Pan scan head

Abstract

The application discloses a Pan scanning head and belongs to the field of measuring equipment. The Pan scanning head comprises a metal main body, a metal prism, a sapphire sheet group and a piezoelectric component. The metal main body has a receiving cavity penetrating through in the axial direction. The metal prism is movably arranged in the receiving cavity, and the outer side wall of the metal prism is provided with three bonding surfaces for bonding the first, second and third sapphire sheets respectively. The piezoelectric component comprises first, second and third piezoelectric devices in contact with the sapphire sheets. The adjusting assembly is composed of a metal spring and an adjusting bolt. The metal spring is arranged corresponding to the third piezoelectric device and clamps a sapphire ball. The adjusting bolt can change the pressure of the metal spring on the sapphire ball. The Pan scanning head provided by the application can finely adjust the pressure of the metal spring on the sapphire ball through the cooperation of the metal spring and the adjusting bolt, and then adjust the pressure of the piezoelectric device on the sapphire sheet, so that the scanning head can adapt to the temperature change in different working environments.

Description

Technical Field

[0001] This invention belongs to the field of measurement equipment technology, and specifically relates to a Pantheon scanning head. Background Technology

[0002] Scanning tunneling microscopy (STM) is an analytical tool with extremely high spatial resolution, enabling detailed observation and manipulation of material surfaces at the atomic scale. STM resolution can reach 10⁻⁶. -10 The scanning telescope (STM) enables precise measurement of the local density of states on a material surface and possesses the ability to locate and manipulate atoms. Therefore, STM is widely used in physics, chemistry, materials science, biology, and other disciplines to study the electronic, magnetic, and surface structural properties of materials. The scanning head, as the core component of a scanning microscope, directly affects the microscope's performance and accuracy. Existing scanning heads are mainly of two types: Pan-type and Beetle-type. The Pan-type scanning head, due to its compact structure, high rigidity, ease of operation, and strong expandability, is widely used in STM applications under special environments such as ultra-high vacuum, extremely low temperatures, and strong magnetic fields.

[0003] The core structure of a traditional Pantheon scanning head typically consists of a sapphire prism, a ceramic body, and multiple piezoelectric components. The sapphire prism, acting as a moving component, is usually held by piezoelectric ceramic sheets and driven by voltage to move precisely in the Z-axis. However, under extreme environmental conditions, such as ultra-high vacuum and extremely low temperatures (e.g., liquid helium temperatures), the significant differences in the thermal expansion coefficients of materials like ceramics, sapphire, and metals lead to varying degrees of thermal expansion as the temperature decreases, resulting in thermal stress problems within the structure.

[0004] In low-temperature environments, the difference in thermal expansion of materials due to temperature changes makes it difficult to maintain stable compressive stress between the piezoelectric ceramic sheet and the sapphire prism, thus affecting the accuracy of the scanning head. These differences in thermal expansion can cause the sapphire prism and the ceramic body to lose their ideal clamping force, resulting in unstable movement of the sapphire prism, or even failure to hold the sapphire prism, which in severe cases may lead to the sapphire prism falling off.

[0005] Therefore, it is necessary to provide a new solution to the above-mentioned technical problems. Summary of the Invention

[0006] The purpose of this invention is to provide a Pantheon scanning head that can solve the problems of structural instability and insufficient compressive stress in scanning head structures under extremely low temperature and ultra-high vacuum environments.

[0007] To achieve the above objectives, the technical solution provided by the present invention is as follows:

[0008] In a first aspect, the present invention provides a Pantheon scanning head, comprising: a metal body, a metal prism, a sapphire sheet assembly, and a piezoelectric component; the metal body has a receiving cavity extending along its axial direction; the metal prism is movably disposed within the receiving cavity, and the outer side wall of the metal prism is provided with a first adhesive surface, a second adhesive surface, and a third adhesive surface; the sapphire sheet assembly includes a first sapphire sheet, a second sapphire sheet, and a third sapphire sheet respectively bonded to the first adhesive surface, the second adhesive surface, and the third adhesive surface; the piezoelectric component includes components respectively abutting against the first sapphire sheet, the second sapphire sheet, and the third adhesive surface. A first piezoelectric device, a second piezoelectric device, and a third piezoelectric device are mounted on three sapphire wafers. The first and second piezoelectric devices are fixedly connected to the metal body. The adjustment assembly includes a metal spring connected to the metal body and an adjustment bolt screwed onto the metal body and the metal spring. The metal spring is positioned corresponding to the third piezoelectric device. A sapphire ball is held between the metal spring and the third piezoelectric device. By adjusting the adjustment bolt, the pressure of the metal spring on the sapphire ball can be changed to adjust the friction between the piezoelectric device and the sapphire wafer.

