A device and method for calibrating the posture of an array temperature measurement blackbody radiation light source

Abstract

The application discloses a device and method for posture calibration of an array temperature measuring blackbody radiation light source, and belongs to the technical field of light calibration. The technical problem to be solved is to improve the accuracy, repeatability and precision of test results and reduce the interference of environmental factors on the test. The technical solution points are as follows: a device for posture calibration of an array temperature measuring blackbody radiation light source, comprising a frame module, a precise adjustment module, a pneumatic lifting module and a belt conveying module. The frame module is hollow to form a cavity. The pneumatic lifting module is installed outside the frame module. The belt conveying module and the precise adjustment module are installed in the cavity. The precise adjustment module is installed below the belt conveying module.

Description

Technical Field

[0001] This invention provides a device and method for attitude calibration based on an array-based temperature-sensing blackbody radiation source, belonging to the field of optical calibration technology. Background Technology

[0002] For understanding the technical content of this invention:

[0003] With the rapid development of electronic product technology and the increasing demands for manufacturing efficiency and yield, the electronics industry is not only improving manufacturing efficiency but also gradually strengthening the research and optimization of product functional testing equipment. Among these innovations, infrared thermal sensing technology for smartwatches is a significant advancement, providing users with convenient health data through non-contact temperature monitoring.

[0004] To ensure the accuracy and reliability of test results, testing the infrared thermal sensing technology of watches requires achieving a stable and consistent state across multiple aspects, including the environment, equipment, and test object. Through rigorous control of test conditions and professional testing procedures, the performance of the watch's infrared thermal sensing technology can be comprehensively evaluated, providing data support for optimization and improvement.

[0005] Relevant patent documents retrieved: This document, published in China (CN 109632104A) on April 16, 2019, discloses an infrared array radiation source calibration device and method. The device includes a light source system, a collimating optical system, a plane mirror, a precision turntable, a converging optical system, an infrared image acquisition system, a radiation detection system, a data acquisition system, and a computer and control system. The low-background source of this invention is used to eliminate background radiation, increase the detection capability of the radiation detection system, and improve the system's detection accuracy and stability. The low-background source is made into a hollow barrel-shaped structure with a completely welded and sealed internal structure, allowing for the injection of liquid nitrogen to provide a cold background for the detector, reducing environmental radiation and improving the signal-to-noise ratio. However, this method is relatively complex and inefficient.

[0006] Relevant non-patent literature retrieved: The journal *Infrared Technology*, with the article titled "Temperature Compensation and Calibration Method for Matrix Far-Infrared Temperature Sensors," Volume 46, Issue 9, published in September 2024, discloses a compensation and calibration method for far-infrared matrix temperature sensors that significantly improves temperature measurement accuracy. This method establishes an extremum compensation model based on matrix infrared array temperature detection and proposes a distance normalization calibration method. This temperature compensation and calibration method can compensate for and calibrate the measurement errors of matrix infrared temperature sensors at arbitrary angles and distances. However, this method does not address improving equipment adaptability and testing accuracy, or reducing the interference of environmental factors on the test.

[0007] The prior art represented by the aforementioned documents has at least the following unresolved technical problems or defects: 1. A single radiation source cannot be calibrated optically; it must be done in a darkroom environment.

[0008] 2. Conventional attitude calibration requires removing the object from the dark box, resulting in low calibration and testing efficiency when multiple attitude adjustments are needed.

[0009] 3. The repeatability of the motor encoder closed loop is insufficient to meet the testing requirements of infrared high-precision temperature measurement Sonor (large assembly error).

[0010] 4. Additional calibration references (with light source or physical measurement) are required. 5. Disrupt the vacuum thermal insulation environment or disrupt the single thermal radiation environment. Summary of the Invention

[0011] The purpose of this invention is to provide: A device and method for attitude calibration based on an array-based temperature-sensing blackbody radiation source, and related technologies, are provided to address technical issues such as improving the accuracy, repeatability, and precision of test results and reducing the interference of environmental factors on the test, or combinations thereof.

