Novel cleaning water treatment device

By designing a combination device of cleaning tank and deposition box, filter plates and vertical plates are used to accelerate sewage settlement, and through additives and recycling technology, the problems of low efficiency and high cost of sewage treatment in semiconductor production are solved, achieving high efficiency and low efficiency Cost water treatment effect.

CN222218919UActive Publication Date: 2024-12-24上海高笙集成电路设备有限公司
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Patent Information

Application Number
CN202420986604.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-08
Publication Date
2024-12-24
Estimated Expiration
2034-05-08

AI Technical Summary

Technical Problem

In the prior art, the sewage treatment after cleaning in semiconductor production is low efficiency and high cost, especially the physical filtration method requires frequent replacement of the filter membrane, resulting in low water treatment efficiency.

Method used

A cleaning water treatment device is designed, including a cleaning tank and a deposition box, which uses filter plates, vertical plates and additives to accelerate the settlement of large particulate matter in the sewage, and is connected to the water pump through vertical pipe sections to realize the recycling of sewage and efficient filtration. .

Benefits of technology

It improves water treatment efficiency, reduces filtration costs, and extends the service life of the device through the use of PVC material.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a novel cleaning water treatment device which comprises a cleaning tank and a deposition box communicated with the cleaning tank upwards, a filter plate covers a water outlet of the cleaning tank, the filter plate comprises a plurality of filter holes used for intercepting large particles, a hollow cavity of the deposition box is communicated with a first inlet and a first outlet, and the first inlet is communicated with the first outlet. The first inlet can be communicated with the water outlet, the first water outlet is used for discharging sewage, a plurality of vertical plates are arranged on the inner bottom face of the hollow cavity of the deposition box and divide the hollow cavity into a plurality of sub-cavities which are sequentially arranged, the upper portions of the sub-cavities are communicated, and the first inlet and the first outlet are formed in the sub-cavities at the two ends respectively. The filtering device is reasonable in structure, low in filtering cost and high in filtering efficiency.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a cleaning water treatment device. Background Art

[0002] In semiconductor production, not only are extremely high requirements placed on the cleanliness of processing equipment, but also extremely high requirements are placed on the cleanliness of the processing space environment. In addition, the processing equipment includes complex pipelines, and even dust and impurities deposited in the pipelines need to be cleaned in a timely manner. In practice, cleaning the pipelines not only consumes a large amount of water, but the wastewater after cleaning cannot be directly discharged to prevent secondary pollution. In the prior art, wastewater treatment after cleaning is often carried out by physical filtration, which not only requires frequent replacement of the filter membrane and is costly, but also has low water treatment efficiency. Utility Model Content

[0003] The utility model discloses a cleaning water treatment device, which solves the technical problems of high cost and low efficiency of sewage filtration mixed with dust and impurities in the prior art, and has the technical effects of reasonable structure, low filtration cost and high filtration efficiency. The technical scheme adopted is as follows:

[0004] A novel cleaning water treatment device comprises a cleaning tank and a sedimentation box connected upwardly to the cleaning tank, the drainage outlet of the cleaning tank is covered with a filter plate, the filter plate comprises a plurality of filter holes for intercepting large particles, the hollow cavity of the sedimentation box is connected with a first inlet and a first outlet, the first inlet can be connected with the drainage outlet, the first outlet is used for discharging sewage, the bottom surface of the hollow cavity of the sedimentation box is provided with a plurality of vertical plates, the plurality of vertical plates divide the hollow cavity into a plurality of sub-chambers which are connected at the top and arranged in sequence, the first inlet and the first outlet are respectively arranged in the sub-chambers at both ends.

[0005] Based on the above technical solution, part of the bottom surface of the cleaning tank near the drain outlet is recessed to form a sink, the drain outlet is arranged at the bottom surface of the sink, and the filter plate cover is arranged at the notch of the sink.

[0006] Based on the above technical solution, the plurality of vertical plates have different longitudinal heights and are arranged alternately.

[0007] On the basis of the above technical solution, a plurality of perspective windows are provided on the side wall of the deposition box, and the perspective windows are arranged in one-to-one correspondence with the sub-chambers to facilitate viewing of the sub-chambers in the deposition box.

