Exposure device

Abstract

The utility model discloses an exposure device which comprises an exposure platform used for bearing and fixing an exposure product, a first exposure assembly used for exposing a first surface of the exposure product, and a second exposure assembly used for exposing a second surface of the exposure product, the controller is used for controlling the first exposure assembly and the second exposure assembly to be opened and closed and is in communication connection with the first exposure assembly and the second exposure assembly respectively; in a working state, the exposure product is fixedly arranged on the exposure platform, the first exposure assembly can expose the first surface of the exposure product, and the second exposure assembly can expose the second surface of the exposure product; wherein the first surface and the second surface are two opposite surfaces on the exposure product. According to the exposure device, double-sided exposure of the exposure product can be synchronously realized on the same station, the exposure time is saved, and the exposure efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of mask exposure, in particular to an exposure device. Background Art

[0002] Current exposure equipment, especially exposure equipment for battery cells, can generally only expose one side of the exposure product, or use two exposure stations to expose both sides of the exposure product in sequence, resulting in low exposure efficiency. Therefore, the applicant has developed a double-sided exposure process to expose both sides of the exposure product simultaneously, which can improve the exposure efficiency. However, during the research and development process, the applicant discovered that how to make both sides of the exposure product be exposed to the exposure light at the same time on the exposure platform, how to stably and reliably fix the exposure product on the premise that both sides of the exposure product can be exposed to the exposure light, how to obtain different exposure patterns on both sides of the exposure product, and how to avoid or reduce the impact of the exposure platform or other supporting components on the exposure process are all technical problems that need to be overcome. Utility Model Content

[0003] The purpose of the utility model is to provide an exposure device to solve one of the technical problems mentioned in the background technology.

[0004] In order to achieve the above-mentioned purpose, the technical solutions provided in the embodiments of the present invention are as follows.

[0005] An embodiment of the utility model provides an exposure device, comprising:

[0006] Exposure platform, used to carry and fix the exposure product;

[0007] A first exposure component, used for exposing a first side of an exposure product;

[0008] A second exposure component, used for exposing a second side of the exposure product;

[0009] A controller, the controller being communicatively connected to the first exposure assembly and the second exposure assembly, and being used to control the opening and closing of the first exposure assembly and the opening and closing of the second exposure assembly;

[0010] In the working state, the exposure product is fixedly arranged on the exposure platform, the first exposure component can expose the first side of the exposure product, and the second exposure component can expose the second side of the exposure product;

[0011] The first surface and the second surface are two opposite surfaces of the exposure product.

[0012] In some embodiments, a light-transmitting portion is provided on the exposure platform; in a working state, the exposure product is located on the light-transmitting portion, and the second surface of the exposure product is arranged facing the light-transmitting portion, and the light projected by the second exposure component can pass through the light-transmitting portion to expose the second surface of the exposure product.

[0013] In some embodiments, the light-transmitting portion includes a light-transmitting hole that passes through the exposure platform.

[0014] In some embodiments, the light-transmitting hole is a stepped hole, and the stepped hole includes a countersunk hole and a through hole located on the bottom wall of the countersunk hole, the through hole occupies a part of the bottom wall of the countersunk hole, and the area on the bottom wall of the countersunk hole not occupied by the through hole is called a stepped platform; in a working state, the edge of the exposure product overlaps the stepped platform;

[0015] The step platform is provided with a suction hole, and the suction hole is connected to a vacuum suction device; in a working state, the vacuum suction device can suction the edge of the exposure product through the suction hole.

[0016] In some embodiments, a stopper is provided on the inner side wall of the light-transmitting hole;

[0017] The stopper is provided with an adsorption hole, and the adsorption hole is connected to the vacuum adsorption device;

[0018] In the working state, the edge of the exposure product overlaps the stopper, and the vacuum adsorption device can adsorb the edge of the exposure product through the adsorption hole.

[0019] In some embodiments, the light-transmitting portion adopts any of the following structures:

[0020] (1) The exposure platform is made of a light-transmitting material, and a portion of the exposure platform used to carry the exposure product constitutes the light-transmitting portion;

[0021] (2) A light-transmitting plate is provided on the exposure platform, the exposure platform is made of a light-transmitting material, the light-transmitting plate is made of a light-transmitting material, and the light-transmitting portion includes the light-transmitting plate and a portion of the exposure platform occupied by the light-transmitting plate;

[0022] (3) The light-transmitting portion includes a light-transmitting hole penetrating the exposure platform and a light-transmitting plate disposed in the light-transmitting hole, wherein the light-transmitting plate is made of a light-transmitting material;

[0023] (4) The light-transmitting portion includes a light-transmitting hole penetrating the exposure platform and a light-transmitting plate disposed on the light-transmitting hole, and the light-transmitting plate is made of a light-transmitting material.

[0024] In some embodiments, the light-transmitting portion is covered with a light-transmitting film, and the light-transmitting film is a light-transmitting material.

[0025] In some embodiments, the light-transmitting film is provided with air holes, the light-transmitting portion is provided with adsorption holes, and the adsorption holes are connected to a vacuum adsorption device; in a working state, the exposure product is provided on the light-transmitting film, and the vacuum adsorption device can adsorb the exposure product through the adsorption holes and the air holes.

[0026] In some embodiments, the light-transmitting film includes a first area and a second area, the second area occupies the middle position of the light-transmitting film, the first area occupies the edge position of the light-transmitting film, the first area surrounds the second area, the air holes are arranged on the second area, and the adsorption holes are arranged on the local area of ​​the exposure platform opposite to the second area; or, the air holes are arranged on the first area, and the adsorption holes are arranged on the local area of ​​the exposure platform opposite to the first area.

[0027] In some embodiments, a light-transmitting support component is disposed on the light-transmitting portion;

[0028] In the working state, the exposure product is placed on the light-transmitting support component so that the second surface of the exposure product faces the light-transmitting support component; a flattening component may be provided on the exposure product to press on the first surface of the exposure product;

[0029] Wherein, the light-transmitting support component is a light-transmitting plate or a second mask; and the flattening component is a flattening plate or a light-transmitting plate or a first mask.

[0030] In some embodiments, the first exposure assembly adopts a projection structure, a proximity structure, or an LDI structure; the second exposure assembly adopts a projection structure, a proximity structure, or an LDI structure;

[0031] The first exposure component and the second exposure component are arranged relative to each other, and in a working state, the exposure product is located between the first exposure component and the second exposure component; the first exposure component and the second exposure component are arranged relative to each other in at least one of the following situations:

[0032] (1) The first exposure assembly and the second exposure assembly are arranged opposite to each other on the left and right sides, the first exposure assembly can project horizontal light in the direction of the second exposure assembly, and the second exposure assembly can project horizontal light in the direction of the first exposure assembly;

[0033] (2) The first exposure assembly and the second exposure assembly are arranged vertically opposite to each other, the first exposure assembly can project vertical light in the direction of the second exposure assembly, and the second exposure assembly can project vertical light in the direction of the first exposure assembly.

