Cleaning equipment

Abstract

The utility model relates to cleaning equipment. The cleaning equipment comprises a liquid medicine tank, a liquid medicine pipeline and a cleaning tank; the liquid medicine pipeline is provided with a first connecting end and a second connecting end, the first connecting end is connected to the liquid medicine tank, the second connecting end is connected to the cleaning tank, and the inner diameter of the first connecting end is larger than that of the second connecting end. In the conveying process of the liquid medicine, due to the fact that the inner diameter of the end, connected to the liquid medicine tank, of the liquid medicine pipeline is larger than the inner diameter of the end, connected to the cleaning tank, of the liquid medicine pipeline, when the liquid medicine is conveyed in the liquid medicine pipeline, the pressure of the liquid medicine can be increased through reduction of the inner diameter of the liquid medicine pipeline, and mixing of all materials in the liquid medicine is facilitated; therefore, the uniformity of the liquid medicine entering the cleaning tank can be improved.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic technology, and in particular to a cleaning device. Background Art

[0002] In the production process of solar cells, cleaning equipment is usually needed to clean the products to remove debris on the surface of the cells. During the cleaning process, the products are placed in a cleaning tank, and the cleaning tank is supplied with liquid medicine through a liquid medicine tank, and then the products are cleaned. The liquid medicine is usually a mixture of multiple materials. In traditional cleaning equipment, the uniformity of the liquid medicine entering the cleaning tank from the liquid medicine tank is poor, resulting in poor cleaning effect of the silicon wafer. Utility Model Content

[0003] Based on this, it is necessary to provide a cleaning device that can improve the uniformity of the chemical solution entering the cleaning tank.

[0004] A cleaning device includes a medicine liquid tank, a medicine liquid pipeline and a cleaning tank; the medicine liquid pipeline has a first connecting end and a second connecting end, the first connecting end is connected to the medicine liquid tank, the second connecting end is connected to the cleaning tank, and the inner diameter of the first connecting end is larger than the inner diameter of the second connecting end.

[0005] In the above cleaning equipment, the liquid medicine in the liquid medicine tank can be transferred to the cleaning tank through the liquid medicine pipeline. During the liquid medicine transfer process, since the inner diameter of the end of the liquid medicine pipeline connected to the liquid medicine tank is larger than the inner diameter of the end connected to the cleaning tank, when the liquid medicine is transferred in the liquid medicine pipeline, the smaller inner diameter of the liquid medicine pipeline can increase the pressure of the liquid medicine, which is beneficial to promote the mixing of the materials in the liquid medicine, and further improve the uniformity of the liquid medicine entering the cleaning tank.

[0006] In some embodiments, the drug liquid pipeline is divided into a plurality of sequentially connected sub-pipelines; and the inner diameters of the sub-pipelines decrease sequentially in the direction from the first connection end to the second connection end.

[0007] In some embodiments, at least a portion of the sub-pipe connections are in a curved structure.

[0008] In some embodiments, the cleaning device further includes a temperature regulating device; at least a portion of the medicine liquid pipeline is located in the temperature regulating device, and the temperature regulating device is used to regulate the temperature of the medicine liquid in the medicine liquid pipeline.

[0009] In some embodiments, the curved structure is located in the temperature regulating device, and the temperature regulating device is used to regulate the temperature of the medical solution in the curved structure.

[0010] In some embodiments, the cleaning device further includes an ozone generator, which is connected to the chemical solution tank to provide ozone for the chemical solution tank.

[0011] In some embodiments, the cleaning equipment further includes an oxygen source, an oxygen pipeline, a nitrogen source, a nitrogen pipeline and a mixed gas pipeline; one end of the oxygen pipeline and one end of the nitrogen pipeline are respectively connected to one end of the mixed gas pipeline, the other end of the oxygen pipeline is connected to the oxygen source, the other end of the nitrogen pipeline is connected to the nitrogen source, and the other end of the mixed gas pipeline is connected to the ozone generator.

[0012] In some embodiments, the cleaning device further comprises a bypass pipe, and the bypass pipe is connected to the mixed gas pipe in parallel with the ozone generator.

