Hot stove apparatus

Abstract

The application discloses a heat furnace device, comprising: a purification platform device and at least one reaction furnace, the reaction furnace is used for accommodating a sheet and reacting the sheet. The purification platform device is used for carrying and temporarily storing the sheet, and the purification platform device comprises a rack, at least one temporary storage rack and at least one boat pushing mechanism, the temporary storage rack is arranged on the inner side wall of the rack, and a stand is arranged in the middle of the rack. The purification platform device further comprises a boat moving mechanism arranged in the rack. The boat pushing mechanism is arranged on the stand in the middle of the rack to avoid the side of the rack, so that the components in the rack and the reaction furnace can be maintained along the side of the rack. Meanwhile, the temporary storage rack is arranged on one side of the rack and can move to the outside of the rack along the width direction of the rack to realize feeding and discharging of the rack, and moving to the outside of the rack along the length direction of the rack relative to the temporary storage rack, which helps to reduce the occupied space of the heat furnace device.

Description

Technical Field

[0001] This application relates to the field of photovoltaic material manufacturing equipment, and more particularly to a hot furnace device. Background Technology

[0002] In the production of photovoltaic materials, a reactor is required to process the sheets. A purification cabinet is also installed at the furnace opening to cool the sheets and purify the air. However, both the purification cabinet and the reactor present problems such as inconvenient maintenance and large space occupation. Summary of the Invention

[0003] In view of this, this application provides a hot furnace device to solve the problems of inconvenient maintenance and large space occupation of clean cabinets and reaction furnaces.

[0004] One embodiment of this application provides a hot furnace device, including: a clean bench assembly and at least one reaction furnace. The reaction furnace is used to accommodate and react with sheets, and has an axial direction. The clean bench assembly and the reaction furnace are arranged along a first horizontal direction, which is parallel to the axial direction of the reaction furnace. The clean bench assembly is used for transporting and / or temporarily storing the sheets. The clean bench assembly includes a frame, at least one temporary storage rack, and at least one pusher mechanism. The temporary storage rack is disposed on the inner side wall of the frame along a second horizontal direction. The at least one temporary storage rack is movable to the outside of the frame along a direction perpendicular to the second horizontal direction, wherein the first horizontal direction intersects the second horizontal direction. A column is disposed at the middle of the frame along the second horizontal direction, and the pusher mechanism is disposed on the column. The pusher mechanism is used to transfer the sheets between the frame and the reaction furnace. The clean bench assembly also includes a boat-moving mechanism disposed within the frame. The boat-moving mechanism is used to transfer the sheets between the temporary storage rack and the pusher mechanism.

[0005] In the above embodiments, a pusher mechanism is mounted on a column in the middle of the frame to avoid obstructing the sides of the frame, thereby facilitating maintenance of the components and reactor within the frame along the sides. Simultaneously, a temporary storage rack is mounted on one side of the frame and can move outwards along the width of the frame to enable loading and unloading. Furthermore, its movement outwards along the length of the frame relative to the temporary storage rack helps reduce the space occupied by the furnace equipment.

[0006] In some embodiments, the temporary storage rack is configured to be slidably connected to the rack. The clean bench assembly also includes a sliding assembly comprising a second slide rail and a slider, the second slide rail extending in a direction parallel to a second horizontal direction. The slider is connected to the temporary storage rack and is also slidably connected to the second slide rail, the slider being configured to support the temporary storage rack within the rack and move it along the second horizontal direction to the outside of the rack.

[0007] In some embodiments, the second slide rail has two opposite ends along a second horizontal direction, one end of the second slide rail is connected to the frame, and the other end of the second slide rail extends from inside the frame to the outside of the frame.

[0008] In some embodiments, the second slide rail has two opposite ends along a second horizontal direction, the second slide rail being entirely located within the frame, and one end of the second slide rail extending outward from within the frame relative to the other end. At least a portion of the slider is configured to slide relative to the second slide rail to the outside of the frame, and the slider synchronously moves the temporary storage rack to the outside of the frame.

[0009] In some embodiments, the clean bench device further includes a storage drive assembly comprising a motor and a timing belt. The motor is connected to the frame, and the timing belt is fixedly connected to a temporary storage rack or slider. The timing belt is also drively connected to the motor. The motor is configured to drive the timing belt to rotate and synchronously move the temporary storage rack in a second horizontal direction relative to the frame.

[0010] In some embodiments, the number of boat-pushing mechanisms is at least two, and the number of temporary storage racks is at least two. All boat-pushing mechanisms are distributed along the Z-axis direction, with one boat-pushing mechanism and one temporary storage rack positioned opposite each other along the second horizontal direction. The Z-axis, the first horizontal direction, and the second horizontal direction are perpendicular to each other. Each boat-pushing mechanism includes a first slide rail and a boat-pushing assembly disposed within the frame. The first slide rail extends along the first horizontal direction, and the boat-pushing assembly is slidably connected to the first slide rail. The boat-pushing assembly is configured to carry the sheet material and is also configured to transfer the sheet material between the frame and the reactor along the first horizontal direction. The first slide rail of each boat-pushing mechanism has a length direction, a width direction, and a height direction. The length direction of the first slide rail is parallel to the first horizontal direction, the height direction of the first slide rail is parallel to the second horizontal direction, and the width direction of the first slide rail is parallel to the Z-axis, wherein the width of the first slide rail is greater than its height. During the process of the boat-pushing mechanism transferring the sheet material between the temporary storage rack and the corresponding boat-pushing assembly of the boat-pushing mechanism, the boat-pushing mechanism also drives the sheet material along the second horizontal direction between two adjacent first slide rails in the Z-axis direction.

[0011] In some embodiments, the boat-moving mechanism includes two working sections, two third slide rails, and two fourth slide rails. The two working sections are located on opposite sides of the frame along a first horizontal direction, with a carrier for carrying the sheet material between them. The two working sections are capable of supporting the carrier. Both the fourth and third slide rails extend along a second horizontal direction. One third slide rail is slidably connected to one working section and one fourth slide rail, respectively. The fourth slide rails are connected to the frame, and both fourth slide rails are located on the side of the first slide rail facing the temporary storage rack. The third slide rails can drive the working sections to move relative to the fourth slide rails along the second horizontal direction. All third slide rails can also extend relative to the fourth slide rails along the second horizontal direction to the boat-pushing assembly. All working sections can move relative to the third and fourth slide rails from the boat-pushing assembly to the corresponding temporary storage rack, transferring the carrier from the temporary storage rack to the corresponding boat-pushing assembly; or all working sections can move relative to the third and fourth slide rails from the temporary storage rack to the corresponding boat-pushing assembly, transferring the carrier from the boat-pushing assembly to the corresponding temporary storage rack.

[0012] In some embodiments, the boat-moving mechanism further includes two fifth slide rails, each extending along the Z-axis. The Z-axis, the first horizontal direction, and the second horizontal direction are perpendicular to each other. The fifth slide rails are disposed between the temporary storage rack and the first slide rail, and are slidably connected to the end of the fourth slide rail closest to the first slide rail. The two fifth slide rails, two third slide rails, two fourth slide rails, and two working parts of the boat-moving mechanism are located on both sides of the temporary storage rack along the first horizontal direction. The fourth slide rail can move relative to the fifth slide rail, the temporary storage rack, and the boat-moving mechanism along the Z-axis, and synchronously drive the third slide rails and the working parts to move.

[0013] In some embodiments, the boat pushing mechanism is rotatably connected to the frame, and the rotation axis of the boat pushing mechanism is parallel to the first horizontal direction.

[0014] In some embodiments, a portion of the temporary storage rack is rotatably connected to the frame on the side away from the pusher mechanism along a second horizontal direction, and the rotation axis of the temporary storage rack is parallel to the first horizontal direction.

[0015] In some embodiments, the reactor can be moved from the reaction apparatus into the frame along a first horizontal direction.

[0016] In some embodiments, the reactor is capable of moving within the frame in a second horizontal direction and moving out of the frame. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a furnace device provided in one embodiment of this application.

[0018] Figure 2 for Figure 1 A schematic diagram of the structure of the cleanroom unit after removing part of the door panel.

[0019] Figure 3 for Figure 2 Side view of the air purification unit in the middle.

[0020] Figure 4 for Figure 1 A top view of the air purification unit in the middle.

