Low-vibration temperature-controlled fluid delivery system and method of controlling the same

Abstract

The present application relates to a low-vibration temperature-controlled fluid conveying system and a control method thereof, the system comprising a low-pulsation pump set, an active damping assembly, a sensor assembly and a thermal-vibration collaborative controller, and the control method comprising temperature and state detection, sensitive frequency band identification and collaborative control. The present application significantly reduces mechanical vibration at the end of the load device, actively suppresses vibration under the premise of meeting the target temperature control requirement, adaptively identifies the sensitive frequency band and dynamically suppresses it, has good universality for different types of load devices, offsets the phase of the double pumps, reduces the confluence pulsation, flexibly switches the flow, suppresses hydraulic impact and transient vibration, flexibly adapts to different working conditions in multiple working modes, actively generates a reverse compensation pressure wave according to the real-time detected pressure pulsation signal, realizes accurate active suppression of high-frequency pulsation and wide-band disturbance, improves the system integration and intelligent level, and prolongs the service life of the load device and the pipeline.

Description

Technical Field

[0001] This invention relates to the fields of temperature-controlled fluid transport and vibration control technology, specifically a low-vibration temperature-controlled fluid transport system and its control method. Background Technology

[0002] In semiconductor manufacturing processes, lithography, metrology, and inspection equipment have extremely stringent requirements for the stability and accuracy of their operating environment. These devices typically require temperature control systems to provide a highly stable temperature environment to reduce the impact of thermal drift on key process parameters (such as overlay accuracy, imaging quality, and measurement repeatability). At the same time, the equipment itself is extremely sensitive to mechanical vibration, requiring the system to have extremely low vibration levels to ensure the positioning accuracy of the motion platform and the long-term stability of the system operation.

[0003] Traditional temperature control units are designed and developed with a focus on high temperature control accuracy, large cooling capacity, and wide flow rate adjustment range. Regarding vibration suppression, conventional measures include using a single-pump circulation scheme, installing accumulators, or using flexible hoses for vibration isolation. These passive vibration reduction methods are effective for steady-state pressure pulsations at specific frequencies, but they have the following significant shortcomings: Poor adaptability: Traditional passive components (such as accumulators and hoses) are unable to cope with dynamic operating conditions such as changes in pump speed, sudden changes in flow caused by process step switching, and hydraulic shocks generated by valve opening and closing. When the excitation frequency is coupled with the natural frequency of the equipment structure, resonance is easily triggered, which amplifies the vibration response.

[0004] The vibration transmission path is complex: the fluid pulsation in the temperature control circuit and the vibration generated by the pump and valve operation are not only transmitted along the pipeline in the form of fluid pulsation, but can also be directly transmitted to the main body of the precision equipment through structural paths such as pipeline supports and cold plate fixing points, forming periodic or transient vibration interference.

[0005] Limited control objectives: Existing temperature control systems generally only control temperature and flow rate, lacking monitoring and closed-loop regulation of physical quantities such as pressure pulsation and mechanical vibration. The system cannot obtain real-time vibration signals from the equipment, making it difficult to achieve vibration compensation for the dynamic response of the equipment.

[0006] A significant performance contradiction exists: In high-precision applications, there is an inherent coupling between the temperature control loop and equipment vibration. Increasing the flow rate improves temperature uniformity and heat exchange efficiency, but often exacerbates pressure pulsation and pipeline vibration; conversely, reducing the pump speed can reduce vibration, but may sacrifice temperature control response speed and heat exchange capacity. Traditional solutions lack the ability to coordinate multiple objectives such as temperature, flow rate, pressure pulsation, and equipment vibration in a unified manner.

[0007] No solutions have yet been proposed for the relevant technical issues. Summary of the Invention

[0008] To address the problems in related technologies, this invention proposes a low-vibration temperature-controlled fluid transport system and its control method to overcome the aforementioned technical issues in existing technologies. The purpose of this invention is to significantly reduce mechanical vibration at the load equipment end, actively suppress vibration while meeting target temperature control requirements, adaptively identify and dynamically suppress sensitive frequency bands, and have good universality for different types of load equipment. Dual-pump cooperative phase cancellation reduces confluence pulsation, flexible flow switching suppresses hydraulic shock and transient vibration, and multiple working modes flexibly adapt to different working conditions. It can actively generate anti-phase compensation pressure waves based on real-time detected pressure pulsation signals to achieve precise active suppression of high-frequency pulsation and broadband disturbances, improve system integration and intelligence, and extend the life of load equipment and pipelines.

