Laser pulse compensation method, device, equipment and storage medium

Abstract

The application is suitable for the field of laser technology, and provides a laser pulse compensation method, device, equipment and storage medium. The laser pulse compensation method comprises the following steps: modulating the waveform of a laser pulse to be compensated, so as to change the rising time and / or falling time of the laser pulse to be compensated; and amplifying the modulated laser pulse, so that the difference between the rising time and the falling time of the amplified laser pulse is changed compared with the difference between the rising time and the falling time of the laser pulse to be compensated. The laser pulse compensation method provided by the embodiment of the application can ensure the quality of the output laser pulse.

Description

Technical Field

[0001] This application belongs to the field of laser amplification technology, and in particular relates to a laser pulse compensation method, device, equipment and storage medium. Background Technology

[0002] During laser amplification, due to various reasons, such as the different gains at the rising and falling edges of the laser pulse, the waveform of the laser pulse will change, resulting in a decrease in the quality of the output laser pulse. Summary of the Invention

[0003] The embodiments of this application provide a laser pulse compensation method, apparatus, device, and storage medium that can guarantee the quality of the output laser pulse.

[0004] In a first aspect, embodiments of this application provide a laser pulse compensation method, comprising:

[0005] Modulate the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated; The modulated laser pulse is amplified so that the difference between the rise time and fall time of the amplified laser pulse is changed compared to the difference between the rise time and fall time of the laser pulse to be compensated.

[0006] In one possible implementation of the first aspect, modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated includes: The laser pulse to be compensated and the modulation signal arrive at the modulation module simultaneously; The modulation module alters the waveform of the rising edge of the laser pulse to be compensated, thereby increasing the rise time of the laser pulse to be compensated.

[0007] In one possible implementation of the first aspect, modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated includes: The waveform of the laser pulse to be compensated is modulated by acousto-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated.

[0008] In one possible implementation of the first aspect, modulating the waveform of the laser pulse to be compensated by acousto-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated includes: The laser pulse to be compensated and the modulation signal arrive at the acousto-optic modulation module simultaneously; The acousto-optic modulation module changes its own parameters according to the modulation signal, thereby changing the waveform of the laser pulse to be compensated, and thus changing the rise time and / or fall time of the laser pulse to be compensated.

[0009] In one possible implementation of the first aspect, the acousto-optic modulation module includes an acousto-optic crystal and a crystal adjustment unit; The acousto-optic modulation module changes its own parameters according to the modulation signal, thereby changing the waveform of the laser pulse to be compensated, and thus changing the rise time and / or fall time of the laser pulse to be compensated, including: The crystal adjustment unit changes the voltage applied to the acousto-optic crystal according to the modulation signal; The acousto-optic crystal alters the waveform of the laser pulse to be compensated, thereby changing the rise time and / or fall time of the laser pulse to be compensated.

[0010] In one possible implementation of the first aspect, modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated includes: The waveform of the laser pulse to be compensated is modulated by electro-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated. Alternatively, the waveform of the laser pulse to be compensated can be modulated by spatial light modulation to change the rise time and / or fall time of the laser pulse to be compensated.

[0011] Secondly, embodiments of this application provide a laser pulse compensation device, comprising: A modulation module for modulating the waveform of a laser pulse to be compensated, so as to change the rise time and / or fall time of the laser pulse to be compensated; A post-amplification module used to amplify modulated laser pulses so that the difference between the rise time and fall time of the amplified laser pulse changes compared to the difference between the rise time and fall time of the laser pulse to be compensated.

[0012] In one possible implementation of the second aspect, the laser pulse compensation device further includes: The control system is used to emit a modulation signal so that the laser pulse to be compensated and the modulation signal arrive at the modulation module simultaneously.

[0013] Thirdly, embodiments of this application provide a processing apparatus, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the method described in any one of the first aspects above.

[0014] Fourthly, embodiments of this application provide a computer-readable storage medium storing a computer program that, when executed by a processor, implements the method described in any one of the first aspects above.

[0015] Fifthly, embodiments of this application provide a computer program product that, when run on a terminal device, causes the terminal device to execute the method described in any one of the first aspects.