[0013] In some embodiments, the cleaning device further comprises a buffer pipe; two ends of the buffer pipe are respectively connected to an outlet end of the ozone generator and an outlet end of the bypass pipe.

[0014] In some embodiments, the ozone generator, the mixed gas pipeline, the oxygen pipeline and the nitrogen pipeline are multiple and correspond to each other one by one, the multiple oxygen pipelines are connected to the oxygen source, and the multiple nitrogen pipelines are connected to the nitrogen source. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of a cleaning device in one embodiment of the present application.

[0016] Figure 2 for Figure 1 Schematic diagram of the structure of the ozone generator and corresponding pipelines in the corresponding cleaning equipment.

[0017] Description of the markings in the figure:

[0018] 10. Cleaning equipment; 101. Chemical liquid tank; 102. Chemical liquid pipeline; 1021. Sub-pipeline; 103. Cleaning tank; 104. Temperature regulating device; 105. Overflow tank; 106. Reflux pipeline; 107. Pressure pump; 108. Ozone pipeline; 109. Ozone generator; 110. Oxygen pipeline; 111. Nitrogen pipeline; 112. Mixed gas pipeline; 113. Oxygen pump; 114. Oxygen filter; 115. Nitrogen pump; 116. Nitrogen filter; 117. Oxygen valve; 118. Nitrogen valve; 119. Bypass pipeline; 120. Bypass valve; 121. Buffer pipeline; 122. Ozone valve; 123. Exhaust valve; 124. Exhaust pipeline; 125. Wastewater pipeline. DETAILED DESCRIPTION

[0019] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0020] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0021] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0022] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0024] Referring to 1, an embodiment of the present application provides a cleaning device 10. The cleaning device 10 includes a liquid medicine tank 101, a liquid medicine pipeline 102, and a cleaning tank 103. The liquid medicine pipeline 102 has a first connection end and a second connection end, the first connection end is connected to the liquid medicine tank 101, the second connection end is connected to the cleaning tank 103, and the inner diameter of the first connection end is greater than the inner diameter of the second connection end.

[0025] In the cleaning device 10 of this embodiment, the liquid medicine in the liquid medicine tank 101 can be transferred to the cleaning tank 103 through the liquid medicine pipe 102. In the process of transferring the liquid medicine, since the inner diameter of the end of the liquid medicine pipe 102 connected to the liquid medicine tank 101 is larger than the inner diameter of the end connected to the cleaning tank 103, when the liquid medicine is transferred in the liquid medicine pipe 102, the smaller inner diameter of the liquid medicine pipe 102 can increase the pressure of the liquid medicine, which is conducive to promoting the mixing of the materials in the liquid medicine, and further improves the uniformity of the liquid medicine entering the cleaning tank 103.

[0026] In some embodiments, the liquid medicine pipeline 102 is divided into a plurality of sequentially connected sub-pipes 1021. In the direction from the first connection end to the second connection end, the inner diameter of the sub-pipes 1021 decreases sequentially. The pressure of the liquid medicine in the liquid medicine pipeline 102 can be gradually increased by the plurality of sub-pipes 1021 with sequentially decreasing inner diameters, further promoting the mixing of materials in the liquid medicine, and improving the uniformity of the liquid medicine entering the cleaning tank 103.

[0027] In some embodiments, there are at least four sub-pipes 1021. Optionally, in the direction from the first connection end to the second connection end, the inner diameters of the four sub-pipes 1021 are 40 mm to 50 mm, 34 mm to 38 mm, 25 mm to 30 mm, and 20 mm to 24 mm, respectively.

[0028] exist Figure 1 In the cleaning device 10 shown, the liquid medicine pipeline 102 is divided into four sequentially connected sub-pipes 1021, and the inner diameters of the four sub-pipes 1021 decrease in sequence in the direction from the first connection end to the second connection end. Figure 1 In the direction from the first connection end to the second connection end, the four sub-pipes 1021 are represented by dashed lines at A, B, C, and D, respectively. Figure 1 In the figure, the dotted line frame at A, the dotted line frame at B, the dotted line frame at C, and the dotted line frame at D respectively represent the sub-pipes 1021 with decreasing inner diameters. Specifically, the inner diameter of the sub-pipe 1021 represented by the dotted line frame at A is 40 mm to 50 mm, the inner diameter of the sub-pipe 1021 represented by the dotted line frame at B is 34 mm to 38 mm, the inner diameter of the sub-pipe 1021 represented by the dotted line frame at C is 25 mm to 30 mm, and the inner diameter of the sub-pipe 1021 represented by the dotted line frame at D is 20 mm to 24 mm.