[0012] Terminology Explanation: Unless otherwise defined, all technical terms in this document have the same meanings as commonly understood by one of ordinary skill in the art to which the subject matter of the claims pertains. Unless otherwise stated, all patents, patent inventions, and publications cited in this document are incorporated herein by reference in their entirety. If multiple definitions exist for terms in this document, the definitions in this chapter shall prevail.

[0013] It should be understood that the above brief description and the following detailed description are exemplary and for illustrative purposes only, and do not limit the subject matter of the invention in any way. In this invention, the singular is used in conjunction with the plural unless otherwise specifically stated. It should also be noted that, unless otherwise stated, the use of “or” or “or” means “and / or”. Furthermore, the use of the term “comprising” and other forms such as “including,” “containing,” and “contains” are not limiting.

[0014] The definition of standard terminology can be found in the reference "Mechanical Design Handbook (Sixth Edition)", edited by Cheng Daxian.

[0015] Unless specifically defined herein, the use of various commercially available products herein employs standard techniques. For example, they may be implemented in a manner known in the art or as described in this invention. The techniques and methods described herein are generally implemented according to conventional methods well known in the art, based on the descriptions in the various summary and more specific documents cited and discussed in this specification.

[0016] The terms “optional / arbitrary” or “optionally / arbitrarily” mean that the event or situation described below may or may not occur, including both the occurrence and non-occurrence of the event or situation.

[0017] In this invention, the DUT is: the device under test.

[0018] In a first aspect, the present invention provides: a device for attitude calibration based on an array-based temperature-sensing blackbody radiation source, comprising: a frame module, a precision adjustment module, a pneumatic lifting module, and a belt conveyor module; The frame module is hollow, forming a cavity. The pneumatic lifting module is installed on the outside of the frame module. The belt conveyor module and the precision adjustment module are installed inside the cavity. The precision adjustment module is installed below the belt conveyor module.

[0019] The frame module includes a base plate, a sealed outer frame, and a BB module.

[0020] The base plate is connected to the sealing frame, and the BB module is installed at the top inside the sealing frame.

[0021] The BB module is a blackbody that emits infrared thermal radiation to form an aperture (radiation spot), which is the source of infrared thermal radiation in DUT detection.

[0022] The wavelength range of the infrared thermal radiation is 2-20μm, the operating temperature is 5-55℃, and the effective diameter of the aperture is such that it can cover up to four infrared sensors.

[0023] The precision adjustment module includes a lifting module, a carrier plate module, a six-axis platform module, and an infrared sensor module. The lifting module is equipped with a six-axis platform module, and the six-axis platform module is equipped with a carrier plate module. The infrared sensor module has multiple infrared sensors mounted in a ring around the center of the carrier plate module.

[0024] The lifting module is used to adjust the vertical position of the precision adjustment module.

[0025] The carrier module includes a DUT pressing block, a carrier board, a DUT placement copper block, and a substrate.

[0026] The carrier plate has N+1 rings of infrared sensor mounting holes, the DUT placement copper block has N rings of infrared sensor mounting holes, and the DUT pressure block has N rings of infrared sensor clearance holes. The carrier plate is mounted on the substrate, the DUT placement copper block is located on the carrier plate, and the DUT pressure block is located on the DUT placement copper block. N is an integer greater than or equal to 1.

[0027] The infrared sensor module is a multi-ring evenly distributed sensor, specifically including N rings of infrared sensors in the inner ring and N+1 rings of infrared sensors in the outer ring, for a total of N+1 rings of infrared sensors, where N≥1; The infrared sensor module is centered on the DUT pressure block of the carrier board module, with multiple rings of infrared sensors mounted on the carrier board module. Specifically, the inner N rings of infrared sensors are mounted on the copper block where the DUT is placed, and the outer (N+1)th ring of infrared sensors is mounted on the carrier board.

[0028] The six-axis platform module is a six-axis displacement stage.

