A tiltable liquid deformable mirror driven by a composite magnetic field

Abstract

This invention relates to a tiltable liquid deformable mirror driven by a composite magnetic field. It uses an oil-based magnetic liquid and a transparent aqueous solution with matching density as the core optical interface materials. A silver nanofilm is directly prepared at the interface between the magnetic liquid and the aqueous solution using an oil-water interface self-assembly method to improve the reflectivity of the optical interface. High-precision deformation control of the liquid surface is achieved through a micro-coil array. A uniform magnetic field generated by a Helmholtz coil ensures a linear response between the deformation of the magnetic liquid and the driving magnetic induction intensity. Simultaneously, a gradient magnetic field generated by a Maxwell coil suppresses interface shift between the two liquids under tilting conditions. The container is constructed from photosensitive resin and quartz glass, and a material affinity design ensures stable interface maintenance between the two liquids. Compared with existing technologies, this invention solves the problems of interface instability and nonlinear deformation response when traditional magnetic fluid deformable mirrors are tilted, giving magnetic fluid deformable mirrors a wider range of applications.

Description

Technical Field

[0001] This invention relates to the field of adaptive optics systems technology, and in particular to a tiltable liquid deformable mirror driven by a composite magnetic field. Background Technology

[0002] Wavefront correctors are key components in adaptive optics systems, with mainstream implementations including liquid crystal spatial light modulators, discrete actuator continuous mirror deformable mirrors, modularly pieced deformable mirrors, MEMS deformable mirrors, and liquid deformable mirrors. Among these, solid-state deformable mirrors are the most widely used in existing adaptive optics systems. They modulate the incident light wavefront through localized surface deformation, exhibiting a large dynamic wavefront correction range and fast response speed. However, solid-state deformable mirrors generally face the following technical challenges: increasing the mirror stroke can easily lead to excessive surface stress and breakage; increasing the number and density of actuators significantly increases process complexity and manufacturing costs; and the mirror surface needs to be polished to a precision of one-tenth or even higher than the wavelength of light, further increasing system cost and manufacturing difficulty. Therefore, developing a tiltable, linearly deformable, and interface-stable liquid deformable mirror is crucial to overcoming these technical bottlenecks.

[0003] In recent years, to overcome the limitations of solid-state deformable mirrors in terms of travel range, cost control, and the complexity of driving algorithms, research teams have proposed a liquid deformable mirror scheme based on magnetic fluids. Compared with traditional solid-state deformable mirrors, magnetic fluid deformable mirrors have advantages such as large deformation range, smooth continuous mirror surface, easily expandable actuators, and lower manufacturing cost. However, due to their physical characteristics, existing magnetic fluid deformable mirrors must be kept horizontal. Once tilted, the magnetic fluid interface shifts due to gravity, leading to optical surface damage and failure of aberration correction functions, severely restricting their flexibility in practical applications. Therefore, developing a magnetic fluid deformable mirror that can operate stably in a tilted state has become the key to breaking through this technical bottleneck and expanding its engineering application scope. Summary of the Invention

[0004] To address the shortcomings of the aforementioned technologies, this invention improves upon the traditional magnetofluid deformable mirror by providing a tiltable liquid deformable mirror driven by a composite magnetic field. This solves the problems of interface instability and nonlinear deformation response when the traditional magnetofluid deformable mirror is tilted. At the same time, the interface stability is improved through material affinity design, meeting the high-precision optical control requirements in non-horizontal working scenarios. The tiltable liquid deformable mirror of this invention can achieve tilting at any angle under gravity.

[0005] The objective of this invention can be achieved through the following technical solutions: The purpose of this invention is to provide a tiltable liquid deformable mirror driven by a composite magnetic field. This liquid deformable mirror is tiltable and driven by a composite magnetic field. The tiltable liquid deformable mirror driven by a composite magnetic field includes a liquid component, a composite magnetic field driving component, and a container component.

[0006] Furthermore, the liquid component includes a magnetic liquid medium layer and an aqueous liquid medium layer; the magnetic liquid medium layer includes a magnetic liquid medium, the aqueous liquid medium layer includes an aqueous liquid medium, and the magnetic liquid medium and the aqueous liquid medium are liquid media with equal density matching.

[0007] Furthermore, a nano-reflective thin film layer is disposed between the magnetic liquid medium layer and the aqueous liquid medium layer. The magnetic liquid medium layer and the aqueous liquid medium layer form a stable optical interface. To improve the interface reflectivity, a nano-reflective thin film layer is spontaneously formed at the interface between the magnetic liquid medium and the aqueous liquid medium through oil-water self-assembly.

