A BCB passivation device and method of use thereof

Abstract

The present application relates to the technical field of BCB passivation process, in particular to a BCB passivation device and a use method thereof. The device comprises a vacuum tube and a temperature control unit sleeved on the vacuum tube; the temperature control unit comprises a guide structure and at least one temperature control ring arranged along the axial direction of the vacuum tube, the guide structure is used for adjusting the axial position of the temperature control ring, and a plurality of air blowing holes are arranged on the temperature control ring along the ring direction; the temperature control of the vacuum tube is realized by adjusting the angle of the heat exchange gas output by the air blowing hole. By adjusting the axial position of the temperature control ring relative to the vacuum tube through the guide structure, the angle of the heat exchange gas output by the air blowing hole and the parameters of the heat exchange gas such as temperature, flow and speed can be flexibly adjusted, so that the temperature control unit can realize high-precision temperature control on any position of the vacuum tube, optimize the curing effect and product yield, and realize independent and accurate temperature control on the whole wafer, array type PD detector and multiple detection chips during passivation, thereby improving the photoelectric performance consistency.

Description

Technical Field

[0001] This invention relates to the field of BCB passivation technology, and in particular to a BCB passivation apparatus and its method of use. Background Technology

[0002] With the rapid development of the semiconductor industry and the widespread application of optical communication transmission technology, data transmission rates have gradually evolved from 10G to 400G, 800G, and even higher. Benzocyclobutene (BCB) passivation is an indispensable key process in the fabrication of high-speed optical chips. Especially for the mass production of high-speed photodetectors, photodiodes (PDs), and wafer and detector-related functional chips, the BCB passivation layer directly encapsulates the photosensitive active area of ​​the detector, wafer microcircuits, and chip electrodes. Temperature inhomogeneity can easily lead to dark current degradation in the detector, cracking of the wafer dielectric layer, and poor consistency in the chip's photoelectric response.

[0003] Existing BCB passivation processes suffer from insufficient temperature control precision. Traditional methods determine the heating unit capacity based on load calculations during equipment design, which struggles to simultaneously balance temperature control rate and precision. During temperature control, the temperature fluctuates around the set value multiple times before stabilizing, and even at steady state, control precision remains limited. Furthermore, the heating unit capacity limitation leads to lag in heating response when load fluctuations are significant, further reducing control precision. In BCB passivation, temperature control precision and uniformity directly determine curing effect and product quality. These issues result in low BCB colloidal reaction rates, long curing cycles, and insufficient cross-linking and curing of the material. They can also induce cracks, device deformation, and even side reactions, degrading the performance of the cured product. For PD detectors, detector chips, and the entire fabricated wafer, localized temperature differences lead to inconsistent BCB cross-linking on the detector's photosensitive surface, resulting in significant differences in passivation film thickness and insulation performance across different areas of the wafer, leading to poor wafer and detector chip yields.

[0004] Therefore, overcoming the shortcomings of the existing technology is an urgent problem to be solved in this technical field. Summary of the Invention

[0005] The technical problem to be solved by the present invention is that the insufficient temperature control accuracy of the existing BCB passivation device leads to poor curing effect and product quality.

[0006] The present invention adopts the following technical solution: In a first aspect, the present invention provides a BCB passivation device, comprising a vacuum tube 1 and a temperature control unit 2 sleeved on the vacuum tube 1; The temperature control unit 2 includes a guide structure 20 and at least one temperature control ring 21 arranged along the axial direction of the vacuum tube 1. The guide structure 20 is used to adjust the axial position of the temperature control ring 21. The temperature control ring 21 is provided with a plurality of air blowing holes 2100 along the circumferential direction. The temperature of the vacuum tube 1 is controlled by adjusting the angle of the heat exchange gas output by the air blowing holes 2100.

[0007] Furthermore, the temperature control ring 21 includes an air blowing pipe 210 and a steering assembly 211, and the air blowing hole 2100 is disposed at the air outlet end of the air blowing pipe 210; The steering assembly 211 is used to drive the blowing pipe 210 to tilt, so that the heat exchange gas can be selectively blown toward the outer wall of the vacuum tube 1.

[0008] Furthermore, the temperature control ring 21 also includes an air supply ring 212 and a steering ring 213. The air supply ring 212 is connected to the air blowing pipe 210, and the air blowing hole 2100 passes through the through hole 2130 of the steering ring 213. The steering assembly 211 is used to drive the steering ring 213 to twist relative to the air supply ring 212, so as to change the angle between the axis of the air blowing pipe 210 and the axis of the vacuum tube 1.

