A micro-positive pressure adiabatic anti-freezing system for a silane gasholder pressure regulating valve

Abstract

This invention belongs to the field of special gas supply safety technology, and specifically relates to a micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder. The system includes a cabinet with a control panel on its top side. Two doors are hinged to the front of the cabinet. It also includes a micro-positive pressure sealed drying chamber located inside the cabinet. The chamber comprises an outer metal shielding shell and an insulation liner. Outer and inner sealing plates are respectively installed on the left and right sides of the chamber. A pressure regulating valve body is located inside the chamber. This invention utilizes a micro-positive pressure drying chamber and molecular sieves to prevent water vapor sublimation, vortex tubes for heat equalization to avoid thermal shock damage, micro-vibration and thermal sublimation for non-destructive ice breaking, and regenerative adsorption to reduce maintenance costs. It solves the problems of traditional antifreeze systems, such as easy icing, equipment damage, and cumbersome maintenance, while ensuring safety, energy efficiency, and continuous stable operation of the pressure regulating valve.

Description

Technical Field

[0001] This invention relates to the field of special gas supply safety technology, and in particular to a micro-positive pressure heat insulation and antifreeze system for a pressure regulating valve of a silane gas holder. Background Technology

[0002] Silane, a core specialty gas in industries such as semiconductors and photovoltaics, is flammable, explosive, and easily hydrolyzed. Its storage and transportation require stable pressure control through dedicated gas holders and pressure regulating valves. During the operation of the pressure regulating valve, the silane flowing through the valve port experiences a significant temperature drop due to the throttling effect, resulting in the valve body surface temperature being lower than the ambient temperature.

[0003] In the existing technology, the antifreeze measures for silane gas holder pressure regulating valves mainly have the following drawbacks: Insufficient control over the source of sublimation and icing: Traditional methods use a simple insulation layer to wrap the valve body, which can slow down heat loss but cannot isolate moisture in the air. When the ambient humidity is high, moisture will sublimate on the surface of the low-temperature valve body to form a frost layer, which will then freeze into an ice layer, causing the valve stem to stick, the sealing surface to wear, and in severe cases, the risk of silane leakage. Inappropriate heating method: Some solutions use electric heating wires to directly wrap the valve body, which can cause localized rapid temperature rise, easily leading to thermal stress cracks in the valve body metal material. In addition, electric heating consumes a lot of energy and poses electrical safety hazards.

[0004] The core invention of this solution lies in the construction of a three-level linkage antifreeze system of "physical isolation, eddy current temperature control, and intelligent ice breaking", which completely eliminates external heat sources and polluting gases, and achieves intrinsic safety. Summary of the Invention

[0005] To address the aforementioned problems, this invention proposes a micro-positive pressure insulation and antifreeze system for a pressure regulating valve in a silane gas holder, thereby more accurately solving the problems mentioned in the background art.

[0006] This invention is achieved through the following technical solution: This invention proposes a micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder, comprising a cabinet, a control panel on the top side of the cabinet, and two cabinet doors mounted on the front of the cabinet via hinges, and further comprising: A micro-positive pressure sealed drying chamber is located inside a cabinet. The micro-positive pressure sealed drying chamber includes an outer metal shield shell and a heat insulation liner. The left and right sides of the micro-positive pressure sealed drying chamber are respectively sealed with an outer sealing plate and an inner sealing plate. A pressure regulating valve body is installed inside the micro-positive pressure sealed drying chamber. An inlet pipe and an outlet pipe are connected to the pressure regulating valve body. The inlet pipe and the outlet pipe extend to the outside of the cabinet. Regenerative drying adsorption units are evenly arranged on the inner wall of the micro-positive pressure sealed drying chamber. The eddy tube temperature rise compensation module is located below the micro-positive pressure sealed drying chamber. The eddy tube temperature rise compensation module is connected to a heat equalization module, which is located inside the micro-positive pressure sealed drying chamber and is used to uniformly heat the pressure regulating valve body. The sensing micro-vibration module, installed on the inner sealing plate, is used to monitor the temperature of the pressure regulating valve body and to vibrate and break the ice in the pressure regulating valve body.

[0007] Preferably, the top of the micro-positive pressure sealed drying chamber is connected to a one-way exhaust pipe, the one-way exhaust pipe is equipped with a one-way breathing valve, the one-way breathing valve is connected to an extension pipe, and the extension pipe extends to the outside of the cabinet to control the air inside the micro-positive pressure sealed drying chamber to be discharged to the outside.

