Sample carrier and scanning electron microscope

Abstract

The application relates to the technical field of vacuum instrument equipment, in particular to a sample bearing device and a scanning electron microscope. The sample bearing device comprises a sample table with a first axis, a first driving mechanism connected with the sample table, a second driving mechanism used for driving the first driving mechanism to reciprocate in a second direction, a third driving mechanism connected with the second driving mechanism, the third driving mechanism being used for driving the second driving mechanism to rotate, a fourth driving mechanism used for driving the third driving mechanism to reciprocate in a first direction, and a fifth driving mechanism used for driving the fourth driving mechanism to reciprocate in a third direction. The sample bearing device provided by the application can adjust the position of the sample table in five dimensions respectively, thereby adjusting the posture of the sample in the sample bin, each adjusting dimension has a larger adjusting stroke, and higher motion precision can be realized, so that the sample morphology can be reconstructed in three dimensions.

Description

Technical Field

[0001] This application relates to the field of vacuum instrumentation technology, and in particular to a sample carrier and a scanning electron microscope. Background Technology

[0002] Currently, scanning electron microscopes (SEMs) mostly use manual control knobs (usually mechanical rockers or knobs) to move the sample stage. Although this is intuitive and low-cost, it has shortcomings such as low positioning accuracy and poor repeatability, low operating efficiency, unsuitability for batch or automated testing, and susceptibility to human error and fatigue. As a result, it is difficult to meet the modern high-precision and high-efficiency testing requirements. Summary of the Invention

[0003] The purpose of this application is to provide a sample carrier device and a scanning electron microscope (SEM) to solve, to a certain extent, the technical problems existing in the prior art where the SEM often uses manual adjustment of the sample stage, which easily leads to low positioning accuracy, poor repeatability, and low operating efficiency.

[0004] This application provides a sample carrying device, wherein the scanning electron microscope includes a chamber door, and the sample carrying device includes: A sample stage having a first axis extending along a first direction; A first driving mechanism is connected to the sample stage and is used to drive the sample stage to rotate about the first axis. The second drive mechanism is movably disposed on the first drive mechanism, and the second drive mechanism is used to drive the first drive mechanism to reciprocate along the second direction; A third driving mechanism is connected to the second driving mechanism. The third driving mechanism includes a second axis and is used to drive the second driving mechanism to rotate about the second axis. A fourth driving mechanism is provided, wherein the third driving mechanism is movably disposed on the fourth driving mechanism, and the fourth driving mechanism is used to drive the third driving mechanism to reciprocate along the first direction; A fifth drive mechanism is provided, wherein the fourth drive mechanism is movably disposed on the fifth drive mechanism, and the fifth drive mechanism is used to drive the fourth drive mechanism to reciprocate along a third direction.

[0005] In the above technical solution, the first driving mechanism further includes: First slide; A first drive wheel is rotatably mounted on the first slide; the first drive wheel is connected to the sample stage; A first driving component is connected to the first driving wheel via a first transmission assembly; the first driving component can drive the first driving wheel and the sample stage to rotate relative to the first slide by driving the first transmission assembly. In any of the above technical solutions, the second driving mechanism further includes: The second slide is slidably connected to the first slide. A second transmission assembly is connected to the first slide and the second slide; The second driving member is connected to the second transmission assembly. The second driving member can drive the second transmission assembly to operate, so as to drive the first slide table to reciprocate relative to the second slide table in the second direction.

[0006] In any of the above technical solutions, the third driving mechanism further includes: Third slide; The second drive wheel is rotatably mounted on the third slide. A third driving component is connected to the second driving wheel via a third transmission assembly, and the third driving component is used to drive the second driving wheel to rotate. A connector is connected to the second drive wheel, and the connector is capable of rotating synchronously with the second drive wheel.

[0007] In any of the above technical solutions, the fourth driving mechanism further includes: The fourth slide is slidably connected to the third slide; the fourth slide is slidably connected to the compartment door; A fourth transmission assembly is connected to the third slide and the fourth slide; The fourth driving component is connected to the fourth transmission assembly. The fourth driving component drives the fourth transmission assembly to operate, thereby causing the third slide to reciprocate relative to the fourth slide in the first direction.

