Quartz tube fixing structure and reaction cavity
By setting up the card regulations between the quartz tube and the base, the problem of crack or fragmentation caused by the process stress caused by the process of the quartz tube is solved, and the quality of the product and the performance of the device are improved.
Patent Information
- Application Number
- CN202420908366.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-04-28
AI Technical Summary
During the manufacturing process of semiconductor integrated circuits, the quartz tube is affected by long-term vacuuming, return pressure, heating, cooling and other processes, which leads to the displacement contact with the positioning needle of the quartz tube base, resulting in cracks or fragmentation.
Design a fixed structure of quartz tubes. By setting up card regulations between the quartz tube and the base, the card regulations have a sheet structure, thereby fixing the distance between the quartz tube and the base to avoid direct contact.
It effectively avoids cracks or fragmentation of quartz tube tubes, improves product yield and device performance, and reduces the difficulty of maintaining maintenance.
Smart Images
Figure CN222401393U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor integrated circuit manufacturing, in particular to a quartz tube fixing structure and a reaction chamber. Background Art
[0002] like Figure 1-Figure 2 As shown, when the outer quartz tube is initially installed, the gap between it and the quartz tube base is normal (1-2 mm). After a long period of time (about 400-450 runs), the outer quartz tube 2 is affected by vacuuming, back pressure, heating, cooling, etc. during the process, and will be displaced, and then contact the positioning needle 4 of the quartz tube base 3. Under long-term stress contact, the outer quartz tube will crack or even break.
[0003] It should be noted that the information disclosed in the background technology section of the utility model is only intended to deepen the understanding of the general background technology of the utility model, and should not be regarded as an admission or suggestion in any form that the information constitutes prior art already known to those skilled in the art. Utility Model Content
[0004] The utility model aims to provide a quartz tube fixing structure and a reaction chamber to solve the problem of quartz tube fragmentation.
[0005] In order to solve the above technical problems, the utility model provides a quartz tube fixing structure, including a quartz tube and a base, the quartz tube is located at the inner wall of the base, at least one caliper is arranged in the gap between the quartz tube and the base, the caliper includes a sheet-shaped abutment portion, the abutment portion has a certain thickness, one side of the abutment portion is in contact with the quartz tube, and the other side is arranged on the inner wall of the base.
[0006] Preferably, the caliper further comprises a columnar fixing portion, one end of which is connected to the abutting portion, and the other end of which is arranged on the base.
[0007] Preferably, the height of the fixing portion is 9.5 mm.
[0008] Preferably, an assembly hole is formed on the inner wall of the base to cooperate with the caliper, and the other end of the fixing portion is inserted into the assembly hole.
[0009] Preferably, three calipers are provided.
[0010] Preferably, the calipers are evenly arranged circumferentially on the outer circumferential surface of the quartz tube.
[0011] Preferably, the thickness of the abutting portion is 2 mm.
[0012] Preferably, the abutting portion cooperates with the outer peripheral surface of the quartz tube to form an arc-shaped sheet structure.
[0013] Preferably, the hardness of the caliper is lower than the hardness of the quartz tube.
[0014] The present disclosure also provides a reaction chamber, which adopts the quartz tube fixing structure as described above.
[0015] In the quartz tube fixing structure provided by the utility model, a caliper is arranged between the quartz tube and the base, and the abutting part of the caliper is in a sheet-like structure, thereby fixing the distance between the quartz tube and the base, improving the product yield and device performance. The abutting part is arranged in a sheet shape, which increases the contact area with the quartz tube, and even if the caliper contacts and squeezes the quartz tube, the quartz tube will not be broken.
[0016] The reaction chamber provided by the utility model and the quartz tube fixing structure provided by the utility model belong to the same utility model concept, therefore, the reaction chamber provided by the utility model at least has all the advantages of the quartz tube fixing structure provided by the utility model, which will not be repeated here. The caliper can fix the installation position of the quartz tube on the base, isolate the quartz tube from contact with the base, avoid cracks in the quartz tube, improve the success rate of machine maintenance, reduce the difficulty of maintenance, and improve the product yield. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Those skilled in the art will appreciate that the drawings are provided for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.
[0018] Figure 1 It is a schematic diagram of the structure of the process reaction cavity in the prior art;
[0019] Figure 2 It is a top view schematic diagram of a quartz tube base and an inner quartz tube in the prior art;
[0020] Figure 3 It is a structural schematic diagram of an embodiment of the utility model;
[0021] Figure 4 It is a three-dimensional structural schematic diagram of a caliper in one embodiment of the utility model;
[0022] Figure 5 It is a side structural schematic diagram of a caliper in one embodiment of the utility model;
[0023] Figure 6 It is a structural schematic diagram of a base according to an embodiment of the utility model.
[0024] Figure 1-Figure 2 middle:
[0025] 1. Inner quartz tube; 2. Outer quartz tube; 3. Quartz tube base; 4. Positioning pin.