[0009] In one or more embodiments, the third piezoelectric device includes a metal pad and a shear piezoelectric ceramic sheet mounted on the metal pad, the shear piezoelectric ceramic sheet abutting against a third sapphire wafer.

[0010] In one or more embodiments, the metal pad is provided with a first retaining part that matches the sapphire ball, and the metal spring is provided with a second retaining part that matches the sapphire ball, the first retaining part and the second retaining part cooperate to retain the sapphire ball.

[0011] In one or more embodiments, the outer side wall of the metal body is provided with a first mounting port, a second mounting port and a third mounting port, the first mounting port, the second mounting port and the third mounting port being respectively provided corresponding to the first adhesive surface, the second adhesive surface and the third adhesive surface.

[0012] In one or more embodiments, the first piezoelectric device includes a first mounting plate and a shear piezoelectric ceramic sheet mounted on the first mounting plate, the first mounting plate being fixedly connected to the outer wall of the metal body, and the shear piezoelectric ceramic sheet passing through the first mounting opening and abutting against a first sapphire wafer; and / or the second piezoelectric device includes a second mounting plate and a shear piezoelectric ceramic sheet mounted on the second mounting plate, the second mounting plate being fixedly connected to the outer wall of the metal body, and the shear piezoelectric ceramic sheet passing through the second mounting opening and abutting against a second sapphire wafer.

[0013] In one or more embodiments, the two ends of the metal spring are screwed to the outer side wall of the metal body and cover the outside of the third mounting port.

[0014] In one or more embodiments, the adjusting bolt includes a threaded portion, a handle portion, and a nut portion, the nut portion being welded to the threaded portion, the handle portion being fixed to one end of the threaded portion, and the threaded portion being screwed onto the metal body and the metal spring piece, such that the metal spring piece is located between the metal body and the nut portion.

[0015] In one or more embodiments, the metal prism is provided with a mounting hole that extends through it along its axial direction, a scanning tube is inserted through the mounting hole, one end of the metal prism is fixedly connected to a fixing seat, and one end of the scanning tube is fixed to the fixing seat.

[0016] In one or more embodiments, the other end of the scanning tube is fixedly connected to a mounting base, and a probe extending axially is fixedly connected to the mounting base.

[0017] In one or more embodiments, the metal body and the metal prism are made of the same material, and the first adhesive surface, the second adhesive surface and the third adhesive surface are arranged at a 120° angle to each other.

[0018] Compared with existing technologies, the Pantheon scanning head provided by this invention, through the combined design of metal spring and adjusting bolt, can precisely adjust the pressure of the metal spring on the sapphire sphere, thereby adjusting the pressure of the piezoelectric device on the sapphire sheet, so that the scanning head can adapt to temperature changes in different working environments and maintain accurate scanning performance; the main body, metal prism and other main structures are made of the same material, which can reduce stress concentration and deformation problems caused by differences in the thermal expansion coefficients of materials; moreover, the metal prism and sapphire sheet structure are easy to process and form. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a perspective view of the Pantheon scanning head in one embodiment of the present invention;

[0021] Figure 2 This is an exploded view of the Pantheon scanning head in one embodiment of the present invention;

[0022] Figure 3This is a cross-sectional view of a Pantheon scanning head according to an embodiment of the present invention;

[0023] Figure 4 This is a perspective view of the metal body in one embodiment of the present invention;

[0024] Figure 5 This is a perspective view of a metal prism in one embodiment of the present invention;

[0025] Figure 6 This is a perspective view of the adjusting bolt in one embodiment of the present invention.

