Clamping moving platform suitable for semiconductor equipment parts

Abstract

The utility model discloses a clamping mobile platform suitable for semiconductor equipment parts, which comprises a bottom plate, the upper surface of the bottom plate is fixedly connected with a first fixing block, one side of the first fixing block is fixedly connected with a second motor, an output shaft of the second motor is in threaded connection with a first screw rod, and the first screw rod is in threaded connection with a second screw rod. According to the clamping moving platform suitable for the semiconductor equipment part, after the part is clamped on the frame plate, the second motor is started, the first lead screw is driven to rotate, the first lead screw is driven to rotate, the first lead screw is driven to rotate, and therefore the part can be clamped on the frame plate, and the clamping moving platform can be used for clamping the part. The working position of a frame plate is adjusted through threaded connection of a first lead screw and the frame plate, meanwhile, a first motor is started to drive a first shaft rod to rotate, the first shaft rod drives a second gear to rotate, and the frame plate is adjusted to any angle through the meshing effect of the second gear and a gear ring; and the effect of providing more machining angles for the part is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of a clamping mobile platform for semiconductor equipment parts, in particular to a clamping mobile platform suitable for semiconductor equipment parts. Background Art

[0002] In the process of manufacturing semiconductor machinery parts, the parts need to be clamped with a fixture and then processed with a tool. The existing fixtures are often used for single-direction positioning and fixing. When the parts need to be processed at different angles, they need to be disassembled and re-clamped.

[0003] After searching, it was found in Chinese patent publication number CN215548096U that a clamping mobile platform suitable for semiconductor equipment parts is disclosed, in which a rotating cylinder is arranged on the back of a clamping fixing plate, and a rotating shaft of the rotating cylinder passes through the clamping fixing plate and is drive-connected with the rotating fixing plate, and a supporting cylinder is arranged on the rotating fixing plate, and the supporting cylinder is drive-connected with a supporting head to process the product at different angles, thereby improving the processing efficiency. However, the device is positioned through positioning holes, so that the clamping parts can only be positioned at -60 degrees, 0 degrees and 60 degrees, and the rotation angle is relatively small. Therefore, it is necessary to design a clamping mobile platform suitable for semiconductor equipment parts with a multi-angle rotation function. Utility Model Content

[0004] The main purpose of the utility model is to provide a clamping mobile platform suitable for semiconductor equipment parts, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A clamping mobile platform suitable for semiconductor equipment parts includes a base plate, a first fixed block is fixedly connected to the upper surface of the base plate, a second motor is fixedly connected to one side of the first fixed block, a first screw rod is threadedly connected to the output shaft of the second motor, a frame plate is threadedly connected to the outer surface of the first screw rod, a gear ring is fixedly connected to the lower surface of the frame plate, the first motor is fixedly connected to the upper surface of the base plate, a first shaft rod is fixedly connected to the output shaft of the first motor, a second gear is fixedly connected to the outer surface of the first shaft rod, and a gear ring is meshed on the outer surface of the second gear.

[0007] In order to achieve the effect of the limiting slider, as a clamping mobile platform suitable for semiconductor equipment parts of the utility model, the upper surface of the frame plate is provided with a slide groove, and the inner wall of the slide groove is movably connected with a slider.

[0008] In order to achieve the effect of holding parts, as a clamping mobile platform suitable for semiconductor equipment parts of the utility model, the upper surface of the slider is fixedly connected with a first clamping block, and the front side of the top of the first clamping block is fixedly connected with an anti-slip plate.

[0009] In order to achieve the effect of driving the second rack to move, as a clamping mobile platform suitable for semiconductor equipment parts of the utility model, the front side of the first clamping block is fixedly connected to the first rack, and one side of the first rack is meshed with a first gear.

[0010] In order to achieve the effect of limiting the first gear, as a clamping mobile platform suitable for semiconductor equipment parts of the utility model, the inner wall of the first gear is rotatably connected with a fixed column, and the side of the first gear away from the first rack is meshed with a second rack.

[0011] In order to achieve the effect of limiting the second fixed block, as a clamping mobile platform suitable for semiconductor equipment parts of the utility model, the front side of the second rack is fixedly connected with the second clamping block, and the upper surface of the frame plate is provided with a notch.

[0012] In order to achieve the effect of driving the second screw rod to rotate, as a clamping mobile platform suitable for semiconductor equipment parts of the utility model, the lower surface of the frame plate is fixedly connected to a third motor, the output shaft of the third motor is fixedly connected to the second screw rod, and the lower surface of the first clamping block is fixedly connected to the second fixed block.