[0008] Preferably, a fixed mounting rod is installed on the inner sealing plate, and the inner sealing plate and the micro-positive pressure sealed drying chamber are installed on the inner wall of the cabinet through the fixed mounting rod. An infrared transmission window is provided on the inner sealing plate.

[0009] Preferably, the sensing micro-vibration module includes a mounting plate, which is fixedly installed on the outside of the inner sealing plate. An infrared temperature probe is provided on the mounting plate, and the infrared temperature probe is close to the infrared transmission window for observing the temperature of the pressure regulating valve body.

[0010] Preferably, the mounting plate is provided with two piezoelectric micro-vibration controllers, and the two piezoelectric micro-vibration controllers are electrically connected to piezoelectric ceramic stacked actuators. The piezoelectric ceramic stacked actuators are attached to the outside of the pressure regulating valve body, and a support tube is installed on the piezoelectric ceramic stacked actuators. The piezoelectric ceramic stacked actuators are fixedly installed to the inner sealing plate through the support tubes.

[0011] Preferably, the vortex tube temperature rise compensation module includes an air pump and a vortex tube, both of which are mounted on the top of the support plate. The inlet of the air pump is connected to a drying cylinder, and the inlet of the drying cylinder is equipped with a filter screen. The vortex tube is connected to a hot air outlet pipe and a cold air outlet pipe, with the hot air outlet pipe facing upwards and the cold air outlet pipe facing downwards. Two fixing clips are installed on the top of the support plate, and the vortex tube is fixed to the support plate by the two fixing clips.

[0012] Preferably, the heat equalization module includes a flow guide pipe and two ceramic flow equalization hoods. The flow guide pipe is fixedly installed on the outer sealing plate and is connected to the hot gas outlet pipe. The inner end of the flow guide pipe is connected to two branch pipes, which are connected to the two ceramic flow equalization hoods. The two ceramic flow equalization hoods are symmetrically arranged and located on the upper and lower sides of the pressure regulating valve body. The inner side of the ceramic flow equalization hood is provided with multiple flow equalization holes.

[0013] Preferably, a fixing rod is installed on the ceramic flow equalization hood, the fixing rod is installed on the inner side of the outer sealing plate, and a solenoid valve is provided on the flow guide pipe.

[0014] Preferably, the regenerative drying adsorption unit is a breathable grid assembly filled with molecular sieve particles, which covers the outside of the pressure regulating valve body circumferentially, with a coverage area of ​​at least 80%.

[0015] Preferably, a support plate is fixedly installed inside the cabinet, the eddy current tube temperature rise compensation module is set on the top of the support plate, multiple air holes are opened on the rear side of the cabinet, and an observation window is provided on the cabinet door.

[0016] Compared with the prior art, the present invention provides a micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve of a silane gas holder, which has the following beneficial effects: 1. This invention blocks sublimation at the source, providing a thorough antifreeze effect: Through the synergistic design of a micro-positive pressure sealed drying chamber, a regenerable drying adsorption unit, and a one-way exhaust component, molecular sieves efficiently adsorb water vapor inside the chamber, the micro-positive pressure mechanism blocks the infiltration of external humid air, and the insulation lining reduces heat transfer, making the environment inside the chamber free from the conditions for water vapor sublimation, fundamentally eliminating the risk of icing and solving the core defect of existing technologies that "insulate heat but do not prevent condensation".

[0017] 2. Precise temperature control in stages to protect equipment safety: The eddy current tube temperature rise compensation module uses the internal energy of compressed air to generate hot airflow. Combined with the uniform flow design of the heat equalization module, it can achieve uniform and slow temperature rise of the valve body, avoiding thermal shock damage caused by traditional electric heating. The three-level protection logic dynamically adjusts the operating mode according to temperature changes to achieve "on-demand energy supply", which has lower energy consumption and no electrical safety hazards, and is suitable for the flammable and explosive working conditions of silane.

[0018] 3. Non-destructive and efficient ice breaking, ensuring continuous operation: The innovative "micro-vibration mechanical peeling + thermal sublimation" dual-action obstacle clearing mechanism controls the vibration amplitude of the piezoelectric ceramic stacked actuator within a safe range, avoiding damage to precision components caused by mechanical impact; high-frequency vibration can quickly break ice crystals, and the hot airflow sublimates the ice chips simultaneously, allowing the pressure regulating valve to resume normal operation without stopping the machine, solving the problems of low ice breaking efficiency or equipment damage in existing technologies.