[0021] Figure 5 for Figure 2 A schematic diagram of the boat-pushing mechanism in the diagram.

[0022] Figure 6 for Figure 1 A schematic diagram of the air purifier unit from another perspective after removing part of the door panel.

[0023] Figure 7 for Figure 2 Enlarged view of point A in the image.

[0024] Figure 8 for Figure 3 Enlarged view of point B in the image.

[0025] Figure 9 for Figure 6 A schematic diagram of the working status of the temporary storage rack.

[0026] Figure 10 for Figure 6 A schematic diagram of the working status of another temporary storage rack in the system.

[0027] Figure 11 for Figure 9 A partial structural diagram.

[0028] Figure 12 for Figure 4 A schematic diagram of the working status of the temporary storage rack.

[0029] Figure 13 for Figure 4 A schematic diagram of the working status of another temporary storage rack in the system.

[0030] Explanation of main component symbols 10. Hot furnace equipment; 11. Cleaning table device; 111. Frame; 1110. Column; 1111. Pushing area; 1112. Temporary storage area; 1113. First opening; 1114. Second opening; 1115. Door panel; 112. Pushing mechanism; 1121. First slide rail; 1122. Pushing assembly; 1123. Pushing paddle; 1124. First slider; 113. Temporary storage rack; 1131. First component; 1130. Support block; 1132. Connecting plate; 1133. First side plate; 1134. 1135. Second component; 116. Material storage drive assembly; 1161. Motor; 1162. Synchronous belt; 1163. Synchronous shaft; 114. Sliding assembly; 1141. Second slide rail; 1142. Second slider; 1143. Limit block; 115. Detection assembly; 1151. Baffle; 1152. Photoelectric switch; 117. Boat moving mechanism; 1171. Third slide rail; 1172. Fourth slide rail; 1173. Fifth slide rail; 12. Reaction device; 121. Reactor; 20. Carrier. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0032] The terms “top,” “upper,” “lower,” “front,” “back,” and similar expressions used in this article are for illustrative purposes only.

[0033] The terms “first”, “second”, etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implying the quantity, specific order, or primary and secondary relationship of the indicated technical features.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0035] In the production of photovoltaic materials, horizontal equipment is usually used for high-temperature reactions of photovoltaic materials. Not only does horizontal equipment have a higher production capacity, but the processing reaction is also more uniform. However, horizontal equipment occupies a larger area.

[0036] Please see Figures 1 to 3One embodiment of this application provides a horizontal hot furnace device 10, including a reaction device 12 and a clean bench device 11. The clean bench device 11 includes a frame 111 and a temporary storage rack 113, a boat-moving mechanism 117, and a boat-pushing mechanism 112 disposed within the frame 111. The frame 111 has a length direction. The reaction device 12 and the frame 111 are distributed along a first horizontal direction, and both the first horizontal direction and the length direction of the frame 111 are parallel to the Y-axis. A port (not shown) is provided on the side of the reaction device 12 facing the frame 111. Before the reaction device 12 starts working, the boat-moving mechanism 117 transfers a carrier 20 carrying sheet material on the temporary storage rack 113 to the boat-pushing mechanism 112. The boat-pushing mechanism 112 moves the carrier 20 together with the sheet material through the port into the reaction device 12, so that the reaction device 12 can perform reaction processing on the sheet material. After the sheet is processed, the pusher mechanism 112 moves the carrier 20 along with the sheet from the reaction device 12 to the frame 111. The transfer mechanism 117 then moves the sheet from the pusher mechanism 112 to the temporary storage rack 113 for cooling. The temporary storage rack 113 transfers the processed sheet to the outside of the frame 111 and then transfers the sheet to be processed back into the frame 111. This cycle is repeated to achieve automated processing of the sheet.

[0037] The purification unit 11 also has the function of purifying the air. By purifying the air inside the rack 111, the risk of air impurities coming into contact with the sheet and causing sheet contamination can be reduced when the sheet is placed inside the rack 111 for cooling.

[0038] In some embodiments, the sheet is a photovoltaic material such as a silicon wafer or a solar cell.

[0039] In some embodiments, the carriers 20 are all part of the furnace equipment 10.

[0040] In some embodiments, the carrier 20 is made of graphite, silicon carbide, or quartz.

[0041] In some embodiments, please refer to Figures 2 to 4 The frame 111 also has a width direction and a height direction. The second horizontal direction and the width direction of the frame 111 are both parallel to the X-axis, and the Z-axis is parallel to the height direction of the frame 111. The Z-axis, Y-axis and X-axis are perpendicular to each other. The X-axis and Y-axis are both parallel to the horizontal plane, and the positive direction of the Z-axis is the direction in which gravity is vertically upward.

[0042] In some embodiments, please refer to Figure 1The reaction apparatus 12 includes at least one reactor 121, in which a quartz tube is provided for accommodating a sheet or a carrier 20 carrying the sheet. The axis of the reactor 121 extends along the Y-axis direction. One end of the reactor 121 facing the frame 111 is provided with a furnace opening (not marked), which extends to a port so that the pusher mechanism 112 can pass the sheet through the port and the furnace opening and transfer the sheet between the reactor 121 and the frame 111.

[0043] In some embodiments, please refer to Figures 2 to 4 The number of boat-pushing mechanisms 112 is two or more, and all boat-pushing mechanisms 112 are distributed along the Z-axis direction. The number of reactors 121 is the same as the number of boat-pushing mechanisms 112. By increasing the number of reactors 121, the processing efficiency of the reaction device 12 is improved. One reactor 121 is correspondingly set with one boat-pushing mechanism 112, so that one boat-pushing mechanism 112 can transfer the sheet between the frame 111 and one reactor 121, thereby improving the efficiency of loading and unloading the reactor 121.

[0044] In some embodiments, please refer to Figures 2 to 4 The number of temporary storage racks 113 is two or more, and all temporary storage racks 113 are distributed at intervals along the Z-axis direction. At least one temporary storage rack 113 corresponds to one pusher mechanism 112, so that the boat handling mechanism 117 can transfer the sheet between one temporary storage rack 113 and one pusher mechanism 112. Storing the sheet removed from the reactor 121 in one temporary storage rack 113 helps to extend the storage time of the sheet in the temporary storage rack 113, thereby extending the cooling time of the sheet in the frame 111, which is conducive to the full cooling of the sheet.

[0045] In some embodiments, please refer to Figures 2 to 5The frame 111 includes a pusher area 1111 and a temporary storage area 1112 arranged along the X-axis, with a column 1110 positioned between the pusher area 1111 and the temporary storage area 1112. The pusher mechanism 112 includes a first slide rail 1121 and a pusher assembly 1122. The first slide rail 1121 is connected to the column 1110 and extends along the Y-axis. The pusher assembly 1122 is located in the pusher area 1111 and is used to support the sheet material; the pusher assembly 1122 is slidably connected to the first slide rail 1121. A transfer mechanism 117 and a temporary storage rack 113 are both located in the temporary storage area 1112, with the connection point between the transfer mechanism 117 and the frame 111 located on the side of the temporary storage area 1112 facing the pusher area 1111. During operation, the transfer mechanism 117 transfers the sheet material between the pusher assembly 1122 and the temporary storage rack 113 along the X-axis. The pusher assembly 1122 moves along the Y-axis direction on the first slide rail 1121 relative to the frame 111 and the reactor 121, and transfers the sheet in the frame 111 along with the carrier 20 into the reactor 121, or transfers the sheet in the reactor 121 along with the carrier 20 into the frame 111.

[0046] The first slide rail 1121 is positioned between the pusher area 1111 and the temporary storage area 1112, and the connection point of the moving mechanism 117 is located on the side of the temporary storage area 1112 closer to the pusher area 1111. This allows the first slide rail 1121 to support and guide the movement of the pusher assembly 1122 and the moving mechanism 117 to transport the sheet material. At the same time, the first slide rail 1121 and the moving mechanism 117 are both located in the middle of the frame 111. This ensures that the first slide rail 1121 and the moving mechanism 117 are respectively away from the two sides of the frame 111 in the width direction, and respectively avoid the two sides of the frame 111. This allows the operator to maintain the pusher assembly 1122 or the temporary storage rack 113 from the outside of the frame 111, avoiding the need for the operator to enter the narrow frame 111 to perform the work, thus improving the convenience of maintenance.