[0008] In any of the above technical solutions, the fifth driving mechanism further includes: The fifth transmission assembly is connected to the compartment door and the fourth slide. The fifth driving component is connected to the fifth transmission assembly. The fifth driving component drives the fifth transmission assembly to operate, thereby causing the fourth slide to reciprocate relative to the compartment door in the third direction.

[0009] In any of the above technical solutions, the axis of the third driving member extends along the third direction; The axis of the fourth driving member is along the first direction; The axis of the fifth driving member extends along the third direction.

[0010] In any of the above technical solutions, the first drive wheel has a first axis, the length of the first axis extends along the first direction, and the axis of the first drive member extends along the second direction. The second drive wheel has a second axis, the length of which extends along the second direction, and the axis of the second drive member extends along the second direction.

[0011] In any of the above technical solutions, the sample carrying device further includes: An insulating disk is disposed below the sample stage; A conductive ring is disposed between the sample stage and the insulating disk; An insulating base is disposed on the first slide and is located on the side of the sample stage; An electrode is disposed on the insulating base and is in contact with the conductive ring. This application also provides a scanning electron microscope, which includes the sample support device described in any of the above technical solutions, and thus has all the beneficial technical effects of the sample support device, which will not be repeated here; In the above technical solution, the scanning electron microscope further includes: A sample chamber, wherein the sample chamber is provided with a door that can be opened or closed, and the sample carrying device is disposed at the door; A spring-loaded needle is disposed at the chamber door and is used to release static electricity within the sample chamber; A wiring harness is disposed at the door of the sample chamber and is used to establish a communication connection between the interior and exterior spaces of the sample chamber.

[0012] Compared with the prior art, the beneficial effects of this application are as follows: The sample carrying device provided in this application includes: a sample stage having a first axis extending along a first direction; a first driving mechanism connected to the sample stage, the first driving mechanism driving the sample stage to rotate about the first axis; a second driving mechanism movably disposed on the second driving mechanism, the second driving mechanism driving the first driving mechanism to reciprocate along a second direction; a third driving mechanism connected to the second driving mechanism, the third driving mechanism including a second axis, the third driving mechanism driving the second driving mechanism to rotate about the second axis; a fourth driving mechanism movably disposed on the fourth driving mechanism, the fourth driving mechanism driving the third driving mechanism to reciprocate along the first direction; and a fifth driving mechanism movably disposed on the fifth driving mechanism, the fifth driving mechanism driving the fourth driving mechanism to reciprocate along a third direction.

[0013] The sample carrying device provided in this application can adjust the position of the sample stage in five dimensions, thereby adjusting the attitude of the sample in the sample chamber. Each adjustment dimension has a large adjustment stroke, which can achieve high motion accuracy. Thus, with the cooperation of multi-dimensional motion, it is possible to control the electron beam landing energy in deceleration mode to take pictures of the sample at different depths, and to reconstruct the three-dimensional morphology of the sample in conjunction with the electron microscopy system. The scanning electron microscope provided in this application includes the sample support device described above. By configuring the sample support device, compared with the traditional sample posture adjustment method, the adjustment dimension and accuracy of the sample posture are significantly improved. It can expand the range of shooting angles of the sample, take pictures of the sample at different depths, realize three-dimensional reconstruction of the sample, and quickly and accurately locate the required sample shooting position, thereby improving the sampling efficiency. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the sample carrier device provided in the embodiments of this application; Figure 2 A schematic diagram of the structure of the first drive mechanism of the sample carrying device provided in the embodiments of this application; Figure 3 A schematic diagram of the structure of the second drive mechanism of the sample carrying device provided in the embodiments of this application; Figure 4 Another schematic diagram of the second drive mechanism of the sample carrying device provided in the embodiments of this application; Figure 5 A schematic diagram of the third drive mechanism of the sample carrying device provided in the embodiments of this application; Figure 6 A schematic diagram of the fourth drive mechanism of the sample carrying device provided in the embodiments of this application; Figure 7 A schematic diagram of the fifth drive mechanism of the sample carrying device provided in the embodiments of this application; Figure 8 This is another schematic diagram of the fifth drive mechanism of the sample carrying device provided in the embodiments of this application.