[0009] Furthermore, the steering assembly 211 includes a steering rod 2110 disposed on the air supply ring 212 and an arcuate groove 2111 disposed on the steering ring 213; One end of the steering rod 2110 is rotatably connected to the air supply ring 212, and the other end of the steering rod 2110 is fixed with a gear 2112. An internal rack 2113 is provided on one side wall of the arc-shaped groove 2111. The gear 2112 meshes with the internal rack 2113. The rotation of the steering rod 2110 drives the steering ring 213 to rotate.

[0010] Furthermore, at least one temperature sensor is installed inside the vacuum tube 1, and the steering rod 2110 is driven to rotate based on the temperature collected by the temperature sensor.

[0011] Furthermore, the temperature control ring 21 also includes a collar 214 sleeved on the outside of the steering ring 213. A rolling element 2131 is provided on the outer wall of the steering ring 213, and a slide 2140 is provided on the inner wall of the collar 214. The rolling element 2131 is embedded in the slide 2140 so that the steering ring 213 can rotate within the collar 214.

[0012] Furthermore, the air supply ring 212 is provided with a circumferential cavity 2120, and all the air blowing pipes 210 are connected to the circumferential cavity 2120; The air inlet of the air blowing pipe 210 is a ball head 2101, which is embedded in the circumferential cavity 2120. The ball head 2101 rotates within the circumferential cavity 2120 to change the angle between the axis of the air blowing pipe 210 and the axis of the vacuum tube 1.

[0013] Furthermore, the guide structure 20 corresponds one-to-one with the temperature control ring 21, the temperature control ring 21 is suspended on the corresponding guide structure 20, and the temperature control ring 21 can move along the axial direction of the guide structure 20; The guide structure 20 includes a transmission rod 200 and a support rod 201. A double ring 215 is provided on the outer wall of the temperature control ring 21. The double ring 215 includes a first sleeve 2150 and a second sleeve 2151. The first sleeve 2150 is sleeved on the transmission rod 200, and the second sleeve 2151 is sleeved on the support rod 201. The first sleeve 2150 moves on the transmission rod 200 to drive the second sleeve 2151 to move on the support rod 201.

[0014] Furthermore, at least one flow equalizer 10 is provided inside the vacuum tube 1, and the flow equalizer 10 is used to adjust the temperature at different positions inside the vacuum tube 1.

[0015] Secondly, the present invention provides a method of using a BCB passivation device, the method comprising: The vacuum tube 1 is evacuated and inert gas is injected for gas replacement. The preset axial position of the temperature control ring 21 is set according to the position of the chip 3 to be passivated inside the vacuum tube 1, and the parameters and output angle of the heat exchange gas are set according to the temperature control requirements. The temperature control ring 21 is moved to the preset axial position by the guide structure 20, and the heat exchange gas is output to control the temperature of the vacuum tube 1.

[0016] The beneficial effects of the present invention are as follows: by adjusting the axial position of the temperature control ring relative to the vacuum tube through the guide structure, the angle of the heat exchange gas output from the blowing hole and the parameters of the heat exchange gas (such as temperature, flow rate and speed) can be flexibly adjusted, so that the temperature control unit can perform high-precision temperature control on any position of the vacuum tube, thereby optimizing the curing effect and improving the product yield. Furthermore, the temperature control unit can achieve independent and precise temperature control of the entire wafer, arrayed PD detectors, and multiple detector chips during passivation, significantly reducing the dark current dispersion of the detector and improving the consistency of photoelectric performance of devices within the wafer and between batches. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments of the present invention will be briefly described below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of a BCB passivation device provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of a temperature control unit provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a vacuum tube provided in an embodiment of the present invention; Figure 4 This is a schematic diagram of a steering component and an air blowing pipe provided in an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of a temperature control ring provided in an embodiment of the present invention; Figure 6 This is an exploded view of the structure of a temperature control ring provided in an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of a steering component provided in an embodiment of the present invention; Figure 8 This is a schematic diagram of the structure of an air blowing ring and a steering ring provided in an embodiment of the present invention; Figure 9 This is a schematic diagram of the structure of a slide and a rolling element provided in an embodiment of the present invention; Figure 10 This is a schematic diagram of an air blowing pipe tilting according to an embodiment of the present invention; Figure 11 This is a schematic diagram of a guiding structure provided in an embodiment of the present invention; Figure 12 This is a schematic flowchart illustrating the usage method of a BCB passivation device provided in an embodiment of the present invention.

