Gas treatment device

Abstract

The application provides a gas treatment device, and relates to the technical field of gas treatment, to solve the problem that the combustion ratio of hydrogen and oxygen is difficult to guarantee due to the early contact of hydrogen and oxygen in the hydrogen treatment device provided by the related art, and further cause the problems of insufficient combustion and explosion. The gas treatment device has a first end close to a process cavity and a second end away from the process cavity; the gas treatment device comprises a first cavity and a second cavity surrounding the first cavity, and a heating assembly is arranged in the first cavity; a wall surface close to the first end of the second cavity is provided with a plurality of gas inlets, the plurality of gas inlets are arranged at intervals in the circumferential direction of the first cavity, and the flow area of each gas inlet is adjustable; the second cavity and the first cavity are communicated at the second end to form a combustion chamber, and the second cavity is communicated with a gas suction port at the second end. It can prevent the problems of insufficient combustion and explosion caused by the early contact of hydrogen and oxygen.

Description

Technical Field

[0001] This application relates to the field of gas processing technology, and more specifically, to a gas processing apparatus. Background Technology

[0002] Vertical furnaces are core equipment in semiconductor manufacturing, widely used in processes such as oxidation, diffusion, chemical vapor deposition, and annealing. In the alloy annealing process using vertical furnaces, hydrogen annealing is frequently employed to repair defects in the crystal and passivate surface states, thereby improving carrier lifetime and mobility, and ultimately enhancing the electrical characteristics of semiconductor devices. However, after the hydrogen annealing process, the disposal of residual hydrogen gas remains a critical safety concern due to its explosive potential.

[0003] Currently, residual hydrogen in the process chamber is typically treated using a gas treatment device. Specifically, hydrogen in the process chamber is introduced into the gas treatment device, while outside air is also introduced. The oxygen in the air reacts with the hydrogen to achieve the purpose of hydrogen treatment. However, the hydrogen treatment devices provided by related technologies have problems such as incomplete combustion and detonation due to premature contact between hydrogen and oxygen, which makes it difficult to guarantee the combustion ratio. Summary of the Invention

[0004] The purpose of this application is to provide a gas processing device to solve the technical problem in the hydrogen processing devices provided by the related technology that the combustion ratio of hydrogen and oxygen is difficult to guarantee due to premature contact between the two, which leads to incomplete combustion and detonation.

[0005] The gas processing device provided in this application has a first end near the process chamber and a second end away from the process chamber; the gas processing device includes a first chamber and a second chamber surrounding the first chamber, the first chamber is used to receive the gas to be burned in the process chamber, and a heating component is disposed inside the first chamber; the second chamber has a plurality of air inlets on its wall near the first end, the plurality of air inlets are arranged circumferentially at intervals in the first chamber, and the flow area at each air inlet is adjustable, the air inlets are configured to introduce combustion-supporting gas; the second chamber and the first chamber are connected at the second end to form a combustion chamber, and the second chamber is connected at the second end to an exhaust port.

[0006] Furthermore, the gas processing device includes a cylindrical inner cylinder and a conical outer cylinder. The inner cavity of the cylindrical inner cylinder is used to form the first cavity. The conical outer cylinder includes a conical wall and a bottom wall. From the first end to the second end, the inner diameter of the conical wall gradually decreases. The bottom wall is connected to one end of the conical wall near the process cavity. The bottom wall has a central hole. The cylindrical inner cylinder is inserted into and fixed in the central hole. The second cavity is formed between the conical wall and the cylindrical inner cylinder.

[0007] Furthermore, the gas processing device also includes an ignition shroud, which includes a partition portion that covers one end of the cylindrical inner cylinder facing the combustion chamber. The partition portion separates the first cavity from the combustion chamber and is provided with a plurality of microporous flow guiding areas.

[0008] Furthermore, the plurality of microporous flow guiding regions include a central microporous region and a plurality of edge microporous regions. The central microporous region is disposed at the center of the partition portion, and the plurality of edge microporous regions are arranged at intervals along the circumference of the central microporous region.

