Adsorption type vacuum filter

Abstract

The utility model relates to the technical field of PECVD (Plasma Enhanced Chemical Vapor Deposition) process systems, in particular to an adsorption type vacuum filter which comprises a tank body, the top of the tank body is fixedly connected with a connecting flange pipe, the surface of the connecting flange pipe is in contact with a top cover plate, a bolt is arranged at the top of the top cover plate in a penetrating manner, and a connecting cover plate is arranged at the bottom of the tank body. And the bottom of the connecting cover plate is communicated with an exhaust port. According to the adsorption type vacuum filter disclosed by the utility model, the top cover plate, the bolts, the prismatic net cylinder and the tank body are matched, so that the adsorption type vacuum filter can be conveniently and simply assembled, the practicability of the filter is improved, and the top cover plate, the bolts, the connecting cover plate, the fixed connecting bracket, the sealing ring, the base, the upper net cover and the nut are matched; the upper net cover and the base can be driven by the nut to get close to each other to disassemble and assemble the prismatic net cylinder, the upper net cover can be stably positioned through the fixed connecting support, and the efficiency of subsequent cleaning of the filtering structure is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD process system, in particular to an adsorption type vacuum filter. Background Art

[0002] This device is actually used in vacuum, semiconductor, chemical, metallurgy, solar photovoltaic and other industries. It is assembled and connected to the front end of the vacuum pump air inlet to protect the vacuum pump.

[0003] After searching, the patent number CN202921043U, the name of the utility model of the pressure regulating vacuum adsorption filter, includes a sealed filter box (1). Through research and analysis, it is found that although the filter device has the advantages of greatly improving the filtering speed and being able to conveniently adjust the pressure function in the filter box according to needs, it still has the following disadvantages to a certain extent;

[0004] For example, the structure of the filter device is mostly fixed, and it does not have the function of disassembling and replacing the filter structure, so it is inconvenient to clean it. If it is not cleaned in time, it is easy to reduce the utilization rate of the filter structure. The impurities in the gas are easy to clog and cannot be used automatically, making it impossible to quickly extract and remove the dirty impurities, which limits the installation and use of the filter device. In order to solve the above technical problems, it is necessary for us to design an adsorption vacuum filter to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide an adsorption vacuum filter, which has a self-made wire mesh wrapped filter element structure and the function of disassembling and replacing the filter structure, thereby improving the advantages of the cleaning and filtering effect of the adsorption vacuum filter, solving the problems of not being able to quickly extract dirty impurities, easily reducing the utilization rate if not cleaned and replaced in time, and impurities in the gas easily clogging and unable to be automatically used.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an adsorption vacuum filter, comprising a tank body, a connecting pipe is fixedly connected to the top of the tank body, the surface of the connecting pipe contacts a top cover plate, bolts are penetrated through the top of the top cover plate, a connecting cover plate is provided at the bottom of the tank body, the bottom of the connecting cover plate is connected to an exhaust port, a filter element mechanism is provided in the inner cavity of the tank body, a straight pipe disk is provided at the bottom of the exhaust port, and an inner connecting pipe is provided on one side of the tank body.

[0007] Preferably, there are several bolts, and the bolts penetrate the top cover plate and are threadedly connected to the connecting flange pipe, and the bolts are arranged at equal distances.

[0008] Preferably, the filter element mechanism includes a fixed connecting bracket, which is arranged in the inner cavity of the connecting cover plate, the top of the connecting cover plate is in contact with a sealing ring, the top of the sealing ring is provided with a base, the surface of the base is provided with a prismatic mesh tube, the top of the prismatic mesh tube is provided with a mesh cover, and the top of the fixed connecting bracket passes through the sealing ring, the base, the prismatic mesh tube and the mesh cover in sequence and extends to the outside of the mesh cover.

[0009] Preferably, the fixed connection bracket is movably connected to the inner wall of the net cover, and the surface of the net cover is movably connected to the inner wall of the prismatic net cylinder.

[0010] Preferably, a nut is provided on the top threaded sleeve of the fixed connection bracket, and one side of the nut is in contact with the surface of the mesh cover.

