Process recipe editing method, electronic device, and semiconductor process equipment

Abstract

The application relates to an editing method of a process recipe, an electronic device and a semiconductor process equipment. The editing method of the process recipe comprises the following steps: in response to a recipe editing operation, an initial process recipe is acquired based on an editing control, the editing control comprises a main control, a first control and a second control; the first control comprises a plurality of cells, and the cells are used for displaying parameter values in the initial process recipe; the main control is used for determining the positions of the cells; in response to a keyboard event, a target parameter value is determined from the parameter values of the initial process recipe based on a target position provided by the main control by using the first control; and in response to the keyboard event, the target parameter value is edited by using the second control. Thus, the editing operation of the process recipe can be directly realized through the keyboard, and the convenience of the process recipe editing work is greatly improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor fabrication technology, specifically to a method for editing process recipes, electronic equipment, and semiconductor process equipment. Background Technology

[0002] With the continuous advancement of technological productivity, society as a whole is becoming increasingly information-driven and intelligent, leading to a surge in demand for semiconductors. In particular, improving the ease of process formulation editing during semiconductor manufacturing is crucial for enhancing manufacturing efficiency and product quality. Summary of the Invention

[0003] In view of this, this application aims to provide a method for editing process recipes, an electronic device, and a semiconductor process apparatus, which can improve the convenience of process recipe editing.

[0004] The first aspect of this application provides a method for editing a process formula, comprising:

[0005] In response to a recipe editing operation, an initial process recipe is obtained based on an editing control, which includes a main control, a first control, and a second control. The first control includes multiple cells, which are used to display parameter values ​​in the initial process recipe. The main control is used to determine the position of the cells.

[0006] The first control responds to keyboard events, and the target parameter value is determined from the parameter values ​​of the initial process formula based on the target position provided by the main control;

[0007] The target parameter value can be edited by using the second control in response to keyboard events.

[0008] Optionally, after editing the target parameter value using the second control in response to a keyboard event, the method further includes:

[0009] The first control responds to keyboard events to update the edited target parameter values ​​into the initial process formula.

[0010] Optionally, the second control includes a first sub-control and a second sub-control;

[0011] The step of using the second control to respond to keyboard events and edit the target parameter value includes:

[0012] If the target parameter value is input data, then based on the first sub-control, the first edit parameter value provided by the user is obtained and displayed to obtain the edited target parameter value;

[0013] If the target parameter value is a selection type of data, then based on the second sub-control, the second edit parameter value provided by the user is obtained and displayed to obtain the edited target parameter value.

[0014] Optionally, updating the edited target parameter value to the initial process formula includes:

[0015] Detect whether the edited target parameter value meets the preset editing conditions of the target parameter value;

[0016] If the edited target parameter value meets the preset editing conditions, the edited target parameter value is updated in the initial process formula; if the edited target parameter value does not meet the preset editing conditions, the target parameter value in the initial process formula remains unchanged.

[0017] Optionally, the step of obtaining and displaying the first edit parameter value provided by the user based on the first sub-control includes:

[0018] The first sub-control is set to be in the display state;

[0019] Based on the first sub-control, obtain and display the first edit parameter value provided by the user;

[0020] The step of obtaining and displaying the second editing parameter value provided by the user based on the second sub-control includes:

[0021] Determine that the second sub-control is in the display state;

[0022] Based on the second sub-control, the second editing parameter value provided by the user is obtained and displayed.

[0023] Optionally, the method for constructing the editing control includes:

[0024] Add the aforementioned main control;

[0025] Add the first control and the second control under the main control.

[0026] Optionally, the second control includes a first sub-control and a second sub-control; the first sub-control is used to obtain and display a first editing parameter value provided by the user, the first editing parameter value being input data; the second sub-control is used to obtain and display a second editing parameter value provided by the user, the second editing parameter value being selection data.

[0027] Adding the first control and the second control under the main control includes:

[0028] Add the first control under the main control, and add a first event, a second event, and / or a third event to the first control; the first event is triggered when the selected cell changes, and is used to select the cell in the keyboard event; the second event is triggered when the editing operation on the selected cell is about to end, and is used to detect whether the edited target parameter value meets the preset editing conditions of the target parameter value in the keyboard event; the third event is triggered when a key operation occurs, and is used to monitor keyboard changes in the keyboard event.

