Adjustable base frame for mounting linear accelerator

Abstract

The utility model discloses an adjustable base frame for installing a linear accelerator, which comprises a fixing frame and side plates symmetrically arranged above the fixing frame, an adjustable component is arranged on the fixing frame, the side plates are movably installed on the fixing frame through the adjustable component, the adjustable component comprises a bolt base, a stud and a plurality of fixing nuts, and the stud is arranged on the bolt base. Threads at the two ends of the double-end bolt are reversely arranged, one end of the double-end bolt is arranged in the bolt base and fixed through a moving piece in the bolt base, and the other end of the double-end bolt penetrates through a lug plate at the bottom of the side plate and is connected with the side plate through a plurality of fixing nuts. The mounting frame for mounting the linear accelerator is placed between the two side plates, a plurality of butt joint hole sites are formed in the surface of the mounting frame, overall accurate positioning can be conveniently achieved, the height of the linear accelerator is adjusted through the fixing nut, and the linear accelerator is adjusted left, right, front and back through the moving part. And the butt joint precision between the linear accelerator and the front and rear assemblies is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of ion implantation equipment manufacturing for chip manufacturing, in particular to an adjustable base frame for installing a linear accelerator. Background Art

[0002] The ion implanter used in chip manufacturing uses an ion beam of a specific element and specific energy to scan the silicon wafer to complete the doping process in the chip manufacturing process. In order to achieve ion implantation doping, the doping ions of the specific element need to be accelerated to an energy of mega-electron volts, and the linear accelerator in the ion implanter is used to accelerate the doping ions. The front-end component of the linear accelerator assembly generates ions of the required doping element, which are formed into an ion beam of the required energy and density through the linear accelerator and sent to the back-end component.

[0003] During the equipment assembly, it is required that the linear accelerator assembly remain horizontal, and at the same time, the linear accelerator must be precisely docked with the front-end assembly and the rear-end assembly to ensure the sealing process requirements and achieve an ultra-high vacuum state in the ion beam chamber of the linear accelerator. However, in the prior art, during equipment installation and commissioning and subsequent maintenance and calibration operations, the position and angle of the linear accelerator are difficult to adjust, and it is impossible to accurately make the interface angles of the front and rear assemblies the same at the same time, thereby failing to meet the equipment performance requirements. Utility Model Content

[0004] The utility model aims to overcome the deficiencies of the prior art and provide an adjustable base frame for installing a linear accelerator to solve the above problems.

[0005] The purpose of this utility model is achieved through the following technical solutions:

[0006] An adjustable base frame for installing a linear accelerator comprises a fixing frame and a side plate symmetrically arranged above the fixing frame, the fixing frame is provided with an adjustable component, the side plate is movably installed on the fixing frame through the adjustable component, the adjustable component comprises a bolt base, a stud bolt and a plurality of fixing nuts, the threads at both ends of the stud bolt are arranged in opposite directions, one end of the stud bolt is placed in the bolt base and is fixed by a moving part in the bolt base, the other end of the stud bolt passes through an ear plate at the bottom of the side plate and is connected to the side plate through a plurality of fixing nuts, a mounting frame for installing a linear accelerator is placed between the two side plates, and a plurality of docking holes are arranged on the surface of the mounting frame.

[0007] In the above utility model, further, the movable part is an adjusting positioning screw, which is evenly distributed on the outer cylindrical side of the bolt base at an angle of 90 degrees and is used to adjust the positioning and lock the stud bolt in the horizontal direction front, back, left, and right.

[0008] In the above utility model, further, the mounting frame is in the shape of a quadrangular prism, and the docking holes are arranged at equal intervals on each side of the mounting frame.

[0009] In the above utility model, further, the two side panels are symmetrically provided with mounting holes, and the bottom of the mounting holes is a V-shaped structure matched with the long edges of the mounting frame.

[0010] In the above utility model, further, a fixed platform is connected between the fixed frames, and a bracket is provided at the bottom of the fixed platform.

