Power supply structure for semiconductor equipment

Abstract

The utility model provides a power supply structure used for semiconductor equipment, the semiconductor equipment comprises machine tables, each machine table comprises a plurality of electric devices, and the power supply structure comprises a factory service end power distribution unit; the machine table circuit breaker is in power distribution connection with the factory service end and is used for realizing power supply control on the corresponding machine table; the current compensation device is respectively connected with the machine circuit breaker and the plurality of electric devices and comprises a matrix type filter circuit and a controller, the controller is respectively connected with the machine circuit breaker, the filter circuit and the plurality of electric devices of the machine and is used for adjusting and controlling the filter circuit, the filter circuit is also connected with the machine, and the controller is connected with the machine circuit breaker and the plurality of electric devices of the machine. The method is used for eliminating clutter interference generated by an electric device. According to the power supply structure provided by the utility model, the current compensation device is arranged between the machine circuit breaker and the electric device and is used for eliminating clutter interference generated by the electric device, the invalid energy consumption of clutter use is reduced, and the electric energy is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a power supply structure for semiconductor equipment. Background Art

[0002] In the semiconductor industry, the factory service end is connected to the power supply end and each machine respectively, and is responsible for distributing and converting the power supply end power according to the needs. After the power is distributed by the factory service end, it is directly transmitted to each machine through the branch cable. The machine includes a distribution device and multiple power-consuming devices. After the branch cable transmits the distributed power to the corresponding machine, it distributes the power through the distribution device, and then directly supplies power to multiple power-consuming devices through the power line.

[0003] In the prior art, the power supplied by the factory to the machine is directly transmitted to the power supply structure of each power-consuming device through the power distribution device, but the following problems still exist:

[0004] The electrical devices of semiconductor equipment machines include some frequency conversion devices and thyristor devices. In the process of using electricity, in addition to doing useful work and generating heat, they also generate noise of varying degrees and frequencies. The noise will not only generate ineffective energy consumption, resulting in power waste and increased specifications of circuit breakers and cables, but will also reversely pollute other electrical devices of the machine along the power transmission line, and even transmit the pollution to other machines along the branch cable between the factory end and the machine, radiating the entire power supply network, and ultimately causing all equipment in the power supply network to be affected by power supply interference.

[0005] Therefore, it is necessary to provide a power supply structure that can eliminate the clutter interference generated by electrical devices and has low energy consumption. Utility Model Content

[0006] The purpose of the utility model is to provide a power supply structure for semiconductor equipment, in which a current compensation device is arranged between a machine circuit breaker and an electrical device to eliminate the clutter interference generated by the electrical device, reduce the ineffective energy consumption of clutter use, and achieve energy saving.

[0007] In order to achieve the above objectives, the utility model is implemented through the following technical solutions:

[0008] A power supply structure for a semiconductor device is provided, wherein the semiconductor device comprises at least one machine platform, each of which comprises a plurality of electrical devices, and the power supply structure comprises:

[0009] Factory-side power distribution, which is connected to the power supply end and is used to distribute power to all machines of semiconductor equipment;

[0010] At least one machine circuit breaker, the machine circuit breaker is connected to the power distribution of the plant service end, and is used to realize power supply control to the corresponding machine, and the machine includes a plurality of electrical devices;

[0011] At least one current compensation device, the current compensation device is respectively connected to the machine circuit breaker and the plurality of electrical devices, and is used to eliminate clutter interference generated by the electrical devices;

[0012] The current compensation device includes a matrix-type filter circuit and a controller. The controller is respectively connected to the machine circuit breaker, the filter circuit and multiple electrical devices of the machine, and is used to adjust and control the filter circuit according to the noise generated by the electrical devices. The filter circuit is also connected to the machine to eliminate the noise interference generated by the electrical devices.

[0013] Furthermore, the current compensation device includes a matrix-type filter circuit and a controller, wherein the controller is respectively connected to the machine circuit breaker, the filter circuit and a plurality of electrical components of the machine, and is used to adjust and control the filter circuit according to the noise generated by the electrical components. The filter circuit is also connected to the machine to eliminate the noise interference generated by the electrical components.

