A robot accessory micron-level precision machining center

CN122645084APending Publication Date: 2026-08-28ZHEJIANG YUNXIN ROBOT TECHNOLOGY CO LTD +1
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Patent Information

Application Number
CN202610853456.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-12
Publication Date
2026-08-28

AI Technical Summary

Technical Problem

[0009]为解决现有技术中工件表面残留的切削液膜和微细碎屑难以彻底清除,导致定位基准失准和二次加工损伤,以及加工中心各环节缺乏基于实时检测的协同闭环控制,难以满足0.001mm高精度加工需求的问题,提出一种机器人配件微米级精密加工中心

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Abstract

The present application relates to the technical field of robot accessory machining, and particularly relates to a robot accessory micron-level precision machining center, which comprises a base, a protective cover, a cutting fluid collector, a transfer clamping mechanism, a cutting mechanism, an anti-interference cleaning mechanism and a control terminal; the cleaning head of the anti-interference cleaning mechanism is coaxially provided with a cavitation jet generator, an annular air knife generator and a negative pressure collector, which are used for stripping, drying and recycling the cutting fluid film and debris on the surface of a workpiece; a sensing assembly detects the position of the workpiece in real time, the control terminal drives the transfer clamping mechanism to translate, and the anti-interference cleaning mechanism is coordinated to remove the liquid film and debris before multiple machining; on this basis, through the cooperation of grating scale closed-loop feedback control, diamond tool machining, constant temperature of the machining area, accurate temperature control of the cutting fluid, cold light source illumination and three-point positioning clamping, thermal deformation and clamping deformation are effectively eliminated, and 0.001mm-level stable machining precision is achieved.
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Description

Technical Field

[0001] This invention relates to the field of robot parts processing technology, specifically to a micron-level precision machining center for robot parts, which can achieve an accuracy of 0.001 mm. Background Technology

[0002] In the field of robot manufacturing, the machining accuracy of core components (such as articulated arms) directly affects the overall performance, repeatability, and service life of the robot. As industrial robots develop towards higher precision, higher load capacity, and greater flexibility, extremely stringent requirements are placed on the dimensional tolerances, geometric tolerances, and surface quality of related components. Currently, the machining of such high-precision robot components often employs CNC machining centers in conjunction with specialized fixtures to perform multi-process composite machining operations such as milling, drilling, reaming, and tapping.

[0003] In existing technologies, cutting fluid spraying technology is widely used for cooling, lubrication, and chip removal to improve machining efficiency and surface quality. However, in multi-stage continuous machining (such as roughing followed by finishing) or precision machining scenarios, existing machining centers still have the following technical problems:

[0004] After a machining process is completed, a slurry-like liquid film composed of cutting fluid and micro-chips will adhere to the surface of the workpiece. This liquid film not only constitutes a non-negligible physical thickness error, but also causes subsequent high-precision sensors (such as laser displacement sensors and vision inspection probes) to obtain virtual position data on the surface of the liquid film during detection and positioning, rather than the position information of the actual surface of the workpiece, thus causing the positioning reference to be inaccurate.

[0005] Meanwhile, the surface tension of the liquid film will firmly adhere the fine chips to the workpiece surface, and conventional rinsing or blowing is difficult to completely remove them. The residual chips will be crushed or scratched by the tool during secondary processing (such as finishing), affecting the final surface quality and dimensional accuracy.

[0006] Moreover, in existing machining centers, the transfer, clamping, cutting, and cleaning of workpieces are often controlled independently, lacking collaborative closed-loop control based on real-time detection data, which makes it difficult to meet the machining requirements of high-precision parts.

[0007] Furthermore, in scenarios where micron-level machining accuracy is pursued, existing technologies generally suffer from limited equipment positioning accuracy and a lack of high-precision closed-loop feedback correction mechanisms. At the same time, temperature fluctuations in the machining environment can cause thermal expansion and contraction of workpieces and machine tool components. Existing machining centers lack systematic control measures for environmental factors such as constant temperature of the machining area, cutting fluid temperature, heat radiation from lighting, and operator body temperature. The resulting thermal deformation directly affects machining and measurement accuracy. Moreover, the impact of workpiece thermal balance on measurement results is not fully considered after machining. All of these factors together restrict further improvement of the machining accuracy of robot parts to the 0.001mm level.

[0008] Therefore, those skilled in the art provide a micron-level precision machining center for robot parts to solve the problems mentioned in the background art. Summary of the Invention

[0009] To address the problems in existing technologies, such as the difficulty in completely removing residual cutting fluid film and fine debris from workpiece surfaces, leading to inaccurate positioning references and secondary machining damage, as well as the lack of collaborative closed-loop control based on real-time detection in various stages of the machining center, which makes it difficult to meet the high-precision machining requirements of 0.001mm, a micron-level precision machining center for robot parts is proposed.

[0010] This invention provides a micron-level precision machining center for robot parts, comprising:

[0011] The base has an internal mounting groove.

[0012] A protective cover is mounted on a base and has an openable side door and a front door.

[0013] A cutting fluid collector is located at the rear end of the base;

[0014] The transfer and clamping mechanism is located at the bottom of the mounting slot and is used to clamp the workpiece and move the workpiece in the horizontal plane.

[0015] The cutting mechanism, installed at the top inside the protective cover, is used to cut the workpiece. The cutting mechanism is equipped with a sensing component for detecting the position of the workpiece.

[0016] An anti-interference cleaning mechanism is installed in the mounting slot and is used to clean the surface of the workpiece during multiple processing operations. The anti-interference cleaning mechanism includes a cleaning head, which has a cavitation jet generator, an annular air knife generator and a negative pressure recovery device arranged coaxially from the inside to the outside.

[0017] The control terminal is electrically connected to the transfer clamping mechanism, the cutting mechanism, the anti-interference cleaning mechanism, and the sensing components for coordinated control.

[0018] Among them, the cavitation jet generator is used to generate cavitation jets to strip the cutting fluid film and debris from the workpiece surface, the annular air knife generator is used to form an annular air curtain to blow away and dry the stripped material, and the negative pressure recovery device is used to suck up and recover the stripped material.

[0019] Preferably, the protective cover is equipped with an audible and visual alarm at one end of its top, a power distribution box is installed on the rear end of the protective cover, a control terminal is set on the front end of the protective cover and integrates a PLC controller and a human-machine interface, and a transparent observation window is installed on the front door.