[0034] Due to the application of the above technical solutions, the embodiments of the utility model have the following advantages compared with the prior art: at the same workstation, double-sided exposure of the exposure product can be realized simultaneously, which saves exposure time and improves exposure efficiency. In some embodiments, the position of the adsorption holes and / or the air holes is improved so that they will not affect the exposure of the exposure product, thereby improving the exposure quality of the exposure product. In some embodiments, in order to solve the problem that smoke and dust adhere to the lens or mask during the exposure process and affect the exposure accuracy and quality, a light-transmitting film, a first light-transmitting film or a second light-transmitting film is used to cover the exposure product, which can isolate the smoke and dust generated during the exposure process to a certain extent, prevent the smoke and dust from adhering to the lens or mask, and improve the exposure accuracy and quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Attached Figure 1 This is a schematic diagram of the first structure of the exposure device in Example 1 of the utility model;

[0036] Attached Figure 2 This is a schematic diagram of the first light projection of the exposure device in Example 1 of the utility model;

[0037] Attached Figure 3 This is a schematic diagram of the second light projection of the exposure device in Example 1 of the utility model;

[0038] Attached Figure 4 This is a second structural schematic diagram of the exposure device in Example 1 of the utility model (without exposure product);

[0039] Attached Figure 5 This is a schematic diagram of the second structure of the exposure device in Example 1 of the utility model (with an exposure product);

[0040] Attached Figure 6 This is a third structural schematic diagram of the exposure device in Example 1 of the utility model (without exposure product);

[0041] Attached Figure 7 This is a schematic diagram of the third structure of the exposure device in Example 1 of the utility model (with an exposure product);

[0042] Attached Figure 8 For attachment Figure 6 A local enlarged schematic diagram of the middle A;

[0043] Attached Fig. 9 This is a schematic diagram of the first structure of the exposure device in Example 2 of the utility model;

[0044] Attached Fig.10 This is a schematic diagram of the second structure of the exposure device in Example 2 of the utility model;

[0045] Attached Fig.11This is a schematic diagram of the third structure of the exposure device in Embodiment 2 of the present utility model;

[0046] Attached Fig.12 This is a schematic diagram of the fourth structure of the exposure device in Embodiment 2 of the present utility model;

[0047] Attached Fig.13 This is a fifth structural schematic diagram of the exposure device in Embodiment 2 of the utility model;

[0048] Attached Fig.14 This is a schematic diagram of the first structure of the exposure device in Example 3 of the utility model;

[0049] Attached Fig.15 This is a diagram showing the area division of the light-transmitting film in Example 3 of the present utility model;

[0050] Attached Fig.16 This is a schematic diagram of the second structure of the exposure device in Example 3 of the utility model;

[0051] Attached Fig.17 This is a diagram showing the area division of the first light-transmitting film in Example 3 of the utility model;

[0052] Attached Fig.18 This is a schematic diagram of the first structure of the exposure device in Embodiment 4 of the utility model;

[0053] Attached Fig.19 This is a schematic diagram of the second structure of the exposure device in Example 4 of the utility model;

[0054] Attached Fig. 20 This is a schematic diagram of the third structure of the exposure device in Embodiment 4 of the present utility model;

[0055] Attached Fig.21 This is a schematic diagram of a fourth structure of the exposure device in Embodiment 4 of the present utility model;

[0056] Attached Fig. 22 This is a fifth structural schematic diagram of the exposure device in Embodiment 4 of the present utility model;

[0057] Attached Fig.23 This is a schematic diagram of the structure of the first mask in Embodiment 4 of the present utility model;

[0058] The meanings of the reference numerals are as follows:

[0059] Exposure product 1, first exposure component 11, first mask 111, first functional area 1111, second functional area 1112, second mask 121, second exposure component 12, second mask 121, exposure platform 20, light-transmitting hole 21, countersunk hole 211, through hole 212, adsorption hole 22, block 23, light-transmitting plate 30, light-transmitting film 40, first area 40a, second area 40b, first light-transmitting film 41, third area 41a, fourth area 41b, second light-transmitting film 42, pressing plate 50. DETAILED DESCRIPTION

[0060] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. Embodiment 1 is not just one embodiment, but a collection of embodiments with similar schemes or features, and the same is true for other embodiments.

[0061] Example 1

[0062] like Figure 1-7 As shown in any of the figures in the figure, an exposure device includes an exposure platform 20, a first exposure component 11, a second exposure component 12 and a controller (not shown). The exposure platform 20 is used to carry and fix the exposure product 1; the first exposure component 11 is used to expose the first side of the exposure product 1; the second exposure component 12 is used to expose the second side of the exposure product 1; the controller is communicatively connected to the first exposure component and the second exposure component, and is used to control the opening and closing of the first exposure component 11 and the opening and closing of the second exposure component 12. The first side and the second side are the two opposite sides of the exposure product 1. In the working state, the exposure product 1 is fixedly arranged on the exposure platform 20, the first exposure component 11 can expose the first side of the exposure product 1, and the second exposure component 12 can expose the second side of the exposure product 1.

[0063] Exposure product 1 is in the same station, and double-sided exposure of exposure product 1 can be realized synchronously, which saves exposure time and improves exposure efficiency. For example, using the process of single-sided sequential exposure, at the first station, the alignment time of exposure product 1 is 2s, and the exposure time for the first side is 3s; the time to move from the first station to the second station is 2s, and at the second station, the alignment time of exposure product 1 is 2s, and the exposure time for the second side is 3s; the entire exposure process takes 12s. Using the process of double-sided simultaneous exposure, the alignment time at the exposure station is 2s, the first side and the second side are exposed simultaneously, the exposure time is 3s, and the entire exposure process takes 5s. From the simple example, it can be seen that double-sided exposure can save more than double the exposure time and can greatly improve the exposure efficiency of exposure product 1.

[0064] like Figure 1-7 As shown in any of the figures in the figure, a light-transmitting portion is provided on the exposure platform 20, and the light-transmitting portion is a light-transmitting hole 21 that passes through the exposure platform 20. In the working state, the exposure product 1 is located on the light-transmitting hole 21, and the second surface of the exposure product 1 is arranged facing the light-transmitting hole 21, and the light projected by the second exposure component 12 can pass through the light-transmitting hole 21 to expose the second surface of the exposure product 1.

[0065] The light-transmitting hole 21 may be a hole of equal cross-section that passes through the exposure platform 20. The shape of the light-transmitting hole 21 may be a circular hole, a rectangular hole, or a slot-shaped hole. Figure 1-3 The light-transmitting hole 21 may be a hole of uniform cross-section that passes through the exposure platform 20, such as a stepped hole, such as Figure 4-5 The structure shown in any of the accompanying drawings.

[0066] In some embodiments, Figure 4-5 As shown, the light-transmitting hole 21 is a stepped hole, which includes a countersunk hole 211 and a through hole 212 located on the bottom wall of the countersunk hole. The through hole 212 occupies a part of the bottom wall of the countersunk hole 211, and the area on the bottom wall of the countersunk hole 211 not occupied by the through hole 212 is called a stepped platform. In the working state, the edge of the exposure product 1 overlaps the stepped platform.