[0014] Furthermore, the filtering circuit is a 3·M·N three-dimensional matrix, wherein the value of M is determined according to the maximum current of the clutter, the value of N is determined according to the number of types of the frequencies of the clutter, and both M and N are positive integers.

[0015] Further, the value of M is [the maximum current size of the noise / 50A]+1, and the value of N is the number of types of frequencies of the noise.

[0016] Furthermore, the filtering circuit includes 3×M×N compensation units connected to each other, and the compensation units are set as elements in the matrix.

[0017] Furthermore, the compensation units are divided into three groups according to the three-dimensional orientation of the three-dimensional matrix, each group of compensation units is divided into N columns, and each column includes M compensation units, wherein in each group of compensation units, the frequencies of the clutter that can pass through the compensation units in the same column are the same, and the upper limit of the current of the clutter that can pass through each compensation unit in the same column is the same, which is 50A.

[0018] Furthermore, each compensation unit includes a switch, an induction coil, a current fuse, a capacitor and a reactor which are connected in series in sequence.

[0019] Furthermore, the compensation unit also includes a voltage holding fuse, which is arranged between the induction coil and the current fuse and is grounded to keep the voltage of the circuit between the induction coil and the current fuse constant.

[0020] Furthermore, the compensation unit also includes an inductor, which is connected in parallel with the current fuse and the capacitor and is used to filter the clutter current so that the clutter current with a frequency equal to the frequency of the column where the compensation unit is located and a current upper limit of 50A passes through the current fuse and the capacitor.

[0021] Furthermore, the noise generated by the electrical components is odd harmonics.

[0022] Furthermore, the frequency of the odd harmonics is 150 Hz, 250 Hz, 350 Hz, 450 Hz, ..., [(2n+1)×50] Hz, where n is a positive integer.

[0023] Furthermore, the number of the machine circuit breakers is the same as the number of the machines.

[0024] Furthermore, the number of the current compensation devices is the same as the number of the machine circuit breakers.

[0025] Compared with the prior art, the utility model has the following advantages:

[0026] The power supply structure provided by the utility model is provided with a current compensation device between the machine circuit breaker and the electrical components, which can eliminate the clutter interference generated by the electrical components, prevent the interference from reversely polluting other machines in the circuit, and reduce the ineffective energy consumption of clutter, thereby saving electricity. At the same time, it realizes the reduction of the specifications of the machine circuit breaker and cables, reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solution of the utility model, the following is a brief introduction to the drawings required for the description. Obviously, the drawings described below are an embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work:

[0028] Figure 1 A schematic diagram of a power supply structure for semiconductor equipment provided by the utility model;

[0029] Figure 2 A schematic diagram of the structure of a current compensation device provided in one embodiment of the utility model;

[0030] Figure 3 A schematic structural diagram of a column of compensation units provided in one embodiment of the utility model. DETAILED DESCRIPTION

[0031] The scheme proposed by the utility model is further described in detail below in combination with the accompanying drawings and specific implementation methods. According to the following description, the advantages and features of the utility model will be clearer. It should be noted that the accompanying drawings adopt a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the implementation method of the utility model. In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structure, proportion, size, etc. illustrated by the accompanying drawings of this specification are only used to match the content disclosed in the specification, so that people familiar with this technology can understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so it has no technical substantive significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effect that the utility model can produce and the purpose that can be achieved, should still fall within the scope of the technical content disclosed by the utility model.

[0032] Figure 1 A schematic diagram of a power supply structure 10 for semiconductor equipment provided by the utility model is shown. Optionally, the semiconductor equipment is at least one of an epitaxial device and a rapid thermal processing device. The semiconductor equipment includes at least one machine, and optionally, the machine can be one or more of a CVD chamber, an etching chamber, a pre-cleaning chamber, a transfer chamber, etc. Each of the machines includes a plurality of electrical devices, and optionally, the electrical devices include frequency conversion devices, thyristor devices, low-voltage control devices, flow regulating devices, etc.

