Bar carrier and floating zone furnace

Abstract

The utility model provides a charge bar carrier which is used for installing charge bars on a floating area furnace, a first connecting seat is arranged at the bottom of the floating area furnace, and a second connecting seat is arranged at the top of the floating area furnace. The material bar carrier comprises a fixing part and a supporting part, wherein the fixing part is used for fixing the material bar and enabling one end of the material bar to be located in a floating area of the floating area furnace; when the charge bar carrier is arranged at the bottom of the floating zone furnace, the first connecting part is used for connecting the fixing part to the first connecting seat; and when the charge bar carrier is arranged at the top of the floating zone furnace, the second connecting part is used for connecting the fixing part to the second connecting seat. According to the material bar carrier, the position of the material bar can be conveniently and rapidly changed.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal preparation, in particular to a material rod carrier and a floating zone furnace. Background Art

[0002] In the prior art, a floating zone furnace is a heating device that uses a floating zone method to grow single crystals. The floating zone method is a technology for preparing high-quality single crystals. It promotes crystal growth by forming a floating area on the surface of the material melt. The basic steps include melting the material, forming a floating zone, slowly moving the crystal, and finally producing high-quality single crystals. This technology has been widely used in scientific research and the semiconductor industry. The commonly used heating method in this technology is optical heating, which heats the material with a strong light field through the focusing and modulation of light, so that it melts locally and forms a floating zone, and then the required single crystal can be formed during the solidification process. When in use, two long and short material rods are vertically connected to the upper and lower ends of the floating zone furnace respectively. After heating by the floating zone furnace, a floating zone can be formed between the two sections of the material rods. During the reaction, the floating zone moves from bottom to top relative to the material rod to complete the crystallization process. Initially, the lower material rod is shorter and the upper one is longer. After the reaction, a single crystal is generated at the lower material rod and becomes longer, and the upper material rod reacts and becomes shorter. However, the material generated by a single reaction process sometimes does not meet the single crystal standard. It is necessary to remove the two sections of the material rod after the reaction, and then replace them and react again, or directly replace them with new material rods. The material rods are usually fixed by winding multiple sections of metal wires. The material rod removal process is inconvenient and affects the user's work efficiency. Therefore, a material rod carrier is needed to facilitate the upper and lower exchange of the material rod position. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a material bar carrier, which can conveniently change the position of the material bar.

[0004] The utility model also provides a floating zone furnace comprising the material rod carrier.

[0005] According to the first aspect of the present invention, the material rod carrier is used to load material rods and is installed on a first connecting seat at the bottom of the floating zone furnace, or a second connecting seat at the top of the floating zone furnace; the material rod carrier includes: a fixing part, which is used to fix the material rod; a first connecting part, which is connected to the fixing part, and when the material rod carrier is set at the bottom of the floating zone furnace, the first connecting part is detachably connected to the first connecting seat; when the material rod carrier is set at the top of the floating zone furnace, the first connecting part is detachably connected to the second connecting seat.

[0006] The material rod carrier according to the embodiment of the first aspect of the utility model has at least the following beneficial effects: by providing a first connecting portion on the material rod carrier, the material rod carrier can be connected not only to the first connecting seat at the bottom of the floating zone furnace, but also to the second connecting seat. When the material rods are exchanged up and down, it is only necessary to remove the material rod carrier from the floating zone furnace to exchange the upper and lower positions, without removing the material rods from the material rod carrier. Alternatively, when the material rods below or above the floating zone furnace are replaced separately, there is no need to remove the material rods from the material rod carrier, and a new material rod with the material rod carrier installed can be directly replaced. This makes the operation more convenient when exchanging the positions of the material rods.

[0007] According to the second aspect of the embodiment of the utility model, the material rod carrier is used to load material rods and is installed on a first connecting seat at the bottom of the floating zone furnace, or a second connecting seat at the top of the floating zone furnace; the material rod carrier includes: a fixing part, which is used to fix the material rod; a first connecting part, which is connected to the fixing part, and when the material rod carrier is set at the bottom of the floating zone furnace, the first connecting part and the first connecting seat are detachably connected; a second connecting part, which is connected to the fixing part, and when the material rod carrier is set at the top of the floating zone furnace, the second connecting part and the second connecting seat are detachably connected.

