Piezoelectric deformable mirror with adjustable bottom

Abstract

A piezoelectric deformable mirror with an adjustable bottom comprises a deformable mirror surface, a connecting column, a piezoelectric actuator, a base and adjusting pieces, a blind hole array with internal threads is arranged in the base, hole bottom diaphragms are formed at the bottoms of the blind holes, each blind hole in the blind hole array is screwed with one adjusting piece, the top of each adjusting piece is in contact with the corresponding hole bottom diaphragm, and the bottom of each adjusting piece is in contact with the corresponding deformable mirror surface. The bottoms of the piezoelectric actuators are connected with the hole bottom membranes, the tops of the piezoelectric actuators are connected with the deformable mirror face through the connecting columns, and the connecting columns, the actuators and the blind hole arrays are in one-to-one correspondence and are coaxially arranged. According to the utility model, the deformation of the mirror surface can be adjusted by utilizing the adjustment of the adjusting piece for compensating the initial static deformation of the deformable mirror, so that the deformable mirror has good initial flatness.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical devices, and in particular relates to a piezoelectric deformable mirror with an adjustable bottom. Background Art

[0002] The deformable mirror is one of the core components of the adaptive optical system. As a wavefront corrector in the adaptive optical system, the deformable mirror corrects the wavefront distortion in the optical system by changing the shape of its own mirror surface in real time, and corrects the phase difference in real time to obtain a high-quality beam, so that the system reaches an ideal state. The piezoelectric deformable mirror uses a piezoelectric actuator to drive the deformation of the mirror surface, and has a large stroke, high frequency response, and stable performance. However, the deformable mirror surface of the traditional deformable mirror is relatively thin, and is affected by stress and its own flatness during production. It is very difficult to achieve an initial flatness of the mirror surface that is less than one wavelength. Utility Model Content

[0003] The utility model overcomes the existing technology and provides a piezoelectric deformable mirror with an adjustable bottom, which adjusts the deformation of the mirror surface through mechanical structure adjustment and is used to compensate for the initial static deformation of the deformable mirror.

[0004] A bottom-adjustable piezoelectric deformable mirror comprises a deformable mirror surface, a connecting column, a piezoelectric actuator, a base and an adjusting piece. A blind hole array with internal threads is provided in the base, and a hole bottom diaphragm is formed at the bottom of the blind hole. An adjusting piece is screwed into each blind hole in the blind hole array, and the top of the adjusting piece contacts the hole bottom diaphragm. The bottom of the piezoelectric actuator is connected to the hole bottom diaphragm, and the top of the piezoelectric actuator is connected to the deformable mirror surface through the connecting column. The multiple connecting columns, multiple actuators and blind hole array correspond to each other one by one and are coaxially arranged.

[0005] Specifically, the adjusting member includes a top and a body; the top and the body are connected as a whole by a coaxial axis, the bottom of the body has a knob, the outer peripheral surface of the body is processed with an external thread, the external thread is connected to the internal thread of the blind hole, and the top is in contact with the diaphragm at the bottom of the hole.

[0006] Compared with the prior art, the utility model has the following beneficial effects:

[0007] The present application uses the adjustment of the adjustment member to adjust the deformation of the mirror surface, which is used to compensate for the initial static deformation of the deformable mirror, so that the deformable mirror has a good initial flatness. The actuator can generate a small axial displacement by applying voltage, and push the mirror surface to deform through the connecting column. The mirror deformation generated by the piezoelectric actuator is used for optical aberration correction.

[0008] The technical solution of the utility model is further described below in conjunction with the accompanying drawings and embodiments: BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1This is a schematic structural diagram of a bottom-adjustable piezoelectric deformable mirror of the present application;

[0010] Figure 2 This is a schematic diagram of the structure of the base of this application;

[0011] Figure 3 This is a schematic diagram of the structure of the adjustment member for this application;

[0012] Figure 4 A schematic diagram of the initial mirror deformation of the piezoelectric deformable mirror of the present application;

[0013] Figure 5 The schematic diagram of the piezoelectric deformable mirror of this application realizing initial mirror deformation compensation through bottom adjustment;

[0014] Figure 6 This is a schematic diagram of the structure of the piezoelectric deformable mirror after bottom adjustment in this application;

[0015] Figure 7 This is a schematic diagram of the arrangement of the actuator of this application.

[0016] The reference numerals are as follows:

[0017] 1. Deformable mirror; 2. Connecting column;

[0018] 3. Piezoelectric actuator;

[0019] 4. Base 4, 41, blind hole, 42, internal thread;

[0020] 5. adjusting part, 51. top, 52. main body, 53. knob. DETAILED DESCRIPTION

[0021] The following is a detailed description of the embodiments of the technical solution of the utility model in conjunction with the accompanying drawings. Unless otherwise specified, the technical terms or scientific terms used in this application should be the common meanings understood by those skilled in the art to which the utility model belongs.

[0022] Figure 1 A bottom-adjustable piezoelectric deformable mirror is shown, which includes a deformable mirror surface 1, a connecting column 2, a piezoelectric actuator 3, a base 4 and an adjusting member 5. The base 4 is provided with a blind hole array with internal threads, and the bottom of the blind hole forms a hole bottom diaphragm. Each blind hole in the blind hole array is screwed with an adjusting member 5, and the top of the adjusting member 5 is in contact with the hole bottom diaphragm. The bottom of the piezoelectric actuator 3 is connected to the hole bottom diaphragm. The top of the piezoelectric actuator 3 is connected to the deformable mirror surface 1 through the connecting column 2. The multiple connecting columns 2, the multiple actuators 3, and the blind hole array correspond to each other and are coaxially arranged. The outer surface of the deformable mirror surface 1 is coated with a reflective film.