[0016] Figure label: 1-Fifth driven pulley; 2-Fifth synchronous belt; 3-Third lead screw; 4-Third slide rail; 5-Third nut seat; 6-Guide rail slider; 7-Door; 8-Third coupling; 9-Fourth encoder; 10-Wire harness; 11-Spring pin; 12-Fifth drive component; 13-Fifth driving pulley; 14-Fourth drive component; 15-Second encoder; 16-Fourth driving pulley; 17-Second slide rail; 18-Fourth slide table; 19-Fourth driven pulley; 20-Fourth synchronous belt; 21-Second lead screw; 22-Second nut seat; 23-Second coupling; 24-Third encoder; 25-Third driving pulley; 26-Third synchronous belt; 27-Third driven pulley; 28-Worm gear assembly; 29-Third slide table; 30-Second drive component 31-Third drive component; 32-First encoder; 33-First slide rail; 34-First nut seat; 35-First lead screw; 36-Base; 37-Connector; 38-First coupling; 39-Second synchronous belt; 40-Second driven wheel; 41-Second driving wheel; 42-Second drive component; 43-First driving wheel; 44-First synchronous belt; 45-First drive component; 46-Insulating seat; 47-Electrode; 48-Sample nail; 49-Sample stage; 50-First driven wheel; 51-First drive rod; 52-Insulating disc; 53-First drive wheel; 54-Conductive ring; 55-First slide; 56-Second slide; 57-Sealing shell; a-First direction; b-Second direction; c-Third direction. Detailed Implementation

[0017] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this application, but not all embodiments.

[0018] The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of this application provided in the drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application.

[0019] Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0022] The following reference Figures 1 to 8 The sample carrier device and scanning electron microscope described in the embodiments of this application are explained.

[0023] See Figures 1 to 8As shown, an embodiment of this application provides a sample carrying device, which includes a sample stage 49, a first driving mechanism, a second driving mechanism, a third driving mechanism, a fourth driving mechanism, and a fifth driving mechanism. The sample stage 49 is used to carry a sample and has a first axis extending along a first direction a, specifically a vertical direction. The first driving mechanism is connected to the sample stage 49, enabling it to drive the sample stage 49 and the sample to rotate about the first axis as a pivot. The first driving mechanism is slidably connected to the second driving mechanism, which drives the first driving mechanism and the sample stage 49 to perform linear reciprocating motion along a second direction b, which is different from the first direction a. The second direction b is a horizontal direction. The first direction a is perpendicular to each other; the third drive mechanism is connected to the second drive mechanism, and the third drive mechanism has a second axis, the length of which extends along the second direction b. The third drive mechanism can drive the second drive mechanism and the same table 49 to rotate about the second axis as a pivot axis; the third drive mechanism is slidably connected to the fourth drive mechanism, and the fourth drive mechanism can drive the third drive mechanism and the same table 49 to perform linear reciprocating motion along the first direction a; the fourth drive mechanism is slidably connected to the fifth drive mechanism, and the fifth drive mechanism can drive the fourth drive mechanism and the same table 49 to perform linear reciprocating motion along a third direction c that is different from both the first direction a and the second direction b. The third direction c is a horizontal direction, and the first direction a, the second direction b, and the third direction c are perpendicular to each other.

[0024] Specifically, the first driving mechanism includes: a first slide 55, a first driving member 45, a first transmission assembly, and a first driving wheel 53. The first slide 55 is plate-shaped and includes an upper surface and a lower surface distributed vertically. The first driving wheel 53 is rotatably mounted on the upper surface of the first slide 55. Optionally, the first driving wheel 53 is a worm gear, rotatably connected to the first slide 55. The sample stage 49 is frustum-shaped and coaxially connected to the worm gear. The first driving member 45 can be a motor, connected to the first driving wheel 53 via the first transmission assembly, so that the power of the first driving member 45 is applied to the first driving wheel 53 via the first transmission assembly, thereby enabling the first driving wheel 53 to drive the sample stage 49 to rotate. Preferably, the first driving member 45 integrates an encoder for reading the rotation angle of the first driving member 45.