[0019] 4. Multiple safety redundancies and controllable risks: Through triple protection of "static drying and isolation, dynamic graded protection, and fault interlocking alarm", it effectively avoids risks such as pressure regulating valve jamming, sealing failure and silane leakage, meets the high safety requirements of the semiconductor and photovoltaic industries for special gas transportation equipment, has a wide range of applicable environments and strong compatibility.

[0020] This invention solves the problems of traditional antifreeze systems, such as easy icing, equipment damage, and complicated maintenance, by using a micro-positive pressure drying chamber and molecular sieves to block water vapor sublimation, vortex tubes to avoid thermal shock damage, micro-vibration and thermal sublimation to achieve non-destructive ice breaking, and regenerative adsorption to reduce maintenance costs. It is safe, energy-saving and ensures the continuous and stable operation of the pressure regulating valve. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a micro-positive pressure thermal insulation and antifreeze system for a silane gas holder pressure regulating valve proposed in this invention. Figure 2 This is a bottom view of a micro-positive pressure thermal insulation and antifreeze system for a silane gas holder pressure regulating valve proposed in this invention. Figure 3 This is a schematic diagram of the planar structure of a micro-positive pressure thermal insulation and antifreeze system for a silane gas holder pressure regulating valve proposed in this invention. Figure 4 The present invention provides a structural schematic diagram of the support plate, the vortex tube temperature rise compensation module, the one-way exhaust pipe, the one-way breathing valve, the extension pipe and related parts; Figure 5 The side view of the support plate, vortex tube temperature rise compensation module, one-way exhaust pipe, one-way breathing valve, extension pipe and related parts are presented in this invention. Figure 6 This invention provides a structural schematic diagram of the support plate, extension tube, sensing micro-vibration module, and related components. Figure 7 This invention provides an internal structural schematic diagram of a micro-positive pressure sealed drying chamber, an outer sealing plate, an inner sealing plate, and a fixed mounting rod. Figure 8 This invention presents a schematic diagram of the micro-positive pressure sealed drying chamber, outer sealing plate, inner sealing plate, and regenerable drying and adsorption unit. Figure 9 This is a schematic diagram of the structure of the support plate and the eddy current tube temperature rise compensation module proposed in this invention; Figure 10 The present invention provides a structural schematic diagram of a micro-positive pressure sealed drying chamber, a one-way exhaust pipe, a one-way breathing valve, an extension pipe, a pressure regulating valve body, an inlet pipe, and an outlet pipe. Figure 11 This invention provides a structural schematic diagram of the inner sealing plate, the fixed mounting rod, the infrared transmission window, the piezoelectric ceramic stacked actuator, and the support tube. Figure 12 The present invention provides a structural schematic diagram of the inner sealing plate, the fixed mounting rod, the mounting plate, the infrared temperature measuring probe, and the piezoelectric micro-vibration controller; Figure 13 The following is a bottom view of the internal sealing plate, fixed mounting rod, mounting plate, infrared temperature probe, and piezoelectric micro-vibration controller proposed in this invention. Figure 14 The present invention provides a structural schematic diagram of an external sealing plate, a flow guide pipe, a solenoid valve, a branch pipe, and a ceramic flow equalization shroud; Figure 15 The present invention provides a structural schematic diagram of the external sealing plate, branch pipe, ceramic flow equalization hood, and flow equalization hole.

[0022] In the diagram: 1. Cabinet body; 11. Cabinet door; 12. Observation window; 13. Support plate; 14. Control panel; 15. Air vent; 2. Vortex tube temperature rise compensation module; 21. Air pump; 22. Drying cylinder; 221. Filter screen; 23. Vortex tube; 231. Fixing buckle; 24. Hot air outlet pipe; 25. Cold air outlet pipe; 3. Micro-positive pressure sealed drying chamber; 31. Outer sealing plate; 32. Inner sealing plate; 321. Fixed mounting rod; 322. Infrared transmission window; 4. Single 41. Exhaust pipe; 42. One-way breather valve; 5. Extension pipe; 6. Sensing micro-vibration module; 51. Mounting plate; 52. Infrared temperature probe; 53. Piezoelectric micro-vibration controller; 54. Piezoelectric ceramic stacked actuator; 55. Support pipe; 6. Pressure regulating valve body; 61. Inlet pipe; 62. Outlet pipe; 7. Heat equalization module; 71. Guide pipe; 72. Solenoid valve; 73. Branch pipe; 74. Ceramic flow equalization hood; 741. Flow equalization orifice; 8. Regenerative drying adsorption unit. Detailed Implementation