[0026] Explanation of key figure labels:

[0027] 1-Metal body, 11-First mounting port, 12-Second mounting port, 13-Third mounting port, 14-Receiving cavity, 2-Metal prism, 21-First bonding surface, 22-Second bonding surface, 23-Third bonding surface, 24-Mounting hole, 3-Sapphire wafer assembly, 31-First sapphire wafer, 32-Second sapphire wafer, 33-Third sapphire wafer, 4-Piezoelectric component, 41-First piezoelectric device, 411-First mounting plate, 4 2-Second piezoelectric device, 421-Second mounting plate, 43-Third piezoelectric device, 431-Metal gasket, 432-First holding part, 44-Shear piezoelectric ceramic sheet, 5-Adjusting assembly, 51-Metal spring, 511-Second holding part, 52-Adjusting bolt, 521-Threaded part, 522-Handle part, 523-Nut part, 53-Sapphire ball, 61-Scanning tube, 62-Fixed base, 63-Mounting base, 64-Probe. Detailed Implementation

[0028] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0029] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "comprises" shall be understood to include the stated elements or components without excluding other elements or other components.

[0030] This invention stems from an in-depth analysis of the problems existing in current Pantheon scanning head technology. While traditional scanning heads have significant advantages in achieving nanometer-level or even atomic-level resolution, in special environments such as ultra-high vacuum and extremely low temperatures, the significant differences in the coefficients of thermal expansion between component materials make it difficult to maintain stable compressive stress, leading to the risk of instability or even detachment of moving parts. This series of problems not only reduces the working accuracy and reliability of the scanning head but also limits its widespread application in extreme environments.

[0031] Based on this, the inventors considered the material matching, mechanical fit, and adjustment mechanisms of the key components in the scanning head structure as a whole, and proposed a technical solution that can adapt to temperature changes and maintain structural stability. The technical implementation of this invention lies in adopting an overall structural design. This design effectively solves the mechanical mismatch problem caused by inconsistent thermal expansion of materials in traditional solutions by constructing a system with unified material properties and a stable structural layout.

[0032] Specifically, by introducing a main frame with high rigidity and stability to accommodate moving parts into the overall structure, and placing a movable key component within this frame, the precise positioning and stable movement of this key component are achieved through a cooperating mechanism. The introduction of an adjustment mechanism allows for fine adjustment of the internal moving parts. This mechanism can adapt to changes in temperature environment while ensuring uniform and stable mechanical forces during movement, thus maintaining high-precision motion control under varying environmental conditions.

[0033] This invention optimizes material selection and structural design to match the thermal expansion of each component as much as possible, reducing stress changes caused by temperature fluctuations; and employs an adjustable mechanism to ensure that key moving parts maintain a precise and stable working state even when affected by external temperature and environmental changes.

[0034] Please refer to Figure 1 , Figure 2 and Figure 3 As shown, in one embodiment of the present invention, the Pantheon scanning head includes a metal body 1, a metal prism 2, a sapphire sheet assembly 3, a piezoelectric component 4, and an adjustment component 5.

[0035] The metal body 1 has a receiving cavity 14 extending through it along its axial direction. The metal prism 2 is movably disposed within the receiving cavity 14, and the outer side wall of the metal prism 2 is provided with a first adhesive surface 21, a second adhesive surface 22, and a third adhesive surface 23. The sapphire sheet assembly 3 includes a first sapphire sheet 31, a second sapphire sheet 32, and a third sapphire sheet 33 respectively bonded to the first adhesive surface 21, the second adhesive surface 22, and the third adhesive surface 23.

[0036] The piezoelectric assembly includes a first piezoelectric device 41, a second piezoelectric device 42, and a third piezoelectric device 43 respectively abutting against the first sapphire sheet 31, the second sapphire sheet 32, and the third sapphire sheet 33. The first piezoelectric device 41 and the second piezoelectric device 42 are fixedly connected to the metal body 1.

[0037] The adjustment assembly 5 includes a metal spring 51 connected to the metal body 1 and an adjustment bolt 52 screwed onto the metal body 1 and the metal spring 51. The metal spring 51 is disposed corresponding to the third piezoelectric device 43. A sapphire ball 53 is held between the metal spring 51 and the third piezoelectric device 43. By adjusting the adjustment bolt 52, the pressure of the metal spring 51 on the sapphire ball 53 can be changed to adjust the friction between the piezoelectric devices 41, 42 and 43 and the sapphire sheets 31, 31 and 33.