[0016] The beneficial effects of the embodiments of this application are: By modulating the waveform of the laser pulse to be compensated, changing the rise time and / or fall time of the laser pulse to be compensated, and then amplifying the modulated laser pulse, since the waveform of the laser pulse has been compensated in advance, the influence of the different gain on the waveform during the amplification process can be at least partially eliminated. This results in the difference between the rise time and fall time of the amplified laser pulse being different from the difference between the rise time and fall time of the laser pulse to be compensated, thus obtaining the desired laser pulse and ensuring the waveform quality of the laser pulse. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic flowchart of a laser pulse compensation method provided in an embodiment of this application; Figure 2 This is a flowchart illustrating step A1 of a laser pulse compensation method provided in an embodiment of this application; Figure 3 This is a schematic diagram illustrating the principle that the waveform of a laser pulse becomes spiked during laser amplification; Figure 4 This is a schematic diagram showing how the waveform of a laser pulse deviates from its original waveform during the laser amplification process. Figure 5 This is a flowchart illustrating step A1' of a laser pulse compensation method provided in an embodiment of this application; Figure 6 This is a schematic diagram showing the relationship between output laser power and acousto-optic crystal diffraction efficiency. Figure 7 This is a schematic diagram of waveform modulation through diffraction efficiency; Figure 8 This is a flowchart illustrating step A12' of a laser pulse compensation method provided in an embodiment of this application; Figure 9 This is a schematic diagram of the structure of a laser pulse compensation device provided in an embodiment of this application; Figure 10 This is a schematic diagram of the structure of a laser pulse compensation device provided in another embodiment of this application; Figure 11 This is a schematic diagram of the structure of a laser pulse compensation device provided in another embodiment of this application; Figure 12 This is a schematic diagram of the electro-optic modulation module of a laser pulse compensation device provided in one embodiment of this application; Figure 13 This is a schematic diagram of the electro-optic modulation module of a laser pulse compensation device provided in another embodiment of this application; Figure 14 This is a schematic diagram of the spatial light modulation module of a laser pulse compensation device provided in one embodiment of this application; Figure 15 This is a schematic diagram of the structure of a processing device provided in one embodiment of this application. Detailed Implementation

[0019] To make the technical problem to be solved, the technical solution and the beneficial effects of this application clearer, the following is in conjunction with the appendix. Figures 1 to 14 The present application will be further described in detail below with reference to embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

[0020] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods have been omitted so as not to obscure the description of this application with unnecessary detail.

[0021] It should be understood that, when used in this application specification and the appended claims, the term "comprising" indicates the presence of the described features, integrals, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or a collection thereof.

[0022] It should also be understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0023] As used in this application specification and the appended claims, the term "if" may be interpreted, depending on the context, as "when," "once," "in response to determination," or "in response to detection." Similarly, the phrase "if determined" or "if detected [the described condition or event]" may be interpreted, depending on the context, as meaning "once determined," "in response to determination," "once detected [the described condition or event]," or "in response to detection [the described condition or event]."

[0024] Furthermore, in the description of this application and the appended claims, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0025] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0026] The embodiments of this application provide a laser pulse compensation method that can be applied to laser amplification.

[0027] Figure 1 This is a schematic flowchart of a laser pulse compensation method provided in one embodiment of this application. (Reference) Figure 1 The laser pulse compensation method provided in the embodiments of this application includes steps A1 and A2.

[0028] Step A1: Modulate the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated.

[0029] The laser pulse to be compensated is the laser pulse that needs to be compensated.

[0030] Typically, laser amplification involves multiple stages, such as pre-amplification (or first amplification) and post-amplification (or second amplification). The pre-amplification can be implemented by the pre-amplification module 9, and the post-amplification can be implemented by the post-amplification module 2.

[0031] After a laser pulse is amplified by a preamplifier, its waveform will change. The laser pulse to be compensated can specifically be the laser pulse that has been amplified by the preamplifier.

[0032] Step A1 specifically includes the following three cases: By changing the waveform of the rising edge of the laser pulse to be compensated, the rise time of the laser pulse to be compensated can be changed, for example, by increasing or decreasing the rise time. Alternatively, the waveform of the falling edge of the laser pulse to be compensated can be changed, thereby changing the falling time of the laser pulse to be compensated, for example, increasing or decreasing the falling time. Alternatively, both the rising edge waveform and the falling edge waveform of the laser pulse to be compensated can be changed, thereby altering the rise time and fall time of the laser pulse to be compensated.

[0033] The rise time of a laser pulse refers to the time required for the rising edge of the pulse signal to rise from a specified lower limit (usually 10% of the peak amplitude) to a specified upper limit (usually 90% of the peak amplitude).