[0009] Furthermore, both the central microporous region and the edge microporous region include multiple rings of micropores arranged radially.

[0010] Furthermore, the ignition cover also includes a sleeve portion, which is fitted onto the cylindrical inner cylinder.

[0011] Furthermore, the conical outer cylinder also includes a combustion cylinder wall, which is located at the end of the conical cylinder wall facing the second end, and the inner cavity of the combustion cylinder wall forms the combustion chamber; in the axial cross-section of the combustion cylinder wall, the combustion cylinder wall is hyperboloidally concave.

[0012] Furthermore, the conical outer cylinder also includes an exhaust cylinder wall, which is located at the end of the combustion cylinder wall facing the second end. The exhaust cylinder wall is a hollow cylinder, and the end of the exhaust cylinder wall facing the second end forms the exhaust port.

[0013] Furthermore, the gas processing device also includes several air inlet pipes, which are respectively inserted and fixed to several air inlets in a corresponding manner. Each air inlet pipe is provided with an opening adjustment valve, which is located outside the second cavity. One end of each air inlet pipe extending into the second cavity is bent away from the first cavity to form a bent section.

[0014] Furthermore, the heating assembly includes a heating rod and a heating wire wound around the heating rod, the heating rod extending axially along the cylindrical inner cylinder, and the heating rod being fixed relative to the cylindrical inner cylinder.

[0015] The beneficial effects of the gas processing device in this application are: Taking hydrogen as the combustible gas and oxygen as the combustion-supporting gas in the process chamber as an example, this gas treatment device has one end closer to the process chamber (the first end) and the other end further away (the second end). A negative pressure system is connected to the exhaust port formed at the second end of the second chamber. Under this negative pressure, the first and second chambers are connected at the second end to form a combustion chamber. This combustion chamber connects the first and second chambers to the exhaust port, creating a negative pressure from the first end to the second end in both chambers. This allows hydrogen from the process chamber to flow into the first chamber and oxygen entering through the inlet to flow into the second chamber, both of which then flow into the combustion chamber. The heating element in the first chamber heats the hydrogen to a higher temperature, allowing it to burn with oxygen in the combustion chamber, thus achieving the purpose of hydrogen treatment.

[0016] This gas handling device, through the aforementioned configuration, ensures that the chamber for transporting hydrogen and the chamber for transporting oxygen are independent of each other. This prevents hydrogen and oxygen from prematurely contacting each other before flowing into the combustion chamber, effectively isolating them and preventing problems such as incomplete combustion and detonation caused by premature contact. By setting the opening degree of several air inlets in the second chamber to be adjustable, the flow rate of oxygen entering the second chamber can be controlled, thereby adjusting the oxygen-to-hydrogen ratio to further ensure complete combustion of oxygen and hydrogen.

[0017] Furthermore, by arranging several air inlets at intervals along the circumference of the first cavity, these inlets surround the first cavity, creating an annular air intake when oxygen is introduced into the second cavity. This allows the oxygen, upon reaching the combustion chamber, to flow in an annular pattern around the hydrogen, enabling combustion from all directions. This arrangement effectively increases the mixing efficiency of hydrogen and oxygen, thereby improving combustion efficiency. Moreover, because this air intake method accelerates the mixing rate of oxygen and hydrogen, it may be possible to achieve hydrogen-oxygen combustion without requiring the heating element to heat the hydrogen to a higher temperature, thus helping to reduce the flame combustion temperature. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments or background art of this application, the drawings used in the description of the embodiments or background art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1This is a schematic diagram showing the connection between the gas processing device and the process chamber provided in an embodiment of this application; Figure 2 This is a schematic diagram of the gas processing device provided in the embodiments of this application; Figure 3 An axial sectional view of the gas processing apparatus provided in the embodiments of this application in its operating state; Figure 4 This is a schematic diagram of the structure of the ignition shroud of the gas processing device provided in the embodiments of this application; Figure 5 This is a top view of the ignition cover of the gas processing device provided in an embodiment of this application.