[0008] The material rod carrier according to the embodiment of the second aspect of the utility model has at least the following beneficial effects: by arranging the first connecting part and the second connecting part on the material rod carrier, the material rod carrier can be connected not only to the first connecting seat at the bottom of the floating zone furnace, but also to the second connecting seat. When the material rod is switched up and down, it is only necessary to remove the material rod carrier from the floating zone furnace to switch the upper and lower positions, without removing the material rod from the material rod carrier. Thereby, the operation is more convenient when switching the upper and lower positions of the material rod. And by connecting through the first connecting part and the first connecting seat respectively, and by connecting through the second connecting part and the second connecting seat, it can better cooperate and connect with the second connecting seat at the top of the floating zone furnace and the first connecting seat at the bottom.

[0009] According to some embodiments of the utility model, the fixing portion includes an annular sleeve having a through hole, and the end of the through hole away from the first connecting portion is used to accommodate the material rod; or, the fixing portion is circumferentially provided with a plurality of clamping bodies, the plurality of clamping bodies can approach each other and lock with each other along the radial direction of the fixing portion to clamp the material rod, and the plurality of clamping bodies can be unlocked and move away from each other along the radial direction of the fixing portion to release the material rod.

[0010] According to some embodiments of the utility model, the fixing part includes an annular sleeve, a through hole is provided on the annular sleeve, and the material rod is passed through the through hole. The fixing part also includes a top screw, and the annular sleeve is provided with at least one second threaded hole passing through radially, and the second threaded hole is connected to the through hole. The top screw is screwed into the second threaded hole and is used to press the material rod radially.

[0011] According to some embodiments of the present invention, the outer diameter of the annular sleeve at one end away from the first connecting portion decreases sequentially along a first direction, and the first direction is a direction from the first connecting portion to the fixing portion.

[0012] According to some embodiments of the utility model, the fixing portion further includes a sleeve, at least a portion of which is accommodated in the through hole, the sleeve is used to be sleeved on one end of the material rod, and the top wire can abut against the sleeve along the radial direction of the fixing portion.

[0013] According to some embodiments of the present invention, the first connecting portion is provided with a first threaded hole, and at least a portion of the first connecting seat can be threadedly connected in the first threaded hole.

[0014] According to some embodiments of the utility model, the first connecting portion is provided with a first threaded hole, and at least a portion of the first connecting seat can be threadedly connected to the first threaded hole; the second connecting portion includes a hanging ring, and the hanging ring can be hung on the second connecting seat. The first connecting portion is also provided with a threading hole that penetrates radially, and one end of the hanging ring is rotatably connected to the threading hole. The internal thread of the first threaded hole does not exceed the center of the threading hole in the first direction. The first direction is the direction from the first connecting portion to the fixing portion.

[0015] According to some embodiments of the utility model, the first connecting part is provided with a first threaded hole, and at least a part of the first connecting seat can be threadedly connected to the first threaded hole; the second connecting part includes a hanging ring, and the hanging ring can be hung on the second connecting seat, and the material rod carrier also includes a transition part, the first connecting part and the fixed part are both connected to the transition part, the hanging ring is rotatably connected to the transition part, and can be flipped up and down relative to the transition part.

[0016] According to some embodiments of the utility model, a through hole for loading material rods is provided inside the fixing portion, the fixing portion and the first connecting portion are respectively located at opposite ends of the material rod carrier, and the transition portion is located between the fixing portion and the first connecting portion.

[0017] According to the second aspect of the present invention, the floating zone furnace includes the material rod carrier in the first aspect; a first connecting seat, the first connecting part is detachably connected to the first connecting seat; a second connecting seat, which is arranged opposite to the first connecting seat and is located above the first connecting seat, and the second connecting part is detachably connected to the second connecting part.