[0008] Furthermore, the composite magnetic field driving component includes a micro-coil array, a Helmholtz coil, a Maxwell coil, and an optical frame; the micro-coil array, Helmholtz coil, Maxwell coil, and optical frame work together to achieve liquid surface deformation control and tilt stability maintenance.

[0009] Furthermore, the container assembly is used to contain the liquid assembly; the liquid assembly and the container assembly together form the main body of the liquid deformable mirror.

[0010] Furthermore, the optical frame is connected to the liquid deformable mirror body.

[0011] Furthermore, the magnetic liquid medium is an oil-based magnetic liquid; the aqueous liquid medium is a transparent aqueous solution; and the nano-reflective film layer includes a silver nanofilm.

[0012] Furthermore, the oil-based magnetic liquid is prepared by dispersing oleic acid-encapsulated iron oxide particles in a nonpolar isoalkane containing dissolved 2,9-dimethyl-1,10-phenanthroline.

[0013] Furthermore, the transparent aqueous solution is a deuterated aqueous solution.

[0014] Furthermore, the preparation method of the silver nanofilm includes the following process: a silver sol is obtained by heating and centrifuging a mixed aqueous solution of silver nitrate and an aqueous solution of sodium citrate; an oil-based magnetic liquid is completely immersed in the silver sol; under static conditions, silver nanoparticles spontaneously assemble at the interface between the oil-based magnetic liquid and water to form a continuous silver nanofilm.

[0015] Furthermore, the statement that the magnetic liquid medium and the aqueous liquid medium are liquid media with equal density matching means that the density difference between the magnetic liquid medium and the aqueous liquid medium is within -0.001 g / cm³. 3 ~0.001g / cm 3 Between (≤±0.001g / cm) 3 ).

[0016] Furthermore, the array of tiny coils is used to drive localized deformation of the magnetic liquid medium.

[0017] Furthermore, the micro-coil array is composed of multiple micro-coils closely arranged in a hexagonal structure.

[0018] Furthermore, the Helmholtz coil is used to generate a uniform magnetic field to ensure that the deformation of the magnetic liquid medium is linearly related to the magnetic induction intensity of the tiny drive coil.

[0019] Furthermore, the Maxwell coil is used to generate a gradient magnetic field to maintain the stability of the interface between the magnetic liquid medium and the aqueous liquid medium when tilted.

[0020] Furthermore, the Helmholtz coil comprises two coaxially placed circular coils, the diameter of which is determined according to the diameter of the container, and the magnetic field uniformity in the central region of the Helmholtz coil is ≥98%.

[0021] Furthermore, the Helmholtz coil consists of two coaxially placed circular coils.

[0022] Furthermore, the Maxwell coil comprises two coaxially symmetrically wound circular coils that generate a uniform gradient field in the central region, subjecting the magnetic liquid to a uniform magnetic force. This ensures that the interface between the magnetic liquid medium and the aqueous liquid medium does not shift when the deformable mirror is tilted, thus maintaining the stability of the optical surface shape.

[0023] Furthermore, the Maxwell coil consists of two coaxially symmetrically wound circular coils.

[0024] Furthermore, the diameter of the liquid deformable mirror body is smaller than the radius R2 of the Helmholtz coil.

[0025] Furthermore, the diameter of the liquid deformable mirror body is smaller than the radius R1 of the Maxwell coil.

[0026] Furthermore, the distance between the two coaxially placed circular coils in the Helmholtz coil is d2=R2.

[0027] Furthermore, the spacing d1 between the two coaxially symmetrically wound circular coils in the Maxwell coil is... R1.

[0028] Furthermore, the container assembly is positioned in the central region of the Helmholtz coil and the Maxwell coil.

[0029] Furthermore, the optical frame is used to ensure that the liquid deformable mirror body is safely and securely placed in the central area.

[0030] Furthermore, the container assembly is a photosensitive resin-quartz glass splicing structure, which achieves stable interface maintenance between the magnetic liquid medium and the aqueous liquid medium through material affinity design.

[0031] Furthermore, the container assembly includes a plastic container, a high-transmittance optical glass sheet, and a quartz glass ring.

[0032] Furthermore, the light transmittance of the high-transmittance optical glass sheet exceeds 90%.

[0033] Furthermore, the plastic container is made of photosensitive resin, and the plastic container is printed using photosensitive resin.

[0034] Furthermore, the quartz glass ring is connected to the side wall of the plastic container; the high-transmittance optical glass sheet is disposed on the top of the quartz glass ring.

[0035] Furthermore, the central axis of the container assembly coincides with the central axis of the Helmholtz coil and the Maxwell coil; the geometric center of the container assembly coincides with the magnetic field center of the Helmholtz coil and the Maxwell coil, ensuring that the liquid deformable mirror body is in the target area of ​​the magnetic field.