[0029] The pneumatic lifting module includes a cylinder mounting bracket, a cylinder mounting base plate, a sealing plate, and a module support.

[0030] The module support column is vertically connected to the base plate; the cylinder mounting base plate is installed on the top of the module support column; the sealing plate is installed on the cylinder mounting bracket; the cylinder mounting bracket is installed on the cylinder mounting base plate and can move up and down.

[0031] The sealing outer frame has an opening, and the sealing plate is located directly above the opening. The sealing plate can be moved up and down by a cylinder mounting bracket. When the sealing plate is tightly fitted with the opening of the sealing outer frame, the sealing plate and the frame module form a sealed cavity.

[0032] Based on further solutions to the technical problems of the present invention, or simultaneous solutions to multiple technical problems, the preferred solution in the technical solution provided in the first aspect of the present invention includes: The first preferred solution: The precision adjustment module includes a lifting module, a carrier plate module, a six-axis platform module, and an infrared sensor module. This technical solution, while addressing the technical problem of "reducing the interference of environmental factors on testing," further addresses the technical problem of "improving the accuracy and precision of test results."

[0033] Secondly, a method for attitude calibration using the above-mentioned device includes the following steps: (1) Place the DUT in the precision adjustment module, set the equilibrium temperature of the infrared sensor module to 0℃, lower the pneumatic lifting module to form a cavity with the sealing frame, the cavity is sealed, and connect the device to an external vacuum pump to evacuate the cavity. (2) Turn on the BB module to emit infrared thermal radiation to form an aperture, which acts on the DUT. The infrared sensor module detects whether the aperture only covers N infrared sensors by temperature change. If not, the six-axis platform module rotates towards the N-ring infrared sensors covered by the aperture and detects the aperture again; otherwise, the six-axis platform module continues to rotate until the aperture covers only the N-ring infrared sensors. (3) The aperture only covers N rings of infrared sensors. The infrared sensor module detects whether the aperture covers four of the N rings of infrared sensors by temperature change. If not, the six-axis platform module rotates toward the N rings of infrared sensors covered by the aperture until the aperture covers four of the N rings of infrared sensors. (4) After the aperture covers four of the N infrared sensors, the six-axis platform module translates towards the four covered infrared sensors until the equilibrium temperature of the N infrared sensors is 0℃, and outputs the position parameters of the six-axis platform module.

[0034] The vacuum pressure in step (1) is -0.09 MPa.

[0035] The rotation angle described in steps (2) and (3) is 0.01-0.05°.

[0036] Thirdly, the application of the aforementioned device in attitude calibration.

[0037] The beneficial effects of this invention are as follows: Compared with existing technologies, the present invention has better technical effects in improving the accuracy, repeatability, and precision of test results and reducing the interference of environmental factors on the test.

[0038] 1. This invention provides a highly consistent thermal radiation environment through the cavity formed by the frame module and the pneumatic lifting module, avoiding interference from multiple heat sources, thereby improving the accuracy and repeatability of test results. It also ensures the purity of test conditions and enhances test precision.

[0039] 2. This invention optimizes the testing process by introducing six-axis automated calibration technology (six-axis platform module) to ensure the performance of the infrared sensor under different wearing postures, thereby improving the adaptability of the equipment and the accuracy of the test.

[0040] 3. The device of the present invention, through the combination of frame module and pneumatic lifting module, avoids external heat radiation interference, which can ensure more accurate test results and reduce the interference of environmental factors on the test. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of the frame module, where A is the fully assembled diagram and B is the disassembled diagram.

[0042] Figure 2 The diagram shows the precise adjustment of the module, where A is the fully assembled diagram and B is the disassembled diagram.

[0043] Figure 3 The diagram shows the carrier board module and the infrared sensor module, where A is the fully assembled diagram and B is the disassembled diagram.

[0044] Figure 4 This is a schematic diagram of a pneumatic lifting module.

[0045] Figure 5 This is a schematic diagram of the device of the present invention.

[0046] Figure 6 This is a schematic diagram of the device of the present invention for the frame module.