[0020] Preferably, the transfer clamping mechanism includes a drive assembly, a moving plate, a fixing assembly, and a liquid collection tank;

[0021] The drive assembly is located at the bottom of the mounting slot and is used to drive the moving plate to reciprocate along the horizontal direction of the base. The fixing assembly is mounted on the moving plate and is used to clamp the workpiece. The liquid collection tank is formed on the top surface of the moving plate.

[0022] Preferably, the drive assembly includes a bracket, the bottom of which is fixed to the bottom surface of the mounting groove, and a limiting groove is formed on its inner side wall;

[0023] The bracket is equipped with a lead screw that rotates inside. One end of the lead screw is rotatably connected to the inner wall of the mounting groove, and the other end is connected to the output shaft of the motor that is fixed to the side wall of the mounting groove.

[0024] The bottom of the movable plate is provided with a threaded seat, which is threaded onto the lead screw, and its side is embedded in the limiting groove to form a sliding fit.

[0025] The lead screw is fitted with an accordion-style protective sleeve, which can adaptively expand and contract as the threaded seat moves and always covers the surface of the lead screw.

[0026] Preferably, the fixing component includes a placement plate, which is fixed to the upper surface of the movable plate. Two clamping hydraulic rods are symmetrically arranged on the placement plate along the front-back direction. Each clamping hydraulic rod has a clamping plate installed at its piston end. The piston ends of the two clamping hydraulic rods extend towards each other to clamp and fix the workpiece.

[0027] Two clamping hydraulic rods can move the workpiece in the front-to-back direction by differential control while keeping the workpiece clamped.

[0028] Preferably, the cutting mechanism includes a cutting head, one side of which is equipped with a tool magazine for storing various sizes of tools, and the other side is equipped with multiple cutting fluid spray nozzles. A sensing component is sleeved on the cutting head.

[0029] Preferably, the anti-interference cleaning mechanism further includes a three-axis robotic arm, with the cleaning head mounted at the end of the three-axis robotic arm. The three-axis robotic arm is used to drive the cleaning head to achieve spatial displacement in the front-back, left-right, and up-down directions.

[0030] The cavitation jet generator includes a central tube and a jet nozzle at its end. The central tube is a high-pressure stainless steel capillary tube, and the jet nozzle is made of synthetic ruby ​​or sapphire. The central tube is connected to an external high-pressure pure water pump through a pressure-resistant hose.

[0031] Preferably, the annular air knife generator includes an inner tube, which is coaxially sleeved on the outside of the central tube. An annular gap is formed between the inner wall of the inner tube and the outer wall of the central tube. The annular gap constitutes a high-pressure air chamber. The top of the high-pressure air chamber is provided with an air inlet pipe that is connected to an external compressed air source. The bottom of the high-pressure air chamber is provided with a nozzle with a smooth curved surface that tapers inward, so as to form an annular Laval nozzle structure.

[0032] Preferably, the negative pressure recovery device includes a housing, which is coaxially sleeved on the outside of the inner tube. A recovery cavity is formed between the inner wall of the housing and the outer wall of the inner tube. The bottom of the recovery cavity is an annular suction port, and the top of the housing is provided with a negative pressure pipe connected to an external vacuum generator. The bottom of the housing is also provided with an annular sealing ring.

[0033] Preferably, the sealing ring is made of rubber material. When the cleaning head is working, the sealing ring is attached to the surface of the workpiece to form a semi-closed micro-cavity. The jet impact point of the jet nozzle, the purging point of the nozzle, and the annular suction port of the recovery chamber are all located in this semi-closed micro-cavity.

[0034] As a further improvement to the above technical solution, the present invention provides a loading robotic arm and a loading tray at the left side door of the protective cover. The loading tray is used to place small workpieces to be processed in batches, and the loading robotic arm is used to grab the workpieces one by one and realize automated loading. A three-jaw clamping assembly is detachably installed on the moving plate of the transfer clamping mechanism. The three-jaw clamping assembly includes a mounting base and three clamping jaws set on its top. The three clamping jaws are distributed at three points to achieve stable support and limitation of the workpiece in a three-point positioning manner, avoiding the deformation of the workpiece caused by the concentration of clamping force in the traditional hard clamping method, thereby better ensuring the processing accuracy of small workpieces. When it is not necessary to process small workpieces, the three-jaw clamping assembly can be disassembled without affecting the original normal operation of the transfer clamping mechanism. At the same time, the anti-interference cleaning mechanism automatically adjusts the placement position of the three-jaw clamping assembly in the protective cover according to the installation position of the three-jaw clamping assembly to avoid spatial interference.

[0035] To achieve a stable machining accuracy of 0.001mm, this invention further limits the machining process conditions. In terms of machining equipment, each motion axis of the cutting mechanism adopts closed-loop feedback control with a grating ruler, and the positioning accuracy can reach 0.0005mm. Every displacement step is monitored and corrected in real time. The cutting tool adopts a diamond tool with the cutting edge radius ground to 0.002mm, which can achieve precise machining with extremely thin material removal.

[0036] In terms of environmental conditions, the ambient temperature of the processing area is controlled at 20±0.5℃, cold light sources are used for workshop lighting to avoid heat radiation and heating, operators wear constant temperature work clothes, and the cutting fluid is precisely temperature controlled while lubricating, with a temperature control accuracy of ±1℃ to prevent local overheating of the processing area.

[0037] In terms of operation process, the workpiece is clamped using the three-point positioning method. After processing, the workpiece is left to stand in the constant temperature zone for 30 minutes. After the workpiece temperature is fully balanced with the ambient temperature, the dimensions are then inspected. Through the combined and synergistic effect of the above-mentioned processing equipment, environmental conditions and operation process, the processing accuracy can be stably reached at the 0.001mm level.

[0038] The technical effects and advantages of this invention are as follows:

[0039] (1) The present invention is equipped with an anti-interference cleaning mechanism, which adopts a coaxial integrated cavitation jet generator, annular air knife generator and negative pressure recovery device. The cavitation jet uses micro-jet and shock wave generated by the collapse of cavitation bubbles to peel off the cutting fluid film and fine debris attached to the workpiece surface. The high-speed annular air curtain generated by the annular air knife generator not only shears and blows away the peeled impurities, but also dries the workpiece surface quickly. The negative pressure recovery device simultaneously sucks up and recovers the blown-away impurities and air mist. The three work together to realize the integrated operation of peeling-blowing-drying-recovery, ensuring that the workpiece surface is in a clean and dry state before multiple processing, effectively avoiding positioning reference errors and processing damage caused by the residue of cutting fluid film and debris, thereby improving the accuracy and quality of multi-process continuous processing.