[0036] The technical concept of this invention includes: This invention provides a tiltable liquid deformable mirror driven by a composite magnetic field, comprising a liquid component, a composite magnetic field driving component, and a container component. The structure and connection relationship of each component are as follows: The liquid component comprises two liquid media of equal density: a magnetic liquid and an isodensely matched transparent aqueous solution. The magnetic liquid is prepared by dispersing oleic acid-encapsulated iron oxide particles in a nonpolar isoalkane containing dissolved 2,9-dimethyl-1,10-phenanthroline. The isodensely matched transparent aqueous solution can be a deuterated aqueous solution, and its density difference with that of the magnetic liquid is within -0.001 g / cm³. 3 ~0.001g / cm 3 Between the two liquids, a stable horizontal interface is formed without external force, and this interface serves as the optical reflecting surface of the deformable mirror.

[0037] To improve the reflectivity of the deformable mirror, this invention employs an oil-water self-assembly method to prepare silver nanofilms. First, silver nitrate is dissolved in water and boiled, with the addition of an appropriate amount of sodium citrate solution. The mixture is continuously heated until it turns yellow, then heating is stopped and the solution is rapidly cooled to obtain an initial silver solution. This initial solution is repeatedly centrifuged in a centrifuge tube to obtain a pure silver sol. Next, a container filled with a magnetic liquid is completely immersed in the silver sol. Under static conditions, silver nanoparticles spontaneously assemble at the interface between the magnetic liquid and water to form a continuous silver nanofilm. Then, the container is transferred to a deuterated aqueous solution of a predetermined density, prepared by mixing heavy water and deionized water in a specific ratio, for displacement treatment. Finally, the system is encapsulated using high-transmittance optical glass, completing the assembly of the entire mirror structure.

[0038] The composite magnetic field drive component includes a micro-coil array, a Helmholtz coil, a Maxwell coil, and an optical frame. The four components work together to achieve liquid surface deformation control and tilt stability maintenance.

[0039] The micro-coil array is formed by a tight hexagonal arrangement of micro-coils. Each coil unit is independently controllable. By adjusting the input current, a local perturbation magnetic field is generated, which drives the magnetic liquid to undergo local deformation, thereby changing the surface shape of the optical interface.

[0040] The Helmholtz coil consists of two identical circular coils placed coaxially, with the coil diameter determined by the container diameter. By passing equal currents in the same direction through the two coils, an axially uniform magnetic field with a uniformity of ≥98% is generated in the central region of the coils. This uniform magnetic field provides a uniform bias field environment for the micro-coil array to drive the magnetic liquid, which helps to linearize the response characteristics of the micro-drive coils, making the liquid surface deformation and the local magnetic induction intensity generated by the micro-coil linearly related near the operating point.

[0041] The Maxwell coil consists of two coaxially placed circular coils wound symmetrically. The number of turns and wire diameter are designed according to the gradient magnetic field requirements. By passing equal and opposite currents into the coil, an axial gradient magnetic field is generated in the central region. The magnitude of the gradient magnetic field can be adjusted by the current to generate a uniform gradient field in the central region, so that the magnetic fluid is subjected to a uniform magnetic force. This ensures that the interface between the magnetic fluid and the isodense matching solution does not shift when the deformable mirror is tilted, thus maintaining the stability of the optical surface shape.

[0042] The optical frame consists of a frame base with an inner thread, a pressure ring, and an optical support rod. The deformable mirror is fixed in the optical frame by screwing the pressure ring into the inner threaded frame base to press the deformable mirror, ensuring that the liquid deformable mirror is safely and stably placed in the central area.

[0043] The container assembly is a photosensitive resin-quartz glass composite structure, with an overall cylindrical shape. The bottom and part of the sidewalls are made of photosensitive resin material using 3D printing. The main component of this material is acrylate compounds, whose molecules contain a large number of long chains or ring structures composed of carbon and hydrogen, thus exhibiting good affinity with the magnetic fluid and ensuring the smoothness of the magnetic fluid surface. The other part of the container's sidewalls is made of quartz glass. The surface of quartz glass contains a large number of silanol groups, whose strongly polar hydrophilic groups have good affinity with aqueous transparent solutions, ensuring the stability of the two-phase liquid interface. The top of the container is sealed with high-transmittance optical glass, which ensures that light passes through with minimal loss during operation. The central axis of the container coincides with the central axes of the Helmholtz coil and the Maxwell coil, and the geometric center of the container coincides with the magnetic field center of the two coils, ensuring that the two liquids inside the container are always within the target area of ​​the uniform magnetic field and gradient magnetic field.