[0047] Figure 7 This is a schematic diagram of step (2) of Example 2.

[0048] Figure 8 This is a schematic diagram of step (3) of Example 2.

[0049] Figure 9 This is a schematic diagram of the translation in step (4) of Example 2.

[0050] Figure 10 This is a schematic diagram of step (4) of Example 2, where the sensor temperature is 0°C.

[0051] Among them, 1 is the sealed outer frame, 2 is the base plate, 3 is the BB module, 4 is the infrared sensor module, 5 is the carrier plate module, 6 is the six-axis platform module, 7 is the lifting module, 8 is the DUT pressure block, 9 is the N-ring infrared sensor, 10 is the DUT placement copper block, 11 is the N+1-ring infrared sensor, 12 is the carrier plate, 13 is the base plate, 14 is the cylinder mounting bracket, 15 is the cylinder mounting base plate, 16 is the sealing plate, 17 is the module support, 18 is the belt conveyor module, 19 is the precision adjustment module, and 20 is the pneumatic lifting module.

[0052] in, Figures 7-10 In the middle, the blue ①- Representing the ①- One N-ring infrared sensor; black ①- Representing the ①- N+1 rings of infrared sensors. Detailed Implementation

[0053] The following non-limiting embodiments are intended to enable those skilled in the art to gain a more comprehensive understanding of the present invention, but do not limit the invention in any way. The following content is merely an exemplary description of the scope of protection claimed by the present invention, and those skilled in the art can make various changes and modifications to the present invention based on the disclosed content, and such changes should also fall within the scope of protection claimed by the present invention.

[0054] Example 1: A device for attitude calibration based on an array-based temperature-sensing blackbody radiation source. This embodiment provides a device for attitude calibration based on an array-based temperature-sensing blackbody radiation source, including: a frame module, a precision adjustment module 19, a pneumatic lifting module 20, and a belt conveyor module 18.

[0055] The frame module is hollow, forming a cavity. The pneumatic lifting module 20 is installed on the outside of the frame module. The belt conveyor module 18 and the precision adjustment module 19 are installed inside the cavity. The precision adjustment module 19 is installed below the belt conveyor module 18.

[0056] (1) Frame module The frame module includes a base plate 2, a sealed outer frame 1, and a BB module 3. The frame module is used to support the entire test module and provide a seal, serving as the load-bearing substrate for the entire module and isolating it from external interference.

[0057] The base plate 2 is connected to the sealing frame 1, and the interior is hollow to form a cavity. The sealing frame 1 has an opening for placing and removing the DUT.

[0058] The BB module 3 is located above the precision adjustment module 19 and is installed at the top inside the sealed outer frame 1.

[0059] The base plate 2 serves as the fundamental load-bearing component of the entire device, and is placed horizontally to provide an installation reference and support for all other components. The sealing frame 1, the belt conveyor module 18, and the pneumatic lifting module 20 are all directly or indirectly mounted and fixed on the base plate 2.

[0060] Among them, the BB module 3 is an existing blackbody module, which belongs to the reference radiation device in the field of infrared radiation calibration. It is used to emit uniform infrared thermal radiation and form a reference aperture for detection, serving as the infrared thermal radiation signal source of the DUT.

[0061] (2) Precision adjustment module The precision adjustment module 19 includes a lifting module 7, a carrier plate module 5, a six-axis platform module 6, and an infrared sensor module 4. The lifting module 7 is equipped with the six-axis platform module 6, and the six-axis platform module 6 is equipped with the carrier plate module 5. The infrared sensor module 4 has multiple infrared sensors mounted in a ring around the center of the carrier plate module 5.

[0062] The precision adjustment module 19, through the high-precision positioning and attitude adjustment of the six-axis platform module 6, combined with the dynamic thermal signal capture advantage of the infrared sensor module 4, can achieve precise monitoring of the spatial attitude, position and thermal parameters of the target object (DUT).

[0063] The lifting module 7 is used to adjust the vertical position of the precision adjustment module 19.