[0023] To more clearly and completely illustrate the technical solution of the present invention, the present invention will be further described below with reference to the accompanying drawings. Example

[0024] like Figures 1-15 As shown, an embodiment of the present invention proposes a micro-positive pressure heat insulation and antifreeze system for a pressure regulating valve of a silane gas holder, including a cabinet 1, a support plate 13 fixedly installed inside the cabinet 1, a control panel 14 provided on the top side, two cabinet doors 11 with observation windows 12 installed on the front side by hinges, and multiple air holes 15 opened on the rear side. The micro-positive pressure sealed drying chamber 3 is fixed inside the cabinet 1. It includes an outer metal shielding shell and a heat insulation lining. The left and right sides are sealed by an outer sealing plate 31 and an inner sealing plate 32, respectively. The inner sealing plate 32 is fixed to the inner wall of the cabinet 1 by a fixed mounting rod 321 and is provided with an infrared transmission window 322. The micro-positive pressure sealed drying chamber 3 forms a sealed cavity with an outer sealing plate 31, an inner sealing plate 32, an outer metal shielding shell, and an insulation liner. The regenerable drying adsorption unit 8 arranged inside is a breathable grid assembly filled with molecular sieves with a pore size of 0.9nm-1.0nm, circumferentially covering ≥80% of the outer area of ​​the pressure regulating valve body 6. According to the micropore filling adsorption theory, the strong electrostatic field of the molecular sieve pores preferentially captures water molecules at room temperature. Under closed and static conditions, the residual water vapor partial pressure in the chamber is reduced to ≤0.01Pa through physical adsorption, corresponding to a dew point below -85℃, thus eliminating the material basis for water vapor sublimation at the source.

[0025] The pressure regulating valve body 6 is built into the dry micro-positive pressure sealed drying chamber 3, and the inlet pipe 61 and outlet pipe 62, which are connected at both ends, extend through the cabinet body 1 to the outside. The regenerable drying adsorption unit 8 is a breathable grid assembly filled with molecular sieve particles, which covers the outside of the pressure regulating valve body 6 in the circumferential direction and is evenly distributed on the inner wall of the micro-positive pressure sealed drying chamber 3. like Figure 10 As shown, in this invention, the one-way exhaust assembly 4 includes a one-way exhaust pipe 4 connected to the top of the micro-positive pressure sealed drying chamber 3, a one-way breathing valve 41 provided on the exhaust pipe, and an extension pipe 42 extending to the outside of the cabinet 1. The one-way breathing valve 41 allows the gas inside the chamber to overflow outward, maintains the micro-positive pressure inside the chamber, and prevents external air from seeping in.

[0026] Among them, the one-way exhaust pipe 4 at the top of the micro-positive pressure sealed drying chamber 3 is connected in series with the one-way breathing valve 41 and the extension pipe 42. It utilizes the principle of one-way diffusion barrier of gas molecules: when the ambient temperature fluctuates and causes the gas in the chamber to expand and contract, the one-way breathing valve 41 only allows a small amount of dry gas in the chamber to overflow outward, maintaining a micro-positive pressure in the chamber, with a pressure range of 0.02-0.05MPa, preventing external undried air from seeping inward, and completely cutting off the path of humid atmosphere into the sealed cavity.

[0027] The insulation lining of the micro-positive pressure sealed drying chamber 3 is made of polytetrafluoroethylene (PTFE) with a low thermal conductivity of ≤0.02 W / (m·K). When the pressure regulating valve body 6 is cooled to -50℃ due to silane throttling, the outer wall temperature of the chamber remains at 20℃-25℃, close to the ambient temperature. Since the dew point inside the chamber is -85℃, which is much lower than the coldest point temperature inside the chamber -50℃, according to the cold surface sublimation conditions in heat and mass transfer, the gas inside the chamber no longer has the water vapor supersaturation required for sublimation before contacting the cold surface of the pressure regulating valve body 6, thus achieving frost-free and ice-free basic protection for the operating environment of the pressure regulating valve body 6.

[0028] like Figure 9As shown, in this invention, the vortex tube temperature rise compensation module 2 is located on the top of the support plate 13 and includes an air pump 21, a drying cylinder 22 and a vortex tube 23. The air pump 21 is connected to the air through the drying cylinder 22 with a filter screen 221 and the outlet is connected to the vortex tube 23. The vortex tube 23 is fixed to the support plate 13 by two fixing buckles 231. The upper end is provided with a hot air outlet pipe 24 and the lower end is provided with a cold air outlet pipe 25 pointing downward to the air hole 15. The drying cylinder 22 contains a desiccant, which can lower the dew point of the air entering the air pump 21.

