Furnace tube apparatus
By using a graphite layer and purging gas to isolate oxygen in the furnace tube equipment, the problem of easy failure of the seal at high temperature was solved, and the high-temperature stability of the seal and the safety of the equipment were achieved.
Patent Information
- Application Number
- CN202510577450.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-30
- Publication Date
- 2026-11-03
AI Technical Summary
Traditional sealing structures are prone to failure in high-temperature environments, leading to aging and deformation of the seals, which affects the stability of the process and the safety of the equipment.
A graphite layer is used as an annular seal, and purge gas is provided to the gap through a purge gas path to isolate oxygen. Combined with a silicon carbide layer, it enhances high temperature resistance and oxidation prevention, and reserves expansion space to adapt to temperature changes.
It improves the stability of seals in high-temperature environments, prevents oxidation failure, and ensures the stability of the process and the safety of equipment.
Smart Images
Figure CN123035895A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing equipment, specifically to a furnace tube device. Background Technology
[0002] In ultra-high temperature furnace tube equipment, it is often necessary to operate stably at temperatures above 1300℃ for extended periods to ensure precise control of process parameters and product quality. However, the high-temperature environment poses significant challenges to the material properties and durability of various key components of the equipment, with the furnace tube seals being particularly crucial.
[0003] The sealing of the furnace tube directly affects the process stability, equipment lifespan, and safety of the entire system. Due to the extremely high internal temperature of the furnace tube, the temperature at the sealing point at the bottom of the tube will also be very high. Traditional sealing structures typically combine rubber rings with auxiliary cooling systems to reduce the temperature at the seal and extend the service life of the seals. However, the traditional fluororubber seals used in existing technology are primarily designed for low-temperature sealing, and their material properties have significant limitations in high-temperature environments. Although cooling systems can reduce the temperature to some extent, in actual operation, the cooling effect is still insufficient to bring the seal to the ideal operating temperature range of fluororubber. This leads to accelerated aging, deformation, and even failure of the seals under high-temperature conditions, thus affecting the stability of the entire process and the safe operation of the equipment. Summary of the Invention
[0004] This application addresses the technical problem of easy failure of the bottom seal of furnace tube equipment through the following technical solution:
[0005] A furnace tube device, comprising:
[0006] The base includes a first outwardly protruding outer edge;
[0007] The reaction tube includes an open end, the open end having an outwardly protruding second outer edge, and the second outer edge being disposed above the first outer edge;
[0008] A first annular seal is disposed between the first outer edge and the second outer edge;
[0009] An annular mounting member includes a first end and a second end. The first end is disposed at the first outer edge, and the second end is disposed at the second outer edge. The annular mounting member is used to fix the first outer edge and the second outer edge, and the second end has a first gap in the radial direction of the reaction tube with respect to the outer wall of the reaction tube.
[0010] The first purging gas path is used to provide purging gas to the first gap to isolate oxygen.
[0011] In one embodiment of this application, the first annular seal includes a graphite layer.
[0012] In one embodiment of this application, the graphite layer includes a first graphite layer and a second graphite layer, wherein the density of the second graphite layer is greater than the density of the first graphite layer.
[0013] In one embodiment of this application, the first annular seal further includes a silicon carbide layer that encapsulates the graphite layer.
[0014] In one embodiment of this application, a second annular seal is further included, disposed between the second end and the second outer edge.
[0015] In one embodiment of this application, the second annular seal includes a graphite layer.
[0016] In one embodiment of this application, the graphite layer includes a first graphite layer and a second graphite layer, wherein the density of the second graphite layer is greater than the density of the first graphite layer.
[0017] In one embodiment of this application, the second annular seal further includes a silicon carbide layer that encapsulates the graphite layer.
[0018] In one embodiment of this application, a second gap is formed between the second annular seal and the outer wall of the reaction tube in the radial direction of the reaction tube.
[0019] In one embodiment of this application, the base further includes an upper protrusion disposed on the outer edge of the first outer edge, the upper surface of the upper protrusion being flush with the upper surface of the second outer edge, and the upper protrusion and the second outer edge jointly supporting the second annular seal.
