Photoresist spraying device
Through the design of the multi-directional adjustment photoresist spraying device, the inefficiency and nozzle blockage caused by the single direction of the traditional photoresist spraying structure are solved, and multi-point spraying and automatic cleaning and drying are realized, which improves production efficiency and equipment reliability.
Patent Information
- Application Number
- CN202420784227.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-16
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2034-04-16
AI Technical Summary
The single direction movement of the traditional photoresist spray structure causes the spray point to be insufficient, affecting production efficiency, and when not in use, the spray head is prone to hardening and blockage, affecting subsequent use.
A multi-directional adjustment photoresist spraying device is designed, adopting a combined structure of supporting side rods, horizontal connecting rods and vertical upright rods. Multi-point spraying and automatic cleaning and drying of the spray head through the inner cylinder and rotating motor. Dry to avoid clogging.
Multi-point spraying is realized, production efficiency is improved, and the nozzle blockage is prevented through automatic cleaning and drying function, ensuring the continuous availability of the spray structure.
Smart Images
Figure CN222213196U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photoresist, in particular to a photoresist glue spraying device. Background Art
[0002] Photoresist, also known as photoresist, refers to a thin film material whose solubility changes when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent.
[0003] When using current photoresists, the traditional way is to install them on the equipment through a fixed spraying structure, and then form a spraying effect under the movement of the equipment at the bottom. The movement in a single direction makes the spraying points not wide enough, affecting the production efficiency. At the same time, when the spraying operation is not performed, the nozzle is exposed to the outside and the glue will harden and clog, affecting the next use. Utility Model Content
[0004] The purpose of the utility model is to provide a photoresist spraying device to solve the problem raised in the above background technology that when the current photoresist is used, the traditional method is to install it on the equipment through a fixed spraying structure, and then form a spraying effect under the movement of the equipment at the bottom, so that the movement in a single direction makes the spraying points not wide enough, affecting the production efficiency. At the same time, when the spraying operation is not performed, the nozzle is exposed to the outside and the glue will harden and clog, affecting the next use.
[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0006] A photoresist spraying device comprises a supporting side rod, the top and bottom surfaces of the supporting side rod are symmetrically fixed with mounting blocks, one side edge of the supporting side rod is horizontally provided with a horizontal side groove, one side edge of the supporting side rod is horizontally butted with a horizontal connecting rod, the horizontal connecting rod is vertically provided with a vertical upright rod at one end away from the supporting side rod, the bottom end of the vertical upright rod is butted with a fixed box body, a feed pipe is inserted into one side edge of the fixed box body, one end of the horizontal connecting rod is horizontally fixed with an end driving block, the inner sides of the horizontal connecting rod and the vertical upright rod are both fixedly provided with an inner cylinder, one end of the horizontal connecting rod and the vertical upright rod is provided with an end clamping hole, the side edge of the vertical upright rod and the top surface of the fixed box body are fixedly provided with a buckle block, and the inner side edge of the fixed box body is fixedly provided with a A main body is arranged, a spray head is fixedly arranged on the bottom surface of the main body, a bottom slot is horizontally opened on the bottom surface of the fixed box body, a rotating bottom plate is horizontally clamped on the inner side edge of the bottom slot, a mating head is fixedly clamped on the top surface of the rotating bottom plate, a rotating motor is fixedly arranged on the inner side edge of the fixed box body, a cleaning tank is fixedly arranged on the inner side edge of the fixed box body, a cleaning pump is fixedly arranged on the inner bottom surface of the cleaning tank, a cleaning box body is horizontally fixedly arranged on the inner bottom surface and the outer bottom surface of the fixed box body, a cleaning tube body is horizontally fixedly arranged on the inner side edge of the cleaning box body, a discharge pipe is inserted on the side edge of the cleaning box body, a drying box is horizontally fixedly arranged on the inner bottom surface and the outer bottom surface of the fixed box body, and a drying net is horizontally fixedly arranged on the inner side edge of the drying box.