[0019] The attached figures are labeled as follows: Vacuum tube 1, flow equalizer 10, vacuum valve 11, air inlet pipe 12, air outlet pipe 13, temperature control unit 2, guide structure 20, transmission rod 200, motor 2000, support rod 201, temperature control ring 21, air blowing pipe 210, air blowing hole 2100, ball head 2101, steering assembly 211, steering rod 2110, arc groove 2111, gear 2112, internal rack 2113, air supply ring 212, circumferential cavity 2120, steering ring 213, through hole 2130, rolling element 2131, collar 214, slide 2140, double ring 215, first sleeve 2150, second sleeve 2151, air supply pipe 216, chip to be passivated 3. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0021] Unless the context otherwise requires, throughout the specification and claims, the term "comprising" is interpreted as openly inclusive, meaning "including, but not limited to." In the description of the specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this disclosure. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples; that is, although they may be incorporated into embodiments or examples using the above terms for reasons such as order and position, it does not limit them to be incorporated in combination by a single embodiment or example.

[0022] In the description of this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this disclosure, unless otherwise stated, "a plurality of" means two or more. Furthermore, for example, the description may use the prefix "A" or "B" to describe the same type of nouns as two independent entities. In this case, the corresponding features defined with "A" and "B" are used only to distinguish between similar entities and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features.

[0023] In describing some embodiments, the terms "coupled," "coupled," and "connected," and their derivative expressions, may be used. For example, the term "connected" may be used in describing some embodiments to indicate that two or more components have direct physical or electrical contact with each other. Similarly, the term "coupled" may be used in describing some embodiments to indicate that two or more components have direct physical or electrical contact. However, the terms "connected" or "coupled" may also refer to two or more components that do not have direct contact with each other but still cooperate or interact with each other, such as "optical coupling," "wireless connection," etc. The embodiments disclosed herein are not necessarily limited to the scope of this invention.

[0024] Furthermore, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0025] Benzocyclobutene (BCB) can react under specific temperature conditions to form a passivation structure. This passivation structure has excellent properties such as low dielectric constant, low dielectric loss, low moisture absorption and high thermal stability. Therefore, BCB is widely used as a device passivation protection material and interlayer dielectric material in semiconductor manufacturing.

[0026] In the BCB passivation process, BCB is spin-coated onto the surface of the chip to be passivated. The BCB-coated chip is then placed in an inert gas atmosphere and heated, causing the BCB to cure and cross-link, thereby forming a BCB film on the surface of the chip. The cured BCB film possesses excellent insulation and protective properties, effectively suppressing signal delay, crosstalk, and noise interference during signal transmission, thus improving the reliability and stability of device operation. It has broad application prospects and significant application value in semiconductor manufacturing, microelectronic packaging, and other fields.

[0027] However, the BCB passivation process is significantly affected by multiple process parameters such as temperature, humidity, oxygen content, and reaction impurities. These factors directly alter the flatness, mechanical properties, thermal properties, and electrical properties of the BCB film, such as dielectric constant and breakdown voltage. This can easily lead to a decrease in the overall performance and reliability of the device, making it difficult to meet the mass production temperature control requirements for high-precision and uniform passivation of PD photodetectors, whole wafers, and high-speed detection chips.

[0028] Example 1: See Figure 1Embodiment 1 of the present invention provides a BCB passivation device, including a vacuum tube 1 and a temperature control unit 2 sleeved on the vacuum tube 1; the temperature control unit 2 includes a guide structure 20 and at least one temperature control ring 21 arranged along the axial direction of the vacuum tube 1. The guide structure 20 is used to adjust the axial position of the temperature control ring 21. The temperature control ring 21 is provided with a plurality of air blowing holes 2100 along the circumferential direction. The temperature of the vacuum tube 1 is controlled by adjusting the angle of the heat exchange gas output by the air blowing holes 2100. Here, axial direction refers to the length direction of the vacuum tube 1.

[0029] To ensure temperature control accuracy, please refer to... Figure 2 In one optional embodiment, the temperature control unit 2 includes three temperature control rings 21, which are arranged axially and suspended on the guide structure 20. The temperature control rings 21 are made of high-temperature resistant steel and can have a diameter of 300mm. The guide structure 20 can adjust the axial position of the temperature control rings 21. In practical applications, the maximum travel of the temperature control rings 21 can reach 200mm, ensuring that the temperature control range of the temperature control unit 2 can cover the entire vacuum tube 1, thereby achieving temperature control of the passivation chip 3 located at any position within the vacuum tube 1.

[0030] To further ensure temperature control accuracy, please refer to [the relevant documentation / reference]. Figure 1 In another optional embodiment, the temperature control unit 2 includes three temperature control rings 21 and three guide structures 20 corresponding to each temperature control ring 21. With the relative positions of the three temperature control rings 21 remaining unchanged, the axial position of each temperature control ring 21 can be precisely adjusted through the corresponding guide structure 20. Additionally, a heat transfer oil circulation system can be provided around the outer periphery of the temperature control rings 21 to provide a basic, uniform insulation layer on the entire exterior of the device, preventing rapid heat loss.