[0044] Compared with the prior art, the present invention has the following beneficial effects: (1) The tiltable liquid deformable mirror based on composite magnetic field driven provided by the present invention is provided with a composite magnetic field driven component, including a micro coil array, a Helmholtz coil, a Maxwell coil and an optical frame, which work together to achieve liquid surface deformation control and tilt stability maintenance.

[0045] (2) The tiltable liquid deformable mirror based on composite magnetic field driven provided by the present invention can maintain a stable optical interface when the deformable mirror is tilted by the gradient magnetic field generated by the Maxwell coil, breaking through the limitation that traditional magnetic fluid deformable mirrors can only work horizontally, and giving the liquid deformable mirror a wider range of application scenarios.

[0046] (3) The tiltable liquid deformable mirror based on composite magnetic field driven provided by the present invention has a linear deformation response. The uniform magnetic field generated by the Helmholtz coil provides a uniform magnetization environment for the magnetic liquid, so that the amount of liquid surface deformation is linearly related to the driving magnetic induction intensity, which greatly improves the surface shape control accuracy.

[0047] (4) The tiltable liquid deformable mirror based on composite magnetic field driven provided by the present invention has high interface stability. The container adopts a photosensitive resin-quartz glass splicing structure. Through material affinity design, it achieves stable interface maintenance between magnetic liquid and matching solution, avoids interface irregularity caused by liquid adhesion, and further improves the stability of optical surface shape.

[0048] (5) The tiltable liquid deformable mirror based on composite magnetic field driven provided by the present invention has a compact structure, strong controllability, small size and high integration of the micro coil array; the current of the composite magnetic field component is precisely controlled by the circuit, with fast response speed, and can realize dynamic real-time surface correction.

[0049] (6) The tiltable liquid deformable mirror based on composite magnetic field driven provided by the present invention uses an oil-water interface self-assembly method to efficiently and uniformly prepare silver nanofilms directly at the interface of magnetic liquid and water. Attached Figure Description

[0050] Figure 1 This is a schematic diagram of the tiltable liquid deformable mirror based on a composite magnetic field driven according to the present invention. Figure 2 This is a schematic diagram of the structure of the liquid deformable mirror body of the present invention.

[0051] Figure 3 This is a three-dimensional view of a tiltable magnetofluid deformable mirror driven by a composite magnetic field.

[0052] Figure 4 This is an exploded view of an optical lens frame.

[0053] Figure 5 This is a schematic diagram of a tiny coil array.

[0054] The numbers in the diagram are as follows: 1. Maxwell coil; 2. Helmholtz coil; 3. Liquid deformable mirror body; 4. Optical frame; 5. Micro-coil array; 6. High-transmittance optical glass plate; 7. Aqueous liquid medium layer; 8. Quartz glass ring; 9. Nano-reflective thin film layer; 10. Plastic container; 11. Magnetic liquid medium layer; 12. Frame base with inner thread; 13. Optical support rod; 14. Pressure ring. Detailed Implementation

[0055] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. Component models, material names, connection structures, control methods, and other features not explicitly described in this technical solution are considered common technical features disclosed in the prior art.

[0056] This invention relates to a tiltable liquid deformable mirror driven by a composite magnetic field. It uses an oil-based magnetic liquid and a transparent aqueous solution with matching density as the core optical interface materials. A silver nanofilm is directly prepared at the interface between the magnetic liquid and the aqueous solution using an oil-water interface self-assembly method to improve the reflectivity of the optical interface. High-precision deformation control of the liquid surface is achieved through a micro-coil array. A uniform magnetic field generated by a Helmholtz coil ensures a linear response between the deformation of the magnetic liquid and the magnetic induction intensity of the micro-drive coil. Simultaneously, a gradient magnetic field generated by a Maxwell coil suppresses interface shift between the two liquids under tilting conditions. The container is constructed from photosensitive resin and quartz glass, and a material affinity design ensures stable interface maintenance between the two liquids. Compared with existing technologies, this invention solves the problems of interface instability and nonlinear deformation response when traditional magnetic fluid deformable mirrors are tilted, thus enabling a wider range of applications for magnetic fluid deformable mirrors.

[0057] It should be noted that the terms "front," "rear," "left," "right," "up," "down," "inner," and "outer" used in this application to indicate directions or positional relationships are based on the directions or positional relationships indicated in the accompanying drawings. These terms are used to make the description of this application more concise and clear, and do not imply that the connecting parts or components must have specific positional limitations. Therefore, they should not be considered as limitations on this application. Furthermore, the embodiments described in this application are only a part of the embodiments of the present invention and cannot represent all embodiments. Other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this invention.