[0011] Preferably, a handle is welded on the top of the top cover plate, and the base and the mesh upper cover are adapted to the prismatic mesh cylinder.

[0012] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0013] 1. The utility model can facilitate the simple assembly of the adsorption vacuum filter through the cooperation of the top cover plate, bolts, prismatic mesh tube and tank body, thereby improving the practicability of the filter.

[0014] 2. The utility model, through the cooperation of the top cover plate, bolts, connecting cover plate, fixed connecting bracket, sealing ring, base, net cover and nuts, can drive the net cover and the base to approach each other through the nuts to disassemble and assemble the prismatic net cylinder, and the net cover can be stably positioned through the fixed connecting bracket, thereby improving the efficiency of subsequent cleaning of the filtering structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a cross-sectional schematic diagram of the utility model;

[0016] Figure 2 It is a three-dimensional schematic diagram of the prismatic net tube of the utility model.

[0017] In the figure: 1. nut; 2. bolt; 3. top cover plate; 4. connecting pipe; 5. sealing ring; 6. prismatic mesh tube; 7. base; 8. tank body; 9. straight pipe disc; 10. exhaust port; 11. fixed connecting bracket; 12. connecting cover plate; 13. inner connecting pipe; 14. mesh cover; 15. filter element mechanism. DETAILED DESCRIPTION

[0018] See also Figure 1-Figure 2The adsorption vacuum filter comprises a tank body 8, the top of which is fixedly connected with a connecting pipe 4, the surface of which contacts with a top cover plate 3, the top of which is penetrated with a bolt 2, the bottom of which is provided with a connecting cover plate 12, the bottom of which is connected with an exhaust port 10, the inner cavity of which is provided with a filter element mechanism 15, the bottom of which is provided with a straight pipe disk 9, and one side of the tank body 8 is provided with an inner connecting pipe 13.

[0019] See also Figure 1 There are several bolts 2, which penetrate the top cover plate 3 and are threadedly connected to the connecting flange pipe. The bolts 2 are arranged at equal distances. By setting the bolts 2, it is convenient to stably position and connect the top cover plate 3 and the connecting flange pipe 4 to avoid gaps and displacements between them.

[0020] See also Figure 1 and Figure 2 The filter element mechanism 15 includes a fixed connecting bracket 11, which is arranged in the inner cavity of the connecting cover plate 12. The top of the connecting cover plate 12 contacts with a sealing ring 5, and the top of the sealing ring 5 is provided with a base 7. The surface of the base 7 is sleeved with a prismatic mesh tube 6, and the top of the prismatic mesh tube 6 is provided with a mesh cover 14. The top of the fixed connecting bracket 11 passes through the sealing ring 5, the base 7, the prismatic mesh tube 6 and the mesh cover 14 in sequence and extends to the outside of the mesh cover 14. By setting the fixed connecting bracket 11, the mesh cover 14 can be positioned, and it can be assembled with the mesh cover 14 to balance and support the mesh cover 14.

[0021] See also Figure 1 The fixed connecting bracket 11 is movably connected to the inner wall of the net cover 14, and the surface of the net cover 14 is movably connected to the inner wall of the prismatic net tube 6. By setting the net cover 14, the top of the prismatic net tube 6 can be easily protected and one side of it can be sealed for use.

[0022] See also Figure 1 A nut 1 is provided on the top threaded sleeve of the fixed connection bracket 11, and one side of the nut 1 contacts the surface of the net cover 14. By setting the nut 1, the position of the net cover 14 can be tightly contacted to prevent the net cover 14 from being displaced.

[0023] See also Figure 1 A handle is welded on the top of the top cover plate 3, and the base 7 and the mesh cover 14 are adapted to the prismatic net tube 6. By providing the base 7 and the mesh cover 14, it is convenient to vertically support and guide the prismatic net tube 6 to prevent the prismatic net tube 6 from getting out of track during vertical assembly. By providing the handle, the contact area between the user and the top cover plate 3 is increased, making it convenient to take the top cover plate 3 and move it.