[0067] In some embodiments, when the exposure product 1 is a battery cell, the shape of the battery cell is generally rectangular. Therefore, in order to adapt to the rectangular battery cell, the countersunk hole 211 and the through hole 212 are both rectangular holes, the aperture size of the through hole 212 is smaller than the aperture size of the countersunk hole 211, and the through hole 212 is arranged in the middle position on the bottom wall of the countersunk hole 211.

[0068] In some embodiments, the step platform is provided with a suction hole 22 , which is connected to a vacuum suction device (not shown). In a working state, the vacuum suction device can suction the edge of the exposure product 1 through the suction hole 22 .

[0069] In some embodiments, Figure 6-8 As shown, a block 23 is provided on the inner wall of the light-transmitting hole 21 for supporting the exposure product 1. In the working state, the edge of the exposure product 1 overlaps the block 23. The block 23 is provided with a suction hole 22, and the suction hole 22 is connected to the vacuum suction device. In the working state, the vacuum suction device can suction the edge of the exposure product 1 through the suction hole 22. More specifically, one opening of the suction hole 22 is provided on a surface of the block 22 supporting the exposure product 1, and the other opening is provided on the exposure platform 20. Here, no air pipe is used to pass through the light-transmitting hole 21 to connect to the suction hole 22 opened on the block 23, which can avoid interference with exposure and affect the exposure effect, and facilitate the suction hole 22 to connect to the vacuum suction device.

[0070] In some embodiments, the exposure area formed by the first exposure component 11 on the first surface is greater than or equal to the required exposure area on the surface, and the exposure area formed by the second exposure component 12 on the second surface is greater than or equal to the required exposure area on the surface. Figure 2 The drawings shown can be understood as follows: the exposure area formed by the first exposure component 11 on the first surface is equal to the required exposure area on the surface (the coverage area of ​​the light projected by the first exposure component 11 is called the first illumination area 11a, and the orthographic projection area of ​​the first illumination area 11a on the first surface is equal to the required exposure area on the surface), and the exposure area formed by the second exposure component 12 on the second surface is equal to the required exposure area on the surface (the coverage area of ​​the light projected by the second exposure component 12 is called the second illumination area 12a, and the orthographic projection area of ​​the second illumination area 12a on the second surface is equal to the required exposure area on the surface). Figure 3 The drawings shown can be understood as follows: the exposure area formed by the first exposure component 11 on the first surface is larger than the required exposure area on the surface (the orthographic projection area of ​​the first illumination area 11a on the first surface is larger than the required exposure area on the surface), and the exposure area formed by the second exposure component 12 on the second surface is equal to the required exposure area on the surface (the orthographic projection area of ​​the second illumination area 12a on the second surface is equal to the required exposure area on the surface). The first exposure component 11 can realize the exposure of the non-pattern area at the edge of the exposure product 1. According to the process requirements, the required exposure area on the first surface and the required exposure area on the second surface may be equal or unequal. For example, when the two are unequal, the exposure area formed by the first exposure component 11 on the first surface is larger than the exposure area formed by the second exposure component 12 on the second surface.

[0071] In a specific embodiment, the exposure product 1 is a battery cell, and both sides (the first side and the second side) of the battery cell can be exposed by setting masks with different patterns, or different patterns can be directly drawn on both sides of the battery cell by LDI (that is, the patterns formed by the exposure areas on the two sides of the battery cell are different) to meet different exposure requirements on the two sides of the battery cell. For example, the patterns on both sides of the battery cell are multiple parallel or staggered linear areas, and the width of the linear area on the first side of the battery cell (for example, the light-receiving side when the battery cell is working) is smaller than the width of the linear area on the second side of the battery cell (for example, the backlight side when the battery cell is working). Therefore, in the subsequent process, thinner gate lines can be formed on the first side of the battery cell to reduce shading of the gate lines, and thicker gate lines can be formed on the second side of the battery cell to increase the conductivity of the gate lines.

[0072] Example 2

[0073] like Figure 9-13 As shown in any of the figures in the figure, an exposure device includes an exposure platform 20, a first exposure component 11, a second exposure component 12 and a controller (not shown). The exposure platform 20 is used to carry and fix the exposure product 1; the first exposure component 11 is used to expose the first side of the exposure product 1; the second exposure component 12 is used to expose the second side of the exposure product 1; the controller is communicatively connected to the first exposure component and the second exposure component, and is used to control the opening and closing of the first exposure component 11 and the opening and closing of the second exposure component 12. The first side and the second side are the two opposite sides of the exposure product 1. In the working state, the exposure product 1 is fixedly arranged on the exposure platform 20, the first exposure component 11 can expose the first side of the exposure product 1, and the second exposure component 12 can expose the second side of the exposure product 1.

[0074] Exposure product 1 is at the same workstation, and double-sided exposure of exposure product 1 can be achieved simultaneously, which saves exposure time and improves exposure efficiency.

[0075] like Fig. 9 As shown, the exposure platform 20 is made of a light-transmitting material, and a portion of the exposure platform 20 used to carry the exposure product 1 constitutes a light-transmitting portion. The exposure area formed by the first exposure component 11 on the first surface is equal to the required exposure area on the surface (the orthographic projection area of ​​the first illumination area 11a on the first surface is equal to the required exposure area on the surface), and the exposure area formed by the second exposure component 12 on the second surface is equal to the required exposure area on the surface (the orthographic projection area of ​​the second illumination area 12a on the second surface is equal to the required exposure area on the surface).

[0076] like Fig.10A light-transmitting plate 30 is disposed on the exposure platform 20. The exposure platform 20 is made of a light-transmitting material. The light-transmitting plate 30 is made of a light-transmitting material. The light-transmitting portion includes the light-transmitting plate 30 and a partial area on the exposure platform 20 occupied by the light-transmitting plate 30.

[0077] like Fig.11 As shown, the light-transmitting portion includes a light-transmitting hole 21 arranged on the exposure platform 20 and a light-transmitting plate 30 arranged in the light-transmitting hole 21. The light-transmitting plate 30 is a light-transmitting material, and the exposure platform 20 is a light-transmitting material. The light-transmitting hole 21 does not completely penetrate the exposure platform 20. In addition to transmitting light, the light-transmitting hole 21 also serves as a mounting hole for the light-transmitting plate 30. The size of the light-transmitting hole 21 can be equal to or slightly larger than the size of the light-transmitting plate 30, so as to guide and position the installation of the light-transmitting plate 30.

[0078] like Fig.12 As shown, the light-transmitting portion includes a light-transmitting hole 21 arranged on the exposure platform 20 and a light-transmitting plate 30 arranged in the light-transmitting hole 21. The light-transmitting plate 30 is made of a light-transmitting material. The light-transmitting hole 21 completely penetrates the exposure platform 20. The exposure platform 20 can be made of a light-transmitting material or a non-light-transmitting material. In addition to being light-transmitting, the light-transmitting hole 21 also serves as a mounting hole for the light-transmitting plate 30. The size of the light-transmitting hole 21 can be equal to or slightly larger than the size of the light-transmitting plate 30, so as to guide and position the installation of the light-transmitting plate 30.

