Reaction chamber lifting device

Abstract

The utility model relates to a reaction chamber lifting device which comprises an air outlet end, air cylinders and fixing plates, the air outlet end is fixedly connected with a plurality of fixing plates, the fixing plates are circumferentially and evenly distributed around the air outlet end, each fixing plate is fixedly connected with a piston rod of at least one air cylinder, and cylinder bodies of the air cylinders are fixedly connected with a rack. The air outlet end and the reaction chamber are driven to move through the air cylinder, parts needing to be disassembled are greatly reduced, the air inlet end, the air outlet end and the like do not need to be disassembled from equipment, reconnection of pipelines is avoided, and the problems that an existing reaction chamber is time-consuming and labor-consuming to disassemble and has safety risks are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor tail gas treatment, in particular to a reaction chamber lifting device. Background Art

[0002] In semiconductor tail gas treatment equipment, tail gas needs to be eliminated through chemical reaction (such as combustion) or physical adsorption (such as activated carbon) in the reaction chamber. Therefore, in actual work, the reaction chamber needs to be replaced and repaired frequently.

[0003] At present, when the reaction chamber needs to be dismantled, the surrounding equipment such as the air inlet and outlet need to be dismantled before the reaction chamber can be dismantled, which is very time-consuming and labor-intensive. Moreover, if the dismantling is done entirely by manpower, the heavy reaction chamber may hit the workers, which poses a safety risk. Utility Model Content

[0004] The utility model aims to solve the above problems and provides a reaction chamber lifting device, which solves the problems that the existing reaction chamber disassembly is time-consuming, labor-intensive and has safety risks.

[0005] A reaction chamber lifting device comprises: an air outlet end, a cylinder and a fixed plate, wherein the air outlet end is fixedly connected to a plurality of fixed plates, the plurality of fixed plates are evenly arranged in a circle around the air outlet end, each fixed plate is fixedly connected to a piston rod of at least one cylinder, and the cylinder body of the cylinder is fixedly connected to a frame.

[0006] On the basis of the above technical solution, it also includes a switch, which is fixedly connected to the frame and is used to control the action of the cylinder.

[0007] On the basis of the above technical solution, it also includes a limit block, which is located between the fixed plate and the cylinder body and contacts the fixed plate and the cylinder body respectively when limiting the air outlet end, and the limit block is slidably connected to the cylinder body.

[0008] Based on the above technical solution, the limit block is in the shape of a concave character with a groove formed inside, and the opening of the groove faces the air outlet end.

[0009] Based on the above technical solution, the limiting block is chamfered at the opening of the groove.

[0010] On the basis of the above technical solution, it also includes a pull ring, and the pull ring is fixedly connected to the limit block.

[0011] On the basis of the above technical solution, it also includes a driving device, which is used to drive the limit block to perform linear motion.

[0012] On the basis of the above technical solution, the frame is formed with a mounting platform, and the upper side of the mounting platform is fixedly connected to the cylinder body.

[0013] Based on the above technical solution, the lower end of the air outlet is fixedly connected and communicated with the bellows.

[0014] On the basis of the above technical solution, it also includes a screw, which passes through the vertical through hole of the fixing plate and is threadedly connected to the end of the piston rod.

[0015] The utility model has the following advantages: the air outlet end and the reaction chamber are driven to move by the cylinder, the parts that need to be disassembled are greatly reduced, and there is no need to remove the air inlet end and the air outlet end from the equipment, and reconnecting the pipeline is avoided, which solves the problem that the existing reaction chamber disassembly is time-consuming, labor-intensive and has safety risks. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0017] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 : A schematic cross-sectional view of the utility model;

[0019] Figure 3 : Schematic diagram of the top view of the cylinder and limit block. DETAILED DESCRIPTION

[0020] The utility model is further described below with reference to the accompanying drawings and examples:

[0021] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] like Figures 1 to 3 As shown, this embodiment provides a reaction chamber lifting device, including: an air outlet end 1, a cylinder 2 and a fixed plate 11, the air outlet end 1 is fixedly connected to multiple fixed plates 11, and the multiple fixed plates 11 are evenly arranged around the air outlet end 1. The even circumferential arrangement is beneficial to the force balance between the cylinders. Each fixed plate 11 is fixedly connected to the piston rod 22 of at least one cylinder 2, and the cylinder body 21 of the cylinder 2 is fixedly connected to the frame 4.

[0025] On the basis of the above technical solution, a switch 5 is further included, the switch 5 is fixedly connected to the frame 4, and the switch 5 is used to control the action of the cylinder 2. Preferably, the switch 5 is an electric switch, which is used to control the electromagnetic reversing valve connected to the cylinder 2. It should be noted that the switch 5 can also be a manual reversing valve, which changes the movement direction of the piston rod 22 by changing the gas path.