[0029] Add the first child control under the main control, and add a fourth event to the first child control; add the second child control under the main control, and add a fifth event to the second child control; the fourth event is triggered when the text content in the text box changes, and is used to obtain the first editing parameter value provided by the user in the keyboard event; the fifth event is triggered when the selected item changes, and is used to obtain the second editing parameter value provided by the user in the keyboard event.

[0030] Optionally, the main control includes a Canvas control, the first control includes a DataGrid control, the first child control includes a TextBox control, and / or, the second child control includes a ComboBox control.

[0031] A second aspect of this application provides an electronic device, comprising:

[0032] A processor, and a memory connected to the processor;

[0033] The memory is used to store computer programs;

[0034] The processor is used to call and execute the computer program in the memory to perform the process recipe editing method as described in the first aspect of this application.

[0035] A third aspect of this application provides a semiconductor process apparatus, including the electronic equipment described in the second aspect of this application.

[0036] In this application, an editing control is pre-built, comprising a main control, a first control, and a second control. The first control includes multiple cells, which display parameter values ​​from the initial process formula, and the main control determines the cell positions. Based on this, in response to formula editing operations, the initial process formula can be obtained using the editing control. Then, the first control, responding to keyboard events, determines the target parameter value from the parameter values ​​of the initial process formula based on the target position provided by the main control. Subsequently, the second control, responding to keyboard events, edits the target parameter value. Thus, process formula editing can be performed directly via the keyboard. Compared to frequently using a mouse to switch or edit process parameters while wearing gloves, keyboard-based process parameter editing eliminates the need for a mouse, making it easier to implement and significantly improving the convenience of process formula editing.

[0037] Furthermore, fewer controls are used during the editing process, which significantly improves the loading speed of formula data and reduces memory usage, thereby enabling rapid editing and modification of process formulas and laying the foundation for improving semiconductor manufacturing efficiency and product quality. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0039] Figure 1 This is a flowchart illustrating a method for editing a process formula according to an embodiment of this application.

[0040] Figure 2 This is a flowchart illustrating a method for editing a process formula according to another embodiment of this application.

[0041] Figure 3 This is a flowchart illustrating a method for editing a process formula according to another embodiment of this application.

[0042] Figure 4 This is a schematic diagram of the structure of an editing control provided in one embodiment of this application.

[0043] Figure 5 This is a schematic diagram of the structure of an electronic device provided in one embodiment of this application. Detailed Implementation

[0044] Unless otherwise defined, the technical or scientific terms used in the embodiments of this specification shall have the ordinary meaning understood by one of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not indicate any order, quantity, or importance, but are merely used to avoid confusion of constituent elements.

[0045] Unless the context otherwise requires, throughout this specification, "a plurality of" means "at least two," and "including" is interpreted as open-ended or encompassing, that is, "including, but not limited to." In the description of this specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this specification. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example.

[0046] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this specification.

[0047] In recent years, in order to adapt to the rapid iteration of software control systems for semiconductor manufacturing equipment and improve system user-friendliness, people have paid more and more attention to optimizing the editing of Recipes (Recipes are process recipes for manufacturing semiconductor devices, which include detailed settings of various process steps, parameters and conditions, hereinafter referred to as process recipes). However, this process often involves some difficult problems, such as page aesthetics and ease of operation.

[0048] Currently, the StackPanel control (a simple layout container in Windows Presentation Foundation (WPF) that displays controls stacked horizontally or vertically) and the ListView control (a data display control in WPF that displays a series of items, similar to a file list in Windows Explorer) are typically nested as editing controls for process recipes. However, the inventors discovered that in practical machine applications, this layout method requires users to wear gloves while operating the mouse in the cleanroom to edit process recipes. Frequently using the mouse to switch or edit process parameters while wearing gloves is not only extremely inconvenient but also slows down editing, consequently affecting process preparation efficiency and product yield.

[0049] Therefore, improving the ease of process formulation editing is of great significance for improving semiconductor manufacturing efficiency and product quality.

[0050] In view of this, embodiments of this application provide a method for editing a process formula, such as... Figure 1 As shown, the method may specifically include the following implementation steps:

[0051] S101. In response to the formula editing operation, the initial process formula is obtained based on the editing control. The editing control includes a main control, a first control, and a second control. The first control includes multiple cells, which are used to display parameter values ​​in the initial process formula. The main control is used to determine the position of the above cells.

[0052] Specifically, when a user needs to edit recipe data, they can open the recipe file to be edited using the editing control. Based on this, the host computer can obtain the initial process recipe to be edited using the editing control.

[0053] The initial process formulation may include multiple formulation data. Each formulation data includes at least one parameter value.