[0025] Optionally, the upper surface of the sample stage 49 is provided with sample pins 48, which are used to place the sample and ensure the stability of the sample.

[0026] The first transmission assembly includes a first driving wheel 43, a first driven wheel 50, a first synchronous belt 44, and a first drive rod 51. The first driving wheel 43 is disposed on the output shaft of the first driving member 45. The first driving wheel 43 and the first driven wheel 50 are connected by the first synchronous belt 44. The first drive rod 51 is specifically a worm gear. A portion of the length of the first drive rod 51 passes through the inner ring of the first driven wheel 50 and is connected to the first driven wheel 50, so that under the driving action of the first driving member 45, the first driven wheel 50 can drive the first drive rod 51 to rotate synchronously and coaxially. A portion of the length of the first drive rod 51 is located outside the first driven wheel 50 and meshes with the drive wheel, so that after the first drive rod 51 rotates, the drive wheel can drive the sample stage 49 to rotate synchronously.

[0027] like Figure 2 As shown, a fixed seat is provided on the upper surface of the first slide 55, and the first driving member 45 is provided on the fixed seat. The axis of the first driving member 45 and the axis of the first driving rod 51 are distributed in parallel, and the axes of the two are perpendicular to the first axis. This allows the first driving mechanism to not only drive the sample stage 49 to rotate around the first axis, but also to integrate the first driving member 45, the first transmission component, and the driving wheel on the upper surface of the first slide 55, making full use of the area of ​​the first slide 55 and reducing the space occupied in the sample chamber.

[0028] Further, the second driving mechanism includes a second slide 56, a second driving member 42, and a second transmission assembly. Optionally, it also includes a base 36, which is integrally formed with the second slide 56. The base 36 is positioned to avoid the first slide rail 33 described above. Both the second slide 56 and the second driving member 42 are fixed to the base 36. The length of the second slide 56 extends along a second direction b. The second slide 56 includes an upper surface and a lower surface distributed in a vertical direction. The upper surface of the second slide 56 is provided with a first slide rail 33 extending along the second direction b. The first slide 55 is provided with a slider that can be adapted to the first slide rail 33, so that the first slide 55 and the second slide 56 are slidably connected through the adapted slide rail and slider. The second direction b is specifically the direction in which the sample stage 49 enters or leaves the sample chamber of the scanning electron microscope. The second driving component 42 is specifically a motor. Optionally, the second driving component 42 is mounted on the second slide 56. The output shaft of the second driving component 42 is connected to the second slide 56 through a second transmission assembly, and the second transmission assembly is connected to the first slide 55, so that the power of the second driving component 42 can be transmitted to the second transmission assembly to drive the first slide 55 and the second slide 56 to move relative to each other.

[0029] The second transmission assembly includes: a first lead screw 35, a first nut seat 34, a second driving pulley 41, a second driven pulley 40, and a second synchronous belt 39. The second driving pulley 41 is connected to the output shaft of the second drive member 42, and the second driving pulley 41 and the second driven pulley 40 are connected via the second synchronous belt 39. The second drive member 42 is located on the side of the first lead screw 35. One end of the first lead screw 35 passes through the second driven pulley 40, and the two are coaxially arranged. The other end of the first lead screw 35 is rotatably connected to a support seat on the upper surface of the second slide table 56. The upper surface of the second slide table 56 has two first slide rails 33, which are arranged parallel and spaced apart. The first lead screw 35 is located slightly off-center between the two first slide rails 33. In the lower position, the first nut seat 34 is disposed between the two first slide rails 33 and threadedly connected to the first lead screw 35. The first nut seat 34 is fixedly connected to the lower surface of the first slide table 55. When the second drive member 42 is started, the output shaft of the second drive member 42 starts to rotate and transmits power to the second driven wheel 40 through the second driving wheel 41 and the second synchronous belt 39. This allows the second driven wheel 40 to drive the first lead screw 35 to rotate around its own axis. During the rotation of the first lead screw 35, its rotational motion is converted into the linear motion of the first nut seat 34. This allows the first nut seat 34 to drive the first slide table 55, the sample table 49, and the sample on the sample table 49 to perform linear reciprocating motion along the second direction b.

