一种半导体清洗设备的调度方法及系统

By rationally scheduling the movement sequence of robotic arms in semiconductor cleaning equipment, the problem of interference between robotic arms was solved, enabling efficient production without hardware modification.

CN122421708APending Publication Date: 2026-07-17SHENZHEN EXX IND AUTOMATION CO LTD
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Patent Information

Application Number
CN202610884983.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-18
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In existing semiconductor cleaning equipment, interference can easily occur between robotic arms in the interference zone, and existing solutions require significant modifications to the hardware or increase costs.

Method used

By rationally scheduling and planning the action sequence of each task, it can determine whether the robotic arm will interfere during the handling process, calculate the earliest safe handling time, and generate an action sequence that will not interfere, thus avoiding hardware modifications.

Benefits of technology

Without changing the hardware, reduce the risk of interference between robotic arms, improve production efficiency, and optimize capacity.

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Abstract

本发明涉及半导体技术领域，具体公开了一种半导体清洗设备的调度方法及系统，其中该调度方法具体包括步骤：S10，获取当前规划任务的源位置及下一个目标工艺槽；S20，判断将当前规划任务从源位置搬运至下一个目标工艺槽过程中机械手是否会发生干涉；若是，根据发生干涉的其他机械手的最早可移动时间计算目标机械手的最早搬运安全时间；否则，根据其他机械手的动作结束时间计算目标机械手的最早搬运安全时间；S50，根据最早搬运安全时间计算目标机械手从将当前规划任务从Src源位置搬运到下一个目标工艺槽的最早传输时间；S60，遍历下一个待规划任务直至遍历完任务列表；S70，根据最早传输时间对所有任务进行排序，并生成动作序列。
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Citation Information

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