[0020] In one embodiment of this application, a third gap exists between the second outer edge and the upper protrusion in the radial direction of the reaction tube, and a fourth gap exists between the first annular seal and the upper protrusion in the radial direction of the reaction tube.
[0021] In one embodiment of this application, the coefficient of thermal expansion of the second outer edge is greater than that of the first ring. Shaped seal The coefficient of thermal expansion, and the width of the third gap in the radial direction of the reaction tube. It is greater than the fourth gap.
[0022] In one embodiment of this application, the second end includes an air inlet channel, the air inlet channel includes a plurality of air outlets, the plurality of air outlets are disposed toward the first gap, and the first purge air path is connected to the air inlet channel.
[0023] In one embodiment of this application, a third annular seal is further included, disposed between the first end and the first outer edge.
[0024] In one embodiment of this application, a fifth gap is formed radially between the first end and the outer wall of the base in the reaction tube.
[0025] In one embodiment of this application, the furnace tube device further includes a second purge gas path for providing purge gas to the fifth gap to isolate oxygen.
[0026] In one embodiment of this application, the first end includes an air inlet channel, the air inlet channel includes a plurality of air outlets, the plurality of air outlets are disposed toward the fifth gap, and the second purge air path is connected to the air inlet channel.
[0027] In one embodiment of this application, the reaction tube is made of silicon carbide and the base is made of quartz.
[0028] In one embodiment of this application, the furnace tube device further includes:
[0029] A heater surrounds the outside of the reaction tube;
[0030] A crystal boat includes a plurality of support positions arranged vertically, the support positions being used to support a substrate; and
[0031] A driving device, connected to the crystal boat, is used to drive the crystal boat into the reaction tube and drive the crystal boat to rotate.
[0032] The positive and progressive effects of this application are as follows: the reaction tube will expand at high temperatures, and the setting of the first gap provides space for the expansion of the reaction tube. Purge the first gap through the first purging gas path to isolate oxygen, preventing the first annular seal from oxidizing and failing at high temperatures, thereby further improving the stability of the first annular seal in high-temperature environments. Attached Figure Description
[0033] Figure 1 This is a schematic diagram of the structure of a furnace tube device according to an embodiment of this application;
[0034] Figure 2 This is a schematic cross-sectional view of a furnace tube device according to an embodiment of this application;
[0035] Figure 3 For this application Figure 2 Enlarged view of point A in the middle;
[0036] Figure 4 This is a schematic cross-sectional view of the furnace tube equipment for removing the reaction tube according to an embodiment of this application. Detailed Implementation
[0037] The present application is further illustrated below by way of embodiments, but this does not limit the present application to the scope of the embodiments.
[0038] like Figures 1-3 As shown, this embodiment provides a furnace tube device, including a base 100, a reaction tube 200, a first annular seal 510, an annular mounting member 300, and a first purge gas passage 400. The base 100 includes an outwardly protruding first outer edge 110. The open end of the reaction tube 200 has an outwardly protruding second outer edge 210, which is disposed above the first outer edge 110. The first annular seal 510 is disposed between the first outer edge 110 and the second outer edge 210, and the first annular seal 510 includes a graphite layer. The annular mounting member 300 includes a first end 310 and a second end 320, the first end 310 being disposed at the first outer edge 110 and the second end 320 being disposed at the second outer edge 210. The annular mounting member 300 is used to fix the first outer edge 110 and the second outer edge 210. A first gap 610 is formed between the second end 320 and the outer wall of the reaction tube 200 in the radial direction of the reaction tube 200. The first purge gas path 400 is used to provide purge gas to the first gap 610 to isolate oxygen.
