A method, apparatus and device for calibrating an electric microscope system
By using the automated control of the calibration plate and stage in the microscope system, the simultaneous calibration of magnification and distortion is achieved, which solves the problems of low efficiency and large error in the separation calibration in the prior art, and improves the accuracy and efficiency of calibration.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- MOTIC CHINA GROUP CO LTD
- Filing Date
- 2026-04-20
- Publication Date
- 2026-07-17
AI Technical Summary
In existing microscope systems, magnification calibration and distortion calibration are separated, requiring manual operation for each step. This is inefficient and susceptible to human error, leading to a decrease in calibration accuracy.
By using a calibration plate that is connected to the stage in communication with the control components of the microscope system, the stage is automatically driven to move to the combined calibration area, the offset coordinate information is identified, and magnification and distortion calibration are performed. Synchronous calibration is achieved by integrating the grid area.
It improves calibration efficiency, reduces human error, ensures the accuracy and consistency of calibration, and achieves automatic calibration of magnification and distortion simultaneously.
Smart Images
Figure CN122409142A_ABST