[0020] Explanation of reference numerals in the attached figures: 010 - First end; 020 - Second end; 030 - Process cavity; 040 - Connecting pipe; 101 - First cavity; 201 - Second cavity; 100 - Cylindrical inner cylinder; 200 - Conical outer cylinder; 300 - Heating component; 400 - Air inlet pipe; 500 - Opening adjustment valve; 600 - Ignition cover; 210 - Conical cylinder wall; 220 - Bottom wall; 221 - Air inlet; 222 - Center hole; 230 - Combustion cylinder wall; 231 - Combustion chamber; 240 - Extractor cylinder wall; 241 - Extractor port; 310 - Heating rod; 320 - Heating wire; 410-bending section; 610 - Partition section; 620 - Microporous flow guiding area; 621 - Central microporous area; 622 - Edge microporous area; 630 - Sleeve section. Detailed Implementation

[0021] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0022] Figure 1 This is a schematic diagram showing the connection between the gas processing device and the process chamber 030 provided in this embodiment; Figure 2 This is a schematic diagram of the gas processing device provided in this embodiment. Figure 1 and Figure 2 As shown, this embodiment provides a gas processing device having a first end 010 near the process chamber 030 and a second end 020 away from the process chamber 030.

[0023] Figure 3 This is an axial sectional view of the gas processing apparatus provided in this embodiment under operating conditions. Figure 3As shown, the gas processing device includes a first cavity 101 and a second cavity 201 surrounding the first cavity 101. Specifically, the first cavity 101 is used to receive the gas to be burned from the process cavity 030, and a heating component 300 is provided inside the first cavity 101. The second cavity 201 has a plurality of air inlets 221 on its wall near the first end 010. The plurality of air inlets 221 are arranged circumferentially at intervals in the first cavity 101, and the flow area at each air inlet 221 is adjustable. The air inlets 221 are configured to introduce combustion-supporting gas. The second cavity 201 and the first cavity 101 are connected at the second end 020 to form a combustion chamber 231, and the second cavity 201 is connected at the second end 020 to an exhaust port 241.

[0024] Taking hydrogen as the combustible gas and oxygen as the combustion-supporting gas in process chamber 030 as an example, the gas processing device is used such that the end closest to process chamber 030 is the first end 010, and the end furthest from process chamber 030 is the second end 020. A negative pressure system is connected to the extraction port 241 formed at the second end 020 of the second chamber 201. Under the influence of this negative pressure, the first chamber 101 and the second chamber 201 connect at the second end 020 to form a combustion chamber 231. That is, the first chamber 101 and the second chamber 201 are connected to the extraction port 241 through the combustion chamber 231. This generates negative pressure from the first end 010 to the second end 020 in both chambers 101 and 201, allowing hydrogen from process chamber 030 to flow to the first chamber 101 and oxygen entering through inlet 221 to flow to the second chamber 201, and both to further flow into the combustion chamber 231. The heating component 300 in the first cavity 101 heats the hydrogen gas, giving it a higher temperature so that it can burn with oxygen after entering the combustion chamber 231, thus achieving the purpose of treating the hydrogen gas.

[0025] The gas handling device, through the aforementioned configuration, ensures that the chamber for transporting hydrogen and the chamber for transporting oxygen are independent of each other. This prevents hydrogen and oxygen from prematurely contacting each other before flowing into the combustion chamber 231, effectively isolating them and preventing problems such as incomplete combustion and detonation caused by premature contact. By making the openings of the several air inlets 221 in the second chamber 201 adjustable, the flow rate of oxygen entering the second chamber 201 can be controlled, thereby adjusting the oxygen-to-hydrogen ratio and further ensuring complete combustion of oxygen and hydrogen.