[0030] Preferably, a first encoder 32 is provided at the end of the first lead screw 35 away from the second driven wheel 40. The first encoder 32 is connected to the first lead screw 35 through a first coupling 38, and the first encoder 32 can read the rotation angle of the first lead screw 35.

[0031] like Figure 3 As shown, the axis of the second driving member 42 extends along the second direction b. That is, the axial direction of the second driving member 42 is parallel to the length direction of the second slide table 56. The power of the second driving member 42 is transmitted to the first lead screw 35 after the second transmission assembly changes direction. This can effectively control the overall volume of the second driving mechanism and reduce the space occupied by the second driving mechanism in the sample chamber.

[0032] It should be noted that the third, fourth, and fifth drive mechanisms described below are similar to the first and second drive mechanisms mentioned above, employing a transmission structure of driving wheels, driven wheels, and belts to transmit power. This ensures smooth operation of each drive mechanism and facilitates precise control of motion. Furthermore, it effectively controls the installation space and motion space required for each drive mechanism, enabling the sample carrier device to achieve high-precision five-dimensional large-stroke attitude adjustment within the sample chamber. Compared to drive structures such as electric cylinders and pneumatic cylinders, this design fully utilizes the space within the sample chamber and does not affect the vacuum level of the scanning electron microscope during operation.

[0033] Furthermore, the third drive mechanism includes: a third slide 29, a connecting member 37, a second drive wheel 30, a third drive component 31, and a third transmission assembly. The third drive component 31 is specifically a motor, and is mounted on the third slide 29. The third slide 29 is plate-shaped, with its two large surfaces distributed along the second direction b. The two large surfaces of the third slide 29 are a mounting surface and a sliding contact surface, respectively. The second drive wheel 30 is a worm gear, rotatably mounted on the mounting surface, and its axis is the second shaft. The second axis extends along the second direction b. The connecting member 37 can be a connecting flange. The connecting member 37 is fixedly installed on the second drive wheel 30, and one end of the second slide table 56 is connected to the connecting member 37. The output shaft of the third drive member 31 is connected to the second drive wheel 30 through the third transmission assembly. After the third drive member 31 is started, it can transmit power to the second drive wheel 30 through the third transmission assembly, so that the second drive wheel 30 can drive the connecting member 37 to drive the second slide table 56 and the sample table 49 to rotate around the second axis.

[0034] Optionally, a second encoder 15 is connected to the back of the second drive wheel 30. The second encoder 15 rotates while the second drive wheel 30 rotates to record the angle.

[0035] The third transmission assembly includes a third driving wheel 25, a third driven wheel 27, a third synchronous belt 26, and a worm gear assembly 28. The worm gear assembly 28 includes a second drive rod. The third driving wheel 25 is connected to the output shaft of the third driving member 31, and the third driving wheel 25 and the third driven wheel 27 are connected by the third synchronous belt 26. The second drive rod is specifically a worm gear that can be adapted to connect with the second driving wheel 30, and one end of the second drive rod is connected to the third driven wheel 27. After the third driving member 31 is started, the third driving member 31 can drive the third driving wheel 25 to rotate the third driven wheel 27 and the second drive rod, thereby enabling the second driving wheel 30 to drive the connecting member 37, together with the third slide 29 and the sample stage 49, to rotate axially.

[0036] Furthermore, the fourth drive mechanism includes: a fourth slide 18, a fourth drive member 14, and a fourth transmission assembly. The length of the fourth slide 18 extends along the first direction a, i.e., the vertical direction. The fourth drive member 14 is disposed on the fourth slide 18. The large surfaces on both sides of the fourth slide 18 are distributed along the second direction b. A second slide rail 17 is disposed on the side surface of the fourth slide 18 facing the sliding contact surface of the third slide 29. Preferably, there are two second slide rails 17 on the fourth slide 18. The two second slide rails 17 are arranged in parallel and spaced apart, and the length of both second slide rails 17 extends along the first direction a. A slider is disposed on the sliding contact surface of the third slide 29, so that the fourth slide 18 and the third slide 29 are slidably connected through the adapted slide rails and sliders. The fourth drive member 14 is specifically a motor. The fourth drive member 14 is connected to the fourth transmission assembly, and the fourth transmission assembly is connected to the third slide 29, so that after the fourth drive member 14 is started, it can drive the third slide 29 to move up and down relative to the fourth slide 18 along the first direction a.