[0054] For example, the initial process recipe includes two recipe data sets: the first recipe data set and the second recipe data set. The first recipe data set includes: parameter name: process time (ProcessTime), parameter type: numeric type (Int); the second recipe data set includes: parameter name: current step group name (GroupName), parameter type: enumeration type (None, Group1, Group2). Both process time and current step group name are parameter values ​​from the recipe data set.

[0055] The first control is a table control used to display and edit data lists. The entire control can be divided into multiple ordered grids, each of which is a cell.

[0056] After obtaining the initial process formula using the editing control, the first control can be used to store and display multiple formula data entries from the initial process formula, and the main control can be used to select the parameter value to be edited. Specifically, the first control can present the parameter values ​​of each formula data entry in the initial process formula in a table format, making it convenient for users to view and edit the parameter values ​​in an easy-to-understand and operable way, thus facilitating user viewing and editing of the formula. The main control is used to determine the position of the cell, that is, to determine the position of the selected parameter value to be edited, thus laying the foundation for accurate formula editing operations.

[0057] S102. Utilize the first control to respond to keyboard events and determine the target parameter value from the parameter values ​​of the initial process formula based on the target position provided by the main control.

[0058] Keyboard events are events triggered when there are changes on the keyboard. Keyboard events include keyboard selection events, which are selection events triggered when a user presses a selection key on the keyboard (such as the keys "↑", "↓", "←", "→").

[0059] When a keyboard event occurs, it indicates that the user has performed a keyboard operation. At this time, the main control can respond to the keyboard selection event to determine the selected target location. Based on this, the first control responds to the keyboard selection event, and combined with the target location provided by the main control and the positions of the various cells displaying the parameter values ​​of the initial process formula, the target parameter value corresponding to the target location is determined. The target parameter value is the parameter value to be edited / modified.

[0060] S103. Use the second control to respond to keyboard events and edit the target parameter value.

[0061] The second control is used to display and receive parameter values ​​edited by the user.

[0062] Specifically, keyboard events can also include keyboard editing events. When a keyboard event occurs, the first control can respond to the keyboard selection event and, in conjunction with the target position provided by the main control, determine the target parameter value. Alternatively, the second control can respond to the keyboard editing event to obtain the user's edited content, thereby enabling the editing operation of the target parameter value.

[0063] In this embodiment, an editing control is pre-constructed, comprising a main control, a first control, and a second control. The first control includes multiple cells, which display parameter values ​​from the initial process formula, and the main control determines the cell positions. Based on this, in response to a formula editing operation, the initial process formula can be obtained using the editing control. Then, the first control, responding to keyboard events, determines the target parameter value from the parameter values ​​of the initial process formula based on the target position provided by the main control. Subsequently, the second control, responding to keyboard events, edits the target parameter value. Thus, the process formula can be edited directly via the keyboard. Compared to frequently using a mouse to switch or edit process parameters while wearing gloves, editing process parameters using the keyboard eliminates the need for a mouse, making it easier to implement and significantly improving the convenience of process formula editing.

[0064] Furthermore, the number of controls used during the editing process is reduced, which significantly improves the loading speed of formula data and reduces the memory requirements, thereby enabling rapid editing and modification of process formulas and laying the foundation for improving semiconductor manufacturing efficiency and product quality.

[0065] In some implementations, after editing the target parameter value using the second control in response to a keyboard event, the recipe editing method may further include: updating the edited target parameter value to the initial process recipe using the first control in response to a keyboard event.

[0066] To ensure that each control is independent and does not interfere with the others, thus ensuring the orderly progress of the editing operation, the second control can only receive the editing content provided by the user based on the first control and cannot directly interfere with the first control. In other words, after the second control receives the editing content provided by the user, it will not directly trigger the first control. Therefore, after obtaining the editing content provided by the user using the second control, that is, obtaining the edited target parameter value, in order to complete the editing work, it is necessary to use the first control to respond to keyboard events and update the edited target parameter value determined by the second control to the initial process formula, thereby obtaining the edited process formula, that is, realizing the editing of the target parameter value in the initial process formula.

[0067] It should be noted that the above embodiments of this application are only illustrative examples of the main control and / or the first control and / or the second control responding to keyboard events. However, this application is not limited to this. In some other embodiments, the main control and / or the first control and / or the second control can also respond to mouse events to perform corresponding editing operations. For example, the main control can respond to mouse events to determine the selected target position, etc., which will not be elaborated here.