[0026] Furthermore, by arranging several air inlets 221 at intervals along the circumference of the first cavity 101, the air inlets 221 surround the first cavity 101. This creates an annular air intake when oxygen is introduced into the second cavity 201 through each air inlet 221. Consequently, when this oxygen flows into the combustion chamber 231, it can surround the hydrogen in an annular shape, allowing the hydrogen to come into contact with oxygen from all directions for combustion. This arrangement effectively increases the mixing efficiency of hydrogen and oxygen, thereby improving combustion efficiency. Moreover, because this air intake method accelerates the mixing speed of oxygen and hydrogen, the heating element 300 may not need to heat the hydrogen to a high temperature to achieve combustion of hydrogen and oxygen, thus helping to reduce the flame combustion temperature.

[0027] It should be noted that this embodiment only describes the structure and working principle of the gas processing device using hydrogen as the gas to be burned and oxygen as the combustion-supporting gas, and does not limit the application of the gas processing device. It is understood that the gas to be burned can be any gas that needs to be removed by combustion, and similarly, the combustion-supporting gas can be any gas that can contribute to the combustion reaction.

[0028] Please continue to refer to Figure 3 In the vertical position of the gas processing device, the combustion chamber 231 is located above the first chamber 101 and the second chamber 201, so that hydrogen and oxygen will not come into contact before flowing into the combustion chamber 231, but will only come into contact after flowing into the combustion chamber 231.

[0029] Please continue to refer to Figure 2 and Figure 3 In this embodiment, the gas processing device may include a cylindrical inner cylinder 100 and a conical outer cylinder 200. The inner cavity of the cylindrical inner cylinder 100 is used to form a first cavity 101. The conical outer cylinder 200 includes a conical cylinder wall 210 and a bottom wall 220. The inner diameter of the conical cylinder wall 210 gradually decreases from the first end 010 to the second end 020. The bottom wall 220 is connected to the end of the conical cylinder wall 210 near the process cavity 030. The bottom wall 220 has a central hole 222. The cylindrical inner cylinder 100 is inserted into and fixed in the central hole 222. A second cavity 201 is formed between the conical cylinder wall 210 and the cylindrical inner cylinder 100.

[0030] With the above configuration, on the one hand, the second cavity 201 has a larger volume at the oxygen inlet end, so that the oxygen can be buffered when it first enters the second cavity 201. This not only increases the residence time of the oxygen in the second cavity 201, allowing it to be fully heated by the heating component 300 in the first cavity 101, but also improves the uniformity of the mixing of oxygen and hydrogen, thereby increasing the reaction efficiency of both and shortening the combustion time. On the other hand, this application uses the cylindrical inner cylinder 100 and the conical outer cylinder 200, which are inserted and fitted together, to form the first cavity 101 and the second cavity 201. The first cavity 101 and the second cavity 201 are separated only by the wall of the cylindrical inner cylinder 100. This allows the heat generated by the heating component 300 to be transferred to the second cavity 201 through the wall of the cylindrical inner cylinder 100, so that the oxygen in the second cavity 201 can be fully heated by the heat generated by the heating component 300. This allows the oxygen to react with hydrogen as soon as it flows into the combustion chamber 231, further shortening the reaction time.

[0031] Furthermore, the arrangement of the second cavity 201 surrounding the first cavity 101 can also provide a certain heat preservation effect for the first cavity 101, thereby reducing the heat dissipation from the first cavity 101 to the surroundings, so that the heat generated by the heating component 300 can be concentrated to heat the hydrogen.

[0032] It should be noted that in this embodiment, please continue to refer to... Figure 1 A connecting pipe 040 can be provided between the cylindrical inner cylinder 100 and the process cavity 030 so that the residual hydrogen in the process cavity 030 can enter the first cavity 101 formed inside the cylindrical inner cylinder 100.

