treatment process.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. The present invention features a scraper structure that dynamically scrapes and cleans the surface of the conical filter plate, which can promptly remove attached impurities and particles, reduce clogging of the conical filter plate, ensure filtration transparency and water flow efficiency, and extend the service life of the conical filter plate. At the same time, through the coordinated operation of the collection tank and the No. 1 auger, the scraped impurities can be quickly collected and transported, reducing the risk of impurities falling back or re-adhering to the surface of the conical filter plate.

[0016] 2. This invention uses a rotatable filter frame to filter wastewater. The rotation of the filter frame enables rapid switching of the filter plate position, allowing the equipment to perform uninterrupted wastewater filtration, improving the efficiency of continuous wastewater treatment, and meeting the needs of large-volume or continuous wastewater treatment operations.

[0017] 3. This invention is equipped with a movable brush plate to clean the filter plate, reducing the probability of filter plate clogging, stabilizing filtration performance, and extending the service life of the filter plate. At the same time, a collection box is provided to collect the impurities that are washed off, which facilitates the unified collection and subsequent processing of the cleaned impurities. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0020] Figure 2 This is a schematic diagram of the overall cross-sectional structure of the present invention.

[0021] Figure 3 This is a schematic diagram of the cross-sectional structure of the processing box of the present invention.

[0022] Figure 4 This is a cross-sectional structural diagram of the filtration mechanism of the present invention.

[0023] Figure 5 This is a schematic cross-sectional view of the filter box of the present invention.

[0024] Figure 6 This is a schematic cross-sectional view of the precipitation mechanism of the present invention.

[0025] Figure 7 This is a schematic diagram of the cross-sectional structure of the rotating tube of the present invention.

[0026] Figure 8 This is a schematic cross-sectional view of the sedimentation tank of the present invention.

[0027] In the diagram: 1. Processing mechanism; 101. Processing box; 102. Mounting plate; 103. Mixer; 104. Feeding equipment; 105. Detection equipment; 2. Filtration mechanism; 201. Filter box; 202. Filter frame; 203. Motor No. 1; 204. Brush plate; 205. Drive screw; 206. First bevel gear; 207. Drive rod; 208. Second bevel gear; 209. Motor No. 2; 210. Collection box; 211. Rotating bar; 3. Sedimentation mechanism; 301. Sedimentation tank; 302. Conical filter plate; 303. Rotating tube; 304. Screwdriver No. 1; 305. Gear ring; 306. Vertical rod; 307. Transmission gear; 308. Motor No. 3; 309. Scraper frame; 310. Scraper; 311. Screwdriver No. 2; 312. Motor No. 4. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Example: Figure 1-8As shown, the present invention provides a wastewater sedimentation device for integrated circuit chip manufacturing, including a treatment mechanism 1. A filter mechanism 2 is provided on the side of the treatment mechanism 1 to filter the treated wastewater, thereby preventing large particles of impurities from entering the sedimentation tank 301 and improving the sedimentation efficiency. A sedimentation mechanism 3 is provided on the side of the filter mechanism 2 away from the treatment mechanism 1 to settle the filtered wastewater. The filtration mechanism 2 includes a filter box 201, in which a filter frame 202 is rotatably installed for filtering wastewater. In use, when the wastewater comes into contact with the filter plate on one side of the filter frame, the wastewater is filtered through the filter plate. The sedimentation mechanism 3 includes a sedimentation tank 301, which is fixedly connected to the filter box 201 on the side near the processing mechanism 1. Several conical filter plates 302 are fixedly installed inside the sedimentation tank 301. A rotating tube 303 is rotatably installed inside the sedimentation tank 301. Several scrapers 310 and two scraping frames 309 are fixedly installed on the outer surface of the rotating tube 303. The scrapers 310 and scraping frames 309 are in contact with the conical filter plates 302 and the inner wall of the sedimentation tank 301, respectively. The scrapers 310 have a collection groove, which is connected to the rotating tube 303 for cleaning the conical filter plates 302. In use, the rotation of the rotating tube 303 drives the scrapers 310 to rotate. At this time, the movement of the scrapers 310 cleans the conical filter plates 302. The scraped impurities enter the rotating tube 303 through the collection groove.

[0030] The treatment unit 1 includes a treatment box 101, and a filter box 201 is fixedly connected to the side of the treatment box 101 away from the sedimentation box 301. Several mounting plates 102 are fixedly installed on the upper surface of the treatment box 101. A mixer 103 is fixedly installed on the upper surface of the mounting plate 102, and the bottom end of the mixer 103 is inserted into the treatment box 101 for stirring the wastewater. When in use, the mixer 103 is turned on to stir the wastewater inside the treatment box 101.

[0031] By adopting the above technical solution, the mixer 103 is able to mix the wastewater.