[0007] As a preferred embodiment of the utility model: the number of the mounting blocks is four, and the four mounting blocks are symmetrically fixed at the corner positions of the top and bottom surfaces of the supporting side rods, the horizontal side groove is horizontally opened at the center line position of one side of the supporting side rods, the horizontal connecting rod is arranged with a telescopic rod structure, and one end of the horizontal connecting rod is horizontally docked at the side opening end of the horizontal side groove.
[0008] As a preferred embodiment of the present utility model: the vertical upright rod and the horizontal connecting rod are arranged in an L-shape with each other, and one end of the horizontal connecting rod is connected to the top position of the side of the vertical upright rod, the feed pipe is made of shading material, and one end of the feed pipe extends to the interior of the fixed box body and maintains connection with the interior of the main body.
[0009] As a preferred embodiment of the utility model: the end drive block is snap-fitted to the inner side edge of the horizontal side groove, the snap-fit blocks are correspondingly snap-fitted to the inner side edge of the end clamping hole, the bottom end of the spray head is docked at the top position of the mating head, and they are internally connected to each other, the bottom clamping groove is horizontally disc-shaped and opened at the center of the bottom surface of the fixed box body, and the interior of the bottom clamping groove is connected to the interior of the fixed box body.
[0010] As a preferred embodiment of the present utility model: the mating head is fixedly clamped on the top surface of the rotating base plate near the edge, the rotating motor is vertically fixedly arranged at the inner center of the fixed box body, and the output end of the rotating motor is vertically fixedly connected downward at the center of the top surface of the rotating base plate, and the output end of the cleaning pump is extended through a pipeline to maintain communication with the interior of the cleaning tube body.
[0011] As a preferred embodiment of the utility model: the cleaning box body is symmetrically buckled in a superimposed manner and arranged on the side edge of the opening of the bottom card slot, the sides between the cleaning tube bodies are evenly provided with spray head structures, the arrangement of the drying box is consistent with that of the cleaning box body, and the drying box is horizontally arranged on the side edge of the cleaning box body.
[0012] Compared with the prior art, the beneficial effects of the utility model are:
[0013] The utility model completes the installation operation by horizontally docking the supporting side rods at the designated position of the equipment and fixing the mounting block at the designated position by bolts. After one end of the feed pipe is connected and arranged at the position of the storage device, when glue spraying is required, the end drive block can be controlled to move horizontally along the horizontal side groove, so that the horizontal connecting rod at one end can be used in a horizontal adjustment position. The horizontal telescopic movement of the inner cylinder can form a longitudinal adjustment, and the vertical adjustment can be operated after the vertical upright rod is telescopically moved. Finally, the main body on the bottom surface sprays the colloid downward through the spray head and the matching head. After the spraying is completed, The internal rotating motor of the fixed box body is controlled to rotate, so that the output end drives the rotating base plate to rotate, and after the matching head is away from the spray head, the rotating base plate seals the spray head. After the rotating matching head rotates to the inside of the cleaning box body, it can be flushed through the cleaning pipe body, and the sewage can be discharged outward through the side discharge pipe. After cleaning, it is rotated to the inside of the drying box, and the matching head between the drying nets is dried for subsequent spraying. The multi-directional adjustable structure is adopted to meet the needs of multi-point spraying. At the same time, the spraying structure will not be blocked under the timely cleaning structure. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings:
[0015] Figure 1 It is a three-dimensional structural schematic diagram of a photoresist spraying device;
[0016] Figure 2 It is a structural schematic diagram of the front view cross-sectional connection details of a support side rod of a photoresist spraying device;
[0017] Figure 3 It is a structural schematic diagram of the front view cross-sectional connection details of the vertical poles of a photoresist spraying device;
[0018] Figure 4 It is a structural schematic diagram of the side cross-sectional connection details of a fixed box body of a photoresist spraying device;
[0019] Figure 5 The present invention is a structural schematic diagram of the front view cross-sectional connection details of a fixed box body of a photoresist spraying device.