[0047] Understandably, since the boat-moving mechanism 117 is located in the boat-pushing area 1111, the temporary storage rack 113 can be connected to the side of the frame 111 away from the boat-pushing area 1111 along the X-axis direction, so that the boat-moving mechanism 117 can transport the sheet material between the boat-pushing mechanism 112 and the temporary storage rack 113, which helps to shorten the distance that the boat-moving mechanism 117 transports the sheet material. Furthermore, the temporary storage rack 113, the boat-moving mechanism 117, the first slide rail 1121, and the boat-pushing assembly 1122 can be sequentially distributed along the X-axis direction, which helps to improve the utilization rate of the space within the frame 111, making the structure of the clean bench device 11 simpler and more compact.

[0048] In some embodiments, please refer to Figure 3 , Figure 4 and Figure 6At least one temporary storage rack 113 is movably disposed relative to the frame 111 and carries the sheet material from inside the frame 111 to one side of the frame 111 along the X-axis direction. This facilitates external loading and unloading equipment to retrieve the sheet material from the temporary storage rack 113, or to place the sheet material on the temporary storage rack 113, which then moves the sheet material into the frame 111. By moving the sheet material to one side of the frame 111 along the X-axis direction (i.e., to one side of the frame 111 in the width direction) via the temporary storage rack 113, compared to moving it to one side of the frame 111 away from the reaction device 12 along the Y-axis direction (i.e., to one side of the frame 111 in the length direction), the space occupied by the temporary storage rack 113 and the frame 111 in the Y-axis direction is reduced. Simultaneously, the moving distance of the temporary storage rack 113 is shortened, thereby reducing the time it takes for the temporary storage rack 113 to move the sheet material while maintaining a constant movement speed, thus improving the working efficiency of the furnace equipment 10.

[0049] In some embodiments, two or more temporary storage racks 113 can be movably arranged relative to the rack 111 and transfer sheets between inside and outside the rack 111 to improve the efficiency of loading and unloading the rack 111.

[0050] In some embodiments, please refer to Figure 2 The frame 111 has a first opening 1113 on the side away from the temporary storage area 1112 along the X-axis. When the operator performs maintenance on the push boat assembly 1122, the operator can extend from outside the frame 111 to inside the frame 111 to perform work through the first opening 1113, and move relevant parts into the frame 111 for replacement.

[0051] In some embodiments, please refer to Figure 6 The rack 111 is also provided with a second opening 1114 to allow maintenance of other components within the rack 111. For example, at least part of the second opening 1114 is located on the side of the rack 111 away from the push boat area 1111, so that the temporary storage rack 113 can move out of the rack 111 along the second opening 1114.

[0052] In some embodiments, please refer to Figure 6The surface of the frame 111 is provided with a door panel 1115. The door panel 1115 is movably connected to the outer surface of the frame 111 and covers the first opening 1113 or the second opening 1114. When no maintenance or loading / unloading of the frame 111 is required, the door panel 1115 can cover all the openings, thereby maintaining a sealed environment inside the frame 111. This reduces the risk of heat exchange between the frame 111 and the outside environment, the risk of dust and other impurities inside the frame 111 contaminating the outside environment, or the risk of outside air or dust entering the frame 111 and contaminating the sheet material.

[0053] In some embodiments, the door panel 1115 is detachably mounted from the frame 111.

[0054] In other embodiments, the door panel 1115 is rotatably or slidably connected to the frame 111.

[0055] In some embodiments, the reactor 121 can enter the frame 111 along the Y-axis direction, and the reactor 121 can also be moved from inside the frame 111 to outside the frame 111 through the first opening 1113. When maintenance of the reactor 121 (or quartz tube) is required, the reactor 121 (or quartz tube) is entered into the frame 111 along the Y-axis direction, and moved from inside the frame 111 to outside the frame 111 through the first opening 1113. Finally, the intact reactor 121 is moved back into the frame 111 along the first opening 1113, and then moved out of the frame 111 along the Y-axis direction. It is understood that, compared to the need for operators or working equipment to enter the narrow frame 111 to perform disassembly and assembly operations on the reactor 121, operators or working equipment can operate and move the reactor 121 from outside the frame 111 through the first opening 1113, which helps to reduce the obstruction of the frame 111 or the components inside the frame 111 to the reactor 121, achieving the effect of facilitating operation.

[0056] In some embodiments, the furnace equipment 10 further includes a loading / unloading device (not shown) for releasing or retrieving sheets to a temporary storage rack 113 outside the frame 111. The loading / unloading device is located on the side of the frame 111 away from the reaction device 12. When the reactor 121 and other components are moved out of the frame 111 away from the reaction device 12, it is necessary to disassemble the loading / unloading device outside the frame 111 to eliminate the obstruction of movement of the reactor 121 or other components. The reactor 121 is moved out of the frame 111 through the first opening 1113, and other components are moved out of the frame 111 through the first opening 1113 and the second opening 1114. This avoids the need to disassemble the loading / unloading device outside the frame 111, which helps to improve maintenance efficiency.

[0057] In some embodiments, please refer to Figure 2 and Figure 5The boat propeller assembly 1122 includes a propeller 1123 for carrying the sheet, carrier 20, or carrier 20. A first slider 1124 is slidably connected to the first slide rail 1121. One end of the propeller 1123 is connected to the first slider 1124. The propeller 1123 extends from the first slider 1124 toward the reactor 121 along the Y-axis direction, so as to increase the support area of ​​the propeller 1123 and enable the propeller 1123 to stably carry the carrier 20.

[0058] In some embodiments, the propeller 1123 is detachably connected to the first slider 1124 so that when the reactor 121 needs to be replaced, the propeller 1123 can be removed from the first slider 1124 and the removed propeller 1123 can be moved out of the frame 111, thereby reducing the risk of interference between the propeller 1123 and the reactor 121 entering the frame 111.

[0059] In some embodiments, the length direction of the first slide rail 1121 is parallel to the Y-axis direction. In the Y-axis direction, the length of the first slide rail 1121 is greater than the length of the reactor 121, so that the first slider 1124 moves to the end of the first slide rail 1121 away from the reaction device 12, thereby reducing the risk of interference between the first slider 1124 and the reactor 121 entering the frame 111.

[0060] In other embodiments, the first slider 1124 is fixedly connected to the pusher 1123. The first slider 1124 drives the pusher 1123 to move to the end of the first slide rail 1121 away from the reaction device 12, so that the pusher 1123 avoids the path of the reactor 121 entering the frame 111.

[0061] In some embodiments, the boat pushing mechanism 112 further includes a boat pushing driver (not identified), which is disposed on the first slide rail 1121 and connected to the first slider 1124. The boat pushing driver is a driving element with output reciprocating force, such as a cylinder, hydraulic cylinder, electric actuator, lead screw module or motor 1161 and synchronous belt 1162 module, so as to realize that the boat pushing driver drives the first slider 1124 to move and drives the boat pushing assembly 1122 to reciprocate on the first slide rail 1121.

[0062] The width of the first slide rail 1121 is greater than its height. When the height direction of the first slide rail 1121 is parallel to the Z-axis direction, the distance between the upper and lower first slide rails 1121 is too small. The boat-moving mechanism 117 cannot move the sheet along the X-axis between the two first slide rails 1121. Therefore, the boat-moving mechanism 117 needs to pass above or below all the first slide rails 1121 to bypass them before it can transfer the sheet between the temporary storage rack 113 and the boat-pushing assembly 1122. In some embodiments, please refer to... Figure 2 , Figure 3and Figure 5 The first slide rail 1121 also has a width direction and a height direction. The Y-axis is parallel to the length direction of the frame 111, the height direction of the first slide rail 1121 is parallel to the X-axis direction, and the width direction of the first slide rail 1121 is parallel to the Z-axis. The parallel arrangement of the height direction of the first slide rail 1121 with the Z-axis direction helps to increase the distance between the upper and lower first slide rails 1121 in the Z-axis direction, thereby reducing the risk of the first slide rail 1121 interfering with the sheet material or carrier 20 passing along the X-axis direction. During operation, the boat-moving mechanism 117 can move the carrier 20 and the sheet material along the X-axis direction between the upper and lower first slide rails 1121, and transfer the carrier 20 and the sheet material between the corresponding temporary storage rack 113 and the boat-pushing assembly 1122, thereby shortening the distance the boat-moving mechanism 117 moves the sheet material and improving the efficiency of the boat-moving mechanism 117 in moving the carrier 20.

