Automatic wafer transplanting equipment

Abstract

The utility model relates to the field of semiconductor wafer processing, in particular to wafer automatic transplanting equipment, which comprises an equipment machine table, a transplanting mechanical arm, an equipment table top, an equipment rack and a wafer carrier, the transplanting mechanical arm comprises a base, a lifting assembly, a lifting hollow shaft, a turret assembly, a double-arm assembly, a wrist assembly and adsorption fingers. The equipment rack is erected on the equipment table, the transplanting mechanical arm is arranged in the equipment rack in a covering mode, and the wafer carrying frame is arranged on the equipment table and located on the outer side of the equipment rack; according to the utility model, the whole structure is optimized, and in the transplanting operation of wafers, the free control of the execution tail end in a limited space is realized by matching longitudinal lifting with double-arm structure extension and retraction; the rotating tower assembly and the lifting hollow shaft are used for adjusting the rotating angle in a large range, the overall occupied space is reduced, the wafer transplanting efficiency is improved, the use efficiency of the interior of the equipment is improved, and efficient multi-dimensional carrying action can be achieved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor wafer processing, in particular to an automatic wafer transplanting device. Background Art

[0002] In the field of semiconductor manufacturing, especially in the wafer front-end process, each process has multiple detailed steps, so the wafer needs to be transported between multiple processes and steps. In this process, a large number of wafer handling robots are needed to complete the loading and unloading of wafers, so as to further complete the wafer processing, cleaning, testing and other processes;

[0003] Usually, during the transportation process, a stable translation process is required because most wafers are sheet-shaped materials. However, conventional robotic arms require a larger working space, and their arms will interfere with other equipment due to various directions or movements. Therefore, the overall robotic arm space is larger, which in turn causes increased costs in other aspects and reduced efficiency, thus affecting the applicability and stability of the entire equipment. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide an automated wafer transplanting device.

[0005] The utility model provides the following technical solutions:

[0006] A wafer automated transplanting device, comprising an equipment platform, a transplanting robot arm, an equipment table, an equipment frame and a wafer carrier; the transplanting robot arm machine base, a lifting assembly, a lifting hollow shaft, a turret assembly, a double-arm assembly, a wrist assembly and a suction finger; the machine base is fixedly installed in the equipment platform, wherein the lifting hollow shaft passes through the equipment table mounted on the equipment platform, the turret assembly is transferred to the lifting hollow shaft, the double-arm assembly is fixed to the output end of the turret assembly, the output end of the double-arm assembly is connected to the wrist assembly, and the suction finger is connected to the end of the wrist assembly; the machine base comprises a top plate, a vertical plate and a bottom plate;

[0007] The equipment frame is mounted on the equipment platform, the transplanting robot arm cover is arranged inside, and the wafer carrier is arranged on the equipment table and located outside the equipment frame.

[0008] Furthermore, a lifting connecting block and a sliding connecting block are provided at the lower end of the outer wall of the lifting hollow shaft; a turret motor is provided inside; the lifting connecting block and the sliding connecting block are assembled with the lifting assembly, and the output end of the turret motor is connected to the turret assembly through a flange;

[0009] Furthermore, the lifting assembly includes a lifting motor, a guide screw and a lifting slide rail;

[0010] The lifting motor is hoisted on the lower end surface of the top plate through the motor bracket, and the lifting rail is attached to the inner side of the vertical plate, and the upper and lower ends abut against the top plate and the bottom plate; the two ends of the guide screw are respectively installed on the motor bracket and the bottom plate through the rotating shaft; the lifting slider on the lifting rail and the screw nut on the guide screw are used to cooperate with the driving lifting hollow shaft;

[0011] Furthermore, the turret assembly includes a turret housing, a double-arm motor and a turret connecting seat; the double-arm motor is assembled inside the turret housing through a motor mounting base, the turret connecting seat connects the output end of the double-arm motor with the double-arm assembly, the double-arm motor and the turret motor are both hollow motors, and a hollow channel is provided inside; the lower arm shaft of the double-arm assembly passes through the double-arm motor and is connected to the adsorption air pipe of the turret motor; a rotating air nozzle is provided on the top of the lower arm shaft;