[0031] This invention adjusts the axial position of the temperature control ring 21 relative to the vacuum tube 1 through the guide structure 20. The angle of the heat exchange gas output from the air blowing hole 2100 and the parameters of the heat exchange gas, such as temperature, flow rate and velocity, can be flexibly adjusted, enabling the temperature control unit 2 to perform high-precision temperature control on any position of the vacuum tube 1, optimizing the curing effect and improving product yield. This allows for independent and precise temperature control of the entire wafer, array PD detector, and multiple detector chips during passivation, significantly reducing the dark current dispersion of the detector and improving the consistency of photoelectric performance of devices within the wafer and between batches.

[0032] The specific structure of the BCB passivation device will be described next, taking the temperature control unit 2, which includes three temperature control rings 21 and three guide structures 20 corresponding to the temperature control rings 21, as an example.

[0033] Existing temperature control solutions struggle to meet process requirements regarding humidity, air quality, and oxygen content, easily leading to oxidation defects. Before heating the chip 3 to be passivated, to ensure it is in a minimally oxygen-free baking environment, refer to... Figure 3 In one optional embodiment, the BCB passivation device further includes a vacuum valve 11 connected to a vacuum system. The vacuum valve 11 is connected to a vacuum pump, which can evacuate the vacuum tube 1 to a vacuum level below 0.1 Pa, effectively removing impurities, oxygen, and water vapor from the vacuum tube 1. To ensure an oxygen-free environment inside the vacuum tube 1, the BCB passivation device also includes an inlet pipe 12 and an exhaust pipe 13. The inlet pipe 12 is connected to an inert gas injection system for injecting inert gas into the vacuum tube 1 for gas replacement, optimizing the atmosphere within the vacuum tube 1, reducing the probability of oxidation defects, and improving the performance of the BCB film. In practical applications, the inert gas can be high-purity nitrogen or argon, and the injection pressure of the inert gas can be 0.2 MPa.

[0034] To stabilize the temperature field inside the vacuum tube 1 during heating, please refer to [further details]. Figure 3 At least one flow equalizer 10 is provided inside the vacuum tube 1, and the flow equalizer 10 is used to adjust the temperature at different locations inside the vacuum tube 1. In an optional embodiment, a flow equalizer 10 is provided at each end of the vacuum tube 1. The flow equalizer 10 can circulate the inert gas, improve the uniformity of the temperature field, and form a uniform thermal radiation boundary inside the vacuum tube 1 to reduce the influence of thermal radiation from the outer boundary. In practical applications, the flow equalizer 10 can be a silicon carbide ceramic flow equalizer with a thickness of 20 mm.

[0035] The following section uses a set of guide structures 20 and temperature control rings 21 as examples to illustrate the specific structures of the guide structures 20 and the temperature control rings 21.

[0036] Because excessively rapid cooling can cause stress cracks in the product, while excessively slow cooling will reduce production efficiency, to improve the accuracy of temperature control, please refer to... Figure 4 and Figure 5 The temperature control ring 21 includes an air blowing pipe 210 and a steering assembly 211. An air blowing hole 2100 is disposed at the outlet end of the air blowing pipe 210. The steering assembly 211 is used to drive the air blowing pipe 210 to tilt, allowing the heat exchange gas to be selectively blown towards the outer wall of the vacuum tube 1. In an optional embodiment, a plurality of air blowing pipes 210 are arranged circumferentially within the temperature control ring 21. The tilting of the air blowing pipes 210 causes the heat exchange gas to be blown towards the outer wall of the vacuum tube 1, thereby performing circumferential temperature control on the chip 3 to be passivated, ensuring uniform temperature control.

[0037] To achieve the tilting of the air blowing pipe 210, see [reference needed]. Figure 5 and Figure 6 The temperature control ring 21 further includes an air supply ring 212 and a steering ring 213. The air supply ring 212 is connected to the air blowing pipe 210, and the air blowing hole 2100 extends through the through hole 2130 of the steering ring 213. The steering assembly 211 is used to drive the steering ring 213 to rotate relative to the air supply ring 212, thereby changing the angle between the axes of the air blowing pipe 210 and the vacuum tube 1. In an optional embodiment, the steering assembly 211 drives the steering ring 213 to rotate. Since the air outlet end of the air blowing pipe 210 is inserted into the through hole 2130, the rotation of the steering ring 213 will apply a horizontal force to the air outlet end of the air blowing pipe 210. By adjusting the rotation angle of the steering ring 213, the angle between the axes of the air blowing pipe 210 and the vacuum tube 1 can be adjusted. It should be noted that the steering ring 213 rotates horizontally around its own central axis, and the range of the rotation angle of the steering ring 213 is determined by the rotation angle of the steering rod 2110 in the steering assembly 211.