[0034] The fall time of a laser pulse refers to the time required for the falling edge of the pulse signal to drop from a specified upper limit (usually 90% of the peak amplitude) to a specified lower limit (usually 10% of the peak amplitude).

[0035] The waveform of the laser pulse to be compensated can be modulated by modulation module 1. As an example, the waveform of the laser pulse to be compensated is modulated by acousto-optic modulation module 1A, that is, the waveform of the laser pulse to be compensated is modulated by acousto-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated.

[0036] Step A2: Amplify the modulated laser pulse so that the difference between the rise time and fall time of the amplified laser pulse changes compared to the difference between the rise time and fall time of the laser pulse to be compensated.

[0037] After the modulation of the laser pulse to be compensated is completed, the modulated single laser pulse is amplified, that is, one laser pulse is amplified at a time.

[0038] The modulated laser pulse is transmitted to the post-amplification module 2, and then amplified and output.

[0039] The power amplifier can be a common laser amplification module. As an example, the power amplifier module includes a pump source and a gain medium, with the pump source supplying energy to the gain medium.

[0040] During the subsequent amplification process, although the gain received at the rising edge of the modulated laser pulse will differ from that at the falling edge, causing the pulse waveform to deviate from the desired waveform, the waveform of the laser pulse has already been modulated, changing the rise time and / or fall time of the laser pulse to be compensated. In other words, the waveform of the laser pulse has been compensated in advance, which can at least partially eliminate the influence of the different gains on the waveform during the subsequent amplification process. This allows the waveform of the amplified laser pulse to be consistent with or close to the desired waveform.

[0041] The modulation degree of the waveform of the laser pulse to be compensated is controlled to a large extent, so that the difference between the rise time and fall time of the amplified laser pulse changes compared with the difference between the rise time and fall time of the laser pulse to be compensated.

[0042] The difference between the rise time and fall time of the laser pulse to be compensated is the first time difference. The difference between the rise time and fall time of the amplified laser pulse is the second time difference. The first time difference and the second time difference are different time differences, that is, the second time difference has changed compared to the first time difference.

[0043] In practical applications, the second time difference is smaller than the first time difference, or the second time difference is greater than the first time difference.

[0044] As can be seen from the above, by modulating the waveform of the laser pulse to be compensated, changing the rise time and / or fall time of the laser pulse to be compensated, and then amplifying the modulated laser pulse, since the waveform of the laser pulse has been compensated in advance, the influence of the different gain on the waveform during the amplification process can be at least partially eliminated. This results in the difference between the rise time and fall time of the amplified laser pulse being different from the difference between the rise time and fall time of the laser pulse to be compensated, thus obtaining the desired laser pulse, ensuring the waveform quality of the laser pulse, and realizing the customization of the laser pulse waveform.

[0045] Figure 2 This is a schematic flowchart illustrating step A1 of a laser pulse compensation method provided in an embodiment of this application. (See reference) Figure 2 The above step A1 (i.e., modulating the waveform of the leading edge of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated) may include steps A11 and A12.

[0046] Step A11: The laser pulse to be compensated and the modulation signal arrive at the modulation module simultaneously.

[0047] The control system 3 can control the time when the modulation signal arrives at the modulation module 1, so that the modulation signal 100 and the laser pulse to be compensated 200 arrive at the modulation module 1 at the same time, wherein each modulation signal corresponds to one laser pulse to be compensated.

[0048] Step A12: Modulation module 1 changes the waveform of the rising edge of the laser pulse to be compensated, thereby increasing the rise time of the laser pulse to be compensated.

[0049] Along the transmission direction of the laser, the rising edge of the laser pulse to be compensated arrives at the modulation module 1 before the falling edge. Since the laser pulse to be compensated and the modulation signal arrive at the modulation module 1 at the same time, the modulation module 1 also works at the same time, changing the waveform of the rising edge of the laser pulse to be compensated, specifically by increasing the rise time of the laser pulse to be compensated.