[0068] In some implementations, the second control may include a first sub-control and a second sub-control.

[0069] Accordingly, when using the second control to respond to keyboard events and edit the target parameter value, it can specifically include: if the target parameter value is input data, then based on the first sub-control, the first edit parameter value provided by the user is obtained and displayed to obtain the edited target parameter value; if the target parameter value is selection data, then based on the second sub-control, the second edit parameter value provided by the user is obtained and displayed to obtain the edited target parameter value.

[0070] Specifically, the first sub-control can be used to edit text-type parameters in a recipe, and the second sub-control can be used to edit enumeration-type parameters in a recipe. Correspondingly, the parameter value type can include input type and selection type. Input type refers to text type directly entered by the user. Selection type refers to enumeration type selected by the user from multiple options. That is, the first editable parameter value is input type data, and the second editable parameter value is selection type data.

[0071] By using the first and second sub-controls, different types of parameter values ​​can be edited, thereby meeting users' editing requirements for different recipes and ensuring the convenience and comprehensiveness of recipe editing.

[0072] In some implementations, updating the edited target parameter value to the initial process formula may specifically include: detecting whether the edited target parameter value meets the preset editing conditions for the target parameter value; if the edited target parameter value meets the preset editing conditions, then updating the edited target parameter value to the initial process formula; if the edited target parameter value does not meet the preset editing conditions, then keeping the target parameter value in the initial process formula unchanged.

[0073] Specifically, a correspondence between parameter values ​​and preset editing conditions can be pre-established. These preset editing conditions refer to the conditions that allow input of input data. For example, if the target parameter value representing process duration is 60 (meaning a process duration of 60 seconds), the corresponding preset editing condition is a value range of [50, 90]. If the second control determines the edited target parameter value to be 80, and the first control determines that the edited target parameter value 80 falls within the range of [50, 90], meaning the edited target parameter value meets the preset editing conditions, then 80 can be updated in the initial process formula to replace the original target parameter value 60. If the second control determines the edited target parameter value to be 100, and the first control determines that the edited target parameter value 100 does not fall within the range of [50, 90], meaning the edited target parameter value does not meet the preset editing conditions, then the edited target parameter value 100 determined by the second control can be ignored, and the original target parameter value 60 in the initial process formula remains unchanged.

[0074] In this way, the legality of the formula editing can be verified during the editing process, which helps users to make more reasonable and legal editing operations on the initial process formula, thereby improving work efficiency and convenience while ensuring the accuracy of the process formula.

[0075] In some implementations, when obtaining and displaying the first edit parameter value provided by the user based on the first sub-control, the first sub-control can be first determined to be in a display state, thereby providing convenience for the user to view the location of the target parameter value and view the edited target parameter value, and then the first edit parameter value provided by the user can be obtained and displayed based on the first sub-control.

[0076] Similarly, to facilitate users in viewing and selecting the edited target parameter value, when obtaining and displaying the second edited parameter value provided by the user based on the second sub-control, the second sub-control can be set to a display state; and the second edited parameter value provided by the user can be obtained and displayed based on the second sub-control.

[0077] In practice, the default state of the first and second child controls can be set to hidden. When it is necessary to edit the target parameter value, the first / second child control can be set to the target position determined by the main control, and the first / second child control can be controlled to change from hidden to displayed, thus providing convenience for users to edit the target parameter value online.

[0078] Furthermore, when using the first control to respond to keyboard events and update the edited target parameter values ​​to the initial process formula, the first / second sub-control that is in the display state can be reset to the hidden state. This avoids the first / second sub-control in the display state from obscuring the parameter values ​​of the initial process formula displayed by the first control. At the same time, it can improve the aesthetics of the display interface and enhance the user experience.

[0079] In some implementations, to ensure the convenience and efficiency of editing process formulations, such as... Figure 2 As shown, the method for constructing the above-mentioned editing control may include the following steps:

[0080] S201. Add the main control.

[0081] S202. Add a first control and a second control under the main control.

[0082] By placing the first and second controls under the main control, the editing control can both display the initial process recipe, providing a scenario for users to view and select parameter values, and locate and edit target parameter values, ensuring the accuracy of the editing work. Furthermore, the editing control can be triggered by keyboard events, eliminating the heavy reliance on the mouse and greatly facilitating users in editing process recipes.