[0063] Meanwhile, by rotating the first slide rail 1121 90° along the axis parallel to the Y-axis, so that the pusher assembly 1122 is connected to the first slide rail 1121 in its original position, the distance between the reactors 121 in the Z-axis direction can be kept constant. This satisfies the work requirements of transferring the sheet between the pusher assembly 1122 and the temporary storage rack 113 along the X-axis direction, and between the pusher assembly 1122 and the reactor 121 along the Y-axis direction. Compared with the first slide rail 1121 driving the pusher assembly 1122 to adjust the distance along the Z-axis direction, it avoids the need to adjust the position of the reactor 121 and other components in the Z-axis direction.

[0064] In some embodiments, please refer to Figure 5 The pusher 1123 is connected to the side of the first slider 1124 away from the temporary storage rack 113 along the X-axis direction, so as to avoid the pusher 1123 being located between the two first slide rails 1121 along the Z-axis direction. This helps to reduce the risk of the pusher 1123 blocking the boat moving mechanism 117 when it transfers the sheet along the X-axis between the upper and lower first slide rails 1121.

[0065] In some embodiments, the reactor 121 can also pass between two adjacent first slide rails 1121 along the X-axis direction to enable the reactor 121 to move between the pusher area 1111 and the temporary storage area 1112, which helps to increase the space for the reactor 121 to move within the frame 111 and improves the flexibility of disassembling and assembling the reactor 121.

[0066] Furthermore, the reactor 121 can also enter and exit the rack 111 through the second opening 1114, thereby increasing the ways in which the reactor 121 can enter and exit the rack 111. In some embodiments, the temporary storage rack 113 is moved to the outside of the rack 111 to reduce the risk of the temporary storage rack 113 interfering with the reactor 121 or other components within the temporary storage area 1112, so as to facilitate the operation of the reactor 121 and other components within the rack 111.

[0067] In some embodiments, the temporary storage rack 113 can also carry the reactor 121 and move the reactor 121 from inside the rack 111 to outside the rack 111, or move the reactor 121 from outside the rack 111 to inside the rack 111.

[0068] In some embodiments, the length of the rack 111 is greater than its width, and the ratio of its length to its width is greater than 1 and less than 2. The aspect ratio of the rack 111 is 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8 or 1.9.

[0069] In some embodiments, the length of the reactor 121 is greater than its width, and the aspect ratio is greater than 1.5 and less than 20. For example, the aspect ratio of the reactor 121 is 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, 5.5, 6.0, 7.0, 8.0 or 9.0.

[0070] In some embodiments, the ratio of the width of the frame 111 to the width of the reactor 121 is greater than 2 and less than 10. For example, the ratio of the width of the frame 111 to the width of the reactor 121 is 2.5, 2.6, 2.7, 2.8, 2.9, 3.0, 3.5 or 4.0.

[0071] In some embodiments, the ratio of the length of the frame 111 to the length of the reactor 121 is greater than 1 and less than 2. For example, the ratio of the width of the frame 111 to the width of the reactor 121 is 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8 or 1.9.

[0072] In some embodiments, the length of the temporary storage rack 113 is greater than its width, and the aspect ratio is greater than 1.5 and less than 10. For example, the aspect ratio of the temporary storage rack 113 is 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, 5.5, 6.0, 7.0, 8.0 or 9.0.

[0073] In some embodiments, the ratio of the width of the rack 111 to the width of the temporary storage rack 113 is greater than 2 and less than 10. For example, the ratio of the width of the rack 111 to the width of the temporary storage rack 113 is 2.5, 2.6, 2.7, 2.8, 2.9, 3.0, 3.5 or 4.0.

[0074] In some embodiments, the boat-moving mechanism 117 includes two working parts (not shown) located on both sides of the frame 111 along its length. The space between the two working parts is used to accommodate the carrier 20. During operation, the two working parts can be positioned at both ends of the carrier 20 and support the carrier 20 to enable the boat-moving mechanism 117 to acquire the carrier 20.

[0075] In some embodiments, the working part includes a support member such as a support paddle or support claw for carrying the carrier 20.

[0076] In some embodiments, please refer to Figure 2 and Figure 7 The boat-moving mechanism 117 also includes two third slide rails 1171 and two fourth slide rails 1172. The fourth slide rails 1172 and the third slide rails 1171 both extend along the X-axis. One third slide rail 1171 is slidably connected to a working part and one fourth slide rail 1172 respectively. The fourth slide rails 1172 are connected to the frame 111 respectively. The two fourth slide rails 1172 are both located in the temporary storage area 1112. The third slide rail 1171 can drive the working part to move relative to the fourth slide rail 1172 along the X-axis. When the work unit needs to move the carrier 20 on the temporary storage rack 113 to the pusher assembly 1122, the third slide rail 1171, the fourth slide rail 1172, and the work unit are all located in the temporary storage area 1112. Under the combined action of the fourth slide rail 1172 and the third slide rail 1171, the two work units lift the carrier 20 on the temporary storage rack 113. Then, the third slide rail 1171 drives the work unit to slide relative to the fourth slide rail 1172 from the temporary storage area 1112 to the pusher area 1111, until all the third slide rails are in place. The third slide rail 1171 extends from the temporary storage area 1112 to the boat pushing area 1111 relative to the fourth slide rail 1172. All working parts slide on the third slide rail 1171 and drive the carrier 20 to move from the temporary storage area 1112 to the boat pushing area 1111 relative to the third slide rail 1171 and the fourth slide rail 1172, until the working parts drive the carrier 20 to move above the boat pushing assembly 1122. The working parts release the carrier 20 and release the carrier 20 onto the boat pushing assembly 1122.

[0077] When the work unit needs to move the carrier 20 on the pusher assembly 1122 to the temporary storage rack 113, the fourth slide rail 1172 and the third slide rail 1171 together drive the work unit to move in the opposite direction.

[0078] The third slide rail 1171 extends and retracts from the temporary storage area 1112 to the boat pushing area 1111, thereby enabling the third slide rail 1171 to avoid the boat pushing assembly 1122 in the Y-axis direction. This achieves the effect of the boat pushing assembly 1122 moving the carrier 20 from the boat pushing area 1111 to the reactor 121 or moving the carrier 20 from the reactor 121 to the boat pushing area 1111.

[0079] It is understandable that while the third slide rail 1171 moves relative to the fourth slide rail 1172 along the X-axis, the working part can also move relative to the third slide rail 1171 and the fourth slide rail 1172 along the X-axis. This helps to shorten the time for the working part to move back and forth between the temporary storage rack 113 and the pusher assembly 1122, thereby improving the efficiency of the working part in transferring the carrier 20 between the temporary storage rack 113 and the pusher assembly 1122.

[0080] For further details, please refer to Figure 7 The boat-moving mechanism 117 also includes two fifth slide rails 1173, both extending along the Z-axis. A fourth slide rail 1172 is slidably connected to one of the fifth slide rails 1173. When the working part acquires the carrier 20 and moves between the pushing area 1111 and the temporary storage area 1112, the fourth slide rail 1172 moves up and down on the fifth slide rail 1173, simultaneously driving the third slide rail 1171 and the working part to move. This allows the working part to drive the carrier 20 to move along the Z-axis, enabling the working part to drive the carrier 20 to move up and down. Using a pair of working parts, the carrier 20 can be acquired or released on different temporary storage racks 113 or pushing components 1122, which helps reduce the number of boat-moving mechanisms 117.

[0081] In some embodiments, the working part is a cylinder, and the telescopic end of the cylinder can lift and support the carrier 20 along the Z-axis direction.

[0082] In some embodiments, the third slide rail 1171, the fourth slide rail 1172, and the working part of the boat-moving mechanism 117 form two sets and are located on one side of the temporary storage rack 113, the first slide rail 1121, and the boat-pushing assembly 1122 in the Y-axis direction, so that the third slide rail 1171, the fourth slide rail 1172, and the working part can move up and down on the outside of the temporary storage rack 113, the first slide rail 1121, and the boat-pushing assembly 1122, thereby reducing the risk of interference between the boat-moving mechanism 117 and the temporary storage rack 113 or between the boat-moving mechanism 117 and the boat-pushing mechanism 112.