[0032] A feeding device 104 is fixedly installed on the upper surface of the mounting plate 102, and the discharge pipe of the feeding device 104 passes through the mounting plate 102 and is inserted into the treatment tank 101. A detection device 105 is fixedly installed on the side of the feeding device 104, and the detection rod of the detection device 105 passes through the mounting plate 102 and is inserted into the treatment tank 101 for adding reagents to the treatment tank 101. In use, the detection device 105 and the feeding device 104 are turned on. At this time, the wastewater is detected by the detection device 105, and the feeding device 104 is controlled to feed the wastewater based on the detection data, thereby treating the wastewater.

[0033] By adopting the above technical solution, the feeding equipment 104 can adjust the reagent in the processing tank 101.

[0034] A No. 1 motor 203 is fixedly installed on the side of the filter box 201, and one end of the output shaft of the No. 1 motor 203 is fixedly connected to the filter frame 202 to drive the filter frame 202 to rotate. When in use, the No. 1 motor 203 is turned on to drive the filter frame 202 to rotate, and the filter plate is adjusted by the rotation of the filter frame 202.

[0035] By adopting the above technical solution, the No. 1 motor 203 can drive the filter frame 202 to rotate.

[0036] Two brush plates 204 are slidably installed inside the filter box 201 near the sedimentation tank 301, and the bristles of the brush plates 204 are in active contact with the filter plates of the filter frame 202. Two drive screws 205 are rotatably installed inside one side of the filter box 201, and the brush plates 204 are threadedly connected to the drive screws 205 for cleaning the filter plates. In use, the rotation of the drive screws 205 drives the brush plates 204 to move, and the movement of the brush plates 204 cleans the upper and lower sides of the filter plates, reducing the phenomenon of filter plate clogging.

[0037] By adopting the above technical solution, the brush plate 204 can clean the filter plate.

[0038] A drive rod 207 is rotatably mounted inside one side of the filter box 201. A second bevel gear 208 is fixedly mounted at both ends of the drive rod 207. A first bevel gear 206 is fixedly mounted at one end of each of the two drive screws 205 near the drive rod 207, and the first bevel gear 206 meshes with the second bevel gear 208. A second motor 209 is fixedly mounted on the upper surface of the filter box 201, and the bottom end of the output shaft of the second motor 209 is fixedly connected to the drive rod 207 to drive the drive screws 205 to rotate. In use, the second motor 209 is turned on to rotate the drive rod 207. The rotation of the drive rod 207 drives the second bevel gear 208 to rotate, which in turn drives the first bevel gear 206 to rotate, and the rotation of the first bevel gear 206 drives the drive screws 205 to rotate.

[0039] By adopting the above technical solution, the No. 2 motor 209 can drive the drive screw 205 to rotate.

[0040] A collection box 210 is slidably installed inside the bottom of the filter box 201. Two rotating bars 211 are rotatably installed on the side of the filter box 201, and the side of the rotating bars 211 is in contact with the collection box 210 to limit the collection box 210. In use, when the side of the rotating bar 211 is in contact with the collection box 210, the collection box 210 is limited by the rotating bar 211.

[0041] By adopting the above technical solution, the rotating bar 211 can limit the position of the collection box 210.

[0042] A first auger 304 is rotatably installed inside the top of the sedimentation tank 301, and the bottom end of the first auger 304 is rotatably located at the bottom of the rotating tube 303. Gear rings 305 are fixedly installed at the top of both the rotating tube 303 and the first auger 304, and the gear rings 305 are rotatably located at the top of the sedimentation tank 301. A vertical rod 306 is rotatably installed on one side of the top of the sedimentation tank 301. Two transmission gears 307 are fixedly installed on the outer surface of the vertical rod 306, and the transmission gears 307 mesh with the gear rings 305. 1. A No. 3 motor 308 is fixedly installed on the upper surface, and the bottom end of the output shaft of the No. 3 motor 308 is fixedly connected to the vertical rod 306 to drive the rotating tube 303 and the No. 1 auger 304 to rotate. When in use, the No. 3 motor 308 is turned on to drive the vertical rod 306 to rotate. The rotation of the vertical rod 306 drives the transmission gear 307 to rotate. The rotation of the transmission gear 307 drives the gear ring 305 to rotate. The rotation of the two gear rings 305 drives the rotating tube 303 and the No. 1 auger 304 to rotate respectively.

[0043] By adopting the above technical solution, the No. 3 motor 308 can drive the rotating tube 303 and the No. 1 auger 304 to rotate.

[0044] A second auger 311 is rotatably installed inside the bottom of the sedimentation tank 301. A fourth motor 312 is fixedly installed on the bottom side of the sedimentation tank 301, and one end of the output shaft of the fourth motor 312 is fixedly connected to the second auger 311 to rotate the second auger 311. When in use, the fourth motor 312 is turned on to drive the second auger 311 to rotate.