[0064] The carrier module 5 includes a DUT pressing block 8, a carrier plate 12, a copper block 10 placed in the DUT, and a substrate 13.

[0065] The carrier plate 12 has N+1 rings of infrared sensor mounting holes, the DUT placement copper block 10 has N rings of infrared sensor mounting holes, and the DUT pressure block 8 has N rings of infrared sensor clearance holes. The carrier plate 12 is mounted on the substrate 13, the DUT placement copper block 10 is located on the carrier plate 12, and the DUT pressure block 8 is located on the DUT placement copper block 10. N is an integer greater than or equal to 1. For example, N rings can be understood as the first ring, and N+1 rings can be understood as the second ring.

[0066] The infrared sensor module 4 is a multi-ringed evenly distributed sensor, specifically including an inner ring of N infrared sensors 9 and an outer ring of N+1 infrared sensors 11, for a total of N+1 rings of infrared sensors, where N≥1.

[0067] The infrared sensor module 4 is mounted in a ring around the DUT pressure block 8 of the carrier module 5, with multiple infrared sensors in a ring. The inner N-ring infrared sensors 9 are mounted on the DUT placement copper block 10, and the outer (N+1)th ring infrared sensors 11 are mounted on the carrier 12.

[0068] The six-axis platform module 6 is a six-axis displacement stage (commercially available for purchase), which can translate, pitch, yaw, and roll in three dimensions to achieve high-precision positioning and attitude adjustment, while also realizing movement in three-dimensional position and three-dimensional angle.

[0069] The infrared sensor module 4 consists of multiple rings of infrared sensors, with 12-16 sensors per ring. It is divided into N-ring infrared sensors 9 and N+1-ring infrared sensors 11, where N rings are the inner rings and N+1 rings are the outer rings, used for dynamic thermal signal capture and precise positioning sensing.

[0070] The lifting module 7 is equipped with a six-axis platform module 6, and the six-axis platform module 6 is equipped with a carrier plate module 5. The infrared sensor module 4 consists of multiple sets of ring sensors, with the center of the DUT pressure block 8 of the carrier plate module 5 as the center, and multiple sets of ring sensors are distributed on the carrier plate module 5.

[0071] The multiple ring-shaped distributions are as follows: the DUT is placed on the copper block 10, and N rings of infrared sensors 9 are installed thereon; N+1 rings of infrared sensors 11 are installed on the carrier board 12, as shown below. Figure 3 .

[0072] (3) Pneumatic lifting module The pneumatic lifting module includes a cylinder mounting bracket 14, a cylinder mounting base plate 15, a sealing plate 16, and a module support column 17.

[0073] The module support column 17 is vertically connected to the base plate 2; the cylinder mounting base plate 15 is mounted on the top of the module support column 17; the sealing plate 16 is mounted on the cylinder mounting bracket 14; and the cylinder mounting bracket 14 is mounted on the cylinder mounting base plate 15 and can move up and down.

[0074] In some embodiments, the cylinder is mounted on the cylinder mounting bracket 14 to drive the sealing plate 16 to move up and down.

[0075] The pneumatic lifting module is installed such that the sealing plate 16 is directly above the opening of the sealing outer frame 1. The sealing plate 16 can be moved up and down by the cylinder mounting bracket 14. When the sealing plate 16 is tightly fitted with the opening of the sealing outer frame 1, the sealing plate 16 and the frame module form a sealed cavity.

[0076] (4) Belt conveyor module The belt conveyor module 18 is a horizontal conveying structure, and the precision adjustment module 19 is located below the belt conveyor module and its position is fixed and does not move with the belt conveyor module. During the calibration process, the belt conveyor module remains locked and is only unlocked to transport the DUT after the test is completed.

[0077] The opening of the sealing frame 1 is connected to one end of the belt conveyor module 18. After the test, the sealing plate 16 rises, the opening opens, and the belt conveyor module 18 transports the DUT out of the cavity.