[0018] According to some embodiments of the present invention, the first connection part is threadedly connected to the first connection seat, and the second connection part is threadedly connected to the second connection seat; or, the first connection part is threadedly connected to the first connection seat, and the second connection part is hung on the second connection seat.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the material rod carrier in some embodiments of the utility model;

[0021] Figure 2 It is a cross-sectional schematic diagram of a material rod carrier in some embodiments of the utility model;

[0022] Figure 3 It is a schematic diagram of the structure of the floating zone furnace in some embodiments of the utility model;

[0023] Figure 4 It is a cross-sectional schematic diagram of a material rod carrier arranged on a first connecting seat in some embodiments of the utility model;

[0024] Figure 5 It is a cross-sectional schematic diagram of a material rod carrier arranged on a second connecting seat in some embodiments of the utility model;

[0025] Figure 6 This is a schematic diagram of the structure of a clamping plate used in a fixing portion in some embodiments of the present invention.

[0026] Figure Number:

[0027] 1000, floating zone furnace; 1100, material rod carrier; 1110, fixing part; 1111, annular sleeve; 1112, through hole; 1113, second threaded hole; 1114, top screw; 1115, cushion sleeve; 1116, limiting part; 1117, clamp; 1120, first connecting part; 1121, first threaded hole; 1130, second connecting part; 1131, hanging ring; 1140, transition part; 1141, threading hole; 1200, material rod; 1300, first connecting seat; 1310, adapter; 1400, second connecting seat. DETAILED DESCRIPTION

[0028] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0029] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present utility model, "a plurality" means more than two. If there is a description of "first" or "second", it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0031] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0032] In the prior art, a single crystal is produced by growing a single crystal using a floating zone method. When a single crystal is produced using the floating zone method, feed rods are arranged at both the upper and lower ends of the floating zone furnace, and the feed rods are heated. The feed rods at the lower end of the floating zone furnace are shorter, and the feed rods at the upper end of the floating zone furnace are longer. The feed rods at the lower end of the floating zone furnace are preferably single crystals. The floating zone furnace heats a local area in the floating zone furnace to form a floating zone between the feed rods. The floating zone moves from top to bottom, so that the feed rods at the upper end melt and the feed rods at the lower end form single crystals. As the floating zone continues to move upward, the feed rods at the bottom of the floating zone furnace continue to lengthen and form single crystals, while the feed rods at the top of the floating zone furnace will continue to shorten and dissolve into the floating zone. It should be noted that the single crystal generated at the lower end is a material provided by the melted feed rods at the upper end, that is, when the single crystal at the lower end grows, the feed rods at the upper end will become shorter. In some cases, the single crystal generated at the lower end is not a qualified single crystal, and the feed rods need to be replaced. In the prior art, the feed rod is fixed on the floating zone furnace by multiple strands of metal wires. When the formed single crystal is unqualified, the feed rod needs to be removed from the floating zone furnace by removing the wound metal wires, which is very inconvenient and greatly reduces the user's work efficiency.

[0033] Reference Figure 1 , Figure 3 , Figure 4 and Figure 5 The material rod carrier 1100 in the first embodiment of the utility model is used to install the material rod 1200 on the floating zone furnace 1000. The bottom of the floating zone furnace 1000 is provided with a first connection seat 1300, and the top of the floating zone furnace 1000 is provided with a second connection seat 1400. Since the first connection seat 1300 is provided at the bottom of the floating zone furnace 1000, and the second connection seat 1400 is provided at the top of the floating zone furnace 1000, in the utility model, the material rod carrier can be connected with the first connection seat 1300 to set the material rod 1200 at the bottom of the floating zone furnace, and can also be connected with the second connection seat 1400 to set the material rod 1200 at the top of the floating zone furnace. At the same time, when the material rod 1200 is changed up and down in the floating zone furnace, it is not necessary to remove the material rod 1200 from the material rod carrier, and it is only necessary to remove the material rod carrier from the floating zone furnace.