[0012] Furthermore, the double-arm assembly comprises a lower arm assembly and an upper arm assembly, the lower arm assembly is assembled on the turret housing through a flange, and the output end of the upper arm assembly is connected to the wrist assembly; the lower end of the lower arm rotating shaft in the lower arm assembly is assembled in the turret assembly, the double-arm motor transmits power to the lower arm assembly with the lower arm rotating shaft as the axis, and the lower arm assembly outputs power to the wrist connecting seat in the upper arm assembly with the upper arm rotating shaft as the axis;

[0013] Further, the lower arm assembly includes a lower arm housing, a lower arm bottom cover, a lower arm driving wheel and a lower arm driven wheel; the lower arm rotating shaft is rotatably connected through the rotating shaft and penetrates into the lower arm housing, the lower arm driving wheel is fixed in the lower arm housing, and is rotatably connected to the lower arm rotating shaft through the lower arm expansion sleeve;

[0014] The driven wheel of the lower arm is fixedly connected to the lower part of the upper arm connecting seat and is rotatably mounted on the upper arm rotating shaft; the upper end surface of the upper arm connecting seat is fixedly connected to the upper arm assembly and is rotatably mounted on the lower arm housing through the lower arm cross roller bearing; the lower end of the upper arm rotating shaft is fixed to the lower arm bottom cover, and the upper end extends into the upper arm assembly

[0015] The upper arm assembly includes an upper arm housing, an upper arm bottom cover, an upper arm driving wheel and an upper arm driven wheel; the upper arm driving wheel is fixed in the upper arm housing and is rotatably connected to the upper arm rotating shaft through an upper arm expansion sleeve;

[0016] Furthermore, the upper arm driven wheel is fixedly connected to the lower part of the wrist connecting seat; the lower part of the wrist connecting seat is rotatably mounted on the upper arm housing through the upper arm cross roller bearing; the wrist connecting seat is connected to the wrist assembly; the upper arm connecting seat, the upper arm rotating shaft and the lower arm rotating shaft are all hollow and are all provided with a rotating air nozzle air circuit connection;

[0017] Furthermore, the end of the wrist assembly is connected to the suction finger and is provided with a finger connecting plate and a handheld fork arm; the handheld fork arm is provided with a plurality of finger suction cups; the finger connecting plate and the handheld fork arm are provided with an air circuit connected to the wrist assembly, and the wrist assembly air circuit is connected to the upper arm connecting seat;

[0018] By adopting the utility model, the overall structure is optimized. In the wafer transplanting operation, the free control of the end is realized within a limited space by adopting longitudinal lifting and telescopic double-arm structure. The rotation angle is adjusted in a large range by the turret assembly and the lifting hollow shaft, which reduces the overall space occupation, improves the efficiency of wafer transplanting, and improves the utilization efficiency of the equipment, so as to realize efficient multi-dimensional transporting actions. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the hidden equipment rack of the utility model

[0021] Figure 3 This is a schematic diagram of the overall structure of the transplanting mechanical arm of the utility model;

[0022] Figure 4 This is a schematic diagram of the utility model transplanting mechanical arm with the base hidden;

[0023] Figure 5 This is a schematic diagram of the structure of the lifting assembly of the utility model;

[0024] Figure 6 This is a schematic diagram of the lifting component of the utility model from an oblique upward view

[0025] Figure 7 This is a schematic diagram of the internal structure of the turret assembly of the utility model;

[0026] Figure 8 It is a schematic diagram of the combination of the upper arm assembly and the lower arm assembly of the utility model;

[0027] Fig. 9 It is a cross section of the upper arm assembly and the lower arm assembly of the utility model.

[0028] Fig.10 The figure is a schematic diagram of the motion trajectory of the transplanting mechanical arm of the utility model. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0030] refer to Figure 1-9 As shown, a wafer automated transplanting device comprises an equipment platform 11, a transplanting robot arm, an equipment table 13, an equipment frame 12 and a wafer carrier 14; the transplanting robot arm machine base 2, a lifting assembly, a lifting hollow shaft 4, a turret assembly 5, a double-arm assembly, a wrist assembly 8 and a suction finger 9; the machine base 2 is fixedly installed in the equipment platform 11, wherein the lifting hollow shaft 4 passes through the equipment table 13 erected on the equipment platform 11, the turret assembly 5 is transferred to the lifting hollow shaft 4, the double-arm assembly is fixed to the output end of the turret assembly 5, the output end of the double-arm assembly is connected to the wrist assembly 8, and the suction finger 9 is connected to the end of the wrist assembly 8; the machine base comprises a top plate 21, a vertical plate 23 and a bottom plate 22;

[0031] The equipment frame 12 is mounted on the equipment platform 11 , and the transplanting robot arm cover is arranged inside. The wafer carrier 14 is arranged on the equipment table 13 and is located outside the equipment frame 12 .