[0058] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0059] It should be noted that in this invention, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0060] Example 1 like Figure 1 ( Figure 1 In the diagram, "×" indicates the perpendicular line to the paper pointing inwards, and "·" indicates the perpendicular line to the paper pointing outwards. Figure 2 , Figure 3 As shown, this embodiment provides a tiltable liquid deformable mirror driven by a composite magnetic field. The tiltable liquid deformable mirror driven by a composite magnetic field includes a liquid component, a composite magnetic field driving component, and a container component.

[0061] The liquid component includes a magnetic liquid medium layer 11 and an aqueous liquid medium layer 7; the magnetic liquid medium layer 11 includes a magnetic liquid medium, and the aqueous liquid medium layer 7 includes an aqueous liquid medium, wherein the magnetic liquid medium and the aqueous liquid medium are liquid media with equal density matching.

[0062] A nano-reflective thin film layer 9 is provided between the magnetic liquid medium layer 11 and the aqueous liquid medium layer 7. The magnetic liquid medium layer 11 and the aqueous liquid medium layer 7 form a stable optical interface. To improve the interface reflectivity, a nano-reflective thin film layer 9 is spontaneously formed at the interface between the magnetic liquid medium and the aqueous liquid medium through oil-water self-assembly.

[0063] The composite magnetic field driving component includes a micro coil array 5, a Helmholtz coil 2, a Maxwell coil 1, and an optical frame 4; the micro coil array 5, the Helmholtz coil 2, the Maxwell coil 1, and the optical frame 4 work together to achieve liquid surface deformation control and tilt stability maintenance.

[0064] The container assembly is used to contain the liquid assembly; the liquid assembly and the container assembly together form the liquid deformable mirror body 3.

[0065] The optical frame 4 is connected to the liquid deformable mirror body 3.

[0066] The magnetic liquid medium is an oil-based magnetic liquid; the aqueous liquid medium is a transparent aqueous solution; and the nano-reflective film layer 9 includes a silver nanofilm.

[0067] The oil-based magnetic fluid is prepared by dispersing oleic acid-encapsulated iron oxide particles in a nonpolar isoalkane containing dissolved 2,9-dimethyl-1,10-phenanthroline.

[0068] The transparent aqueous solution is a deuterated aqueous solution.

[0069] The method for preparing the silver nanofilm includes the following steps: a silver sol is obtained by heating and centrifuging a mixed aqueous solution of silver nitrate and an aqueous solution of sodium citrate; an oil-based magnetic liquid is completely immersed in the silver sol; and under static conditions, silver nanoparticles spontaneously assemble at the interface between the oil-based magnetic liquid and water to form a continuous silver nanofilm.

[0070] The term "equal density matching" for the magnetic liquid medium and the aqueous liquid medium refers to a density difference between the two media within -0.001 g / cm³. 3 ~0.001g / cm 3 between.

[0071] The micro-coil array 5 is used to drive local deformation of the magnetic liquid medium.

[0072] The micro-coil array 5 includes a driver coil composed of micro-coils closely arranged in a hexagonal structure.

[0073] Both the Helmholtz coil 2 and the Maxwell coil 1 are supported by industrial bakelite boards, which is a conventional technique in the field and is not improved by this invention.

[0074] The Helmholtz coil 2 is used to generate a uniform magnetic field to ensure that the deformation of the magnetic liquid medium is linearly related to the magnetic induction intensity of the tiny drive coil.

[0075] The Maxwell coil 1 is used to generate a gradient magnetic field to maintain the stability of the interface between the magnetic liquid medium and the aqueous liquid medium when tilted.

[0076] The Helmholtz coil 2 comprises two coaxially placed circular coils, the diameter of which is determined according to the diameter of the container, and the magnetic field uniformity in the central region of the Helmholtz coil is ≥98%.

[0077] The Helmholtz coil 2 consists of two coaxially placed circular coils.

[0078] The Maxwell coil 1 comprises two coaxially symmetrically wound circular coils that generate a uniform gradient field in the central region, causing the magnetic liquid to be subjected to a uniform magnetic force. This ensures that the interface between the magnetic liquid medium and the aqueous liquid medium does not shift when the deformable mirror is tilted, thus maintaining the stability of the optical surface shape.

[0079] The Maxwell coil 1 consists of two coaxially symmetrically wound circular coils.

[0080] The radius R2 of the Helmholtz coil 2 is smaller than the radius R1 of the Maxwell coil 1.

[0081] The diameter of the liquid deformable mirror body 3 is smaller than the radius R2 of the Helmholtz coil 2.

[0082] The distance between the two coaxially placed circular coils in the Helmholtz coil 2 is d2=R2.

[0083] The distance d1 between the two coaxially symmetrically wound circular coils in the Maxwell coil 1 is... R1.

[0084] The container assembly is located in the central region between the Helmholtz coil 2 and the Maxwell coil 1.