[0083] In other embodiments, in the X-axis direction, the lengths of the third slide rail 1171 and the fourth slide rail 1172 are both less than the distance between the temporary storage rack 113 and the first slide rail 1121. This is so that when the working part acquires the carrier 20 and moves it between the pusher area 1111 and the temporary storage area 1112, the first slide rail 1121 and the fourth slide rail 1172 can be positioned between the temporary storage rack 113 and the first slide rail 1121. This helps to reduce the risk of interference between the first slide rail 1121 and the fourth slide rail 1172 and the temporary storage rack 113 or the first slide rail 1121, achieving the effect that both the third slide rail 1171 and the fourth slide rail 1172 can move up and down relative to the temporary storage rack 113 and the pusher assembly 1122.

[0084] In other embodiments, the number of boat-moving mechanisms 117 is the same as the number of temporary storage racks 113 and boat-pushing assemblies 1122, so that one boat-moving mechanism 117 can transfer the vehicle 20 between a temporary storage rack 113 and a boat-pushing assembly 1122.

[0085] In other embodiments, the boat-moving mechanism 117 further includes a robotic arm disposed on one side of the frame 111 along the Y-axis direction, the robotic arm being capable of gripping one end of the carrier 20 or simultaneously gripping multiple sheets, and transferring the carrier 20 or multiple sheets between the temporary storage rack 113 and the boat-pushing assembly 1122.

[0086] In other embodiments, the boat-moving mechanism 117 is a multi-axis robotic arm. See also [link to other embodiments]. Figure 3 , Figure 4 , Figure 6 and Figure 8 The temporary storage rack 113 is slidably connected to the frame 111. The clean bench device 11 also includes a sliding assembly 114, which includes a second slide rail 1141 and a second slider 1142. The second slide rail 1141 is connected to the frame 111 and extends in a direction parallel to the X-axis. The second slider 1142 is slidably connected to the second slide rail 1141 and is also fixedly connected to the temporary storage rack 113. When the temporary storage rack 113 moves relative to the frame 111, the second slider 1142 supports the temporary storage rack 113 to slide along the second slide rail 1141, and causes the temporary storage rack 113 to drive the carrier 20 to move from inside the frame 111 along the X-axis direction to the outside of the frame 111, or from the outside of the frame 111 along the X-axis direction to inside the frame 111.

[0087] It is understandable that when the two temporary storage racks 113 move simultaneously outside the frame 111 for loading and unloading, the two temporary storage racks 113 slide out of the frame 111 by different distances, so that the two temporary storage racks 113 are staggered, thereby preventing the upper temporary storage rack 113 from obstructing the upper part of the lower temporary storage rack 113. Alternatively, moving the upper temporary storage rack 113 into the frame 111 can also achieve the effect of preventing the upper temporary storage rack 113 from obstructing the lower temporary storage rack 113.

[0088] In some embodiments, please refer to Figure 6 The number of sliding components 114 is two or more, the second slide rail 1141 of all sliding components 114 extends in a direction parallel to the X-axis, and the second slider 1142 of all sliding components 114 is connected to the temporary storage rack 113, thereby helping to improve the stability of the temporary storage rack 113 moving relative to the frame 111 in the X-axis direction.

[0089] In some embodiments, please refer to Figure 8The second slide rail 1141 has two opposite ends. One end of the second slide rail 1141 is connected to the frame 111, and the other end extends from inside the frame 111 to the outside of the frame 111, so that the second slider 1142 can slide along the second slide rail 1141 from inside the frame 111 to outside the frame 111 or from outside the frame 111 to inside the frame 111, and simultaneously drive the temporary storage rack 113 to move, thereby realizing that the temporary storage rack 113 slides relative to the frame 111 along the X-axis direction to the outside of the frame 111.

[0090] In some embodiments, please refer to Figure 8 and Figure 9 At least one end of the second slide rail 1141 that is relatively close to the outside of the frame 111 is provided with a limit block 1143. The limit block 1143 is used to limit the sliding distance of the second slider 1142 relative to the second slide rail 1141, which helps to reduce the risk of the second slider 1142 falling off due to excessive sliding distance.

[0091] For further details, please refer to Figure 8 and Figure 9 Limit blocks 1143 are provided at both ends of the second slide rail 1141 to reduce the risk of the second slider 1142 falling off due to excessive sliding distance. At the same time, it can also reduce the risk of the second slider 1142 causing the temporary storage rack 113 to slide too far, resulting in collision between the temporary storage rack 113 and the components inside the frame 111 or between the carrier 20 on the temporary storage rack 113 and the components inside the frame 111.

[0092] In some embodiments, please refer to Figure 8 and Figure 9 The temporary storage rack 113 includes two first components 1131 arranged along the Y-axis. A support block 1130 is provided on the side of one first component 1131 facing the other first component 1131. One first component 1131 is connected to a second slider 1142. The carrier 20 is disposed between the two first components 1131. The two support blocks 1130 support the bottom of the carrier 20 at both ends, thereby enabling the temporary storage rack 113 to carry multiple carriers 20 via the carrier 20.

[0093] In other embodiments, the second slider 1142 is integrally formed with the first component 1131.

[0094] In some embodiments, please refer to Figure 8 The sliding assembly 114 includes two second slide rails 1141 and two second sliders 1142. A first component 1131 is connected to a second slider 1142. The two first components 1131 are connected by a connecting plate 1132 so that the two first components 1131 can move synchronously under the drive of the connecting plate 1132.

[0095] In some embodiments, the second slider 1142 may also be connected to the connecting plate 1132.

[0096] In other embodiments, the connecting plate 1132 is integrally formed with the first component 1131.

[0097] In some embodiments, the temporary storage rack 113 includes two first components 1131 and a connecting plate 1132, the connecting plate 1132 being located between the two first components 1131, and the connecting plate 1132 being used to support the carrier 20 or directly support the sheet.

[0098] It is understandable that when the indirect distance between the two first components 1131 is greater than the length of the carrier 20, the connecting plate 1132 can also support the carrier 20. The two first components 1131 are used to limit the carrier 20 on the connecting plate 1132 along the Y-axis direction.

[0099] In other embodiments, please refer to Figure 10 The second slide rail 1141 is entirely located within the frame 111. One end of the second slide rail 1141 is connected to the frame 111, and the other end extends from the inside to the outside of the frame 111. The fact that a portion of the second slide rail 1141 extends outside the frame 111 helps reduce the space occupied by the clean bench device 11. Along the direction of movement of the temporary storage rack 113 from inside the frame 111 to outside the frame 111, the temporary storage rack 113 is divided into a portion facing inwards from the frame 111 and a portion facing outwards from the frame 111. The second slider 1142 is connected to the portion of the temporary storage rack 113 facing inwards from the frame 111. During operation, the second slider 1142 moves along the X-axis from inside the frame 111 to outside the frame 111 on the second slide rail 1141, and simultaneously drives the temporary storage rack 113 to move until the second slider 1142 moves to one end of the second slide rail 1141 that is relatively close to the outside of the frame 111. At this point, the temporary storage rack 113 extends to the outside of the frame 111 relative to the second slider 1142 and the second slide rail 1141, thereby realizing that the temporary storage rack 113 slides to the outside of the frame 111 relative to the frame 111 along the X-axis direction.

[0100] For further details, please refer to Figure 10When the second slide rail 1141 has a limiting block 1143, after the temporary storage rack 113 releases the carrier 20 carrying the sheet to be processed, the second slider 1142 drives the temporary storage rack 113 to move in the opposite direction until the temporary storage rack 113 is completely within the frame 111. A limiting block 1143 is provided at one end of the second slider 1142 that is relatively close to the outside of the frame 111. The limiting block 1143 and the second slider 1142 together support the temporary storage rack 113 to reduce the risk of tilting. This helps maintain the stability of the temporary storage rack 113 carrying the carrier 20. Furthermore, the top of the limiting block 1143 slides or rolls in contact with the temporary storage rack 113 to increase the friction between the temporary storage rack 113 and the limiting block 1143 as the temporary storage rack 113 moves relative to the second slide rail 1141 and the limiting block 1143.

[0101] In some embodiments, please refer to Figure 6 and Figure 8 The clean bench device 11 also includes a storage drive assembly 116 for driving the movement of the temporary storage rack 113.