[0040] (2) The cutting mechanism of the present invention is equipped with a sensing component, which can detect the position and posture of the workpiece in real time. The control terminal controls the transfer clamping mechanism to realize the horizontal movement of the workpiece based on the feedback data of the sensing component. On the other hand, by differentially controlling the two clamping hydraulic rods, the workpiece can be translated in the front and back directions while maintaining the clamping state. This collaborative operation of the left and right and front and back linkage precision positioning and anti-interference cleaning mechanism and the cutting mechanism based on real-time detection forms a closed-loop control, which effectively eliminates positioning errors and further improves the processing accuracy.

[0041] (3) Through further optimization of the processing conditions, in terms of processing equipment, the motion axes of the cutting mechanism are controlled by closed-loop feedback of grating ruler, and the positioning accuracy can reach 0.0005mm. Diamond tools are used to remove extremely thin materials. In terms of environmental conditions, the temperature of the processing area is controlled at 20±0.5℃. Cold light source lighting and cutting fluid are used for precise temperature control (±1℃) to effectively suppress the influence of thermal deformation on processing accuracy. In terms of operation process, the workpiece is clamped using a three-point positioning method to avoid clamping deformation. After processing, the workpiece is left to stand in a constant temperature zone for 30 minutes before inspection. Through the coordinated cooperation of the above equipment, environment and process, the processing accuracy can be stably reached at the 0.001mm level.

[0042] In summary, under the unified scheduling of the control terminal, the various functional modules in this invention can efficiently and stably complete the automated process from loading, transfer, positioning, cutting, cleaning, repositioning, reprocessing to unloading, reducing manual intervention and improving the overall production efficiency and accuracy of robot parts processing. Attached Figure Description

[0043] Figure 1 This application provides a three-dimensional embodiment of a robot accessory micron-level precision machining center. Figure 1 ;

[0044] Figure 2 This application provides a three-dimensional embodiment of a robot accessory micron-level precision machining center. Figure 2 ;

[0045] Figure 3 This application provides a three-dimensional embodiment of a robot accessory micron-level precision machining center. Figure 3 ;

[0046] Figure 4 This is a partial structural diagram of a micron-level precision machining center for robot accessories provided in an embodiment of this application. Figure 1 ;

[0047] Figure 5 This is a partial structural diagram of a micron-level precision machining center for robot accessories provided in an embodiment of this application. Figure 2 ;

[0048] Figure 6 This is a schematic diagram of the cutting mechanism in a micron-level precision machining center for robot accessories provided in this application embodiment;

[0049] Figure 7 This is a partial structural diagram of a micron-level precision machining center for robot accessories provided in an embodiment of this application. Figure 3 ;

[0050] Figure 8This application provides an embodiment of a robot accessory micron-level precision machining center. Figure 7 Schematic diagram of the structure at point A;

[0051] Figure 9 This is a partial exploded view of a micron-level precision machining center for robot accessories provided in an embodiment of this application;

[0052] Figure 10 This is an exploded view of a transfer and clamping mechanism in a micron-level precision machining center for robot accessories, as provided in an embodiment of this application.

[0053] Figure 11 This is a schematic diagram of the anti-interference cleaning mechanism in a micron-level precision machining center for robot accessories provided in this application embodiment;

[0054] Figure 12 This application provides an embodiment of a robot accessory micron-level precision machining center. Figure 11 Schematic diagram of the structure at point B;

[0055] Figure 13 This is a cross-sectional view of a cleaning head in a micron-level precision machining center for robot accessories, provided in an embodiment of this application.

[0056] Figure 14 This application provides an embodiment of a robot accessory micron-level precision machining center. Figure 13 A three-dimensional illustration;

[0057] Figure 15 This is a perspective view of a moving plate in a micron-level precision machining center for robot accessories provided in an embodiment of this application;

[0058] Figure 16 This is a schematic diagram of the structure of a robot accessory micron-level precision machining center equipped with a loading robot arm, a loading tray, and a three-gripper assembly, according to an embodiment of this application.

[0059] Figure 17 This application provides an embodiment of a robot accessory micron-level precision machining center. Figure 16 Schematic diagram of the structure at point C;

[0060] Figure 18 This is a perspective view of a three-jaw gripping assembly in a micron-level precision machining center for robot accessories provided in this application embodiment.

[0061] In the picture:

[0062] 1. Base; 2. Protective cover; 3. Cutting fluid collector; 4. Transfer and clamping mechanism; 5. Cutting mechanism; 6. Anti-interference cleaning mechanism;

[0063] 11. Mounting groove; 12. Sloping surface; 13. Cleaning structure; 14. Drain pipe;

[0064] 131. Liquid storage pipe; 132. Cleaning nozzle; 133. Water inlet connector;

[0065] 21. Side door; 22. Main door; 23. Control terminal; 24. Alarm; 25. Distribution box;

[0066] 31. Collection tank; 32. Filter screen; 33. Leveling support feet;

[0067] 41. Drive assembly; 42. Moving plate; 43. Fixing assembly; 44. Liquid collection tank;

[0068] 411. Bracket; 412. Limiting groove; 413. Lead screw; 414. Motor; 415. Bellows-style protective sleeve;

[0069] 431. Placement plate; 432. Clamping hydraulic rod; 433. Clamping plate;

[0070] 51. Cutting head; 52. Tool magazine; 53. Coolant spray nozzle; 54. Sensing components;

[0071] 61. Three-axis robotic arm; 62. Cleaning head;

[0072] 621. Central tube; 622. Jet nozzle; 623. Inner tube; 624. High-pressure air chamber; 625. Nozzle; 626. Inlet pipe; 627. Shell; 628. Recovery chamber; 629. Negative pressure pipe; 63. Sealing ring;

[0073] 7. Loading robotic arm; 8. Loading tray; 9. Three-jaw gripper assembly; 91. Mounting base; 92. Gripping claw. Detailed Implementation

[0074] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the invention to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical application of the invention, and to enable those skilled in the art to understand the invention and design various embodiments with various modifications suitable for a particular purpose.