[0038] Please refer to Figure 1 and Figure 4 As shown, the metal body 1 serves as the supporting frame for the entire Pane scanning head, and has a receiving cavity 14 extending along its axial direction. The receiving cavity 14 provides space for the metal prism 2 to move precisely within the metal body 1. Furthermore, three adhesive surfaces are provided on the outer wall of the metal body 1, which provide support for the fixation of the sapphire sheet assembly 3. The metal body 1 can be made of a metal material with a low coefficient of thermal expansion to reduce thermal stress caused by temperature changes and ensure the stability of the structure at low temperatures. The metal body 1 is preferably a centrosymmetric structure, such as a regular hexagonal prism structure; the symmetric structure ensures that the driving force of the piezoelectric component 4 is uniformly transmitted to the metal prism 2.

[0039] Please refer to Figure 3 and Figure 5 As shown, the metal prism 2, as the core moving component of the scanning head, is housed within the receiving cavity 14 of the metal body 1. The outer wall of the metal prism 2 is provided with a first adhesive surface 21, a second adhesive surface 22, and a third adhesive surface 23, which are respectively bonded to the corresponding sheets of the sapphire sheet assembly 3. The function of the metal prism 2 is to achieve precise movement of the scanning head through cooperation with the piezoelectric component 4. The first adhesive surface 21, the second adhesive surface 22, and the third adhesive surface 23 are preferably arranged at a 120° angle to each other. By making the adhesive surfaces at a 120° angle to each other, the sapphire sheets can be evenly distributed on the outer side of the metal prism 2 during assembly, achieving a more balanced mechanical distribution, thereby optimizing the contact force distribution between the piezoelectric device and the sapphire sheets.

[0040] The 120° angle design ensures uniform spacing between the bonding surfaces, thereby guaranteeing that the pressure of the piezoelectric component 4 is applied evenly to the sapphire wafer. This maintains a consistent pressure distribution on the contact surface between the sapphire wafer and the piezoelectric ceramic sheet, preventing fluctuations in the scanning head's performance due to uneven pressure and ensuring consistency and stability of the scanning head under high-precision operation.

[0041] The sapphire sheet assembly 3 consists of three sapphire sheets, bonded to the three bonding surfaces of the metal prism 2. Sapphire material possesses excellent mechanical properties, a low coefficient of thermal expansion, and extremely high hardness, enabling it to remain stable at extremely low temperatures and effectively transmit the force generated by the piezoelectric component 4. The sapphire sheets not only work with the piezoelectric component 4 to fix the metal prism 2, but also bear and transmit the corresponding pressure under the action of the piezoelectric component 4, thereby achieving precise control of the scanning head. The sapphire sheets are bonded to the bonding surfaces using silver paste to ensure bonding strength at low temperatures.

[0042] The piezoelectric assembly 4 is the driving part of the scanning head, consisting of three sets of piezoelectric devices, which are in contact with the three thin sheets of the sapphire sheet group 3. The first piezoelectric device 41 and the second piezoelectric device 42 are fixedly connected to the metal body 1. By applying voltage, the piezoelectric ceramic sheet deforms, thereby driving the metal prism 2 to move precisely along the axial direction. The third piezoelectric device 43 has a similar function to the first two. The function of the piezoelectric assembly 4 is to achieve high-precision operation of the scanning head through voltage control. The deformation of the piezoelectric ceramic sheet drives the movement of the metal prism 2, enabling the scanning head to perform micro- and nano-level positioning and adjustment.

[0043] Please refer to Figure 3 As shown, the adjustment assembly 5 includes a metal spring 51 connected to the metal body 1 and an adjustment bolt 52 screwed onto the metal body 1 and the metal spring 51. The function of the adjustment bolt 52 is to precisely control the pressure generated by the piezoelectric assembly 4 by adjusting the pressure of the metal spring 51 on the sapphire ball 53. The sapphire ball 53 is held between the metal spring 51 and the third piezoelectric device 43. By adjusting the bolt 52, the pressure of the metal spring 51 on the sapphire ball 53 can be changed, thereby adjusting the friction between the piezoelectric devices 41, 42, and 43 and the sapphire sheets 31, 31, and 33. This adjustment mechanism allows the scanning head to adapt to changes in different temperature environments, ensuring precise pressure control even at low temperatures, thereby improving the accuracy and stability of the scanning head.