[0102] In some embodiments, please refer to Figure 9 The material storage drive assembly 116 includes a motor 1161 and a synchronous belt 1162. The motor 1161 is fixedly connected to the frame 111. The synchronous belt 1162 is rotatably mounted on the second slide rail 1141, and the extension direction of the synchronous belt 1162 is consistent with that of the second slide rail 1141. The synchronous belt 1162 is fixedly connected to the second slider 1142 and is also connected to the motor 1161 for transmission. During operation, the motor 1161 drives the synchronous belt 1162 to rotate, and the synchronous belt 1162 drives the second slider 1142 and the temporary storage rack 113 to move relative to the frame 111, thereby enabling the material storage drive assembly 116 to drive the temporary storage rack 113 to move relative to the frame 111.

[0103] In some embodiments, please refer to Figure 9 and Figure 11 When there are two or more sliding components 114, the number of synchronous belts 1162 is the same as the number of second slide rails 1141. One synchronous belt 1162 is disposed on one second slide rail 1141 and connected to the second slider 1142 on the second slide rail 1141. At least one second slider 1142 is connected to the connecting plate 1132 or the first component 1131. The storage drive assembly 116 also includes a synchronous shaft 1163, which is sequentially movably disposed along the Y-axis through all the second slide rails 1141 and is respectively connected to all the synchronous belts 1162. The synchronous shaft 1163 is connected to the motor 1161, and the motor 1161 drives all the synchronous belts 1162 to rotate through the synchronous shaft 1163, and synchronously drives all the second sliders 1142 to move. All the second sliders 1142 together drive the temporary storage rack 113 to move synchronously.

[0104] In other embodiments, the storage drive assembly 116 further includes a drive unit capable of outputting reciprocating force, such as an electric actuator, a lead screw module, a hydraulic cylinder, or a pneumatic cylinder. The storage drive assembly 116 is disposed on the frame 111. The telescopic end of the storage drive assembly 116 is connected to the second slider 1142 or the temporary storage rack 113. The storage drive assembly 116 can move by extending and retracting its telescopic end, thereby driving the second slider 1142 and the temporary storage rack 113 to slide on the second slide rail 1141. Similarly, the storage drive assembly 116 can drive the temporary storage rack 113 to move relative to the frame 111.

[0105] Understandably, when there is no sliding component 114, the telescopic end of the material storage drive component 116 is directly connected to the temporary storage rack 113 and supports the temporary storage rack 113 in carrying the sheet.

[0106] In some embodiments, please refer to Figure 9 and Figure 11 The clean bench device 11 also includes a detection component 115, which is mounted on the frame 111 for detecting the movement position of the temporary storage rack 113.

[0107] For example, please refer to Figure 11 The detection component 115 includes a baffle 1151 and a photoelectric switch 1152. The baffle 1151 is disposed on the second slider 1142, and the photoelectric switch 1152 is disposed on the second slide rail 1141. When the second slider 1142 drives the temporary storage rack 113 to slide relative to the frame 111, the second slider 1142 also drives the baffle 1151 to move within the detection area of ​​the photoelectric switch 1152. When the photoelectric switch 1152 detects the baffle 1151, the photoelectric switch 1152 sends a feedback signal to the storage drive component 116 and causes the storage drive component 116 to stop driving the temporary storage rack 113 to move, which helps to improve the accuracy of the storage drive component 116 in driving the temporary storage rack 113 to move.

[0108] In other embodiments, the detection component 115 may also be a distance sensor such as an ultrasonic ranging sensor or a laser ranging sensor. After the second slider 1142 drives the temporary storage rack 113 to move a specified distance relative to the frame 111, the detection component 115 sends a feedback signal to the storage drive component 116, causing the storage drive component 116 to stop driving the temporary storage rack 113 to move.

[0109] In other embodiments, please refer to Figure 12The temporary storage rack 113 is rotatably connected to one side of the frame 111 along the X-axis. The rotation axis of the temporary storage rack 113 is parallel to the Y-axis, and a portion of the temporary storage rack 113 extends within the frame 111 to support the carrier 20. During operation, the temporary storage rack 113 rotates 90° outward within the frame 111, causing the portion of the temporary storage rack 113 within the frame 111 to rotate the carrier 20 to the outside of the frame 111 along the X-axis. Relative to the temporary storage rack 113, the carrier 20 moves to one side of the frame 111 along the Y-axis. This helps to reduce the space occupied by the temporary storage rack 113 and the frame 111 in the Y-axis direction. Meanwhile, the arc length of the temporary storage rack 113 rotating with the axis parallel to the Y-axis is less than the arc length of the temporary storage rack 113 rotating with the axis parallel to the Z-axis. This can also shorten the moving distance of the temporary storage rack 113. Thus, under the premise that the moving speed of the temporary storage rack 113 remains unchanged, it helps to shorten the time for the temporary storage rack 113 to drive the carrier 20 to move, thereby improving the working efficiency of the hot furnace equipment 10.

[0110] In other embodiments, the temporary storage rack 113 can also be rotated along a direction parallel to the Z-axis, that is, one end of the temporary storage rack 113 in the length direction is rotatably connected to the frame 111 (not shown), and the temporary storage rack 113 rotates along a direction parallel to the Z-axis. During operation, the temporary storage rack 113 rotates 90° outward from inside the frame 111 until the length direction of the temporary storage rack 113 is parallel to the X-axis. This can also enable the part of the temporary storage rack 113 inside the frame 111 to drive the carrier 20 to rotate to the outside of the frame 111 along the X-axis direction.

[0111] In some embodiments, please refer to Figure 12The temporary storage rack 113 includes a first side plate 1133 and a second side plate 1134 connected to each other. The first side plate 1133 and the second side plate 1134 are at an angle of 60°, 65°, 70°, 75°, 80°, 85° or 90° to make the temporary storage rack 113 L-shaped. The surfaces of the first side plate 1133 and the second side plate 1134 are parallel to the Y-axis. The connection between the first side plate 1133 and the second side plate 1134 is rotatably connected to the frame 111, and the rotation axes of the first side plate 1133 and the second side plate 1134 are parallel to the Y-axis. In the figure, S represents the rotation trajectory of the first side plate 1133. When the temporary storage rack 113 carries the carrier 20 within the frame 111, the first side plate 1133 is perpendicular to the X-axis, and the second side plate 1134 extends from the first side plate 1133 into the frame 111 along the X-axis direction, with the surface of the second side plate 1134 parallel to the horizontal plane, so that the second side plate 1134 carries the carrier 20. When the temporary storage rack 113 needs to move the carrier 20 from inside the frame 111 to outside the frame 111, the temporary storage rack 113 rotates relative to the frame 111 along an axis parallel to the Y-axis, causing the first side plate 1133, the second side plate 1134, and the carrier 20 carried by the second side plate 1134 to rotate synchronously outward from the frame 111. Until the second side plate 1134 is perpendicular to the X-axis, and the first side plate 1133 is parallel to both the X-axis and Y-axis, and the first side plate 1133 extends along the X-axis to the outside of the frame 111 relative to the second side plate 1134, the temporary storage rack 113 changes from the second side plate 1134 to the first side plate 1133 to carry the carrier 20, thereby enabling the temporary storage rack 113 to synchronously drive the carrier 20 to rotate to the outside of the frame 111 along the X-axis. Similarly, when the temporary storage rack 113 needs to move the carrier 20 from outside the frame 111 to inside the frame 111, the temporary storage rack 113 rotates in the opposite direction relative to the frame 111.

[0112] It is understandable that when the vehicle 20 is used to carry the vehicle 20, the first side plate 1133 and the second side plate 1134 can support the vehicle 20 respectively.

[0113] In other embodiments, the temporary storage rack 113 rotates at an angle of 60°, 65°, 70°, 75°, 80°, 85°, or 90°. The specific angle is not limited, as long as the temporary storage rack 113 stably supports the carrier 20° inside and outside the frame 111.