[0024] When in use, impurities such as gas and dust particles enter the device from the inner connecting pipe 13 and are discharged from the straight pipe usage disk 9 to the external vacuum pump. Impurities such as gas and dust particles pass through the micropores on the surface of the prismatic mesh tube 6, and the homemade wire mesh winding filter element structure is used to filter out fine impurities with high precision, which will block, adsorb and filter the impurities and powder particles inside, allowing the clean flow to flow out through the device, so as to achieve the cleanliness and purity of the logistics used, reduce the entry of trimethylolbenzene, aluminum oxide, silicon oxide, silicon dioxide, silicon nitride, silicon oxynitride and other powder particles into the vacuum pump, and rotate the bolt 2 is threadedly connected with the connecting pipe 4, so that one end of the bolt 2 moves away from the surface of the top cover plate 3, the top cover plate 3 and the connecting pipe 4 are separated to open the top of the tank body 8, and the user rotates the nut 1 to thread the nut 1 and separate it from the fixed connecting bracket 11, and moves the net cover 14 vertically to separate it from the surface of the fixed connecting bracket 11, thereby loosening the prismatic mesh tube 6 and the base 7, making it easy to take out the prismatic mesh tube 6 to deal with the dust inside the tank body 8 and replace the internal filter element structure, and at the same time making it easy to make a homemade wire mesh winding filter element structure.

[0025] In summary: the adsorption vacuum filter, through the coordination of the bolts 2, the top cover plate 3, the connecting pipe 4, the tank body 8, the straight pipe disk 9, the exhaust port 10, the connecting cover plate 12, the inner connecting pipe 13 and the filter element mechanism 15, solves the problem that dirty impurities cannot be quickly extracted, the utilization rate is easily reduced if not cleaned and replaced in time, and the impurities in the gas are easily blocked and cannot be automatically used.

Claims

1. An adsorption vacuum filter, comprising a tank (8), characterized in that: The top of the tank body (8) is fixedly connected with a connecting pipe (4), the surface of the connecting pipe (4) contacts a top cover plate (3), the top of the top cover plate (3) is penetrated by bolts (2), the bottom of the tank body (8) is provided with a connecting cover plate (12), the bottom of the connecting cover plate (12) is connected to an exhaust port (10), the inner cavity of the tank body (8) is provided with a filter element mechanism (15), the bottom of the exhaust port (10) is provided with a straight pipe disk (9), and one side of the tank body (8) is provided with an inner connecting pipe (13).

2. The adsorption vacuum filter according to claim 1, characterized in that: The number of the bolts (2) is several, and the bolts (2) penetrate the top cover plate (3) and are threadedly connected to the connecting flange pipe (), and the bolts (2) are arranged at equal distances.

3. The adsorption vacuum filter according to claim 1, characterized in that: The filter element mechanism (15) comprises a fixed connection bracket (11), the fixed connection bracket (11) is arranged in the inner cavity of the connection cover plate (12), the top of the connection cover plate (12) contacts with a sealing ring (5), the top of the sealing ring (5) is provided with a base (7), the surface of the base (7) is sleeved with a prismatic mesh cylinder (6), the top of the prismatic mesh cylinder (6) is provided with a mesh cover (14), and the top of the fixed connection bracket (11) passes through the sealing ring (5), the base (7), the prismatic mesh cylinder (6) and the mesh cover (14) in sequence and extends to the outside of the mesh cover (14).

4. The adsorption vacuum filter according to claim 3, characterized in that: The fixed connection bracket (11) is movably connected to the inner wall of the net cover (14), and the surface of the net cover (14) is movably connected to the inner wall of the prismatic net cylinder (6).

5. The adsorption vacuum filter according to claim 3, characterized in that: A nut (1) is threadedly sleeved on the top of the fixed connection bracket (11), and one side of the nut (1) is in contact with the surface of the mesh cover (14).

6. The adsorption vacuum filter according to claim 3, characterized in that: A handle is welded to the top of the top cover plate (3), and the base (7) and the net cover (14) are compatible with the prismatic net cylinder (6).

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