[0039] Graphite materials not only possess excellent high-temperature resistance, allowing them to exist stably in high-temperature environments, but also exhibit low thermal expansion, making them less prone to cracking under excessive temperature changes. By setting a first annular seal 510 containing a graphite layer between the first outer edge 110 of the base 100 and the second outer edge 210 of the reaction tube 200, and fixing it with an annular mounting member 300, a stable sealing effect is achieved even under high-temperature conditions. The reaction tube 200 expands at high temperatures, and the first gap 610 provides space for this expansion. Blowing the first gap 610 through the first purging air passage 400 isolates oxygen, preventing the graphite layer from oxidizing and failing at high temperatures, thereby further improving the stability of the first annular seal 510 in high-temperature environments.
[0040] In some embodiments, the graphite layer includes a first graphite layer and a second graphite layer, wherein the second graphite layer... The density of the second graphite layer is greater than that of the first graphite layer. The first graphite layer has a low density, which allows it to withstand the pressure during installation and provides elastic compensation. The second graphite layer has a high density, a more compact structure, and fewer internal pores, which improves its resistance to oxygen permeation. Specifically, the second graphite layer encapsulates the first graphite layer. In some embodiments, the first and second graphite layers can also be stacked, with the second graphite layer positioned above the first graphite layer, or the first graphite layer can serve as an intermediate layer, with the second graphite layers positioned above and below the first graphite layer, respectively.
[0041] In some embodiments, the first annular seal 510 further includes a silicon carbide layer that encapsulates the graphite layer. The silicon carbide layer is denser, which on the one hand prevents the graphite layer from oxidizing, and on the other hand reduces the release of graphite particles into the reaction tube 200, thereby reducing the risk of contaminating the substrate.
[0042] In some embodiments, the first annular seal 510 may not include a graphite layer, and the first annular seal 510 may be made of other high-temperature resistant materials.
[0043] In some embodiments, such as Figure 3 As shown, the furnace tube equipment also includes a second annular seal 520, disposed between the second end 320 of the annular mounting member 300 and the second outer edge 210 of the reaction tube 200. The second annular seal 520 includes a graphite layer. These embodiments, by adding the second annular seal 520, can further enhance the sealing effect at high temperatures. The second annular seal 520 and the first annular seal 510 form a double seal, providing redundant protection and effectively preventing leakage caused by partial failure of the first annular seal 510 or the second annular seal 520 under high-temperature conditions, thereby improving the overall stability of the furnace tube equipment.
[0044] In some embodiments, the second annular seal 520 has the same structure and material as the first annular seal 510.
[0045] In some embodiments, the second annular seal 520 may not include a graphite layer, and the second annular seal 520 may be made of other high-temperature resistant materials.
[0046] In some embodiments, a second gap 620 is provided between the second annular seal 520 and the outer wall of the reaction tube 200 in the radial direction of the reaction tube 200. The second gap 620 is provided to allow space for thermal expansion between the second annular seal 520 and the reaction tube 200, effectively alleviating stress concentration caused by material expansion under high temperature conditions.
[0047] like Figure 3 As shown, in some embodiments, the base 100 further includes an upper protrusion 120 disposed on the first The outer edge of the outer edge portion 110 has an upper surface of the upper protrusion 120 flush with the upper surface of the second outer edge portion 210. The upper protrusion 120 and the second outer edge portion 210 together support the second annular seal 520. The upper protrusion 120 and the second outer edge portion 210 jointly support the second annular seal 520, thereby ensuring that the second annular seal 520 receives uniform and stable support, reducing deformation caused by uneven stress, and improving the stability and reliability of the second annular seal 520 in high-temperature environments.
[0048] In some embodiments, a third gap 630 is formed between the second outer edge 210 and the upper protrusion 120 in the radial direction of the reaction tube 200, and a fourth gap 640 is formed between the first annular seal 510 and the upper protrusion 120 in the radial direction of the reaction tube 200. The third gap 630 and the fourth gap 640 can reserve space for thermal expansion, effectively alleviating stress concentration caused by material expansion under high temperature conditions, thereby further ensuring the adaptability of the second outer edge 210 and the first annular seal 510 during temperature changes and the overall sealing effect.
[0049] In some embodiments, the coefficient of thermal expansion of the second outer edge 210 is greater than that of the first annular seal 510, and the width of the third gap 630 in the radial direction of the reaction tube 200 is greater than that of the fourth gap 640 in the radial direction of the reaction tube 200, effectively accommodating the expansion difference between the second outer edge 210 and the first annular seal 510 at high temperatures.