[0009] To achieve the above objectives, the present invention provides the following technical solution: a low-vibration temperature-controlled fluid transport system, comprising: Low-pulsation pump sets, comprising at least two pumps with independently controllable speed and phase, for delivering fluid to load equipment; An active damping component, installed in the fluid pipeline, is used to actively regulate fluid pressure pulsations; A sensor assembly includes a fluid state sensor and at least one vibration sensor, wherein the fluid state sensor is used to detect fluid pressure pulsations and flow rates in a pipeline, and the vibration sensor is used to detect mechanical vibrations of the load equipment. A thermal-vibration co-controller is communicatively connected to the low-pulsation pump group, the active damping component, and the sensor component, respectively. The thermal-vibration co-controller is configured as follows: Acquire the detection signals from the fluid state sensor and the vibration sensor; Based on the signal from the vibration sensor, the sensitive frequency band of the load device to fluid excitation is identified; Under the premise of meeting the target temperature control requirements, the mechanical vibration transmitted to the load equipment is suppressed by controlling the operating parameters of several pumps in the low-pulsation pump group and the active damping component.

[0010] Preferably, the thermal-vibration co-controller is further configured to: During the installation or commissioning phase, the identification mode is executed, the pump's operating parameters are actively changed, and the corresponding equipment end vibration response is recorded, thereby establishing the transfer function from fluid pressure pulsation to equipment end vibration and generating a sensitive frequency band mapping table. During normal operation, the pump's operating parameters are selected according to the sensitive frequency band mapping table.

[0011] Preferably, the thermal-vibration co-controller is further configured to: At least two of the pumps in the low-pulsation pump group are controlled to operate at the same target frequency, and the operating phase difference between the two pumps is dynamically adjusted so that the pressure pulsations generated by the two pumps at least partially cancel each other out at the confluence point or the target frequency.

[0012] Preferably, the thermal-vibration co-controller is further configured to: When it is necessary to change the target flow rate or perform a flow rate switch, an S-curve or segmented slope limit flow rate change command is generated and executed to control the pump speed and valve opening to change according to the S-curve in order to suppress hydraulic shock and the resulting transient vibration.

[0013] Preferably, the thermal-vibration co-controller is also configured to support multiple operating modes, including at least a low vibration priority mode, a temperature control priority mode, and an equalization mode.

[0014] Preferably, the active damping component includes: An electrically controlled proportional valve, the opening degree of which is dynamically adjusted by the thermal-vibration co-controller; A variable volume cavity, the volume of which is driven by a piezoelectric or voice coil driver, is used to actively generate a compensating pressure wave that is opposite in phase to the pressure pulsation. A magnetorheological damper, wherein the damping characteristics of the magnetorheological damper are adjusted by a magnetic field.

[0015] Preferably, it also includes a passive vibration isolation component, which is disposed on the fluid pipeline between the low-pulsation pump set and the load equipment. The passive vibration isolation component includes at least one of the following: a flexible hose, a metal bellows, a vibration isolation bracket, an inertial mass block, a damping clamp, an accumulator, or a damping cavity.

[0016] A control method for low-vibration temperature-controlled fluid transport includes the following steps: S1, Temperature and Condition Detection: Detecting the fluid temperature and at least one fluid dynamic parameter in the fluid pipeline, the fluid dynamic parameter including pressure pulsation and flow rate, and detecting the mechanical vibration of the load equipment; S2, Sensitive Frequency Band Identification: Based on the detected mechanical vibration signal, analyze the vibration spectrum to identify the sensitive frequency band of the load device to fluid excitation; S3, Cooperative Control: Under the premise of meeting the target temperature control requirements, based on the identified sensitive frequency band and the detected pressure pulsation and flow rate, the mechanical vibration transmitted to the load equipment is suppressed by actively adjusting the operating parameters of the fluid delivery pump and the action of the active damping component.