[0029] When the air pump 21 is started, the outside air enters the drying cylinder 22 after being filtered for impurities by the filter screen 221. The silica gel desiccant inside further reduces the inlet dew point to ≤-60℃. The dried compressed air pressure of 0.4-0.6MPa is introduced into the vortex tube 23. The vortex tube 23 has no moving parts and no power input. By redistributing the internal energy of compressed air, it separates the air into a hot airflow with a temperature of 40℃-60℃ and a cold airflow with a temperature of -20℃--10℃. The cold airflow is discharged downward through the cold air outlet pipe 25 and dissipates through the air hole 15 on the rear side of the cabinet 1. The hot airflow is output through the hot air outlet pipe 24.

[0030] The vortex tube 23 can separate compressed air into hot and cold air streams, with no moving parts and no need for power input.

[0031] like Figure 14 , Figure 15 As shown, in this invention, the heat equalization module 7 includes a guide pipe 71 fixed to the outer sealing plate 31, a solenoid valve 72 disposed on the guide pipe 71, two branch pipes 73, and two ceramic flow equalization hoods 74 symmetrically arranged on the upper and lower sides of the pressure regulating valve body 6. The guide pipe 71 is connected to the hot gas outlet pipe 24, and the two ends of the branch pipe 73 are respectively connected to the guide pipe 71 and the ceramic flow equalization hood 74. The ceramic flow equalization hood 74 has multiple flow equalization holes 741 on its inner side. It is fixed to the outer sealing plate 31 by a fixing rod, which can disperse the hot gas flow into a low-velocity micro-flow, and avoid damage to the pressure regulating valve body 6 due to severe thermal shock. Among them, the controller opens the solenoid valve 72 on the guide pipe 71, and the hot air flows through the guide pipe 71 to two branch pipes 73, and then into the ceramic flow equalization shroud 74 symmetrically arranged on the upper and lower sides of the pressure regulating valve body 6. Multiple flow equalization holes 741 inside the ceramic flow equalization shroud 74 disperse the high-speed hot jet into countless low-velocity micro-airflows with a velocity ≤0.3m / s, which are uniformly released close to the surface of the pressure regulating valve body 6. Through the flow equalization structure design, the heating rate of the hot airflow on the pressure regulating valve body 6 is strictly controlled at ΔT≤5℃ / cm, avoiding micro-cracks in the valve body or deformation of the sealing surface due to severe thermal shock.

[0032] The sensing micro-vibration module 5 includes a mounting plate 51 fixed to the outside of the inner sealing plate 32, an infrared temperature probe 52 mounted on the mounting plate 51 and aligned with the infrared transmission window 322, two piezoelectric micro-vibration controllers 53, and a piezoelectric ceramic stacked actuator 54 attached to the outside of the pressure regulating valve body 6. The piezoelectric ceramic stacked actuator 54 is fixed to the inner sealing plate 32 through a support tube 55 and electrically connected to the piezoelectric micro-vibration controllers 53, and can generate forced vibration. like Figure 12 , Figure 13 As shown, in this invention, the controller is integrated into the control panel 14 and is electrically connected to the infrared temperature probe 52, the air pump 21, the solenoid valve 72, and the piezoelectric micro-vibration controller 53, respectively, and is used to receive temperature signals and control the coordinated operation of each module.

[0033] The controller sends a 0.5-1.0 second pulse signal to the two piezoelectric micro-vibration controllers 53, driving the piezoelectric ceramic stacked actuator 54 to be fixed to the inner sealing plate 32 through the support tube 55 and to work in contact with the outside of the pressure regulating valve body 6. Under sinusoidal voltage drive, the piezoelectric ceramic stacked actuator 54 generates forced vibration at a frequency of 80 Hz and an amplitude of 50 μm. This vibration is rigidly transmitted to the micron-level gap between the valve stem and the valve seat through the pressure regulating valve body 6. Since ice crystals are brittle solid materials, under the action of 80 Hz high-frequency alternating shear stress, the adhesion strength between the ice crystals and the metal interface decreases sharply, the interface fatigue cracks propagate rapidly, and the ice crystals instantly shatter into micron-level powdery ice fragments.