[0033] like Figure 1As shown, the utility model provides a power supply structure 10 for semiconductor equipment. The power supply structure 10 includes a plant-side power distribution 101, at least one machine circuit breaker 103 and a current compensation device 200. The plant-side power distribution 101 is connected to the power supply end, and is used to distribute power to all machines 105 of the semiconductor equipment; the at least one machine circuit breaker 103 is respectively connected to the plant-side power distribution 101 and the corresponding machine 105, and is used to realize the power supply control of the corresponding machine 105, and the current compensation device 200 is arranged between the machine circuit breaker 103 and the multiple corresponding electrical devices 105, and is used to eliminate the clutter interference generated by the electrical devices 105. Optionally, the clutter is an odd harmonic generated by a frequency conversion device or a thyristor device, and the frequency of the odd harmonic is 150Hz, 250Hz, 350Hz, 450Hz, ..., [(2n+1)×50]Hz, where n is a positive integer. Optionally, the number of the machine circuit breakers 103 is the same as the number of the machines 105 , and the number of the current compensation devices 200 is the same as the number of the machine circuit breakers 103 , that is, each machine 105 corresponds to one machine circuit breaker 103 and one current compensation device 200 .

[0034] Figure 2 FIG. 2 shows a schematic diagram of the structure of a current compensation device 200 provided in an embodiment of the utility model. Figure 2 As shown, the current compensation device 200 includes a matrix-type filter circuit 300 and a controller 202. The controller 202 is respectively connected to the machine circuit breaker 103, the filter circuit 300 and a plurality of electrical devices 105 of the corresponding machine, and is used to adjust and control the filter circuit 300 according to the noise generated by the electrical devices 105. The filter circuit 300 is also connected to the machine to eliminate the noise interference generated by the electrical devices 105.

[0035] The power supply structure 10 is provided with a current compensation device 200 between the machine circuit breaker 103 and the electrical device 105, which can eliminate the clutter interference generated by the electrical device 105 and prevent the interference from reversely polluting other machines in the circuit.

[0036] Optionally, the filtering circuit 300 is a three-dimensional matrix of 3·M·N, wherein the value of M is determined according to the maximum current size of the clutter, the value of N is determined according to the number of types of the frequency of the clutter, and both M and N are positive integers. Specifically, the value of M is [the maximum current size of the clutter / 50A]+1, [] is a verification symbol, that is, the value of the maximum current size of the clutter / 50A is rounded and then added to 1 to finally obtain the value of M, and the value of N is the number of types of the frequency of the clutter.

[0037] Further optionally, the filter circuit 300 includes 3×M×N compensation units 400 connected to each other, and the compensation units 400 are set as each element in the matrix. Figure 2 As shown, the compensation units are divided into three groups according to the three-dimensional orientation of the three-dimensional matrix, namely, the first group of compensation units 301, the second group of compensation units 302 and the third group of compensation units 303, and each group includes M×N compensation units. According to the values ​​of M and N calculated and obtained above, each group of compensation units is divided into N columns, and each column includes M compensation units. Among them, in each group of compensation units, the frequencies of the clutter compensated by the compensation units in each column are different, but the frequencies of the clutter that can pass through each compensation unit 400 in the same column are the same, and the upper limit of the current of the clutter that can pass through each compensation unit 400 in the same column is the same, which is 50A.

[0038] Figure 3 FIG. 3 is a schematic diagram showing the structure of a column of compensation units provided by an embodiment. The value of M in the filter circuit 300 is 4, that is, the maximum clutter current generated by the electrical components of the machine corresponding to the current compensation device is 200A. Taking one of the four compensation units in the column as an example, Figure 3 As shown, each of the compensation units 400 includes a switch 401, an induction coil 403, a current fuse 405, a capacitor 407 and a reactor 409 connected in series in sequence. Further optionally, the compensation unit 400 also includes a voltage holding fuse 406, which is arranged between the induction coil 403 and the current fuse 405, and the voltage holding fuse 406 is grounded, and is used to keep the voltage of the circuit between the induction coil 403 and the current fuse 405 constant. Preferably, the compensation unit 400 also includes an inductor 408, which is connected in parallel with the current fuse 405 and the capacitor 407, and is used to filter the clutter current, so that the frequency is equal to the clutter frequency corresponding to the compensation of the column where the compensation unit 400 is located, and the clutter current with a current upper limit of 50A passes through the current fuse 405 and the capacitor 407.