[0075] Example 1

[0076] Please see Figures 1-15 The robot accessory micron-level precision machining center provided in this embodiment has the following overall structure: Figure 1 , Figure 2 and Figure 3As shown, the system includes a base 1, which serves as the support for the entire machining center. It mainly supports and installs other structural components to ensure the stability of the machining process from the foundation level. A protective cover 2 is provided on the upper part of the base 1. The protective cover 2 is used to cover the core components such as the machining execution structure installed on the base 1, providing safety protection, dust prevention, and sound insulation. At the same time, side doors 21 and front doors 22 are installed on the side and front of the protective cover 2, respectively. Through the multi-door structure design, it is convenient to debug, maintain, and load and unload the structural components inside the protective cover 2. In particular, the front door 22 is equipped with a transparent observation window, which is preferably made of tempered glass, allowing the operator to directly observe the actual machining status of the workpiece inside the protective cover 2.

[0077] Furthermore, an alarm 24 is installed at one end of the top of the protective cover 2. This alarm 24 is a sound and light alarm. When a malfunction or abnormality occurs in the machining center, it can emit flashing lights of different colors and a buzzer sound to promptly alert the operators. A power distribution box 25 is installed at the rear end of the protective cover 2. It integrates electrical components such as circuit breakers, switching power supplies, and drive modules to provide centralized power supply and safety protection for the entire machining center. At the same time, a control terminal 23 is installed at the front end of the protective cover 2. This control terminal 23 integrates a PLC controller and a human-machine interface screen. Operators can use it to set parameters and control the process of the automated operation of the entire device. As the control center of the machining center, the control terminal 23 communicates with various machining execution structures and the alarm 24 to coordinate the precise action of each structural component, thereby effectively improving machining accuracy. The specific control logic of the control terminal 23 and how it cooperates with the machining execution mechanism to achieve high-precision machining will be explained in detail below when the specific structure is described in conjunction with the corresponding drawings.

[0078] Furthermore, such as Figure 2 As shown, a cutting fluid collector 3 is installed at the rear end of the base 1. When the workpiece is processed inside the protective cover 2, cutting fluid is sprayed into the processing area to cool and lubricate it. After use, the cutting fluid, carrying the debris generated during processing, is collected by the base 1 and discharged into the cutting fluid collector 3. The cutting fluid collector 3 filters the cutting fluid, separating the debris and other impurities. The filtered cutting fluid is then transferred to an external purification unit for further purification, thereby realizing the reuse of the cutting fluid, which reduces production costs and environmental pollution.

[0079] In this embodiment, the cutting fluid collector 3 specifically includes a collection tank 31. A filter screen 32 is installed in the inner cavity of the collection tank 31. The cutting fluid collected in the base 1 falls onto the filter screen 32. After being filtered, the machining debris is trapped on the surface of the filter screen 32, while the filtered clean liquid flows into the bottom of the collection tank 31 and is then transported to the next processing stage. In order to ensure that the collection tank 31 can be placed stably during use and to avoid the cutting fluid from spilling out due to the tank tilting because of uneven ground, leveling support feet 33 are installed at both ends of the collection tank 31. The leveling support feet 33 can adopt conventional structures in the prior art. For example, they can be set as a foot cup structure with adjustable height by threads. The level of the collection tank 31 can be adjusted individually by rotating each support foot, which is easy to operate.

[0080] The structure inside the protective cover 2 is as follows Figure 4 , Figure 5 As shown, a transfer clamping mechanism 4 is provided at the upper end of the base 1. Simultaneously, a cutting mechanism 5 is installed on one side of the top of the protective cover 2. By opening the side door 21, the transfer clamping mechanism 4 can automatically extend outside the protective cover 2 for loading operations. At this time, the workpiece to be processed can be placed on the transfer clamping mechanism 4. This loading operation can be automated through the collaboration of an industrial robot. The industrial robot clamps the workpiece and accurately places it in the preset position of the transfer clamping mechanism 4. The transfer clamping mechanism 4 then transfers the workpiece to the processing area inside the protective cover 2, ensuring that the part to be processed on the workpiece precisely corresponds to the processing head of the cutting mechanism 5. This automated process is achieved through the detection and positioning of the sensing component 54 integrated in the cutting mechanism 5. The collected position signals are transmitted to the control terminal 23 in real time. The control terminal 23 drives the transfer clamping mechanism 4 to perform position compensation and adjustment based on the data, thereby achieving precise positioning of the workpiece processing position and improving processing accuracy. Similarly, after the workpiece is processed, the processed workpiece can be removed by the industrial robot and a new workpiece to be processed can be clamped and placed on the transfer clamping mechanism 4 for fixation. Using industrial robots for loading and unloading operations is more efficient and more accurate than manual operation, which can further improve the overall efficiency of workpiece processing. It should be noted that the industrial robot is not specifically shown in the accompanying drawings of this embodiment. The industrial robot is a conventional functional device in the field and can be selected and installed according to the workstation layout in actual production applications.

[0081] The specific structure of base 1 is as follows Figure 7As shown, the device has an internal mounting groove 11. The rear side of the bottom of the mounting groove 11 is set as an inclined surface 12. The inclined surface 12 gradually slopes downward towards the rear of the machining center, forming a liquid collection chamber together with the rear side wall of the mounting groove 11. This helps to naturally guide and collect the cutting fluid sprayed during the machining process into the liquid collection chamber. A drain pipe 14 is installed on the rear side wall of the mounting groove 11. The inlet of the drain pipe 14 is connected to the bottom of the liquid collection chamber, and its outlet is correspondingly set above the collection tank 31 in the cutting fluid collector 3. In this way, the used cutting fluid can be collected in the liquid collection chamber and then smoothly discharged into the cutting fluid collector 3 for treatment through the drain pipe 14.

[0082] Furthermore, a cleaning structure 13 is installed on the inner wall of the mounting groove 11. This cleaning structure 13 is connected to an external water supply component (not shown in the figure). The water supply component pressurizes the external water supply and delivers it to the cleaning structure 13. The cleaning structure 13 sprays out pressurized water to rinse the inner bottom and inclined surface 12 of the mounting groove 11, so as to wash away the residual debris and attached cutting fluid on its surface. The mixed liquid generated by rinsing also flows to the liquid collection chamber and enters the cutting fluid collector 3 through the drain pipe 14 for filtration and collection, thereby keeping the inside of the base 1 clean.

