Carrier-trap resolution measurement system and method based on axial magnetic field modulation

By using an axial magnetic field modulation system, the mechanical stability and optical path compatibility issues of existing optical Hall measurement technology in microscopic confocal optical-electric synchronization scenarios were resolved, achieving high-precision carrier-trap resolution measurement and improving the system's stability and measurement accuracy.

CN122307294APending Publication Date: 2026-06-30CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
Filing Date
2026-05-26
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Existing optical Hall effect measurement techniques suffer from poor mechanical stability, optical path incompatibility, magnetic field mismatch, and complex pseudo-signal processing in microscopic confocal optical-electric synchronization scenarios. In particular, noise is significant in high-resistivity or low-mobility thin films, affecting the stability and accuracy of the measurement.

Method used

An axial magnetic field modulation system is adopted, including a light source, an optical microscope/confocal unit, an axial magnetic field modulation device, a control unit, an electrical measurement unit, and a data acquisition and digital phase-locked loop unit. Through a vertical light-transmitting structure, a non-rotating permanent magnet, and a soft magnetic permeable modulation wheel, axial magnetic field modulation and synchronous signal processing are achieved, reducing spurious signal interference.

Benefits of technology

It improves the compatibility of the microscopic confocal optical path, reduces mechanical vibration noise, adapts to flat and vertical optical axes of thin films, reduces the complexity of phase-locked loop calculation, and improves the extraction accuracy of carrier-trap response and system stability.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN122307294A_ABST
    Figure CN122307294A_ABST
Patent Text Reader

Abstract

This invention relates to the field of semiconductor electrical measurement technology, and particularly to a carrier-trap resolution measurement system and method based on axial magnetic field modulation. The system includes a light source and intensity modulation unit, an optical microscope / confocal unit, an axial magnetic field modulation device, a control unit, an electrical measurement unit, and a data acquisition and digital phase-locked loop unit. The axial magnetic field modulation device employs a symmetrical permanent magnet ring and a vertical light-transmitting barrel structure, combined with a soft magnetic permeability modulation wheel, to form a stable alternating axial magnetic field perpendicular to the sample, with the optical path coaxially incident vertically. The method includes sample clamping and alignment, parameter initialization, synchronous acquisition of longitudinal resistance signals and transverse Hall signals, spectrum confirmation, digital phase-locked loop analysis, and multi-external parameter scanning output. The advantages are: reducing mechanical vibration and optical path interference by rotating the soft magnetic permeability modulation wheel, thus improving signal stability; and achieving weak Hall signal extraction by combining phase-locked loop detection, efficiently separating carrier and trap responses.
Need to check novelty before this filing date? Find Prior Art