[0044] In one exemplary embodiment, please refer to Figure 1 , Figure 3 and Figure 4As shown, the outer side wall of the metal body 1 is provided with a first mounting port 11, a second mounting port 12 and a third mounting port 13, which are respectively provided for the first adhesive surface 21, the second adhesive surface 22 and the third adhesive surface 23.

[0045] The three mounting ports on the outer side wall of the metal body 1 provide mounting positions for the piezoelectric devices. The position and shape of these three mounting ports match the corresponding bonding surfaces to ensure that the piezoelectric devices do not shift during operation, thereby maintaining the high precision and stability of the scanning head.

[0046] Specifically, please refer to Figure 1 , Figure 2 and Figure 3 As shown, the first piezoelectric device 41 includes a first mounting plate 411 and a shear piezoelectric ceramic sheet 44 mounted on the first mounting plate 411. The first mounting plate 411 is fixedly connected to the outer wall of the metal body 1, and the shear piezoelectric ceramic sheet 44 passes through the first mounting opening 11 and abuts against the first sapphire sheet 31. The second piezoelectric device 42 includes a second mounting plate 421 and a shear piezoelectric ceramic sheet 44 mounted on the second mounting plate 421. The second mounting plate 421 is fixedly connected to the outer wall of the metal body 1, and the shear piezoelectric ceramic sheet 44 passes through the second mounting opening 12 and abuts against the second sapphire sheet 32.

[0047] The first piezoelectric device 41 and the second piezoelectric device 42 are each composed of a mounting plate and a shear piezoelectric ceramic sheet 44. The design and layout of these piezoelectric devices are to ensure precise drive and control of the scanning head, especially its stability in extremely low temperature and ultra-high vacuum environments. The core components of the first piezoelectric device 41 include a first mounting plate 411 and the shear piezoelectric ceramic sheet 44 mounted thereon. The first mounting plate 411 is fixed to the outer wall of the metal body 1, ensuring that the piezoelectric device will not shift or loosen during operation. By fixing the first mounting plate 411 to the outer wall of the metal body 1, a stable mechanical connection between the piezoelectric device and the metal body 1 is ensured, avoiding errors caused by vibration.

[0048] The shear piezoelectric ceramic sheet 44, as the core component of the piezoelectric device, primarily deforms by applying voltage, thereby driving the metal prism 2 to move axially. The shear piezoelectric ceramic sheet 44 passes through the first mounting port 11 and contacts the first sapphire sheet 31. Utilizing the hardness and stability of the sapphire sheet, it generates the necessary frictional force to propel the precise movement of the metal prism 2. The sapphire sheet not only provides a precise friction surface but also, due to its excellent thermal stability, effectively maintains contact stability with the piezoelectric ceramic sheet at extremely low temperatures, avoiding changes in contact force caused by temperature fluctuations.

[0049] The second piezoelectric device 42 is designed similarly to the first piezoelectric device 41, also including a second mounting plate 421 and a shear piezoelectric ceramic sheet 44 mounted on the second mounting plate 421. The second mounting plate 421 is also fixedly connected to the outer wall of the metal body 1 to ensure the stability of the piezoelectric device and prevent displacement or loosening during operation. The second piezoelectric device 42, through the deformation of the shear piezoelectric ceramic sheet 44, acts on the second sapphire sheet 32, generating a corresponding frictional force to drive the movement of the metal prism 2. The second sapphire sheet 32, similar in design to the first sapphire sheet 31, serves to stabilize the contact relationship between the piezoelectric ceramic sheet and the metal prism 2, ensuring precise motion control.

[0050] In one exemplary embodiment, please refer to Figure 2 and Figure 3 As shown, the third piezoelectric device 43 includes a metal pad 431 and a shear piezoelectric ceramic sheet 44 mounted on the metal pad 431, with the shear piezoelectric ceramic sheet 44 abutting against the third sapphire sheet 33.