[0029] It is understandable that the number of sub-pipelines 1021 can also be two, three, five, six, seven, eight, etc.

[0030] In some embodiments, at least some of the sub-pipes 1021 are connected in a curved structure. The drug solution can be mixed at the curved part of the curved structure, which is beneficial to further improve the uniformity of the drug solution.

[0031] Optionally, in Figure 1 In the cleaning device 10 shown, the two sub-pipes 1021 in the middle are connected to form a curved structure. Further optionally, the sub-pipes 1021 are connected to form an M-shaped curved structure.

[0032] In some embodiments, the cleaning device 10 further includes a temperature regulating device 104. At least a portion of the liquid medicine pipeline 102 is located in the temperature regulating device 104. The temperature regulating device 104 can be used to regulate the temperature of the liquid medicine in the liquid medicine pipeline 102 so that the liquid medicine maintains a suitable temperature. It is understood that the temperature of the liquid medicine in the liquid medicine pipeline 102 can be increased or decreased by the temperature regulating device 104. It is also understood that the temperature of the liquid medicine can be regulated by adding a heat conducting medium to the temperature regulating device 104. Optionally, the heat conducting medium is water.

[0033] In some embodiments, the curved structure is located in the temperature regulating device 104. When the curved structure is disposed in the temperature regulating device 104, the contact area between the drug liquid pipeline 102 and the temperature regulating device 104 can be increased, which is beneficial to heat transfer and further beneficial to improving the temperature regulating efficiency of the temperature regulating device 104.

[0034] In some embodiments, the cleaning device 10 further includes an overflow tank 105 and a return pipe 106. The cleaning tank 103 is located inside the overflow tank 105, and the overflow tank 105 is used to receive the overflowed liquid medicine from the cleaning tank 103. Both ends of the return pipe 106 are respectively connected to the overflow tank 105 and the liquid medicine tank 101. By providing the overflow tank 105 and the return pipe 106, the liquid medicine in the cleaning tank 103 can be recovered, thereby improving the utilization rate of the liquid medicine.

[0035] In some embodiments, the cleaning device 10 further includes a pressure pump 107. The pressure pump 107 is connected to the liquid medicine pipeline 102 to provide power for the transmission of the liquid medicine. Figure 1 In the cleaning device shown, there are two pressure pumps. It is understandable that other suitable number of pressure pumps can be provided according to the power requirement of liquid medicine transmission. For example, the number of pressure pumps can also be one, three, four, etc.

[0036] See also Figure 1 and Figure 2In some embodiments, the cleaning device 10 further includes an ozone generator 109, which is connected to the medicine tank 101 to provide ozone for the medicine tank 101. The ozone generator 109 can provide ozone for the medicine tank 101 to improve the cleaning effect of the medicine in the medicine tank 101.

[0037] It is understandable that in the process of preparing solar cells, a chemical solution including ozone is required to clean the silicon wafer. At this time, the silicon wafer can be placed in the cleaning tank 103, and the chemical solution including ozone provided by the chemical solution tank 101 cleans the silicon wafer in the cleaning tank 103.

[0038] It is also understood that the cleaning device 10 further includes an ozone pipe 108. Both ends of the ozone pipe 108 are respectively connected to the ozone generator 109 and the liquid medicine tank 101. It is also understood that an ozone valve 122 is provided on the ozone pipe 108. The flow rate of ozone can be adjusted by adjusting the ozone valve 122.