[0085] The optical frame 4 is used to ensure that the liquid deformable mirror body 3 is placed safely and stably in the central area.

[0086] The container assembly is a photosensitive resin-quartz glass splicing structure, which achieves stable interface maintenance between magnetic liquid media and aqueous liquid media through material affinity design.

[0087] The container assembly includes a plastic container 10, a high-transmittance optical glass sheet 6, and a quartz glass ring 8.

[0088] The light transmittance of the high-transmittance optical glass sheet 6 exceeds 90%.

[0089] The plastic container 10 is made of photosensitive resin and is printed using photosensitive resin.

[0090] The quartz glass ring 8 is connected to the side wall of the plastic container 10; the high-transmittance optical glass sheet 6 is disposed on the top of the quartz glass ring 8.

[0091] The central axis of the container assembly coincides with the central axis of Helmholtz coil 2 and Maxwell coil 1; the geometric center of the container assembly coincides with the magnetic field center of Helmholtz coil 2 and Maxwell coil 1, ensuring that the liquid deformable mirror body 3 is in the target area of ​​the magnetic field.

[0092] The sidewall of the container corresponding to the quartz glass ring 8 corresponds to a transparent aqueous solution, while the sidewall of the container corresponding to the plastic container 10 corresponds to an oil-based magnetic liquid.

[0093] The micro-coil array 5 is placed at the bottom of the plastic container 10.

[0094] The central axes of the magnetic liquid medium layer 11 and the aqueous liquid medium layer 7 in the liquid assembly coincide with the central axis of the container assembly.

[0095] Example 2 like Figure 1 ( Figure 1 In the diagram, "×" indicates the perpendicular line to the paper pointing inwards, and "·" indicates the perpendicular line to the paper pointing outwards. Figure 2 As shown, this embodiment provides a tiltable liquid deformable mirror driven by a composite magnetic field. Based on Embodiment 1, this embodiment further includes the following settings: Core liquid preparation: The oil-based magnetic liquid of magnetic liquid medium layer 11 is prepared by dispersing oleic acid-encapsulated iron oxide particles in a nonpolar solvent containing 2,9-dimethyl-1,10-phenanthroline (the nonpolar solvent can be such as isohexane), with the density adjusted to 1.02 g / cm³. 3 The specific method for preparing oleic acid-coated iron(III) oxide particles is as follows: A 3 mol / L NaOH solution is heated in a water bath. When the temperature rises to 70℃, a mixed salt solution of FeSO4·7H2O and FeCl3·6H2O (n(Fe)) is added to the NaOH solution while stirring. 2+ ) / n(Fe3+ The ratio of oleic acid to Fe3O4 nanoparticles was 1.2:2. The mixture was then kept at this temperature for 1 hour, followed by washing with water to obtain a Fe3O4 particle suspension. A 1.5 mol / L NaOH solution was added to the prepared Fe3O4 particle suspension, followed by sufficient oleic acid. The mixture was heated in a water bath for 50-60 minutes with stirring to carry out the coating reaction. The coated material was then washed several times with anhydrous ethanol to obtain the coated sample, which is the oleic acid-coated Fe3O4 nanoparticles. Finally, the oleic acid-coated Fe3O4 nanoparticles were dispersed in a carrier liquid (isohexane containing dissolved 2,9-dimethyl-1,10-phenanthroline) to prepare a magnetic liquid. When the solid-liquid ratio was approximately 0.645, the density of the magnetic liquid was 1.02 g / cm³. 3 The actual situation can be adjusted accordingly based on the density meter measurement; the transparent aqueous solution (deuterated aqueous solution) of the isodensely matched aqueous liquid medium layer 7 is prepared by diluting heavy water with deionized water, and the density is adjusted to 1.02 g / cm³. 3 .

[0096] The preparation method of the nano-reflective thin film layer 9 is as follows: (1) Dissolve 1.7g of silver nitrate in 100ml of deionized water and boil it. Add 2ml of sodium citrate solution with a concentration of 0.05mol / L. Continue heating (about 180℃) the mixed solution and keep boiling until the solution turns yellow. Stop heating and cool it quickly to obtain silver sol. Place the silver sol in a centrifuge tube and centrifuge it repeatedly at a speed of 14500rpm 2~3 times to obtain pure silver sol. (2) Completely immerse the open container containing 4mL of oil-based magnetic liquid into the above silver sol. Under static conditions, the silver nanoparticles spontaneously assemble at the interface between the oil-based magnetic liquid and water to form a continuous silver nanofilm.