[0051] As a basic support component, the metal gasket 431 is designed to ensure that the piezoelectric ceramic sheet can be stably connected to other components during operation and provide sufficient rigid support. The preferred material for the metal gasket 431 is a high-strength metal or alloy that can maintain its shape and strength in extremely low temperature and high vacuum environments, avoiding deformation or loosening due to environmental changes.

[0052] The shear piezoelectric ceramic sheet 44 is the core component of the third piezoelectric device 43 and exhibits the piezoelectric effect. When a voltage is applied to it, the shear piezoelectric ceramic sheet 44 deforms, typically along the shear direction of the ceramic sheet, producing a minute displacement. Through precise voltage control, the shear piezoelectric ceramic sheet 44 can deform along the axial direction of the metal prism 2. This deformation, through friction with the third sapphire sheet 33, drives the metal prism 2 to move precisely along the axial direction. Although the deformation of the shear piezoelectric ceramic sheet 44 is extremely small, through multiple precise controls, extremely high motion accuracy can be achieved, thus meeting the high-resolution requirements of the scanning head.

[0053] Specifically, please refer to Figure 3 As shown, the metal pad 431 is provided with a first retaining part 432 that matches the sapphire ball 53, and the metal spring 51 is provided with a second retaining part 511 that matches the sapphire ball 53. The first retaining part 432 and the second retaining part 511 cooperate to retain the sapphire ball 53.

[0054] The metal pad 431 and the metal spring 51 are respectively provided with retaining parts that match the sapphire ball 53. The first retaining part 432 and the second retaining part 511 work together to ensure that the sapphire ball 53 can be stably and accurately clamped in the appropriate position during the operation of the piezoelectric device. The sapphire ball 53 is used to provide a highly stable frictional contact surface and reduce motion errors caused by uneven friction or material instability.

[0055] The first retaining part 432 is disposed on the metal pad 431. The metal pad 431 serves as a basic support component, playing a role in load-bearing and stabilizing the entire piezoelectric device. The shape and size of the first retaining part 432 are designed to match the shape of the sapphire ball 53, and it can be a through hole to ensure that the sapphire ball 53 does not loosen or shift during operation. Through a tight fit with the sapphire ball 53, the first retaining part 432 can effectively fix the sapphire ball 53 in a suitable position, providing the necessary support for subsequent pressure adjustment and motion control.

[0056] Correspondingly, a second clamping part 511 is provided on the metal spring 51. The metal spring 51 is designed to provide adjustable elastic pressure, thereby adjusting the contact force between the sapphire ball 53 and other components. The metal spring 51 can adjust its deformation as the adjusting bolt 52 rotates, thereby changing the pressure on the sapphire ball 53. This adjustable pressure design ensures that the sapphire ball 53 can maintain a stable clamping state under different working environments, especially when the temperature changes drastically, thus avoiding damage caused by excessive pressure or loosening caused by insufficient pressure.

[0057] The cooperative design of the first clamping part 432 and the second clamping part 511 allows the metal pad 431 and the metal spring 51 to precisely clamp the sapphire ball 53. This design ensures that the sapphire ball 53 will not shift or fall off during the entire operation, guaranteeing the accuracy and stability of the scanning head. By adjusting the pressure of the metal spring 51 on the sapphire ball 53, the force applied by the piezoelectric device to the sapphire sheet can also be precisely controlled, avoiding excessive or insufficient friction and maintaining stable performance under different temperature conditions.

[0058] Furthermore, the two ends of the metal spring 51 are screwed onto the outer wall of the metal body 1 and cover the outer side of the third mounting port 13. By fixing the two ends of the metal spring 51 to the metal body 1 by screwing, not only is the stability of the metal spring 51 during operation ensured, but the deformation of the metal spring 51 is also easily adjusted, thereby applying precise pressure to the internal piezoelectric device.

[0059] The deformation performance of the metal spring 51 is one of its key characteristics. It can respond to the rotation of the adjusting bolt 52 and adjust the pressure of clamping the sapphire ball 53 by changing the curvature of the metal spring 51, thereby adjusting the pressure (friction) of the piezoelectric device on the sapphire sheet. This design can adjust the pressure under various working environments such as temperature changes and mechanical stress, ensuring that the scanning head can still operate stably in extreme environments.