[0020] In the figure: 1. Support side rod; 2. Mounting block; 3. Horizontal side groove; 4. Horizontal connecting rod; 5. Vertical rod; 6. Fixed box body; 7. Feed pipe; 8. End drive block; 9. Inner cylinder; 10. End clamp hole; 11. Buckle block; 12. Main body; 13. Spray head; 14. Bottom clamping groove; 15. Rotating bottom plate; 16. Matching head; 17. Rotating motor; 18. Cleaning tank; 19. Cleaning pump; 20. Cleaning box body; 21. Cleaning pipe body; 22. Discharge pipe; 23. Drying box; 24. Drying net. DETAILED DESCRIPTION
[0021] See also Figure 1-2 In an embodiment of the utility model, a photoresist glue spraying device comprises a supporting side bar 1, a mounting block 2 is symmetrically fixedly arranged on the top and bottom surfaces of the supporting side bar 1, a horizontal side groove 3 is horizontally opened on one side of the supporting side bar 1, a horizontal connecting rod 4 is horizontally connected to one side of the supporting side bar 1, the number of the mounting blocks 2 is four, and the four mounting blocks 2 are symmetrically fixedly arranged on the top and bottom side corners of the supporting side bar 1, the horizontal side groove 3 is horizontally opened on the center line of one side of the supporting side bar 1, the horizontal connecting rod 4 is arranged with a telescopic rod structure, and one end of the horizontal connecting rod 4 is horizontally connected to the side opening end of the horizontal side groove 3, and the horizontal connecting rod 4 is at a side away from the supporting side bar 1. A vertical rod 5 is arranged vertically at the end, a fixed box body 6 is butted at the bottom end of the vertical rod 5, a feed pipe 7 is inserted at one side of the fixed box body 6, the vertical rod 5 and the horizontal connecting rod 4 are arranged in an L-shape with each other, and one end of the horizontal connecting rod 4 is butt-jointed at the top position of the side of the vertical rod 5, the feed pipe 7 is made of a light-shielding material, and one end of the feed pipe 7 extends to the inside of the fixed box body 6 and keeps in communication with the inside of the main body 12, an end driving block 8 is horizontally fixedly arranged at one end of the horizontal connecting rod 4, an inner cylinder 9 is fixedly arranged on the inner side of the horizontal connecting rod 4 and the vertical rod 5, and an end clamping hole 10 is opened at one end of the horizontal connecting rod 4 and the vertical rod 5;
[0022] See also Figure 3-5In the embodiment of the utility model, a photoresist spraying device is provided, wherein the side edge of the vertical pole 5 and the top surface of the fixed box body 6 are fixedly provided with a snap block 11, the inner side edge of the fixed box body 6 is fixedly provided with a main body 12, the bottom surface of the main body 12 is fixedly provided with a spray head 13, the bottom surface of the fixed box body 6 is horizontally provided with a bottom card slot 14, the end drive block 8 is snap-fitted and arranged on the inner side edge of the horizontal side slot 3, the snap blocks 11 are correspondingly snap-fitted and arranged on the inner side edge of the end card hole 10, and the bottom end of the spray head 13 is docked and arranged on the mating head 16 The top position of the fixed box body 6 is maintained in communication with each other internally, the bottom card slot 14 is horizontally arranged in a disc shape at the center of the bottom surface of the fixed box body 6, and the interior of the bottom card slot 14 is maintained in communication with the interior of the fixed