[0026] Figure 3-Figure 6 middle:
[0027] 100, caliper; 101, abutment portion; 102, fixing portion; 200, quartz tube; 300, base; 301, assembly hole. DETAILED DESCRIPTION
[0028] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.
[0029] As used in the present invention, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used in a sense including "and / or", the term "several" is generally used in a sense including "at least one", and the term "at least two" is generally used in a sense including "two or more". In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. The term "proximal end" is usually the end close to the operator, and the term "distal end" is usually the end close to the patient. "One end" and "the other end" as well as "proximal end" and "distal end" usually refer to two corresponding parts, which include not only the endpoints. The terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of the two elements or the interaction relationship between the two elements. In addition, as used in the present utility model, an element is arranged on another element, which usually only means that there is a connection, coupling, matching or transmission relationship between the two elements, and the connection, coupling, matching or transmission between the two elements can be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any position such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0030] The core idea of the utility model is to provide a quartz tube fixing structure and a reaction chamber, and to solve the problem that the existing quartz tube is easy to break by setting a caliper structure between the quartz tube and the base.
[0031] Please refer to Figure 3-Figure 6 , which is a schematic diagram of an embodiment of the utility model. Figure 3 As shown, a quartz tube fixing structure includes a quartz tube 200 and a base 300, wherein the quartz tube 200 is located at the inner wall of the base 300, and at least one caliper 100 is arranged in the gap between the quartz tube 200 and the base 300, wherein the caliper 100 includes a sheet-shaped abutting portion 101, wherein the abutting portion 101 has a certain thickness, wherein one side of the abutting portion 101 contacts the quartz tube 200, and the other side is arranged on the inner wall of the base 300.
[0032] By setting a caliper 100 between the quartz tube 200 and the base 300, the abutting portion 101 of the caliper 100 is in a sheet-like structure, thereby fixing the distance between the quartz tube 200 and the base 300, and improving the product yield and device performance. The abutting portion 101 is set in a sheet shape, which increases the contact area with the quartz tube 200, and even if the caliper 100 contacts and squeezes the quartz tube 200, the quartz tube 200 will not be broken.
[0033] The caliper 100 can fix the installation position of the quartz tube 200 on the base 300, isolate the quartz tube 200 from contacting the base 300, avoid cracks in the quartz tube 200, improve the success rate of machine maintenance, reduce the difficulty of maintenance, and improve the product yield.
[0034] Specifically, the caliper 100 further includes a columnar fixing portion 102, one end of which is connected to the abutting portion 101, and the other end is disposed on the base 300. It can be understood that the inner wall of the base 300 is provided with an assembly hole 301 to cooperate with the caliper 100, and the other end of the fixing portion 102 is inserted into the assembly hole 301.
[0035] like Figure 4 As shown, the fixing portion 102 is located on the outside of the abutting portion 101, and the entire caliper 100 structure is fixed by the fixing portion 102, wherein the depth of the assembly hole 301 can be adapted to the depth of the fixing portion 102, and the fixing portion 102 can also have a thread, and the inner wall of the assembly hole 301 is also provided with a thread, and the fixing portion 102 and the assembly hole 301 are threadedly connected, thereby fixing the caliper 100.
[0036] In one embodiment, the height of the fixing portion 102 is 9.5 mm. Figure 5 As shown, the height h of the fixing portion 102 needs to meet the installation height of the base 300 .
[0037] In one embodiment, the caliper 100 is provided with three, such as Figure 6 As shown, the calipers 100 are arranged at the circled position in the figure, and the angle between the calipers 100 is 120°. The calipers 100 are evenly arranged circumferentially on the outer peripheral surface of the quartz tube 200. Three calipers 100 are arranged on the inner wall of the base 300 through the fixing part 102, and then fixed through the assembly hole 301.
[0038] like Figure 4 As shown, the thickness δ of the abutting portion 101 is 2 mm. The thickness of the abutting portion 101 needs to meet the gap between the quartz tube 200 and the base 300 and cannot protrude. Generally, the gap between the quartz tube 200 and the base 300 is 2 to 2.2 mm. Obviously, the thickness δ of the abutting portion 101 can also be set to 2 to 2.2 mm.
[0039] Specifically, the abutting portion 101 is configured to form an arc-shaped sheet structure in cooperation with the outer peripheral surface of the quartz tube 200. Figure 4 As described above, the side of the abutting portion 101 that contacts the quartz tube 200 needs to match the outer diameter arc surface of the quartz tube 200, so setting the abutting portion 101 to an arc structure can reduce the pressure at the stress point of the quartz tube 200.
[0040] In addition, if Figure 4 According to the parameters in, the outer diameter Φ2 of the abutting portion 101 is 517.9 mm, the inner diameter Φ1 is 513.9 mm, the arc length l is 40 mm, and the width m is 10 mm.