[0034] Specifically, the material bar carrier 1100 includes a fixing portion 1110, a first connecting portion 1120 and a second connecting portion 1130. The fixing portion 1110 is used to fix the material bar 1200. The fixing portion 1110 can fix the material bar 1200 in various ways. Figure 6 , use two clamping plates 1117 to clamp the material bar 1200, the two clamping plates 1117 can be close to or away from each other, when the two clamping plates 1117 are close to each other, the material bar 1200 can be clamped and fixed, after the material bar 1200 is clamped, the material bar is fixed to the fixing part 1110, and the material bar 1200 can be released when the clamping plates 1117 are away from each other. In order to match the shape of the material bar 1200, the surfaces facing each other of the two clamping plates 1117 are set as arc surfaces; or, as Figure 1 The fixing part 1110 has a cavity inside which the feed rod 1200 is inserted, so that one end of the feed rod 1200 is fixed in the fixing part 1110. When the feed rod carrier 1100 is arranged at the bottom of the floating zone furnace 1000, the first connecting part 1120 is used to detachably connect the fixing part 1110 to the first connecting seat 1300. When the feed rod carrier 1100 is arranged at the top of the floating zone furnace 1000, the second connecting part 1130 is used to connect the fixing part 1110 to the second connecting seat 1400, that is, the feed rod carrier can be detachably connected to the first connecting seat 1300 through the first connecting part 1120, and the second connecting part 1130 can be detachably connected to the second connecting seat 1400, so that the removal of the feed rod 1200 from the first connecting seat 1300 is more convenient. When the single crystal generated at the bottom of the floating zone furnace 1000 is unqualified, the material rod carrier where the unqualified single crystal is located can be quickly and conveniently removed from the lower end of the floating zone furnace 1000.

[0035] It should be noted that during the single crystal generation process, the material consumed by the material rod 1200 at the upper end of the floating zone furnace 1000 condenses on the material rod 1200 at the lower end of the floating zone furnace 1000, and the material rod 1200 at the upper end of the floating zone furnace 1000 is consumed and becomes shorter, while the material rod 1200 at the lower end of the floating zone furnace 1000 becomes longer. Therefore, when the single crystal generated in the floating zone furnace 1000 is unqualified, the material rod 1200 at the lower end of the floating zone furnace 1000 and the material rod 1200 at the upper end of the floating zone furnace 1000 are usually swapped to regenerate the single crystal. That is, the material rod carrier 1100 connected to the first connection seat 1300 through the first connection part 1120 is disassembled, and it is connected to the second connection seat 1400 through the second connection part 1130. When the material rod 1200 is arranged at the bottom of the floating zone furnace 1000, the fixing part 1110 is located at the upper part of the material rod carrier 1100, and the material rod 1200 is loaded at the upper end of the fixing part 1110. When the material rod 1200 is arranged at the top of the floating zone furnace 1000, the fixing part 1110 is located at the lower part of the material rod carrier 1100, and the material rod 1200 is loaded at the lower end of the fixing part 1110.

[0036] When replacing the material rods 1200, the material rod carrier 1100 installed at the bottom of the floating zone furnace 1000 can be removed and reinstalled on the top of the floating zone furnace 1000, and the material rod carrier 1100 installed at the top of the floating zone furnace 1000 can be removed and reinstalled on the bottom of the floating zone furnace 1000; or, the material rod carrier 1100 above the floating zone furnace 1000 or the material rod carrier 1100 below the floating zone furnace 1000 can be replaced separately.

[0037] In other embodiments, only the first connection part 1120 may be provided, and the first connection part 1120 may be connected to both the first connection seat 1300 at the bottom of the floating zone furnace and the second connection seat 1400 at the top of the floating zone furnace. When the upper and lower positions of the material rods 1200 are exchanged, the first connection part 1120 of the material rod carrier is removed from the material rod carrier on the first connection seat 1300 at the bottom of the floating zone furnace and installed on the second connection seat 1400 at the top of the floating zone furnace.

[0038] It is understandable that for the manner in which the first connection part 1120 and the second connection part 1130 are respectively provided in the material rod carrier and installed at the top and bottom of the floating zone furnace, and the manner in which the material rod carrier is installed at the top and bottom of the floating zone furnace only through the first connection part 1120, the fixing part 1110 in the material rod carrier can adopt the same structure to fix the material rod 1200. According to some embodiments of the utility model, the fixing part 1110 includes an annular sleeve 1111, and a through hole 1112 is provided on the annular sleeve 1111. The material rod 1200 is inserted into the through hole 1112, and the hole wall of the through hole 1112 fixes the material rod 1200. The material rod 1200 is arranged at one end of the through hole 1112 away from the first connection part 1120. The material bar 1200 is fixedly connected by the annular sleeve 1111, which is sleeved on one end of the material bar 1200, and the contact area between the annular sleeve 1111 and the material bar 1200 is large, so that the material bar carrier 1100 fixes the material bar 1200 more firmly, and the material bar 1200 is not easy to shake on the material bar carrier 1100. The material bar 1200 is arranged in the through hole 1112 and can be fixedly connected by interference fit. It should be noted that when fixing material bars 1200 of different sizes, annular sleeves 1111 of different sizes can be selected to fix the material bar 1200.