[0045] By adopting the above technical solution, the No. 4 motor 312 can drive the No. 2 auger 311 to rotate.

[0046] A treatment process for wastewater sedimentation equipment used in integrated circuit chip manufacturing, comprising the following steps: Step 1: Wastewater is first discharged into the treatment tank 101. At the same time, the detection device 105 and the feeding device 104 are turned on. The detection device 105 detects the wastewater quality in real time and controls the feeding device 104 to add the reagent quantitatively according to the detection data. At the same time, the mixer 103 is running to make the wastewater and the reagent mix and react quickly to complete the initial purification of the wastewater. Step 2: The wastewater after chemical treatment flows into the filter box 201 and undergoes solid-liquid filtration through the filter plates on the filter frame 202. When it is necessary to switch the filtration station, the No. 1 motor 203 drives the filter frame 202 to rotate, so as to realize the rapid rotation of the filter plates and ensure the continuous operation of filtration. Step 3: The filtered wastewater enters the sedimentation tank 301, where it passes through the conical filter plate 302 to intercept fine impurities. The impurities settle and accumulate at the bottom of the sedimentation tank 301 by gravity, thus achieving the separation of wastewater and impurities into layers. Step 4: The equipment intermittently starts motor 312, which drives screw conveyor 311 to rotate. The sludge and impurities accumulated at the bottom of sedimentation tank 301 are discharged to the outside through the screw conveyor, thus completing the entire wastewater treatment process.

[0047] Working principle: Wastewater is first discharged into the treatment tank 101. At the same time, the detection device 105 and the feeding device 104 are started. The detection device 105 detects the wastewater quality parameters in real time. Based on the detection data, the feeding device 104 is precisely controlled to add the corresponding treatment agent. At the same time, the mixer 103 is started to continuously stir the wastewater in the tank, accelerate the full integration of wastewater and agent, and complete the initial purification reaction of wastewater. Secondly, the wastewater treated by the agent flows into the filter box 201 by gravity, and solid-liquid separation filtration is achieved through the filter plate mounted on the filter frame 202. When it is necessary to switch the filtration station, the No. 1 motor 203 is started to drive the filter frame 202 to rotate, quickly completing the filter plate rotation and ensuring continuous filtration operation. When the filter plate accumulates dirt or needs cleaning, start the No. 2 motor 209 to drive the drive rod 207 to rotate. The drive rod 207 drives the drive screw 205 to rotate through the meshing transmission of the second bevel gear 208 and the first bevel gear 206. The drive screw 205 drives the brush plate 204 to move back and forth smoothly, thoroughly brushing the upper and lower sides of the filter plate, removing attached impurities in time, effectively preventing the filter plate from clogging, and stabilizing the filtration efficiency. Then the filtered wastewater flows into the sedimentation tank 301, where it is further intercepted by the conical filter plate 302. The intercepted impurities settle and accumulate at the bottom of the sedimentation tank 301 under the action of gravity, thus achieving the separation of wastewater and impurities into layers. During the cleaning operation, the No. 3 motor 308 is started to drive the vertical rod 306 and the transmission gear 307 to rotate. The transmission gear 307 drives the two gear rings 305 to rotate synchronously, which in turn drives the rotating tube 303 and the No. 1 auger 304 to rotate synchronously. The rotating tube 303 drives the scraper 310 to rotate, which scrapes the surface of the conical filter plate 302 in all directions. The scraped-off impurities are collected in the rotating tube 303 through the collection trough. At the same time, the No. 1 auger 304 continues to operate, conveying the impurities collected in the rotating tube 303 downward to prevent impurities from accumulating and clogging. Finally, motor 312 is started intermittently, which drives screw conveyor 311 to rotate. Through the spiral conveying action of screw conveyor 311, the impurities and sludge accumulated at the bottom of sedimentation tank 301 are continuously discharged to the outside.

[0048] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. An integrated circuit chip manufacturing wastewater sedimentation apparatus comprising a treatment mechanism (1), characterized by: The side of the treatment mechanism (1) is provided with a filter mechanism (2) for filtering the treated wastewater, and the side of the filter mechanism (2) away from the treatment mechanism (1) is provided with a sedimentation mechanism (3) for settling the filtered wastewater. The filtration mechanism (2) includes a filter box (201), and a filter frame (202) is rotatably installed inside the filter box (201). The sedimentation mechanism (3) includes a sedimentation tank (301), and the sedimentation tank (301) is fixedly connected to the filter box (201) on the side near the processing mechanism (1). Several cone-shaped filter plates (302) are fixedly installed inside the sedimentation tank (301). A rotating tube (303) is rotatably installed inside the sedimentation tank (301). Several scrapers (310) and two scraping racks (309) are fixedly installed on the outer surface of the rotating tube (303). The scrapers (310) and scraping racks (309) are in contact with the cone-shaped filter plates (302) and the inner wall of the sedimentation tank (301), respectively. The scrapers (310) have a collection groove, and the collection groove is connected to the rotating tube (303).

2. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 1, characterized in that, The processing mechanism (1) includes a processing box (101), and a filter box (201) is fixedly connected to the side of the processing box (101) away from the sedimentation box (301). Several mounting plates (102) are fixedly installed on the upper surface of the processing box (101). A mixer (103) is fixedly installed on the upper surface of the mounting plate (102), and the bottom end of the mixer (103) is inserted into the processing box (101).

3. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 2, characterized in that, A feeding device (104) is fixedly installed on the upper surface of the mounting plate (102), and the unloading pipe of the feeding device (104) passes through the mounting plate (102) and is inserted into the processing box (101). A detection device (105) is fixedly installed on the side of the feeding device (104), and the detection rod of the detection device (105) passes through the mounting plate (102) and is inserted into the processing box (101).

4. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 3, characterized in that, A No. 1 motor (203) is fixedly installed on the side of the filter box (201), and one end of the output shaft of the No. 1 motor (203) is fixedly connected to the filter frame (202).

5. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 4, characterized in that, Two brush plates (204) are slidably installed on the side of the filter box (201) near the sedimentation tank (301), and the bristles of the brush plates (204) are in active contact with the filter plate of the filter frame (202). Two drive screws (205) are rotatably installed on one side of the filter box (201), and the brush plates (204) are threadedly connected to the drive screws (205).

6. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 5, characterized in that, A drive rod (207) is rotatably mounted on one side of the filter box (201). A second bevel gear (208) is fixedly mounted on both ends of the drive rod (207). A first bevel gear (206) is fixedly mounted on one end of each of the two drive screws (205) near the drive rod (207). The first bevel gear (206) meshes with the second bevel gear (208). A second motor (209) is fixedly mounted on the upper surface of the filter box (201). The bottom end of the output shaft of the second motor (209) is fixedly connected to the drive rod (207).

7. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 6, characterized in that, A collection box (210) is slidably installed inside the bottom of the filter box (201). Two rotating bars (211) are rotatably installed on the side of the filter box (201), and the side of the rotating bars (211) is in contact with the collection box (210).

8. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 7, characterized in that, A first auger (304) is rotatably installed inside the top of the sedimentation tank (301), and the bottom end of the first auger (304) is rotatably set at the bottom of the rotating tube (303). A toothed ring (305) is fixedly installed at the top of both the rotating tube (303) and the first auger (304), and the toothed ring (305) is rotatably set at the top of the sedimentation tank (301). A vertical rod (306) is rotatably installed on one side inside the top of the sedimentation tank (301). Two transmission gears (307) are fixedly installed on the outer surface of the vertical rod (306), and the transmission gears (307) and the toothed ring (305) mesh with each other. A third motor (308) is fixedly installed on the upper surface of the sedimentation tank (301), and the bottom end of the output shaft of the third motor (308) is fixedly connected to the vertical rod (306).

9. The wastewater sedimentation equipment for integrated circuit chip manufacturing as described in claim 8, characterized in that, The sedimentation tank (301) is rotatably installed with a No. 2 auger (311) at the bottom, and a No. 4 motor (312) is fixedly installed on the bottom side of the sedimentation tank (301), with one end of the output shaft of the No. 4 motor (312) fixedly connected to the No. 2 auger (311).

10. The treatment process of a wastewater sedimentation device for integrated circuit chip manufacturing as described in claim 9, characterized in that, Processing steps: Step 1: Wastewater is first discharged into the treatment tank (101), and the detection equipment (105) and feeding equipment (104) are turned on simultaneously. The detection equipment (105) detects the wastewater quality in real time and controls the feeding equipment (104) to add the reagent quantitatively according to the detection data. At the same time, the mixer (103) runs to make the wastewater and the reagent mix and react quickly to complete the initial purification of the wastewater. Step 2: The wastewater after chemical treatment flows into the filter box (201) and undergoes solid-liquid filtration through the filter plates on the filter frame (202); when it is necessary to switch the filtration station, the No. 1 motor (203) drives the filter frame (202) to rotate, so as to realize the rapid rotation of the filter plates and ensure the continuous operation of filtration. Step 3: The filtered wastewater enters the sedimentation tank (301), where fine impurities are intercepted by the conical filter plate (302). The impurities settle and accumulate at the bottom of the sedimentation tank (301) by gravity, thus achieving the separation of wastewater and impurities into layers. Step 4: The equipment intermittently starts motor 4 (312), which drives screw conveyor 2 (311) to rotate. The sludge and impurities accumulated at the bottom of sedimentation tank (301) are discharged outward by screw conveyor, thus completing the entire wastewater treatment process.

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