[0039] The power supply structure 10 provided by the utility model is provided with a current compensation device 200 between the machine circuit breaker 103 and the electrical device 105, which can eliminate the clutter interference generated by the electrical device 105, prevent its interference from reversely polluting other machines in the circuit, and reduce the ineffective energy consumption of clutter, thereby saving electricity. At the same time, since the clutter current generated by the electrical device 105 is eliminated, the total current in the line is reduced, thereby realizing the reduction of the machine circuit breaker 103 and the cable specifications, reducing the cost.

[0040] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements. In addition, the term "connection" herein means that A and B are directly connected, or that A and B are indirectly connected, such as A and B are connected through C, or even through more components such as C and D, and A and B can be connected in one piece, or in separate pieces, or removable, or fixed. The term "optional" herein means that the technical feature can be combined or not combined with any feature in the text.

[0041] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A power supply structure for semiconductor equipment, wherein the semiconductor equipment comprises at least one machine, each of which comprises a plurality of electrical devices, characterized in that: The power supply structure comprises: Factory-side power distribution, which is connected to the power supply end and is used to distribute power to all machines of semiconductor equipment; At least one machine circuit breaker, the machine circuit breaker is connected to the power distribution of the plant service end, and is used to realize power supply control for the corresponding machine; At least one current compensation device, the current compensation device is respectively connected to the machine circuit breaker and the plurality of electrical devices, and is used to eliminate clutter interference generated by the electrical devices; The current compensation device includes a matrix-type filter circuit and a controller. The controller is respectively connected to the machine circuit breaker, the filter circuit and multiple electrical devices of the machine, and is used to adjust and control the filter circuit according to the noise generated by the electrical devices. The filter circuit is also connected to the machine to eliminate the noise interference generated by the electrical devices.

2. The power supply structure for semiconductor equipment according to claim 1, characterized in that: The filter circuit is a 3·M·N three-dimensional matrix, wherein the value of M is determined according to the maximum current of the clutter, the value of N is determined according to the number of types of the frequencies of the clutter, and both M and N are positive integers.

3. The power supply structure for semiconductor equipment according to claim 2, characterized in that: The value of M is [the maximum current size of the noise / 50A]+1, and the value of N is the number of types of frequencies of the noise.

4. The power supply structure for semiconductor equipment according to claim 3, characterized in that: The filter circuit includes 3×M×N compensation units connected to each other, and the compensation units are arranged as elements in the matrix.

5. The power supply structure for semiconductor equipment according to claim 4, characterized in that: The compensation units are divided into three groups according to the three-dimensional orientation of the three-dimensional matrix, each group of compensation units is divided into N columns, and each column includes M compensation units, wherein in each group of compensation units, the frequencies of the clutter that can pass through the compensation units in the same column are the same, and the upper limit of the current of the clutter that can pass through each compensation unit in the same column is the same, which is 50A.

6. The power supply structure for semiconductor equipment according to claim 4, characterized in that: Each compensation unit includes a switch, an induction coil, a current fuse, a capacitor and a reactor which are connected in series in sequence.

7. The power supply structure for semiconductor equipment according to claim 6, characterized in that: The compensation unit further includes a voltage holding fuse, which is disposed between the induction coil and the current fuse and is grounded to keep the voltage of the circuit between the induction coil and the current fuse constant.

8. The power supply structure for semiconductor equipment according to claim 7, characterized in that: The compensation unit also includes an inductor, which is connected in parallel with the current fuse and the capacitor and is used to filter the clutter current so that the clutter current with a frequency equal to the frequency of the column where the compensation unit is located and a current upper limit of 50A passes through the current fuse and the capacitor.

9. The power supply structure for semiconductor equipment according to claim 3, characterized in that: The clutter generated by the electrical components is odd harmonics.

10. The power supply structure for semiconductor equipment according to claim 9, characterized in that: The frequencies of the odd harmonics are 150 Hz, 250 Hz, 350 Hz, 450 Hz, ..., [(2n+1)×50] Hz, where n is a positive integer.

11. The power supply structure for semiconductor equipment according to claim 1, characterized in that: The number of the machine circuit breakers is the same as the number of the machines.

12. The power supply structure for semiconductor equipment according to claim 11, characterized in that: The number of the current compensating devices is the same as the number of the machine circuit breakers.

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