[0033] Please continue to refer to Figure 3 In this embodiment, the gas processing device may further include a plurality of air inlet pipes 400. Specifically, the plurality of air inlet pipes 400 are respectively inserted and fixed to a plurality of air inlets 221 in a corresponding manner. Each air inlet pipe 400 is provided with an opening adjustment valve 500, which is located outside the second cavity 201. One end of each air inlet pipe 400 extending into the second cavity 201 is bent away from the first cavity 101 to form a bent section 410.

[0034] When the gas processing device is in use, the operator can adjust the opening regulating valve 500 outside the second chamber 201 according to the amount of residual hydrogen in the process chamber 030, so as to adjust the opening of the corresponding air inlet pipe 400, thereby achieving the purpose of regulating the oxygen intake, so that the amount of oxygen entering the second chamber 201 can be matched with the amount of hydrogen in the first chamber 101, so as to ensure the complete combustion of hydrogen and oxygen.

[0035] By setting one end of each intake pipe 400 extending into the second cavity 201 as a bent section 410 that bends away from the first cavity 101, the oxygen entering through the intake pipe 400 can change its original path, changing the original vertical upward flow path to a radial outward flow path. This allows the oxygen to be sprayed to the bottom of the conical wall 210 after entering the second cavity 201, causing the oxygen to accumulate at the bottom of the second cavity 201 with a larger radial volume. This further increases the residence time of the oxygen in the second cavity 201, allowing the oxygen to be fully heated by the heating component 300 in the first cavity 101. As a result, when the oxygen flows to the combustion chamber 231 to participate in the combustion of hydrogen, it already carries a lot of heat, eliminating the need for the heating component 300 to heat it at a higher temperature to provide more heat. This setting allows the heating temperature of the heating component 300 to be appropriately lowered, achieving both energy saving and extending the service life of the heating component 300.

[0036] In this application, the formed bending section 410 is approximately a right-angle bending section. That is, the section of the intake pipe 400 located outside the second cavity 201 is approximately along the axial direction of the cylindrical inner cylinder 100, while the section of the intake pipe 400 located inside the second cavity 201 is approximately along the radial direction of the cylindrical inner cylinder 100.

[0037] It should be noted that when the amount of residual hydrogen in process chamber 030 is low, some of the opening adjustment valves 500 can be selectively closed to block the flow of the corresponding air inlet pipes 400, thereby reducing the number of air inlet pipes 400 that can supply oxygen to the second chamber 201, and thus reducing the oxygen supply. The opening adjustment valves 500 can be closed at any time in case of abnormality.

[0038] It should also be noted that in this embodiment, each air inlet pipe 400 can be directly connected to the gas source of the combustion-supporting gas.

[0039] Figure 4 This is a schematic diagram of the structure of the ignition cover 600 of the gas processing device provided in this embodiment; Figure 5 This is a top view of the ignition cover 600 of the gas handling apparatus provided in this embodiment. Please continue to refer to... Figure 3 and combined Figure 4 and Figure 5 In this embodiment, the gas processing device may further include an ignition cover 600. Specifically, the ignition cover 600 includes a partition portion 610, which covers one end of the cylindrical inner cylinder 100 facing the combustion chamber 231. The partition portion 610 separates the first cavity 101 from the combustion chamber 231. The partition portion 610 is provided with a plurality of microporous flow guiding areas 620.

[0040] When the hydrogen in the first chamber 101 flows toward the combustion chamber 231 under negative pressure, it will be buffered by the baffle 610 when it reaches the position of the ignition shroud 600, and will be diverted by the microporous guide zone 620, so that the hydrogen in the first chamber 101 can enter the combustion chamber 231 through the microporous guide zone 620.

[0041] The aforementioned ignition shroud 600 buffers and diverts the hydrogen gas, reducing its impact. On one hand, this reduces the flow velocity of hydrogen in the combustion chamber 231, increasing its residence time and promoting more complete combustion. On the other hand, it prevents excessive hydrogen impact from increasing the flame height, resulting in a lower flame during combustion and reducing the space requirements of the combustion chamber 231, allowing for more flexible space design. Furthermore, diverting the hydrogen gas ensures uniformity as it enters the combustion chamber 231, further improving combustion completeness.