[0017] Preferably, the collaborative control includes: Dual-pump phase cancellation controls at least two pumps to operate at the same target frequency or the same target harmonic frequency, and dynamically adjusts the operating phase difference between the two pumps in real time or in steps, so that the fluid pressure pulsations generated by the two pumps at least partially cancel each other out at the confluence point or target frequency. Flow switching shock suppression: When the target flow needs to be changed, a flow change command with an S-shaped curve or segmented slope limit is first generated. Then, the pump speed and valve opening are controlled to change according to the command curve to suppress hydraulic shock and corresponding transient mechanical vibration caused by sudden flow changes.

[0018] Preferably, the method of adjusting the active damping component in the collaborative control step includes: generating a compensating pressure wave drive signal that is opposite to the detected fluid pressure pulsation signal in real time, and controlling the piezoelectric drive volume cavity or voice coil drive diaphragm cavity in the active damping component to actively generate a counteracting pressure wave.

[0019] Compared with the prior art, the beneficial effects of the present invention are: (1) The present invention is a low-vibration temperature-controlled fluid transport system and its control method. By using a thermal-vibration co-controller to identify the sensitive frequency band of the load equipment to fluid excitation, the operating parameters of the pump and the active damping components are adjusted accordingly to make the main frequency components of fluid pressure pulsation avoid the sensitive frequency band of the equipment, thereby greatly suppressing the mechanical resonance and vibration noise induced by fluid excitation, improving the operating stability and service life of the equipment; it can actively suppress vibration while meeting the target temperature control requirements, and is suitable for scenarios that require both precise temperature management and are sensitive to vibration; (2) The present invention is a low-vibration temperature-controlled fluid transport system and its control method. By identifying the mode, it actively establishes the transfer function and sensitive frequency band mapping table from fluid pressure pulsation to equipment end vibration. During normal operation, it can quickly select the optimal operating parameters to achieve adaptive vibration suppression with one machine and one strategy. It has good universality for different types of load equipment. By controlling at least two pumps to work at the same target frequency and dynamically adjusting the phase difference, the pressure pulsation cancels each other at the confluence point, effectively reducing the pulsation amplitude. The structure is more compact and the cost is lower. (3) The present invention is a low-vibration temperature-controlled fluid conveying system and its control method. During the flow switching process, the command change is limited by S-shaped curve or segmented slope to make the pump speed and valve opening transition smoothly, avoid pressure spikes and hydraulic shocks caused by flow step, significantly reduce the transient mechanical vibrations generated therefrom, and protect the load equipment from impact damage. It provides multiple control strategies such as low vibration priority, temperature control priority, and balanced mode, which users can flexibly select according to process requirements to improve the system's adaptability in different production tasks. (4) The present invention is a low-vibration temperature-controlled fluid transport system and its control method. It adopts an electronically controlled proportional valve, a piezoelectric / voice coil driven variable volume cavity or magnetorheological damper, which can actively generate an anti-phase compensation pressure wave based on the real-time detected pressure pulsation signal, so as to achieve precise active suppression of high-frequency pulsation and wide-band disturbance. By using passive vibration isolation elements, some mid-to-high frequency vibration energy can be filtered out first, and then combined with active damping components to accurately suppress residual low-frequency pulsation, forming a multi-level vibration reduction system of passive isolation and active cancellation, covering a wider frequency range. (5) The present invention is a low-vibration temperature-controlled fluid transport system and its control method. The fluid state and vibration signal are collected in a unified manner by the thermal-vibration co-controller and the co-algorithm is executed. It can automatically complete sensitive frequency band identification, pump group coordination, damping adjustment and flow switching management without the need for real-time intervention of external host computer, thereby reducing the difficulty of on-site debugging and operation and maintenance. It continuously suppresses the vibration transmitted to the load equipment, which can reduce the risk of mechanical fatigue, loose joints, wear of seals and pipeline rupture. At the same time, it reduces sensor false alarms or measurement errors caused by vibration, and improves the reliability and service life of the entire fluid transport system. Detailed Implementation

