Sapphire crystal growth furnace and crystal growth method

By coordinating the trigger component with the seed crystal rod, the protective plate can be automatically sealed and opened, solving the problem of contaminants polluting the seed crystal during sapphire crystal growth and improving crystal growth quality and equipment stability.

CN122406362APending Publication Date: 2026-07-17NINGXIA XINJINGSHENG ELECTRONIC MATERIALS CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
NINGXIA XINJINGSHENG ELECTRONIC MATERIALS CO LTD
Filing Date
2026-06-16
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In existing sapphire crystal growth processes, contaminants during the boiling stage can easily contaminate the seed crystal, leading to increased crystal defects and lower yield and quality.

Method used

The system employs a triggering component and a seed crystal rod to support and trigger the crystal. Through the automatic sealing and opening of the protective plate, contaminants are prevented from contaminating the seed crystal, ensuring the cleanliness of the crystal growth environment.

Benefits of technology

It achieves automatic sealing during the boiling stage and precise opening during the crystal growth stage, improving the quality and yield of crystal growth, reducing the operating load and jamming risk of the equipment, and enhancing the reliability and stability of the equipment.

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Abstract

本申请涉及本申请涉及蓝宝石晶体生长技术领域,尤其是涉及一种蓝宝石晶体生长炉和晶体生长方法;蓝宝石晶体生长炉,包括:籽晶杆,籽晶杆用于携带籽晶引晶;炉体,炉体的内部具有炉室,炉体的顶部开设有允许籽晶杆通过的籽晶通道;保温结构,保温结构位于炉室内,保温结构呈桶状设置,保温结构包括保温侧壁和保温顶壁,保温侧壁和保温顶壁围合形成用于晶体生长保温的保温腔,保温顶壁上开设有贯穿于保温顶壁的通孔,通孔与籽晶通道位于同一竖直空间;以及防护机构,防护机构设置于保温结构和炉体之间,防护机构用于防止通孔上飘污染物污染籽晶;通过触发组件与籽晶杆的承托触发配合,达到了提高长晶品质的技术效果。
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