[0050] Figure 3 This is a schematic diagram illustrating the principle that the waveform of a laser pulse becomes spiked during laser amplification. Figure 4 This is a schematic diagram showing how the waveform of a laser pulse deviates from its original waveform during the laser amplification process. (Reference) Figure 3 and Figure 4 During laser amplification, the gain energy accumulated by the pump light in the gain medium during the time interval between two pulses (gain energy is a conceptual description; it is actually determined by the number of inverted particles accumulated in the gain medium and is extracted in the form of stimulated emission when a signal laser is input) is limited. This energy is preferentially extracted by the leading edge of the laser pulse. Therefore, the gain received by the rising edge of the laser pulse is often much greater than the gain received by the falling edge of the laser pulse, which causes the waveform of the rising edge of the laser pulse to be distorted (often called spike). During laser processing, spiked laser pulses can damage the workpiece and reduce the processing quality.

[0051] In the embodiments of this application, since the laser pulse to be compensated and the modulation signal arrive at the modulation module 1 simultaneously, the modulation module 1 also works simultaneously when the rising edge of each laser pulse to be compensated arrives at the modulation module 1, thereby changing the waveform of the rising edge of the laser pulse to be compensated by increasing the rise time of the laser pulse to be compensated. This can at least partially eliminate the waveform change caused by the gain received at the rising edge being greater than the gain received at the falling edge, and can obtain a relatively smooth pulse waveform after subsequent amplification of the modulated laser pulse. It can output a flat-top pulse laser, can precisely control the waveform of each laser pulse, can prevent the waveform of the rising edge of the output laser pulse from changing (i.e., the phenomenon of sharpening occurs), and can ensure the processing quality.

[0052] Figure 5 This is a flowchart illustrating step A1' of a laser pulse compensation method provided in an embodiment of this application. (See reference) Figure 5 The above-mentioned modulation of the waveform of the laser pulse to be compensated by acousto-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated may include steps A11' and A12'.

[0053] Step A11': The laser pulse to be compensated and the modulation signal arrive at the acousto-optic modulation module 1A simultaneously.

[0054] As mentioned above, the timing of the modulation signal arriving at the acousto-optic modulation module 1A can be controlled by the control system, so that the modulation signal and the laser pulse to be compensated arrive at the acousto-optic modulation module 1A at the same time, wherein each modulation signal corresponds to one laser pulse to be compensated.

[0055] Step A12': The acousto-optic modulation module changes its own parameters according to the modulation signal, thereby changing the waveform of the laser pulse to be compensated, so as to change the rise time and / or fall time of the laser pulse to be compensated.

[0056] Figure 6 This is a schematic diagram showing the relationship between output laser power and acousto-optic crystal diffraction efficiency. Figure 7 This is a schematic diagram of waveform modulation through diffraction efficiency. (Reference) Figure 6 and Figure 7 Since the output laser power = input laser power × acousto-optic crystal diffraction efficiency, the diffraction efficiency of the acousto-optic crystal can be changed according to the modulation signal to change the power of the laser pulse to be compensated, thereby changing the waveform of the compensated laser pulse and thus changing the rise time and / or fall time of the laser pulse to be compensated.

[0057] The aforementioned acousto-optic modulation module 1A may include an acousto-optic crystal 11A and a crystal adjustment unit 12A.

[0058] Figure 8 This is a flowchart illustrating step A12' of a laser pulse compensation method provided in an embodiment of this application. (See reference) Figure 8 The above step A12' (the acousto-optic modulation module changes its own parameters according to the modulation signal, thereby changing the waveform of the laser pulse to be compensated, so as to change the rise time and / or fall time of the laser pulse to be compensated) may include steps A121' and A122'.

[0059] Step A121': The crystal adjustment unit changes the voltage applied to the acousto-optic crystal according to the modulation signal.

[0060] The diffraction efficiency of an acousto-optic crystal is related to the voltage applied to it. Therefore, the diffraction efficiency of an acousto-optic crystal can be changed by altering the voltage applied to it.

[0061] The modulation signal 100 can specifically be a voltage signal or a switching signal. After receiving the modulation signal, the crystal adjustment unit 12A changes the voltage applied to the acousto-optic crystal 11A.

[0062] Step A122': The acousto-optic crystal changes the waveform of the laser pulse to be compensated, thereby changing the rise time and / or fall time of the laser pulse to be compensated.

[0063] By changing the voltage applied to the acousto-optic crystal, the diffraction efficiency of the acousto-optic crystal can be changed rapidly, thereby enabling the acousto-optic crystal to quickly change the waveform of the laser pulse to be compensated, and to perform rapid and precise shaping of the laser pulse waveform.