[0097] 3. Next, the container is transferred to a deuterated aqueous solution of a predetermined density for displacement treatment (the top layer of the original container is the transparent aqueous solution remaining after silver sol precipitation; this is placed in the prepared deuterated aqueous solution to replace the transparent aqueous solution in the container with a deuterated aqueous solution of the same density as the magnetic liquid). Finally, the system is encapsulated using high-transmittance optical glass (high-transmittance optical glass sheet 6) to complete the assembly of the entire mirror structure.

[0098] 4. Composite Magnetic Field Component Parameters: The Helmholtz coil 2 consists of a set of two circular coils with a radius R2 = 150 mm and a number of turns N2 = 170 (two circular coils are symmetrically arranged on both sides of the liquid deformable mirror body 3), with a distance d2 = R2 = 150 mm between the two coils. This structure can generate a highly uniform magnetic field region, with the uniform region covering approximately half the diameter of the coil. To ensure that the liquid deformable mirror body 3, with a diameter (inner diameter) of 100 mm, is completely within the uniform magnetic field range in subsequent experiments, the coil radius R2 = 150 mm was selected in this design. To avoid Rosensweig instability in the magnetohydrodynamic fluid, the uniform magnetic field strength was set to 10 mT. According to relevant calculations, when a current of 10 A is applied to the Helmholtz coil 2, the central region can achieve the required 10 mT uniform magnetic field; the Maxwell coil 1 consists of a set of two circular coils with a radius R1 = 160 mm and a number of turns N1 = 180 (two circular coils are symmetrically arranged on both sides of the liquid deformable mirror body 3), with a distance d2 = R2 = 150 mm between the two coils. mm. This configuration generates a uniform gradient magnetic field in the central region, with the uniform gradient area approximately half the diameter of the coil. To place the liquid deformable mirror body 3 within the uniform gradient field and ensure that the Helmholtz coil 2 can be housed within the Maxwell coil 1, this design selects a coil radius of R1 = 160 mm (Maxwell coil 1). When a current of 3.5 A is applied to the Maxwell coil 1, a target magnetic field gradient of 0.02 T / m can be achieved in the central region; if... Figure 5 As shown, the microcoil array 5 is a hexagonal array of 37 circular coils (microcoils). Based on the calculation of the mirror response amplitude, when the uniform background magnetic field strength is 10mT, the perturbation magnetic field strength generated by the microcoil array 5 needs to be no less than 0.056mT to drive the mirror to produce a 1mm deformation. In this embodiment, the inner radius of the microcoils in the designed microcoil array 5 is set to 1mm, the outer radius to 2mm, the coil height to 8mm, and the number of turns to 235. Calculations show that when a 70mA current is applied to the microcoil array 5, the magnetic induction intensity generated in the target area is higher than the required 0.056mT, which can provide reliable magnetic field excitation conditions for high-precision control of the mirror.

[0099] 5. Container assembly parameters: The container assembly is a cylindrical structure with a diameter of 58mm. The bottom and the side wall 3mm above the bottom are made of photosensitive resin material and are made into a plastic container 10 by light curing. A quartz glass ring 8 with a height of 1.5mm is embedded in the plastic container 10. The top is sealed with a high-transmittance quartz glass sheet 6 using conventional transparent waterproof adhesive. Its central axis coincides with the central axis of Helmholtz coil 2 and Maxwell coil 1, and its geometric center coincides with the magnetic field center of Helmholtz coil 2 and Maxwell coil 1.

[0100] Example 3 like Figure 4 As shown, this embodiment, based on embodiment 1 or embodiment 2, further includes the following settings: The present invention uses an optical frame 4 to fix the liquid deformable mirror body 3. The optical frame 4 consists of a frame seat 12 with an inner thread, a pressure ring 14, and an optical support rod 13. The liquid deformable mirror body 3 is placed in the center of the frame. By screwing in the pressure ring 14, the deformable mirror is pressed into the frame seat 12 with an inner thread, ensuring that the liquid deformable mirror body 3 is safely and stably placed in the central area.

[0101] The aforementioned tiltable liquid deformable mirror driven by a composite magnetic field can be applied to fields such as beam shaping, astronomical or biological tissue imaging, to achieve correction and control of ultra-large aberrations.

[0102] The above description of the embodiments is provided to enable those skilled in the art to understand and use the invention. It will be apparent to those skilled in the art that various modifications can be made to these embodiments, and the general principles described herein can be applied to other embodiments without inventive effort. Therefore, the present invention is not limited to the above embodiments, and any improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the invention should be within the protection scope of the present invention.