[0079] like Fig.13 As shown, the light-transmitting portion includes a light-transmitting hole 21 arranged on the exposure platform 20 and a light-transmitting plate 30 arranged above the light-transmitting hole 21. When the exposure platform 20 is made of opaque material, the light-transmitting hole 21 needs to completely penetrate the exposure platform 20. When the exposure platform 20 is made of light-transmitting material, the light-transmitting hole 21 can completely penetrate the exposure platform 20 or not completely penetrate the exposure platform 20.

[0080] Preferably, the light-transmitting material may be light-transmitting glass or light-transmitting resin; for example, the light-transmitting material is transparent glass or transparent resin.

[0081] Example 3

[0082] Improvements are made on the basis of Example 1 or Example 2, or improvements are made on the basis of a new example formed by combining Example 1 and Example 2.

[0083] like Fig.14As shown, the light-transmitting part is covered with a light-transmitting film 40, which is a light-transmitting material. The light-transmitting film 40 is provided with air holes, and the light-transmitting part is provided with adsorption holes 22, which are connected to the vacuum adsorption device. In the working state, the exposure product 1 is set on the light-transmitting film 40, and the vacuum adsorption device can adsorb the exposure product through the adsorption holes 22 and the air holes. The light-transmitting part can be a local area on the exposure platform 20, and the entire exposure platform 20 or the local area supporting the exposure product 1 is a light-transmitting material.

[0084] like Fig.15 As shown, the light-transmitting film 40 includes a first area 40a and a second area 40b, wherein the second area 40b occupies the middle position of the light-transmitting film 40, the first area 40a occupies the edge position of the light-transmitting film 40, the first area 40a surrounds the second area 40b, and the air holes are arranged on the second area 40b. Preferably, the air holes are evenly distributed on the second area 40b. The shape of the second area 40b can be determined according to the shape of the exposure product 1. For example, if the exposure product 1 is circular, rectangular or other polygonal, the second area 40b is correspondingly circular, rectangular or other polygonal, so as to more firmly adsorb the exposure product 1. Of course, the shape of the second area 40b is not limited to the above-mentioned cases.

[0085] like Fig.16 As shown, the light-transmitting portion is a light-transmitting hole 21 that completely penetrates the exposure platform 20, and the light-transmitting hole 21 is covered with a first light-transmitting film 41, which is a light-transmitting material. The first light-transmitting film 41 is provided with air holes, and the edge of the light-transmitting hole 21 is provided with adsorption holes 22, which are connected to the vacuum adsorption device. In the working state, the exposure product 1 is set on the first light-transmitting film 41, and the vacuum adsorption device can adsorb the edge of the exposure product through the adsorption holes 22 and the air holes.

[0086] like Fig.17As shown, the first light-transmitting film 41 includes a third area 41a and a fourth area 41b, the fourth area 41b occupies the middle position of the first light-transmitting film 41, the third area 41a occupies the edge position of the first light-transmitting film 41, the third area 41a surrounds the fourth area 41b, and the air holes are arranged on the third area 41a. Preferably, the air holes are evenly distributed on the third area 41a. The shape of the third area 41a can be determined according to the shape of the exposure product 1. For example, if the exposure product 1 is circular, rectangular or other polygonal, the third area 41a is correspondingly a circular ring, a rectangular frame or other polygonal frame. In a specific example, the third area 41a is a rectangular frame, the fourth area 41b is a rectangle, and the exposure product 1 is a rectangular cell; in the working state, the edge of the cell at least covers part of the third area 41a, which can be understood as the area of ​​the cell being larger than the area of ​​the fourth area 41b, and preferably smaller than or equal to the area of ​​the entire first light-transmitting film 41, so that the edge of the cell covering the third area 41a can be adsorbed, and the exposure area in the middle of the cell faces the fourth area 41b, and no air holes are provided on the fourth area 41b, combined with Fig.16 It can be seen that there is no adsorption hole under the fourth area 41b, and the adsorption hole and the air hole will not affect the exposure of the battery cell, thereby improving the exposure quality of the battery cell. In addition, smoke and dust will be generated during the exposure process, and the smoke and dust will adhere to the lens or mask, affecting the exposure accuracy and quality. The first light-transmitting film 41 can isolate the smoke and dust generated by the second side of the exposure product 1 during the exposure process to a certain extent, thereby improving the exposure accuracy and quality.

[0087] In some embodiments, continue to refer to Fig.16 In the working state, the exposure product 1 is placed on the first light-transmitting film 41, and a second light-transmitting film 42 may be further covered on the exposure product 1. Fig.17 Still taking the rectangular cell as an example, the edge of the cell does not completely cover the third area 41a. It can be understood that the area of ​​the cell is smaller than the area of ​​the entire first light-transmitting film 41, thereby partially exposing the third area 41a, and the second light-transmitting film 42 is adsorbed through the exposed third area 41a, so that the edge of the first light-transmitting film 41 and the edge of the second light-transmitting film 42 fit each other, clamping and fixing the cell between the first light-transmitting film 41 and the second light-transmitting film 42. There are two situations here, only the second light-transmitting film 42 is adsorbed through the first light-transmitting film 41, or the second light-transmitting film 42 is adsorbed through the first light-transmitting film 41, and the edge of the cell is also adsorbed through the first light-transmitting film 41. Combined with Fig.16It can be seen that there is no adsorption hole under the fourth area 41b, and the adsorption hole and the air hole will not affect the exposure of the battery cell, thereby improving the exposure quality of the battery cell. In addition, the first light-transmitting film 41 can isolate the smoke and dust generated by the second side of the exposure product 1 during the exposure process to a certain extent, and the second light-transmitting film 42 can isolate the smoke and dust generated by the first side of the exposure product 1 during the exposure process to a certain extent, which can improve the exposure accuracy and quality.

[0088] Example 4

[0089] In the first implementation of Example 4, an exposure device includes an exposure platform 20, a first exposure component 11, a second exposure component 12 and a controller (not shown). The exposure platform 20 is used to carry and fix the exposure product 1; the first exposure component 11 is used to expose the first side of the exposure product 1; the second exposure component 12 is used to expose the second side of the exposure product 1; the controller is communicatively connected to the first exposure component and the second exposure component, and is used to control the opening and closing of the first exposure component 11 and the opening and closing of the second exposure component 12. The first side and the second side are the two opposite sides of the exposure product 1. In the working state, the exposure product 1 is fixedly arranged on the exposure platform 20, the first exposure component 11 can expose the first side of the exposure product 1, and the second exposure component 12 can expose the second side of the exposure product 1. The exposure product 1 is a battery cell, specifically a battery cell covered with a mask, and the exposure device needs to expose a local area of ​​the mask.

[0090] The exposure platform 20 is provided with a light-transmitting portion, which is a light-transmitting hole 21 that passes through the exposure platform 20. In the working state, the exposure product 1 is located on the light-transmitting hole 21, and the second surface of the exposure product 1 is arranged facing the light-transmitting hole 21. The light projected by the second exposure assembly 12 can pass through the light-transmitting hole 21 to expose the second surface of the exposure product 1. A light-transmitting plate 30 is provided above the light-transmitting hole 21, and the light-transmitting plate 30 is a light-transmitting material.