[0008] On the basis of the above technical solution, a horizontal pipe section is provided at the first inlet, and the outer end of the horizontal pipe section is connected to the drain outlet of the cleaning tank.

[0009] On the basis of the above technical solution, the sub-chamber near the first inlet is also connected to a reagent port, through which the auxiliary agent can be injected into the sedimentation box. The sewage temporarily stored in the sedimentation box can be aggregated into granular aggregates and settled under the action of the auxiliary agent.

[0010] On the basis of the above technical solution, a vertical pipe section is provided at the first outlet, and the vertical pipe section extends downward into the sub-chamber at the corresponding position and is close to the inner bottom surface of the sub-chamber.

[0011] On the basis of the above technical solution, it also includes a water pump. The vertical pipe section is connected to the inlet end of the water pump through the filtering unit upwards, and the outlet end of the water pump can be connected to the water source of the cleaning tank for recycling.

[0012] Based on the above technical solution, the cleaning tank and the sedimentation box are integrally formed of PVC material.

[0013] Beneficial Effects

[0014] The utility model has a reasonable structure. During the water treatment process, the first primary filtration is completed at the sedimentation tank, and then the sewage enters the sedimentation box through the horizontal pipe section. The sedimentation box is provided with a vertical plate, and the vertical plate divides the inner cavity of the sedimentation box into a plurality of sub-chambers connected at the upper part. When the sewage enters the sedimentation box through the horizontal pipe section, it will first touch the vertical plate to reduce the flow rate. After that, the sewage flows through multiple sub-chambers in sequence. Because the vertical plates are arranged at different heights, the sewage forms multiple turbulences in the sedimentation box, which is conducive to reducing the flow rate and allowing large particles in the sewage to settle at the bottom of the sub-chamber, thereby improving the water treatment effect. In addition, adding additives can greatly accelerate the sedimentation process and further improve the water treatment effect. After that, the vertical pipe section is connected to the inlet end of the water pump through the filtration unit, so that water resources are recycled and the cleaning cost is reduced.

[0015] The cleaning tank and the sedimentation tank in the utility model are both made of PVC material, which has strong acid and alkali resistance and stable chemical properties, and is conducive to increasing the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0017] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 : A schematic diagram of the three-dimensional structure of the deposition box in the utility model;

[0019] Figure 3 : Figure 2 A schematic diagram of the cross-sectional structure of the middle sedimentation box; DETAILED DESCRIPTION

[0020] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0021] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0022] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0023] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0024] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0025] like Figures 1 to 3 A novel cleaning water treatment device shown includes a cleaning tank 1 and a sedimentation box 2 connected to the cleaning tank 1 upwards.

[0026] like Figure 1 As shown, the cleaning tank 1 is integrally formed of PVC material, and the bottom surface of the cleaning tank 1 near the drain outlet is recessed to form a sink, that is, the drain outlet is arranged at the bottom surface of the sink, and the filter plate 13 cover is arranged at the notch of the sink, and the filter plate 13 includes a plurality of filter holes for intercepting large particles.

[0027] The sedimentation box 2 includes a hollow cavity, which is respectively connected to a first inlet and a first outlet. A plurality of vertical plates 21 are provided on the bottom surface of the hollow cavity of the sedimentation box 2. The plurality of vertical plates 21 are arranged in parallel, dividing the hollow cavity into a plurality of sub-chambers which are connected at the top and arranged in sequence. The first inlet and the first outlet are respectively arranged in the sub-chambers at both ends. A horizontal pipe section 22 is provided at the first inlet. The horizontal pipe section 22 is provided with a pneumatic ball valve 5. The outer end of the horizontal pipe section 22 is connected to the drain outlet of the cleaning tank 1. In this way, the sewage can be prevented from first touching the vertical plate when flowing from the cleaning tank to the sedimentation box, thereby reducing the flow rate and avoiding causing greater disturbance to the sewage in the sedimentation box 2. A vertical pipe section 23 is provided at the first outlet, and the vertical pipe section 23 extends downward into the sub-chamber at the corresponding position and is close to the inner bottom surface of the sub-chamber. It also includes a water pump 3. The vertical pipe section 23 is connected to the inlet end of the water pump 3 through the filter unit 4. In this embodiment, the filter unit 4 uses a Y-type filter, which is a prior art. Those skilled in the art can select it according to needs. The outlet end of the water pump 3 can be connected to the water source of the cleaning tank 1 for recycling.