Claims

1. A tiltable liquid deformable mirror driven by a composite magnetic field, characterized in that, The tiltable liquid deformable mirror based on composite magnetic field drive includes a liquid component, a composite magnetic field drive component, and a container component. The liquid component includes a magnetic liquid medium layer (11) and an aqueous liquid medium layer (7). The magnetic liquid medium layer (11) includes a magnetic liquid medium, and the aqueous liquid medium layer (7) includes an aqueous liquid medium. The magnetic liquid medium and the aqueous liquid medium are liquid media with equal density matching. A nano-reflective thin film layer (9) is provided between the magnetic liquid medium layer (11) and the aqueous liquid medium layer (7). The composite magnetic field drive assembly includes a micro coil array (5), a Helmholtz coil (2), a Maxwell coil (1), and an optical frame (4). The micro-coil array (5), Helmholtz coil (2), Maxwell coil (1) and optical frame (4) work together to achieve liquid surface deformation control and tilt stability maintenance; The container assembly is used to contain the liquid component; The liquid component and the container component together form the main body of the liquid deformable mirror (3). The optical frame (4) is connected to the liquid deformable mirror body (3).

2. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 1, characterized in that, The magnetic fluid medium is an oil-based magnetic fluid; The aqueous liquid medium is a transparent aqueous solution; The nano-reflective thin film layer (9) includes a silver nanofilm.

3. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 2, characterized in that, The oil-based magnetic fluid is prepared by dispersing oleic acid-encapsulated iron oxide particles in a nonpolar isoalkane containing dissolved 2,9-dimethyl-1,10-phenanthroline. The transparent aqueous solution is a deuterated aqueous solution; The method for preparing the silver nanofilm includes the following process: a silver sol is obtained by heating and centrifuging a mixed aqueous solution of silver nitrate and an aqueous solution of sodium citrate; an oil-based magnetic liquid is completely immersed in the silver sol; and under static conditions, silver nanoparticles spontaneously assemble at the interface between the oil-based magnetic liquid and water to form a continuous silver nanofilm. The magnetic liquid medium and the aqueous liquid medium are isodense matched liquid media means that the difference in density between the magnetic liquid medium and the aqueous liquid medium is between -0.001 g / cm 3 0.001 g / cm 3 .

4. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 1, characterized in that, The micro-coil array (5) is used to drive local deformation of the magnetic liquid medium; The micro-coil array (5) includes a driver coil in which multiple micro-coils are closely arranged in a hexagonal structure.

5. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 1, characterized in that, The Helmholtz coil (2) is used to generate a uniform magnetic field to ensure that the deformation of the magnetic liquid medium is linearly related to the driving magnetic induction intensity; The Maxwell coil (1) is used to generate a gradient magnetic field to maintain the stability of the interface between the magnetic liquid medium and the aqueous liquid medium when tilted.

6. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 1, characterized in that, The Helmholtz coil (2) comprises two coaxially placed circular coils, and the magnetic field uniformity in the central region of the Helmholtz coil is ≥98%. The Maxwell coil (1) comprises two coaxially symmetrically wound circular coils that generate a uniform gradient field in the central region, so that the magnetic liquid is subjected to a uniform magnetic force, ensuring that the interface between the magnetic liquid medium and the aqueous liquid medium does not shift when the deformable mirror is tilted, thus maintaining the stability of the optical surface shape.

7. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 6, characterized in that, The diameter of the liquid deformable mirror body (3) is smaller than the radius R2 of the Helmholtz coil (2); The diameter of the liquid deformable mirror body (3) is smaller than the radius R1 of the Maxwell coil (1); The distance between the two coaxially placed circular coils in the Helmholtz coil (2) is d2=R2; The distance d1 between the two coaxially symmetrically wound circular coils in the Maxwell coil (1) is... R1.

8. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 1, characterized in that, The container assembly is located in the central region between the Helmholtz coil (2) and the Maxwell coil (1); The optical frame (4) is used to ensure that the liquid deformable mirror body (3) is placed safely and stably in the central area.

9. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 1, characterized in that, The container assembly is a photosensitive resin-quartz glass splicing structure; The container assembly includes a plastic container (10), a high-transmittance optical glass sheet (6), and a quartz glass ring (8). The light transmittance of the high-transmittance optical glass sheet (6) exceeds 90%; The plastic container (10) is made of photosensitive resin, and the plastic container (10) is printed by photosensitive resin; The quartz glass ring (8) is connected to the side wall of the plastic container (10); The high-transmittance optical glass sheet (6) is disposed on top of the quartz glass ring (8).

10. The tiltable liquid deformable mirror based on a composite magnetic field drive according to claim 1, characterized in that, The central axis of the container assembly coincides with the central axis of the Helmholtz coil (2) and the Maxwell coil (1); The geometric center of the container assembly coincides with the magnetic field center of the Helmholtz coil (2) and the Maxwell coil (1), ensuring that the liquid deformable mirror body (3) is in the target area of ​​the magnetic field.

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