[0091] Based on the above structure, an adsorption device can be used to adsorb and fix the battery cell, but it is necessary to open adsorption holes 22 on the light-transmitting plate 30. The adsorption holes 22 are distributed over the entire area of ​​the light-transmitting plate 30 that supports the battery cell, so that the curled or wrinkled battery cell can be flattened by adsorption. However, at this time, the adsorption holes 22 will affect the exposure of the battery cell. Part of the exposure light passes through the adsorption holes 22 and then irradiates the battery cell. Part of the exposure light passing through the adsorption holes 22 will be refracted or diffracted, affecting the exposure effect. Furthermore, the setting position of the adsorption holes 22 on the light-transmitting plate 30 can be changed so that the adsorption holes 22 avoid the area where the battery cell needs to be exposed. The area where the battery cell needs to be exposed will not be adsorbed and fixed, and the curled or wrinkled battery cell may not be flattened by adsorption. Furthermore, the pressing plate 50 and the light-transmitting plate 30 can be used in combination, the light-transmitting plate 30 supports the second side of the battery cell, and the pressing plate 50 presses the first side of the battery cell. In the working state, after the pressing plate 50 presses the first side of the cell, the adsorption holes 22 start to adsorb the cell, and then the pressing plate 50 is removed from the first side of the cell to avoid affecting the exposure of the first side of the cell, and the pressing and removal of the pressing plate 50 will affect the exposure efficiency. Of course, the pressing plate 50 can also be replaced by the light-transmitting plate 30, but the light-transmitting plate 30 itself may also cause the exposure light to be refracted.

[0092] When the first exposure assembly 11 includes the first mask 111, if the first mask 111 is used as the pressing plate 50, the first mask 111 does not need to be removed before the cell is exposed, thereby improving the exposure efficiency. At the same time, the first mask 111 does not cause the problem of exposure light refraction. In the working state, the exposure product 1 is placed on the light-transmitting plate 30, and the first mask 111 is placed on the exposure product 1, and the cell is flattened by the weight of the first mask 111.

[0093] Based on the above analysis, at least the following five implementation methods can be obtained:

[0094] (1) Fig.18 As shown, a light-transmitting plate 30 is provided above the light-transmitting hole 21. After the battery cell is set on the light-transmitting plate 30, the pressing plate 50 presses the first side of the battery cell, the adsorption holes 22 start to adsorb the battery cell, and then the pressing plate 50 is removed from the first side of the battery cell to prevent the pressing plate 50 from affecting the exposure of the first side of the battery cell.

[0095] (2) Fig.19As shown, a first light-transmitting plate 30 is provided above the light-transmitting hole 21. After the cell is placed on the first light-transmitting plate 30, the second light-transmitting plate 30 presses the first surface of the cell. At this time, the first light-transmitting plate 30 does not need to be provided with adsorption holes 22, and the cell is flattened by gravity of the second light-transmitting plate 30. Of course, in order to further prevent the cell from shifting during operation, adsorption holes 22 may also be provided at the edge of the first light-transmitting plate 30 to adsorb the edge area of ​​the cell.

[0096] (3) Fig. 20 As shown, the second exposure assembly 12 includes a second mask 121, and the second mask 121 is arranged above the light-transmitting hole 21. After the cell is arranged on the second mask 121, the second light-transmitting plate 30 presses the first surface of the cell. At this time, the second mask 121 does not need to be provided with adsorption holes 22, and the second light-transmitting plate 30 is used to flatten the cell by gravity. Of course, in order to further prevent the cell from shifting during operation, adsorption holes 22 can also be arranged at the edge of the second mask 121 to adsorb the edge area of ​​the cell. Compared with the second embodiment, this embodiment uses the second mask 121 to replace the first light-transmitting plate 30.

[0097] (4) Fig.21 As shown, the light-transmitting hole 21 is covered with a first light-transmitting plate 30. After the cell is set on the first light-transmitting plate 30, the first mask 111 presses the first surface of the cell. At this time, the first light-transmitting plate 30 does not need to be provided with adsorption holes 22, and the cell is flattened by gravity of the first mask 111. Of course, in order to further prevent the cell from shifting during operation, adsorption holes 22 can also be provided on the edge of the first light-transmitting plate 30 to adsorb the edge area of ​​the cell. Compared with the second embodiment, this embodiment uses the first mask 111 to replace the second light-transmitting plate 30.

[0098] (5) Fig. 22 As shown, the second mask 121 is provided above the light-transmitting hole 21. After the cell is provided on the second mask 121, the first mask 111 presses the first surface of the cell. At this time, the second mask 121 does not need to be provided with adsorption holes 22, and the cell is flattened by gravity of the first mask 111. Of course, in order to further prevent the cell from shifting during operation, adsorption holes 22 can also be provided at the edge of the second mask 121 to adsorb the edge area of ​​the cell. Compared with the second embodiment, this embodiment uses the first mask 111 to replace the second light-transmitting plate 30, and uses the second mask 121 to replace the first light-transmitting plate 30.

[0099] like Fig.23As shown, the first mask 111 includes a first functional area 1111 and a second functional area 1112. When the material of the mask covering the cell is a positive resist, the first functional area 1111 is an opaque area, and the second functional area 1112 is a translucent area, which can be a translucent groove on the first mask 111. Exposure light passing through the translucent groove may cause interference. In order to avoid interference of exposure light, a translucent material, such as high-transmittance optical glass or high-transmittance resin or organic film, can be arranged in the translucent groove. Preferably, the area between the second functional areas 1112 is provided with adsorption holes to adsorb and fix the cell, and can reduce the influence on the exposure on the second functional area 1112. Of course, the first mask 111 can also be a translucent material, and a layer of light-shielding material is coated on the first functional area 1111 to achieve the opacity of the first functional area 1111, and no light-shielding material is coated on the second functional area 1112 or a layer of light-transmitting material is coated to achieve the light transmission of the second functional area 1112. When the material of the mask covering the cell is a negative resist, the first functional area 1111 may also be a light-transmitting area, and the second functional area 1112 may be a light-impermeable area. In this case, adsorption holes may be provided on the second functional area 1112.

[0100] Example 5

[0101] Improvements are made based on any one of embodiments 1-4 or a new embodiment formed by a combination thereof.

[0102] In some embodiments, the first exposure component 11 and the second exposure component 12 are arranged relative to each other. In the working state, the exposure product 1 is located between the first exposure component 11 and the second exposure component 12; the relative arrangement of the first exposure component 11 and the second exposure component 12 includes at least one of the following situations:

[0103] (1) The first exposure component 11 and the second exposure component 12 are arranged opposite to each other on the left and right sides. The first exposure component 11 can project horizontal light in the direction of the second exposure component 12, and the second exposure component 12 can project horizontal light in the direction of the first exposure component 11. In a specific embodiment, the first surface and the second surface of the exposure product 1 can be made perpendicular to the horizontal light. What this means is that the exposure product 1 is arranged vertically, and the exposure product 1 maintains a vertical state to complete exposure at the exposure station. For example, before entering the exposure station, a flipping mechanism is used to flip the exposure product 1 in a horizontal state into a vertical state, and the exposure product 1 maintains a vertical state to complete exposure at the exposure station. After the exposure product 1 leaves the exposure station, a flipping mechanism is used to flip the exposure product 1 in a vertical state into a horizontal state.