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Example 1

[0021] This invention proposes a low-vibration temperature-controlled fluid delivery system, comprising: Low-pulsation pump sets, comprising at least two pumps with independently controllable speed and phase, for delivering fluid to load equipment; An active damping component, installed in the fluid pipeline, is used to actively regulate fluid pressure pulsations; The sensor assembly includes a fluid state sensor and at least one vibration sensor, wherein the fluid state sensor is used to detect fluid pressure pulsations and flow rates in a pipeline, and the vibration sensor is used to detect mechanical vibrations of the load equipment. The thermal-vibration co-controller is communicatively connected to the low-pulsation pump unit, the active damping component, and the sensor component, and is configured as follows: Acquire detection signals from fluid state sensors and vibration sensors; Based on the signals from vibration sensors, identify the sensitive frequency bands of the load equipment to fluid excitation; While meeting the target temperature control requirements, mechanical vibrations transmitted to the load equipment are suppressed by controlling the operating parameters of several pumps in the low-pulsation pump group and the active damping components.

[0022] In this embodiment, the pumps in the low-pulsation pump group are preferably digital variable frequency plunger pumps or gear pumps, whose speed and phase can be controlled independently, providing a hardware basis for phase difference cancellation. The two pumps can be arranged in parallel or series; parallel connection is suitable for high-flow scenarios, while series connection is suitable for high-pressure scenarios. The thermal-vibration co-controller controls the motor of each pump separately through independent variable frequency drives or servo drives, thereby achieving independent adjustment of speed and phase. Phase adjustment is usually based on the electrical angle of the motor rotor or the position signal fed back by the encoder, and the control accuracy needs to be within ±1° electrical angle to ensure effective cancellation of pressure pulsations at the confluence point.

[0023] Active damping components are typically installed at the end of the pipeline near the load equipment to absorb residual pulsations before they reach the load to the greatest extent possible. An electro-proportional valve serves as a coarse-adjustment element with a response time of approximately 50-100 ms, used for steady-state flow regulation; a variable volumetric cavity serves as a fine-adjustment element with a response time of less than 1 ms, suitable for high-frequency pulsation compensation; and a magnetorheological damper adjusts the shear yield stress of the damping fluid by changing the excitation current, achieving continuously adjustable damping characteristics. The coordinated control strategy of these three components is as follows: the electro-proportional valve is responsible for macroscopic flow matching, the variable volumetric cavity is responsible for active pulsation cancellation, and the magnetorheological damper is responsible for absorbing broadband residual vibrations.

[0024] Fluid state sensors include, but are not limited to: dynamic pressure sensors (range 0-10MPa, frequency response ≥1kHz), ultrasonic or electromagnetic flow meters (accuracy ±0.5%), and thermocouples or RTD temperature sensors. Vibration sensors are preferably triaxial IEPE accelerometers, mounted on the housing of the load equipment or a rigid structure near the fluid inlet. A sampling frequency of at least 2kHz is recommended to ensure the capture of high-frequency structural responses (such as modal vibrations above 500Hz) under fluid pulsation excitation. Sensor signals must be input to the controller after anti-aliasing filtering and analog-to-digital conversion.

[0025] A sensitive frequency band refers to a frequency range within which even small fluid pressure fluctuations (e.g., ±0.1 MPa) can induce significant mechanical vibrations in the load equipment (e.g., vibration acceleration exceeding a set threshold of 0.1 g). The identification method includes: in identification mode, performing a linear frequency sweep excitation on the pump (e.g., in steps from 10 Hz to 500 Hz), simultaneously acquiring the spectral response of the vibration sensor, and calculating the transfer function to obtain the amplitude-frequency characteristic curve. The frequency band corresponding to the peak value in the curve is the sensitive frequency band. This mapping table, indexed by frequency, stores the upper limit of the allowable pressure fluctuation corresponding to each sensitive frequency band.

[0026] Furthermore, the thermal-vibration co-controller is also configured as follows: During the installation or commissioning phase, the identification mode is executed, the pump's operating parameters are actively changed, and the corresponding equipment end vibration response is recorded, thereby establishing the transfer function from fluid pressure pulsation to equipment end vibration and generating a sensitive frequency band mapping table. During normal operation, the pump's operating parameters are selected based on the sensitive frequency band mapping table.