[0083] For details on the cleaning structure 13, please refer to [reference needed]. Figure 9 It includes a liquid storage pipe 131, which is arranged around the inner wall of the mounting groove 11 in a rectangular frame structure to cover the rinsing area. Multiple cleaning nozzles 132 are installed at intervals along the extension direction at the bottom of the liquid storage pipe 131 for rinsing the bottom of the mounting groove 11 downwards. A water inlet connector 133 is provided on the inner side of the pipe wall of the liquid storage pipe 131. The water inlet connector 133 is connected to an external water supply component. During operation, the water pressurized by the outside enters the inner cavity of the liquid storage pipe 131 through the water inlet connector 133, and then is evenly sprayed out through each cleaning nozzle 132 to achieve a comprehensive rinsing of the bottom of the mounting groove 11.

[0084] like Figure 7 and Figure 9 As shown, a transfer clamping mechanism 4 is provided at the bottom of the mounting groove 11. The transfer clamping mechanism 4 mainly includes a drive assembly 41, a moving plate 42, a fixing assembly 43, and a liquid collection tank 44.

[0085] The drive assembly 41 is located at the bottom of the mounting groove 11 and is used to drive the movable plate 42 mounted thereon to move back and forth along the horizontal direction of the base 1. Multiple fixing components 43 are mounted on the movable plate 42 for clamping the workpiece to be processed. The drive assembly 41 and the movable plate 42 cooperate with each other to realize the function of transferring the workpiece. That is, the workpiece is first transferred from the outside of the protective cover 2 to the processing area inside it. After processing is completed, the workpiece is moved from the inside of the protective cover 2 to the outside for unloading operation.

[0086] Furthermore, the specific structure of the transfer clamping mechanism 4 can be found in [reference needed]. Figure 10 The drive assembly 41 includes a bracket 411, the bottom of which is fixedly mounted on the bottom surface of the mounting groove 11. A limit groove 412 is formed on the inner side wall of the bracket 411 to guide and limit the movement of the moving plate 42. A lead screw 413 is also provided inside the bracket 411. One end of the lead screw 413 passes through the bracket 411 and is rotatably connected to the inner wall of the mounting groove 11, while the other end is drively connected to the output shaft of the motor 414. The motor 414 is fixedly mounted on the side wall of the mounting groove 11. A threaded seat (such as...) is provided at the bottom of the moving plate 42. Figure 15 As shown, the threaded seat is threaded onto the lead screw 413, and its side is correspondingly embedded in the limiting groove 412 to form a sliding fit;

[0087] During operation, the motor 414 drives the lead screw 413 to rotate. Through the threaded transmission, the threaded seat slides along the limiting groove 412, thereby driving the moving plate 42 and the workpiece on it to move smoothly, realizing the action of the moving plate 42 extending out of the protective cover 2. When the motor 414 reverses, it can drive the moving plate 42 back into the protective cover 2, thus completing the workpiece transfer operation. In order to protect the transmission structure, an accordion-style protective sleeve 415 is also fitted on the lead screw 413. The accordion-style protective sleeve 415 can adaptively expand and contract with the movement of the threaded seat and always cover the surface of the lead screw 413, thereby effectively preventing impurities such as machining chips and cutting fluid from entering the threaded pair, ensuring the transmission accuracy and service life between the lead screw 413 and the threaded seat.

[0088] In addition, the top surface of the movable plate 42 is provided with crisscrossing liquid collection grooves 44. The liquid collection grooves 44 can guide the cutting fluid that is spilled on the movable plate 42 to quickly collect and flow down, so that it flows more smoothly into the liquid collection chamber at the bottom of the mounting groove 11, and avoids the accumulation of cutting fluid on the surface of the movable plate 42.

[0089] The fixing assembly 43 includes a placement plate 431, which is fixedly installed on the upper end face of the movable plate 42 to support the workpiece to be processed. On the placement plate 431, two clamping hydraulic rods 432 are symmetrically arranged in the front-back direction. Each clamping hydraulic rod 432 has a clamping plate 433 installed on its piston end. When the piston ends of the two clamping hydraulic rods 432 extend towards each other synchronously, the clamping plates 433 on both sides can be driven to move closer to each other, thereby clamping and fixing the workpiece placed on the placement plate 431. Conversely, when the piston ends retract synchronously, the workpiece can be released.

[0090] It is worth noting that the fixing component 43 in this embodiment not only has the function of clamping the workpiece, but also can work together to achieve fine adjustment of the workpiece's position in the front-back direction. Specifically, the moving plate 42 can drive the workpiece to move in the horizontal direction, while the two clamping hydraulic rods 432 can drive the workpiece to move in the front-back direction through differential control while keeping the workpiece clamped and fixed. For example, when it is necessary to move the workpiece forward, the rear clamping hydraulic rod 432 increases its stroke by a certain amount, while the front clamping hydraulic rod 432 shortens its extension stroke by the same amount. The clamping force of the clamping plates 433 on both sides remains unchanged, and the workpiece moves forward smoothly under the drive of the clamping plates. In this way, the front-back position of the workpiece can be adjusted without releasing the workpiece or interrupting the clamping state.

[0091] The position adjustment of the workpiece in the left-right and front-back directions is uniformly coordinated and controlled by the control terminal 23. The control terminal 23 outputs control commands after processing the actual position data of the workpiece detected by the sensing component 54 in the cutting mechanism 5 and the coordinate position of the area to be processed. On the one hand, it controls the motor 414 to drive the lead screw 413 to rotate, so as to realize the precise displacement of the moving plate 42 in the left-right direction. On the other hand, it synchronously controls the stroke differential of the two clamping hydraulic rods 432 to realize the precise positioning of the workpiece in the front-back direction. In this way, through the linkage adjustment in the left-right and front-back directions, the starting position of processing can be automatically found, which effectively improves the processing accuracy.

[0092] like Figure 6 As shown, the cutting mechanism 5 includes a cutting head 51. A tool magazine 52 is configured on one side of the cutting head 51 to store various sizes of cutting tools to support automatic tool changing during the machining process. Multiple cutting fluid nozzles 53 are provided on the other side of the cutting head 51. The head of the cutting fluid nozzle 53 is designed with an adjustable angle. With this adjustable angle design, when changing different cutting tools, the direction can be finely adjusted according to the specific position of the cutting edge of the tool to ensure that the sprayed cutting fluid is always accurately aimed at the cutting edge area, thereby achieving effective cooling and lubrication of the cutting area.