[0038] See Figure 7 To enable the steering ring 213 to rotate, the steering assembly 211 includes a steering rod 2110 disposed on the air supply ring 212 and an arcuate groove 2111 disposed on the steering ring 213; one end of the steering rod 2110 is rotatably connected to the air supply ring 212, and a gear 2112 is fixed to the other end of the steering rod 2110; an internal rack 2113 is disposed on one side wall of the arcuate groove 2111, and the gear 2112 meshes with the internal rack 2113; the rotation of the steering rod 2110 drives the steering ring 213 to rotate.

[0039] In one optional embodiment, to achieve the rotation of the steering rod 2110, a micro motor (not shown in the figure) is provided on the lower surface or inside of the air supply ring 212. The bearing of the micro motor is fixed to the steering rod 2110. The rotation of the bearing drives the steering rod 2110 to rotate. The gear 2112 is fixed to the other end of the steering rod 2110, and the gear 2112 and the internal rack 2113 mesh with each other. The rotation of the gear 2112 drives the steering ring 213 to rotate. The clockwise rotation of the gear 2112 drives the rotating ring 213 to rotate counterclockwise, and the counterclockwise rotation of the gear 2112 drives the rotating ring 213 to rotate clockwise.

[0040] Since the length of the internal rack 2113 is limited, the rotation angle range of the gear 2112 is determined according to the length and number of teeth of the internal rack 2113 and the size of the gear 2112. Furthermore, the rotation angle range of the gear 2112 determines the rotation angle range of the steering ring 213, thereby affecting the tilt angle range of the air blowing pipe 210. Therefore, in actual use scenarios, the rotation angle of the gear 2112 can be adjusted according to the required tilt angle of the air blowing pipe 210 to achieve high-precision temperature control.

[0041] Existing passivation furnaces typically only have single-point temperature detection, which fails to obtain the true temperature of the chip 3 to be passivated. This results in uneven temperature distribution inside and outside the passivation chamber, inaccurate device temperature control, and ultimately deterioration of the passivation effect, reducing batch consistency. To address these issues, at least one temperature sensor is installed inside the vacuum tube 1, driving the rotation of the steering rod 2110 based on the temperature collected by the sensor. In an optional embodiment, temperature sensors are installed at the top, bottom, and middle regions of the vacuum tube 1, as well as on the temperature control ring 21. The temperature sensors have a measurement range of 0-500℃ and a resolution of up to 0.1℃. The micromotor drives the bearing to rotate based on the temperature collected by the temperature sensor, thereby rotating the steering rod 2110. Furthermore, to achieve faster temperature compensation in conjunction with airflow, multiple sets of infrared heating elements (e.g., infrared heating tubes with a maximum power of 5kW) can be integrated on the temperature control ring 21, forming a dual-effect heating mode of hot airflow convection and infrared radiation coupled heating.

[0042] Furthermore, to ensure the flexibility of the steering ring 213's rotation, refer to... Figure 8 and Figure 9 The temperature control ring 21 also includes a collar 214 sleeved on the outside of the steering ring 213. A rolling element 2131 is provided on the outer wall of the steering ring 213, and a slide 2140 is provided on the inner wall of the collar 214. The rolling element 2131 is embedded in the slide 2140 so that the steering ring 213 can rotate within the collar 214. In one optional embodiment, the collar 214 and the air supply ring 212 are integrally formed. A circumferential slide 2140 is provided on the inner sidewall of the collar 214. Multiple spherical rolling elements 2131 are provided on the outer sidewall of the steering ring 213. The rolling elements 2131 are embedded in the C-shaped slide 2140. When the steering rod 2110 rotates, driving the steering ring 213 to rotate, the rolling elements 2131 enhance the flexibility of the steering ring 213's rotation, thereby achieving precise control of the tilt angle of the air blowing pipe 210. When the steering ring 213 rotates, the air outlet end of the air blowing pipe 210 is subjected to a horizontal force, causing the air blowing pipe 210 to tilt inwards. Figure 10As shown.

[0043] To ensure that the air blowing pipe 210 can be tilted, please refer to [link / reference needed]. Figure 8 The gas supply ring 212 has an circumferential cavity 2120, and all the gas blowing pipes 210 are connected to the circumferential cavity 2120. The air inlet end of each gas blowing pipe 210 is a ball head 2101, which is embedded in the circumferential cavity 2120. The ball head 2101 rotates within the circumferential cavity 2120 to change the angle between the axis of the gas blowing pipe 210 and the axis of the vacuum tube 1. In an optional embodiment, the gas supply ring 212 is connected to a gas delivery pipe 216, and the heat exchange gas enters the circumferential cavity 2120 from the gas delivery pipe 216. The heat exchange gas also enters each gas blowing pipe 210 from the air inlet end.