[0039] In some embodiments, the cleaning device 10 further includes an oxygen source (not shown in the figure), an oxygen pipeline 110, a nitrogen source (not shown in the figure), a nitrogen pipeline 111, and a mixed gas pipeline 112. One end of the oxygen pipeline 110 and one end of the nitrogen pipeline 111 are respectively connected to one end of the mixed gas pipeline 112, the other end of the oxygen pipeline 110 is connected to the oxygen source, the other end of the nitrogen pipeline 111 is connected to the nitrogen source, and the other end of the mixed gas pipeline 112 is connected to the ozone generator 109. In the ozone generator 109, oxygen generates ozone through corona. In this embodiment, a mixed gas of oxygen and nitrogen is used as the intake of the ozone generator 109. Among them, nitrogen atoms are smaller and more easily ionized. After ionization, they collide with oxygen atoms, which can accelerate the dissociation of oxygen, help reduce the consumption of oxygen, and improve the efficiency of ozone generation. In addition, nitrogen is an inert gas, which can provide a protective atmosphere for the ozone generator 109 and promote the generation of ozone.

[0040] In some embodiments, the cleaning device 10 further includes an oxygen pump 113. The oxygen pump 113 is disposed on the oxygen pipeline 110, and the oxygen pump 113 provides power for the transmission of oxygen. Further, the cleaning device 10 further includes an oxygen filter 114, which is disposed on the oxygen pipeline 110. The oxygen provided by the oxygen source can be filtered by the oxygen filter 114 to increase the concentration of oxygen entering the ozone generator 109. It is understood that in the direction of oxygen transmission, the oxygen filter 114 is farther away from the oxygen source than the oxygen pump 113. It is also understood that the cleaning device 10 further includes an oxygen valve 117. The oxygen valve 117 is disposed on the oxygen pipeline 110, and the flow rate of oxygen in the oxygen pipeline 110 can be adjusted by the oxygen valve 117. Further, in the direction of oxygen transmission, the oxygen valve 117 is farther away from the oxygen source than the oxygen filter 114. Optionally, the oxygen filter 114 includes an oxygen filter medium, and the oxygen filter medium can be cellulose fiber. Cellulose fibers have very fine pores that can filter out tiny particles such as dust and bacteria in oxygen, making the oxygen reach a high purity of ≥99.95% and a particle size of <0.01μm.

[0041] In some embodiments, the cleaning device 10 further includes a nitrogen pump 115. The nitrogen pump 115 is disposed on the nitrogen pipeline 111, and the nitrogen pump 115 provides power for the transmission of nitrogen. Further, the cleaning device 10 further includes a nitrogen filter 116, which is disposed on the nitrogen pipeline 111. The nitrogen provided by the nitrogen source can be filtered by the nitrogen filter 116 to increase the concentration of nitrogen entering the ozone generator 109. It is understood that in the direction of nitrogen transmission, the nitrogen filter 116 is further away from the nitrogen source than the nitrogen pump 115. It is also understood that the cleaning device 10 further includes a nitrogen valve 118. The nitrogen valve 118 is disposed on the nitrogen pipeline 111, and the flow rate of nitrogen in the nitrogen pipeline 111 can be adjusted by the nitrogen valve 118. Further, in the direction of nitrogen transmission, the nitrogen valve 118 is further away from the nitrogen source than the nitrogen filter 116. Optionally, the nitrogen filter 116 includes a nitrogen filter medium, which may be activated carbon. Activated carbon has a strong adsorption capacity, a pore size between 0.2 μm and 2 μm, a large adsorption surface area, and can adsorb organic matter, drugs, toxic substances, gases and other substances, and can make nitrogen reach a high purity of ≥99.95% and a particle size of <0.01 μm.

[0042] In some embodiments, the cleaning device 10 further includes a bypass pipe 119, which is connected in parallel with the ozone generator 109 to the mixed gas pipe 112. The bypass pipe 119 can be provided to adjust the flow rate and pressure of the mixed gas entering the ozone generator 109 from the mixed gas pipe 112, so that the ozone generator 109 can work under appropriate working conditions. It is understood that a bypass valve 120 is provided on the bypass pipe 119. The bypass valve 120 can adjust the flow rate of the mixed gas in the bypass pipe 119.

[0043] In some embodiments, the cleaning device 10 further includes a buffer pipe 121. Both ends of the buffer pipe 121 are respectively connected to the outlet end of the ozone generator 109 and the outlet end of the bypass pipe 119. The gas flowing out of the outlet end of the ozone generator 109 can be buffered by the buffer pipe 121, so that the ozone entering the liquid tank 101 from the ozone generator 109 maintains a relatively suitable pressure. At the same time, the waste gas generated in the ozone generator 109 can also be discharged through the buffer pipe 121.