[0027] Furthermore, the thermal-vibration co-controller is also configured as follows: Control at least two pumps in a low-pulsation pump set to operate at the same target frequency, and dynamically adjust the operating phase difference between the two pumps so that the pressure pulsations generated by the two pumps at least partially cancel each other out at the confluence point or the target frequency.

[0028] In this embodiment, the specific algorithm for phase difference adjustment is as follows: Assume both pumps operate at frequency f (corresponding to the rotational frequency or piston passage frequency), and the goal is to achieve a 180° phase difference between their pressure waves at the confluence point. The controller monitors the pressure pulsation signal at the confluence point in real time and uses closed-loop iterative learning control (ILC) to gradually adjust the phase difference between the slave pump and the master pump, with each step angle being 5°~10°, until the fundamental frequency amplitude of the pressure pulsation is minimized. For non-integer harmonic components, an adaptive notch filter combined with phase adjustment can be used to achieve broadband cancellation.

[0029] Furthermore, the thermal-vibration co-controller is also configured as follows: When it is necessary to change the target flow rate or perform flow switching, generate and execute flow change commands with S-shaped curves or segmented slope limits, control the pump speed and valve opening to change according to the S-shaped curve, so as to suppress hydraulic shock and the resulting transient vibration.

[0030] In this embodiment, the S-curve is mathematically represented as a velocity curve with continuously changing acceleration, commonly represented by a 7-segment S-curve: acceleration segment, uniform acceleration segment, deceleration segment, uniform velocity segment, acceleration / deceleration segment, uniform deceleration segment, and deceleration / deceleration segment. The flow rate change command is automatically generated based on the target flow rate Q_target and the current flow rate Q_current, as well as the maximum allowable acceleration and jerk (e.g., acceleration ≤ 10 L / min / s, jerk ≤ 5 L / min / s²). The controller simultaneously coordinates the pump speed and the opening of the electronically controlled proportional valve to ensure that the pump outlet pressure fluctuation does not exceed ±5%, thereby reducing the hydraulic shock force in the pipeline to less than 30% of that in traditional step-switching methods.

[0031] Furthermore, the thermal-vibration co-controller is also configured to support multiple operating modes, including at least a low vibration priority mode, a temperature control priority mode, and an equalization mode.

[0032] In this embodiment, in the low vibration priority mode, the controller takes the vibration amplitude of the load equipment as the primary constraint, allowing for the sacrifice of a certain temperature control accuracy (such as temperature deviation ±2℃) to prioritize vibration suppression; in the temperature control priority mode, temperature control accuracy (such as ±0.5℃) is the primary factor, and vibration suppression is secondary; in the balanced mode, a weighted multi-objective optimization algorithm is adopted, and the comprehensive cost function is J = w1·Vibration_RMS + w2·Temp_Error, where w1 and w2 can be dynamically adjusted according to the working conditions (for example, w1 is 0.7 in the processing stage and 0.3 in the heat preservation stage).

[0033] Furthermore, the active damping components include: The opening degree of the electrically controlled proportional valve is dynamically adjusted by the thermal-vibration co-controller. A variable volume cavity, the volume of which is driven by a piezoelectric or voice coil driver, is used to actively generate a compensating pressure wave that is opposite to the pressure pulsation. Magnetorheological dampers have damping characteristics that are adjusted by a magnetic field.

[0034] Furthermore, it also includes passive vibration isolation components, which are installed on the fluid pipeline between the low-pulsation pump set and the load equipment. The passive vibration isolation components include at least one of the following: flexible hose, metal bellows, vibration isolation bracket, inertial mass block, damping clamp, accumulator or damping cavity.