[0093] It should be noted that a sensing component 54 is also mounted on the cutting head 51. The sensing component 54 may include a vision inspection camera, a displacement sensor, and other sensing elements for non-contact precision measurement of the workpiece. The sensing component 54 can accurately determine the actual position and posture of the workpiece, accurately identify and locate the area to be processed, and transmit the collected measurement data to the control terminal 23 in real time. After receiving the data, the control terminal 23 performs calculation and processing, and then sends the subsequent control commands to the corresponding execution components, such as the transfer and clamping mechanism 4 and the anti-interference cleaning mechanism 6 for cleaning the workpiece, which will be described later. In this way, the various structural components are coordinated and controlled to achieve automated operation, which improves processing accuracy and also effectively improves processing efficiency.

[0094] like Figure 5 , Figure 7 and Figure 8 As shown, an anti-interference cleaning mechanism 6 is also provided in the mounting slot 11. The anti-interference cleaning mechanism 6 is mainly used in the process scenario where the cutting mechanism 5 performs multiple processing (i.e., at least two processing) on ​​the workpiece. The reason is that after the first processing, the sprayed cutting fluid will mix with the debris and other impurities generated during processing and adhere to the processing area of ​​the workpiece. If the cutting fluid is used to rinse directly, although some impurities can be washed away, a thin and uneven slurry liquid film will still remain on the surface of the workpiece after rinsing. This liquid film will have two adverse effects: First, the liquid film itself constitutes an uncontrollable error source. When the high-precision sensing component 54 performs measurement, what is measured is actually the surface of the liquid film rather than the actual surface of the workpiece, resulting in inaccurate positioning reference. Second, the surface tension of the liquid film will have an adsorption effect on the tiny debris particles, making them difficult to remove completely. The residual particles will interfere with the cutting accuracy during the second processing. Therefore, when cutting a workpiece that requires secondary or multiple processing, the anti-interference cleaning mechanism 6 must be used to thoroughly clean the processing area of ​​the workpiece to eliminate the above-mentioned interference factors and ensure processing accuracy.

[0095] The start-up and operation of the anti-interference cleaning mechanism 6 are all controlled and driven by the control terminal 23. Specifically, after one processing step is completed, the control terminal 23 first controls the cutting mechanism 5 to pause and return to a safe position, and then sends a start command to the anti-interference cleaning mechanism 6 to drive it to clean the workpiece surface according to the preset path. During the cleaning process, the control terminal 23 can accurately control the cleaning range and action parameters of the anti-interference cleaning mechanism 6 according to the processing area position data previously fed back by the sensing component 54. After determining that the conditions for secondary processing are met, the cutting mechanism 5 is then controlled to execute the next processing step. In this way, through the timing coordination and closed-loop control of the control terminal 23, the anti-interference cleaning mechanism 6, the transfer clamping mechanism 4, the cutting mechanism 5 and the sensing component 54 work together to ensure that the workpiece surface is always clean during multiple processing steps, thereby further improving the overall processing accuracy.

[0096] For details on the structure of the anti-interference cleaning mechanism 6, please refer to... Figure 11 , Figure 12 , Figure 13 as well as Figure 14 It includes a three-axis robotic arm 61 and a cleaning head 62 installed at its end. The three-axis robotic arm 61 is used to drive the cleaning head 62 to achieve omnidirectional spatial displacement in front and back, left and right, and up and down. Its specific structure can be implemented using conventional technology in the field. The key technical point of this embodiment is mainly the construction of the cleaning head 62.

[0097] The cleaning head 62 adopts a coaxial enclosed structure design, with a cavitation jet generator, an annular air knife generator, and a negative pressure recovery unit coaxially nested from the inside out. The cavitation jet generator is located in the innermost center, the negative pressure recovery unit is located in the outermost layer, and the annular air knife generator is located between the two. The three start up synchronously and work together to achieve cavitation stripping, air curtain shearing and drying, and synchronous negative pressure capture and recovery of cutting fluid and debris in the workpiece processing area.

[0098] Specifically, the cavitation jet generator includes a central tube 621 and a jet nozzle 622. The central tube 621 is a high-pressure stainless steel capillary tube with a relatively small outer diameter (e.g., 1.5 mm to 3 mm), and the jet nozzle 622 is installed at its end. The jet nozzle 622 is preferably made of synthetic ruby ​​or sapphire material, and its nozzle diameter is between 0.1 mm and 0.3 mm, thus forming a high-pressure jet structure. The upper end of the central tube 621 is connected to an external high-pressure pure water pump through a pressure-resistant hose, and the high-pressure pure water pump provides a stable pressure source. During operation, high-pressure pure water... The jet is ejected at a high speed close to the speed of sound from the nozzle 622, forming an extremely fine jet. The jet moves at high speed in the surrounding still air, generating a velocity gradient, which induces cavitation effect. That is, a large number of tiny bubbles filled with vapor are generated inside the liquid. When the jet hits the workpiece surface covered by the cutting fluid film and chips, these bubbles collapse asymmetrically near the workpiece surface, instantly releasing a powerful micro-jet and shock wave. This shatters and peels off the fine chips and the original cutting fluid film attached to the workpiece surface into tiny particles and droplets, causing them to detach from the workpiece surface.

[0099] The annular air knife generator is used for air curtain shearing and drying of stripped fine particles and droplets. It includes an inner tube 623, which is coaxially sleeved on the outside of a central tube 621. An annular gap is formed between the inner wall of the inner tube 623 and the outer wall of the central tube 621, constituting a high-pressure air chamber 624. An air inlet pipe 626 is located at the top of the high-pressure air chamber 624, connecting to an external compressed air source. A nozzle 625 is located at the bottom of the high-pressure air chamber 624, featuring a smooth, inwardly contracting curved surface that forms an annular shape. In operation, the Laval nozzle structure allows high-pressure air to enter the high-pressure air chamber 624 through the air inlet pipe 626 and accelerate at the nozzle 625, forming a high-speed annular air curtain, i.e., an annular air knife, that converges towards the central axis. At the same moment of cavitation jet stripping operation, the high-speed annular air curtain obliquely impacts the area around the jet's point of action, forming an inwardly contracting air curtain barrier that shears and blows away the stripped impurities and atomized water droplets from the workpiece surface. At the same time, the high-speed airflow itself is dry and clean, which can dry the residual moisture on the workpiece surface, achieving a drying effect.