[0034] In this invention, the infrared temperature probe 52 is used to detect the surface temperature of the pressure regulating valve body 6 in real time and provide signal feedback to the controller; the vibration amplitude of the piezoelectric ceramic stacked actuator 54 is smaller than the fit clearance between the pressure regulating valve stem and the guide sleeve, so as to avoid the valve core and valve seat from hard collision caused by vibration.

[0035] In this invention, the controller is configured with three levels of protection logic: Level 1 protection: When the infrared temperature probe 52 detects that the surface temperature of the pressure regulating valve body 6 reaches the preset low temperature threshold, the eddy current tube temperature rise compensation module 2 is activated until the temperature rises back to the preset safe temperature and then shuts off. Secondary protection: When the temperature of the pressure regulating valve body 6 drops sharply to the preset emergency threshold within a preset time, the eddy current tube temperature rise compensation module 2 and the sensing micro-vibration module 5 are activated simultaneously, and the piezoelectric ceramic stacked actuator 54 receives the pulse signal and generates vibration. Level 3 protection: If the temperature does not rise after the preset time of activation of Level 2 protection, the controller will issue an audible and visual alarm through the control panel 14 and output an interlock signal to the silane gas holder control system.

[0036] In this invention, the molecular sieve particles of the regenerable dry adsorption unit 8 can have their adsorption performance restored by thermal regeneration and can be reused.

[0037] In this invention, the control panel 14 can display the dew point inside the cabin, the temperature of the pressure regulating valve body 6, and the operating status of each module in real time, and supports manual start and stop control.

[0038] The support plate 13 inside the cabinet 1 stably supports the vortex tube 23 and the air pump 21 through the fixing buckle 231, so as to avoid the vibration generated during operation from affecting the precision fit of the pressure regulating valve body 6; the observation window 12 on the cabinet door 11 makes it easy for people to observe the appearance of the pressure regulating valve body 6 directly; the control panel 14 can display parameters such as the dew point inside the cabin, valve body temperature, and module operating status in real time, and supports manual start and stop control.