[0064] Since the diffraction efficiency of an acousto-optic crystal is also related to the crystal angle, the diffraction efficiency can also be changed by changing the crystal angle of the acousto-optic crystal, for example by rotating the acousto-optic crystal to change the crystal angle, thereby changing the waveform of the laser pulse to be compensated.

[0065] In summary, the parameters of the acousto-optic modulation module itself can be the diffraction efficiency of the acousto-optic crystal, the voltage applied to the acousto-optic crystal, or the crystal angle of the acousto-optic crystal.

[0066] Step A1 above (i.e., modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated) may include: modulating the waveform of the laser pulse to be compensated by electro-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated.

[0067] Electro-optic modulation can be specifically implemented through an electro-optic modulation module.

[0068] The electro-optic modulation module 1B may specifically include an electro-optic modulator 11B and a polarization device 12B. The electro-optic modulator 11B and the polarization device 12B are arranged sequentially along the propagation direction S of the laser. The electro-optic modulator 11B may be an electro-optic crystal or an electrically tunable half-wave plate; the polarization device 12B may be a thin-film polarizer or a polarization beam splitter.

[0069] As an example, electro-optic modulation is achieved using an electro-optic crystal 11B (or an electrically tunable half-wave plate) and a thin-film polarizer 12B to change the waveform of the laser pulse to be compensated. Specifically, the electro-optic crystal 11B (or the electrically tunable half-wave plate) can change the polarization direction of the laser, while the reflectivity and transmittance of the thin-film polarizer 12B are related to the polarization direction. This allows control over the amount of reflected or transmitted laser light, thereby changing the laser power and thus altering the waveform of the laser pulse to be compensated, as well as its rise time and / or fall time.

[0070] As another example, electro-optic modulation is achieved using an electro-optic crystal 11B (or an electrically tunable half-wave plate) and a polarization beam splitter 12B to change the waveform of the laser pulse to be compensated. Specifically, the electro-optic crystal 11B (or the electrically tunable half-wave plate) can change the polarization direction of the laser, while the reflectivity and transmittance of the polarization beam splitter 12B are related to the polarization direction. This allows control over the amount of reflected or transmitted laser light, thereby changing the laser power and thus altering the waveform of the laser pulse to be compensated, as well as its rise time and / or fall time.

[0071] Step A1 above (i.e., modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated) may include: modulating the waveform of the laser pulse to be compensated by spatial light modulation to change the rise time and / or fall time of the laser pulse to be compensated.

[0072] Spatial light modulation can be specifically implemented through the spatial light modulation module 1C.

[0073] The spatial light modulation module 1C may specifically include an electrically tunable reflector 11C, a spatial light modulator 12C, and an optical shutter 13C. The electrically tunable reflector 11C, the spatial light modulator 12C, and the optical shutter 13C are arranged sequentially along the propagation direction S of the laser.

[0074] As an example, spatial light modulation is achieved using an electrically tunable mirror 11C, a spatial light modulator 12C, and an optical shutter 13C to change the waveform of the laser pulse to be compensated. Specifically, by using an electrically tunable mirror, a spatial light modulator, or by directly changing the aperture of the optical shutter, the power of the laser passing through the optical shutter is varied, thereby changing the waveform of the laser pulse to be compensated, altering the rise time and / or fall time of the laser pulse to be compensated, and thus achieving modulation of the waveform of the laser pulse to be compensated.

[0075] The laser pulse compensation method provided in the embodiments of this application is applicable to solving the technical problem that the pulse waveform is deformed during the amplification process of laser pulses (especially long pulse lasers with pulse widths of sub-nanosecond or higher) due to the different absorption gain energy at the rising and falling edges of the laser pulse. It can improve the processing quality and also realize the waveform of customized laser pulses.

[0076] It should be understood that the sequence number of each step in the above embodiments does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0077] Corresponding to the method described in the above embodiments, Figure 9 This diagram illustrates the structure of a laser pulse compensation device provided in an embodiment of this application. For ease of explanation, only the parts relevant to the embodiments of this application are shown.

[0078] refer to Figure 9 The laser pulse compensation device provided in the embodiments of this application includes a modulation module 1 and a post-amplification module 2.

[0079] The modulation module 1 is used to modulate the waveform of the laser pulse to be compensated, so as to change the rise time and / or fall time of the laser pulse to be compensated.

[0080] The post-amplification module 2 is used to amplify the modulated laser pulse, so that the difference between the rise time and fall time of the amplified laser pulse is changed compared with the difference between the rise time and fall time of the laser pulse to be compensated.