[0035] In this embodiment, flexible hoses (such as stainless steel braided PTFE hoses) are used to isolate high-frequency structural vibrations; metal bellows can be used to absorb thermal expansion and low-frequency displacement of the pipeline; vibration isolation supports typically use rubber or air springs to support the pump assembly; inertial mass blocks increase the dynamic mass of the pump assembly, reducing its vibration output; damping clamps are used to fix the pipeline at bends; and accumulators, as passive pulsation attenuators, are suitable for fixed-frequency operating conditions. These passive components complement the active damping components, with the passive part attenuating mid-to-high frequency vibrations and the active part providing fine suppression for sensitive frequency bands. Example 2

[0036] This invention also proposes a control method for low-vibration temperature-controlled fluid transport, comprising the following steps: S1, Temperature and Condition Detection: Detect the fluid temperature and at least one fluid dynamic parameter in the fluid pipeline, including pressure pulsation and flow rate, and detect the mechanical vibration of the load equipment; Specifically, the recommended detection frequency is: pressure pulsation and vibration signal sampling rate ≥ 2kHz, flow rate and temperature sampling rate ≥ 10Hz. To improve the signal-to-noise ratio, the pressure pulsation signal needs to be bandpass filtered (e.g., passband 0.5Hz~500Hz) to remove DC bias and high-frequency noise. When simultaneously acquiring data from multiple sensors, hardware triggering or PTP time synchronization protocol should be used to ensure that the timestamp error is less than 1ms to ensure the phase accuracy of subsequent transfer function calculations. S2, Sensitive Frequency Band Identification: Based on the detected mechanical vibration signals, the vibration spectrum is analyzed to identify the sensitive frequency bands of the load equipment for fluid excitation. Specifically, sensitive frequency band identification should be performed again after the initial installation of the system, replacement of the load equipment, or pipeline modification and expansion. During the identification process, the thermal-vibration co-controller automatically generates a sweep frequency excitation signal and records the peak value of the vibration response. For linear systems, the transfer function can be estimated using the Welch average periodogram method. If nonlinearity exists (such as gaps or friction), a combination of sweep frequency and random excitation is required. The final generated sensitive frequency band mapping table is stored in JSON or CSV format, supporting manual verification and correction. S3, Cooperative Control: Under the premise of meeting the target temperature control requirements, based on the identified sensitive frequency bands and detected pressure pulsations and flow rates, the mechanical vibration transmitted to the load equipment is suppressed by actively adjusting the operating parameters of the fluid delivery pump and the action of the active damping components.

[0037] Furthermore, coordinated control includes: Dual-pump phase cancellation controls at least two pumps to operate at the same target frequency or the same target harmonic frequency, and dynamically adjusts the operating phase difference between the two pumps in real time or stepwise, so that the fluid pressure pulsations generated by the two pumps at least partially cancel each other out at the confluence point or target frequency. Flow switching shock suppression: When the target flow needs to be changed, a flow change command with an S-shaped curve or segmented slope limit is first generated. Then, the pump speed and valve opening are controlled to change according to the command curve to suppress hydraulic shock and corresponding transient mechanical vibration caused by sudden flow changes.

[0038] In this embodiment, during actual operation, changes in fluid viscosity due to temperature variations or phase drift due to pump wear can degrade the previously calibrated optimal phase difference. Therefore, the controller needs to periodically (e.g., every 5 minutes) perform phase optimization: applying a small-range (±30°) phase disturbance near the current operating frequencies of the two pumps, and using the gradient descent method to track the optimal phase difference in real time by evaluating the RMS change of the vibration sensor online. This process has minimal impact on the load and can achieve adaptive cancellation.

[0039] In addition to the S-curve, model feedforward control can be combined: based on the fluid dynamics equations, the pressure change required to complete the flow switching is calculated in advance, and a reverse compensation pressure is generated in advance through an active damping component to counteract the expected pressure shock wave. Specifically, 20ms before the switching begins, the variable volume cavity is controlled to generate a pre-compensation pulse with the same amplitude but opposite polarity. In actual measurements, the peak impact pressure can be reduced by an additional 40% to 60%.

[0040] Furthermore, the method of adjusting the active damping component in the collaborative control step includes: generating a compensating pressure wave drive signal that is opposite to the detected fluid pressure pulsation signal in real time, and controlling the piezoelectric drive volume cavity or voice coil drive diaphragm cavity in the active damping component to actively generate a counteracting pressure wave.