[0042] In addition, the partition plate 610 can also form a physical isolation between the combustion chamber 231 and the first cavity 101, which can block the combustion byproducts and prevent the combustion byproducts from dripping onto the heating component 300 and damaging the heating component 300, thus providing a certain degree of protection for the heating component 300.

[0043] For example, water is a byproduct of the combustion of hydrogen and oxygen. After being cooled by the external cooling system, condensate may form above the gas processing device. If this condensate is not completely vaporized, it will form water droplets and drip downwards.

[0044] Please continue to refer to Figure 4 and Figure 5 In this embodiment, the plurality of microporous flow guiding areas 620 may include a central microporous area 621 and a plurality of edge microporous areas 622, wherein the central microporous area 621 is disposed at the center of the partition portion 610, and the plurality of edge microporous areas 622 are arranged at intervals along the circumference of the central microporous area 621.

[0045] By configuring the microporous flow guiding regions 620 into a form including a central microporous region 621 and multiple peripheral microporous regions 622 arranged circumferentially around the central microporous region 621, the flow area of ​​the baffle portion 610 can be increased, allowing hydrogen from the first cavity 101 to pass through the baffle portion 610 at both the central and peripheral parts. On the one hand, this ensures the uniformity of hydrogen entering the combustion chamber 231, allowing hydrogen to flow to all parts of the combustion chamber 231, which is beneficial for ensuring complete combustion. On the other hand, it also allows the baffle portion 610 to have a larger flow area, allowing more hydrogen to enter the combustion chamber 231 per unit time, thereby improving the efficiency of hydrogen treatment.

[0046] Please continue to refer to Figure 4 and Figure 5 In this embodiment, both the central microporous region 621 and the edge microporous region 622 include multiple rings of microporous holes arranged radially.

[0047] The arrangement of the central microporous region 621 and the peripheral microporous region 622 ensures that the hydrogen flow in the first cavity 101 is uniformly dispersed as it passes through the partition portion 610, and diffuses evenly outward along the radial direction of each microporous region. Each ring of microporous gas plays a role in distributing the hydrogen, ensuring that the hydrogen evenly covers each microporous region, thereby improving the uniformity when entering the combustion chamber 231. Moreover, the radial arrangement of the microporous rings provides a clear and orderly path for the hydrogen flow, avoiding random tortuosity and local eddies that may occur in disordered porous media. While achieving uniform distribution, it also reduces the resistance to hydrogen flow, thus helping to reduce energy consumption.

[0048] In this embodiment, by setting the central microporous region 621 and the edge microporous region 622 to be arranged at intervals, that is, there is a gap between the central microporous region 621 and any edge microporous region 622, and there is a gap between any two adjacent edge microporous regions 622, the solid structure of the partition portion 610 present in these intervals can effectively block the combustion byproducts generated in the combustion chamber 231, thereby reducing the risk of the combustion byproducts dripping into the first cavity 101.

[0049] It should be noted that in this embodiment, both the central micropore region 621 and the edge micropore region 622 are approximately circular. It is understood that in other embodiments, the central micropore region 621 and the edge micropore region 622 may also be other shapes, such as squares or hexagons.

[0050] Please continue to refer to Figure 4 and Figure 5 In this embodiment, the ignition cover 600 may further include a sleeve portion 630. Specifically, the ignition cover 600 is fitted onto the cylindrical inner cylinder 100 through the sleeve portion 630.

[0051] By providing a sleeve portion 630 in the ignition cover 600, when it is necessary to assemble the ignition cover 600 with the cylindrical inner cylinder 100, the sleeve portion 630 can be directly fitted onto the top of the cylindrical inner cylinder 100, resulting in high assembly efficiency and preventing it from falling off. Moreover, the sleeve portion 630 can also act as a barrier between the first cavity 101 and the second cavity 201 in the circumferential direction of the partition portion 610, preventing hydrogen gas in the first cavity 101 from entering the second cavity 201 through the gap between the partition portion 610 and the cylindrical inner cylinder 100, further avoiding premature contact between hydrogen gas in the first cavity 101 and oxygen gas in the second cavity 201.