[0039] According to some embodiments of the utility model, the fixing portion 1110 also includes a top screw 1114, and at least one second threaded hole 1113 penetrating radially is provided on the side of the annular sleeve 1111, the second threaded hole 1113 is connected to the through hole 1112, and the top screw 1114 cooperates with the second threaded hole 1113, and the top screw 1114 presses the material rod 1200 radially along the annular sleeve 1111. Since the diameters of the material rods 1200 are not completely consistent, the connection between the material rod 1200 and the annular sleeve 1111 may become loose. Therefore, a push screw 1114 is provided on the annular sleeve 1111. After the material rod 1200 is placed into the annular sleeve 1111, the push screw 1114 is radially inserted into the through hole 1112 of the annular sleeve 1111 through the second threaded hole 1113 and the material rod 1200 is pressed. The material rod 1200 is fixed in the through hole 1112 on the annular sleeve 1111 using the push screw 1114, so that the connection between the material rod 1200 and the annular sleeve 1111 is more secure.

[0040] Furthermore, a plurality of second threaded holes 1113 are provided on the side of the annular sleeve 1111, and the second threads are arranged at intervals along the circumference of the annular sleeve 1111. By using a plurality of second threaded holes 1113, a top screw 1114 can be arranged in each second threaded hole 1113, so that the material rod 1200 is squeezed and fixed in the through hole 1112 by the plurality of top screws 1114, the force on the material rod 1200 in the through hole 1112 is more uniform, and the fixing part 1110 fixes the material rod 1200 more firmly.

[0041] Further, refer to Figure 1 The outer diameter of the end of the annular sleeve 1111 away from the first connecting portion 1120 decreases in sequence along the first direction, and the first direction is the direction from the first connecting portion 1120 to the fixing portion 1110, so that the peripheral surface of one end of the annular sleeve 1111 is in a slope shape. The floating zone furnace 1000 adopts the optical floating zone method to prepare single crystals. By setting the outer diameter of one end of the annular sleeve 1111 to mount the material rod 1200 to gradually decrease, the edge of the annular sleeve 1111 is thinned, and the end of the annular sleeve 1111 can reduce the blocking of light, and provide a suitable and stable temperature field for the growth of single crystals.

[0042] According to some embodiments of the utility model, the fixing part 1110 further includes a washer 1115, at least part of which is disposed in the through hole 1112, and the washer 1115 is sleeved on one end of the material rod 1200, and the top wire 1114 can abut against the washer 1115 along the radial direction of the fixing part 1110. When fixing material rods 1200 of different sizes, it is not convenient to replace the annular sleeves 1111 of different sizes, so the washer 1115 is wound on the material rod 1200, and the thickness of the washer 1115 in the radial direction of the material rod 1200 is changed by adjusting the length of the washer 1115 wound on the outer circumference of the material rod 1200 to adapt to the size of the annular sleeve 1111. Wrap the gasket sleeve 1115 of different lengths around the outer circumference of the material rod 1200, insert the gasket sleeve 1115 into the through hole 1112, and then fix the gasket sleeve 1115 in the through hole 1112 by the push screw 1114. Not only can the gasket sleeve 1115 accommodate material rods 1200 of various sizes, but also the push screw 1114 pressing on the gasket sleeve 1115 can avoid damage to the material rod 1200 caused by the push screw 1114 pressing on the material rod 1200.

[0043] For example, in the case where the material bar carrier is installed at the top and bottom of the floating zone furnace only through the first connection part 1120, a threaded connection can be provided between the first connection part 1120 and the first connection seat 1300 and between the first connection part 1120 and the second connection seat 1400. When the material bar carrier needs to be disassembled, the material bar carrier can be removed from the first connection seat 1300 or the second connection seat 1400 by screwing the first connection part 1120, and the material bar carrier 1120 can be installed on the first connection seat 1300 or the second connection seat 1400. The material bar carrier has a simple structure and is easy to process and manufacture.