[0013] In order to achieve the effect of driving the first clamping block to move, as a clamping mobile platform suitable for semiconductor equipment components of the utility model, the inner wall of the second fixed block is threadedly connected with a second screw rod, and the end of the second screw rod away from the third motor is rotatably connected to the third fixed block.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] 1. The clamping mobile platform suitable for semiconductor equipment parts is provided with a bottom plate, a frame plate, a first screw rod, a first motor, a gear ring, a second gear, a first fixed block, a first shaft rod and a second motor. After the parts are clamped on the frame plate, the second motor is started to drive the first screw rod to rotate, and the working position of the frame plate is adjusted by the threaded connection between the first screw rod and the frame plate. At the same time, the first motor is started to drive the first shaft rod to rotate, and the second gear is driven to rotate by the first shaft rod. The frame plate is adjusted to any angle through the mutual meshing action of the second gear and the gear ring, thereby providing more processing angles for the parts.

[0016] 2. The clamping mobile platform suitable for semiconductor equipment parts is provided with a first clamping block, a first rack, a second clamping block, a second rack, a first gear, a fixed column, a second fixed block, a third motor, a second screw rod and a notch. By starting the third motor, the second screw rod is driven to rotate, and the second fixed block is moved on the inner wall of the notch by the threaded connection between the second screw rod and the second fixed block, so as to drive the first clamping block to move toward one side of the fixed column. The first rack is meshed with the first gear to rotate the first gear. At the same time, the second rack is moved under the drive of the first gear, so that the first clamping block and the second clamping block are close to each other, so as to clamp the parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a structural schematic diagram of a clamping mobile platform suitable for semiconductor equipment parts in Example 1 of the utility model;

[0018] Figure 2 This is a schematic diagram of the axonometric structure of a gear ring in a clamping mobile platform for semiconductor equipment parts according to Embodiment 1 of the utility model;

[0019] Figure 3 This is a schematic diagram of an axonometric structure of a cross-section of a frame plate in a clamping mobile platform for semiconductor equipment parts according to Embodiment 1 of the utility model;

[0020] Figure 4 This is a clamping mobile platform suitable for semiconductor equipment parts in embodiment 1 of the utility model Figure 1 The enlarged structural diagram at A in the middle;

[0021] Figure 5 This is a clamping mobile platform suitable for semiconductor equipment parts in embodiment 1 of the utility model Figure 3 Enlarged structural diagram at B in the middle.

[0022] In the figure: 1, bottom plate; 2, frame plate; 3, slider; 4, first clamping block; 5, anti-skid plate; 6, slide groove; 7, first rack; 8, first screw rod; 9, first motor; 10, second clamping block; 11, second rack; 12, gear; 13, fixed column; 14, gear ring; 15, rotating gear; 16, fixed block; 17, first shaft; 18, second motor; 19, second fixed block; 20, third motor; 21, second screw rod; 22, third fixed block; 23, notch. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] like Figure 1-5 As shown, a clamping mobile platform suitable for semiconductor equipment parts includes a base plate 1, the upper surface of the base plate 1 is fixedly connected to a first fixed block 16, one side of the first fixed block 16 is fixedly connected to a second motor 18, the output shaft of the second motor 18 is threadedly connected to a first screw rod 8, the outer surface of the first screw rod 8 is threadedly connected to a frame plate 2, the lower surface of the frame plate 2 is fixedly connected to a gear ring 14, the upper surface of the base plate 1 is fixedly connected to a first motor 9, the output shaft of the first motor 9 is fixedly connected to a first shaft rod 17, the outer surface of the first shaft rod 17 is fixedly connected to a second gear 15, and the outer surface of the second gear 15 is meshed with the gear ring 14.

[0026] During specific use, through the arrangement of the base plate 1, the frame plate 2, the first screw rod 8, the first motor 9, the gear ring 14, the second gear 15, the first fixing block 16, the first shaft rod 17 and the second motor 18, after the parts are clamped on the frame plate 2, the second motor 18 is started to drive the first screw rod 8 to rotate, and the working position of the frame plate 2 is adjusted by utilizing the threaded connection between the first screw rod 8 and the frame plate 2, and at the same time, the first motor 9 is started to drive the first shaft rod 17 to rotate, and the second gear 15 is driven to rotate by utilizing the first shaft rod 17, and the frame plate 2 is adjusted to any angle through the mutual meshing action of the second gear 15 and the gear ring 14.

[0027] In this embodiment, a slide groove 6 is formed on the upper surface of the frame plate 2 , and a slider 3 is movably connected to the inner wall of the slide groove 6 .

[0028] During specific use, the slide groove 6 plays the role of the limit slide block 3 through the setting of the slide groove 6.

[0029] In this embodiment, a first clamping block 4 is fixedly connected to the upper surface of the sliding block 3 , and an anti-slip plate 5 is fixedly connected to the front side of the top end of the first clamping block 4 .

[0030] During specific use, the first clamping block 4 is provided to support the parts.

[0031] In this embodiment, a first rack 7 is fixedly connected to the front side of the first clamping block 4 , and a first gear 12 is meshed on one side of the first rack 7 .