[0032] In this embodiment, the transfer robot arm is used to transfer wafers between wafer carriers 14;

[0033] Under normal working conditions, the lifting assembly in the base 2 drives the lifting hollow shaft 4 to perform precise and controllable lifting movements to meet the height changes of wafer handling work; the lifting hollow shaft 4 drives the turret assembly 5 to rotate as needed, so that the turret assembly 5 and subsequent devices rotate with the lifting hollow shaft 4 as the axis; the turret assembly 5 is an independent secondary rotation unit, which is used to control the extension and controllable rotation of the double-arm assembly; ensure that the wrist assembly 8 and the suction finger 9 at the end of the double-arm assembly can move to the designated area as needed; the wrist assembly 8 and the suction finger 9 can be replaced as needed to adapt to wafers of different sizes.

[0034] Furthermore, a lifting connecting block 42 and a sliding connecting block 41 are provided at the lower end of the outer wall of the lifting hollow shaft 4; a turret motor 43 is provided inside; the lifting connecting block 42 and the sliding connecting block 41 are assembled with the lifting assembly, and the output end of the turret motor 43 is connected to the turret assembly 5 through a flange;

[0035] Regarding the lifting assembly, it includes a lifting motor 31, a guide screw 35 and a lifting slide rail 32;

[0036] Furthermore, the lifting rail 32 is attached to the inner side of the vertical plate 23, and the upper and lower ends abut against the top plate 21 and the bottom plate 22; the two ends of the guide screw 35 are respectively installed on the motor bracket 34 and the bottom plate 22 through the rotating shaft; the lifting slider 321 on the lifting rail 32 and the screw nut 33 on the guide screw 35 are used to cooperate with the driving lifting hollow shaft 4;

[0037] Furthermore, the output shaft of the lifting motor 31 and the upper end of the guide screw 35 pass through the motor bracket 34 and are assembled with the lifting drive pulley 331;

[0038] In this embodiment, the lifting power mainly adopts the lifting motor 31 to realize the switching and transmission of power through the lifting transmission pulley 331 and the guide screw 35; compared with the traditional linear electric cylinder or air cylinder, the overall space occupied is small, which is convenient for maintenance and subsequent promotion and modification; the lifting motor 31 can use a high-precision encoding motor as needed to achieve more precise lifting control.

[0039] Furthermore, the housing of the lifting hollow shaft 4 is provided with a lifting connecting block 42 and a sliding connecting block 41; the lead screw nut 33 is clamped and installed in the lifting connecting block 42; the sliding connecting block 41 is assembled on both sides of the housing of the lifting hollow shaft 4 and is fixedly connected to the lifting sliding block 321; further, the lifting hollow shaft 4 is also provided with an induction baffle 36, and the induction baffle 36 is used to cooperate with the photoelectric switch 37 mounted on the vertical plate 23; a plurality of the photoelectric switches 37 are located on the side of the guide screw 35;

[0040] In this embodiment, the lifting connecting block 42 is used to connect the outer wall of the lifting hollow shaft 4 with the screw nut 33; it is matched with the sliding connecting blocks 41 arranged on both sides to ensure the stability of the lifting hollow shaft 4 during the lifting movement; the sensing baffle 36 is installed on the lifting connecting block 42 of the lifting hollow shaft 4, and the photoelectric switch 37 is a slot-type photoelectric sensing switch, which is connected to an external controller and can sense the position height of the lifting hollow shaft 4 through photoelectric sensing. Through a combination of a certain number of settings, the lifting formation and control action can be freely defined.