[0078] (5) Operating process of the device: Place the DUT on the DUT placement copper block 10, and place the DUT pressure block 8 on top of the DUT. Start the test. After the test starts, the sealing plate 16 of the pneumatic lifting module 20 descends, forming a sealed space together with the frame module; the external vacuum pump starts, and the cavity is evacuated.

[0079] BB module 3 (fixed position) forms an aperture by emitting infrared thermal radiation. The N-ring infrared sensors 9 and N+1-ring infrared sensors 11, covered by the aperture, heat up. Through temperature sensing, the aperture aims to cover only four of the N-ring infrared sensors 9, controlling the rotation of the six-axis platform module 6 of the precision adjustment module 19. The carrier module 5 is located on the six-axis platform module 6, so the six-axis platform module 6 rotates and adjusts along with the carrier module 5. The N-ring infrared sensors 9 and N+1-ring infrared sensors 11, mounted on the carrier module 5, rotate accordingly. Rotation stops when the aperture of BB module 3 covers only four of the N-ring infrared sensors 9. The six-axis platform module 6 of the precision adjustment module 19 then translates in the coverage direction, moving the N-ring infrared sensors 9 and N+1-ring infrared sensors 11 until the aperture no longer covers any infrared sensors (infrared sensor temperature is 0℃), at which point the position parameters of the six-axis platform module 6 are output.

[0080] After the test, the sealing plate 16 rises and the DUT is conveyed out of the equipment via the belt conveyor module 18.

[0081] Example 2: A method for attitude calibration based on an array-based blackbody radiation source. (1) Place the DUT on the DUT placement copper block 10, place the DUT pressure block 8 on top of the DUT, set the equilibrium temperature of the infrared sensor module 4 to 0 ℃ (the infrared sensor module has its own temperature control module), the sealing plate 16 of the pneumatic lifting module 20 descends, and together with the frame module, they form a sealed space. Vacuum is drawn, and a vacuum environment (-0.09MPa) is formed inside the cavity.

[0082] (2) Turn on BB module 3. BB module 3 emits infrared thermal radiation, forming an aperture that acts on the DUT. Infrared sensor module 4 starts to detect whether the aperture only covers the N-ring infrared sensor 9. Figure 7 ; If not, the six-axis platform module 6 rotates 0.01° toward the sensor covered by the aperture and checks again whether the aperture covers only the N-ring infrared sensor 9. Otherwise, the six-axis platform continues to rotate until the aperture covers only the N-ring sensor 9.

[0083] (3) After the aperture covers only N rings of infrared sensors 9, check whether the aperture covers four of the N rings of infrared sensors 9 (the BB module can cover a maximum of four connected infrared sensors in the vertical state). If not (e.g. Figure 8 Then the six-axis platform module 6 continues to rotate towards the sensor covered by the aperture until it covers four of the N-ring infrared sensors 9.

[0084] (4) After the aperture covers four of the N-ring infrared sensors 9, the six-axis platform module 6 translates in the direction of the four covered sensors (e.g., Figure 9 ), until the equilibrium temperature of the N-ring infrared sensor 9 reaches 0℃ (the aperture does not cover any infrared sensor BB module; the infrared thermal radiation emitted by the aperture exactly covers the detection area of ​​the DUT, and the center of the aperture coincides with the geometric center of the DUT, completing the DUT attitude calibration), as Figure 10 Output the position parameters of the six-axis platform module 6.

[0085] The vacuuming is achieved by using an external vacuum pump.

[0086] The position parameters are three-dimensional translation coordinates (X / Y / Z) and rotational coordinates φx, φy, and φz.

[0087] Finally, it should be noted that the above content is only used to illustrate the technical solution of the present invention, and is not intended to limit the scope of protection of the present invention. Simple modifications or equivalent substitutions made by those skilled in the art to the technical solution of the present invention do not depart from the essence and scope of the technical solution of the present invention.