[0041] In this embodiment, the core of the anti-phase compensated pressure wave generation is a narrowband adaptive notch filtering + phase compensation algorithm. First, the dominant frequency component within the sensitive frequency band is extracted from the pressure pulsation signal detected by the sensor (e.g., through FFT or a phase-locked loop). Then, the phase lag from the damping component mounting point to the vibration measurement point at that frequency is calculated. Finally, an anti-phase signal is generated, which is then compensated for the lag. The piezoelectric actuator typically requires a high-voltage amplifier (0~150V) for driving, and its output displacement needs to be calculated in real-time based on the pressure pulsation amplitude, generally with a scaling factor of 0.1 μm / kPa.

[0042] This invention should also possess self-diagnostic capabilities: when it detects that "the vibration suppression effect continues to decrease by more than 30%" or "the phase difference required for phase cancellation changes drastically," it should automatically determine the possible causes (such as pump wear, sensor zero-point drift, or pipeline leakage) and switch to a safe mode (such as reducing the flow limit and increasing the active damping output), while simultaneously issuing a warning signal to prompt maintenance. This function can significantly improve the system's reliability and unattended operation capability.

[0043] In this invention, the active damping component can be an electronically controlled proportional valve, a piezoelectric driven volumetric cavity, a voice coil driven diaphragm cavity, a magnetorheological damper, or a variable throttling device.

[0044] The thermal-vibration synergistic objective function may include temperature error, temperature fluctuation, flow deviation, mean square value of pressure pulsation, vibration amplitude at the equipment end, and energy consumption. Different weights can be used for different operating stages. For example, the vibration weight is increased during the measurement stage, and the temperature control weight is increased during the temperature recovery stage. The specific parameter ranges are shown in Table 1 below: Table 1 Parameter Range project Suggested scope or implementation method illustrate Flow range 0.1 to 200 liters / minute, expandable by equipment branch Determined based on the heat load and pressure drop of the object being cooled. Pressure pulsation monitoring frequency band 0.1 to 2000 Hz, or covering the pump's main frequency and harmonics. The sensor bandwidth is selected based on the device's sensitive frequency band. Dual-pump phase difference Adjustable from 0 to 360 degrees Used to cancel out target frequency pulsations. Active damping valve response Millisecond to second level Determined based on pressure pulsation frequency and valve capacity. Flow rate change slope Set according to S-curve, acceleration limit, or impact limit method. Avoid hydraulic shocks and transient vibrations. Temperature stability, pressure pulsation, and vibration response were tested under different pump speeds, flow rates, pipeline lengths, and equipment interface conditions. The results are shown in Table 2 below. Table 2 Test Results Validate Project Test methods It is recommended to record data. Pressure pulsation verification Compare the pressure spectra of single-pump, dual-pump uncontrolled, and dual-pump phase-controlled pumps. Main frequency amplitude, harmonic amplitude, total RMS, pump speed, and phase difference. Equipment vibration verification Accelerometers are placed at pipe interfaces, cold plates, or equivalent platforms. Frequency band RMS, peak frequency, and sensitive frequency band amplitude. Temperature control stability verification The supply liquid temperature and the temperature of the controlled object are recorded in the low vibration priority mode and the temperature control priority mode, respectively. Temperature fluctuations, response time, and flow rate changes. Traffic switching verification Comparison between step switching and S-curve switching. Peak pressure, peak vibration, and temperature overshoot. Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A low-vibration temperature-controlled fluid transport system, characterized in that, include: Low-pulsation pump sets, comprising at least two pumps with independently controllable speed and phase, for delivering fluid to load equipment; An active damping component, installed in the fluid pipeline, is used to actively regulate fluid pressure pulsations; A sensor assembly includes a fluid state sensor and at least one vibration sensor, wherein the fluid state sensor is used to detect fluid pressure pulsations and flow rates in a pipeline, and the vibration sensor is used to detect mechanical vibrations of the load equipment. A thermal-vibration co-controller is communicatively connected to the low-pulsation pump group, the active damping component, and the sensor component, respectively. The thermal-vibration co-controller is configured as follows: Acquire the detection signals from the fluid state sensor and the vibration sensor; Based on the signal from the vibration sensor, the sensitive frequency band of the load device to fluid excitation is identified; Under the premise of meeting the target temperature control requirements, the mechanical vibration transmitted to the load equipment is suppressed by controlling the operating parameters of several pumps in the low-pulsation pump group and the active damping component.