[0028] like Figure 3 As shown, several vertical plates 21 have different longitudinal heights and are arranged alternately. When sewage flows through multiple vertical plates 21 in sequence, the vertical plates 21 are arranged at different heights, so that the sewage forms multiple turbulences in the sedimentation box 2, which is beneficial to reduce the flow rate and allow large particles in the sewage to settle at the bottom of the sub-chamber, thereby improving the water treatment effect.

[0029] In addition, the sub-chamber near the first inlet is also connected to a reagent port (not shown), through which an auxiliary agent can be injected into the sedimentation box 2, and the sewage temporarily stored in the sedimentation box 2 can be aggregated into a granular aggregate and settled under the action of the auxiliary agent. The auxiliary agent can be one or more of a coagulant, a flocculant and a precipitant, which is used to aggregate dust impurities in the sewage to form a large particle aggregate and settle in the sub-chamber, which is conducive to further improving the water treatment effect.

[0030] A number of perspective windows 24 are provided on the side wall of the sedimentation box 2, and the perspective windows 24 are arranged one-to-one corresponding to the sub-chambers to facilitate viewing of the sub-chambers in the sedimentation box 2. In addition, the cleaning tank 1 and the sedimentation box 2 are integrally formed of PVC material, which has strong acid and alkali resistance and stable chemical properties, which is beneficial to improving the service life.

[0031] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A novel cleaning water treatment device, characterized in that: The invention comprises a cleaning tank (1) and a sedimentation box (2) connected upwardly to the cleaning tank (1); the drainage outlet of the cleaning tank (1) is covered with a filter plate (13); the filter plate (13) comprises a plurality of filter holes for intercepting large particles; the hollow cavity of the sedimentation box (2) is connected with a first inlet and a first outlet; the first inlet can be connected with the drainage outlet; the first outlet is used for discharging sewage; the bottom surface of the hollow cavity of the sedimentation box (2) is provided with a plurality of vertical plates (21); the plurality of vertical plates (21) divide the hollow cavity into a plurality of sub-chambers connected at the top and arranged in sequence; the first inlet and the first outlet are respectively arranged in the sub-chambers at both ends.

2. The novel cleaning water treatment device according to claim 1 is characterized in that: The bottom surface of the cleaning tank (1) near the drain outlet is concave to form a sink, the drain outlet is arranged on the bottom surface of the sink, and the filter plate (13) is covered at the notch of the sink.

3. The novel cleaning water treatment device according to claim 1 or 2, characterized in that: The plurality of vertical plates (21) have different longitudinal heights and are arranged alternately.

4. The novel cleaning water treatment device according to claim 3 is characterized in that: A plurality of perspective windows (24) are provided on the side wall of the sedimentation box (2), and the perspective windows (24) are arranged in a one-to-one correspondence with the sub-chambers to facilitate viewing of the sub-chambers in the sedimentation box (2).

5. The novel cleaning water treatment device according to claim 3 is characterized in that: A horizontal pipe section (22) is provided at the first inlet, and the outer end of the horizontal pipe section (22) is connected to the drain outlet of the cleaning tank (1).

6. The novel cleaning water treatment device according to claim 4 or 5, characterized in that: The sub-chamber near the first inlet is also connected to a reagent port, through which an auxiliary agent can be injected into the sedimentation box. Under the action of the auxiliary agent, the sewage temporarily stored in the sedimentation box can aggregate the pollutants therein into granular aggregates and settle.

7. The novel cleaning water treatment device according to claim 6 is characterized in that: A vertical pipe section (23) is provided at the first outlet, and the vertical pipe section (23) extends downward into the sub-chamber at the corresponding position and is close to the inner bottom surface of the sub-chamber.

8. The novel cleaning water treatment device according to claim 7 is characterized in that: It also comprises a water pump (3), wherein the vertical pipe section (23) is connected upwards to the inlet end of the water pump (3) through the filter unit (4), and the outlet end of the water pump (3) can be connected to the water source of the cleaning tank (1) for recycling.

9. The novel cleaning water treatment device according to claim 7 is characterized in that: The cleaning tank (1) and the sedimentation box (2) are integrally formed using PVC material.