[0044] When the gear 2112 rotates, causing the steering ring 213 to rotate at a preset angle, the steering ring 213 twists relative to the air supply ring 212, causing the outlet end of the air blowing pipe 210 to be offset towards the center by the horizontal force of the rotation of the steering ring 213. Since the ball head 2101 is rotatably connected to the air supply ring 212, the horizontal force on the outlet end of the air blowing pipe 210 is transmitted to the ball head 2101, causing the ball head 2101 to rotate within the circumferential cavity 2120. In this way, the air blowing pipe 210 can be tilted so that the heat exchange gas is blown toward the outer wall of the vacuum tube 1.

[0045] To adjust the axial position of the temperature control ring 21, refer to... Figure 11 The guide structure 20 corresponds one-to-one with the temperature control ring 21. The temperature control ring 21 is suspended on the corresponding guide structure 20 and can move axially along the guide structure 20. The guide structure 20 includes a transmission rod 200 and a support rod 201. A double ring 215 is provided on the outer wall of the temperature control ring 21. The double ring 215 includes a first sleeve 2150 and a second sleeve 2151. The first sleeve 2150 is sleeved on the transmission rod 200, and the second sleeve 2151 is sleeved on the support rod 201. The first sleeve 2150 moves on the transmission rod 200 to drive the second sleeve 2151 to move on the support rod 201.

[0046] In one optional embodiment, a motor 2000 is installed at the end of the transmission rod 200, and the motor 2000 drives the transmission rod 200 to rotate. Threads are provided on the outer surface of the transmission rod 200 and the inner wall of the first sleeve 2150, allowing the first sleeve 2150 to move axially on the transmission rod 200. The first sleeve 2150 and the second sleeve 2151 are fixed together, and the support rod 201 is a smooth round rod, allowing the second sleeve 2151 to move axially on the support rod 201 to adjust the axial position of the temperature control ring 21.

[0047] Example 2: See Figure 12 Embodiment 2 of the present invention provides a method for using the BCB passivation device, which specifically includes steps 101 to 103.

[0048] Step 101: Evacuate the vacuum tube 1 and inject inert gas for gas replacement.

[0049] The BCB passivation device evacuates the vacuum tube 1 through a vacuum valve 11 and a pumping system, and introduces high-purity nitrogen through an inert gas injection system for gas replacement, optimizing and controlling the atmosphere within the vacuum tube 1. This effectively removes impurities, oxygen, and water vapor, reducing the probability of oxidation defects. Simultaneously, the flow equalizer 10 ensures that the nitrogen circulates within the vacuum tube 1, creating a uniform thermal radiation boundary within the tube.

[0050] Step 102: Set the preset axial position of the temperature control ring 21 according to the position of the chip 3 to be passivated in the vacuum tube 1, and set the parameters and output angle of the heat exchange gas according to the temperature control requirements.

[0051] Based on temperature control requirements such as target temperature, temperature deviation range, and heating / cooling rates, the axial movement distance of the temperature control loop 21, the rotation angle of the air blowing pipe 210, and the flow rate of the heat exchange gas are dynamically configured. The air supply module of the temperature control unit 2 includes a hot air blower and a cold air blower (as an air compression source), and is equipped with a mass flow controller (MFC) and a programmable logic controller (PLC). The MFC has a flow rate adjustment range of 10-100 L / min, used to precisely adjust the flow rate of the heat exchange gas; the PLC is used to monitor the temperature data fed back by the temperature sensor in real time, calculate and output control commands using a PID algorithm, and automatically adjust the axial movement position of the temperature control loop 21 and the tilt angle of the air blowing pipe 210 through the servo control system.

[0052] Step 103: Move the temperature control ring 21 to the preset axial position through the guide structure 20, and output the heat exchange gas to control the temperature of the vacuum tube 1.

[0053] The gas supply pipe 216 on the temperature control ring 21 is connected to the MFC valve. The heating or cooling mode is switched by adjusting the flow rate of the heat exchange gas and the gas source (cold air or hot air). The PLC control system automatically and collaboratively adjusts the power of the infrared heating element, the flow rate of the heat exchange gas, the axial position of the temperature control ring 21, and the angle of the air blowing pipe 210 based on the data from the temperature sensor.

[0054] During the heating stage, the heat exchange gas is hot air. When the temperature inside the vacuum tube 1 reaches the deviation range of the preset heating temperature, the temperature control loops 21 are grouped and regulated. The temperature control unit 2 can achieve independent temperature control of different areas according to process requirements, and switch between synchronous heating and cooling or independent heating and cooling. After entering the stable control mode, the system maintains a long constant temperature zone by fine-tuning the gas flow and infrared auxiliary heating to obtain high uniformity. When the temperature deviation exceeds the preset value, the BCB passivation device can automatically switch the control mode for rapid adjustment.