[0037] The fourth transmission assembly includes: a second lead screw 21, a second nut seat 22, a fourth driving pulley 16, a fourth driven pulley 19, and a fourth synchronous belt 20. The second lead screw 21 is rotatably mounted on the fourth slide table 18 via a support. The fourth driving member 14 is located on the side of the second lead screw 21. The length of the second lead screw 21 extends along a first direction a. The fourth driving pulley 16 is connected to the output shaft of the fourth driving member 14. The fourth driving pulley 16 and the fourth driven pulley 19 are connected via the fourth synchronous belt 20. One end of the second lead screw 21 is connected to the fourth driven pulley 19. The second lead screw 21 is coaxially arranged with the fourth driven wheel 19. When the fourth driving member 14 is started, the fourth driving member 14 drives the fourth driving wheel 16 to drive the fourth driven wheel 19 and the second lead screw 21 to rotate around its axis. The second nut seat 22 is sleeved on the second lead screw 21. The second nut seat 22 is threadedly connected to the second lead screw 21, and the second nut seat 22 is fixedly connected to the sliding surface of the third slide table 29, so that the rotational motion of the second lead screw 21 can be converted into the linear motion of the third slide table 29, thereby enabling the third slide table 29 and the sample table 49 to move up and down along the first direction a.

[0038] Preferably, a third encoder 24 is provided at the end of the second lead screw 21 away from the fourth driven wheel 19. The third encoder 24 is connected to the second lead screw 21 through the second coupling 23 and can read the rotation angle of the second lead screw 21.

[0039] Furthermore, the fifth driving mechanism includes a fifth driving component 12 and a fifth transmission assembly. The inner wall of the scanning electron microscope's chamber door 7 is provided with a mounting cavity, and a third slide rail 4 is provided within the mounting cavity. Optionally, there are two third slide rails 4, spaced apart vertically. A guide rail slider 6 is provided on the side surface of the fourth slide stage 18 facing the chamber door 7, allowing the fourth slide stage 18 and the chamber door 7 to slide together via the same number of structurally compatible third slide rails 4 and guide rail sliders 6. The fifth driving component 12 is specifically a motor, mounted on the chamber door 7. The fifth driving component 12 is connected to the fourth slide stage 18 via the fifth transmission assembly, enabling the fifth driving component 12 to drive the fourth slide stage 18 and the sample stage 49 to reciprocate linearly along a third direction c.

[0040] Optionally, the two sides of the door 7 are partially thinned or formed with a hollow structure to serve as an installation cavity for installing and arranging various drive mechanisms. The door 7 of the scanning electron microscope is provided with a sealing shell 57, which is in the shape of a cuboid plate. The sealing shell 57 is located on the outer surface of the door 7 at the opening of the installation cavity, and a sealing strip is provided between the sealing shell 57 and the edge of the opening of the installation cavity to seal the installation cavity and ensure the airtightness of the door 7.

[0041] The fifth transmission assembly includes: a third lead screw 3, a third nut seat 5, a fifth driving wheel 13, a fifth driven wheel 1, and a fifth synchronous belt 2. The third lead screw 3 is rotatably mounted on the door 7, and its length extends along the third direction c. The fifth driving member 12 is located on the side of the third lead screw 3. The fifth driving wheel 13 is connected to the output shaft of the fifth driving member 12. The fifth driving wheel 13 and the fifth driven wheel 1 are connected by transmission via the fifth synchronous belt 2. One end of the third lead screw 3 is connected to the fifth driven wheel 1, and the third lead screw 3 and the fifth driven wheel 1 are coaxially arranged. The third nut seat 5 is sleeved on the third lead screw 3 and the two are threaded together. The third nut seat 5 is fixedly connected to the fourth slide table 18, so that after the fifth driving member 12 is started, the power of the fifth driving member 12 can be transmitted to the fifth driven wheel 1 and the third lead screw 3 to rotate around their own axis. The rotational motion of the third lead screw 3 can be converted into the linear motion of the third nut seat 5, thereby driving the fourth slide table 18 and the sample table 49 to perform linear reciprocating motion along the third direction c.