[0044] It is understandable that the cleaning device 10 further includes an exhaust pipe 124. The outlet ends of the buffer pipe 121 and the bypass pipe 119 are respectively connected to the exhaust pipe 124. The exhaust gas can be discharged through the exhaust pipe 124. Optionally, an exhaust valve 123 is provided on the exhaust pipe 124, and the flow rate of the exhaust gas in the exhaust pipe 124 can be adjusted by the exhaust valve 123.

[0045] It is also understandable that the cleaning device 10 further includes a wastewater pipe 125. The outlet end of the waste gas pipe 124 is connected to the wastewater pipe 125. The waste water in the wastewater pipe 125 can dissolve the waste gas and the waste gas generated during the cleaning process, thereby reducing the risk of combustion and explosion of the waste gas.

[0046] In some embodiments, there are multiple ozone generators 109, mixed gas pipelines 112, oxygen pipelines 110, and nitrogen pipelines 111, and they correspond one to one. The multiple oxygen pipelines 110 are connected to the oxygen source, and the multiple nitrogen pipelines 111 are connected to the nitrogen source. By setting up multiple ozone generators 109, the output of ozone can be increased, thereby increasing the ozone concentration of the medicine in the medicine tank 101 and improving the cleaning effect.

[0047] In some embodiments, each pipeline adopts a PVDF pipeline, which has good stability and good resistance to ozone corrosion, and can make the pipeline have relatively stable performance.

[0048] It is understandable that in Figure 1 and Figure 2 In the figure, arrows indicate the transmission direction of liquid medicine, oxygen, nitrogen, ozone, etc. Figure 2When multiple arrows partially overlap, it means that there are multiple gases in the pipeline.

[0049] Example 1

[0050] This embodiment adopts Figure 1 The cleaning device 10 shown cleans silicon wafers. The liquid medicine pipeline 102 is divided into four sub-pipelines 1021 connected in sequence. The two sub-pipelines 1021 located in the middle are connected in a curved structure. There are two ozone generators 109, and the liquid medicine in the liquid medicine tank 101 includes ozone provided by the ozone generator 109. When the liquid medicine is transmitted in the liquid medicine pipeline 102, the inner diameter of the liquid medicine pipeline 102 becomes smaller in the direction of liquid medicine transmission, so that the liquid medicine can be fully mixed.

[0051] During the cleaning process of the cleaning tank 103, the chemical reactions that occur include: 2Si+2O3=2SiO2+O2, SiO2+4HF=SiF4+2H2O. Among them, the reaction of SiO2 and HF is an exothermic reaction. Therefore, the temperature reduction during the cleaning process is conducive to the reaction in the positive direction. By adding cooling water to the temperature regulating device 104, the temperature of the liquid medicine in the curved structure in the temperature regulating device 104 can be adjusted, thereby reducing the temperature of the liquid medicine entering the cleaning tank 103, which is conducive to promoting the reaction in the positive direction and improving the cleaning effect. Optionally, the temperature of the cooling water in the temperature regulating device 104 is controlled to be 10°C±2°C.

[0052] In addition, during the cleaning process, the liquid medicine in the cleaning tank 103 can be recycled through the overflow tank 105 and the return pipe 106, thereby improving the utilization rate of the liquid medicine. Ozone can be added to the liquid medicine tank 101 through the ozone pipe 108, and the concentration of ozone can be maintained at 60ppm~80ppm, thereby promoting the improvement of the cleaning process.

[0053] Comparative Example 1

[0054] In this comparative example, a single ozone generator is used to provide ozone for the liquid medicine tank, and the inner diameter of the liquid medicine pipeline is consistent, and no temperature regulating device is provided. During the cleaning process of the silicon wafer, the ozone concentration in the liquid medicine can only be maintained in the range of 15ppm~30ppm.