[0104] (2) The first exposure assembly 11 and the second exposure assembly 12 are arranged vertically opposite to each other, and the first exposure assembly 11 can project vertical light in the direction of the second exposure assembly 12, and the second exposure assembly 12 can project vertical light in the direction of the first exposure assembly 11. In a specific embodiment, the first surface and the second surface of the exposure product 1 can be perpendicular to the vertical light. This means that the exposure product 1 is arranged horizontally, and the exposure product 1 maintains a horizontal state at the exposure station to complete the exposure.

[0105] In some embodiments, the first exposure assembly 11 adopts a projection structure, a proximity structure, or an LDI structure; the second exposure assembly 12 adopts a projection structure, a proximity structure, or an LDI structure. The projection structure means that the mask is arranged between the exposure light source and the exposure lens (objective lens), and the proximity structure means that the mask is arranged between the exposure product 1 and the exposure lens (objective lens), including the case where the mask contacts the exposure product 1 (contact structure).

[0106] In some embodiments, the light emitted by the exposure light source may not be perpendicular to the exposure required surface (the first surface and / or the second surface) on the exposure product 1, and the light emitted by the exposure light source is perpendicular to the exposure required surface on the exposure product 1 only after being refracted. For example, the light emitted by the exposure light source is parallel to the exposure required surface, and after being refracted by a plane mirror, the light emitted by the exposure light source is deflected by 90 degrees, and the deflected exposure light is perpendicular to the exposure required surface on the exposure product 1.

[0107] Example 6

[0108] An exposure method comprises the following steps: providing an exposure platform 20 with a light-transmitting portion; placing an exposure product 1 on the light-transmitting portion so that the second side of the exposure product 1 faces the light-transmitting portion; controlling the exposure amount on the first side of the exposure product 1 to expose the first side of the exposure product 1; controlling the exposure amount on the second side of the exposure product 1 to expose the second side of the exposure product 1; making the exposure amount on the first side of the exposure product 1 greater than or equal to the exposure amount on the second side of the exposure product; wherein the first side and the second side are two opposite sides of the exposure product 1.

[0109] The exposure product 1 can be simultaneously exposed on both sides of the exposure product 1 at the same station, saving exposure time and improving exposure efficiency. For example, using the process of single-sided sequential exposure, at the first station, the alignment time of the exposure product 1 is 2s, and the exposure time for the first side is 3s; the time to move from the first station to the second station is 2s, and at the second station, the alignment time of the exposure product 1 is 2s, and the exposure time for the second side is 3s; the entire exposure process takes 12s. Using the process of double-sided simultaneous exposure, the alignment time at the exposure station is 2s, the first side and the second side are exposed simultaneously, the exposure time is 3s, and the entire exposure process takes 5s. From a simple example, it can be seen that double-sided exposure can save more than double the exposure time and can greatly improve the exposure efficiency of the exposure product 1. In particular, making the exposure amount on the first side of the exposure product 1 greater than or equal to the exposure amount on the second side of the exposure product, different exposure patterns or the same exposure patterns can be obtained on the first side and the second side of the exposure product 1 at the same time.

[0110] In some embodiments, one of the following steps is adopted to make the exposure time on the first side of the exposure product 1 equal to the exposure time on the second side of the exposure product 1, the first side and the second side can be exposed at the same time, and the exposures on the first side and the second side do not need to wait for each other, which can improve the exposure efficiency.

[0111] (1) When the exposure amount on the first side of the exposure product 1 is greater than the exposure amount on the second side of the exposure product 1, positive compensation is performed on the exposure amount on the first side of the exposure product 1, or negative compensation is performed on the exposure amount on the second side of the exposure product 1;

[0112] (2) When the exposure amount on the first side of the exposure product 1 is equal to the exposure amount on the second side of the exposure product 1, the attenuation amount of the exposure amount on the second side of the exposure product 1 caused by the light-transmitting portion is obtained; based on the attenuation amount, negative compensation is performed on the exposure amount on the first side of the exposure product 1, or positive compensation is performed on the exposure amount on the second side of the exposure product 1.

[0113] In a specific embodiment, the exposure product 1 is a battery cell, and both sides (the first side and the second side) of the battery cell can be exposed by setting masks with different patterns, or different patterns can be directly drawn on both sides of the battery cell by LDI (that is, the patterns formed by the exposure areas on the two sides of the battery cell are different) to meet different exposure requirements on the two sides of the battery cell. For example, the patterns on both sides of the battery cell are multiple parallel or staggered linear areas, and the width of the linear area on the first side of the battery cell (the light-receiving side when the battery cell is working) is smaller than the width of the linear area on the second side of the battery cell (the backlight side when the battery cell is working). Therefore, in the subsequent process, thinner gate lines can be formed on the first side of the battery cell to reduce shading of the gate lines, and thicker gate lines can be formed on the second side of the battery cell to increase the conductivity of the gate lines.

[0114] In some embodiments, the exposure device in Examples 1-5 can be used to implement the exposure method in this embodiment, or the exposure method in this embodiment can be applied to the exposure device in Examples 1-5, or the exposure method in this embodiment can refer to and quote the technical solutions and features of the exposure devices in Examples 1-5 to form new embodiments.

[0115] Example 7

[0116] An exposure method includes the following steps: providing an exposure platform 20 with a light-transmitting portion; arranging a light-transmitting film 40 with air holes on the light-transmitting portion; placing an exposure product 1 on the light-transmitting film 40 so that the second side of the exposure product 1 faces the light-transmitting film 40; vacuum adsorbing the light-transmitting film 40 and the exposure product 1 thereon; exposing the first side of the exposure product 1; exposing the second side of the exposure product 1; wherein the first side and the second side are two opposite sides of the exposure product 1.

[0117] On the one hand, the exposure product 1 can be exposed on both sides of the exposure product 1 at the same workstation, which saves exposure time and improves exposure efficiency. On the other hand, smoke and dust will be generated during the exposure process, and the smoke and dust will adhere to the lens or mask, affecting the exposure accuracy and quality. The light-transmitting film 40 can isolate the smoke and dust generated on the second side of the exposure product 11 during the exposure process to a certain extent, which can improve the exposure accuracy and quality.

[0118] In some embodiments, the light-transmitting film 40 is replaced according to process requirements. It is preferred to replace the light-transmitting film 40 regularly. For example, it is replaced once a day, or once every 1,000 exposures. The light-transmitting film 40 is in contact with the exposure product 1, and is easily adhered to the mask and exposure dust on the exposure product 1. Regular replacement of the light-transmitting film 40 can improve the exposure accuracy and quality.