box body 6, the inner side edge of the bottom card slot 14 is horizontally clamped with a rotating bottom plate 15, the top surface of the rotating bottom plate 15 is fixedly clamped with a mating head 16, the inner side edge of the fixed box body 6 is fixedly provided with a rotating motor 17, the inner side edge of the fixed box body 6 is fixedly provided with a cleaning tank 18, and the inner bottom surface of the cleaning tank 18 is fixedly provided with a cleaning pump 19 The mating head 16 is fixedly connected and arranged on the top surface of the rotating bottom plate 15 near the edge position, the rotating motor 17 is vertically fixedly arranged at the inner center position of the fixed box body 6, and the output end of the rotating motor 17 is vertically fixedly connected and arranged at the top center position of the rotating bottom plate 15, the output end of the cleaning pump 19 is connected to the inside of the cleaning pipe body 21 through a pipeline extension, the inner bottom surface and the outer bottom surface of the fixed box body 6 are horizontally fixedly arranged with a cleaning box body 20, and the inner side edge of the cleaning box body 20 is horizontally fixedly arranged with a cleaning The tube body 21 and the side of the cleaning box body 20 are plugged with a discharge pipe 22, and the inner bottom surface and the outer bottom surface of the fixed box body 6 are horizontally fixedly provided with a drying box 23, and the cleaning box body 20 is symmetrically buckled and arranged at the opening side position of the bottom card slot 14 in a superimposed manner. The sides between the cleaning tube bodies 21 are evenly provided with a spray head structure, and the arrangement of the drying box 23 is consistent with the cleaning box body 20, and the drying box 23 is horizontally arranged at the side position of the cleaning box body 20, and the inner side of the drying box 23 is horizontally fixed with a drying net 24.
[0023] The working principle of the utility model is:
[0024] The supporting side rod 1 is horizontally docked and set at the specified position of the equipment, and the mounting block 2 is fixed and installed at the specified position by bolts to complete the installation operation. After one end of the feed pipe 7 is connected and set at the position of the storage device, when glue spraying is required, the end drive block 8 can be controlled to move horizontally along the horizontal side groove 3, so that the horizontal connecting rod 4 at one end can be used in a horizontal adjustment position. The horizontal telescopic movement of the inner cylinder 9 can form a longitudinal adjustment, and the vertical adjustment can be operated after the vertical pole 5 is telescopically moved. Finally, the main body 12 on the bottom surface passes the colloid through the spray head 13 and the matching head 1 6 is sprayed downward, and after the spraying is completed, the internal rotating motor 17 of the fixed box body 6 is controlled to rotate, so that the output end drives the rotating bottom plate 15 to rotate, and after the matching head 16 is away from the spraying head 13, the rotating bottom plate 15 seals the spraying head 13, and after the rotating matching head 16 rotates to the inside of the cleaning box body 20, it can be rinsed through the cleaning pipe body 21, and the sewage can be discharged outward through the side discharge pipe 22, and after the cleaning is completed, it rotates to the inside of the drying box 23, and the matching head 16 between the drying nets 24 is dried for subsequent spraying.