[0032] During specific use, the first gear 12 is arranged to drive the second rack 11 to move.

[0033] In this embodiment, a fixing column 13 is rotatably connected to the inner wall of the first gear 12 , and the second rack 11 is meshed with a side of the first gear 12 away from the first rack 7 .

[0034] During specific use, the setting of the fixing column 13 plays a role in limiting the first gear 12 .

[0035] In this embodiment, the second clamping block 10 is fixedly connected to the front side of the second rack 11 , and a notch 23 is formed on the upper surface of the frame plate 2 .

[0036] During specific use, the notch 23 is provided to limit the second fixing block 19 .

[0037] In this embodiment, the lower surface of the frame plate 2 is fixedly connected to the third motor 20 , the output shaft of the third motor 20 is fixedly connected to the second screw rod 21 , and the lower surface of the first clamping block 4 is fixedly connected to the second fixing block 19 .

[0038] During specific use, the third motor 20 is provided to drive the second screw rod 21 to rotate.

[0039] In this embodiment, the inner wall of the second fixing block 19 is threadedly connected with a second screw rod 21 , and one end of the second screw rod 21 away from the third motor 20 is rotatably connected with a third fixing block 22 .

[0040] During specific use, by starting the second screw rod 21 , the first clamping block 4 is driven to move.

[0041] Working principle: By starting the third motor 20, the second screw rod 21 is driven to rotate, and the threaded connection between the second screw rod 21 and the second fixed block 19 is used to make the second fixed block 19 move on the inner wall of the groove 23, driving the first clamping block 4 to move to one side of the fixed column 13, and the first rack 7 is meshed with the first gear 12 to rotate the first gear 12. At the same time, the second rack 11 is driven by the first gear 12 to move, so that the first clamping block 4 and the second clamping block 10 are close to each other to complete the clamping of the parts. After the parts are clamped on the frame plate 2, the second motor 18 is started to drive the first screw rod 8 to rotate, and the threaded connection between the first screw rod 8 and the frame plate 2 is used to adjust the working position of the frame plate 2. At the same time, the first motor 9 is started to drive the first shaft rod 17 to rotate, and the first shaft rod 17 is used to drive the second gear 15 to rotate. The frame plate 2 is adjusted to any angle through the mutual meshing of the second gear 15 and the gear ring 14.

[0042] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A clamping mobile platform suitable for semiconductor equipment parts, comprising a base plate (1), characterized in that: The upper surface of the base plate (1) is fixedly connected to a first fixed block (16); a second motor (18) is fixedly connected to one side of the first fixed block (16); an output shaft of the second motor (18) is threadedly connected to a first screw rod (8); an outer surface of the first screw rod (8) is threadedly connected to a frame plate (2); a lower surface of the frame plate (2) is fixedly connected to a gear ring (14); the upper surface of the base plate (1) is fixedly connected to a first motor (9); an output shaft of the first motor (9) is fixedly connected to a first shaft rod (17); an outer surface of the first shaft rod (17) is fixedly connected to a second gear (15); and an outer surface of the second gear (15) is meshed with a gear ring (14).

2. A clamping mobile platform suitable for semiconductor equipment parts according to claim 1, characterized in that: A slide groove (6) is provided on the upper surface of the frame plate (2), and a slider (3) is movably connected to the inner wall of the slide groove (6).

3. A clamping mobile platform suitable for semiconductor equipment parts according to claim 2, characterized in that: The upper surface of the sliding block (3) is fixedly connected to a first clamping block (4), and the front surface of the top end of the first clamping block (4) is fixedly connected to an anti-slip plate (5).

4. The clamping mobile platform for semiconductor equipment parts according to claim 3 is characterized in that: The front side of the first clamping block (4) is fixedly connected to a first rack (7), and one side of the first rack (7) is meshed with a first gear (12).

5. The clamping mobile platform for semiconductor equipment parts according to claim 4, characterized in that: The inner wall of the first gear (12) is rotatably connected to a fixing column (13), and the side of the first gear (12) away from the first rack (7) is meshed with a second rack (11).

6. The clamping mobile platform for semiconductor equipment parts according to claim 5, characterized in that: A second clamping block (10) is fixedly connected to the front side of the second rack (11), and a notch (23) is provided on the upper surface of the frame plate (2).

7. The clamping mobile platform for semiconductor equipment parts according to claim 3, characterized in that: A third motor (20) is fixedly connected to the lower surface of the frame plate (2), an output shaft of the third motor (20) is fixedly connected to a second screw rod (21), and a second fixing block (19) is fixedly connected to the lower surface of the first clamping block (4).

8. The clamping mobile platform for semiconductor equipment parts according to claim 7, characterized in that: The inner wall of the second fixing block (19) is threadedly connected to a second screw rod (21), and one end of the second screw rod (21) away from the third motor (20) is rotatably connected to the third fixing block (22).

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