[0119] In some embodiments, the exposure device in Examples 1-5 can be used to implement the exposure method in this embodiment, or the exposure method in this embodiment can be applied to the exposure device in Examples 1-5, or the exposure method in this embodiment can refer to and quote the technical solutions and features of the exposure devices in Examples 1-5 to form new embodiments.

[0120] Example 8

[0121] An exposure method comprises the following steps: providing an exposure platform 20 with a light-transmitting portion; arranging a first light-transmitting film 41 with air holes on the light-transmitting portion; placing an exposure product 1 on the first light-transmitting film 41 so that the second side of the exposure product 1 faces the first light-transmitting film 41; covering the exposure product 1 with a second light-transmitting film 42; vacuum-adsorbing the first light-transmitting film 41 and the exposure product 1 thereon; exposing the first side of the exposure product 1; exposing the second side of the exposure product 1; wherein the first side and the second side are opposite sides of the exposure product 1.

[0122] In this embodiment, the exposure product 1 is vacuum adsorbed through the first light-transmitting film 41 by a vacuum adsorption method, and the exposure product 1 can be quickly and stably adsorbed and fixed. In addition, the exposure product 1 can be simultaneously exposed on both sides of the exposure product 1 at the same workstation, which saves exposure time and improves exposure efficiency. Furthermore, the first light-transmitting film 41 can isolate the smoke and dust generated by the second side of the exposure product 1 during the exposure process to a certain extent, and the second light-transmitting film 42 can isolate the smoke and dust generated by the first side of the exposure product 1 during the exposure process to a certain extent, which can improve exposure accuracy and quality.

[0123] In some embodiments, the first light-transmitting film 41 and the second light-transmitting film 42 are replaced according to process requirements. Preferably, the first light-transmitting film 41 and the second light-transmitting film 42 are replaced regularly; for example, once a day, or once every 1,000 exposures. The first light-transmitting film 41 is in contact with the exposure product 1, and is prone to adhere to the mask and exposure smoke on the exposure product 1. Regular replacement of the first light-transmitting film 41 can improve exposure accuracy and quality. Similarly, the purpose of regular replacement of the second light-transmitting film 42 is the same.

[0124] In some embodiments, the exposure device in Examples 1-5 can be used to implement the exposure method in this embodiment, or the exposure method in this embodiment can be applied to the exposure device in Examples 1-5, or the exposure method in this embodiment can refer to and quote the technical solutions and features of the exposure devices in Examples 1-5 to form new embodiments.

[0125] Example 9

[0126] An exposure method includes the following steps: providing an exposure platform 20 with a light-transmitting portion; arranging a first light-transmitting film 41 with air holes on the light-transmitting portion, wherein the air holes are arranged at the edge of the first light-transmitting film 41; placing an exposure product 1 on the first light-transmitting film 41 so that the second side of the exposure product 1 faces the first light-transmitting film 41; covering the exposure product 1 with a second light-transmitting film 42; vacuum-adsorbing the edge of the first light-transmitting film 41 and the edge of the second light-transmitting film 42 to fix the exposure product 1 between the first light-transmitting film 41 and the second light-transmitting film 42; exposing the first side of the exposure product 1; exposing the second side of the exposure product 1; wherein the first side and the second side are opposite sides of the exposure product 1. In this embodiment, the exposure product 1 is vacuum-adsorbed through the first light-transmitting film 41 by a vacuum-adsorption method, so that the exposure product 1 can be adsorbed and fixed quickly and stably.

[0127] In this embodiment, the edge of the first light-transmitting film 41 and the edge of the first light-transmitting film 42 are vacuum-adsorbed, so that the edges of the two are attached to each other, and then the exposure product 1 located between the first light-transmitting film 41 and the first light-transmitting film 42 is clamped and fixed, so that the adsorption holes 22 and the air holes do not affect the exposure of the exposure product 1, thereby improving the exposure quality of the exposure product 1. In addition, the exposure product 11 can be simultaneously exposed on both sides of the exposure product 11 at the same workstation, saving exposure time and improving exposure efficiency. Furthermore, the first light-transmitting film 41 can isolate the smoke and dust generated by the second side of the exposure product 11 during the exposure process to a certain extent, and the second light-transmitting film 42 can isolate the smoke and dust generated by the first side of the exposure product 11 during the exposure process to a certain extent, which can improve the exposure accuracy and quality.

[0128] In some embodiments, the air holes are also arranged in the middle of the first light-transmitting film 41, and the middle of the first light-transmitting film 41 and the exposure product 1 thereon are vacuum-adsorbed; although this cannot reduce the influence of the adsorption holes 22 and the air holes on the exposure of the second side, by directly adsorbing and fixing the exposure product 1, the exposure product 1 can be fixed more stably and reliably, and the second light-transmitting film 42 can also be stably and reliably fixed at the same time, thereby preventing the exposure product 1 and the second light-transmitting film 42 from shifting.

[0129] In some embodiments, the first light-transmitting film 41 and the second light-transmitting film 42 are replaced according to process requirements. Preferably, the first light-transmitting film 41 and the second light-transmitting film 42 are replaced regularly; for example, once a day, or once every 1,000 exposures. The first light-transmitting film 41 is in contact with the exposure product 1, and is prone to adhere to the mask and exposure smoke on the exposure product 1. Regular replacement of the first light-transmitting film 41 can improve exposure accuracy and quality. Similarly, the purpose of regular replacement of the second light-transmitting film 42 is the same.

[0130] It should be noted that the exposure device in Examples 1-5 can be used to implement the exposure method in this embodiment, or the exposure method in this embodiment can be applied to the exposure device in Examples 1-5, or the exposure method in this embodiment can refer to and quote the technical solutions and features of the exposure devices in Examples 1-5 to form a new embodiment.

[0131] It should be noted that in all the above embodiments, the light-transmitting material may be light-transmitting glass or light-transmitting resin; for example, the light-transmitting material is high-transmittance optical glass or high-transmittance resin or high-transmittance organic film.

[0132] The transparent film 40 , the first light-transmitting film 41 and the second light-transmitting film 42 may be made of high-transmittance optical glass or high-transmittance resin or organic film, or other light-transmitting materials in the prior art that can meet optical requirements.

[0133] In the embodiment where the exposure platform 20 or the light-transmitting plate 30 or the light-transmitting film 40 or the first light-transmitting film 41 (generally referred to as adsorption support components) is used to support the exposure product 1, the exposure product 1 that is prone to wrinkles, such as battery cells and flexible circuit boards, can be flattened and adsorbed on the adsorption support component under the action of vacuum adsorption, which is beneficial to improving the exposure quality.

[0134] Example 10

[0135] An exposure method includes the following steps: providing an exposure platform 20 with a light-transmitting portion; arranging a light-transmitting support component on the light-transmitting portion; placing an exposure product 1 on the light-transmitting support component so that the second side of the exposure product 1 faces the light-transmitting support component; covering the exposure product 1 with a flattening component; exposing the first side of the exposure product 1; exposing the second side of the exposure product 1; wherein the first side and the second side are two opposite sides of the exposure product 1, the light-transmitting support component is a light-transmitting plate 30 or a second mask 121; and the flattening component is a flattening plate 50 or a light-transmitting plate 30 or a first mask 111. The exposure method in this embodiment is particularly suitable for battery cells or FPCs, and the exposure product 1 may not be fixed by adsorption, thereby avoiding the influence of the adsorption holes 22 on the exposure process.