[0011] In the above utility model, further, the adjustable base frame also includes a bottom plate, and the fixing frame and the bracket are both placed on the bottom plate.

[0012] The beneficial effects of the utility model are:

[0013] The utility model can realize the overall precise positioning more conveniently when the linear accelerator of the ion implanter is installed, debugged, maintained and calibrated. The height of the linear accelerator is adjusted by fixing the nut, and the linear accelerator is adjusted left and right, front and back by moving parts, so as to ensure the docking accuracy between the linear accelerator and the front and rear components, meet the performance requirements of the equipment, and improve the work efficiency at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a front view of the utility model;

[0016] Figure 3 It is an enlarged view of A of the present utility model.

[0017] In the figure, 1-base plate, 2-fixed frame, 3-fixed platform, 4-bracket, 5-side plate, 6-ear plate, 7-mounting frame, 8-docking hole, 9-linear accelerator, 10-bolt base, 11-moving part, 12-stud bolt, 13-fixing nut, 14-mounting hole. DETAILED DESCRIPTION

[0018] The following describes the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0019] Please see attached Figure 1 -Attached Figure 3 As shown, an adjustable base frame for installing a linear accelerator, the adjustable base frame is used to carry and fix the linear accelerator 9 in the ion implanter, and provide convenient and quick adjustment for the precise positioning of the device during installation and debugging, the adjustable base frame includes a fixed frame 2 and a side plate 5 symmetrically arranged above the fixed frame 2, the fixed frame 2 is provided with an adjustable component, the side plate 5 is movably mounted on the fixed frame 2 through the adjustable component, and the side plate 5 can be moved up and down or forward and backward and left and right through the adjustable component, thereby realizing the position adjustment of the linear accelerator 9 component;

[0020] Specifically, the adjustable assembly includes a bolt base 10, a stud bolt 12 and a plurality of fixing nuts 13. The bolt base 10 is fixed to the fixing frame 2. One end of the stud bolt 12 is placed in the bolt base 10 and fixed by a moving part 11 in the bolt base 10. Figure 1 As shown, the bolt base 10 has a certain movable space, one end of the stud bolt 12 can move in the bolt base 10, and the other end of the stud bolt 12 passes through the ear plate 6 at the bottom of the side plate 5 and is connected to the side plate 5 through a plurality of fixing nuts 13, as shown in the attached Figure 3 As shown, the ear plate 6 can move up and down in the middle of the stud bolt 12, and two fixing nuts 13 are respectively placed above and below the ear plate 6 and sleeved on the stud bolt 12. The threads at both ends of the stud bolt 12 are set in opposite directions. When the side plate 5 needs to be moved up and down, the fixing nuts 13 are loosened at both ends of the stud bolt 12 respectively, so that the side plate 5 can move up and down. After moving to the specified position, the fixing nuts 13 at both ends are tightened toward the middle to clamp the ear plate 6 to prevent the ear plate 6 from moving, and then the ear plate 6 and the side plate 5 are fixed above the fixing frame 2, completing the fine adjustment of the height of the side plate 5 and the linear accelerator 9; in order to improve the stability and prevent the fixing nuts 13 below the ear plate 6 from loosening, multiple fixing nuts 13 can also be added below the ear plate 6;

[0021] A mounting frame 7 for mounting a linear accelerator 9 is placed between the two side panels 5. A plurality of docking holes 8 are provided on the surface of the mounting frame 7. The docking holes 8 are used to mount and dock the linear accelerator 9. When the side panels 5 move upward, the linear accelerator 9 on the mounting frame 7 is driven to move upward together.

[0022] For details, please refer to the attached Figure 3As shown, the movable member 11 is an adjusting positioning screw, which is evenly distributed at an angle of 90 degrees on the outer cylindrical side of the bolt base 10 and is used to adjust the positioning and lock the stud bolts 12 in the horizontal direction. The stud bolts 12 can be adjusted forward, backward, left and right by loosening or tightening the adjusting positioning screws in four directions to find the precise docking position. After moving the stud bolts 12 to the specified position, the stud bolts 12 are locked by adjusting the positioning screws. The moving stud bolts 12 drive the side panels 5 to move forward, backward, left and right during the movement.