[0083] In addition, the editing controls include a main control, a first control, and a second control. This means that during the entire process of editing the process formula, only the main control, the first control, and the second control need to be displayed to complete the editing work, which greatly reduces the number of controls used and correspondingly reduces the total time used to load controls, effectively improving editing efficiency. At the same time, it can significantly reduce the system's memory pressure and achieve the effect of saving memory.

[0084] Specifically, the second control may include a first sub-control and a second sub-control; the first sub-control is used to obtain and display the first edit parameter value provided by the user, the first edit parameter value being input data; the second sub-control is used to obtain and display the second edit parameter value provided by the user, the second edit parameter value being selection data.

[0085] Add a first control and a second control under the main control, such as... Figure 3 As shown, the method for editing a process formula may specifically include the following steps:

[0086] S2021. Add a first control under the main control, and add a first event, a second event, and / or a third event to the first control; the first event is triggered when the selected cell changes, and is used to select the cell in the keyboard event; the second event is triggered when the editing operation on the selected cell is about to end, and is used to detect whether the edited target parameter value meets the preset editing conditions of the target parameter value in the keyboard event; the third event is triggered when a key operation occurs, and is used to monitor keyboard changes in the keyboard event.

[0087] S2022. Add a first child control under the main control, and add a fourth event to the first child control; add a second child control under the main control, and add a fifth event to the second child control; the fourth event is triggered when the text content in the text box changes, and is used to obtain the first editing parameter value provided by the user in the keyboard event; the fifth event is triggered when the selected item changes, and is used to obtain the second editing parameter value provided by the user in the keyboard event.

[0088] Specifically, the main control may include a Canvas control, the first control may include a DataGrid control, the first child control may include a TextBox control, and / or, the second child control may include a ComboBox control.

[0089] The first event includes the Selected event, the second event includes the CellEditEnding event, the third event includes the KeyDown event, the fourth event includes the TextChanged event, and the fifth event includes the SelectionChanged event.

[0090] The Canvas control is one of the most basic layout controls in WPF. It defines an area within which child elements can be explicitly positioned using coordinates relative to the Canvas area. In this scenario, the Canvas control is used to position the cell containing the target parameter value.

[0091] The DataGrid control, also one of the fundamental controls in WPF, is a table control used to display and edit lists of data. The entire control is divided into multiple ordered grids, each collectively called a cell. In this scenario, the DataGrid control is used to store and display the parameter values ​​of the initial process recipe.

[0092] The TextBox control is a basic control in WPF used to receive and display single-line or multi-line text input from the user. In this scenario, the TextBox control is used to edit text-type parameters in the recipe.

[0093] The ComboBox control is a WPF control used for data input and display. Through simple property settings and data binding, dropdown list functionality can be quickly implemented. In this scenario, the ComboBox control is used to edit enumeration type parameters in a recipe.

[0094] When building an editing control, you can first add a Canvas control to the page and use the Canvas control as the main control, and then add a DataGrid control as a child control to the Canvas control.

[0095] Add the Selected event (triggered when the user's selected cell changes), the CellEditEnding event (triggered when the cell editing operation is about to end; this event can be used to perform some processing when the user finishes editing the content of a cell, including checking whether the edited target parameter value meets the preset editing conditions of the target parameter value), and the KeyDown event (triggered when the user presses the keyboard; used to monitor keyboard changes) to the DataGrid control.

[0096] Add a TextBox control as a child control to the Canvas control, and add a TextChanged event to the TextBox control (an event triggered when the text content in the text box changes). Set the Visibility property of the control to Collapsed. The Visibility property controls the visibility of the control on the interface. When the property is set to Visible, the control is visible; when the property is set to Collapsed, the control is hidden.

[0097] Add a ComboBox control as a child control to the Canvas control, and add a SelectionChanged event to the ComboBox control (this event is triggered when the selected item changes), and set the Visibility property of the control to Collapsed. The edit control is as follows: Figure 4 As shown.

[0098] During the editing of the process formula, the initial process formula can be obtained first. The initial process formula includes information such as the formula name, all parameters in the formula, and the range of parameter values.

[0099] Parse the formula data in the initial process formula, bind the parsed formula data to a DataGrid control, use the DataGrid control to display the parameter values ​​of the formula data, and store them in a List. <recipeparameter>The RecipeParameterList collection contains information such as parameter name, value range, and selection options within the RecipeParameter class.

[0100] Users can trigger recipe editing operations via the keyboard based on their recipe editing needs and the recipe data displayed on the page. In other words, a keyboard event occurs.

[0101] By using the DataGrid control to respond to keyboard events, the target parameter value is determined from the initial process recipe based on the target position provided by the Canvas control.