[0025] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A photoresist spraying device, comprising a supporting side rod (1), characterized in that: The top and bottom surfaces of the supporting side rod (1) are symmetrically fixed with mounting blocks (2); a horizontal side groove (3) is horizontally provided on one side of the supporting side rod (1); a horizontal connecting rod (4) is horizontally connected to one side of the supporting side rod (1); a vertical upright rod (5) is vertically provided at one end of the horizontal connecting rod (4) away from the supporting side rod (1); a fixed box body (6) is connected to the bottom end of the vertical upright rod (5); a feed pipe (7) is inserted into one side of the fixed box body (6) An end driving block (8) is fixedly disposed horizontally at one end of the horizontal connecting rod (4), an inner cylinder (9) is fixedly disposed on the inner side edges of the horizontal connecting rod (4) and the vertical upright rod (5), an end clamping hole (10) is opened at one end of the horizontal connecting rod (4) and the vertical upright rod (5), a buckle block (11) is fixedly disposed on the side edge of the vertical upright rod (5) and the top surface of the fixed box body (6), a main body (12) is fixedly disposed on the inner side edge of the fixed box body (6), and the main body (12) ) is fixedly provided with a spray head (13) on the bottom surface, the bottom surface of the fixed box body (6) is horizontally provided with a bottom slot (14), the inner side edge of the bottom slot (14) is horizontally clamped with a rotating bottom plate (15), the top surface of the rotating bottom plate (15) is fixedly clamped with a matching head (16), the inner side edge of the fixed box body (6) is fixedly provided with a rotating motor (17), the inner side edge of the fixed box body (6) is fixedly provided with a cleaning tank (18), the inner bottom surface of the cleaning tank (18) is fixedly provided with a rotating motor (17), the inner side edge of the fixed box body (6) is fixedly provided with a cleaning tank (18), and the inner bottom surface of the cleaning tank (18) is fixedly provided with a rotating motor (17) on the inner side edge of the fixed box body (6). A cleaning pump (19) is fixedly arranged, a cleaning box body (20) is fixedly arranged horizontally on the inner bottom surface and the outer bottom surface of the fixed box body (6), a cleaning pipe body (21) is fixedly arranged horizontally on the inner side edge of the cleaning box body (20), a discharge pipe (22) is inserted into the side edge of the cleaning box body (20), a drying box (23) is fixedly arranged horizontally on the inner bottom surface and the outer bottom surface of the fixed box body (6), and a drying net (24) is fixedly arranged horizontally on the inner side edge of the drying box (23).
2. A photoresist spraying device according to claim 1, characterized in that: The number of the mounting blocks (2) is four, and the four mounting blocks (2) are symmetrically fixedly arranged at the corner positions of the top surface and the bottom surface of the supporting side rod (1); the horizontal side groove (3) is horizontally opened at the center line position of one side of the supporting side rod (1); the horizontal connecting rod (4) is arranged with a telescopic rod structure, and one end of the horizontal connecting rod (4) is horizontally butt-jointed with the side opening end of the horizontal side groove (3).
3. A photoresist spraying device according to claim 1, characterized in that: The vertical rod (5) and the horizontal connecting rod (4) are arranged in an L-shape with respect to each other, and one end of the horizontal connecting rod (4) is arranged to be butt-jointed with the top end of the side of the vertical rod (5); the feed pipe (7) is made of a light-shielding material, and one end of the feed pipe (7) extends to the interior of the fixed box body (6) and is connected to the interior of the main body (12).
4. A photoresist spraying device according to claim 1, characterized in that: The end drive block (8) is snap-fitted to the inner side of the horizontal side groove (3), the snap-fit blocks (11) are correspondingly snap-fitted to the inner side of the end snap-fit hole (10), the bottom end of the spray head (13) is docked at the top end of the matching head (16), and they are internally connected to each other, the bottom snap-fit groove (14) is horizontally arranged in a disc shape at the center of the bottom surface of the fixed box body (6), and the inside of the bottom snap-fit groove (14) is connected to the inside of the fixed box body (6).
5. A photoresist spraying device according to claim 1, characterized in that: The mating head (16) is fixedly connected to the top surface of the rotating base plate (15) near the edge, the rotating motor (17) is vertically fixedly connected to the inner center of the fixed box body (6), and the output end of the rotating motor (17) is vertically fixedly connected to the top center of the rotating base plate (15), and the output end of the cleaning pump (19) is extended through a pipeline to maintain communication with the inside of the cleaning pipe body (21).
6. A photoresist spraying device according to claim 1, characterized in that: The cleaning box body (20) is symmetrically buckled and arranged at the side edge of the opening of the bottom card slot (14) in a superimposed manner, and a spray head structure is evenly arranged at the side between the cleaning tube bodies (21). The arrangement of the drying box (23) is consistent with that of the cleaning box body (20), and the drying box (23) is horizontally arranged at the side edge of the cleaning box body (20).