[0052] In this embodiment, the ignition cover 600 is made of heat-resistant material.

[0053] Please continue to refer to Figure 2 and Figure 3 In this embodiment, the conical outer cylinder 200 may further include a combustion cylinder wall 230. Specifically, the combustion cylinder wall 230 is located at the end of the conical cylinder wall 210 facing the second end 020, that is: in Figure 2 and Figure 3 From a certain perspective, the combustion cylinder wall 230 is located at the top of the conical cylinder wall 210, and the inner cavity of the combustion cylinder wall 230 forms the combustion chamber 231; in the axial section of the combustion cylinder wall 230, the combustion cylinder wall 230 is hyperbolic concave.

[0054] By setting the combustion chamber wall 230 to the above shape, so that the combustion chamber wall 230 appears as a waist-shaped drum with a concave center, when the oxygen in the second cavity 201 flows to the combustion chamber 231, it can flow obliquely upward under the guidance of the combustion chamber wall 230, and counteract the hydrogen entering the combustion chamber 231 through the baffle part 610, so as to improve the mixing uniformity of oxygen and hydrogen, thereby ensuring that the two can be fully combusted.

[0055] Please continue to refer to Figure 2 and Figure 3 In this embodiment, the conical outer cylinder 200 may also include an exhaust cylinder wall 240. Specifically, the exhaust cylinder wall 240 is located at the end of the combustion cylinder wall 230 facing the second end 020. The exhaust cylinder wall 240 is a hollow cylinder, and the end of the exhaust cylinder wall 240 facing the second end 020 forms an exhaust port 241.

[0056] During operation, the negative pressure of the plant provides suction power through the suction port 241 to generate airflow from the first end 010 to the second end 020. Hydrogen enters the combustion chamber 231 from the first chamber 101 through the micro-perforated guide zone 620 of the partition 610, while oxygen enters the second chamber 201 through the inlet pipe 400 and further flows to the combustion chamber 231 to mix with hydrogen and burn. Afterward, the combustion by-products are extracted through the suction port 241 at the top of the suction cylinder wall 240.

[0057] The 240mm wall of the exhaust cylinder has a large flow area and is easy to manufacture.

[0058] In this embodiment, the conical cylinder wall 210, the combustion cylinder wall 230, and the exhaust cylinder wall 240 can be an integral structure.

[0059] Please continue to refer to Figure 3In this embodiment, the heating component 300 may include a heating rod 310 and a heating wire 320 wound around the heating rod 310. Specifically, the heating rod 310 extends along the axial direction of the cylindrical inner cylinder 100, and the heating rod 310 is fixed relative to the cylindrical inner cylinder 100.

[0060] The heating component 300 has a simple structure and is easy to arrange in the cylindrical inner cylinder 100.

[0061] In this embodiment, the heating rod 310 can be fixed inside the cylindrical inner cylinder 100 by a clamping device. The structure of the clamping device can refer to the prior art. This embodiment does not improve on this, so it will not be described in detail.

[0062] Specifically, the heating rod 310 can be made of high-temperature resistant ceramic, and the heating wire 320 is evenly wound around the heating rod 310. The function of the heating component 300 is to heat the hydrogen in the first chamber 101 and the oxygen in the second chamber 201 so that they reach the ignition point and can be burned in the combustion chamber 231.

[0063] While this application discloses the above information, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of this application; therefore, the scope of protection of this application shall be determined by the scope defined in the claims.

[0064] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0065] In the above embodiments, descriptions of directions such as "up" and "down" are based on the accompanying drawings.

[0066] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application.