[0102] The Selected event is triggered when a keyboard selection key (e.g., "↑", "↓", "←", "→") is pressed based on the DataGrid control. After triggering the Selected event, the row and column information of the selected cell can be obtained from the Selected event information. The position point of the selected cell (representing the point of a selected cell within the Canvas control, with x and y properties) can be obtained in the Canvas control, which is equivalent to obtaining the target parameter value. Simultaneously, the parameter type (including input value type and selection type) can be obtained from the RecipeParameterList based on the parameter name of the target parameter value, and it can be determined whether the target parameter value of the selected cell is of input type. When the target parameter value is input data: the Visibility property of the TextBox control is set to Visible, and the Visibility property of the ComboBox control is set to Collapsed, making the TextBox control visible and the ComboBox control hidden. When the target parameter value is selection data: the Visibility property of the TextBox control is set to Collapsed, and the Visibility property of the ComboBox control is set to Visible, making the TextBox control hidden and the ComboBox control visible.

[0103] Use the TextBox / ComboBox control to respond to keyboard events and edit target parameter values.

[0104] Among them, the TextBox / ComboBox control can receive the user's edited content, such as editing the process time. At this time, the user can trigger the keyboard input of 10 in the TextBox control displayed on the page (keyboard event), and the TextBox control can respond to the keyboard event to obtain the edited target parameter value (i.e., the user input 10).

[0105] By using the DataGrid control to respond to keyboard events, the edited target parameter values ​​are updated in the initial process recipe.

[0106] The CellEditEnding event is triggered when the Enter key is pressed. The DataGrid control responds to the CellEditEnding event to check if the edited target parameter value meets the preset editing conditions. Once the edited target parameter value meets the preset editing conditions (e.g., the input target parameter value 10 is within the range [8, 15]), the edited target parameter value replaces the original target parameter value, and the edited initial process recipe is saved, thus completing the online editing operation of the initial process recipe. Additionally, the Visibility property of the TextBox control needs to be set to Collapsed to restore the TextBox control to its hidden state. If the edited target parameter value does not meet the preset editing conditions (e.g., the input target parameter value 10 is not within the range [5, 9]), the edited target parameter value is eliminated, while the original target parameter value remains unchanged.

[0107] As another optional implementation of the disclosure of this application, embodiments of this application also provide a process formula editing device, which may include at least: an acquisition module, used to acquire an initial process formula based on an editing control in response to a formula editing operation, the editing control including a main control, a first control, and a second control; the first control including multiple cells, the cells being used to display parameter values ​​in the initial process formula; the main control being used to determine the position of the cells; a determination module, used to determine a target parameter value from the parameter values ​​of the initial process formula based on a target position provided by the main control in response to a keyboard event using the first control; and an editing module, used to edit the target parameter value in response to a keyboard event using the second control.

[0108] Optionally, the process recipe editing device further includes an update module, which can be used to update the edited target parameter value to the initial process recipe in response to a keyboard event using a first control.

[0109] Optionally, the second control includes a first sub-control and a second sub-control; correspondingly, the editing module can be specifically used to: if the target parameter value is input data, then based on the first sub-control, obtain and display the first editing parameter value provided by the user to obtain the edited target parameter value; if the target parameter value is selection data, then based on the second sub-control, obtain and display the second editing parameter value provided by the user to obtain the edited target parameter value.

[0110] Optionally, when updating the edited target parameter value to the initial process formula, the update module can be used to: detect whether the edited target parameter value meets the preset editing conditions of the target parameter value; if the edited target parameter value meets the preset editing conditions, then update the edited target parameter value to the initial process formula; if the edited target parameter value does not meet the preset editing conditions, then keep the target parameter value in the initial process formula unchanged.

[0111] Optionally, when obtaining and displaying the first edit parameter value provided by the user based on the first sub-control, the update module can be specifically used to: determine that the first sub-control is in a display state; obtain and display the first edit parameter value provided by the user based on the first sub-control; and when obtaining and displaying the second edit parameter value provided by the user based on the second sub-control, the update module can be specifically used to: determine that the second sub-control is in a display state; obtain and display the second edit parameter value provided by the user based on the second sub-control.

[0112] Optionally, the process recipe editing device may also include a building module, which can be used to: add a main control; and add a first control and a second control under the main control.