[0114] In some embodiments, please refer to Figure 12The temporary storage rack 113 is rotatably connected to the bottom side wall of the second opening 1114, at which time the second opening 1114 does not have a door panel 1115. When the temporary storage rack 113 carries the carrier 20 inside the frame 111, the first side plate 1133 is perpendicular to the X-axis and covers the second opening 1114. When the temporary storage rack 113 is flipped relative to the frame 111 and carries the carrier 20 outside the frame 111, the second side plate 1134 is perpendicular to the X-axis and covers the second opening 1114. During the process of the temporary storage rack 113 carrying the sheet material inside and outside the frame 111, the first side plate 1133 and the second side plate 1134 respectively cover the second opening 1114, avoiding the need for an additional door plate 1115. This achieves the goal of keeping the frame 111 sealed, thereby reducing the risk of heat exchange between the frame 111 and the outside world. It also reduces the risk of dust and other impurities inside the frame 111 flowing to the outside world through the second opening 1114 and causing environmental pollution, or the risk of dust and other impurities outside the frame 111 flowing into the frame 111 through the second opening 1114 and causing sheet contamination inside the frame 111.

[0115] In some embodiments, the storage drive assembly 116 includes a motor 1161 disposed on the frame 111, the motor 1161 being connected to the temporary storage rack 113 and driving the temporary storage rack 113 to rotate relative to the frame 111.

[0116] In other embodiments, the storage drive assembly 116 includes a drive unit capable of outputting reciprocating force, such as an electric actuator, a lead screw module, a hydraulic cylinder, or a pneumatic cylinder. The storage drive assembly 116 is connected to the temporary storage rack 113 via a linkage structure. The linkage structure converts the reciprocating motion of the storage drive assembly 116 into rotational motion and synchronously drives the temporary storage rack 113 to rotate.

[0117] In some embodiments, when the temporary storage rack 113 rotates relative to the frame 111, the detection component 115 includes an encoder (not shown) and a code disk (not shown). The encoder is disposed on the frame 111, and the code disk is disposed on the temporary storage rack 113, with the code disk located within the sensing area of ​​the encoder. When the temporary storage rack 113 synchronously drives the code disk to rotate relative to the frame 111 and the encoder, the encoder detects the rotation state of the code disk. When the encoder detects that the code disk has rotated by a specified angle, the encoder sends a feedback signal to the storage drive component 116, and the storage drive component 116 stops driving the temporary storage rack 113 to rotate relative to the frame 111.

[0118] In other embodiments, please refer to Figure 13The temporary storage rack 113 includes only a first side plate 1133. One side of the first side plate 1133, perpendicular to the Y-axis, is rotatably connected to the frame 111, and the rotation axis of the first side plate 1133 is parallel to the Y-axis. Second components 1135 are respectively provided at both ends of the first side plate 1133 along the Y-axis. The carrier 20 is disposed between the two second components 1135, and each second component 1135 is rotatably connected to the top of the carrier 20. S in the figure represents the rotation trajectory of the first side plate 1133. When the temporary storage rack 113 carries the carrier 20 within the frame 111, the first side plate 1133 is perpendicular to the X-axis, and the first side plate 1133 covers the second opening 1114. The second component 1135 extends from the first side plate 1133 into the frame 111 along the X-axis. The carrier 20 is mounted on the two second components 1135, and the bottom surface of the carrier 20 is parallel to the horizontal plane, so that the carrier 20 can support the carrier 20. When the temporary storage rack 113 needs to move the carrier 20 from inside the frame 111 to outside the frame 111, the first side plate 1133 rotates relative to the frame 111 along an axis parallel to the Y-axis, and simultaneously drives the second components 1135 and the carrier 20 supported by the second components 1135 to rotate synchronously to the outside of the frame 111. Until the first side plate 1133 is parallel to the horizontal plane, and the first side plate 1133 and the second component 1135 extend to the outside of the frame 111 along the X-axis, the second component 1135 always supports the carrier 20, thereby realizing that the temporary storage rack 113 synchronously drives the carrier 20 to rotate to the outside of the frame 111 along the X-axis. Similarly, when the temporary storage rack 113 needs to move the carrier 20 from outside the rack 111 to inside the rack 111, the temporary storage rack 113 rotates in the opposite direction relative to the rack 111.

[0119] It is understandable that the carrier 20 is rotatably connected to the second component 1135. Therefore, when the first side plate 1133 rotates relative to the frame 111, the carrier 20 also rotates relative to the first side plate 1133. The bottom surface of the carrier 20 is always parallel to the horizontal plane, so as to reduce the risk of the carrier 20 overturning due to the synchronous rotation of the first side plate 1133. This helps to improve the stability of the carrier 20 in carrying the sheet material.

[0120] In other embodiments, one end of the temporary storage rack 113 along its length is rotatably connected to the frame 111 (not shown). The temporary storage rack 113 rotates along an axis parallel to the Z-axis. During operation, the temporary storage rack 113 rotates outward relative to the frame 111 at a certain angle until its length is parallel to the X-axis. Alternatively, the portion of the temporary storage rack 113 inside the frame 111 can drive the carrier 20 to rotate to the outside of the frame 111 along the X-axis. The positive direction of the Z-axis is the direction of vertically upward gravity, and the Z-axis, Y-axis, and X-axis are perpendicular to each other.

[0121] In some embodiments, a portion of the temporary storage rack 113 is always located within the rack 111 and is rotatably connected to the rack 111. For example... Figure 3 As shown, S1 represents the direction of rotation of the temporary storage rack 113. The temporary storage rack 113 is rotatably connected to the frame 111 on one side along the X-axis. When the reactor 121 needs to be maintained, the temporary storage rack 113 is rotated along an axis parallel to the Y-axis and rotated from bottom to top to the side of the frame 111 along the X-axis. This allows the temporary storage rack 113 to make way for the space inside the frame 111, thereby reducing the risk of interference between the temporary storage rack 113 and the reactor 121. This allows the reactor 121 to be moved along the Y-axis into the frame 111 for maintenance.

[0122] Meanwhile, by rotating the temporary storage rack 113 along an axis parallel to the Y-axis, it helps to shorten the radius of rotation of the temporary storage rack 113, so as to maintain the function of mutual avoidance between the temporary storage racks 113 and shorten the rotation time of the temporary storage rack 113 while reducing the distance between two adjacent temporary storage racks 113.

[0123] It is understandable that when maintenance is required on the rack 111 or other components within the reaction device 12, the temporary storage rack 113 can make way for the space within the rack 111 through the above-mentioned rotation operation, thereby facilitating the maintenance of other components.

[0124] In some embodiments, the boat-pushing mechanism 112 is rotatably connected to the frame 111 to facilitate the entry of the reactor 121 into the frame 111 along the Y-axis direction. Specifically, the first slide rail 1121 is rotatably connected to the frame 111, and the axis of rotation of the first slide rail 1121 is parallel to the second horizontal direction. Figure 3 As shown, S2 represents the direction of rotation of the first slide rail 1121. By driving the first slide rail 1121 to rotate from the boat pushing area 1111 to the temporary storage area 1112, and driving the boat pushing mechanism 112 to rotate as a whole, a clearance space is formed on the side of the boat pushing mechanism 112 opposite to the direction of rotation without removing the boat pushing mechanism 112. This allows the reactor 121 or the quartz tube inside the reactor 121 to move along the Y-axis to the boat pushing area 1111 during maintenance, which helps to reduce the risk of interference between the boat pushing mechanism 112 and the reactor 121 or the quartz tube.

[0125] In some embodiments, the boat pushing mechanism 112 can be folded upward or downward along the Z-axis. When the boat pushing mechanism 112 is folded downward, a clearance space is formed between the boat pushing mechanism 112 and the upper boat pushing mechanism 112. When the boat pushing mechanism 112 is folded upward, a clearance space is formed between the boat pushing mechanism 112 and the lower boat pushing mechanism 112.

[0126] In some embodiments, the clearance space includes the area swept by the pusher mechanism 112 as it rotates in the folding direction.

[0127] In some embodiments, the first slide rail 1121 is rotated by manual drive or by a power device.

[0128] In the prior art, the first slide rail 1121 typically has a length direction (along the Y-axis), a width direction (along the X-axis), and a height direction (along the Z-axis). The length of the first slide rail 1121 in the width direction (defined as the length of the first side) is smaller than the length of the first slide rail 1121 in the height direction (defined as the length of the second side), so that the boat-pushing mechanism 112 has a smaller size in the X-axis direction. However, in this case, the distance between the upper and lower first slide rails 1121 is too small, and the boat-moving mechanism 117 may interfere when passing the carrier 20 carrying the sheet material between the two first slide rails 1121 along the X-axis direction. Therefore, the boat-moving mechanism 117 needs to pass above or below all the first slide rails 1121 to bypass them before transferring the carrier 20 between the temporary storage area 1112 and the boat-pushing assembly 1122. This significantly increases the travel distance of the boat-moving mechanism 117.