[0081] The modulation module 1 and the post-amplification module 2 are arranged sequentially along the propagation direction of the laser; that is, along the propagation direction S of the laser, the post-amplification module 2 is arranged behind the modulation module 1 to modulate the modulated laser pulse.

[0082] Figure 10 This is a schematic diagram of the structure of a laser pulse compensation device provided in another embodiment of this application. (Reference) Figure 10 The aforementioned laser pulse compensation device may also include a control system 3.

[0083] The control system 3 is used to send a modulation signal so that the laser pulse to be compensated and the modulation signal arrive at the modulation module at the same time.

[0084] The control system 3 can also emit a seed signal, which is amplified and becomes the laser pulse to be compensated. The control system 3 can control the timing of the seed signal generation, and combined with the timing of the modulation signal generation, it can ensure that the laser pulse to be compensated and the modulation signal arrive at the modulation module 1 simultaneously.

[0085] Figure 11 This is a schematic diagram of the structure of a laser pulse compensation device provided in another embodiment of this application. (Reference) Figure 11 The modulation module 1 mentioned above can be an acousto-optic modulation module 1A. The acousto-optic modulation module 1A may include an acousto-optic crystal 11A and a crystal adjustment unit 12A.

[0086] The acousto-optic crystal 11A and the crystal adjustment unit 12A are arranged sequentially along the propagation direction of the laser.

[0087] Figure 12 This is a schematic diagram of the electro-optic modulation module of a laser pulse compensation device provided in one embodiment of this application. (Reference) Figure 12 The modulation module 1 mentioned above can be an electro-optic modulation module 1B. The electro-optic modulation module 1B may include an electro-optic modulator 11B and a polarization device 12B.

[0088] The electro-optic modulator 11B and the polarization device 12B are arranged sequentially along the propagation direction of the laser.

[0089] Figure 14 This is a schematic diagram of the spatial light modulation module of a laser pulse compensation device provided in one embodiment of this application. (Reference) Figure 14 The modulation module 1 mentioned above can be a spatial light modulation module 1C. The spatial light modulation module 1C may include an electrically tunable reflector 11C, a spatial light modulator 12C, and an optical shutter 13C.

[0090] The electrically tunable reflector 11C, the spatial light modulator 12C, and the optical shutter 13C are arranged sequentially along the direction of laser propagation.

[0091] It should be noted that the information interaction and execution process between the above-mentioned devices / units are based on the same concept as the method embodiments of this application. For details on their specific functions and technical effects, please refer to the method embodiments section, and they will not be repeated here.

[0092] Figure 15 This is a schematic diagram of the structure of a processing device provided in one embodiment of this application. Figure 15 As shown, the processing equipment 14 of this embodiment includes: at least one processor 140 ( Figure 15 Only one is shown in the diagram), memory 141, and computer program 142 stored in memory 141 and executable on at least one processor 140; when processor 140 executes computer program 142, it implements the steps in the various method embodiments described above.

[0093] The processing equipment 14 can be a computing device such as a desktop computer, laptop, handheld computer, or cloud server. This processing equipment may include, but is not limited to, a processor 140 and a memory 141. Those skilled in the art will understand that... Figure 15 This is merely an example of processing equipment and does not constitute a limitation on the processing equipment. It may include more or fewer components than shown in the figure, or combinations of certain components, or different components. For example, it may also include input / output devices, network access devices, buses, etc.

[0094] The processor 140 can be a Central Processing Unit (CPU), but it can also be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or any conventional processor.

[0095] In some embodiments, memory 141 may be an internal storage unit of the processing equipment 14, such as a hard drive or memory of the processing equipment. In other embodiments, memory 141 may be an external storage device of the processing equipment, such as a plug-in hard drive, smart media card (SMC), secure digital card (SD), flash card, etc., provided on the processing equipment. Furthermore, memory 141 may include both internal and external storage units of the processing equipment. Memory 141 is used to store operating systems, applications, boot loaders, data, and other programs, such as program code for computer programs. Memory 141 may also be used to temporarily store data that has been output or will be output.

[0096] For example, computer program 142 may be divided into one or more modules / units, one or more of which are stored in memory 141 and executed by processor 140 to complete this application. One or more modules / units may be a series of computer program instruction segments capable of performing a specific function, which describe the execution process of computer program 142 in processing equipment 14.