[0067] Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A gas processing device, characterized in that, The gas handling device has a first end (010) near the process chamber (030) and a second end (020) away from the process chamber (030); the gas handling device includes a first chamber (101) and a second chamber (201) surrounding the first chamber (101), the first chamber (101) being used to receive the gas to be burned from the process chamber (030), and a heating assembly (300) being disposed inside the first chamber (101); the second chamber (201) is located near the first end (010). The wall surface is provided with a plurality of air inlets (221), which are arranged circumferentially at intervals in the first cavity (101), and the flow area at each air inlet (221) is adjustable. The air inlets (221) are configured to introduce combustion-supporting gas. The second cavity (201) is connected to the first cavity (101) at the second end (020) to form a combustion chamber (231), and the second cavity (201) is connected to the exhaust port (241) at the second end (020).

2. The gas processing device according to claim 1, characterized in that, The gas processing device includes a cylindrical inner cylinder (100) and a conical outer cylinder (200). The inner cavity of the cylindrical inner cylinder (100) is used to form the first cavity (101). The conical outer cylinder (200) includes a conical cylinder wall (210) and a bottom wall (220). The inner diameter of the conical cylinder wall (210) gradually decreases from the first end (010) to the second end (020). The bottom wall (220) is connected to one end of the conical cylinder wall (210) near the process cavity (030). The bottom wall (220) has a central hole (222). The cylindrical inner cylinder (100) is inserted into and fixed in the central hole (222). The second cavity (201) is formed between the conical cylinder wall (210) and the cylindrical inner cylinder (100).

3. The gas processing apparatus according to claim 2, characterized in that, The gas processing device further includes an ignition shroud (600), which includes a partition (610) that covers one end of the cylindrical inner cylinder (100) facing the combustion chamber (231). The partition (610) separates the first cavity (101) from the combustion chamber (231). The partition (610) is provided with a plurality of microporous flow guiding areas (620).

4. The gas processing apparatus according to claim 3, characterized in that, The plurality of microporous flow guiding areas (620) include a central microporous area (621) and a plurality of edge microporous areas (622). The central microporous area (621) is disposed at the center of the partition portion (610), and the plurality of edge microporous areas (622) are arranged at intervals along the circumference of the central microporous area (621).

5. The gas processing apparatus according to claim 4, characterized in that, Both the central microporous region (621) and the edge microporous region (622) include multiple rings of microporous holes arranged radially.

6. The gas processing apparatus according to claim 3, characterized in that, The ignition cover (600) also includes a sleeve portion (630), which is fitted onto the cylindrical inner cylinder (100) via the sleeve portion (630).

7. The gas processing apparatus according to claim 2, characterized in that, The conical outer cylinder (200) also includes a combustion cylinder wall (230), which is located at the end of the conical cylinder wall (210) facing the second end (020), and the inner cavity of the combustion cylinder wall (230) forms the combustion chamber (231); in the axial section of the combustion cylinder wall (230), the combustion cylinder wall (230) is hyperbolic concave.

8. The gas processing apparatus according to claim 7, characterized in that, The conical outer cylinder (200) also includes an exhaust cylinder wall (240), which is located at the end of the combustion cylinder wall (230) facing the second end (020). The exhaust cylinder wall (240) is a hollow cylinder, and the end of the exhaust cylinder wall (240) facing the second end (020) forms the exhaust port (241).

9. The gas processing apparatus according to claim 2, characterized in that, The gas processing device further includes a plurality of air inlet pipes (400), which are respectively inserted and fixed to a plurality of air inlets (221). Each air inlet pipe (400) is provided with an opening adjustment valve (500), which is located outside the second cavity (201). One end of each air inlet pipe (400) extending into the second cavity (201) is bent away from the first cavity (101) to form a bent section (410).

10. The gas processing apparatus according to claim 2, characterized in that, The heating assembly (300) includes a heating rod (310) and a heating wire (320) wound around the heating rod (310). The heating rod (310) extends along the axial direction of the cylindrical inner cylinder (100) and is fixed relative to the cylindrical inner cylinder (100).

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