[0042] Preferably, a fourth encoder 9 is provided at the end of the third lead screw 3 away from the fifth driven wheel 1. The fourth encoder 9 is connected to the third lead screw 3 through the third coupling 8. The fourth encoder 9 can read the rotation angle of the third lead screw 3.

[0043] Furthermore, the sample carrying device also includes a conductive ring 54 and an insulating disk 52. The insulating disk 52 is disposed between the first drive wheel 53 and the sample stage 49, and the conductive ring 54 is disposed between the insulating disk 52 and the sample stage 49. This allows the insulating disk 52 to separate the sample stage 49 from the first drive wheel 53, so that when the conductive ring 54 is energized, it can transmit current to the sample stage 49 without energizing the first drive wheel 53 and other components.

[0044] Furthermore, the sample carrier device also includes an insulating base 46 and an electrode 47. The insulating base 46 is disposed on the first slide 55 and is spaced apart from the sample stage 49 on the side of the sample stage 49. The electrode 47 is disposed on the insulating base 46. Preferably, the electrode has a spring sheet structure and extends toward the conductive ring 54. Under the elastic force provided by the elastic structure of the electrode itself, the electrode can continuously contact the conductive ring 54, so that the conductive ring 54 can be continuously powered after the electrode is energized. By adjusting the voltage of the electrode 47 acting on the conductive ring 54 and the sample to form different acceleration and deceleration electric fields, the depth of electron beam penetration of the sample surface can be controlled to capture images at different depths.

[0045] Furthermore, the sample carrier device also includes a control board, which is a common circuit board in the prior art. The first drive unit 45, the second drive unit 42, the third drive unit 31, the fourth drive unit 14, the fifth drive unit 12, and various encoders and other devices that require electrical or communication connections are respectively connected to the control board.

[0046] In summary, the sample carrying device provided in this application can adjust the position of the sample stage 49 in five dimensions, thereby adjusting the attitude of the sample in the sample chamber. Each adjustment dimension has a large adjustment stroke, which can achieve high motion accuracy. Thus, with the cooperation of multi-dimensional motion, it is possible to control the electron beam landing energy in acceleration and deceleration mode to take pictures of the sample at different depths, and to reconstruct the three-dimensional morphology of the sample in conjunction with the electron microscope system.

[0047] The embodiments of this application also provide a scanning electron microscope, including the sample support device described in any of the above embodiments, and thus have all the beneficial technical effects of the sample support device, which will not be repeated here.

[0048] Furthermore, this scanning electron microscope also includes a chamber door 7, on which the sample carrier is disposed. When the chamber door 7 is closed, the sample carrier can be located inside the sample chamber.

[0049] Furthermore, this scanning electron microscope also includes a spring 11, which is disposed on the door 7 for discharging and releasing static electricity.

[0050] Furthermore, this scanning electron microscope also includes a wiring harness 10. A control board is installed inside the sample chamber. The wiring harness 10 is specifically a flexible flat cable commonly used in the prior art. One end of the wiring harness 10 is connected to the control board. Optionally, the chamber door 7 is provided with a connector. The connector has a first interface and a second interface. The first interface faces the inside of the sample chamber, and the second interface faces the outside of the sample chamber. The other end of the wiring harness 10 is connected to the first interface, so that the connector and the wiring harness 10 can supply power and transmit control signals to the chamber, so that the sample carrying device can be controlled and adjusted by a computer or other equipment outside, thereby adjusting the posture of the sample stage 49 and adjusting the imaging angle.