[0044] Specifically, the first connection part 1120 is provided with a first threaded hole 1121, and at least part of the first connection seat 1300 can be threadedly connected in the first threaded hole 1121. The first connection seat 1300 can be provided with only one stud, and the stud is fixedly connected to the first connection part 1120. A threaded hole and an adapter 1310 can also be provided, and two studs are provided on the adapter 1310, one of which is threadedly connected to the threaded hole on the first connection seat 1300, and the other stud is connected to the first threaded hole 1121 on the first connection part 1120. The first connection part 1120 is connected to the bottom of the floating zone furnace 1000 by threading, so that the first connection part 1120 can be firmly connected and not easy to shake, and the first connection part 1120 can also be easily disassembled.

[0045] Exemplarily, with respect to the manner in which the first connecting part 1120 and the second connecting part 1130 are respectively provided in the material rod carrier and installed on the top and bottom of the floating zone furnace, the first connecting part 1120 is provided with a first threaded hole 1121, and at least a portion of the first connecting seat 1300 can be threadedly connected to the first threaded hole 1121; the second connecting part 1130 includes a hanging ring 1131, and the hanging ring 1131 can be hung on the second connecting seat 1400, and the material rod carrier 1100 also includes a transition part 1140, the first connecting part 1120 and the fixing part 1110 are both connected to the transition part 1140, and the hanging ring 1131 is rotatably connected to the transition part 1140, and can be flipped up and down relative to the transition part 1140. When the material rod carrier 1100 is hung on the second connection seat 1400 at the top of the floating zone furnace 1000 through the hanging ring 1131 on the second connection part 1130, the material rod 1200 above naturally droops under the action of gravity and aligns with the material rod 1200 below, so that the single crystal at the bottom of the floating zone furnace 1000 can grow better in the vertical direction. It can be understood that the second connection seat 1400 should have a hook for the hanging ring 1131 to hang, so that the second connection part 1130 is installed on the second connection seat 1400 in a hanging manner, and the installation of the material rod carrier is more convenient.

[0046] The hanging ring 1131 is rotatably connected to the transition part 1140, so as to avoid interference when the material bar carrier 1100 is installed on the first connecting seat 1300. Specifically, a through hole 1112 for loading the material bar 1200 is provided inside the fixing part 1110, the fixing part 1110 and the first connecting part 1120 are respectively located at two opposite ends of the material bar carrier 1100, and the transition part 1140 is located between the fixing part 1110 and the first connecting part 1120. When the material rod carrier is connected to the second connecting seat 1400, the hanging ring 1131 is hung on the second connecting seat 1400, one end of the hanging ring 1131 is connected to the transition part 1140, and extends upward from the side of the first connecting part 1120 to connect with the first connecting seat 1300, and a space for the first connecting part 1120 to move is formed inside the hanging ring 1131. The fixing part 1110 is located below the hanging ring 1131 and loads the material rod. The hanging ring 1131, the first connecting part 1120 and the fixing part 1110 avoid each other. When the material rod carrier is connected to the first connecting seat 1300, the first connecting part 1120 is connected to the first connecting seat 1300. Since the hanging ring 1131 can rotate relative to the transition part 1140, the hanging ring 1131 rests on the side of the first connecting part 1120 under the action of gravity. The fixing part 1110 is located above the transition part 1140 and loads the material rod. The hanging ring 1131, the first connecting part 1120 and the fixing part 1110 avoid each other.

[0047] Furthermore, a threading hole 1141 is provided on the transition part, and a part of the hanging ring 1131 is rotatably arranged in the threading hole 1141. The transition part 1140 has an inner cavity, and the two ends of the inner cavity of the transition part 1140 are respectively connected with the through hole 1112 and the first threaded hole 1121, the threading hole 1141 penetrates the inner cavity of the transition part 1140, and the hanging ring 1131 extends into the inner cavity of the transition part 1140. On the one hand, the connection position of the hanging ring 1131 and the transition part 1140 can avoid the fixing part 1110 and the first connecting part 1120, and on the other hand, the combination strength of the hanging ring 1131 and the transition part 1140 can be strengthened, and the probability of the hanging ring 1131 falling off from the transition part 1140 is reduced.