[0041] Regarding the turret assembly 5, it includes a turret housing 51, a double-arm motor 52 and a turret connecting seat 53; the double-arm motor 52 is assembled inside the turret housing 51 through a motor mounting base 54, and the turret connecting seat 53 connects the output end of the double-arm motor 52 with the double-arm assembly, and the double-arm motor 52 and the turret motor 43 are both hollow motors with hollow channels inside; the lower arm shaft 63 of the double-arm assembly passes through the double-arm motor 52 and is connected to the adsorption air pipe 44 of the turret motor 43; a rotating air nozzle is provided on the top of the lower arm shaft 63;

[0042] In this embodiment, the turret assembly 5 is a connecting part between the upper and lower parts, and provides the main power for the extension and rotation of the double-arm assembly.

[0043] Further, the double-arm assembly includes a lower arm assembly 6 and an upper arm assembly 7, the lower arm assembly 6 is assembled on the turret housing 51 through a flange, and the output end of the upper arm assembly 7 is connected to the wrist assembly 8; the lower end of the lower arm shaft 63 in the lower arm assembly 6 is assembled in the turret assembly 5, the double-arm motor 52 transmits power to the lower arm assembly 6 with the lower arm shaft 63 as the axis, and the lower arm assembly 6 outputs power to the wrist connection seat 76 in the upper arm assembly 7 with the upper arm shaft 73 as the axis;

[0044] Further, the lower arm assembly 6 includes a lower arm housing 61, a lower arm bottom cover 62, a lower arm driving wheel 64 and a lower arm driven wheel 65; the lower arm rotating shaft 63 is rotatably connected through the rotating shaft and penetrates into the lower arm housing 61, the lower arm driving wheel 64 is fixed in the lower arm housing 61, and is rotatably connected to the lower arm rotating shaft 63 through a lower arm expansion sleeve 67;

[0045] Furthermore, the lower arm driving wheel 64 and the lower arm driven wheel 65 form a belt transmission through the lower arm tensioning wheel 68 and a belt;

[0046] Further, the lower arm driven wheel 65 is fixedly connected to the lower part of the upper arm connecting seat 66, and is rotatably sleeved on the upper arm rotating shaft 73; the upper end surface of the upper arm connecting seat 66 is fixedly connected to the upper arm assembly 7, and is rotatably mounted on the lower arm housing 61 through the lower arm cross roller bearing 69; the lower end of the upper arm rotating shaft 73 is fixed to the lower arm bottom cover 62, and the upper end is deep into the upper arm assembly 7;

[0047] Furthermore, the upper arm assembly 7 includes an upper arm housing 71, an upper arm bottom cover 72, an upper arm driving wheel 74 and an upper arm driven wheel 75; the upper arm driving wheel 74 is fixed in the upper arm housing 71 and is rotatably connected to the upper arm rotating shaft 73 through an upper arm expansion sleeve 77;

[0048] Furthermore, the upper arm driving wheel 74 and the upper arm driven wheel 75 form a belt transmission through the upper arm tensioning wheel 78 and a belt;

[0049] Furthermore, the upper arm driven wheel 75 is fixedly connected to the bottom of the wrist connecting seat 76; the bottom of the wrist connecting seat 76 is rotatably mounted on the upper arm housing 71 through the upper arm cross roller bearing 79; the wrist connecting seat 76 is connected to the wrist assembly 8; the upper arm connecting seat 66, the upper arm rotating shaft 73 and the lower arm rotating shaft 63 are all hollow, and are all provided with a rotating air nozzle air circuit connection.

[0050] During the specific implementation process, the turret assembly 5 is the main output of the rotational force, and the lower arm shaft 63 is assembled in the turret assembly 5, which drives the lower arm assembly 6 to rotate as a whole, thereby causing the lower arm driving wheel 64 and the lower arm shaft 63 to rotate relative to each other, and the rotation angle is transmitted through the belt and the lower arm tensioning wheel 68, and then transmitted to the lower arm driven wheel 65; the upper arm assembly 7 as a whole rotates with the lower arm shaft 73 as the axis, and the lower arm driven wheel 65 is fixed to the upper arm connecting seat 66, so the rotation is transmitted to the upper arm housing 71; under the rotation action, the upper arm driving wheel 74 in the upper arm assembly 7 also rotates relative to the upper arm shaft 73; and the rotation is transmitted to the upper arm driven wheel 75 through the belt and the upper arm tensioning wheel 78, thereby driving the wrist connecting seat 76 to realize the control of the wrist assembly 8;