[0055] During the cooling phase, the heat exchange gas is cold air. The temperature control unit 2 continuously and dynamically adjusts the axial movement position, blowing angle and cold air flow to control the cooling position and rate of the cold air, so as to achieve stable cooling to the required temperature while ensuring no thermal stress cracks. At the same time, the nitrogen replacement system maintains a pure atmosphere environment in the vacuum tube 1.

[0056] Example 3: Embodiment 3 of the present invention provides a specific method for BCB passivation process, and describes the specific process parameters of the BCB passivation device and control logic described in Embodiments 1 and 2. The BCB passivation process method utilizes a servo control system, MFC and PLC controllers to operate in coordination, and specifically includes steps 201 to 213.

[0057] Step 201: Activate vacuum valve 11 to evacuate the inside of vacuum tube 1, control the vacuum level within the range of 0.1 Pa to 0.5 Pa, and maintain the vacuum level for 30 minutes; Step 202: High-purity inert gas (such as high-purity nitrogen) with a flow rate of 10 L / min is introduced into the vacuum tube 1 through the inlet pipe 12 to perform gas replacement, so that it circulates along the inner wall of the vacuum tube 1 and the flow equalizer 10 for a duration of 20 min to 30 min, thereby establishing a pure protective atmosphere. Step 203: Set the passivation process parameters in the PLC system: target temperature is 300℃, allowable temperature deviation range is ±0.5℃, heating rate is 2-5℃ / min, heating gradient is set to 20℃-120℃-200℃-250℃-300℃, and cooling rate is limited to 5-7℃ / min. Step 204: Calculate the required heat load for the current gradient stage using the PLC control system. For example, during the rapid heating stage, the calculated required heating power output is 40%-50%, and when it is necessary to suppress temperature overshoot, the cooling airflow heat exchange power is adjusted to 20%-30%. Step 205: Transmit the calculation results to the servo control system of the temperature control unit 2, set the initial position of the temperature control loop 21 to the middle position of the vacuum tube 1, set the initial tilt angle of the blowing pipe 210 to 0°, configure the heating curve model and set the dynamic adjustment parameters (including the flow rate of the heat exchange gas, the axial position of the temperature control loop 21, the tilt angle of the blowing pipe 210, etc.). Step 206: Switch to heating mode, and rapidly heat up through temperature control unit 2 (combining heat exchange gas convection and on-ring infrared heating element), setting the overall heating power at this time to 30%-70% of full load; Step 207: Adjust the heating parameters in real time through multiple PID control modules to make the internal temperature of vacuum tube 1 reach the target temperature of different gradient constant temperature zones quickly and stably. Step 208: When the temperature of the passivation area inside the vacuum tube 1 reaches (300±0.5)℃, the control system performs independent grouping and control of each temperature control ring 21 and heating unit, precisely adjusting the heating power and the injection flow rate of MFC heat exchange gas, so as to accurately maintain the temperature inside the vacuum tube 1 at 300±0.1℃. Step 209: During this period, the servo control system continuously and dynamically controls the axial blowing position of the temperature control loop 21 and the tilt angle of the blowing pipe 210, and cooperates with the MFC to fine-tune the gas flow rate to achieve precise control of the BCB passivation temperature without dead angles, thereby obtaining a long constant temperature zone and high uniformity. Step 210: The passivation process is carried out continuously for 1 hour under the above-mentioned stable process constant temperature zone (300±0.1℃) to allow the BCB material to fully cross-link and cure. Step 211: After curing, the cooling stage begins. The PLC temperature control system calculates and generates a cooling curve model based on the set cooling time and rate (5-7℃ / min). The temperature control unit 2 is continuously and dynamically adjusted by the servo control system. The axial movement range of the temperature control ring 21 is set to ±50mm, and the tilt angle of the air blowing pipe 210 is set to ±30°. At the same time, the cold air blower is switched to output cold air, and the cold air flow rate is controlled by MFC to be 5-15L / min, strictly following the set cooling curve for dynamic movement and adjustment. Step 212: By outputting cold air and dynamically controlling its cooling position, the chip surface is uniformly and stably cooled to room temperature without temperature gradient throughout the entire constant temperature zone, thus avoiding the generation of thermal stress cracks. Step 213: Throughout the cooling process, a pure atmosphere is maintained inside the vacuum tube 1 using a nitrogen purging system. During this time, the nitrogen flow rate is maintained at 5L / min until the tube is removed from the furnace.

[0058] Through the above methods, the embodiments of the present invention can achieve rapid temperature rise and fall and multi-dimensional stable control within the vacuum tube 1. The temperature fluctuation in the constant temperature zone is strictly controlled within ±0.1℃, and an effective constant temperature zone of up to 120 minutes is obtained. This fundamentally solves the problems of insufficient temperature control accuracy and temperature oscillation in the existing systems, and effectively improves the uniformity of BCB passivation, product yield and batch quality.