[0100] The negative pressure recovery unit is used to simultaneously remove impurities and water mist blown off the surface of the workpiece by the annular air knife. It includes a housing 627, which is coaxially sleeved on the outside of the inner tube 623. The inner wall of the housing 627 and the outer wall of the inner tube 623 form a recovery chamber 628. The bottom of the recovery chamber 628 is an annular suction port, and the top is provided with a negative pressure pipe 629, which is connected to an external vacuum generator. At the same time, an annular sealing ring 63 is also provided at the bottom of the housing 627. The sealing ring 63 is preferably made of rubber material. When the cleaning head 62 is working, the sealing ring 63 fits and covers the surface of the workpiece, forming a semi-closed micro-chamber. This ensures that the jet impact point, air knife blowing point and negative pressure suction port inside the cleaning head 62 are in a relatively closed space with only a small amount of leakage from the outside. When the stripped material is blown off the surface of the workpiece by the annular air curtain, the recovery chamber 628 draws in the material with a large flow rate. The airflow blown out from the annular air knife carries the stripped material into the negative pressure recovery chamber 628 and is discharged through the pipeline.

[0101] Therefore, after the cleaning head 62 completes a cleaning operation, the attached cutting fluid and debris impurities on the workpiece surface covered by the cleaning head 62 are removed and dried, providing a clean workpiece surface condition for subsequent finishing.

[0102] Example 2

[0103] Please see Figures 16-18 In this embodiment, another micron-level precision machining center for robot accessories is provided. Its main difference from Embodiment 1 lies in the adjustment of the feeding method and the workpiece clamping structure.

[0104] In embodiment 1, the transfer clamping mechanism 4 moves to the right to extend the protective cover 2. By opening the right side door 21, it cooperates with the industrial robot to complete the loading and unloading of workpieces. In this embodiment 2, a loading robot arm 7 and a loading tray 8 are provided at the side door 21 on the left side of the protective cover 2. This configuration is specifically designed for smaller workpieces that are precision machined. Several workpieces to be processed can be placed on the loading tray 8 in batches, and the loading robot arm 7 clamps and picks them up one by one to realize the automated loading of small workpieces.

[0105] To accommodate the clamping requirements of small workpieces, this embodiment also adds a three-jaw clamping component 9. The three-jaw clamping component 9 is detachably installed on the moving plate 42 in the transfer clamping mechanism 4. When it is necessary to process smaller workpieces, the three-jaw clamping component 9 is installed on the moving plate 42; when it is not necessary to process such workpieces, the three-jaw clamping component 9 can be disassembled without affecting the original normal operation of the transfer clamping mechanism 4. At the same time, the anti-interference cleaning mechanism 6 can automatically adjust the placement position of the three-jaw clamping component 9 in the protective cover 2 according to the installation position of the three-jaw clamping component 9 on the moving plate 42, so that there is no spatial interference between the two during the operation, and the coordinated operation of each mechanism is guaranteed.

[0106] The three-jaw clamping assembly 9 specifically includes a mounting base 91 and clamping jaws 92. The mounting base 91 is fixedly installed on the movable plate 42, and the top of the mounting base is provided with clamping jaws 92. There are three clamping jaws 92, which are distributed in three points. Unlike the hard clamping method in Embodiment 1, which uses two clamping plates to apply force in opposite directions, the three-jaw clamping assembly 9 in this Embodiment 2 uses a three-point positioning method to achieve stable support and limit of the workpiece, so as to avoid deformation of the precision-machined small workpiece due to the concentration of clamping force, thereby better ensuring the machining accuracy of the workpiece.

[0107] When machining a workpiece, the loading robotic arm 7 picks up the workpiece from the loading tray 8, places it on the three-jaw clamping assembly 9, and positions it using the clamping jaws 92. Subsequently, the control terminal 23 controls the transfer clamping mechanism 4 to move the workpiece to the machining area inside the protective cover 2. The cutting mechanism 5 performs precise positioning and machining on the workpiece based on the detection data from the sensor assembly 54. During the machining process, if multiple cuts are required, the anti-interference cleaning mechanism 6 cleans the workpiece surface according to the aforementioned control logic to ensure the accuracy of secondary machining.

[0108] Example 3

[0109] This embodiment further limits the processing conditions of the robot parts micron-level precision machining center described in Embodiment 1 or Embodiment 2, so that the final processing accuracy of the machining center can be stably reached at the 0.001mm level.

[0110] It should be noted that achieving error control at the 0.001mm level depends on the coordinated operation of three aspects: processing equipment, environmental conditions, and operating procedures.

[0111] In terms of processing equipment, the cutting mechanism 5 in this machining center adopts closed-loop feedback control of grating rulers for each motion axis, so that the positioning accuracy reaches 0.0005mm. Every step of movement is monitored and corrected in real time. The cutting tool of the cutting mechanism 5 is a diamond tool, and its cutting edge radius is ground to 0.002mm. During cutting, it can achieve precise processing by removing extremely thin material, avoiding errors introduced by excessive cutting.

[0112] Regarding environmental conditions, the processing area must maintain a constant temperature, controlled at 20±0.5℃. Considering the thermal expansion and contraction characteristics of metallic materials, a 1℃ change in temperature results in approximately 0.012mm of expansion and contraction for a 1-meter-long part, far exceeding the allowable error range for precision machining. Therefore, cold light sources are used for workshop lighting to avoid heat radiation irradiating the workpieces; operators wear temperature-controlled work clothes to prevent body heat from causing localized temperature rises on the parts; simultaneously, the cutting fluid not only serves as a lubricant but also requires precise temperature control, with an accuracy of ±1℃, to prevent localized overheating in the processing area from affecting machining accuracy.

[0113] In terms of operation process, the workpiece clamping adopts the three-point positioning method as described in Example 2 instead of the traditional hard clamping method to avoid the workpiece deformation caused by the concentration of clamping force. In the measurement stage after processing, the processed workpiece needs to be placed in the constant temperature zone for 30 minutes to allow its overall temperature to be fully balanced with the ambient temperature before dimensional inspection is carried out to eliminate the influence of thermal deformation on the measurement results.