[0051] Among them, the gear ratio of the upper arm driven wheel 65 and the upper arm driving wheel 64 is 1:2, and the gear ratio of the lower arm driven wheel 75 and the lower arm driving wheel 74 is 1:2. When the turret assembly 5 drives the lower arm assembly 7 to rotate by an angle of θ, the upper arm connecting seat 66 rotates 2θ in the opposite direction relative to the lower arm bottom cover 62; when the upper arm assembly 7 rotates 2θ as a whole along with the upper arm connecting seat 66, the wrist connecting seat 76 rotates θ in the opposite direction relative to the upper arm assembly 7 as a whole;

[0052] like Figure 8 As shown, in this embodiment, the wheel center distances of the pulley transmission assemblies in the lower arm assembly 6 and the upper arm assembly 7 are the same, ensuring that the turret assembly 5 only drives the lower arm assembly 6. When not rotating, the motion axis of the final execution end wrist assembly 8 remains in the same straight line, and the straight line intersects the vertical line of the rotating assembly. Compared with the prior art, the beneficial effects of the utility model are as follows:

[0053] Furthermore, the end of the wrist assembly 8 is connected to the adsorption finger 9 and is provided with a finger connecting plate 91 and a hand-held fork arm 92; a plurality of finger suction cups 93 are provided on the hand-held fork arm 92; an air circuit is provided in the finger connecting plate 91 and the hand-held fork arm 92, which is connected to the wrist assembly 8, and the air circuit of the wrist assembly 8 is connected to the upper arm connecting seat 66.

[0054] In this embodiment, the adsorption finger 9 is driven by the double-arm assembly and the turret assembly 5 to efficiently and safely adsorb and support the wafer; it is connected to the wrist assembly 8 through the internal air circuit, and then connected to the upper arm connecting seat 66 air circuit to achieve overall vacuum adsorption and transportation.

[0055] By adopting the utility model, the overall structure is optimized. In the wafer transplanting operation, the free control of the end is realized within a limited space by adopting longitudinal lifting and telescopic double-arm structure. The rotation angle is adjusted in a large range by the turret assembly and the lifting hollow shaft, which reduces the overall space occupation, improves the efficiency of wafer transplanting, and improves the utilization efficiency of the equipment, so as to realize efficient multi-dimensional transporting actions.

[0056] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways without departing from the scope defined by the spirit of the present invention.

Claims

1. A wafer automated transplanting device, characterized in that: It comprises an equipment platform (11), a transfer robot arm, an equipment table (13), an equipment frame (12) and a wafer carrier (14); the transfer robot arm base (2), a lifting component, a lifting hollow shaft (4), a turret component (5), a double-arm component, a wrist component (8) and a suction finger (9); the base (2) is fixedly installed in the equipment platform (11), wherein the lifting hollow shaft (4) passes through the equipment table (13) erected on the equipment platform (11), the turret component (5) is transferred to the lifting hollow shaft (4), the double-arm component is fixed to the output end of the turret component (5), the output end of the double-arm component is connected to the wrist component (8), and the suction finger (9) is connected to the end of the wrist component (8); the base comprises a top plate (21), a vertical plate (23) and a bottom plate (22); The equipment frame (12) is mounted on the equipment platform (11), and the transplanting robot arm cover is arranged inside; the wafer carrier (14) is arranged on the equipment table (13) and is located outside the equipment frame (12).

2. The wafer automated transplanting device according to claim 1, characterized in that: The lower end of the outer wall of the lifting hollow shaft (4) is provided with a lifting connecting block (42) and a sliding connecting block (41); a turret motor (43) is provided inside; the lifting connecting block (42) and the sliding connecting block (41) are assembled with the lifting component, and the output end of the turret motor (43) is connected to the turret component (5) through a flange.

3. The wafer automated transplanting device according to claim 2, characterized in that: The lifting assembly comprises a lifting motor (31), a guide screw (35) and a lifting slide rail (32); The lifting motor (31) is suspended on the lower end surface of the top plate (21) through a motor bracket (34); the lifting rail (32) is attached to the inner side of the vertical plate (23), and the upper and lower ends abut against the top plate (21) and the bottom plate (22); the two ends of the guide screw (35) are respectively installed on the motor bracket (34) and the bottom plate (22) through a rotating shaft; the lifting slider (321) on the lifting rail (32) and the screw nut (33) on the guide screw (35) are used to cooperate with driving the lifting hollow shaft (4).