[0050] In some embodiments, such as Figure 4 As shown, the second end 320 includes an air inlet channel 321, which includes multiple air outlets 322 facing the first gap 610. The first purge gas path 400 is connected to the air inlet channel 321. The purge gas is nitrogen or an inert gas. The second end 320 is provided with an air inlet channel 321, and multiple air outlets 322 facing the first gap 610 are arranged on the air inlet channel 321, so that the purge gas can enter the first gap 610, thereby forming a gas barrier, effectively isolating oxygen, preventing oxygen from oxidizing the first annular seal 510 and / or the second annular seal 520, reducing the sealing risks caused by oxidation under high temperature conditions, and ensuring that the first annular seal 510 and / or the second annular seal 520 are always in a controlled oxygen-free environment.
[0051] In some embodiments, the air inlet channel 321 may not be provided inside the second end 320. Instead, an annular air supply pipe is provided above the second end 320. The annular air supply pipe has multiple air outlets facing the reaction tube 200 and is connected to the first purge air passage 400. A gas barrier is formed by the annular air supply pipe.
[0052] like Figure 3 As shown, in some embodiments, a third annular seal 530 is further included, disposed between the first end 310 and the first outer edge 110. By adding the third annular seal 530, multiple seals can be formed in conjunction with the first annular seal 510 and the second annular seal 520, providing redundant protection for sealing in high-temperature environments. In some embodiments, the third annular seal 530 has the same structure and material as the first annular seal 510.
[0053] In some embodiments, a fifth gap 650 is provided between the first end 310 of the annular mounting member 300 and the outer wall of the base 100. The fifth gap 650 provides space for thermal expansion between the annular mounting member 300 and the base 100.
[0054] In some embodiments, the furnace tube assembly further includes a second purge gas path for providing purge gas to the fifth gap 650 to isolate oxygen. Purge of the fifth gap 650 via the second purge gas path isolates oxygen, preventing oxidation failure of the third annular seal 530 at high temperatures. In some embodiments, the structure of the second purge gas path is the same as that of the first purge gas path 400.
[0055] In some embodiments, the temperature of the first end 310 of the annular mounting member 300 is lower than the temperature of the second end 320, the third annular seal 530 is less prone to oxidation, and the second purge air path may not be provided for cost considerations.
[0056] In some embodiments, the first end 310 of the annular mounting member 300 includes an air intake channel (not shown in the figure), the air intake channel includes a plurality of air outlets, the plurality of air outlets are disposed toward the fifth gap 650, and the second purge air passage is connected to the air intake channel.
[0057] In some embodiments, such as Figure 2 As shown, the annular mounting member 300 also includes a first enclosing portion 330 and a second enclosing portion 340. The first enclosing portion 330 is connected to the first end 310, and the second enclosing portion 340 is connected to the second end 320. The first enclosing portion 330 and the second enclosing portion 340 are in contact with each other to form an annular space accommodating the first outer edge portion 110 and the second outer edge portion 210. Specifically, the first end 310 and the first enclosing portion 330 are integrated, and the second end 320 and the second enclosing portion 340 are integrated. The first end 310 and the second end 320 are connected by fasteners (such as bolts) to fix the first outer edge portion 110 and the second outer edge portion 210.
[0058] In some embodiments, the reaction tube 200 is made of silicon carbide, and the base 100 is made of quartz. 200 should be adopted Silicon carbide material possesses excellent high-temperature resistance and high thermal conductivity, capable of withstanding temperatures up to [insert temperature range here]. It can operate stably for a long time at temperatures above 1300℃ and is not prone to thermal deformation or cracking. The base 100 is made of quartz material, which has low thermal conductivity and can slow down the transfer of heat to the area below the base 100, thereby reducing the temperature of the area below the base 100.