[0041] It is understandable that the hardness of the caliper 100 is lower than the hardness of the quartz tube 200. For example, the material of the caliper 100 is PBI (Celazole U-60: polybenzimidazole). Compared with other multi-molecular materials, PBI has a higher temperature resistance of 310°C and a hardness of half that of quartz. For example, the heat resistance temperature of PI (DuPont Vespel: polyimide) is 300°C, but its hardness is relatively high and it is difficult to meet the requirements of the present disclosure. For example, the hardness of PTFF (Japan Daikin: Teflon) is low, but its heat resistance temperature is 240°C, which is difficult to adapt to the operation in the reaction chamber. Therefore, the caliper 100 made of PBI material is used. Under long-term process operation, the caliper 100 will not break when it contacts and squeezes the quartz tube 200, and the contact between the quartz tube 200 and the base 300 is isolated.
[0042] The present disclosure also provides a reaction chamber, which adopts the quartz tube fixing structure as described in any one of the above items. The reaction chamber is, for example, a reaction chamber of a heat treatment device, which is not specifically limited here.
[0043] like Figure 3The schematic diagram of the structure in which the caliper 100 is installed between the quartz tube 200 and the base 300 shows that the caliper 100 is arranged between the quartz tube 200 and the base 300, and the abutting portion 101 of the caliper 100 is in a sheet-like structure, thereby fixing the distance between the quartz tube 200 and the base 300, and improving the product yield and device performance. The abutting portion 101 is arranged in a sheet shape, which increases the contact area with the quartz tube 200, and even if the caliper 100 contacts and squeezes the quartz tube 200, the quartz tube 200 will not be broken.
[0044] Specifically, the caliper 100 further includes a columnar fixing portion 102, one end of which is connected to the abutting portion 101, and the other end is disposed on the base 300. It can be understood that the inner wall of the base 300 is provided with an assembly hole 301 to cooperate with the caliper 100, and the other end of the fixing portion 102 is inserted into the assembly hole 301.
[0045] In one embodiment, the height h of the fixing portion 102 is 9.5 mm. Figure 5 As shown, the height of the fixing portion 102 needs to meet the installation height of the base 300 .
[0046] In one embodiment, three calipers 100 are provided. The calipers 100 are evenly arranged circumferentially on the outer circumference of the quartz tube 200. Figure 6 As shown, the calipers 100 are arranged at the circled position in the figure, and the angle between the calipers 100 is 120°. The three calipers 100 are arranged at the inner wall of the base 300 through the fixing portion 102 and then fixed through the assembly hole 301.
[0047] like Figure 4-Figure 5 As shown, the height h of the fixing portion 102 is 9.5 mm. The abutting portion 101 is configured to form an arc-shaped sheet structure in cooperation with the outer peripheral surface of the quartz tube 200, and the thickness δ of the abutting portion 101 is 2 mm. It can be understood that the hardness of the caliper 100 is lower than the hardness of the quartz tube 200. For example, the material of the caliper 100 is PBI (Celazole U-60: polybenzimidazole). Compared with other multi-molecular materials, PBI has a higher temperature resistance of 310°C and a hardness of half that of quartz.
[0048] The caliper 100 can fix the installation position of the quartz tube 200 on the base 300, isolate the quartz tube 200 from contacting the base 300, avoid cracks in the quartz tube 200, improve the success rate of machine maintenance, reduce the difficulty of maintenance, and improve the product yield.
[0049] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the protection scope of the technical solution of the utility model.
Claims
1. A quartz tube fixing structure, characterized in that: It includes a quartz tube and a base, wherein the quartz tube is located at the inner wall of the base, and at least one caliper is arranged in the gap between the quartz tube and the base, and the caliper includes a sheet-shaped abutment portion, the abutment portion has a certain thickness, one side of the abutment portion contacts the quartz tube, and the other side is arranged on the inner wall of the base.
2. The quartz tube fixing structure according to claim 1, characterized in that: The caliper also includes a columnar fixing portion, one end of which is connected to the abutting portion, and the other end of which is arranged on the base.
3. The quartz tube fixing structure according to claim 2, characterized in that: The height of the fixing portion is 9.5 mm.
4. The quartz tube fixing structure according to claim 2, characterized in that: The inner wall of the base is provided with an assembly hole to cooperate with the caliper, and the other end of the fixing part is inserted into the assembly hole.
5. The quartz tube fixing structure according to claim 1, characterized in that: The caliper is provided with three.
6. The quartz tube fixing structure according to claim 5, characterized in that: The calipers are evenly arranged circumferentially on the outer peripheral surface of the quartz tube.
7. The quartz tube fixing structure according to claim 1, characterized in that: The thickness of the abutting portion is 2 mm.
8. The quartz tube fixing structure according to claim 1, characterized in that: The abutting portion cooperates with the outer peripheral surface of the quartz tube to form an arc-shaped sheet structure.
9. The quartz tube fixing structure according to claim 1, characterized in that: The hardness of the caliper is lower than the hardness of the quartz tube.
10. A reaction chamber, characterized in that: A quartz tube fixing structure as described in any one of claims 1 to 9 is adopted.