[0113] Optionally, the second control includes a first sub-control and a second sub-control; the first sub-control is used to obtain and display a first editing parameter value provided by the user, the first editing parameter value being input data; the second sub-control is used to obtain and display a second editing parameter value provided by the user, the second editing parameter value being selection data; when adding the first and second controls under the main control, the building module can specifically be used to: add the first control under the main control, and add a first event, a second event, and / or a third event to the first control; the first event is triggered when the selected cell changes, used to select the cell in the keyboard event; the second event is triggered when editing the selected cell. The first event is triggered when the operation is about to end, and is used to check whether the edited target parameter value meets the preset editing conditions of the target parameter value in the keyboard event; the second event is triggered when a key operation occurs, and is used to monitor keyboard changes in the keyboard event; a first child control is added under the main control, and a fourth event is added to the first child control; a second child control is added under the main control, and a fifth event is added to the second child control; the fourth event is triggered when the text content in the text box changes, and is used to obtain the first edit parameter value provided by the user in the keyboard event; the fifth event is triggered when the selected item is changed, and is used to obtain the second edit parameter value provided by the user in the keyboard event.

[0114] Optionally, the main control includes a Canvas control, the first control includes a DataGrid control, the first child control includes a TextBox control, and / or, the second child control includes a ComboBox control.

[0115] Specific limitations regarding the apparatus for editing process recipes can be found in the limitations regarding the method for editing process recipes described above, and will not be repeated here. Each module in the aforementioned apparatus for editing process recipes can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in or independent of the processor in a computer device in hardware form, or stored in the memory of a computer device in software form, so that the processor can call and execute the operations corresponding to each module.

[0116] As another optional implementation of the disclosure in this application, another embodiment of this application also proposes an electronic device, see [link to relevant documentation]. Figure 5 As shown, the electronic device may include a memory and a processor. The memory stores a computer program, and the processor executes the steps in the method for editing process recipes according to various embodiments of this specification as described in the above embodiments of this application when executing the computer program.

[0117] The internal structure of the electronic device can be as follows: Figure 5 As shown, the electronic device includes a processor, memory, network interface, and input device connected via a system bus. The processor provides computing and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores an operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The network interface is used to communicate with external terminals via a network connection. When the computer program is executed by the processor, it follows the steps of the process recipe editing methods according to various embodiments of this specification as described in the above embodiments.

[0118] The processor may include the main processor, as well as baseband chips, modems, etc.

[0119] The memory stores a program that executes the technical solution of this invention, and may also store an operating system and other critical business functions. Specifically, the program may include program code, which includes computer operation instructions. More specifically, the memory may include read-only memory (ROM), other types of static storage devices capable of storing static information and instructions, random access memory (RAM), other types of dynamic storage devices capable of storing information and instructions, disk storage, flash memory, etc.

[0120] The processor can be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, etc., or an application-specific integrated circuit (ASIC), or one or more integrated circuits used to control the execution of the program of the present invention. It can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), an off-the-shelf programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0121] Input devices may include devices that receive data and information input by the user, such as keyboards, mice, cameras, scanners, light pens, voice input devices, touch screens, pedometers, or gravity sensors.

[0122] Output devices may include devices that allow information to be output to a user, such as displays, printers, speakers, etc.

[0123] The communication interface may include any transceiver-like device for communicating with other devices or communication networks, such as Ethernet, Radio Access Network (RAN), Wireless Local Area Network (WLAN), etc.

[0124] The processor executes the program stored in the memory and calls other devices, which can be used to implement the various steps of any of the process recipe editing methods provided in the above embodiments of this application.

[0125] The electronic device may also include a display component and a voice component. The display component may be a liquid crystal display screen or an e-ink display screen. The input device of the electronic device may be a touch layer covering the display component, or a button, trackball or touchpad set on the casing of the electronic device, or an external keyboard, touchpad or mouse, etc.

[0126] Those skilled in the art will understand that Figure 5 The structures shown are merely block diagrams of a portion of the structure related to the scheme described in this specification, and do not constitute a limitation on the electronic devices to which the scheme described in this specification is applied. Specific electronic devices may include more or fewer components than those shown in the figures, or may combine certain components, or may have different component arrangements.

[0127] As another optional implementation of the disclosure of this application, embodiments of this application also provide a semiconductor process apparatus, which includes electronic devices as described in any of the above embodiments.