[0060] In one exemplary embodiment, please refer to Figure 1 and Figure 6 As shown, the adjusting bolt 52 includes a threaded portion 521, a handle portion 522, and a nut portion 523. The nut portion 523 is welded to the threaded portion 521, and the handle portion 522 is fixed to one end of the threaded portion 521. The threaded portion 521 is screwed onto the metal body 1 and the metal spring piece 51, so that the metal spring piece 51 is located between the metal body 1 and the nut portion 523.

[0061] The threaded part 521 is the core part of the adjusting bolt 52, and it is connected to the metal body 1 and the metal spring 51 by threads. The threaded design between the metal body 1 and the metal spring 51 allows the adjusting bolt 52 to precisely control the deformation of the metal spring 51 during adjustment.

[0062] By rotating the adjusting bolt 52, the threaded part 521 causes the metal spring 51 to deform, thereby changing the pressure of the metal spring 51 on the sapphire ball 53. The pressure applied by the metal spring 51 directly affects the friction between the piezoelectric device and the sapphire sheet, thus finely adjusting the motion accuracy of the scanning head.

[0063] The handle 522 is designed to facilitate operator adjustment. Fixed to one end of the threaded portion 521, the handle 522 allows the operator to adjust the rotation of the threaded portion 521 by rotating the handle 522, thereby adjusting the deformation of the metal spring 51. The handle 522 is designed for easy gripping, facilitating adjustments during the experiment.

[0064] The nut portion 523 is welded to the threaded portion 521, positioning the metal spring 51 between the metal body 1 and the nut portion 523. The function of the nut portion 523 is to precisely adjust the pressure exerted by the metal spring 51 on the sapphire ball 53 by rotating it to adjust the tightening or releasing force of the metal spring 51. When the handle portion 522 is rotated, the nut portion 523 moves along with the threaded portion 521, thereby adjusting the distance between the metal spring 51 and the metal body 1, and controlling the pressure exerted by the metal spring 51 on the sapphire ball 53. In this way, the adjusting bolt 52 can achieve precise adjustment of the pressure applied to the sapphire ball 53.

[0065] In one exemplary embodiment, please refer to Figure 3 and Figure 5 As shown, the metal prism 2 has a mounting hole 24 that runs through it along its axial direction. A scanning tube 61 passes through the mounting hole 24. One end of the metal prism 2 is fixedly connected to a fixing seat 62, and one end of the scanning tube 61 is fixed to the fixing seat 62.

[0066] Mounting hole 24 provides space for mounting the scanning tube 61. The scanning tube 61 passes through the mounting hole 24 of the metal prism 2. As a key component of the Pantheon scanning head, the scanning tube 61 supports and guides the scanning probe 64. One end of the metal prism 2 is fixedly connected to the mounting base 62, which stabilizes the scanning tube 61 and provides further support. By firmly connecting one end of the metal prism 2 to the mounting base 62, it is ensured that the scanning tube 61 will not shift during the entire scanning process, thus guaranteeing scanning accuracy. In addition, the metal prism 2 also protects the scanning tube 61 and constrains the signal lines.

[0067] Specifically, please refer to Figure 3 As shown, a mounting base 63 is fixedly connected to the other end of the scanning tube 61, and a probe 64 extending axially is fixedly connected to the mounting base 63.

[0068] The mounting base 63 serves to support and fix the probe 64, ensuring a tight connection between the scanning tube 61 and the probe 64, thereby ensuring that the probe 64 maintains an accurate position and orientation throughout the scanning process. The mounting base 63 can be fixed by an interference fit threaded connection or welding to ensure that it is firmly fixed to the scanning tube 61 and to prevent loosening or displacement due to vibration or external force.

[0069] In one exemplary embodiment, the metal body 1, the metal prism 2, and the adjusting bolt 52 are preferably made of the same metal. Using metals of the same material can effectively reduce stress concentration caused by differences in the coefficients of thermal expansion between different materials. Especially in high-temperature or low-temperature operating environments, this material consistency can effectively prevent component loosening or deformation due to mismatched thermal expansion, thereby ensuring the long-term stable operation of the system.