[0023] By rotating the adjusting member 5 to make a slight movement in the blind hole 41, the axial position of the diaphragm at the bottom of the hole is changed to cause the corresponding piezoelectric actuator 3 to be axially displaced, thereby causing the deformable mirror 1 connected to the piezoelectric actuator 3 to produce a slight deformation; the adjustment of the adjusting member 5 can adjust the deformation of the deformable mirror 1, which is used to compensate for the initial static deformation of the deformable mirror, so that the deformable mirror has a good initial flatness.

[0024] In some embodiments, the piezoelectric actuator 3 is a laminated structure. The actuator 3 can generate a small axial displacement when a voltage is applied, and push the deformable mirror 1 to deform through the connecting column 2; the mirror deformation generated by the piezoelectric actuator 3 is used for optical aberration correction.

[0025] In some embodiments, the piezoelectric actuator 3 is a ceramic tube structure. The actuator 3 can generate a small axial displacement when a voltage is applied, and push the deformable mirror 1 to deform through the connecting column 2; the mirror deformation generated by the piezoelectric actuator 3 is used for optical aberration correction.

[0026] In some embodiments, Figure 2 The schematic diagram of the structure of the base 4 is shown. The back of the base 4 is provided with a blind hole 41 with a thread 42. The piezoelectric actuator 3 corresponds to the threaded blind hole 41 on the base 4 in a one-to-one manner, and is a concentric structure.

[0027] Figure 3 The schematic diagram of the structure of the adjusting member 5 is shown. The adjusting member 5 comprises a top portion 51 and a body 52; the top portion 51 and the body 52 are connected as a whole by a coaxial axis, the bottom of the body 52 has a knob 53, the outer peripheral surface of the body 52 is processed with an external thread, the external thread is connected to the internal thread of the blind hole, and the top portion 51 is in contact with the diaphragm at the bottom of the hole.

[0028] The operating knob 53 rotates the body 52 to make it do a slight linear motion in the blind hole 41, thereby changing the axial position of the bottom diaphragm of the hole to cause the corresponding piezoelectric actuator 3 to axially displace, thereby causing a slight deformation of the mirror 1 connected to the piezoelectric actuator 3 and the connecting column 2.

[0029] It is understandable that the adjusting member 5 is a modified bolt. In order to ensure the control accuracy, the end of the top 41 that contacts the hole bottom diaphragm is a hemispherical head.

[0030] Figure 4 A schematic diagram of the initial deformation of the piezoelectric deformable mirror is shown. Since the deformable mirror surface 1 of the deformable mirror is relatively thin, it is affected by stress and its own flatness during manufacturing, causing the mirror surface 1 to deform, thereby reducing the performance of the deformable mirror.

[0031] Figure 5The schematic diagram of the piezoelectric deformable mirror realizing initial mirror deformation compensation through bottom adjustment is shown. The deformation of the mirror surface 2 can be adjusted by adjusting the adjusting member 5, so that the mirror surface produces a curved surface opposite to the initial mirror deformation, thereby compensating the initial static deformation of the deformable mirror and making the deformable mirror have good initial flatness.

[0032] In this embodiment, the main body 52 of the adjusting member 5 adopts an external thread with a lead of 0.25 mm, so the adjusting member 5 can move linearly by 0.35 microns when it rotates 0.5 degrees. Therefore, the deformation of the deformable mirror 1 can be adjusted by the adjusting member 5, but the deformation of the mirror is within 0.35 microns.

[0033] Figure 6 Schematic diagram of the structure of the piezoelectric deformable mirror after adjustment through the bottom.

[0034] Figure 7 Schematic diagram of arrangement of piezoelectric actuators 3, which are arranged in a triangular arrangement, a rectangular arrangement or a ring arrangement.

[0035] The present invention has been disclosed as above with preferred implementation cases, but it is not used to limit the present invention. Any technician familiar with the profession can make slight changes or modifications to equivalent implementation cases with equivalent changes by using the above-disclosed structures and technical contents without departing from the scope of the technical solution of the present invention, which still fall within the scope of the technical solution of the present invention.

Claims

1. A piezoelectric deformable mirror with an adjustable bottom, characterized in that: The invention comprises a deformable mirror (1), a connecting column (2), a piezoelectric actuator (3), a base (4) and an adjusting member (5); a blind hole array with internal threads is provided in the base (4); a hole bottom diaphragm is formed at the bottom of the blind hole; an adjusting member (5) is screwed onto each blind hole in the blind hole array; the top of the adjusting member (5) contacts the hole bottom diaphragm; the bottom of the piezoelectric actuator (3) is connected to the hole bottom diaphragm; the top of the piezoelectric actuator (3) is connected to the deformable mirror (1) via the connecting column (2); the multiple connecting columns (2), the multiple actuators (3) and the blind hole array correspond to each other and are coaxially arranged.

2. The bottom-adjustable piezoelectric deformable mirror according to claim 1, characterized in that: The adjusting member (5) comprises a top portion (51) and a body (52); the top portion (51) and the body (52) are coaxially connected as a whole, the bottom of the body (52) is provided with a knob (53), the outer peripheral surface of the body (52) is processed with an external thread, the external thread is connected to the internal thread of the blind hole, and the top portion (51) is in contact with the diaphragm at the bottom of the hole.

3. The bottom-adjustable piezoelectric deformable mirror according to claim 1, characterized in that: The piezoelectric actuator (3) is a laminated structure or a ceramic tube structure.

4. The bottom-adjustable piezoelectric deformable mirror according to claim 1, characterized in that: The piezoelectric actuators (3) are arranged in a triangular, rectangular or annular array.

5. The bottom-adjustable piezoelectric deformable mirror according to claim 1, characterized in that: The outer surface of the deformable mirror (1) is plated with a reflective film.

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