[0129] In some embodiments of this application, please refer to Figure 3 Without altering the shape of the first slide rail 1121, the length of the first side (i.e., the length along the X-axis) is set to be greater than the length of the second side (i.e., the length along the Z-axis). In other words, the first slide rail 1121 is rotated 90° about the Y-axis. By reducing the size of the first slide rail 1121 along the Z-axis, the distance between two adjacent first slide rails 1121 in the Z-axis direction is increased, thereby reducing the risk of interference between the first slide rail 1121 and the boat-moving mechanism 117, which passes horizontally along the X-axis, and the sheet or carrier 20 transported by the boat-moving mechanism 117. In this configuration, the boat-moving mechanism 117 can, during operation, pass the carrier 20 and the sheet horizontally along the X-axis through the gap between the upper and lower first slide rails 1121, and transfer the carrier 20 between the temporary storage area 1112 and the boat-pushing assembly 1122, thus shortening the distance the boat-moving mechanism 117 travels to move the sheet.

[0130] In some embodiments, the first component 1131 and / or the second component 1135 are respectively in the form of a block or a plate.

[0131] In some embodiments, the clean bench device 11 further includes a cooling assembly (not shown), which is disposed within the frame 111 to cool the processed sheet material, thereby shortening the time the sheet material is stored in the frame 111.

[0132] In some embodiments, the cooling assembly may also be disposed on the temporary storage rack 113.

[0133] In some embodiments, the cooling components operate in the form of air cooling and / or pipe cooling.

[0134] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the essential spirit and scope of this application fall within the scope of this application's disclosure.

Claims

1. A hot furnace device for photovoltaic or semiconductor wafer processing, characterized in that, The furnace equipment includes: At least one reaction furnace for containing and reacting the sheet, said reaction furnace having an axial direction; A clean bench device is arranged along a first horizontal direction with the reactor, the first horizontal direction being parallel to the axial direction of the reactor. The clean bench device is used to transport and / or temporarily store the sheet material. The clean bench device includes a frame, at least one temporary storage rack, and at least one boat pushing mechanism. The temporary storage rack is disposed on the inner side wall of the frame. At least one temporary storage rack can move to the outside of the frame along a vertical second horizontal direction, wherein the first horizontal direction intersects the second horizontal direction. A column is provided in the middle of the frame along the second horizontal direction. The boat pushing mechanism is disposed on the column and is used to transfer the sheet material between the frame and the reactor. The purification station also includes a boat-moving mechanism, which is located inside the frame and is used to transfer the sheet material between the temporary storage rack and the boat-pushing mechanism.

2. The furnace equipment according to claim 1, characterized in that, The temporary storage rack is configured to be slidably connected to the rack; The purification table device also includes a sliding assembly, which includes a second slide rail and a slider, wherein the second slide rail extends in a direction parallel to the X-axis; The slider is connected to the temporary storage rack and is also slidably connected to the second slide rail. The slider is configured to support the temporary storage rack to move within the frame along the second horizontal direction to the outside of the frame.

3. The furnace equipment according to claim 2, characterized in that, The second slide rail has two opposite ends along the second horizontal direction, one end of the second slide rail is connected to the frame, and the other end of the second slide rail extends from inside the frame to the outside of the frame.

4. The furnace equipment according to claim 2, characterized in that, The second slide rail has two opposite ends along the second horizontal direction, the second slide rail is located entirely within the frame, and one end of the second slide rail extends outward from the frame relative to the other end; At least a portion of the slider is configured to slide relative to the second slide rail to the outside of the rack, and the slider synchronously moves the temporary storage rack to the outside of the rack.

5. The furnace equipment according to claim 2, characterized in that, The clean bench device also includes a material storage drive assembly, which includes a motor and a synchronous belt. The motor is connected to the frame, and the synchronous belt is fixedly connected to the temporary storage rack or the slider. The synchronous belt is also connected to the motor for transmission. The motor is configured to drive the synchronous belt to rotate and synchronously drive the temporary storage rack to move along the second horizontal direction relative to the frame.

6. The furnace equipment according to claim 1, characterized in that, The number of the boat pushing mechanism is at least two, the number of the temporary storage rack is at least two, all the boat pushing mechanisms are distributed along the Z-axis direction, one boat pushing mechanism and one temporary storage rack are arranged opposite to each other along the second horizontal direction, and the Z-axis, the second horizontal direction and the first horizontal direction are perpendicular to each other; Each of the boat-pushing mechanisms includes a first slide rail and a boat-pushing assembly disposed within the frame. The first slide rail extends along the first horizontal direction, and the boat-pushing assembly is slidably connected to the first slide rail. The boat-pushing assembly is configured to carry the sheet material, and the boat-pushing assembly is also configured to transfer the sheet material between the frame and the reactor along the first horizontal direction. Each of the first slide rails of the boat pushing mechanism has a length direction, a width direction and a height direction. The length direction of the first slide rail is parallel to the first horizontal direction, the height direction of the first slide rail of the frame is parallel to the second horizontal direction, and the width direction of the first slide rail is parallel to the Z-axis. The width of the first slide rail is greater than the height of the first slide rail. During the process of the boat-moving mechanism transferring the sheet material between the temporary storage rack and the corresponding boat-pushing mechanism's pusher assembly, the boat-moving mechanism also drives the sheet material along the second horizontal direction between two adjacent first slide rails in the Z-axis direction.

7. The furnace equipment according to claim 6, characterized in that, The boat-moving mechanism includes two working sections, two third slide rails and two fourth slide rails. The two working sections are located on both sides of the frame along the first horizontal direction, and the space between the two working sections is used to accommodate a carrier that carries the sheet material. The two working sections are capable of supporting the carrier. Both the fourth slide rail and the third slide rail extend along the second horizontal direction. One of the third slide rails is slidably connected to one of the working parts and one of the fourth slide rails. The fourth slide rail is connected to the frame column. Both of the fourth slide rails are located on the side of the first slide rail facing the temporary storage rack. The third slide rail can drive the working part to move relative to the fourth slide rail along the second horizontal direction, and all the third slide rails can also extend relative to the fourth slide rail along the second horizontal direction to the pusher assembly; All of the working parts are capable of moving relative to the third and fourth slide rails from the pusher assembly to the corresponding temporary storage rack, and transferring the carrier from the temporary storage rack to the corresponding pusher assembly; or all of the working parts are capable of moving relative to the third and fourth slide rails from the temporary storage rack to the corresponding pusher assembly, and transferring the carrier from the pusher assembly to the corresponding temporary storage rack.

8. The furnace equipment according to claim 7, characterized in that, The boat-moving mechanism also includes two fifth slide rails, both of which extend along the Z-axis direction. The Z-axis, the first horizontal direction, and the second horizontal direction are perpendicular to each other. The fifth slide rail is disposed between the temporary storage rack and the first slide rail, and the fifth slide rail is slidably connected to the end of the fourth slide rail near the first slide rail. The two fifth slide rails, two third slide rails, two fourth slide rails, and two working parts of the boat-moving mechanism are located on both sides of the temporary storage rack along the first horizontal direction; The fourth slide rail can move relative to the fifth slide rail, the temporary storage rack, and the boat pushing mechanism along the Z-axis, and simultaneously drive the third slide rail and the working part to move.

9. The furnace equipment according to claim 1, characterized in that, The boat-pushing mechanism is rotatably connected to the frame, and the axis of rotation of the boat-pushing mechanism is parallel to the first horizontal direction.

10. The furnace equipment according to claim 1, characterized in that, Some of the temporary storage racks are always located within the frame, and some of the temporary storage racks are rotatably connected to the frame on the side away from the pusher mechanism along the second horizontal direction, with the rotation axis of the temporary storage racks being parallel to the first horizontal direction.

11. The furnace equipment according to claim 1, characterized in that, The reactor can be moved into the frame along the first horizontal direction.

12. The furnace equipment according to claim 11, characterized in that, The reactor is capable of moving within the frame along the second horizontal direction and moving out of the frame.

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