[0059] In some embodiments, the furnace tube apparatus further includes a heater, a crystal boat, and a drive unit. The heater surrounds the outside of the reaction tube 200. The crystal boat includes a plurality of support positions arranged vertically for supporting a substrate. The drive unit is connected to the crystal boat for driving the crystal boat into the reaction tube 200 and driving the crystal boat to rotate.
[0060] While specific embodiments of this application have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of this application is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of this application, but all such changes and modifications fall within the scope of protection of this application.
Claims
1. A furnace tube device, characterized in that, include: The base includes a first outwardly protruding outer edge; The reaction tube includes an open end, the open end having an outwardly protruding second outer edge, and the second outer edge being disposed above the first outer edge; A first annular seal is disposed between the first outer edge and the second outer edge; An annular mounting member includes a first end and a second end. The first end is disposed at a first outer edge, and the second end is disposed at a second outer edge. The annular mounting member is used to fix the first outer edge and the second outer edge, and a first gap is formed between the second end and the outer wall of the reaction tube in the radial direction of the reaction tube. The first purging gas path is used to provide purging gas to the first gap to isolate oxygen.
2. The furnace tube equipment as described in claim 1, characterized in that, The first annular seal includes a graphite layer; Preferably, the graphite layer comprises a first graphite layer and a second graphite layer, wherein the density of the second graphite layer is greater than the density of the first graphite layer; and More preferably, the first annular seal further includes a silicon carbide layer that wraps around the graphite layer.
3. The furnace tube equipment as described in claim 1, characterized in that, It also includes a second annular seal disposed between the second end and the second outer edge.
4. The furnace tube equipment as described in claim 3, characterized in that, The second annular seal includes a graphite layer; Preferably, the graphite layer comprises a first graphite layer and a second graphite layer, wherein the density of the second graphite layer is greater than the density of the first graphite layer; and More preferably, the second annular seal further includes a silicon carbide layer that encapsulates the graphite layer.
5. The furnace tube equipment as described in claim 3, characterized in that, A second gap exists between the second annular seal and the outer wall of the reaction tube in the radial direction of the reaction tube.
6. The furnace tube equipment as described in claim 3, characterized in that, The base also includes an upper protrusion, which is disposed on the outer edge of the first outer edge. The upper surface of the upper protrusion is flush with the upper surface of the second outer edge, and the upper protrusion and the second outer edge together support the second annular seal.
7. The furnace tube equipment as described in claim 6, characterized in that, A third gap exists between the second outer edge and the upper protrusion in the radial direction of the reaction tube, and a fourth gap exists between the first annular seal and the upper protrusion in the radial direction of the reaction tube.
8. The furnace tube equipment as described in claim 7, characterized in that, The coefficient of thermal expansion of the second outer edge is greater than that of the first annular seal, and the width of the third gap in the radial direction of the reaction tube is greater than that of the fourth gap.
9. The furnace tube equipment as described in claim 1 or 3, characterized in that, The second end includes an air intake channel, which includes multiple air outlets. The multiple air outlets are arranged facing the first gap, and the first purge air passage is connected to the air intake channel.
10. The furnace tube equipment as described in claim 1 or 3, characterized in that, It also includes a third annular seal disposed between the first end and the first outer edge.
11. The furnace tube equipment as described in claim 10, characterized in that, A fifth gap exists radially between the first end and the outer wall of the base in the reaction tube; Preferably, the furnace tube equipment further includes a second purging gas path for providing purging gas to the fifth gap to isolate oxygen; More preferably, the first end includes an air intake channel, the air intake channel includes a plurality of air outlets, the plurality of air outlets are disposed toward the fifth gap, and the second purge air passage is connected to the air intake channel.
12. The furnace tube equipment as described in claim 1, characterized in that, The reaction tube is made of silicon carbide, and the base is made of quartz.
13. The furnace tube equipment as described in claim 1, characterized in that, Also includes: A heater surrounds the outside of the reaction tube; A crystal boat includes multiple support positions arranged in a vertical direction, the support positions being used to support a substrate; as well as A driving device, connected to the crystal boat, is used to drive the crystal boat into the reaction tube and drive the crystal boat to rotate.