[0114] Through the combined and synergistic effect of the above-mentioned processing equipment, environmental conditions and operating processes, the high-precision machining center of this embodiment can stably control the workpiece processing accuracy at the micrometer level, which can achieve the accuracy requirement of 0.001mm.

[0115] Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of the present invention without inventive effort should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in the present invention, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A micron-level precision machining center for robot parts, comprising: The base (1) has an installation groove (11) inside it; The protective cover (2) is mounted on the base (1). The protective cover (2) is equipped with an openable side door (21) and a front door (22). A cutting fluid collector (3) is located at the rear end of the base (1); Its characteristic is that it further includes: The transfer clamping mechanism (4) is located at the bottom of the mounting groove (11) and is used to clamp the workpiece and drive the workpiece to move in the horizontal plane. The cutting mechanism (5) is installed on the top inside the protective cover (2) and is used to cut the workpiece. The cutting mechanism (5) is equipped with a sensing component (54) for detecting the position of the workpiece. An anti-interference cleaning mechanism (6) is set in the mounting slot (11) and is used to clean the surface of the workpiece during multiple processing. The anti-interference cleaning mechanism (6) includes a cleaning head (62), which has a cavitation jet generator, an annular air knife generator and a negative pressure recovery device arranged coaxially from the inside to the outside. The control terminal (23) is electrically connected to the transfer clamping mechanism (4), the cutting mechanism (5), the anti-interference cleaning mechanism (6) and the sensing component (54) for coordinated control; Among them, the cavitation jet generator is used to generate cavitation jets to strip the cutting fluid film and debris from the workpiece surface, the annular air knife generator is used to form an annular air curtain to blow away and dry the stripped material, and the negative pressure recovery device is used to suck up and recover the stripped material.

2. The robot accessory micron-level precision machining center according to claim 1, characterized in that, The protective cover (2) is equipped with an audible and visual alarm (24) at one end of the top. A power distribution box (25) is installed on the rear end of the protective cover (2). A control terminal (23) is set on the front end of the protective cover (2) and integrates a PLC controller and a human-machine interface. A transparent observation window is installed on the main door (22).

3. The robot accessory micron-level precision machining center according to claim 1, characterized in that, The transfer clamping mechanism (4) includes a drive assembly (41), a moving plate (42), a fixing assembly (43), and a liquid collection tank (44). The drive assembly (41) is located at the bottom of the mounting slot (11) and is used to drive the moving plate (42) to move back and forth along the horizontal direction of the base (1). The fixing assembly (43) is mounted on the moving plate (42) and is used to clamp the workpiece. The liquid collection tank (44) is formed on the top surface of the moving plate (42).

4. The robot accessory micron-level precision machining center according to claim 3, characterized in that, The drive assembly (41) includes a bracket (411), the bottom of which is fixed to the bottom surface of the mounting groove (11), and a limiting groove (412) is provided on its inner side wall. The bracket (411) is rotatably equipped with a lead screw (413). One end of the lead screw (413) is rotatably connected to the inner wall of the mounting groove (11), and the other end is connected to the output shaft of the motor (414) fixed to the side wall of the mounting groove (11). The bottom of the movable plate (42) is provided with a threaded seat, which is threaded onto the lead screw (413), and its side is embedded in the limiting groove (412) to form a sliding fit. The lead screw (413) is fitted with an accordion-style protective sleeve (415), which can adaptively expand and contract with the movement of the threaded seat and always cover the surface of the lead screw (413).

5. The robot accessory micron-level precision machining center according to claim 3, characterized in that, The fixing component (43) includes a placement plate (431), which is fixed to the upper surface of the moving plate (42). Two clamping hydraulic rods (432) are symmetrically arranged on the placement plate (431) along the front-back direction. Each clamping hydraulic rod (432) has a clamping plate (433) installed on its piston end. The piston ends of the two clamping hydraulic rods (432) extend towards each other to clamp and fix the workpiece. The two clamping hydraulic rods (432) can move the workpiece in the front-to-back direction by differential control while maintaining the workpiece clamping.

6. The robot accessory micron-level precision machining center according to claim 1, characterized in that, The cutting mechanism (5) includes a cutting head (51), a tool magazine (52) for storing various sizes of cutting tools is provided on one side of the cutting head (51), and multiple cutting fluid spray pipes (53) are provided on the other side. The sensing component (54) is sleeved on the cutting head (51).

7. The robot accessory micron-level precision machining center according to claim 1, characterized in that, The anti-interference cleaning mechanism (6) also includes a three-axis robotic arm (61), and a cleaning head (62) is installed at the end of the three-axis robotic arm (61). The three-axis robotic arm (61) is used to drive the cleaning head (62) to achieve spatial displacement in the front-back, left-right and up-down directions. The cavitation jet generator includes a central tube (621) and a jet nozzle (622) at its end. The central tube (621) is a high-pressure stainless steel capillary tube, and the jet nozzle (622) is made of artificial ruby ​​or sapphire. The central tube (621) is connected to an external high-pressure pure water pump through a pressure-resistant hose.

8. The robot accessory micron-level precision machining center according to claim 7, characterized in that, The annular air knife generator includes an inner tube (623), which is coaxially sleeved on the outside of the central tube (621). An annular gap is formed between the inner wall of the inner tube and the outer wall of the central tube (621). The annular gap constitutes a high-pressure air chamber (624). The top of the high-pressure air chamber (624) is provided with an air inlet pipe (626) that is connected to an external compressed air source. The bottom of the chamber is provided with a nozzle (625) with a smooth curved surface that tapers inward, so as to form an annular Laval nozzle structure.

9. The robot accessory micron-level precision machining center according to claim 7, characterized in that, The negative pressure recovery device includes a housing (627), which is coaxially sleeved on the outside of the inner tube (623). A recovery chamber (628) is formed between its inner wall and the outer wall of the inner tube (623). The bottom of the recovery chamber (628) is an annular suction port, and its top is provided with a negative pressure pipe (629) connected to an external vacuum generator. The bottom of the housing (627) is also provided with an annular sealing ring (63).

10. The robot accessory micron-level precision machining center according to claim 9, characterized in that, The sealing ring (63) is made of rubber material. When the cleaning head (62) is working, the sealing ring (63) fits against the surface of the workpiece to form a semi-closed micro chamber. The jet impact point of the jet nozzle (622), the purging point of the nozzle (625) and the annular suction port of the recovery chamber (628) are all located in this semi-closed micro chamber.