[0023] Please see attached Figure 1 As shown, the mounting frame 7 is in the shape of a quadrangular prism, and the docking holes 8 are arranged at equal intervals on each side of the mounting frame 7, wherein the two side panels 5 are symmetrically provided with mounting holes 14, and the two ends of the mounting frame 7 are respectively placed on the mounting holes 14, so that the mounting frame 7 and the linear accelerator 9 on the mounting frame 7 remain horizontal, and the bottom of the mounting hole 14 is a V-shaped structure matched with the long edge of the mounting frame 7. The V-shaped structure cooperates with the mounting frame 7 in the shape of a quadrangular prism to prevent the mounting frame 7 from shaking and thus affecting the precise docking of the linear accelerator 9 with the front and rear components, thereby improving the docking efficiency and stability.

[0024] In the above embodiment, preferably, a fixing platform 3 is connected between the fixing frames 2 , and a bracket 4 is provided at the bottom of the fixing platform 3 to improve the stability between the fixing frames 2 .

[0025] In the above embodiment, preferably, the adjustable base frame further includes a bottom plate 1 , and the fixing frame 2 and the bracket 4 are both placed on the bottom plate 1 .

[0026] Through the above operations, it is possible to ensure that the equipment's process requirements are met and the equipment's performance requirements are achieved during the installation of new equipment, equipment relocation, necessary maintenance calibration, and replacement of sealing rings at component interfaces during equipment operation, while also speeding up personnel debugging and improving overall completion efficiency.

[0027] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by the terms "up", "down", "left", "right", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0028] The above-mentioned embodiments only express the specific implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model.

Claims

1. An adjustable base frame for installing a linear accelerator, characterized in that: The invention comprises a fixing frame (2) and a side plate (5) symmetrically arranged above the fixing frame (2), wherein an adjustable component is arranged on the fixing frame (2), and the side plate (5) is movably mounted on the fixing frame (2) through the adjustable component, and the adjustable component comprises a bolt base (10), a stud bolt (12) and a plurality of fixing nuts (13), wherein the threads at both ends of the stud bolt (12) are arranged in opposite directions, and one end of the stud bolt (12) is placed in the bolt base (10) and is fixed by a moving part (11) in the bolt base (10), and the other end of the stud bolt (12) passes through an ear plate (6) at the bottom of the side plate (5) and is connected to the side plate (5) through a plurality of fixing nuts (13), and a mounting frame (7) for mounting a linear accelerator (9) is placed between the two side plates (5), and a plurality of docking holes (8) are arranged on the surface of the mounting frame (7).

2. The adjustable base frame for installing a linear accelerator according to claim 1, characterized in that: The movable member (11) is an adjusting screw, which is evenly distributed at an angle of 90 degrees on the outer cylindrical side of the bolt base (10) and is used to adjust the positioning and lock the stud bolt (12) in the horizontal direction.

3. The adjustable base frame for installing a linear accelerator according to claim 1, characterized in that: The mounting frame (7) is in the shape of a quadrangular prism, and the docking holes (8) are arranged at equal intervals on each side of the mounting frame (7).

4. The adjustable base frame for installing a linear accelerator according to claim 3, characterized in that: The two side plates (5) are symmetrically provided with mounting holes (14), and the bottom of the mounting hole (14) is a V-shaped structure that matches the long edge of the mounting frame (7).

5. The adjustable base frame for installing a linear accelerator according to claim 1, characterized in that: A fixed platform (3) is connected between the fixed frames (2), and a bracket (4) is provided at the bottom of the fixed platform (3).

6. The adjustable base frame for installing a linear accelerator according to claim 5, characterized in that: The adjustable base frame also includes a bottom plate (1), and the fixing frame (2) and the bracket (4) are both placed on the bottom plate (1).

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