[0048] In one embodiment, referring to Figure 2 A limiting portion 1116 is provided in the first threaded hole 1121. After the first connecting seat 1300 is threadedly connected to the first threaded hole 1121, the end of the first connecting seat 1300 can abut against the limiting portion 1116 to limit the depth of the first connecting seat 1300 inserted into the first threaded hole 1121, so as to prevent the first connecting seat 1300 from being inserted too deeply into the first threaded hole 1121 and affecting the movement in the threading hole 1141 in the hanging ring 1131; and, after the first connecting seat 1300 abuts against the limiting portion 1116, it can indicate to the operator that the material rod carrier has been installed in place, so that the installation of the material rod carrier is more convenient.

[0049] Or, in another embodiment, referring to Figure 4 , the thread of the inner wall of the first threaded hole 1121 does not exceed the center of the threading hole 1141 in the first direction, and the first direction is the direction from the first connecting part 1120 to the fixing part 1110. Since the thread of the first threaded hole 1121 is terminated at the center of the threading hole 1141, when the material rod carrier and the first mounting seat 1300 are loaded and unloaded, the material rod carrier is screwed to the end of the first mounting seat 1300 and stops when the threaded stop position of the first threaded hole 1121 is reached. Therefore, the insertion depth of the first mounting seat 1300 in the first threaded hole 1121 will not exceed the center of the threading hole 1141, so that there is still space in the threading hole 1141 for the hanging ring 1131 to move, thereby avoiding the hanging ring 1131; at the same time, the threaded stop position of the first threaded hole 1121 can indicate to the operator that the material rod carrier has been installed in place, making the installation of the material rod carrier more convenient. The interior of the material rod carrier can be set to a through-hole shape to facilitate the processing of the material rod carrier.

[0050] According to the second embodiment of the present invention, the floating zone furnace 1000 includes the material bar carrier 1100 in the first embodiment, and also includes a first connection seat 1300 and a second connection seat 1400. The first connection seat 1300 and the second connection seat 1400 are arranged opposite to each other, and the second connection seat 1400 is located above the first connection seat 1300. The material bar carrier 1100 can be detachably connected to the first connection seat 1300 and the second connection seat 1400. When the single crystal generated in the floating zone furnace 1000 is unqualified, the material bar carrier installed on the first connection seat 1300 is removed and installed on the second connection seat 1400, and the material bar carrier installed on the second connection seat 1400 is removed and installed on the first connection seat 1300. By exchanging the positions of the two material bar carriers, the material bar position can be replaced without disassembling the material bar, and the operation is relatively convenient.

[0051] In a specific embodiment, the first connection seat 1300 is threadedly connected to the first connection portion 1120 of a material bar carrier 1100, and the second connection seat 1400 is hung with or threadedly connected to the second connection portion 1130 of another material bar carrier 1100. The second connection seat 1400 is disposed at a corresponding position above the first connection seat 1300.

[0052] Taking the example that the first connection part 1120 of the material rod carrier can be threadedly connected to the first connection seat 1300, and the second connection part 1110 can be hung on the second connection seat 1400, in the initial state, the first connection part 1120 of the lower material rod carrier is threadedly connected to the first connection seat 1300, and the second connection part 1130 of the upper material rod carrier is hung on the second connection seat 1400; when the position of the material rod needs to be replaced, the connection between the second connection part 1130 of the upper material rod carrier and the second connection seat 1400 is released. The second connecting seat 1400 is hung, the upper material bar carrier is removed, the first connecting part 1120 is screwed, and the lower material bar carrier is removed from the first connecting seat 1300; then the first connecting part 1120 in the original upper material bar carrier is screwed, the first connecting part 1120 is installed on the first connecting seat 1300, and the second connecting part 1130 of the original lower material bar carrier is hung on the second connecting seat 1400, so that the upper and lower material bar carriers are interchanged to complete the position replacement of the material bar.

[0053] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A material rod carrier, characterized in that: Used for loading material rods and installed on the first connecting seat at the bottom of the floating zone furnace, or the second connecting seat at the top of the floating zone furnace; The material bar carrier comprises: A fixing part, the fixing part is used to fix the material rod; The first connecting part is connected to the fixing part. When the material rod carrier is arranged at the bottom of the floating zone furnace, the first connecting part is detachably connected to the first connecting seat; when the material rod carrier is arranged at the top of the floating zone furnace, the first connecting part is detachably connected to the second connecting seat.