[0039] Working principle: The micro-positive pressure sealed drying chamber 3, the outer sealing plate 31, and the inner sealing plate 32 form a closed drying space. The molecular sieve grid of the embedded regenerable drying adsorption unit 8 has a crystal cavity diameter of 0.9nm-1.0nm. According to the micropore filling adsorption theory, water molecules are preferentially captured by the strong electrostatic field of the molecular sieve crystal cavities at room temperature. In a closed and static state, the molecular sieve reduces the partial pressure of residual water vapor in the chamber to below 0.01Pa through physical adsorption, corresponding to a dew point below -85℃. The one-way exhaust pipe 4 installed at the top of the micro-positive pressure sealed drying chamber 3 is used for one-way exhaust. When the ambient temperature fluctuates, causing the gas inside the micro-positive pressure sealed drying chamber 3 to expand and contract due to temperature changes, the one-way breathing valve 41 only allows a small amount of gas inside the chamber to overflow outward, preventing undried air from outside from seeping inward. This utilizes the principle of one-way diffusion barrier of gas molecules, cutting off the path for humid air to enter from the source. The insulating lining inside the micro-positive pressure sealed drying chamber 3 is made of polytetrafluoroethylene (PTFE), a material with low thermal conductivity. When the valve body is cooled to -50°C due to silane throttling, the outer wall temperature of the micro-positive pressure sealed drying chamber 3 remains close to the ambient temperature of 20°C-25°C. Since the dew point inside the micro-positive pressure sealed drying chamber 3 is -85°C, which is much lower than the coldest point temperature inside the chamber -50°C, according to the cold surface sublimation conditions in heat and mass transfer, the gas inside the micro-positive pressure sealed drying chamber 3 no longer has the water vapor supersaturation required for sublimation before contacting the cold valve body, thus achieving a frost-free and ice-free insulating environment. The infrared pyroelectric probe of infrared temperature measuring probe 52 detected the surface temperature T of the local cold zone of the pressure regulating valve body 6; First, when the surface temperature of the pressure regulating valve body 6 drops to T≤-5℃, the vortex tube temperature rise compensation component is activated, and the hot air flow generated by the vortex tube 23 is guided to the local cold zone through the porous ceramic flow equalization cover, so that the valve body temperature rises back to above T1. When the air pump 21 is working, the gas dried by the drying cylinder 22 enters the vortex tube 23. The vortex tube 23 itself has no moving parts and no power input. It generates hot airflow only by redistributing the internal energy of compressed air. The hot airflow enters the hot air outlet pipe 24, and the cold air is discharged downward through the cold air outlet pipe 25. The hot air enters the two branch pipes 73 through the guide pipe 71, and then enters the two ceramic flow equalization hoods 74 through the two branch pipes 73. It is released through the flow equalization hole 741, dispersing the high-speed hot jet into countless low-velocity micro-airflows, which are released close to the pressure regulating valve body 6. Due to the diffusion effect of the ceramic flow equalization hood 74, the heating rate of the hot airflow on the pressure regulating valve body 6 is controlled at ΔT≤5℃ / cm. This slow heating process avoids micro-cracks or sealing surface deformation in the pressure regulating valve body 6 due to severe thermal shock. Monitored by the infrared temperature probe 52, and compared with the infrared temperature feedback value in real time by the controller, when the temperature of the pressure regulating valve body 6 is compensated by the hot airflow from the vortex tube 23 to >0℃, for example, rising back to +5℃, the controller immediately cuts off the compressed air supply, and the vortex tube 23 stops working; achieving energy-saving operation of "on-demand energy supply and dynamic-static combination"; Second, when the silane flow rate suddenly increases, causing the throttling effect to intensify, and the temperature of the pressure regulating valve body 6 drops sharply to T=-15℃ in a very short time (<2 seconds), it means that ice crystals may have formed due to non-uniform nucleation within the micron-level gap between the valve stem and the valve seat inside the pressure regulating valve body 6. At this time, the secondary linkage protection is triggered. Two piezoelectric micro-vibration controllers 53 control two piezoelectric ceramic stacked actuators 54. Driven by a sinusoidal voltage, the piezoelectric ceramic stacked actuators 54 generate forced vibrations at 80Hz and an amplitude of 50μm. This vibration is rigidly transmitted to the interface between the valve stem and the ice crystals through the pressure regulating valve body 6. Ice crystals are brittle solid materials. Under 80Hz high-frequency alternating shear stress, the adhesion strength between the ice crystals and the metal interface decreases sharply, interface fatigue cracks propagate, and the ice crystals instantly shatter into micron-sized powdery ice fragments. The principle of micro-displacement non-interference: The amplitude is only 50μm, far smaller than the fit clearance between the valve stem and the guide sleeve of the pressure regulating valve. Therefore, the vibration will not cause a hard collision between the valve core and the valve seat, ensuring the integrity and sealing of the precision mating surfaces of the pressure regulating valve; When the controller detects a temperature below -15°C, it sends a pulse signal of 0.5 to 1.0 seconds to trigger the piezoelectric vibrator.

[0040] Synchronous linkage: While the vibrator is working, the vortex tube 23 maintains full power operation to provide hot airflow. Vibration peels off ice crystals, and hot airflow sublimates ice chips, forming a dual-action obstacle clearing channel of "mechanical peeling and thermal sublimation"; Third, once T rises and stabilizes, the eddy current tube 23 and the piezoelectric ceramic stack actuator 54 are shut off, and the system returns to a dry and isolated state that maintains only a slight positive pressure.

[0041] Finally, it should be noted that the basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are suggested in this specification, and therefore remain within the spirit and scope of the exemplary embodiments of this specification. Furthermore, this specification uses specific terms to describe embodiments of this specification. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a feature, structure, or characteristic associated with at least one embodiment of this specification. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this specification can be appropriately combined. Moreover, unless expressly stated in the claims, the order of processing elements and sequences, the use of numbers and letters, or other names described in this specification are not intended to limit the order of the processes and methods of this specification.

[0042] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A micro-positive pressure heat insulation and antifreeze system for a pressure regulating valve of a silane gas holder, comprising a cabinet (1), wherein a control panel (14) is provided on the top side of the cabinet (1), and two cabinet doors (11) are rotatably installed on the front of the cabinet (1) via hinges, and further comprising: A micro-positive pressure sealed drying chamber (3) is set inside the cabinet (1). The micro-positive pressure sealed drying chamber (3) includes an outer metal shield shell and a heat insulation liner. The left and right sides of the micro-positive pressure sealed drying chamber (3) are respectively sealed with an outer sealing plate (31) and an inner sealing plate (32). The interior of the micro-positive pressure sealed drying chamber (3) is provided with a pressure regulating valve body (6). The pressure regulating valve body (6) is connected to an inlet pipe (61) and an outlet pipe (62). The inlet pipe (61) and the outlet pipe (62) extend to the outside of the cabinet (1). Regenerative drying adsorption units (8) are evenly arranged on the inner wall of the micro-positive pressure sealed drying chamber (3). The vortex tube temperature rise compensation module (2) is located below the micro-positive pressure sealed drying chamber (3). The vortex tube temperature rise compensation module (2) is connected to a heat equalization module (7). The heat equalization module (7) is located inside the micro-positive pressure sealed drying chamber (3) and is used to uniformly heat the pressure regulating valve body (6). The sensing micro-vibration module (5) is installed on the inner sealing plate (32) to monitor the temperature of the pressure regulating valve body (6) and to vibrate and break the ice of the pressure regulating valve body (6).