[0055] The non-gettering surface of the silicon wafer after cleaning in Example 1 and Comparative Example 1 was tested. The non-gettering surface of the silicon wafer after cleaning in Example 1 was cleaner and had better velvet uniformity. The defect rate of the non-gettering surface of the silicon wafer after cleaning in Comparative Example 1 was 10.70%, and the defect rate of the non-gettering surface of the silicon wafer after cleaning in Example 1 was only 0.15%, indicating that the cleaning device 10 in Example 1 can improve the cleaning effect of the non-gettering surface of the silicon wafer.

[0056] Furthermore, the silicon wafers after cleaning in Example 1 and Comparative Example 1 were made into batteries in the same manner. And the efficiency of the batteries was tested. The efficiency of the battery corresponding to Comparative Example 1 is 24.852%, and the efficiency of the battery corresponding to Example 1 is 24.941%, which shows that the cleaning equipment 10 in Example 1 can improve the efficiency of the battery. The reason may be that compared with Comparative Example 1, the performance of the non-doped surface of the silicon wafer after cleaning in Example 1 is well improved, which is beneficial to improve the uniformity of subsequent CVD coating and better contact. At the same time, the light absorption effect of the velvet surface is improved accordingly, and the heterojunction filling factor FF and the short-circuit current Isc are improved, so the battery efficiency is also improved accordingly.

[0057] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0058] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims, and the specification and drawings may be used to interpret the contents of the claims.

Claims

1. A cleaning device (10), characterized in that: It comprises a medicine liquid tank (101), a medicine liquid pipeline (102) and a cleaning tank (103); the medicine liquid pipeline (102) has a first connecting end and a second connecting end, the first connecting end is connected to the medicine liquid tank (101), the second connecting end is connected to the cleaning tank (103), and the inner diameter of the first connecting end is greater than the inner diameter of the second connecting end.

2. The cleaning device (10) according to claim 1, characterized in that: The liquid medicine pipeline (102) is divided into a plurality of sequentially connected sub-pipelines (1021); in a direction from the first connection end to the second connection end, the inner diameters of the sub-pipelines (1021) decrease sequentially.

3. The cleaning device (10) according to claim 2, characterized in that: At least part of the sub-pipelines (1021) are connected in a curved structure.

4. The cleaning device (10) according to claim 3, characterized in that: The cleaning device (10) further comprises a temperature regulating device (104); at least a portion of the drug liquid pipeline (102) is located in the temperature regulating device (104), and the temperature regulating device (104) is used to regulate the temperature of the drug liquid in the drug liquid pipeline (102).

5. The cleaning device (10) according to claim 4, characterized in that: The curved structure is located in the temperature regulating device (104), and the temperature regulating device (104) is used to regulate the temperature of the medicine liquid in the curved structure.

6. The cleaning device (10) according to any one of claims 1 to 5, characterized in that: The cleaning device (10) further comprises an ozone generator (109), wherein the ozone generator (109) is connected to the drug solution tank (101) to provide ozone for the drug solution tank (101).

7. The cleaning device (10) according to claim 6, characterized in that: The cleaning equipment (10) further comprises an oxygen source, an oxygen pipeline (110), a nitrogen source, a nitrogen pipeline (111) and a mixed gas pipeline (112); one end of the oxygen pipeline (110) and one end of the nitrogen pipeline (111) are respectively connected to one end of the mixed gas pipeline (112), the other end of the oxygen pipeline (110) is connected to the oxygen source, the other end of the nitrogen pipeline (111) is connected to the nitrogen source, and the other end of the mixed gas pipeline (112) is connected to the ozone generator (109).

8. The cleaning device (10) according to claim 7, characterized in that: The cleaning device (10) further comprises a bypass pipe (119), wherein the bypass pipe (119) and the ozone generator (109) are connected in parallel to the mixed gas pipe (112).

9. The cleaning device (10) according to claim 8, characterized in that: The cleaning device (10) further comprises a buffer pipe (121); two ends of the buffer pipe (121) are respectively connected to the outlet end of the ozone generator (109) and the outlet end of the bypass pipe (119).

10. The cleaning device (10) according to claim 7, characterized in that: The ozone generator (109), the mixed gas pipeline (112), the oxygen pipeline (110), and the nitrogen pipeline (111) are all multiple and correspond to each other. The multiple oxygen pipelines (110) are all connected to the oxygen source, and the multiple nitrogen pipelines (111) are all connected to the nitrogen source.

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