[0026] On the basis of the above technical solution, a limit block 6 is further included. When the limit block 6 limits the air outlet end 1, it is located between the fixed plate 11 and the cylinder body 21 and contacts the fixed plate 11 and the cylinder body 21 respectively. The limit block 6 is slidably connected to the cylinder body 21. The sliding connection can be a sliding connection using a guide rail, that is, the cylinder body 21 is equipped with a slide rail to limit the movement direction of the limit block 6.

[0027] Based on the above technical solution, the limit block 6 is in the shape of a concave with a groove formed inside, and the opening of the groove faces the air outlet end 1.

[0028] On the basis of the above technical solution, the limit block 6 is formed with a chamfer 62 at the opening of the groove, and the chamfer 62 plays a guiding role.

[0029] On the basis of the above technical solution, it further comprises a pull ring 61, wherein the pull ring 61 is fixedly connected to the limit block 6, and the pull ring 61 provides a convenient gripping position for the limit block 6 when the limit block 6 is driven manually.

[0030] On the basis of the above technical solution, it also includes a driving device, which is used to drive the limit block 6 to make linear motion. The driving device is a cylinder or an electric push rod.

[0031] On the basis of the above technical solution, the frame 4 is formed with a mounting platform 41 , the upper side of the mounting platform 41 is fixedly connected to the cylinder body 21 , and the mounting platform 41 protrudes from the upper surface of the base of the frame 4 .

[0032] On the basis of the above technical solution, the lower end of the gas outlet end 1 is fixedly connected and communicated with the bellows 3, and the bellows 3 can be compressed and stretched.

[0033] On the basis of the above technical solution, it also includes a screw (not shown in the figure), which passes through the vertical through hole of the fixing plate 11 and is threadedly connected to the end of the piston rod 22. The threaded connection method facilitates the replacement of the air outlet end 1.

[0034] When removing the reaction chamber 7, first remove the clamp (not shown in the figure) that fixedly connects the reaction chamber 7 to the air inlet end 8. Then use the switch 5 to control the cylinder 2, so that the piston rod 22 of the cylinder 2 moves downward to the lowest position, and the reaction chamber 7 moves downward, so that a gap is generated between the upper part of the reaction chamber 7 and the air inlet end 8. After manually removing the clamp (not shown in the figure) that fixedly connects the reaction chamber 7 to the air outlet end 1, the reaction chamber 7 is removed from the air outlet end 1.

[0035] When loading the reaction chamber 7, place the new or cleaned reaction chamber 7 above the outlet end 1, and use a clamp to fix the reaction chamber 7 and the outlet end 1. Then use the switch 5 to control the cylinder 2, and the piston rod 22 of the cylinder 2 moves upward to the uppermost position. At this time, the upper end of the reaction chamber 7 fits the lower end of the inlet end 8, and the clamp is used to fix the two. Then insert the limit block 6 between the fixing plate 11 and the cylinder body 21, and the limit block 6 plays the role of limiting and supporting, and the cylinder 2 can release pressure.

[0036] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A reaction chamber lifting device, characterized in that: include: An air outlet (1), a cylinder (2) and a fixed plate (11), wherein the air outlet (1) is fixedly connected to a plurality of fixed plates (11), the plurality of fixed plates (11) are evenly arranged around the air outlet (1), each fixed plate (11) is fixedly connected to a piston rod (22) of at least one cylinder (2), and the cylinder body (21) of the cylinder (2) is fixedly connected to a frame (4).

2. A reaction chamber lifting device according to claim 1, characterized in that: It also comprises a switch (5), wherein the switch (5) is fixedly connected to the frame (4), and the switch (5) is used to control the action of the cylinder (2).

3. A reaction chamber lifting device according to claim 1, characterized in that: It also comprises a limit block (6), which is located between the fixed plate (11) and the cylinder body (21) when limiting the air outlet end (1) and is in contact with the fixed plate (11) and the cylinder body (21) respectively, and the limit block (6) is slidably connected to the cylinder body (21).

4. A reaction chamber lifting device according to claim 3, characterized in that: The limiting block (6) is in the shape of a concave character with a groove formed inside, and the opening of the groove faces the air outlet end (1).

5. A reaction chamber lifting device according to claim 4, characterized in that: The limiting block (6) is formed with a chamfer (62) at the opening of the groove.

6. A reaction chamber lifting device according to claim 4, characterized in that: It also comprises a pull ring (61), wherein the pull ring (61) is fixedly connected to the limiting block (6).

7. A reaction chamber lifting device according to claim 4, characterized in that: It also comprises a driving device, which is used to drive the limit block (6) to perform linear motion.

8. A reaction chamber lifting device according to claim 1, characterized in that: The frame (4) is formed with a mounting platform (41), and the upper side of the mounting platform (41) is fixedly connected to the cylinder body (21).

9. A reaction chamber lifting device according to claim 1, characterized in that: The lower end of the air outlet end (1) is fixedly connected to and communicates with the bellows (3).

10. The reaction chamber lifting device according to claim 1, characterized in that: It also includes a screw, which passes through the vertical through hole of the fixing plate (11) and is threadedly connected to the end of the piston rod (22).

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