[0097] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is merely an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit. Furthermore, the specific names of the functional units and modules are only for easy differentiation and are not intended to limit the scope of protection of this application. The specific working process of the units and modules in the above system can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0098] If the aforementioned integrated units are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, all or part of the processes in the methods of the above embodiments of this application can be implemented by a computer program instructing related hardware. This computer program can be stored in a computer-readable storage medium; when executed by a processor, the computer program can implement the steps of the various method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable files, or certain intermediate forms. Computer-readable media include: any entity or device capable of carrying computer program code to a device / terminal equipment, recording media, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signals, telecommunication signals, and software distribution media. Examples include USB flash drives, portable hard drives, magnetic disks, or optical disks. In some jurisdictions, according to legislation and patent practice, computer-readable media cannot be electrical carrier signals or telecommunication signals.

[0099] Embodiments of this application also provide a computer-readable storage medium storing a computer program that, when executed by a processor, implements the steps described in the various method embodiments above.

[0100] The embodiments of this application provide a computer program product that, when run on a terminal device, enables the terminal device to implement the steps in the various method embodiments described above.

[0101] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail or recorded in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0102] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0103] In the embodiments provided in this application, it should be understood that the disclosed apparatus / devices and methods can be implemented in other ways. For example, the apparatus / device embodiments described above are merely illustrative. For instance, the division of modules or units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between apparatuses or units may be electrical, mechanical, or other forms.

[0104] The units described above as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0105] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A laser pulse compensation method, characterized in that, include: Modulate the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated; The modulated laser pulse is amplified so that the difference between the rise time and fall time of the amplified laser pulse is changed compared to the difference between the rise time and fall time of the laser pulse to be compensated.

2. The laser pulse compensation method as described in claim 1, characterized in that, Modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated includes: The laser pulse to be compensated and the modulation signal arrive at the modulation module simultaneously; The modulation module alters the waveform of the rising edge of the laser pulse to be compensated, thereby increasing the rise time of the laser pulse to be compensated.

3. The laser pulse compensation method as described in claim 1, characterized in that, Modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated includes: The waveform of the laser pulse to be compensated is modulated by acousto-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated.

4. The laser pulse compensation method as described in claim 3, characterized in that, The method of modulating the waveform of the laser pulse to be compensated by acousto-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated includes: The laser pulse to be compensated and the modulation signal arrive at the acousto-optic modulation module simultaneously; The acousto-optic modulation module changes its own parameters according to the modulation signal, thereby changing the waveform of the laser pulse to be compensated, and thus changing the rise time and / or fall time of the laser pulse to be compensated.

5. The laser pulse compensation method as described in claim 4, characterized in that, The acousto-optic modulation module includes an acousto-optic crystal and a crystal adjustment unit; The acousto-optic modulation module changes its own parameters according to the modulation signal, thereby changing the waveform of the laser pulse to be compensated, and thus changing the rise time and / or fall time of the laser pulse to be compensated, including: The crystal adjustment unit changes the voltage applied to the acousto-optic crystal according to the modulation signal; The acousto-optic crystal alters the waveform of the laser pulse to be compensated, thereby changing the rise time and / or fall time of the laser pulse to be compensated.

6. The laser pulse compensation method as described in claim 1, characterized in that, Modulating the waveform of the laser pulse to be compensated to change the rise time and / or fall time of the laser pulse to be compensated includes: The waveform of the laser pulse to be compensated is modulated by electro-optic modulation to change the rise time and / or fall time of the laser pulse to be compensated. Alternatively, the waveform of the laser pulse to be compensated can be modulated by spatial light modulation to change the rise time and / or fall time of the laser pulse to be compensated.

7. A laser pulse compensation device, characterized in that, include: A modulation module for modulating the waveform of a laser pulse to be compensated, so as to change the rise time and / or fall time of the laser pulse to be compensated; A post-amplification module used to amplify modulated laser pulses so that the difference between the rise time and fall time of the amplified laser pulse changes compared to the difference between the rise time and fall time of the laser pulse to be compensated.

8. The laser pulse compensation device as described in claim 7, characterized in that, Also includes: The control system is used to emit a modulation signal so that the laser pulse to be compensated and the modulation signal arrive at the modulation module simultaneously.

9. A processing device, characterized in that, It includes a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor, when executing the computer program, implements the laser pulse compensation method as described in any one of claims 1 to 6.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, implements the laser pulse compensation method as described in any one of claims 1 to 6.

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