2. The micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 1, characterized in that, The top of the micro-positive pressure sealed drying chamber (3) is connected to a one-way exhaust pipe (4), and a one-way breathing valve (41) is provided on the one-way exhaust pipe (4). An extension pipe (42) is connected to the one-way breathing valve (41), and the extension pipe (42) extends to the outside of the cabinet (1) to control the air inside the micro-positive pressure sealed drying chamber (3) to be discharged to the outside.

3. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 2, characterized in that, A fixed mounting rod (321) is installed on the inner sealing plate (32). The inner sealing plate (32) and the micro-positive pressure sealed drying chamber (3) are installed on the inner wall of the cabinet (1) by the fixed mounting rod (321). An infrared transmission window (322) is provided on the inner sealing plate (32).

4. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 3, characterized in that, The sensing micro-vibration module (5) includes a mounting plate (51), which is fixedly installed on the outside of the inner sealing plate (32). An infrared temperature probe (52) is provided on the mounting plate (51), which is close to the infrared transmission window (322) and is used to observe the temperature of the pressure regulating valve body (6).

5. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 4, characterized in that, The mounting plate (51) is provided with two piezoelectric micro-vibration controllers (53), and the two piezoelectric micro-vibration controllers (53) are electrically connected to piezoelectric ceramic stacked actuators (54). The piezoelectric ceramic stacked actuators (54) are attached to the outside of the pressure regulating valve body (6). The piezoelectric ceramic stacked actuators (54) are equipped with support tubes (55), and the piezoelectric ceramic stacked actuators (54) are fixedly installed to the inner sealing plate (32) through the support tubes (55).

6. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 5, characterized in that, The vortex tube temperature rise compensation module (2) includes an air pump (21) and a vortex tube (23). The air pump (21) and the vortex tube (23) are both located on the top of the support plate (13). The inlet of the air pump (21) is connected to a drying cylinder (22). The inlet of the drying cylinder (22) is equipped with a filter screen (221). The vortex tube (23) is connected to a hot air outlet pipe (24) and a cold air outlet pipe (25). The hot air outlet pipe (24) is set upwards, and the cold air outlet pipe (25) is set downwards. Two fixing buckles (231) are installed on the top of the support plate (13). The vortex tube (23) is fixed to the support plate (13) by the two fixing buckles (231).

7. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 6, characterized in that, The heat equalization module (7) includes a flow guide pipe (71) and two ceramic flow equalization hoods (74). The flow guide pipe (71) is fixedly installed on the outer sealing plate (31). The flow guide pipe (71) is connected to the hot gas outlet pipe (24). The inner end of the flow guide pipe (71) is connected to two branch pipes (73). The two branch pipes (73) are connected to the two ceramic flow equalization hoods (74). The two ceramic flow equalization hoods (74) are symmetrically arranged and located on the upper and lower sides of the pressure regulating valve body (6). The inner side of the ceramic flow equalization hood (74) is provided with multiple flow equalization holes (741).

8. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 7, characterized in that, A fixing rod is installed on the ceramic flow equalization hood (74), the fixing rod is installed on the inner side of the outer sealing plate (31), and a solenoid valve (72) is provided on the flow guide pipe (71).

9. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 1, characterized in that, The regenerable drying adsorption unit (8) is a breathable grid assembly filled with molecular sieve particles, which covers the outside of the pressure regulating valve body (6) circumferentially.

10. A micro-positive pressure thermal insulation and antifreeze system for a pressure regulating valve in a silane gas holder according to claim 1, characterized in that, The cabinet (1) is fixedly installed with a support plate (13), the eddy tube temperature rise compensation module (2) is set on the top of the support plate (13), the cabinet (1) has multiple air holes (15) on the rear side, and the cabinet door (11) is provided with an observation window (12).

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