2. A material rod carrier, characterized in that: Used for loading material rods and installed on the first connecting seat at the bottom of the floating zone furnace, or the second connecting seat at the top of the floating zone furnace; The material bar carrier comprises: A fixing part, the fixing part is used to fix the material rod; A first connecting portion connected to the fixing portion, when the material rod carrier is arranged at the bottom of the floating zone furnace, the first connecting portion is detachably connected to the first connecting seat; The second connecting portion is connected to the fixing portion. When the material rod carrier is arranged on the top of the floating zone furnace, the second connecting portion is detachably connected to the second connecting seat.

3. The material rod carrier according to claim 1 or 2, characterized in that: The fixing part comprises an annular sleeve, the annular sleeve is provided with a through hole, and the through hole is used to accommodate the material rod at one end away from the first connecting part; Alternatively, the fixing portion is provided with a plurality of clamping bodies along the circumferential direction, and the plurality of clamping bodies can approach each other and lock with each other along the radial direction of the fixing portion to clamp the material rod, and the plurality of clamping bodies can be unlocked and move away from each other along the radial direction of the fixing portion to release the material rod.

4. The material rod carrier according to claim 1 or 2, characterized in that: The fixing part includes an annular sleeve, which is provided with a through hole for the material rod to pass through. The fixing part also includes a top screw, and the annular sleeve is provided with at least one second threaded hole passing through in the radial direction. The second threaded hole is connected to the through hole, and the top screw is screwed into the second threaded hole and is used to press the material rod in the radial direction.

5. The material rod carrier according to claim 4, characterized in that: The outer diameter of the annular sleeve at one end away from the first connecting portion decreases sequentially along a first direction, where the first direction is a direction from the first connecting portion to the fixing portion.

6. The material rod carrier according to claim 4, characterized in that: The fixing portion further comprises a washer sleeve, at least a portion of which is accommodated in the through hole, the washer sleeve is used to be sleeved on one end of the material rod, and the top screw can abut against the washer sleeve along the radial direction of the fixing portion.

7. The material rod carrier according to claim 1 or 2, characterized in that: The first connecting portion is provided with a first threaded hole, and at least a portion of the first connecting seat can be threadedly connected in the first threaded hole.

8. The material rod carrier according to claim 2, characterized in that: The first connecting part is provided with a first threaded hole, and at least a part of the first connecting seat can be threadedly connected to the first threaded hole; the second connecting part includes a hanging ring, and the hanging ring can be hung on the second connecting seat. The first connecting part is also provided with a threading hole penetrating in the radial direction, and one end of the hanging ring is rotatably connected to the threading hole. The internal thread of the first threaded hole does not exceed the center of the threading hole in the first direction. The first direction is the direction from the first connecting part to the fixing part.

9. The material rod carrier according to claim 2, characterized in that: The first connecting part is provided with a first threaded hole, and at least a part of the first connecting seat can be threadedly connected to the first threaded hole; the second connecting part includes a hanging ring, and the hanging ring can be hung on the second connecting seat, and the material rod carrier also includes a transition part, the first connecting part and the fixed part are both connected to the transition part, the hanging ring is rotatably connected to the transition part, and can be flipped up and down relative to the transition part.

10. The material rod carrier according to claim 9, characterized in that: A through hole for loading material rods is provided inside the fixing portion, the fixing portion and the first connecting portion are respectively located at two opposite ends of the material rod carrier, and the transition portion is located between the fixing portion and the first connecting portion.

11. A floating zone furnace, characterized in that: include: The material rod carrier according to any one of claims 2 to 10; a first connecting seat, the first connecting portion being detachably connected to the first connecting seat; The second connection seat is arranged opposite to the first connection seat and is located above the first connection seat. The second connection part is detachably connected to the second connection part.

12. The floating zone furnace according to claim 11, characterized in that: The first connection portion is screwed to the first connection seat, and the second connection portion is screwed to the second connection seat; Alternatively, the first connection portion is screwed to the first connection seat, and the second connection portion is hung on the second connection seat.

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