[0128] In addition to the methods and devices described above, the process recipe editing method provided in the embodiments of this specification can also be a computer program product, which includes computer program instructions that, when executed by a processor, cause the processor to perform the steps in the process recipe editing methods according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0129] The computer program product described herein can be written in any combination of one or more programming languages ​​to perform the operations of the embodiments described herein. These programming languages ​​include object-oriented programming languages ​​such as Java and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's electronic device, partially on the user's device, as a standalone software package, partially on the user's electronic device and partially on a remote electronic device, or entirely on a remote electronic device or server.

[0130] Furthermore, embodiments of this specification also provide a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a processor of the steps in the methods for editing process formulations according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0131] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.

[0132] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0133] The embodiments described above are merely illustrative of several implementation methods outlined in this specification. While the descriptions are specific and detailed, they should not be construed as limiting the scope of the solutions provided in this specification. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this specification, and these all fall within the scope of protection of this specification. Therefore, the scope of protection for this patent should be determined by the appended claims.< / recipeparameter>

Claims

1. A method for editing a process formula, characterized in that, include: In response to a recipe editing operation, an initial process recipe is obtained based on an editing control, which includes a main control, a first control, and a second control. The first control includes multiple cells, which are used to display parameter values ​​in the initial process formula; The main control is used to determine the position of the cell; The first control responds to keyboard events, and the target parameter value is determined from the parameter values ​​of the initial process formula based on the target position provided by the main control; The target parameter value can be edited by using the second control in response to keyboard events.

2. The method according to claim 1, characterized in that, After using the second control to respond to keyboard events and edit the target parameter value, the method further includes: The first control responds to keyboard events to update the edited target parameter values ​​into the initial process formula.

3. The method according to claim 2, characterized in that, The second control includes a first sub-control and a second sub-control; The step of using the second control to respond to keyboard events and edit the target parameter value includes: If the target parameter value is input data, then based on the first sub-control, the first edit parameter value provided by the user is obtained and displayed to obtain the edited target parameter value; If the target parameter value is a selection type of data, then based on the second sub-control, the second edit parameter value provided by the user is obtained and displayed to obtain the edited target parameter value.

4. The method according to claim 3, characterized in that, The step of updating the edited target parameter values ​​to the initial process formulation includes: Detect whether the edited target parameter value meets the preset editing conditions of the target parameter value; If the edited target parameter value meets the preset editing conditions, the edited target parameter value is updated in the initial process formula; if the edited target parameter value does not meet the preset editing conditions, the target parameter value in the initial process formula remains unchanged.

5. The method according to claim 3, characterized in that, The step of obtaining and displaying the first edit parameter value provided by the user based on the first sub-control includes: The first sub-control is set to be in the display state; Based on the first sub-control, obtain and display the first edit parameter value provided by the user; The step of obtaining and displaying the second editing parameter value provided by the user based on the second sub-control includes: Determine that the second sub-control is in the display state; Based on the second sub-control, the second editing parameter value provided by the user is obtained and displayed.

6. The method according to claim 1, characterized in that, The method for constructing the editing control includes: Add the aforementioned main control; Add the first control and the second control under the main control.

7. The method according to claim 6, characterized in that, The second control includes a first sub-control and a second sub-control; the first sub-control is used to obtain and display a first edit parameter value provided by the user, the first edit parameter value being input data; the second sub-control is used to obtain and display a second edit parameter value provided by the user, the second edit parameter value being selection data. Adding the first control and the second control under the main control includes: Add the first control under the main control, and add a first event, a second event, and / or a third event to the first control; the first event is triggered when the selected cell changes, and is used to select the cell in the keyboard event; the second event is triggered when the editing operation on the selected cell is about to end, and is used to detect whether the edited target parameter value meets the preset editing conditions of the target parameter value in the keyboard event; the third event is triggered when a key operation occurs, and is used to monitor keyboard changes in the keyboard event. Add the first child control under the main control, and add a fourth event to the first child control; add the second child control under the main control, and add a fifth event to the second child control; the fourth event is triggered when the text content in the text box changes, and is used to obtain the first editing parameter value provided by the user in the keyboard event; the fifth event is triggered when the selected item changes, and is used to obtain the second editing parameter value provided by the user in the keyboard event.

8. The method according to claim 7, characterized in that, The main control includes a Canvas control, the first control includes a DataGrid control, the first child control includes a TextBox control, and / or, the second child control includes a ComboBox control.

9. An electronic device, characterized in that, include: A processor, and a memory connected to the processor; The memory is used to store computer programs; The processor is used to call and execute the computer program in the memory to perform the process recipe editing method as described in any one of claims 1-8.

10. A semiconductor process apparatus, characterized in that, Including the electronic device as described in claim 9.

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