[0136] In a specific embodiment, when the light-transmitting supporting component is a light-transmitting plate 30, the second exposure assembly 12 includes a second mask 121, and the distance between the second mask 121 and the second surface of the exposure product 1 is adjustable according to the parameters of the light-transmitting plate 30, and the parameters of the light-transmitting plate 30 include at least thickness, light transmittance or refractive index; when the flattening component is a light-transmitting plate 30, the first exposure assembly 11 includes a first mask 111, and the distance between the first mask 111 and the first surface of the exposure product 1 is adjustable according to the parameters of the light-transmitting plate 30, and the parameters of the light-transmitting plate 30 include at least thickness, light transmittance or refractive index.

[0137] In a specific embodiment, the light-transmitting supporting component is the second mask 121, and the flattening component is the first mask 111. The second mask 121 is used to support the exposure product 1, and the first mask 111 is used to flatten the exposure product 1. There is no need to additionally set up a light-transmitting supporting component and a flattening component. Before exposure, the first mask 111 is used to flatten the exposure product 1. During exposure, there is no need to remove the first mask 111 serving as the flattening component, thereby simplifying the exposure process, improving exposure accuracy, and improving exposure efficiency.

[0138] It should be noted that the exposure device in Examples 1-5 can be used to implement the exposure method in this embodiment, or the exposure method in this embodiment can be applied to the exposure device in Examples 1-5, or the exposure method in this embodiment can refer to and quote the technical solutions and features of the exposure devices in Examples 1-5 to form a new embodiment.

[0139] It should be noted that in all the embodiments of the present application, the exposure product 1 can at least be a battery cell.

[0140] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it. They cannot be used to limit the protection scope of the utility model. All equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. An exposure device, characterized in that: include: Exposure platform, used to carry and fix the exposure product; A first exposure component, used for exposing a first side of an exposure product; A second exposure component, used for exposing a second side of the exposure product; A controller, the controller being communicatively connected to the first exposure assembly and the second exposure assembly, and being used to control the opening and closing of the first exposure assembly and the opening and closing of the second exposure assembly; In the working state, the exposure product is fixedly arranged on the exposure platform, the first exposure component can expose the first side of the exposure product, and the second exposure component can expose the second side of the exposure product; The first surface and the second surface are two opposite surfaces of the exposure product.

2. The exposure device according to claim 1, characterized in that: The exposure platform is provided with a light-transmitting portion; In working state, the exposure product is located on the light-transmitting portion, the second surface of the exposure product is arranged facing the light-transmitting portion, and the light projected by the second exposure component can pass through the light-transmitting portion to expose the second surface of the exposure product.

3. The exposure device according to claim 2, characterized in that: The light-transmitting portion includes a light-transmitting hole penetrating the exposure platform.

4. The exposure device according to claim 3, characterized in that: The light-transmitting hole is a stepped hole, which includes a countersunk hole and a through hole located on the bottom wall of the countersunk hole, wherein the through hole occupies a part of the bottom wall of the countersunk hole, and the area on the bottom wall of the countersunk hole not occupied by the through hole is called a stepped platform; in a working state, the edge of the exposure product overlaps the stepped platform; The step platform is provided with a suction hole, and the suction hole is connected to a vacuum suction device; in a working state, the vacuum suction device can suction the edge of the exposure product through the suction hole.

5. The exposure device according to claim 3, characterized in that: A stopper is provided on the inner side wall of the light-transmitting hole; The stopper is provided with an adsorption hole, and the adsorption hole is connected to the vacuum adsorption device; In the working state, the edge of the exposure product overlaps the stopper, and the vacuum adsorption device can adsorb the edge of the exposure product through the adsorption hole.

6. The exposure device according to claim 2, characterized in that: The light-transmitting portion adopts any of the following structures: (1) The exposure platform is made of a light-transmitting material, and a portion of the exposure platform used to carry the exposure product constitutes the light-transmitting portion; (2) A light-transmitting plate is provided on the exposure platform, the exposure platform is made of a light-transmitting material, the light-transmitting plate is made of a light-transmitting material, and the light-transmitting portion includes the light-transmitting plate and a portion of the exposure platform occupied by the light-transmitting plate; (3) The light-transmitting portion includes a light-transmitting hole penetrating the exposure platform and a light-transmitting plate disposed in the light-transmitting hole, wherein the light-transmitting plate is made of a light-transmitting material; (4) The light-transmitting portion includes a light-transmitting hole penetrating the exposure platform and a light-transmitting plate disposed on the light-transmitting hole, and the light-transmitting plate is made of a light-transmitting material.

7. The exposure device according to claim 2, characterized in that: The light-transmitting portion is covered with a light-transmitting film, and the light-transmitting film is a light-transmitting material.

8. The exposure device according to claim 7, characterized in that: The light-transmitting film is provided with ventilation holes, the light-transmitting portion is provided with adsorption holes, and the adsorption holes are connected to a vacuum adsorption device; in a working state, the exposure product is arranged on the light-transmitting film, and the vacuum adsorption device can adsorb the exposure product through the adsorption holes and the ventilation holes.

9. The exposure device according to claim 8, characterized in that: The light-transmitting film includes a first area and a second area, the second area occupies the middle position of the light-transmitting film, the first area occupies the edge position of the light-transmitting film, the first area surrounds the second area, the air holes are arranged on the second area, and the adsorption holes are arranged on the local area of ​​the exposure platform facing the second area; or, the air holes are arranged on the first area, and the adsorption holes are arranged on the local area of ​​the exposure platform facing the first area.

10. The exposure device according to claim 2, characterized in that: A light-transmitting support component is arranged on the light-transmitting portion; In the working state, the exposure product is placed on the light-transmitting support component so that the second surface of the exposure product faces the light-transmitting support component; A flattening component may be provided on the exposure product to press on the first surface of the exposure product; Wherein, the light-transmitting support component is a light-transmitting plate or a second mask; and the flattening component is a flattening plate or a light-transmitting plate or a first mask.

11. The exposure device according to claim 1, characterized in that: The first exposure assembly adopts a projection structure, a proximity structure, or an LDI structure; the second exposure assembly adopts a projection structure, a proximity structure, or an LDI structure; The first exposure component and the second exposure component are arranged relative to each other, and in a working state, the exposure product is located between the first exposure component and the second exposure component; the first exposure component and the second exposure component are arranged relative to each other in at least one of the following situations: (1) The first exposure assembly and the second exposure assembly are arranged opposite to each other on the left and right sides, the first exposure assembly can project horizontal light in the direction of the second exposure assembly, and the second exposure assembly can project horizontal light in the direction of the first exposure assembly; (2) The first exposure assembly and the second exposure assembly are arranged vertically opposite to each other, the first exposure assembly can project vertical light in the direction of the second exposure assembly, and the second exposure assembly can project vertical light in the direction of the first exposure assembly.

Images