[0059] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A BCB passivation device, characterized in that, It includes a vacuum tube (1) and a temperature control unit (2) sleeved on the vacuum tube (1); The temperature control unit (2) includes a guide structure (20) and at least one temperature control ring (21) arranged along the axial direction of the vacuum tube (1). The guide structure (20) is used to adjust the axial position of the temperature control ring (21). The temperature control ring (21) is provided with a plurality of air blowing holes (2100) along the circumferential direction. The temperature of the vacuum tube (1) is controlled by adjusting the angle of the heat exchange gas output by the air blowing holes (2100).

2. The BCB passivation apparatus according to claim 1, characterized in that, The temperature control ring (21) includes an air blowing pipe (210) and a steering assembly (211), and the air blowing hole (2100) is disposed at the air outlet end of the air blowing pipe (210); The steering assembly (211) is used to drive the blowing pipe (210) to tilt, so that the heat exchange gas can be selectively blown toward the outer wall of the vacuum tube (1).

3. The BCB passivation apparatus according to claim 2, characterized in that, The temperature control ring (21) also includes an air supply ring (212) and a steering ring (213). The air supply ring (212) is connected to the air blowing pipe (210), and the air blowing hole (2100) passes through the through hole (2130) of the steering ring (213). The steering assembly (211) is used to drive the steering ring (213) to twist relative to the air supply ring (212) to change the angle between the axis of the air blowing pipe (210) and the vacuum tube (1).

4. The BCB passivation apparatus according to claim 3, characterized in that, The steering assembly (211) includes a steering rod (2110) disposed on the air supply ring (212) and an arcuate groove (2111) disposed on the steering ring (213). One end of the steering rod (2110) is rotatably connected to the air supply ring (212), and the other end of the steering rod (2110) is fixed with a gear (2112). An internal rack (2113) is provided on one side wall of the arc groove (2111). The gear (2112) meshes with the internal rack (2113), and the rotation of the steering rod (2110) drives the steering ring (213) to rotate.

5. The BCB passivation apparatus according to claim 4, characterized in that, At least one temperature sensor is installed inside the vacuum tube (1), and the steering rod (2110) is driven to rotate according to the temperature collected by the temperature sensor.

6. The BCB passivation apparatus according to claim 3, characterized in that, The temperature control ring (21) also includes a collar (214) sleeved on the outside of the steering ring (213). A rolling element (2131) is provided on the outer wall of the steering ring (213), and a slide (2140) is provided on the inner wall of the collar (214). The rolling element (2131) is embedded in the slide (2140) so that the steering ring (213) can rotate within the collar (214).

7. The BCB passivation apparatus according to claim 3, characterized in that, The air supply ring (212) is provided with a circumferential cavity (2120), and all the air blowing pipes (210) are connected to the circumferential cavity (2120); The air inlet of the air blowing pipe (210) is a ball head (2101), which is embedded in the circumferential cavity (2120). The ball head (2101) rotates in the circumferential cavity (2120) to change the angle between the axis of the air blowing pipe (210) and the vacuum tube (1).

8. The BCB passivation apparatus according to claim 1, characterized in that, The guide structure (20) corresponds one-to-one with the temperature control ring (21). The temperature control ring (21) is suspended on the corresponding guide structure (20). The temperature control ring (21) can move along the axial direction of the guide structure (20). The guide structure (20) includes a transmission rod (200) and a support rod (201). A double ring (215) is provided on the outer wall of the temperature control ring (21). The double ring (215) includes a first sleeve (2150) and a second sleeve (2151). The first sleeve (2150) is sleeved on the transmission rod (200), and the second sleeve (2151) is sleeved on the support rod (201). The first sleeve (2150) moves on the transmission rod (200) to drive the second sleeve (2151) to move on the support rod (201).

9. The BCB passivation apparatus according to any one of claims 1-8, characterized in that, At least one flow equalizer (10) is provided inside the vacuum tube (1), and the flow equalizer (10) is used to adjust the temperature at different positions inside the vacuum tube (1).

10. A method of using a BCB passivation device, characterized in that, Using the BCB passivation apparatus according to any one of claims 1-9, comprising: The vacuum tube (1) is evacuated and inert gas is injected for gas replacement; The preset axial position of the temperature control ring (21) is set according to the position of the chip (3) to be passivated inside the vacuum tube (1), and the parameters and output angle of the heat exchange gas are set according to the temperature control requirements. The temperature control ring (21) is moved to the preset axial position by the guide structure (20), and the heat exchange gas is output to control the temperature of the vacuum tube (1).

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