[0070] In summary, the Pantheon scanning head provided by this invention, through the combined design of the metal spring and the adjusting bolt, can precisely adjust the pressure of the metal spring on the sapphire sphere, thereby adjusting the pressure of the piezoelectric device on the sapphire sheet. This allows the scanning head to adapt to temperature changes in different working environments and maintain accurate scanning performance. The main body, metal prism, and other main structures are made of the same material, which can reduce stress concentration and deformation problems caused by differences in the thermal expansion coefficients of the materials. Moreover, the metal prism and sapphire sheet structures are easy to process and form.

[0071] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0072] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A Pantheon scanning head, characterized in that, include: A metal body with a receiving cavity extending along its axial direction; A metal prism is movably inserted into the receiving cavity, and the outer side wall of the metal prism is provided with a first adhesive surface, a second adhesive surface and a third adhesive surface; A sapphire wafer assembly includes a first sapphire wafer, a second sapphire wafer, and a third sapphire wafer respectively bonded to the first bonding surface, the second bonding surface, and the third bonding surface; The piezoelectric component includes a first piezoelectric device, a second piezoelectric device, and a third piezoelectric device respectively abutting against the first sapphire sheet, the second sapphire sheet, and the third sapphire sheet, wherein the first piezoelectric device and the second piezoelectric device are fixedly connected to the metal body; The adjustment assembly includes a metal spring connected to the metal body and an adjustment bolt screwed onto the metal body and the metal spring. The metal spring is positioned corresponding to the third piezoelectric device. A sapphire ball is held between the metal spring and the third piezoelectric device. By adjusting the adjustment bolt, the pressure of the metal spring on the sapphire ball can be changed to adjust the friction between the first, second, and third piezoelectric devices and the first, second, and third sapphire sheets.

2. The Pantheon scanning head according to claim 1, characterized in that, The third piezoelectric device includes a metal pad and a shear piezoelectric ceramic sheet mounted on the metal pad, the shear piezoelectric ceramic sheet abutting against a third sapphire wafer.

3. The Pantheon scanning head according to claim 2, characterized in that, The metal pad has a first retaining part that matches the sapphire ball, and the metal spring has a second retaining part that matches the sapphire ball. The first retaining part and the second retaining part cooperate to retain the sapphire ball.

4. The Pantheon scanning head according to claim 1, characterized in that, The outer wall of the metal body is provided with a first mounting port, a second mounting port and a third mounting port, the first mounting port, the second mounting port and the third mounting port being respectively provided for the first adhesive surface, the second adhesive surface and the third adhesive surface.

5. The Pantheon scanning head according to claim 4, characterized in that, The first piezoelectric device includes a first mounting plate and a shear piezoelectric ceramic sheet mounted on the first mounting plate. The first mounting plate is fixedly connected to the outer wall of the metal body, and the shear piezoelectric ceramic sheet passes through the first mounting opening and abuts against the first sapphire wafer; and / or The second piezoelectric device includes a second mounting plate and a shear piezoelectric ceramic sheet mounted on the second mounting plate. The second mounting plate is fixedly connected to the outer wall of the metal body, and the shear piezoelectric ceramic sheet passes through the second mounting port and abuts against the second sapphire sheet.

6. The Pantheon scanning head according to claim 4, characterized in that, The two ends of the metal spring are screwed to the outer side wall of the metal body and cover the outside of the third mounting port.

7. The Pantheon scanning head according to claim 1, characterized in that, The adjusting bolt includes a threaded portion, a handle portion, and a nut portion. The nut portion is welded to the threaded portion, and the handle portion is fixed to one end of the threaded portion. The threaded portion is screwed onto the metal body and the metal spring piece, such that the metal spring piece is located between the metal body and the nut portion.

8. The Pantheon scanning head according to claim 1, characterized in that, The metal prism has a through-hole along its axial direction, and a scanning tube is inserted through the through-hole. One end of the metal prism is fixedly connected to a fixing seat, and one end of the scanning tube is fixed to the fixing seat.

9. The Pantheon scanning head according to claim 8, characterized in that, The other end of the scanning tube is fixedly connected to a mounting base, and a probe extending axially is fixedly connected to the mounting base.

10. The Pantheon scanning head according to claim 1, characterized in that, The metal body and the metal prism are made of the same material, and the first adhesive surface, the second adhesive surface and the third adhesive surface are set at a 120° angle to each other.

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