Claims

1. A device for attitude calibration based on an array-based temperature-sensing blackbody radiation source, characterized in that, include: Frame module, precision adjustment module, pneumatic lifting module and belt conveyor module; The frame module is hollow, forming a cavity. The pneumatic lifting module is installed on the outside of the frame module. The belt conveyor module and the precision adjustment module are installed inside the cavity. The precision adjustment module is installed below the belt conveyor module.

2. The apparatus according to claim 1, characterized in that, The frame module includes a base plate, a sealed outer frame, and a BB module.

3. The apparatus according to claim 2, characterized in that, The base plate is connected to the sealing outer frame, and the BB module is installed inside the top position of the sealing outer frame.

4. The apparatus according to claim 1, characterized in that, The precision adjustment module includes a lifting module, a carrier plate module, a six-axis platform module, and an infrared sensor module; the lifting module is equipped with a six-axis platform module, and the six-axis platform module is equipped with a carrier plate module.

5. The apparatus according to claim 4, characterized in that, The carrier module includes a DUT pressing block, a carrier board, a copper block for placing the DUT, and a substrate. The carrier plate has N+1 rings of infrared sensor mounting holes, the DUT placement copper block has N rings of infrared sensor mounting holes, and the DUT pressure block has N rings of infrared sensor clearance holes. The carrier plate is mounted on the substrate, the DUT placement copper block is located on the carrier plate, and the DUT pressure block is located on the DUT placement copper block. N is an integer greater than or equal to 1.

6. The apparatus according to claim 5, characterized in that, The infrared sensor module is a multi-ring evenly distributed sensor, specifically including N rings of infrared sensors in the inner ring and N+1 rings of infrared sensors in the outer ring, for a total of N+1 rings of infrared sensors, where N≥1; The infrared sensor module is centered on the DUT pressure block of the carrier board module, with multiple rings of infrared sensors mounted on the carrier board module; wherein, the inner N rings of infrared sensors are mounted on the copper block where the DUT is placed, and the outer (N+1)th ring of infrared sensors is mounted on the carrier board.

7. The apparatus according to claim 2, characterized in that, The pneumatic lifting module includes a cylinder mounting bracket, a cylinder mounting base plate, a sealing plate, and a module support column; the module support column is vertically connected to the base plate; the cylinder mounting base plate is mounted on the top of the module support column; the sealing plate is mounted on the cylinder mounting bracket; the cylinder mounting bracket is mounted on the cylinder mounting base plate and can move up and down.

8. The apparatus according to claim 7, characterized in that, The sealing outer frame has an opening, and the sealing plate is located directly above the opening. The sealing plate can be moved up and down by the cylinder mounting bracket. When the sealing plate is tightly fitted with the opening of the sealing outer frame, the sealing plate and the frame module form a sealed cavity.

9. A method for attitude calibration using the apparatus according to any one of claims 1-8, characterized in that, Includes the following steps: (1) Place the DUT in the precision adjustment module, set the equilibrium temperature of the infrared sensor module to 0℃, lower the pneumatic lifting module to form a cavity with the sealing frame, the cavity is sealed, and connect the device to an external vacuum pump to evacuate the cavity. (2) Turn on the BB module to emit infrared thermal radiation to form an aperture, which acts on the DUT. The infrared sensor module detects whether the aperture only covers N infrared sensors by temperature change. If not, the six-axis platform module rotates towards the N-ring infrared sensors covered by the aperture and detects the aperture again; otherwise, the six-axis platform module continues to rotate until the aperture covers only the N-ring infrared sensors. (3) The aperture only covers N rings of infrared sensors. The infrared sensor module detects whether the aperture covers four of the N rings of infrared sensors by temperature change. If not, the six-axis platform module rotates toward the N rings of infrared sensors covered by the aperture until the aperture covers four of the N rings of infrared sensors. (4) After the aperture covers four of the N infrared sensors, the six-axis platform module translates towards the four covered infrared sensors until the equilibrium temperature of the N infrared sensors is 0℃, and outputs the position parameters of the six-axis platform module.

10. The use of the apparatus according to any one of claims 1-8 in attitude calibration.

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