[0051] In summary, the scanning electron microscope provided in this application, by configuring the above-mentioned sample support device, significantly improves the adjustment dimension and accuracy of sample posture compared with traditional sample posture adjustment methods. It can expand the range of shooting angles for the sample, take pictures of the sample at different depths, realize three-dimensional reconstruction of the sample, and quickly and accurately locate the required sample shooting position, thereby improving the sampling efficiency.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A sample carrying device for a scanning electron microscope, the scanning electron microscope comprising a door, characterized in that, The sample carrier includes: A sample stage having a first axis extending along a first direction; A first driving mechanism is connected to the sample stage and is used to drive the sample stage to rotate about the first axis. The second drive mechanism is movably disposed on the first drive mechanism, and the second drive mechanism is used to drive the first drive mechanism to reciprocate along the second direction; A third driving mechanism is connected to the second driving mechanism. The third driving mechanism includes a second axis and is used to drive the second driving mechanism to rotate about the second axis. A fourth driving mechanism is provided, wherein the third driving mechanism is movably disposed on the fourth driving mechanism, and the fourth driving mechanism is used to drive the third driving mechanism to reciprocate along the first direction; A fifth drive mechanism is provided, wherein the fourth drive mechanism is movably disposed on the fifth drive mechanism, and the fifth drive mechanism is used to drive the fourth drive mechanism to reciprocate along a third direction.

2. The sample carrier according to claim 1, characterized in that, The first driving mechanism includes: First slide; A first drive wheel is rotatably mounted on the first slide; the first drive wheel is connected to the sample stage; A first driving component is connected to the first driving wheel via a first transmission assembly; the first driving component can drive the first driving wheel and the sample stage to rotate relative to the first slide by driving the first transmission assembly.

3. The sample carrying device according to claim 2, characterized in that, The second drive mechanism includes: The second slide is slidably connected to the first slide. A second transmission assembly is connected to the first slide and the second slide; The second driving member is connected to the second transmission assembly. The second driving member can drive the second transmission assembly to operate, so as to drive the first slide table to reciprocate relative to the second slide table in the second direction.

4. The sample carrier according to claim 3, characterized in that, The third drive mechanism includes: Third slide; The second drive wheel is rotatably mounted on the third slide. A third driving component is connected to the second driving wheel via a third transmission assembly, and the third driving component is used to drive the second driving wheel to rotate. A connector is connected to the second drive wheel, and the connector is capable of rotating synchronously with the second drive wheel.

5. The sample carrier according to claim 4, characterized in that, The fourth drive mechanism includes: The fourth slide is slidably connected to the third slide; the fourth slide is slidably connected to the compartment door; A fourth transmission assembly is connected to the third slide and the fourth slide; The fourth driving component is connected to the fourth transmission assembly. The fourth driving component drives the fourth transmission assembly to operate, thereby causing the third slide to reciprocate relative to the fourth slide in the first direction.

6. The sample carrying device according to claim 5, characterized in that, The fifth drive mechanism includes: The fifth transmission assembly is connected to the compartment door and the fourth slide. The fifth driving component is connected to the fifth transmission assembly. The fifth driving component drives the fifth transmission assembly to operate, thereby causing the fourth slide to reciprocate relative to the compartment door in the third direction.

7. The sample carrier according to claim 6, characterized in that, The axis of the third driving member extends along the third direction; The axis of the fourth driving member is along the first direction; The axis of the fifth driving member extends along the third direction.

8. The sample carrier according to claim 4, characterized in that, The first drive wheel has a first axis, the length of which extends along the first direction, and the axis of the first drive member extends along the second direction; The second drive wheel has a second axis, the length of which extends along the second direction, and the axis of the second drive member extends along the second direction.

9. The sample carrying device according to claim 2, characterized in that, The sample carrier device further includes: An insulating disk is disposed below the sample stage; A conductive ring is disposed between the sample stage and the insulating disk; An insulating base is disposed on the first slide and is located on the side of the sample stage; An electrode is disposed on the insulating base and is in contact with the conductive ring.

10. A scanning electron microscope, characterized in that, The scanning electron microscope, comprising the sample support device according to any one of claims 1 to 9, further comprises: A sample chamber, wherein the sample chamber is provided with a door that can be opened or closed, and the sample carrying device is disposed at the door; A spring-loaded needle is disposed at the chamber door and is used to release static electricity within the sample chamber; A wiring harness is disposed at the door of the sample chamber and is used to establish a communication connection between the interior and exterior spaces of the sample chamber.

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