4. The wafer automated transplanting device according to claim 3, characterized in that: The output shaft of the lifting motor (31) and the upper end of the guide screw (35) both pass through the motor bracket (34) and are assembled with the lifting transmission pulley (331); the outer shell of the lifting hollow shaft (4) is provided with a lifting connecting block (42) and a sliding connecting block (41); the screw nut (33) is clamped and installed in the lifting connecting block (42); the sliding connecting block (41) is assembled on both sides of the outer shell of the lifting hollow shaft (4) and is fixedly connected to the lifting slider (321).

5. The wafer automated transplanting equipment according to claim 3, characterized in that: The turret assembly (5) comprises a turret housing (51), a double-arm motor (52) and a turret connecting seat (53); the double-arm motor (52) is assembled inside the turret housing (51) via a motor mounting base (54); the turret connecting seat (53) connects the output end of the double-arm motor (52) to the double-arm assembly; the double-arm motor (52) and the turret motor (43) are both hollow motors with hollow channels inside; the lower arm rotating shaft (63) of the double-arm assembly passes through the double-arm motor (52) and is connected to the adsorption air pipe (44) of the turret motor (43); a rotating air nozzle is provided on the top of the lower arm rotating shaft (63).

6. The wafer automated transplanting device according to claim 5, characterized in that: The double-arm assembly comprises a lower arm assembly (6) and an upper arm assembly (7), wherein the lower arm assembly (6) is mounted on a turret housing (51) via a flange, and the output end of the upper arm assembly (7) is connected to a wrist assembly (8); the lower end of a lower arm rotating shaft (63) in the lower arm assembly (6) is mounted in the turret assembly (5), the double-arm motor (52) transmits power to the lower arm assembly (6) with the lower arm rotating shaft (63) as the axis, and the lower arm assembly (6) outputs power to a wrist connecting seat (76) in the upper arm assembly (7) with the upper arm rotating shaft (73) as the axis.

7. The wafer automated transplanting device according to claim 6, characterized in that: The lower arm assembly (6) comprises a lower arm housing (61), a lower arm bottom cover (62), a lower arm driving wheel (64) and a lower arm driven wheel (65); the lower arm rotating shaft (63) is rotatably connected via the rotating shaft and penetrates into the lower arm housing (61); the lower arm driving wheel (64) is fixed in the lower arm housing (61) and is rotatably connected to the lower arm rotating shaft (63) via a lower arm expansion sleeve (67); The lower arm driven wheel (65) is fixedly connected to the lower part of the upper arm connecting seat (66) and is rotatably sleeved on the upper arm rotating shaft (73); the upper end surface of the upper arm connecting seat (66) is fixedly connected to the upper arm assembly (7) and is rotatably mounted on the lower arm housing (61) through the lower arm cross roller bearing (69); the lower end of the upper arm rotating shaft (73) is fixed to the lower arm bottom cover (62), and the upper end extends into the upper arm assembly (7). The upper arm assembly (7) comprises an upper arm housing (71), an upper arm bottom cover (72), an upper arm driving wheel (74) and an upper arm driven wheel (75); the upper arm driving wheel (74) is fixed in the upper arm housing (71) and is rotationally connected to the upper arm rotating shaft (73) through an upper arm expansion sleeve (77).

8. The wafer automated transplanting equipment according to claim 7, characterized in that: The upper arm driven wheel (75) is fixedly connected to the lower part of the wrist connecting seat (76); the lower part of the wrist connecting seat (76) is rotatably mounted on the upper arm housing (71) through an upper arm cross roller bearing (79); the wrist connecting seat (76) is connected to the wrist assembly (8); the upper arm connecting seat (66), the upper arm rotating shaft (73) and the lower arm rotating shaft (63) are all hollow and are all provided with a rotating air nozzle air circuit connection.

9. The wafer automated transplanting device according to claim 7, characterized in that: The end of the wrist component (8) is connected to the suction finger (9) and is provided with a finger connecting plate (91) and a hand-held fork arm (92); the hand-held fork arm (92) is provided with a plurality of finger suction cups (93); the finger connecting plate (91) and the hand-held fork arm (92) are provided with an air circuit connected to the wrist component (8), and the air circuit of the wrist component (8) is connected to the upper arm connecting seat (66).

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