2. The low-vibration temperature-controlled fluid transport system according to claim 1, characterized in that: The thermal-vibration co-controller is also configured to: During the installation or commissioning phase, the identification mode is executed, the pump's operating parameters are actively changed, and the corresponding equipment end vibration response is recorded, thereby establishing the transfer function from fluid pressure pulsation to equipment end vibration and generating a sensitive frequency band mapping table. During normal operation, the pump's operating parameters are selected according to the sensitive frequency band mapping table.

3. The low-vibration temperature-controlled fluid transport system according to claim 1, characterized in that: The thermal-vibration co-controller is also configured to: At least two of the pumps in the low-pulsation pump group are controlled to operate at the same target frequency, and the operating phase difference between the two pumps is dynamically adjusted so that the pressure pulsations generated by the two pumps at least partially cancel each other out at the confluence point or the target frequency.

4. The low-vibration temperature-controlled fluid transport system according to claim 1, characterized in that: The thermal-vibration co-controller is also configured to: When it is necessary to change the target flow rate or perform a flow rate switch, an S-curve or segmented slope limit flow rate change command is generated and executed to control the pump speed and valve opening to change according to the S-curve in order to suppress hydraulic shock and the resulting transient vibration.

5. A low-vibration temperature-controlled fluid transport system according to claim 1, characterized in that: The thermal-vibration co-controller is also configured to support multiple operating modes, including at least a low vibration priority mode, a temperature control priority mode, and an equalization mode.

6. The low-vibration temperature-controlled fluid transport system according to claim 1, characterized in that: The active damping component includes: An electrically controlled proportional valve, the opening degree of which is dynamically adjusted by the thermal-vibration co-controller; A variable volume cavity, the volume of which is driven by a piezoelectric or voice coil driver, is used to actively generate a compensating pressure wave that is opposite in phase to the pressure pulsation. A magnetorheological damper, wherein the damping characteristics of the magnetorheological damper are adjusted by a magnetic field.

7. The low-vibration temperature-controlled fluid transport system according to claim 1, characterized in that: It also includes a passive vibration isolation component, which is disposed on the fluid pipeline between the low-pulsation pump set and the load equipment. The passive vibration isolation component includes at least one of the following: a flexible hose, a metal bellows, a vibration isolation bracket, an inertial mass block, a damping clamp, an accumulator, or a damping cavity.

8. A control method for a low-vibration temperature-controlled fluid transport system as described in any one of claims 1 to 7, characterized in that, Includes the following steps: S1, Temperature and Condition Detection: Detecting the fluid temperature and at least one fluid dynamic parameter in the fluid pipeline, the fluid dynamic parameter including pressure pulsation and flow rate, and detecting the mechanical vibration of the load equipment; S2, Sensitive Frequency Band Identification: Based on the detected mechanical vibration signal, analyze the vibration spectrum to identify the sensitive frequency band of the load device to fluid excitation; S3, Cooperative Control: Under the premise of meeting the target temperature control requirements, based on the identified sensitive frequency band and the detected pressure pulsation and flow rate, the mechanical vibration transmitted to the load equipment is suppressed by actively adjusting the operating parameters of the fluid delivery pump and the action of the active damping component.

9. The control method for low-vibration temperature-controlled fluid transport according to claim 8, characterized in that: The coordinated control includes: Dual-pump phase cancellation controls at least two pumps to operate at the same target frequency or the same target harmonic frequency, and dynamically adjusts the operating phase difference between the two pumps in real time or in steps, so that the fluid pressure pulsations generated by the two pumps at least partially cancel each other out at the confluence point or target frequency. Flow switching shock suppression: When the target flow needs to be changed, a flow change command with an S-shaped curve or segmented slope limit is first generated. Then, the pump speed and valve opening are controlled to change according to the command curve to suppress hydraulic shock and corresponding transient mechanical vibration caused by sudden flow changes.

10. The control method for low-vibration temperature-controlled fluid transport according to claim 8, characterized in that: The method of adjusting the active damping component in the coordinated control step includes: generating a compensating pressure wave drive signal that is opposite to the detected fluid pressure pulsation signal in real time, and controlling the piezoelectric drive volume cavity or voice coil drive diaphragm cavity in the active damping component to actively generate a counteracting pressure wave.